Cleaning system, exposure machine and cleaning method

Abstract

The present invention provides a cleaning system, an exposure machine and a cleaning method; the cleaning system is integrated in the exposure machine, the exposure machine comprises an immersion hood and a workbench which is movably arranged below the immersion hood; the cleaning system comprises an image acquisition unit, a cleaning unit and a control unit; the image acquisition unit is arranged on the surface of the workbench to acquire image information of a through hole of the immersion hood; the cleaning unit comprises a cleaning tube and a vacuum pump, the cleaning tube is arranged inside the workbench, and one end of the cleaning tube extends out from the top surface of the workbench, and the vacuum pump is connected to the other end of the cleaning tube; the control unit is electrically connected to the image acquisition unit and the vacuum pump; the control unit is used to determine whether the through hole is blocked according to the image information, control the workbench to move in a translational manner, so that one end of the cleaning tube is located directly below the blocked through hole, and control the vacuum pump to apply negative pressure to the blocked through hole through the cleaning tube to clean the immersion hood.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing technology, and in particular to a cleaning system, an exposure machine and a cleaning method. Background Art

[0002] There is ultrapure water in the immersion hood of the exposure machine, and a large number of water inlets and outlets are required to maintain a stable water flow. When some water inlets or outlets are blocked, the water flow in the immersion hood will be unstable, bubbles will exist, or the water flow will be unevenly distributed, which will cause defects on the wafer surface.

[0003] In order to detect and clean the clogged holes on the immersion hood, the existing immersion hood through-hole detection scheme is: shut down the exposure machine, detect the holes of the immersion hood one by one, and when a clogged hole is found, use manual cleaning to remove the contamination source.

[0004] However, in the above existing inspection and cleaning solutions, the manual cleaning and disassembly of the exposure machine are adopted, which increases a lot of workload for engineers, and the structure is easily damaged during the disassembly process. In addition, in the above existing solutions, the exposure machine needs to be shut down before inspection and cleaning, resulting in a long time for shutting down and restarting the exposure machine, which seriously affects the production capacity of the exposure machine. Summary of the invention

[0005] A main object of the present invention is to overcome at least one of the above-mentioned defects of the prior art and provide a cleaning system that can automatically clean the through holes of the immersion hood without stopping the exposure machine.

[0006] To achieve the above object, the present invention adopts the following technical solution:

[0007] According to one aspect of the present invention, a cleaning system is provided; wherein the cleaning system is integrated in an exposure machine, the exposure machine comprises an immersion hood and a workbench which is movably arranged below the immersion hood; the cleaning system comprises an image acquisition unit, a cleaning unit and a control unit; the image acquisition unit is arranged on the surface of the workbench to acquire image information of a through hole of the immersion hood; the cleaning unit comprises a cleaning tube and a vacuum pump, the cleaning tube is arranged inside the workbench, and one end thereof extends out from the top surface of the workbench, and the vacuum pump is connected to the other end of the cleaning tube; the control unit is electrically connected to the image acquisition unit and the vacuum pump; wherein the control unit is used to determine whether the through hole is blocked according to the image information, control the workbench to move in a translational manner so that one end of the cleaning tube is located directly below the blocked through hole, and control the vacuum pump to apply negative pressure to the blocked through hole through the cleaning tube to clean the immersion hood.

[0008] According to one embodiment of the present invention, the cleaning unit further includes a driving mechanism; the driving mechanism is arranged inside the workbench, and the driving mechanism is used to drive the cleaning tube to move so that one end of the cleaning tube can be telescopically extended from the top surface of the workbench; wherein the control unit is electrically connected to the driving mechanism, and controls the driving mechanism to drive the cleaning tube so that one end of the cleaning tube is connected to the blocked through hole.

[0009] According to one embodiment of the present invention, a driving fixing structure is provided on the cleaning tube, and the driving fixing structure is connected to the driving mechanism so that the driving mechanism drives the cleaning tube to move through the driving fixing structure.

[0010] According to one embodiment of the present invention, the driving mechanism includes a motor, a driving wheel, a driven wheel, a transmission belt and a connecting member, the motor is used to drive the driving wheel, the driving wheel is connected to the driven wheel through the transmission belt, and the connecting member is connected between the transmission belt and the cleaning tube.

[0011] According to one embodiment of the present invention, a joint is provided at one end of the cleaning tube extending out of the top surface of the workbench, a buckle is provided on the top surface of the workbench, and the joint provided at one end of the cleaning tube passes through the buckle so that the buckle is fixed to the joint in one-way clamping.

[0012] According to one embodiment of the present invention, the cleaning unit further includes a positioning guide tube; the positioning guide tube is arranged inside the workbench and has a first section and a second section, the first section extends in a horizontal direction, one end of the second section is connected to the first section, and the other end is bent and extends upward; wherein the cleaning tube is passed through the positioning guide tube so that one end of the cleaning tube remains extending out of the top surface of the workbench in a vertical direction, and the other end extends in a horizontal direction.

[0013] According to one embodiment of the present invention, the cleaning unit further includes a control valve group; the control valve group is arranged on the cleaning pipe; wherein the control unit is electrically connected to the control valve group to control the control valve group to adjust the opening and closing and flow rate of the cleaning pipe.

[0014] According to one embodiment of the present invention, the negative pressure flow rate of the vacuum pump through the cleaning tube is 10L / min to 30L / min.

[0015] According to one embodiment of the present invention, the image acquisition unit is a camera; wherein the camera has a variable focus function; and / or the resolution of the camera is greater than or equal to 720p.

[0016] According to one embodiment of the present invention, the image acquisition unit is disposed on a side surface of the workbench, and the image acquisition unit is arranged adjacent to an end of the cleaning tube extending out of a top surface of the workbench.

[0017] According to one embodiment of the present invention, the control unit is preset with image reference information, and the image reference information represents an image when the through hole of the immersion hood is not blocked; wherein the control unit compares the image reference information with the image information acquired by the image acquisition unit to determine whether the through hole is blocked.

[0018] According to one embodiment of the present invention, the cleaning system further includes a self-cleaning unit, which includes a self-cleaning tube and a cleaning liquid source; the self-cleaning tube is connected to the cleaning tube via a plurality of interfaces; the cleaning liquid source is connected to the self-cleaning tube for storing and supplying cleaning liquid; wherein the control unit is electrically connected to the cleaning liquid source for controlling the cleaning liquid source to transport the cleaning liquid to the self-cleaning tube and spray it into the cleaning tube via the plurality of interfaces.

[0019] According to one embodiment of the present invention, the cleaning solution contains alcohol.

[0020] According to one embodiment of the present invention, a spray structure is provided at one end of the interface connected to the cleaning pipe, so that the cleaning liquid flowing through the spray structure is sprayed into the cleaning pipe in a spray shape.

[0021] It can be seen from the above technical solutions that the advantages and positive effects of the cleaning system proposed by the present invention are:

[0022] The cleaning system proposed in the present invention includes an image acquisition unit, a cleaning unit and a control unit. The control unit can determine whether the through hole of the immersion hood is blocked based on the image information collected by the image acquisition unit, and can control the cleaning system to apply negative pressure to the blocked through hole, so that the pollution causing the blockage of the through hole is removed. Through the above design, the present invention can detect the real-time status of the through hole of the immersion hood without stopping the exposure machine, reducing the production capacity problems caused by stopping and disassembling the exposure machine. In addition, the present invention can realize automatic cleaning of the blocked through hole of the immersion hood, avoiding the huge waste of manpower caused by disassembly and manual cleaning. The cleaning system proposed in the present invention has the advantages of high blockage detection efficiency, timely and accurate detection, and automatic cleaning.

[0023] Another main object of the present invention is to overcome at least one of the above-mentioned defects of the prior art and provide an exposure machine having the cleaning system proposed by the present invention.

[0024] To achieve the above object, the present invention adopts the following technical solution:

[0025] According to one aspect of the present invention, an exposure machine is provided, which includes a workbench and an immersion hood, wherein the workbench is movably disposed below the immersion hood; wherein the exposure machine also includes the cleaning system proposed in the present invention and described in detail in the above embodiment.

[0026] It can be seen from the above technical solution that the advantages and positive effects of the exposure machine proposed by the present invention are:

[0027] The exposure machine proposed in the present invention can complete the inspection and cleaning of the through hole of the immersion hood without stopping the machine by adopting the cleaning system proposed in the present invention. Through the above design, the exposure machine proposed in the present invention has the advantages of high production capacity, less labor consumption for inspection and cleaning, and high product yield.

[0028] Another main purpose of the present invention is to overcome at least one defect of the above-mentioned prior art and provide a cleaning method.

[0029] To achieve the above object, the present invention adopts the following technical solution:

[0030] According to one aspect of the present invention, a cleaning method is provided; wherein the cleaning method is applied to an exposure machine including the cleaning system proposed by the present invention and described in the above embodiment, and the cleaning method comprises:

[0031] Collecting image information of the through hole of the immersion hood by an image acquisition unit;

[0032] Determining whether the through hole is blocked according to the image information by a control unit;

[0033] The control unit controls the workbench to move in translation so that one end of the cleaning tube is located directly below the blocked through hole;

[0034] The control unit controls the vacuum pump to apply negative pressure to the blocked through hole through the cleaning pipe to clean the immersion hood.

[0035] It can be seen from the above technical solution that the advantages and positive effects of the cleaning method proposed by the present invention are:

[0036] The cleaning method proposed in the present invention detects and cleans the through hole of the immersion hood of the exposure machine by adopting the cleaning system proposed in the present invention, and can complete the detection and cleaning of the through hole of the immersion hood without stopping the machine. Through the above design, the cleaning method proposed in the present invention can ensure the production capacity of the exposure machine while realizing the cleaning function, reduce the labor consumption of detection and cleaning, and improve the product yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Various objects, features and advantages of the present invention will become more apparent by considering the following detailed description of preferred embodiments of the present invention in conjunction with the accompanying drawings. The accompanying drawings are merely exemplary illustrations of the present invention and are not necessarily drawn to scale. In the accompanying drawings, the same reference numerals always refer to the same or similar parts. Among them:

[0038] Figure 1 is a schematic diagram showing an arrangement of a cleaning system disposed on an exposure machine according to an exemplary embodiment;

[0039] Figure 2 yes Figure 1 A system block diagram of the cleaning system shown;

[0040] Figure 3 is a schematic diagram showing an arrangement of a cleaning system disposed on an exposure machine according to another exemplary embodiment;

[0041] Figure 4 yes Figure 3 An enlarged view of a portion of the cleaning system is shown.

[0042] The following are the descriptions of the reference numerals:

[0043] 110. Immersion hood;

[0044] 111.Through hole;

[0045] 120. Workbench;

[0046] 130. Exhaust pipe;

[0047] 140.Interactive interface;

[0048] 150. Automation systems;

[0049] 200. Image acquisition unit;

[0050] 310. Cleaning pipe;

[0051] 311. Drive fixed structure;

[0052] 312. Joint;

[0053] 313. Buckle;

[0054] 320. Vacuum pump;

[0055] 331. Driving wheel;

[0056] 332. Driven wheel;

[0057] 333. Transmission belt;

[0058] 334. Connectors;

[0059] 340. Positioning guide tube;

[0060] 341. Paragraph 1;

[0061] 342. Paragraph 2;

[0062] 350. Control valve group;

[0063] 400. Control unit;

[0064] 510. Self-cleaning pipe;

[0065] 511. Interface;

[0066] 512. Spray structure;

[0067] 520. Cleaning fluid source;

[0068] 600. Server;

[0069] 610. Terminal equipment;

[0070] 700. Plant purification device;

[0071] d.Distance. DETAILED DESCRIPTION

[0072] Typical embodiments that embody the features and advantages of the present invention will be described in detail in the following description. It should be understood that the present invention can have various changes in different embodiments without departing from the scope of the present invention, and the descriptions and drawings therein are essentially for illustrative purposes rather than for limiting the present invention.

[0073] In the following description of different exemplary embodiments of the present invention, reference is made to the accompanying drawings, which form a part of the present invention and in which different exemplary structures, systems and steps that can implement multiple aspects of the present invention are shown by way of example. It should be understood that other specific schemes of components, structures, exemplary devices, systems and steps can be used, and structural and functional modifications can be made without departing from the scope of the present invention. Moreover, although the terms "above", "between", "within", etc. may be used in this specification to describe different exemplary features and elements of the present invention, these terms are used herein only for convenience, such as according to the direction of the examples described in the accompanying drawings. Nothing in this specification should be construed as requiring a specific three-dimensional orientation of the structure to fall within the scope of the present invention.

[0074] See also Figure 1, which is a schematic diagram of the arrangement of the cleaning system proposed by the present invention in an exposure machine. In this exemplary embodiment, the cleaning system proposed by the present invention is described by taking the application to an exposure machine as an example. It is easy for those skilled in the art to understand that in order to apply the relevant design of the present invention to other types of equipment or other processes, various modifications, additions, substitutions, deletions or other changes are made to the specific embodiments described below, and these changes are still within the scope of the principle of the cleaning system proposed by the present invention.

[0075] like Figure 1 As shown, in this embodiment, the cleaning system proposed by the present invention can be integrated into an exposure machine, and the exposure machine includes a workbench 120 and an immersion hood 110, and the workbench 120 can be arranged below the immersion hood 110 in a translational manner. The cleaning system includes an image acquisition unit 200, a cleaning unit and a control unit 400. Figures 2 to 4 , Figure 2 A system block diagram of a cleaning system that can embody the principles of the present invention is representatively shown in FIG. Figure 3 2 represents another exemplary embodiment that can embody the principles of the present invention, and specifically shows a schematic diagram of the arrangement of the cleaning system disposed on the exposure machine in this embodiment; Figure 4 Representatively shown in Figure 3 The following will describe in detail the structure, connection mode and functional relationship of the main components of the cleaning system proposed by the present invention in combination with the above-mentioned drawings.

[0076] like Figure 1 and Figure 2 As shown, in this embodiment, the image acquisition unit 200 is arranged on the surface of the workbench 120, and the image acquisition unit 200 can be used to collect image information of the through hole 111 of the immersion hood 110. The cleaning unit includes a cleaning tube 310 and a vacuum pump 320. The cleaning tube 310 is arranged inside the workbench 120, one end of the cleaning tube 310 extends from the top surface of the workbench 120, and the vacuum pump 320 is connected to the other end of the cleaning tube 310. In particular, for the convenience of description, the end of the cleaning tube 310 extending from the top surface of the workbench 120 is defined as its first end, and the other end of the cleaning tube 310 is defined as the second end. The control unit 400 is electrically connected to the image acquisition unit 200 and the vacuum pump 320. Accordingly, the control unit 400 can determine whether the through hole 111 is blocked according to the image information collected by the image acquisition unit 200. If it is determined that a certain through hole 111 is blocked, the control unit 400 can control the workbench 120 to translate so that the first end of the cleaning tube 310 is located directly below the blocked through hole 111, and control the vacuum pump 320 to apply negative pressure to the blocked through hole 111 through the cleaning tube 310, so as to clean the immersion hood 110. For the convenience of description, the blocked through hole 111 to be cleaned is defined as the target through hole below.

[0077] Through the above design, the present invention can detect the real-time status of the through hole 111 of the immersion hood 110 without stopping the exposure machine, thereby reducing the production capacity problems caused by stopping and disassembling the exposure machine. In addition, the present invention can realize automatic cleaning of the blocked through hole 111 of the immersion hood 110, thereby avoiding the huge waste of manpower caused by disassembly and manual cleaning. The cleaning system proposed by the present invention has the advantages of high blockage detection efficiency, timely and accurate detection, and automatic cleaning.

[0078] In addition, taking the process of "coating-exposure-development" of wafers as an example, the existing detection scheme is to determine whether the product defects are caused by the blockage of the through hole 111 of the immersion hood 110 during the exposure stage after the defects appear in the final product after development, and then shut down the exposure machine and manually clean the through hole 111 of the immersion hood 110. In contrast, the cleaning system proposed in the present invention is essentially different and significantly different from the existing scheme. The present invention directly performs real-time, convenient and accurate detection of the through hole 111 of the immersion hood 110 without shutting down the exposure machine. Once the through hole 111 is found to be blocked, it can be cleaned directly without stopping the machine, realizing the detection and cleaning functions of early detection and early cleaning, and avoiding the immersion hood 110 with blocked through hole 111 from continuously affecting the final yield of one or even multiple batches of products.

[0079] Alternatively, if Figure 1 As shown, in this embodiment, the cleaning unit may further include a driving mechanism. Specifically, the driving mechanism is arranged inside the workbench 120, and the driving mechanism can be used to drive the cleaning tube 310 to move, so that the first end of the cleaning tube 310 can be extended from the top surface of the workbench 120 telescopically, that is, the stroke adjustment and control of the cleaning tube 310 extending from the top surface of the workbench 120 is realized. For example, taking the distance d between the immersion hood 110 and the workbench 120 as 5cm as an example, and taking the first end of the cleaning tube 310 being roughly flush with the top surface of the workbench 120 when the cleaning action is not performed as an example, if the first end of the cleaning tube 310 needs to contact the immersion hood 110 during cleaning, the driving stroke of the driving mechanism driving the cleaning tube 310 is approximately 5cm. On this basis, the control unit 400 is electrically connected to the driving mechanism, and the control unit 400 can control the driving mechanism to drive the cleaning tube 310 so that the first end of the cleaning tube 310 is connected to the target through hole. Through the above design, the present invention can realize the telescopic regulation of the cleaning tube 310. When the cleaning unit is not working, the cleaning tube 310 is retracted to avoid affecting the normal operation of the immersion hood 110. When the cleaning unit is working, the cleaning tube 310 is extended to achieve its approach or contact with the target through hole, so that the negative pressure environment acts more fully on the target through hole, further optimizing the cleaning effect.

[0080] As mentioned above, in this embodiment, the cleaning tube 310 can be made of a plastic hose so that it will not break or be damaged during the movement and bending process between the horizontal direction and the vertical direction. The bending design will be described in the following content and will not be described in detail here. In other embodiments, the cleaning tube 310 can also be made of hoses of other materials, or can be made of hard pipes, which are not limited to this embodiment.

[0081] Furthermore, if Figure 1 As shown, based on the design that the cleaning unit includes a driving mechanism, in this embodiment, a driving fixed structure 311 can be provided on the cleaning tube 310, and the driving fixed structure 311 is connected to the driving mechanism, so that the driving mechanism drives the cleaning tube 310 to move through the driving fixed structure 311. Among them, the driving fixed structure 311 can be, for example, a bracket or a hard pipe, and the cleaning tube 310 can be partially arranged or penetrated on the bracket or pipe. Through the above design, since the cleaning tube 310 in this embodiment adopts a plastic hose, the driving fixed structure 311 can form a structural connection between the soft cleaning tube 310 and the driving mechanism, further optimizing the driving effect of the cleaning tube 310.

[0082] Furthermore, if Figure 1 As shown, based on the design that the cleaning unit includes a driving mechanism, in this embodiment, the driving mechanism may include a motor, a driving wheel, a driven wheel 332 and a transmission belt 333. Specifically, the motor is arranged on the workbench 120 and is used to drive the driving wheel 331. The driven wheel 332 is arranged on the workbench 120. The transmission belt 333 is connected between the driving wheel 331 and the driven wheel 332. On this basis, the cleaning tube 310 can be connected to the transmission belt 333 through a connector 334.

[0083] Furthermore, if Figure 1 As shown, based on the design that the driving mechanism includes a transmission belt 333 and a driving fixed structure 311 is provided on the cleaning tube 310, in this embodiment, the driving fixed structure 311 can be connected to the transmission belt 333 through a connecting piece.

[0084] Furthermore, based on the design that the driving mechanism includes a motor, in this embodiment, the motor can be a micro motor.

[0085] Alternatively, if Figure 1 As shown, in this embodiment, the first end of the cleaning tube 310 may be provided with a joint 312. Correspondingly, the top surface of the workbench 120 may be provided with a buckle 313. On this basis, the joint 312 provided at the first end of the cleaning tube 310 passes through the buckle 313, and the buckle 313 is fixed with the joint 312 in one direction (that is, the buckle 313 stops the joint 312 from retracting downward).

[0086] Alternatively, if Figure 1 As shown, in this embodiment, the cleaning unit may further include a positioning guide tube 340. Specifically, the positioning guide tube 340 is disposed inside the workbench 120 and has a first section 341 and a second section 342. The first section 341 extends in the horizontal direction, and one end of the second section 342 is connected to the first section 341, and the other end is bent and extends upward. The cleaning tube 310 is inserted into the positioning guide tube 340 so that the first end of the cleaning tube 310 remains vertically extended from the top surface of the workbench 120, and the second end extends in the horizontal direction.

[0087] It should be noted that, in this embodiment, the first end of the cleaning tube 310 extends in the vertical direction, and the second end of the cleaning tube 310 extends in the horizontal direction and is connected to the vacuum pump 320. In other embodiments, on the basis of the structure that the immersion hood 110 is located above the workbench 120, on the premise that the first end of the cleaning tube 310 extends in the vertical direction, the second end of the cleaning tube 310 can also extend in other directions, such as an inclined direction or a vertical direction, and is not limited to the horizontal direction in this embodiment. In other words, in this embodiment, the design that the second end of the cleaning tube 310 extends in the horizontal direction can be suitable for arranging the vacuum pump 320 on the approximately same horizontal plane of the workbench 120. In other embodiments, according to different arrangement requirements, the extension direction of the cleaning tube 310 can also be flexibly adjusted. For example, if the vacuum pump 320 is arranged below the workbench 120, the second end of the cleaning tube 310 can also extend downward in the vertical direction. On this basis, the above-mentioned positioning guide tube 340 may not be provided, and it is not limited to this embodiment.

[0088] Alternatively, if Figure 1 and Figure 2 As shown, in this embodiment, the cleaning unit may further include a control valve group 350, which is disposed on the cleaning tube 310. On this basis, the control unit 400 is electrically connected to the control valve group 350, and the control unit 400 can control the control valve group 350 to adjust the opening and closing and flow rate (negative pressure flow rate of vacuuming) of the cleaning tube 310.

[0089] Further, based on the design that the cleaning unit includes the control valve group 350, in this embodiment, the control valve group 350 may include a solenoid valve.

[0090] Optionally, in this embodiment, the negative pressure flow rate of the vacuum pump 320 through the cleaning tube 310 can be 10L / min to 30L / min, such as 10L / min, 15L / min, 25L / min, 30L / min, etc. In other embodiments, the negative pressure flow rate of the cleaning tube 310 can be less than 10L / min, or greater than 30L / min, such as 9L / min, 32L / min, etc., and is not limited to this embodiment.

[0091] Furthermore, based on the design that the negative pressure flow rate of vacuuming the cleaning tube 310 is 10 L / min to 30 L / min, in the present embodiment, the negative pressure flow rate of vacuuming the cleaning tube 310 can be further 20 L / min.

[0092] Alternatively, if Figure 2 As shown, in this embodiment, the vacuum pump 320 can be connected to the second end of the cleaning pipe 310 through the suction end, and the exhaust end of the vacuum pump 320 can be connected to the external purification device through the exhaust pipe 130 to collect and purify the exhaust gas during the vacuuming process. The exhaust pipe 130 can use the exhaust pipe 130 of the exposure machine, and the external purification device can be the factory purification device 700 connected to the exposure machine.

[0093] Optionally, in this embodiment, the image acquisition unit 200 can directly acquire the image of the entire bottom of the immersion hood 110, and send the corresponding image information to the control unit 400. Accordingly, the control unit 400 can compare the image information representing the entire bottom of the immersion hood 110, for example, it can be uploaded to the server 600 for contamination blockage position retrieval, and after the specific position of the target through hole is determined, the control unit 400 issues a control instruction to perform translation of the workbench 120 and cleaning of the cleaning unit.

[0094] Optionally, in this embodiment, the image acquisition unit 200 may include a camera. In other embodiments, the image acquisition unit 200 may also include an image acquisition device such as a CCD image sensor or an infrared sensor, and is not limited to this embodiment.

[0095] Furthermore, based on the design that the image acquisition unit 200 includes a camera, in this embodiment, the camera may have a zoom function. Through the above design, the present invention can use the camera to achieve zoom shooting, further optimize the collection of image information, and make the detection of the through hole 111 of the immersion hood 110 more accurate and sensitive. In other embodiments, when the image acquisition unit 200 includes a camera, according to different shooting needs, the camera may also include other camera functions, and is not limited to this embodiment.

[0096] Further, based on the design that the image acquisition unit 200 includes a camera, in this embodiment, the resolution of the camera can be greater than or equal to 720p, such as 720p, 1080p, etc. Through the above design, the present invention can use the camera to achieve high-definition image shooting, further optimize the collection of image information, and make the detection of the through hole 111 of the immersion hood 110 more accurate and sensitive.

[0097] Optionally, in this embodiment, the image acquisition unit 200 may be powered by a machine power supply of the exposure machine, or may have its own independent power supply.

[0098] Optionally, in this embodiment, the image acquisition unit 200 can be arranged on the side of the workbench 120, and the image acquisition unit 200 and the first end of the cleaning tube 310 (such as the buckle 313) can be arranged adjacent to each other. For example, the image acquisition unit 200 and the cleaning unit can be arranged on the side of the same side of the workbench 120, and on this basis, the buckle 313 is adjacent to the image acquisition unit 200. Through the above design, when the image acquisition unit 200 performs image acquisition on a certain through hole 111, and the control unit 400 determines that the through hole 111 is blocked, since the first end of the cleaning tube 310 is connected to the image acquisition unit 200, there is no need to drive the workbench 120 to translate again, and the cleaning unit can be directly controlled to perform the cleaning action, further improving the working efficiency of the present invention.

[0099] Optionally, in this embodiment, the control unit 400 may be preset with image reference information, which can represent an image when the through hole 111 of the immersion hood 110 is not blocked. Accordingly, the control unit 400 compares the image reference information with the image information collected by the image collection unit 200 to determine whether the through hole 111 of the immersion hood 110 is blocked.

[0100] Optionally, in this embodiment, the cleaning system proposed in the present invention can also perform feedback control of the cleaning action according to the product defects exhibited by the final product. Specifically, when the automation system 150 of the wafer production line extracts the wafer surface defect detection information (such as WIS image) of the developer, it can determine whether the through hole 111 of the immersion hood 110 of the exposure machine is blocked. When it is determined that the through hole 111 of the immersion hood 110 is blocked, the control unit 400 can control the workbench 120 to translate to the bottom of the immersion hood 110 according to the feedback of the automation system 150, and control the image acquisition unit 200 to collect image information of the through hole 111 of the immersion hood 110. The control unit 400 can use the image algorithm to determine whether each through hole 111 is blocked. If a through hole 111 is blocked, the control unit 400 controls the cleaning unit to perform the cleaning action.

[0101] Optionally, in this embodiment, the control unit 400 can be integrated into the control system 160 of the exposure machine, such as the CPU of the exposure machine. On this basis, the control unit 400 can be connected to the automation system 150 and the server 600 of the production line through the control system 160 of the exposure machine, and can realize information interaction and remote control with terminal devices 610 such as personal PCs, mobile phones, and Pads through the server 600. In addition, the control unit 400 can also be connected to the interactive interface 140 of the exposure machine, such as the control panel and display screen of the exposure machine, to display the monitoring results and cleaning status.

[0102] Optionally, in this embodiment, when the exposure machine performs exposure processing on multiple batches of wafers in succession, the automation system 150 of the production line will send instructions to the control system 160 of the exposure machine, and the control unit 400 of the cleaning system can control the image acquisition unit 200 and the cleaning unit to inspect and clean the immersion hood 110 during the idle time between adjacent batches of the exposure machine.

[0103] Optionally, in this embodiment, the control unit 400 may be provided with a periodic information feedback function. For example, a time interval may be preset in the control unit 400, and the immersion hood 110 of the exposure machine may be regularly monitored according to the time interval. The information may be fed back to the automation system 150 of the production line to assist in determining whether cleaning is required, thereby helping to prevent product defects.

[0104] Optionally, in this embodiment, the control unit 400 can upload the data of each inspection and cleaning to the server 600. The server 600 can use a big data algorithm to calculate the regularity of the blockage of the through hole 111 of the immersion hood 110. Based on this, when maintaining the exposure machine, maintenance items that deal with the above-mentioned blockage regularity can be added accordingly, thereby reducing the probability of blockage of the through hole 111.

[0105] Based on the above detailed description of an exemplary embodiment of the cleaning system proposed by the present invention, Figure 3 and Figure 4 , another exemplary embodiment of the cleaning system proposed by the present invention is described.

[0106] like Figure 3 and Figure 4 As shown, Figure 3 The schematic diagram of the arrangement of the cleaning system disposed on the exposure machine in this embodiment is representatively shown; Figure 4 A partial enlarged view of the cleaning pipe 310 is representatively shown. The cleaning system proposed by the present invention is substantially the same as the design of the first embodiment described above. The main differences between this embodiment and the first embodiment described above will be described below.

[0107] like Figure 3 and Figure 4 As shown, in this embodiment, the cleaning system proposed by the present invention may also include a self-cleaning unit. Specifically, the self-cleaning unit includes a self-cleaning tube 510 and a cleaning liquid source 520. The self-cleaning tube 510 is connected to the cleaning tube 310 through a plurality of interfaces 511. The cleaning liquid source 520 is connected to the self-cleaning tube 510 for storing and supplying cleaning liquid. On this basis, the control unit 400 is electrically connected to the cleaning liquid source 520, and the control unit 400 can control the cleaning liquid source 520 to transport the cleaning liquid to the self-cleaning tube 510, and spray it into the cleaning tube 310 via a plurality of interfaces 511. Through the above design, the present invention can utilize the self-cleaning unit to realize the self-cleaning function of the cleaning system, thereby extending the continuous use time of the equipment, reducing the number and frequency of maintenance of the cleaning system, and further improving work efficiency.

[0108] Optionally, in this embodiment, the cleaning liquid may contain alcohol. On this basis, the cleaning liquid source 520 may be an alcohol tank.

[0109] Alternatively, if Figure 4 As shown, in this embodiment, the end of the interface 511 connected to the cleaning tube 310 may be provided with a spray structure 512. Accordingly, when the cleaning liquid enters the cleaning tube 310 from the self-cleaning tube 510 via the interface 511, it can be sprayed into the cleaning tube 310 in a spray shape by flowing through the spray structure 512. Through the above design, the spray coverage area of ​​the cleaning liquid on the inner wall of the cleaning tube 310 can be further increased, thereby further optimizing the self-cleaning function of the present invention.

[0110] It should be noted that the cleaning systems shown in the drawings and described in this specification are only a few examples of many cleaning systems that can adopt the principles of the present invention. It should be clearly understood that the principles of the present invention are by no means limited to any details or any components of the cleaning systems shown in the drawings or described in this specification.

[0111] In summary, the cleaning system proposed in the present invention includes an image acquisition unit, a cleaning unit and a control unit. The control unit can determine whether the through hole of the immersion hood is blocked based on the image information collected by the image acquisition unit, and can control the cleaning system to apply negative pressure to the blocked through hole, so that the pollution causing the blockage of the through hole is removed. Through the above design, the present invention can detect the real-time status of the through hole of the immersion hood without stopping the exposure machine, reducing the production capacity problems caused by stopping and disassembling the exposure machine. In addition, the present invention can realize automatic cleaning of the blocked through hole of the immersion hood, avoiding the huge waste of manpower caused by disassembly and manual cleaning. The cleaning system proposed in the present invention has the advantages of high blockage detection efficiency, timely and accurate detection, and automatic cleaning.

[0112] Based on the above detailed description of an exemplary embodiment of the cleaning system proposed in the present invention, an exemplary embodiment of the exposure machine proposed in the present invention will be described below.

[0113] In this embodiment, the exposure machine proposed in the present invention can be a workbench, an immersion hood, and a cleaning system proposed in the present invention and described in detail in the above embodiments. Specifically, the workbench can be arranged below the immersion hood in a translational manner. The cleaning pipe of the cleaning system is arranged on the workbench, one end of the cleaning pipe extends from the top surface of the workbench, and the vacuum pump is connected to the other end of the cleaning pipe. The control unit of the cleaning system is electrically connected to the image acquisition unit and the vacuum pump. Accordingly, the control unit can determine whether the through hole is blocked according to the image information collected by the image acquisition unit. If a through hole is determined to be blocked, the control unit can control the translation of the workbench so that the first end of the cleaning pipe is located directly below the blocked through hole, and control the vacuum pump to apply negative pressure to the blocked through hole through the cleaning pipe, so as to clean the immersion hood. Through the above design, the exposure machine proposed in the present invention has the advantages of high production capacity, less labor consumption for detection and cleaning, and high product yield.

[0114] It should be noted that the exposure machines shown in the drawings and described in this specification are only a few examples of many exposure machines that can adopt the principles of the present invention. It should be clearly understood that the principles of the present invention are by no means limited to any details or any components of the exposure machines shown in the drawings or described in this specification.

[0115] In summary, the exposure machine proposed in the present invention can complete the inspection and cleaning of the through-holes of the immersion hood without stopping the machine by adopting the cleaning system proposed in the present invention. Through the above design, the exposure machine proposed in the present invention has the advantages of high production capacity, less labor consumption in inspection and cleaning, and high product yield.

[0116] Based on the above detailed description of several exemplary embodiments of the cleaning system and the exposure machine proposed in the present invention, an exemplary embodiment of the cleaning method proposed in the present invention will be described below.

[0117] In this embodiment, the cleaning method proposed in the present invention can be applied to an exposure machine including a cleaning system proposed in the present invention and described in detail in the above embodiments. The cleaning method comprises:

[0118] Collecting image information of the through hole of the immersion hood by an image acquisition unit;

[0119] The control unit determines whether the through hole is blocked according to the image information;

[0120] The control unit controls the workbench to move horizontally so that one end of the cleaning tube is located directly below the blocked through hole;

[0121] The control unit controls the vacuum pump to apply negative pressure to the blocked through hole through the cleaning pipe to clean the immersion hood.

[0122] It should be noted that the cleaning methods shown in the drawings and described in this specification are only a few examples of the many cleaning methods that can adopt the principles of the present invention. It should be clearly understood that the principles of the present invention are by no means limited to any details or any steps of the cleaning methods shown in the drawings or described in this specification.

[0123] In summary, the cleaning method proposed in the present invention detects and cleans the through holes of the immersion hood of the exposure machine by adopting the cleaning system proposed in the present invention, and can complete the detection and cleaning of the through holes of the immersion hood without stopping the machine. Through the above design, the cleaning method proposed in the present invention can ensure the production capacity of the exposure machine while realizing the cleaning function, reduce the labor consumption of detection and cleaning, and improve the product yield.

[0124] The above describes and / or illustrates in detail exemplary embodiments of the cleaning system, exposure machine and cleaning method proposed in the present invention. However, the embodiments of the present invention are not limited to the specific embodiments described herein. On the contrary, the components and / or steps of each embodiment can be used independently and separately from other components and / or steps described herein. Each component and / or each step of an embodiment can also be used in combination with other components and / or steps of other embodiments. When introducing the elements / components / etc. described and / or illustrated herein, the terms "one", "an" and "above" are used to indicate the presence of one or more elements / components / etc. The terms "comprise", "include" and "have" are used to indicate an open-ended inclusion and mean that in addition to the listed elements / components / etc., there may be other elements / components / etc. In addition, the terms "first" and "second" in the claims and the specification are used only as marks and are not numerical restrictions on their objects.

[0125] Although the cleaning system, exposure machine and cleaning method of the present invention have been described according to different specific embodiments, those skilled in the art will recognize that the implementation of the present invention can be modified within the spirit and scope of the claims.

Claims

1. A cleaning system, characterized in that: The cleaning system is integrated in an exposure machine, wherein the exposure machine comprises an immersion hood and a workbench which is movably arranged below the immersion hood; the cleaning system comprises: An image acquisition unit, disposed on the surface of the workbench, for acquiring image information of the through hole of the immersion hood; The cleaning unit comprises a cleaning tube and a vacuum pump. The cleaning tube is arranged inside the workbench and one end of the cleaning tube extends out from the top surface of the workbench. The vacuum pump is connected to the other end of the cleaning tube. The cleaning unit further comprises: a driving mechanism arranged inside the workbench, the driving mechanism is used to drive the cleaning tube to move so that one end of the cleaning tube can extend out from the top surface of the workbench in a telescopic manner. as well as A control unit, electrically connected to the image acquisition unit and the vacuum pump, wherein the control unit is electrically connected to the driving mechanism; The control unit is used to determine whether the through hole is blocked according to the image information, control the workbench to translate and control the driving mechanism to drive the cleaning tube, so that one end of the cleaning tube is located directly below the blocked through hole and one end of the cleaning tube is connected to the blocked through hole, and control the vacuum pump to apply negative pressure to the blocked through hole through the cleaning tube to clean the immersion hood; The cleaning system also includes a self-cleaning unit, which includes: a self-cleaning tube, connected to the cleaning tube via a plurality of interfaces; and a cleaning liquid source, connected to the self-cleaning tube, for storing and supplying cleaning liquid; wherein the control unit is electrically connected to the cleaning liquid source, for controlling the cleaning liquid source to transport the cleaning liquid to the self-cleaning tube, and spraying the cleaning liquid into the cleaning tube via the plurality of interfaces.

2. The cleaning system according to claim 1, characterized in that The cleaning tube is provided with a driving and fixing structure, and the driving and fixing structure is connected to the driving mechanism, so that the driving mechanism drives the cleaning tube to move through the driving and fixing structure.

3. The cleaning system according to claim 1, characterized in that The driving mechanism comprises a motor, a driving wheel, a driven wheel, a transmission belt and a connecting piece. The motor is used to drive the driving wheel. The driving wheel is connected to the driven wheel through the transmission belt. The connecting piece is connected between the transmission belt and the cleaning pipe.

4. The cleaning system according to claim 1, characterized in that: The end of the cleaning tube extending out of the top surface of the workbench is provided with a joint, the top surface of the workbench is provided with a buckle, and the joint provided at one end of the cleaning tube passes through the buckle so that the buckle is fixed with the joint in one-way clamping.

5. The cleaning system according to claim 1, characterized in that: The cleaning unit also comprises: A positioning guide tube is arranged inside the workbench and has a first section and a second section, wherein the first section extends in a horizontal direction, and one end of the second section is connected to the first section and the other end is bent and extends upward; Wherein, the cleaning tube is inserted into the positioning guide tube so that one end of the cleaning tube is kept extending out of the top surface of the workbench in a vertical direction, and the other end is extended in a horizontal direction.

6. The cleaning system according to claim 1, characterized in that The cleaning unit also comprises: A control valve group is arranged on the cleaning pipe; Wherein, the control unit is electrically connected to the control valve group to control the control valve group to adjust the opening and closing and flow rate of the cleaning pipe.

7. The cleaning system according to claim 1, characterized in that The negative pressure flow rate of the vacuum pump through the cleaning pipe is 10L / min to 30L / min.

8. The cleaning system according to claim 1, characterized in that The image acquisition unit is a camera; wherein the camera has a variable focus function; and / or the resolution of the camera is greater than or equal to 720p.

9. The cleaning system according to claim 1, characterized in that: The image acquisition unit is arranged on the side of the workbench, and is arranged adjacent to the end of the cleaning tube extending out of the top surface of the workbench.

10. The cleaning system according to any one of claims 1 to 9, characterized in that: The control unit is preset with image reference information, and the image reference information represents an image when the through hole of the immersion hood is not blocked; wherein the control unit compares the image reference information with the image information collected by the image acquisition unit to determine whether the through hole is blocked.

11. The cleaning system according to claim 1, characterized in that The cleaning liquid contains alcohol, and one end of the interface connected to the cleaning pipe is provided with a spray structure so that the cleaning liquid flowing through the spray structure is sprayed into the cleaning pipe in a spray shape.

12. An exposure machine, comprising a workbench and an immersion hood, wherein the workbench is movably disposed below the immersion hood, wherein: The exposure machine further comprises: A cleaning system as claimed in any one of claims 1 to 11.

13. A cleaning method, characterized in that: Applicable to an exposure machine comprising the cleaning system according to any one of claims 1 to 11, the cleaning method comprising: Collecting image information of the through hole of the immersion hood by an image acquisition unit; Determining whether the through hole is blocked according to the image information by a control unit; The control unit controls the workbench to translate and controls the driving mechanism to drive the cleaning tube, so that one end of the cleaning tube is located directly below the blocked through hole and one end of the cleaning tube is connected to the blocked through hole; Controlling the vacuum pump by the control unit to apply negative pressure to the blocked through hole through the cleaning pipe to clean the immersion hood; The cleaning liquid source is controlled by the self-cleaning unit to transport the cleaning liquid to the self-cleaning pipe, and the cleaning liquid is sprayed into the cleaning pipe through the multiple interfaces.

Images