Cleavage device and cleavage equipment

Abstract

The present invention provides a cleavage device and a cleavage equipment. The device includes an impact assembly, a sample stage, and a collection device that are sequentially arranged in the same direction. The sample stage is used for mounting a sample with a cleavage rod. Among them, the impact assembly can impact the cleavage rod of the sample placed on the sample stage and knock the cleavage rod into the collection device to complete the cleavage of the sample. The impact assembly, the sample stage, and the collection device are sequentially mounted on the bracket of the cleavage device from top to bottom in the vertical direction. The impact assembly includes an impact rod and a limiting structure. The impact rod is arranged in the vertical direction, and there is a notch on the impact rod for the limiting structure to be clamped. Based on the technical solution of the present invention, it is applicable to vacuum and low-temperature environments, can collect the cleavage rod and particulate matter during the cleavage process at a fixed point, avoid damaging the vacuum pump, can ensure the same impact force each time, and can also conveniently adjust the impact assembly to the required impact force.

Description

Technical Field

[0001] The present invention relates to the technical field of surface analysis, and in particular to a cleavage device and a cleavage equipment. Background Art

[0002] Surface science is a discipline developed in the late 1960s. The surface refers to a thin layer of several atoms on the surface of a solid. This layer of atoms is bound by the atoms in the body and is affected by the special environment of the surface. The surface composition, structure, chemical state, etc. are different from those in the body, and the surface characteristics have a great influence on the physical and chemical properties of the material. Surface analysis is the analysis of the composition, structure and energy state of the outermost surface and thin layer of several nanometers of the solid, so a clean surface is required. The clean surface can be obtained by ion beam bombardment, high temperature desorption, ultra-high vacuum cleavage, etc. Cleavage refers to the ability of some materials to be cracked into a smooth plane along a certain crystal direction by external force. This property is widely used in the production of two-dimensional materials, semiconductor materials and other materials. The commonly used tape method is to completely stick the tape on the surface of the material, and peel off part of the material by tearing off the tape to obtain a new material surface. This method is usually only suitable for materials with weak chemical bonds. In addition, due to the operation method, it is difficult to use vacuum and low temperature environments. Summary of the invention

[0003] In response to the above-mentioned problems in the prior art, the present application proposes a cleaving device and a cleaving equipment, which can not only complete the cleavage operation inside the ultra-high vacuum equipment, but also prevent granular objects from falling into the vacuum pump during the cleavage process and damaging the vacuum pump.

[0004] A cleavage device of the present invention comprises an impact assembly, a sample stage and a collection device arranged in sequence along the same direction, wherein the sample stage is used to mount a sample with a cleavage rod;

[0005] The impact assembly can impact the cleavage rod of the sample placed on the sample stage and knock the cleavage rod down into the collecting device to complete the cleavage of the sample.

[0006] In one embodiment, the impact assembly, the sample table and the collecting device are sequentially installed on the bracket of the cleavage device from top to bottom in the vertical direction. Through this embodiment, on the one hand, the impact assembly can impact the cleavage rod on the sample under the action of its own gravity, and on the other hand, it is convenient for the collecting device to collect the cleavage rod, and at the same time, it can minimize the granular objects generated during the cleavage process from being scattered into the vacuum pump.

[0007] In one embodiment, the impact assembly includes an impact rod and a limiting structure. The impact rod is arranged in the vertical direction, and there is a notch on the impact rod for the limiting structure to be clamped. Through this embodiment, the limiting structure is used to keep the impact rod in a pre-impact state. When it is necessary to cleave a sample, pulling the limiting structure can make the impact rod impact the cleavage rod, thereby completing the cleavage.

[0008] In one embodiment, both the impact rod and the limiting structure are installed in the groove of the bracket. A limiting device with a size larger than the groove is provided on the parts of the impact rod and the limiting structure outside the groove. Through this embodiment, both the impact rod and the limiting structure are arranged in the groove of the bracket. On the one hand, it can reduce the overall volume of the cleavage device. On the other hand, when clamping the impact rod or the impact rod impacts the cleavage rod, both the impact rod and the limiting structure can move along the groove, ensuring the stability of the impact assembly. The provided limiting device can prevent the impact rod and the limiting structure from detaching from the bracket.

[0009] In one embodiment, the groove and the impact rod respectively have corresponding first recessed parts and first protruding parts. One or more first elastic members are arranged between the first recessed part and the first protruding part. The first elastic member is in a compressed state when the limiting structure clamps the impact rod. Through this embodiment, according to the different compression directions of the first elastic member, the stability when the impact rod slides can be improved or a corresponding impact force can be provided for the impact rod.

[0010] In one embodiment, the compression direction of the first elastic member is the same as the impact direction of the impact assembly. Through this embodiment, the first elastic member is used to provide an additional impact force and ensure that the impact force is the same each time. It is also possible to adjust the first elastic member when cleaving different materials, and the impact force required for cleavage can be obtained only by adjusting or replacing the first elastic member.

[0011] In one embodiment, the groove and the limiting structure respectively have corresponding second recessed parts and second protruding parts. One or more second elastic members are arranged between the second recessed part and the second protruding part. The second elastic member is in a compressed state when the limiting structure disengages from the notch. Through this embodiment, when the impact rod is reset after completing the cleavage, the limiting structure can automatically snap into the notch of the impact rod, reducing the operation steps and facilitating the operation of the impact assembly in a vacuum environment.

[0012] In one embodiment, the sample stage is installed in the recessed area of the bracket. The surface of the sample stage is recessed downward to form a groove, and the sample is completely located in the groove. Through this embodiment, when cleaving the sample, it is avoided that the impact assembly impacts on the sample, affecting the cleavage of the sample.

[0013] In one embodiment, a sample holder for mounting the sample is further provided in the groove. A pressing sheet is mounted on the sample holder. The sample can be placed between the sample holder and the pressing sheet. The pressing sheet has one or more pressing portions capable of pressing the sample tightly on the sample holder. By this embodiment, the sample is locked by the sample holder and the pressing sheet, avoiding the sample falling off due to force during cleavage and affecting the experimental results.

[0014] In one embodiment, when the sample with the cleavage rod is mounted on the sample stage, a part of the body of the cleavage rod is within the impact range of the impact rod.

[0015] The present invention also provides a cleavage device, including the cleavage apparatus as described above, and the cleavage apparatus is disposed in the main cavity of the cleavage device.

[0016] The above technical features can be combined in various suitable ways or replaced by equivalent technical features as long as the object of the present invention can be achieved.

[0017] A cleavage apparatus and a cleavage device provided by the present invention, compared with the prior art, at least have the following beneficial effects:

[0018] (1) This device is applicable to vacuum and low-temperature environments, and can collect the cleavage rod and particulate matter during the cleavage process at a fixed point, avoiding damage to the vacuum pump.

[0019] (2) Each time of cleavage, the impact force can be guaranteed to be the same, thereby reducing the influence on the test caused by different cleavage methods.

[0020] (3) The impact assembly can set appropriate impact force and impact position as needed, facilitating the cleavage of samples of different materials.

[0021] (4) The collection device can be directly transmitted out of the vacuum environment through the sample transfer device of the cleavage device, facilitating the replacement of the collection device. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Hereinafter, the present invention will be described in more detail based on embodiments and with reference to the drawings. Among them:

[0023] Figure 1 Shows a schematic structural diagram of the cleavage apparatus of an embodiment of the present invention before impacting the cleavage rod;

[0024] Figure 2 Shows a schematic structural diagram of the cleavage apparatus of an embodiment of the present invention after impacting the cleavage rod;

[0025] In the drawings, the same components are denoted by the same reference numerals. The drawings are not drawn to actual scale.

[0026] Reference numerals:

[0027] 1-sample, 2-collecting device, 3-cleavage rod, 4-bracket, 5-impact rod, 6-limiting structure, 7-limiting device, 8-first recessed portion, 9-first raised portion, 10-first elastic member, 11-second recessed portion, 12-second raised portion, 13-second elastic member, 14-sample holder, 15-pressing sheet, 16-sample table, 501-notch. DETAILED DESCRIPTION

[0028] The present invention will be further described below in conjunction with the accompanying drawings.

[0029] At present, it is common to completely stick the tape to the surface of the material, and then peel off part of the material by tearing off the tape to obtain a new material surface. This method is usually only suitable for materials with weak chemical bonds. In addition, due to the operating method, it is difficult to use in vacuum and low-temperature environments.

[0030] The present invention provides a cleavage device, comprising an impact assembly, a sample stage and a collection device arranged in sequence along the same direction, wherein the sample stage is used to mount a sample with a cleavage rod;

[0031] Among them, the impact component can impact the cleavage rod of the sample placed on the sample table and knock the cleavage rod into the collection device to complete the cleavage of the sample; a driving device such as a robotic arm is used to drive the impact component to impact the sample, which is suitable for vacuum and low-temperature environments. At the same time, a collection device is used to collect the cleavage rod and fallen particles to avoid damage to the device.

[0032] In one embodiment, Figure 1 As shown, the impact assembly, the sample table 16 and the collecting device 2 are installed on the bracket 4 of the cleavage device in sequence from top to bottom in the vertical direction. On the one hand, the impact assembly can impact the cleavage rod 3 on the sample under the action of its own gravity. On the other hand, it is convenient for the collecting device 2 to collect the cleavage rod 3, and at the same time, it can minimize the granular objects generated during the cleavage process from being scattered into the vacuum pump.

[0033] In one embodiment, Figure 1 and Figure 2 As shown, the impact assembly includes an impact rod 5 and a limiting structure 6. The impact rod 5 is arranged in the vertical direction. The impact rod 5 has a notch 501 for the limiting structure to engage. The limiting structure 6 is used to keep the impact rod 5 in a pre-impact state. When the sample 1 needs to be cleaved, the limiting structure 6 is pulled by a driving device such as a robotic arm to make the impact rod 5 hit the cleavage rod 3, thereby completing the cleavage. It is suitable for vacuum and low-temperature environments and does not require manual contact.

[0034] In one embodiment,Figure 1 As shown, the notch 501 and the top of the limiting structure 6 are in a bevel structure that matches each other; the notch 501 can also adopt other shapes, and the shape of the top of the limiting structure 6 matches the shape of the notch 501, so that the limiting structure 6 can be clamped to the impact rod 5.

[0035] In one embodiment, as Figure 1 shown, both the impact rod 5 and the limiting structure 6 are installed in the groove body of the bracket 4, and a limiting device 7 with a size larger than the groove body is provided on the parts of the impact rod 5 and the limiting structure 6 located outside the groove body; setting both the impact rod 5 and the limiting structure 6 in the groove body of the bracket 4 can, on the one hand, reduce the overall volume of the cleavage device, and on the other hand, enable both the impact rod 5 and the limiting structure 6 to move along the groove body whether the impact rod 5 is clamped or the impact rod 5 impacts the cleavage rod 3, ensuring the stability of the impact assembly. The provided limiting device 7 can also prevent the impact rod 5 and the limiting structure 6 from detaching from the bracket.

[0036] Specifically, as Figure 1 shown, the groove body includes a first groove body and a second groove body that are perpendicular to each other. The impact rod 5 is installed in the first groove body extending in the vertical direction, and the limiting structure 6 is installed in the second groove body extending in the horizontal direction.

[0037] In one embodiment, as Figure 1 shown, the first groove body and the impact rod 5 respectively have corresponding first recessed parts 8 and first protruding parts 9, and one or more first elastic parts 10 are provided between the first recessed parts 8 and the first protruding parts 9. The first elastic parts 10 are in a compressed state when the limiting structure 6 clamps the impact rod 5; according to the different compression directions of the first elastic parts 10, the stability of the impact rod 5 when sliding can be improved or a corresponding impact force can be provided for the impact rod 5.

[0038] Specifically, as Figure 1 shown, the compression direction of the first elastic part 10 is the same as the impact direction of the impact assembly; by using the first elastic part 10 to provide an additional impact force and ensuring that the impact force is the same each time, it is also possible to adjust the first elastic part 10 when cleaving different materials, and the impact force required for cleavage can be obtained only by adjusting or replacing the first elastic part 10.

[0039] In one embodiment, as Figure 1As shown, the second slot body and the limiting structure 6 respectively have corresponding second recessed portions 11 and second protruding portions 12. One or more second elastic members 13 are provided between the second recessed portion 11 and the second protruding portion 12. The second elastic member 13 is in a compressed state when the limiting structure 6 disengages from the notch 501, so that when the impact rod 5 is reset after cleavage is completed, the limiting structure 6 can automatically snap into the notch 501 of the impact rod 5, reducing the operation steps and facilitating the operation of the impact assembly in a vacuum environment.

[0040] Specifically, the first elastic member 10 and the second elastic member 13 can be elastic structures such as compression springs and tension springs. When different elastic structures are selected, some structures of the impact rod 5 and the limiting structure 6 may need to be changed.

[0041] In one embodiment, as Figure 1 shown, the groove further has a sample holder for sample installation. A pressing sheet is installed on the sample holder. The sample is located between the sample holder and the pressing sheet. The pressing sheet has one or more blocking portions that can cover part of the surface of the sample. Through this embodiment, the sample is locked by the sample holder and the pressing sheet, avoiding the sample holder falling off under force during cleavage and affecting the experimental results.

[0042] In one embodiment, as Figure 1 shown, the sample stage 16 is installed in the recessed area of the bracket 4. The surface of the sample stage 16 is recessed downward to form a groove. The sample 1 is completely located in the groove; so that when the sample 1 is cleaved, it can be avoided that the impact assembly impacts on the sample 1 and affects the cleavage of the sample 1.

[0043] In one embodiment, the groove further has a sample holder 14 for sample 1 installation. A pressing sheet 15 is installed on the sample holder 14. The sample 1 can be placed between the sample holder 14 and the pressing sheet 15. The pressing sheet 15 has one or more pressing portions that can press the sample 1 against the sample holder 14; the sample 1 is locked by the sample holder 14 and the pressing sheet 15, avoiding the sample 1 falling off under force during cleavage and affecting the experimental results.

[0044] In one embodiment, when the sample 1 with the cleavage rod 3 is installed on the sample stage 16, part of the body of the cleavage rod 3 is within the impact range of the impact rod 5.

[0045] In one embodiment, one end of the cleavage rod 3 is adhered to the surface of the sample 1 by an adhesive. Part of the body of the cleavage rod 3 is within the impact range of the impact rod 5. The adhesive can be used to adhere one end of the cleavage rod to the surface of the sample, such as silver glue or epoxy resin glue.

[0046] The present invention also provides a cleavage device, including the cleavage device as described above. The cleavage device is arranged in the main cavity of the cleavage device.

[0047] In one embodiment, the main cavity is in a vacuum environment, and the cleavage device is directly fixed inside the main cavity of the cleavage equipment.

[0048] In one embodiment, the cleavage device is arranged inside the main cavity of the cleavage equipment through a linear thruster. The linear thruster can drive the device forward or backward, making the device more widely applicable.

[0049] In one embodiment, the collection device is taken out of the vacuum main cavity through the sample transfer device of the cleavage equipment.

[0050] In one embodiment, the cleavage equipment can also be used together with cryogenic equipment such as a cryostat to keep the sample in a low-temperature environment to complete cryogenic cleavage.

[0051] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "bottom", "top", "front", "rear", "inner", "outer", "left", "right", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.

[0052] Although the present invention has been described herein with reference to specific embodiments, it should be understood that these embodiments are merely examples of the principles and applications of the present invention. Therefore, it should be understood that many modifications can be made to the exemplary embodiments, and other arrangements can be designed, as long as they do not depart from the spirit and scope of the present invention defined by the appended claims. It should be understood that the different dependent claims and the features in this document can be combined in a manner different from that described in the original claims. It should also be understood that the features described in connection with a single embodiment can be used in other embodiments.

Claims

1. A cleavage device, characterized in that, It includes an impact component, a sample stage, and a collection device arranged in sequence along the same direction. The sample stage is used to mount a sample with a cleavage rod. Among them, the impact component, the sample stage, and the collection device are sequentially mounted on the bracket of the cleavage device from top to bottom in the vertical direction. The impact component can impact the cleavage rod of the sample placed on the sample stage and knock down the cleavage rod into the collection device to complete the cleavage of the sample. The impact component includes an impact rod and a limiting structure. The impact rod is arranged in the vertical direction. There is a notch on the impact rod for the limiting structure to be clamped. The notch and the top of the limiting structure are in a mutually matching inclined surface structure. Both the impact rod and the limiting structure are installed in the groove body of the bracket. Limiting devices with dimensions larger than the groove body are provided on the parts of the impact rod and the limiting structure located outside the groove body.

2. The cleavage device according to claim 1, characterized in that, The groove body and the impact rod respectively have corresponding first recessed parts and first protruding parts. One or more first elastic members are arranged between the first recessed part and the first protruding part. The first elastic member is in a compressed state when the limiting structure clamps the impact rod.

3. The cleavage device according to claim 2, wherein, The compression direction of the first elastic member is the same as the impact direction of the impact component.

4. The cleavage device according to claim 1, characterized in that The groove body and the limiting structure respectively have corresponding second recessed parts and second protruding parts. One or more second elastic members are arranged between the second recessed part and the second protruding part. The second elastic member is in a compressed state when the limiting structure disengages from the notch.

5. The cleavage device according to claim 1, characterized in that, The sample stage is installed in the recessed area of the bracket. The surface of the sample stage is recessed downward to form a groove, and the sample is completely located within the groove.

6. The cleavage device according to claim 5, characterized in that, There is also a sample holder for installing the sample in the groove. A pressing piece is installed on the sample holder. The sample can be placed between the sample holder and the pressing piece. The pressing piece has one or more pressing parts that can press the sample tightly on the sample holder.

7. The cleavage device according to claim 1, characterized in that, When the sample with the cleavage rod is installed on the sample stage, a part of the body of the cleavage rod is within the impact range of the impact rod.

8. A cleavage device, characterized in that, It includes the cleavage device according to any one of claims 1 to 7. The cleavage device is arranged in the main cavity of the cleavage equipment.

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