A control system and control method for roll-to-roll vacuum coating machine

Abstract

The present invention relates to the field of vacuum coating, and discloses a control system of a roll-to-roll vacuum coating machine, wherein the control system comprises a first controller and a second controller; the first controller comprises: a vacuum pump unit, which is used to evacuate each transition chamber, so that the vacuum degree in all transition chambers increases step by step from both sides to the middle, and the highest vacuum degree is maintained in the coating chamber; a substrate winding unit, which is used to unwind the substrate before coating and rewind the substrate after coating, so that the substrate can continuously pass through all transition chambers and coating chambers; a sealing roller unit, which is used to seal the openings between each transition chamber and the end transition chamber, so that each transition chamber is independently separated, and the substrate can smoothly pass through all transition chambers and coating chambers. The present invention can achieve a high-quality and high-efficiency coating process through the mutual cooperation of each unit.

Description

Technical Field

[0001] The present invention relates to the field of vacuum coating technology, and in particular to a control system and a control method of a roll-to-roll vacuum coating machine. Background Art

[0002] Coating equipment is a device used to coat objects. Currently, coating equipment is mainly vacuum coating. Vacuum coating equipment is a type of equipment that needs to be coated under a higher vacuum degree. It mainly includes evaporation and sputtering. Specifically, it can include vacuum ion evaporation, magnetron sputtering, MBE molecular epitaxy, PLD laser sputtering deposition, etc.; for example, in thin film deposition, coating of optical components, etc., ion sources are generally used.

[0003] Roll-to-roll vacuum coating machine is a vacuum coating equipment that can achieve continuous coating. A coating chamber is set in the middle of the roll-to-roll vacuum coating machine, and multiple transition chambers are set on both sides of the coating chamber. There are usually openings between adjacent chambers for the substrate to pass through. Ordinary roll-to-roll vacuum coating machines simply install a coating device in the coating chamber, and their coating quality and efficiency are very low. Summary of the invention

[0004] In view of this, an object of the present invention is to provide a control system and a control method for a roll-to-roll vacuum coating machine to achieve a high-quality and high-efficiency coating process.

[0005] The present invention solves the above technical problems by the following technical means:

[0006] A control system for a roll-to-roll vacuum coating machine, the control system comprising a first controller and a second controller;

[0007] The first controller comprises:

[0008] The vacuum pump unit is used to evacuate each transition chamber, so that the vacuum degree in all transition chambers increases step by step from both sides to the middle, and the highest vacuum degree is maintained in the coating chamber;

[0009] The substrate winding unit is used for unwinding the substrate before coating and rewinding the substrate after coating, so that the substrate can continuously pass through all transition chambers and coating chambers;

[0010] The sealing roller unit is used to seal the openings between the transition chambers and the terminal transition chamber, so that the transition chambers are separated independently and the substrate can pass through all the transition chambers and the coating chamber smoothly;

[0011] The plasma radio frequency unit is used to clean the substrate before coating to keep the coating surface of the substrate clean and tidy;

[0012] A heating unit is used to heat the substrate before, during and after coating to keep the coated surface of the substrate dry;

[0013] The water cooling unit is used to cool the coating chamber and the vacuum pump unit to ensure smooth coating process;

[0014] The second controller comprises:

[0015] The coating unit is used for continuous coating of substrates.

[0016] Furthermore, there are two substrate winding units, one of which is arranged at the head end outside the vacuum coating machine for unwinding the substrate before coating, and the other is arranged at the tail end outside the vacuum coating machine for winding the substrate before coating. The substrate winding unit includes a mounting frame, a first guide roller, a second guide roller, a retracting roller and a first motor. The first guide roller, the second guide roller and the retracting roller are all rotatably mounted on the mounting frame. The first motor is fixed on the mounting frame and is used to drive the retracting roller to rotate. The first motor is electrically connected to the first controller.

[0017] Furthermore, the substrate winding unit also includes a rotating shaft, a rotary encoder, two connecting rods, a tensioning roller, a counterweight shaft and a counterweight block. The rotating shaft is rotatably installed in a mounting frame, the rotary encoder is fixed on the mounting frame and connected to the rotating shaft, the rotary encoder is electrically connected to a first controller, the two connecting rods are respectively fixed at both ends of the rotating shaft, the tensioning roller is rotatably installed between the two connecting rods and is located at the lower side of the middle position of the first guide roller and the second guide roller, the counterweight shaft is rotatably installed on one end of the two connecting rods away from the rotating shaft, and the counterweight block is installed on the counterweight shaft.

[0018] Furthermore, the number of the sealing roller group units is the same as the number of the transition chambers, and each of the sealing roller group units is installed at one of the openings of the coating chamber. The sealing roller group unit includes a C-shaped mounting plate, an upper rubber roller, and a lower rubber roller. The C-shaped mounting plate is provided with a rectangular hole that matches the opening. The upper rubber roller and the lower rubber roller are both rotatably mounted in the C-shaped mounting plate, and the front and rear sides of the upper rubber roller and the lower rubber roller and the side close to the rectangular hole are tightly attached to the inner wall of the C-shaped mounting plate, and the opposite sides of the upper rubber roller and the lower rubber roller can be pressed against the substrate together.

[0019] Furthermore, the sealing roller group unit also includes two sliding blocks and two clamping bolts. Mounting grooves are provided on both sides of the C-shaped mounting plate. The two sliding blocks are respectively slidably installed in the mounting grooves on both sides. The two ends of the roller shaft of the glue roller are respectively rotatably installed on the two sliding blocks. The two clamping bolts are both threadedly connected to the two sides of the C-shaped mounting plate. The clamping bolts can extend into the mounting groove on the same side and clamp on the sliding block.

[0020] Furthermore, the sealing roller group unit also includes an upper gear, a lower gear and a second motor, the upper gear is fixed on the roller shaft of the upper rubber roller, the lower gear is fixed on the roller shaft of the lower rubber roller, the upper gear and the lower gear are meshed with each other, the second motor is fixed outside the vacuum coating machine and is used to drive the lower rubber roller to rotate, and the second motor is electrically connected to the first controller.

[0021] Furthermore, the number of the heating units is three, and the three heating units are respectively installed in a coating chamber, a transition chamber before the coating chamber, and a transition chamber after the coating chamber, and the three chambers are completely connected.

[0022] Furthermore, the plasma radio frequency unit is installed in one of the transition chambers before the transition chamber where the heating unit is located.

[0023] Furthermore, the coating unit is an electron gun evaporation film system, and the electron gun evaporation film system is installed in the coating chamber.

[0024] A control method for a roll-to-roll vacuum coating machine, the control method comprising the following steps:

[0025] S1: First, all transition chambers are evacuated by the vacuum pump unit, and the vacuum degree in all transition chambers is gradually increased from both sides to the middle, and the vacuum degree in the coating chamber is also increased;

[0026] S2: When the vacuum degree in the coating chamber reaches a preset vacuum degree, the plasma radio frequency unit is turned on to clean the coating surface of the substrate;

[0027] S3: Turn on the heating unit to heat the substrate;

[0028] S4: When the temperature in the coating chamber reaches the preset temperature, the electron gun evaporation film system is started again, and the electron beam current is first adjusted to the first preset electron beam current value and maintained for a certain period of time; then the electron beam current is adjusted to the second preset electron beam current value, and whether the target material in the crucible splashes; if there is no splash, the electron beam current is adjusted to the third preset electron beam current value, and if there is splash, the electron beam current is adjusted to the third preset electron beam current value after the target material splashes stop, and then the coating is started;

[0029] S5: Start the substrate winding unit to make the substrate continuously pass through the entire vacuum coating machine;

[0030] S6: Start the water cooling unit to cool the coating chamber and the vacuum pump unit, maintain the temperature of the coating chamber at about 130°C, and prevent the coating chamber and the vacuum pump unit from overheating and causing a shutdown accident.

[0031] Beneficial effects of the present invention:

[0032] 1. The present invention can evacuate each transition chamber by setting a vacuum pump unit, so that the vacuum degree in all transition chambers increases step by step from both sides to the middle, and the highest vacuum degree is maintained in the coating chamber, thereby improving the efficiency and quality of coating.

[0033] 2. The present invention provides a substrate winding unit to prevent the substrate from becoming loose or being severely pulled, and the substrate winding unit is installed outside the coating machine to facilitate workers in installing and disassembling the substrate, thereby improving coating efficiency.

[0034] 3. The present invention sets a sealing roller group unit so that each transition chamber can be separated independently, and the purpose of gradually increasing the vacuum degree in all transition chambers from both sides to the middle can be achieved. This setting makes the vacuum degree in the transition chamber at the end relatively small, so that the pressure difference between the chamber and the outside is relatively small, reducing the risk of airflow squeezing into the transition chamber from the sealing roller group unit, so that the high vacuum degree in the coating chamber can be kept stable, thereby improving the coating quality.

[0035] 4. The present invention can clean the coating surface of the substrate by setting a plasma radio frequency unit, so that the coating surface of the substrate is kept clean and the coating quality is improved.

[0036] 5. The present invention provides a heating unit so that the substrate can be kept dry before, during and after coating, thereby ensuring that the target material can be stably attached to the substrate and improving the coating quality.

[0037] 6. The present invention provides a water cooling unit to cool the coating chamber and the vacuum pump unit, so that the coating process can proceed smoothly.

[0038] 7. The present invention can achieve high-quality and high-efficiency coating process through the mutual cooperation of vacuum pump unit, substrate winding unit, sealing roller unit, plasma radio frequency unit, heating unit, water cooling unit and coating unit. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 It is a system block diagram of a control system of a roll-to-roll vacuum coating machine of the present invention;

[0040] Figure 2 It is a cross-sectional view for showing the installation of each unit in the present invention;

[0041] Figure 3 It is a structural schematic diagram of the substrate winding unit in the present invention;

[0042] Figure 4 is a schematic diagram for showing the internal structure of the substrate winding unit in the present invention;

[0043] Figure 5 It is a structural schematic diagram of the sealing roller group unit in the present invention;

[0044] Figure 6 It is a schematic diagram of the exploded structure of the sealing roller group unit in the present invention;

[0045] Figure 7 It is a structural schematic diagram of the plasma radio frequency unit of the present invention;

[0046] Figure 8 It is a structural schematic diagram of the heating unit in the present invention;

[0047] Fig. 9 It is a structural schematic diagram of the coating unit in the present invention;

[0048] Among them, 1. vacuum pump group unit; 2. substrate winding unit; 201. mounting frame; 202. first guide roller; 203. second guide roller; 204. retracting roller; 205. first motor; 206. rotating shaft; 207. rotary encoder; 208. two connecting rods; 209. tensioning roller; 210. counterweight shaft; 211. counterweight block; 3. sealing roller group unit; 301. C-shaped mounting plate; 302. upper rubber roller; 303. lower rubber roller; 304. sliding block; 305. tightening bolt; 306. upper gear; 307. lower gear; 308. second motor; 4. plasma radio frequency unit; 5. heating unit; 501. heating plate; 502. heating tube; 6. water cooling unit; 7. coating unit; 8. coating chamber; 9. transition chamber; 10. substrate. DETAILED DESCRIPTION

[0049] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0050] like Figure 1 and 2As shown, a control system of a roll-to-roll vacuum coating machine of the present invention comprises a first controller and a second controller; the first controller comprises: a vacuum pump unit 1, a substrate winding unit 2, a sealing roller unit 3, a plasma radio frequency unit 4, a heating unit 5 and a water cooling unit 6, the vacuum pump unit 1 is used for evacuating each transition chamber 9, so that the vacuum degree in all transition chambers 9 increases step by step from both sides to the middle, and the highest vacuum degree is maintained in the coating chamber 8; the substrate winding unit 2 is used for unwinding the substrate 10 before coating and winding the substrate 10 after coating, so that the substrate 10 can continuously pass through all transition chambers 9 and the coating chamber 8; the sealing roller unit Element 3 is used to seal the openings between each transition chamber 9 and the end transition chamber 9, so that each transition chamber 9 is independently separated and the substrate 10 can smoothly pass through all transition chambers 9 and coating chamber 8; the plasma radio frequency unit 4 is used to clean the substrate 10 before coating, so that the coating surface of the substrate 10 remains clean and tidy; the heating unit 5 is used to heat the substrate 10 before, during and after coating, so that the coating surface of the substrate 10 remains dry; the water cooling unit 6 is used to cool the coating chamber 8 and the vacuum pump group unit 1, so that the coating process proceeds smoothly; the second controller includes a coating unit 7, and the coating unit 7 is used to continuously coat the substrate 10.

[0051] like Figure 2 As shown, in the present embodiment, there are two substrate winding units 2, one of which is arranged at the head end outside the vacuum coating machine for unwinding the substrate 10 before coating, and the other is arranged at the tail end outside the vacuum coating machine for unwinding the substrate 10 after coating. By arranging the substrate winding unit 2 outside the vacuum coating machine, the work of installing or disassembling the substrate 10 can be completed without opening the vacuum coating machine, thereby improving the coating efficiency.

[0052] like Figure 3 and Figure 4 As shown, the substrate winding unit 2 includes a mounting frame 201, a first guide roller 202, a second guide roller 203, a retracting roller 204 and a first motor 205. The first guide roller 202, the second guide roller 203 and the retracting roller 204 are all rotatably mounted on the mounting frame 201. The first guide roller 202 and the second guide roller 203 are both aluminum guide rollers. The substrate 10 can be sleeved on the first guide roller 202 and the second guide roller 203. The first guide roller 202 and the second guide roller 203 guide and tension the substrate 10. The reel for winding the substrate 10 can be fixed on the retracting roller 204. The first motor 205 is fixed on the mounting frame 201 and is used to drive the retracting roller 204 to rotate. The first motor 205 is electrically connected to the first controller.

[0053] like Figure 3 and Figure 4As shown, in order to avoid the situation where the substrate 10 is loosened or severely pulled when unwinding or winding due to the inconsistency between the unwinding speed and the winding speed of the substrate 10, the material winding unit also includes a rotating shaft 206, a rotary encoder 207, two connecting rods 208, a tensioning roller 209, a counterweight shaft 210 and a counterweight block 211. The rotating shaft 206 is rotatably installed in the mounting frame 201, the rotary encoder 207 is fixed on the mounting frame 201 and connected to the rotating shaft 206, and is used to detect the rotation angle of the rotating shaft 206. The rotary encoder 207 is electrically connected to the first controller, the two connecting rods 208 are respectively fixed at both ends of the rotating shaft 206, the tensioning roller 209 is rotatably installed between the two connecting rods 208 and is located at the lower side of the middle position of the first guide roller 202 and the second guide roller 203, the counterweight shaft 210 is rotatably installed on the two connecting rods 208 at one end away from the rotating shaft 206, and the counterweight block 211 can be a weight. The counterweight block 211 is installed on the counterweight shaft 210, the tensioning roller 209 is located in the middle position between the rotating shaft and the counterweight shaft 210, and the substrate 10 is also sleeved on the tensioning roller 209. In this embodiment, the output shaft of the first motor 205 will not rotate all the time. When the rotary encoder 207 detects that the rotating shaft 206 rotates 100°, the rotary encoder 207 feeds back information to the first controller, and the first controller controls the first motor 205 to start and unwind or rewind the substrate 10. When the rotary encoder 207 detects that the rotating shaft 206 rotates 100° in the opposite direction, the rotary encoder 207 feeds back information to the first controller, and the first controller controls the first motor 205 to turn off. Such a cyclic operation can smoothly unwind or rewind the substrate 10, avoiding the situation where the substrate 10 is loosened or severely pulled during unwinding or rewinding due to the inconsistency between the unwinding speed and the rewinding speed of the substrate 10.

[0054] like Figure 2 As shown, in this embodiment, the number of sealing roller group units 3 is the same as the number of transition chambers 9, and the sealing roller group unit 3 on the left side of the transition chamber 9 is installed at the opening on the left side of each transition chamber 9, and the sealing roller group unit 3 on the right side of the transition chamber 9 is fixedly installed at the opening on the right side of each transition chamber 9, while the sealing roller group unit 3 is not arranged in the two transition chambers 9 adjacent to the coating chamber 8. The three chambers are interconnected, so that the vacuum pump group unit 1 can increase the vacuum degree in the coating chamber 8 when evacuating all the transition chambers 9, and this arrangement can also keep the high vacuum degree in the coating chamber 8 stable, thereby improving the coating quality.

[0055] like Figure 5 and Figure 6As shown, the sealing roller group unit 3 includes a C-shaped mounting plate 301, an upper glue roller 302, and a lower glue roller 303. The sealing side of the C-shaped mounting plate 301 is fixed on the inner wall of the transition chamber 9, and this side can completely cover the through opening. A rectangular hole adapted to the through opening is opened on the C-shaped mounting plate 301, and the rectangular hole coincides with the through opening. The substrate 10 can also pass through the rectangular hole. The upper glue roller 302 and the lower glue roller 303 are both rotatably mounted in the C-shaped mounting plate 301. The upper glue roller 302 is located on the upper side of the rectangular hole, and the lower glue roller 303 is located on the lower side of the rectangular hole. The front and rear sides of the upper glue roller 302 and the lower glue roller 303 are tightly attached to the front and rear inner walls of the C-shaped mounting plate 301, and the upper glue roller 302 and the lower glue roller 303 are also tightly attached to the C-shaped mounting plate 301. On the inner wall of the mounting plate 301, the upper rubber roller 302 and the lower rubber roller 303 can be pressed against the substrate 10 together. Through such a sealing structure, each transition chamber 9 can be separated independently, and then each transition chamber 9 is evacuated by the vacuum pump unit 1, and different vacuum degrees can be extracted for different transition chambers 9, so as to achieve the purpose of gradually increasing the vacuum degree in all transition chambers 9 from both sides to the middle. This arrangement makes the vacuum degree in the transition chamber 9 at the end relatively small, so that the pressure difference between the chamber and the outside is relatively small, reducing the risk of airflow squeezing into the transition chamber 9 from the sealing roller unit 3, so that the high vacuum degree in the coating chamber 8 can be kept stable, thereby improving the coating quality.

[0056] like Figure 5 and Figure 6 As shown, in order to facilitate the installation of the substrate 10 before coating, the sealing roller group unit 3 also includes two sliding blocks 304 and two clamping bolts 305. Both sides of the C-shaped mounting plate 301 are provided with mounting grooves. The two sliding blocks 304 are respectively vertically slidably installed in the mounting grooves on both sides. The two ends of the roller shaft of the upper glue roller 302 are respectively rotatably installed on the two sliding blocks 304. The two clamping bolts 305 are both threadedly connected to the two sides of the C-shaped mounting plate 301. The clamping bolts 305 can extend into the mounting groove on the same side and clamp on the sliding block 304. When the substrate 10 needs to be installed, the two clamping bolts 305 can be loosened first and the upper glue roller 302 can be lifted up. In this way, the substrate 10 can be easily passed between the upper glue roller 302 and the lower glue roller 303, as well as through the rectangular hole and the through opening. After the substrate 10 passes through, the upper glue roller 302 is put down and the two clamping bolts 305 are tightened.

[0057] like Figure 5 and Figure 6As shown, when the upper glue roller 302 and the lower glue roller 303 are against the substrate 10 together, the substrate 10 is in a clamped state and is difficult to move. In order to facilitate the smooth movement of the substrate 10, the sealing roller group unit 3 also includes an upper gear 306, a lower gear 307 and a second motor 308. The upper gear 306 is fixed on the roller shaft of the upper glue roller 302, and the lower gear 307 is fixed on the roller shaft of the lower glue roller 303. The upper gear 306 and the lower gear 307 are meshed with each other. The second motor 308 is fixed outside the vacuum coating machine and is used to drive the lower glue roller 303 to rotate. The second motor 308 is electrically connected to the first controller. The upper glue roller 302 and the lower glue roller 303 can rotate in the same direction under the drive of the second motor 308, thereby providing a certain amount of power for the movement of the substrate 10.

[0058] like Figure 2 and Figure 8 As shown, in this embodiment, the number of heating units 5 is three, and the three heating units 5 are respectively installed in the coating chamber 8, the transition chamber 9 before the coating chamber 8 and the transition chamber 9 after the coating chamber 8, and the three chambers are connected, so that the substrate 10 can be kept dry before, during and after coating, thereby improving the quality of the coating. The heating unit 5 includes a heating disk 501 and a plurality of heating tubes 502, and the heating tubes 502 are fixed in the heating disk 501. The heating unit 5 located in the transition chamber 9 is installed on the bottom side of the transition chamber 9, and the heating unit 5 located in the coating chamber 8 is installed on the top side of the coating chamber 8, and the side of the heating disk 501 facing the substrate 10 is an open structure.

[0059] like Figure 2 and Figure 7 As shown, in this embodiment, the plasma RF unit 4 is installed in one of the transition chambers 9 in front of the transition chamber 9 where the heating unit 5 is located, and argon gas is also passed through the transition chamber 9 as the process gas of the plasma RF unit 4.

[0060] like Figure 2 and Fig. 9 As shown, in this embodiment, the coating unit 7 is an electron gun evaporation film system, and the electron gun evaporation film system is installed on the bottom side of the coating chamber 8.

[0061] A control method for a roll-to-roll vacuum coating machine, the control method comprising the following steps:

[0062] S1: First, all transition chambers 9 are evacuated by the vacuum pump unit 1, and the vacuum degree in all transition chambers 9 is gradually increased from both sides to the middle, and the vacuum degree in the coating chamber 8 is also increased;

[0063] S2: When the vacuum degree in the coating chamber 8 reaches 6.7*10 -3At Pa, the plasma radio frequency unit 4 is turned on to clean the coating surface of the substrate 10;

[0064] S3: Turn on the heating unit 5 to heat the substrate 10;

[0065] S4: When the temperature in the coating chamber 8 reaches 100°C, start the electron gun evaporation film system, first adjust the electron beam current to 70-80mA and maintain it for 2min; then adjust the electron beam current to 150-160mA, and observe whether the target material in the crucible splashes; if there is no splash, adjust the electron beam current to 300mA, if there is splash, wait until the target material stops splashing, then adjust the electron beam current to 300mA, and then start coating;

[0066] S5: starting the substrate winding unit 2 to allow the substrate 10 to continuously pass through the entire vacuum coating machine;

[0067] S6: Start the water cooling unit 6 to cool the coating chamber 8 and the vacuum pump unit 1, and maintain the temperature of the coating chamber 8 at about 130°C to prevent the coating chamber 8 and the vacuum pump unit 1 from overheating and causing a shutdown accident.

[0068] The above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit the present invention. Although the present invention is described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the purpose and scope of the technical solutions of the present invention, which should be included in the scope of the claims of the present invention. The techniques, shapes, and structural parts not described in detail in the present invention are all known technologies.

Claims

1. A control system for a roll-to-roll vacuum coating machine, characterized in that: The control system includes a first controller and a second controller; The first controller comprises: The vacuum pump unit is used to evacuate each transition chamber, so that the vacuum degree in all transition chambers increases step by step from both sides to the middle, and the highest vacuum degree is maintained in the coating chamber; The substrate winding unit is used for unwinding the substrate before coating and rewinding the substrate after coating, so that the substrate can continuously pass through all transition chambers and coating chambers; The sealing roller unit is used to seal the openings between the transition chambers and the terminal transition chamber, so that the transition chambers are separated independently and the substrate can pass through all the transition chambers and the coating chamber smoothly; The plasma radio frequency unit is used to clean the substrate before coating to keep the coating surface of the substrate clean and tidy; A heating unit is used to heat the substrate before, during and after coating to keep the coated surface of the substrate dry; The water cooling unit is used to cool the coating chamber and the vacuum pump unit to ensure smooth coating process; The second controller comprises: A coating unit, used for continuously coating a substrate; The number of the substrate winding units is two, one of which is arranged at the head end outside the vacuum coating machine for unwinding the substrate before coating, and the other is arranged at the tail end outside the vacuum coating machine for winding the substrate before coating, the substrate winding unit comprises a mounting frame, a first guide roller, a second guide roller, a retracting roller and a first motor, the first guide roller, the second guide roller and the retracting roller are all rotatably mounted on the mounting frame, the first motor is fixed on the mounting frame and is used to drive the retracting roller to rotate, and the first motor is electrically connected to the first controller; The substrate winding unit also includes a rotating shaft, a rotary encoder, two connecting rods, a tensioning roller, a counterweight shaft and a counterweight block. The rotating shaft is rotatably installed in a mounting frame, the rotary encoder is fixed on the mounting frame and connected to the rotating shaft, the rotary encoder is electrically connected to a first controller, the two connecting rods are respectively fixed at both ends of the rotating shaft, the tensioning roller is rotatably installed between the two connecting rods and is located at the lower side of the middle position of the first guide roller and the second guide roller, the counterweight shaft is rotatably installed on the two connecting rods at one end away from the rotating shaft, and the counterweight block is installed on the counterweight shaft. When the rotary encoder detects that the rotating shaft rotates 100°, the rotary encoder feeds back information to the first controller, and the first controller then controls the first motor to start and unwind or reel the substrate. When the rotary encoder detects that the rotating shaft rotates 100° in the opposite direction, the rotary encoder feeds back information to the first controller, and the first controller then controls the first motor to turn off.

2. The control system of a roll-to-roll vacuum coating machine according to claim 1, characterized in that: The number of the sealing roller group units is the same as the number of the transition chambers, and each of the sealing roller group units is installed at one of the openings of the coating chamber. The sealing roller group unit includes a C-shaped mounting plate, an upper rubber roller, and a lower rubber roller. The C-shaped mounting plate is provided with a rectangular hole that matches the opening. The upper rubber roller and the lower rubber roller are both rotatably mounted in the C-shaped mounting plate, and the front and rear sides of the upper rubber roller and the lower rubber roller and the side close to the rectangular hole are tightly attached to the inner wall of the C-shaped mounting plate, and the opposite sides of the upper rubber roller and the lower rubber roller can be pressed against the substrate together.

3. The control system of a roll-to-roll vacuum coating machine according to claim 2, characterized in that: The sealing roller group unit also includes two sliding blocks and two clamping bolts. Mounting grooves are provided on both sides of the C-shaped mounting plate. The two sliding blocks are respectively slidably installed in the mounting grooves on both sides. The two ends of the roller shaft of the glue roller are respectively rotatably installed on the two sliding blocks. The two clamping bolts are both threadedly connected to the two sides of the C-shaped mounting plate. The clamping bolts can extend into the mounting groove on the same side and clamp on the sliding block.

4. The control system of a roll-to-roll vacuum coating machine according to claim 3, characterized in that: The sealing roller group unit also includes an upper gear, a lower gear and a second motor. The upper gear is fixed on the roller shaft of the upper rubber roller, and the lower gear is fixed on the roller shaft of the lower rubber roller. The upper gear and the lower gear are meshed with each other. The second motor is fixed outside the vacuum coating machine and is used to drive the lower rubber roller to rotate. The second motor is electrically connected to the first controller.

5. The control system of a roll-to-roll vacuum coating machine according to claim 1, characterized in that: The number of the heating units is three, and the three heating units are respectively installed in the coating chamber, a transition chamber before the coating chamber, and a transition chamber after the coating chamber, and the three chambers are completely connected.

6. The control system of a roll-to-roll vacuum coating machine according to claim 5, characterized in that: The plasma radio frequency unit is installed in one of the transition chambers before the transition chamber where the heating unit is located.

7. The control system of a roll-to-roll vacuum coating machine according to claim 1, characterized in that: The coating unit is an electron gun evaporation film system, and the electron gun evaporation film system is installed in a coating chamber.

8. A control method for a roll-to-roll vacuum coating machine, characterized in that: The control method is based on a control system of a roll-to-roll vacuum coating machine according to any one of claims 1 to 7, and the control method comprises the following steps: S1: First, all transition chambers are evacuated by the vacuum pump unit, and the vacuum degree in all transition chambers is gradually increased from both sides to the middle, and the vacuum degree in the coating chamber is also increased; S2: When the vacuum degree in the coating chamber reaches a preset vacuum degree, the plasma radio frequency unit is turned on to clean the coating surface of the substrate; S3: Turn on the heating unit to heat the substrate; S4: When the temperature in the coating chamber reaches the preset temperature, the electron gun evaporation film system is started again, and the electron beam current is first adjusted to the first preset electron beam current value and maintained for a certain period of time; then the electron beam current is adjusted to the second preset electron beam current value, and whether the target material in the crucible splashes; if there is no splash, the electron beam current is adjusted to the third preset electron beam current value, and if there is splash, the electron beam current is adjusted to the third preset electron beam current value after the target material splashes stop, and then the coating is started; S5: Start the substrate winding unit to make the substrate continuously pass through the entire vacuum coating machine; S6: Start the water cooling unit to cool the coating chamber and the vacuum pump unit, maintain the temperature of the coating chamber at 130°C, and prevent the coating chamber and the vacuum pump unit from overheating and causing a shutdown accident.

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