Plate-shaped connector, single-arm serial connector, and chip test assembly

Abstract

The present invention discloses a plate-shaped connector, a single-arm serial connector, and a chip test assembly. The plate-shaped connector includes a plurality of single-arm serial connectors spaced apart from each other and an insulating layer. Each single-arm serial connector includes a carrier, a cantilever extending from the carrier and arranged in a coplanar manner, and a top support column and a top support end portion extending from the cantilever and located on opposite sides. The insulating layer connects the carriers of the plurality of single-arm serial connectors, and the top support column of each single-arm serial connector protrudes out of the insulating layer. Each single-arm serial connector abuts against two plates respectively through its top support column and the top support end portion. Accordingly, the chip test assembly can be more easily disassembled from each other by adopting the plate-shaped connector, thereby facilitating subsequent inspection and maintenance.

Description

Technical Field

[0001] The present invention relates to a testing component, in particular to a plate-shaped connector, a single-arm serial connection component and a chip testing component. Background Art

[0002] Conventional wafer testing devices include a test circuit board electrically coupled to a testing machine and a signal transmission board mounted on the test circuit board. In conventional wafer testing devices, the signal transmission board is typically soldered to the test circuit board. However, during the soldering process, the signal transmission board and the test circuit board are susceptible to thermal shock and damage. Furthermore, soldering the signal transmission board and the test circuit board together does not facilitate subsequent inspection and maintenance.

[0003] Therefore, the inventors believe that the above defects can be improved, and have devoted themselves to research and applied scientific principles to finally propose the present invention which has a reasonable design and effectively improves the above defects. Summary of the Invention

[0004] An object of the embodiments of the present invention is to provide a plate-shaped connector, a single-arm serial connector, and a chip testing assembly, which can effectively improve the defects that may occur in existing chip testing devices.

[0005] An embodiment of the present invention discloses a wafer testing assembly comprising a signal transmission board, a test circuit board, and a plate-shaped connector. The signal transmission board is connected to a probe head; the test circuit board is electrically coupled to a test machine; and the plate-shaped connector is clamped between the signal transmission board and the test circuit board. The plate-shaped connector includes a plurality of single-arm serial connectors and an insulating layer. The multiple single-arm serial connectors are spaced apart from each other and each includes a carrier, a cantilever, a top support post, and a top support end. A cantilever extends from the inner side wall of the carrier along a first direction and is arranged coplanar with the carrier; a top abutment column is formed by extending from the cantilever along a second direction perpendicular to the first direction; a top abutment end portion is formed by extending in a curved manner from the end edge of the cantilever, and the top abutment end portion is arranged spaced apart from the top abutment column in the first direction; an insulating layer connects the carrier of multiple single-arm serial connectors, and the top abutment column of each single-arm serial connector protrudes out of the insulating layer; wherein the top abutment columns of the multiple single-arm serial connectors abut against one of the signal transmission board and the test circuit board, and the top abutment ends of the multiple single-arm serial connectors abut against the other of the signal transmission board and the test circuit board respectively; wherein the signal transmission board and the test circuit board can be electrically coupled to each other through a plate-shaped connector.

[0006] Preferably, in any single-arm serial connector, the cantilever includes a force arm portion connected to the inner side wall and a free end portion extending from the force arm portion, the top support column is integrally connected to the free end portion, and the top support end portion is formed by extending in a curved manner from the free end portion; wherein the top support column and the portion of the inner side wall connected to the force arm portion are separated by a distance between 100 micrometers (μm) and 600 micrometers.

[0007] Preferably, in any one-arm serial connecting member, the arm portion is formed with an adjustment hole extending from the free end portion to the inner side wall and being through-shaped.

[0008] Preferably, in any one-arm serial connector, the abutting post has a thickness compared to the free end portion, which is 100% to 300% of the thickness of the free end portion.

[0009] Preferably, the chip testing assembly further includes a screw set, and the signal transmission board, the plate-shaped connector and the test circuit board are fixed through the screw set to maintain relative positions with each other; any electrical transmission path between the test circuit board, the plate-shaped connector and the signal transmission board is not achieved by any welding material.

[0010] Preferably, the insulating layer is formed with a plurality of through-holes, each single-arm serial connector includes at least one residual arm extending from the outer wall of the supporting body, and the free end of at least one residual arm of each single-arm serial connector is exposed in a truncated hole.

[0011] Preferably, there is a truncation hole between any two adjacent single-arm serial connecting members.

[0012] Preferably, in any one-arm serial connector, the signal transmission board and the test circuit board press on the plate-shaped connector, so that the cantilever is elastically bent, and the two ends of the supporting column protrude from opposite sides of the insulating layer respectively.

[0013] An embodiment of the present invention also discloses a plate-like connector, which is used to be clamped between two plates so that the two plates can be electrically coupled to each other. The plate-like connector includes: a plurality of single-arm serial connectors, which are arranged at intervals from each other and each includes: a carrier; a cantilever, extending from the inner side wall of the carrier along a first direction and arranged in the same plane as the carrier; a top support column, formed by extending from the cantilever along a second direction perpendicular to the first direction; and a top support end, formed by extending curvedly from the end edge of the cantilever, and the top support end is arranged at intervals from the top support column in the first direction; and an insulating layer, connecting the carriers of the plurality of single-arm serial connectors, and the top support column of each single-arm serial connector protrudes out of the insulating layer; wherein the top support columns and the top support ends of the plurality of single-arm serial connectors respectively abut against the two plates.

[0014] An embodiment of the present invention further discloses a single-arm serial connector of a plate-shaped connector, which is used to clamp between two plates so that the two plates can be electrically coupled to each other. The single-arm serial connector includes: a carrier; a cantilever extending from the inner side wall of the carrier along a first direction and arranged in the same plane as the carrier; a top support column formed by extending from the cantilever along a second direction perpendicular to the first direction; and a top support end portion formed by extending curvedly from the end edge of the cantilever, and the top support end portion is arranged spaced apart from the top support column in the first direction; wherein the top support column of the single-arm serial connector is against one of the two plates, and the top support ends of multiple single-arm serial connectors are against the other of the two plates.

[0015] In summary, the plate-shaped connector, its single-arm serial connector, and wafer testing assembly disclosed in the embodiments of the present invention utilize the abutment post and the abutment end portion in combination with the cantilever to elastically abut two panels (e.g., the signal transmission board and the test circuit board), thereby eliminating the need for soldering. Furthermore, because the single-arm serial connector is detachably crimped to the two panels, the components of the wafer testing assembly can be easily disassembled, thereby facilitating subsequent inspection and maintenance of the wafer testing assembly.

[0016] Furthermore, in the plate-shaped connector, its single-arm serial connector, and chip testing assembly disclosed in the embodiments of the present invention, the cantilever is designed to be coplanar with the carrier, which not only helps to improve the production yield, but also when the cantilever is bent under force, the stress will be evenly distributed on the cantilever, thereby effectively reducing the probability of the cantilever breaking from the carrier.

[0017] To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, such description and drawings are only used to illustrate the present invention and are not intended to limit the scope of protection of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 FIG. 4 is a schematic cross-sectional view of a wafer testing assembly according to an embodiment of the present invention.

[0019] Figure 2 for Figure 1 The exploded diagram of the probe head is omitted.

[0020] Figure 3 for Figure 1 An enlarged schematic diagram of site III.

[0021] Figure 4 for Figure 3 An enlarged schematic diagram of another method.

[0022] Figure 5FIG. 4 is a perspective schematic diagram of a plate-shaped connector according to an embodiment of the present invention.

[0023] Figure 6 for Figure 5 Schematic top view of .

[0024] Figure 7 for Figure 5 A partial three-dimensional schematic diagram of .

[0025] Figure 8 FIG. 1 is a perspective schematic diagram of another embodiment of a plate-shaped connector according to an embodiment of the present invention.

[0026] Figure 9 FIG. 1 is a perspective schematic diagram of another embodiment of a plate-shaped connector according to the present invention.

[0027] Figure 10 FIG. 1 is a schematic top view of another embodiment of a plate-shaped connector according to the present invention.

[0028] Figure 11 FIG2 is a perspective schematic diagram of another embodiment of a single-arm serial connection member of a plate-shaped connector according to an embodiment of the present invention.

[0029] Figure 12 FIG. 4 is a cross-sectional schematic diagram of another implementation of a wafer testing assembly according to an embodiment of the present invention. DETAILED DESCRIPTION

[0030] The following is an explanation of the implementation of the "plate-shaped connector and its single-arm serial connector and chip test assembly" disclosed in the present invention through specific embodiments. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only simple schematic illustrations and are not depicted according to actual dimensions. It is stated in advance. The following embodiments will further explain the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the scope of protection of the present invention.

[0031] It should be understood that although terms such as "first," "second," and "third" may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. In addition, the term "or" as used herein may include any one or more combinations of the associated listed items, as appropriate.

[0032] See also Figures 1 to 12 As shown, it is an embodiment of the present invention. Figures 1 to 12The sizes and quantities of components shown in the figures are for illustration only and may be adjusted according to design requirements (eg, the length of the components may be extended outwards, or the number of components may be increased) and are not limited to the figures.

[0033] like Figures 1 to 4 As shown, this embodiment discloses a chip testing assembly 100, which includes a signal transmission board (space transformer) 1, a test circuit board 2 spaced apart from the signal transmission board 1, a plate-shaped connector 3 located between the signal transmission board 1 and the test circuit board 2, a probe head 4 connected to the signal transmission board 1, and a screw assembly 5.

[0034] In this embodiment, the signal transmission board 1, the plate-shaped connector 3, and the test circuit board 2 are fixed relative to each other by the screw assembly 5, thereby facilitating that any electrical transmission path between the test circuit board 2, the plate-shaped connector 3, and the signal transmission board 1 can be achieved without any soldering material, but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, the chip test assembly 100 can also omit the screw assembly 5 or replace the screw assembly 5 with other components (e.g., the various components of the chip test assembly 100 are fixed by adhesive).

[0035] It should be noted that although the plate-shaped connector 3 is described in this embodiment as being used in conjunction with the signal transmission board 1, the test circuit board 2, the probe head 4, and the screw assembly 5, the present invention is not limited thereto. For example, in other embodiments of the present invention, the plate-shaped connector 3 can also be used alone (e.g., sold) or in conjunction with other components (e.g., the plate-shaped connector 3 is used to clamp between two boards so that the two boards can be electrically coupled to each other). The following will separately introduce the structure of each component of the chip test assembly 100 in this embodiment and their connection relationship.

[0036] like Figure 1 and Figure 2 As shown, the signal transmission board 1 has a top surface 11 and a bottom surface 12 located on opposite sides, and the top surface 11 of the signal transmission board 1 is used to connect to the probe head 4, while the bottom surface 12 of the signal transmission board 1 faces the plate-shaped connector 3. The signal transmission board 1 is provided with a plurality of connection pads 13 on the bottom surface 12, and the plurality of connection pads 13 can be electrically coupled to the probe head 4. In addition, in other embodiments not shown in the present invention, the signal transmission board 1 can also be a multi-layer structure, for example: the signal transmission board 1 can further include a functional board with an impedance matching effect.

[0037] The test circuit board 2 is used to be electrically coupled to a test machine (not shown), and the test circuit board 2 has a surface (e.g. Figure 2 The top surface of the test circuit board 2 in the circuit board 2 includes a plurality of metal pads 21 arranged at intervals, and the arrangement of the plurality of metal pads 21 of the test circuit board 2 roughly corresponds to the arrangement of the plurality of connection pads 13 of the signal transmission board 1, but the present invention is not limited to this. Accordingly, the plurality of metal pads 21 are electrically coupled to the test machine to analyze the signal received by the test circuit board 2 through the test machine. It should be noted that the electrical coupling method between the test circuit board 2 and the test machine can be adjusted and changed according to design requirements. For example, in other embodiments not shown in the present invention, the test circuit board 2 can also be directly integrated into the test machine.

[0038] The plate-shaped connector 3 is clamped between the signal transmission board 1 and the test circuit board 2, so that the signal transmission board 1 and the test circuit board 2 can be electrically coupled to each other through the plate-shaped connector 3. The force with which the plate-shaped connector 3 is clamped by the signal transmission board 1 and the test circuit board 2 can be adjusted by the screw assembly 5; that is, the distance between the signal transmission board 1 and the test circuit board 2 can be adjusted by the screw assembly 5, thereby controlling the force with which the plate-shaped connector 3 is clamped.

[0039] In more detail, if Figures 2 to 4 As shown, the plate-shaped connector 3 includes a plurality of one-arm serial connectors 31 spaced apart from each other and an insulating layer 32 for fixing the plurality of one-arm serial connectors 31. It should be noted that the plate-shaped connector 3 in this embodiment is described as a plurality of one-arm serial connectors 31 in combination with the insulating layer 32, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the one-arm serial connector 31 can also be used alone (such as sold) or used in combination with other components (such as the one-arm serial connector 31 can be used in combination with serial connectors of different structures; or, the one-arm serial connector 31 can be used to clamp between two plates so that the two plates can be electrically coupled to each other).

[0040] Furthermore, since the structures of the multiple single-arm serial connectors 31 are substantially the same in this embodiment, for ease of explanation, the following description will only describe the structure of one of the single-arm serial connectors 31. However, the present invention is not limited to this. For example, in other embodiments not shown, the structures of the multiple single-arm serial connectors 31 may also differ. The following description will first describe the structure of the single-arm serial connector 31 when it is not subjected to external force.

[0041] like Figures 5 to 7As shown, the single-arm serial connector 31 in this embodiment is an integrally formed single-piece conductive member, and the outer surface of the single-arm serial connector 31 is preferably plated with a nickel-gold layer, but the present invention is not limited thereto. The single-arm serial connector 31 includes a carrier 311 in an annular shape (e.g., a square ring), a cantilever 312 extending from the inner sidewall 3111 of the carrier 311, a top end 313 formed by extending curvedly from the end edge of the cantilever 312, a top post 314 extending from the cantilever 312, and at least one residual arm 315 extending from the outer sidewall of the carrier 311, but the present invention is not limited thereto.

[0042] For example, in other embodiments not shown in the present invention, the single-arm serial connection member 31 may also omit at least one of the residual arms 315. Alternatively, Figure 8 As shown, any two adjacent cantilevers 312 are connected to the same side of the corresponding inner wall 3111; or, as shown Figure 9 As shown, the carrier 311 is a non-annular structure.

[0043] It should be noted that in a corresponding case that is different from the present invention and not shown, a carrier is connected to at least one inclined cantilever at an angle. When at least one of the inclined cantilever is bent by force, the stress will be concentrated at the connection point between at least one of the inclined cantilever and the carrier, which may easily cause at least one of the inclined cantilever to break from the above-mentioned connection point.

[0044] However, in this embodiment, if Figures 5 to 7 As shown, the cantilever 312 extends from the inner sidewall 311a along a first direction D1 and is coplanar with the carrier 311; that is, the upper surface of the cantilever 312 is coplanar with the upper surface of the carrier 311, and the lower surface of the cantilever 312 is coplanar with the lower surface of the carrier 311.

[0045] Accordingly, the cantilever 312 in this embodiment is designed to be coplanar with the carrier 311, which not only helps improve manufacturing yield, but also evenly distributes stress across the cantilever 312 when the cantilever 312 is bent under force, thereby effectively reducing the probability of the cantilever 312 breaking from the carrier 311. In other words, any cantilever that is not coplanar with the carrier is not the cantilever 312 referred to in this embodiment.

[0046] In more detail, if Figures 5 to 7As shown, in this embodiment, any two adjacent cantilevers 312 are connected to opposite sides of the corresponding inner sidewall 3111 and can be arranged in approximately 180-degree rotational symmetry (2-fold rotational symmetry) with the carrier 311, but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, any two adjacent cantilevers 312 can have different lengths according to design requirements; or, as shown in FIG. Figure 10 As shown, any two adjacent cantilevers 312 may not be arranged along a straight line.

[0047] Furthermore, if Figures 5 to 7 As shown, the abutting post 314 is formed by extending from (the upper surface of) the cantilever 312 along a second direction D2 perpendicular to the first direction D1, and the abutting end portion 313 is spaced apart from the abutting post 314 in the first direction D1, and the abutting post 314 and the abutting end portion 313 are respectively located on opposite sides of the cantilever 312 (e.g., Figure 5 The upper and lower sides of the cantilever 312 are shown in FIG. 3 , but the present invention is not limited thereto.

[0048] Furthermore, in order for the single-arm serial connector 31 to achieve optimal mechanical performance and electrical transmission between the signal transmission board 1 and the test circuit board 2, the single-arm serial connector 31 preferably meets at least one of the following conditions, but the present invention is not limited thereto. In other embodiments not shown, the single-arm serial connector 31 may not meet any of the following conditions.

[0049] The cantilever 312 has a uniform thickness and includes a lever portion 3121 connected to the inner sidewall 3111 and a free end portion 3122 extending from the lever portion 3121. Furthermore, the lever portion 3121 defines an adjustment hole 3123 extending from the free end portion 3122 to the inner sidewall 3111, but the present invention is not limited thereto. For example, in other embodiments not shown, the adjustment hole 3123 may be spaced apart from the free end portion 3122 (or the inner sidewall 3111).

[0050] Thus, the lever arm portion 3121 is divided into two arms by the adjustment hole 3123, thereby providing better balance for the free end portion 3122. Furthermore, the lever arm portion 3121 can effectively control the elastic force it can provide by changing the size and shape of the adjustment hole 3123 to meet different design requirements.

[0051] The abutment post 314 is integrally connected to the free end portion 3122. A distance D314 between the abutment post 314 and the portion of the inner sidewall 3111 connected to the lever portion 3121 is between 100 μm and 600 μm. In other words, the length of the lever portion 3121 can be approximately between 100 μm and 600 μm, but the present invention is not limited thereto. Furthermore, the abutment post 314 has a thickness T1 relative to the free end portion 3122, and the thickness T1 is 100% to 300% of the thickness T3122 of the free end portion 3122.

[0052] Furthermore, the abutting end portion 313 is formed by extending in a curved manner from the free end portion 3122, and the abutting end portion 313 is preferably capable of elastically deforming or swinging relative to the cantilever 312, but the present invention is not limited thereto. In this embodiment, the abutting end portion 313 is described as having a V-shaped or U-shaped structure extending outward from the free end portion 3122. However, in other embodiments not shown in the present invention, the abutting end portion 313 may also be presented in other structures according to design requirements (e.g., the abutting end portion 313 is formed by extending inward from the free end portion 3122 so that at least a portion of the abutting end portion 313 is located below the free end portion 3122).

[0053] In addition, the single-arm serial connector 31 can be respectively pressed against two boards (such as the signal transmission board 1 and the test circuit board 2) through the pressing column 314 and the pressing end 313. The end edge of the pressing column 314 used to press against the two boards is a circular arc surface in this embodiment, but it can be adjusted and changed according to design requirements and is not limited to this embodiment. For example, in other embodiments not shown in the present invention, the end edge of the pressing column 314 can be a bevel; or, as shown in FIG. Figure 11 As shown, the end edge of the abutting column 314 may include a plurality of protrusion structures.

[0054] In this embodiment, the insulating layer 32 is made of a high-temperature resistant material. For example, the insulating layer 32 can be made of a plastic that can withstand temperatures above 300 degrees Celsius. The insulating layer 32 connects the carrier 311 and the residual arm 315 of each single-arm serial connector 31. In this embodiment, the insulating layer 32 can be connected to the carrier 311 and the residual arm 315 of each single-arm serial connector 31 by molding or gluing, so that at least a portion of the carrier 311 and the residual arm 315 of each single-arm serial connector 31 are embedded within the insulating layer 32.

[0055] Furthermore, the abutting post 314 and the abutting end portion 313 of each single-arm serial connector 31 may protrude from opposite sides of the insulating layer 32, but the present invention is not limited thereto. For example, in other embodiments not shown, the abutting post 314 of each single-arm serial connector 31 may protrude from the insulating layer 32, while the abutting end portion 313 may be located within the space enclosed by the insulating layer 32.

[0056] More specifically, the insulating layer 32 is formed with a plurality of through-holes 321, and one such hole 321 exists between any two adjacent single-arm serial connectors 31, with the free end of at least one residual arm 315 of each single-arm serial connector 31 exposed through one such hole 321. To put it another way, before the plurality of hole 321 is formed in the insulating layer 32 of the sheet-like connector 3, at least two of the residual arms 315 of any two adjacent single-arm serial connectors 31 are connected to each other, thereby facilitating the production of multiple single-arm serial connectors 31. Subsequently, by forming the plurality of hole 321 in the insulating layer 32, at least two of the residual arms 315 of any two adjacent single-arm serial connectors 31 are disconnected from each other, thereby electrically isolating them from each other.

[0057] The above describes the structure of the signal transmission board 1, the test circuit board 2, and the plate-like connector 3. The following describes the connection relationship between the signal transmission board 1, the test circuit board 2, and the plate-like connector 3. Specifically, the abutting posts 314 of the multiple single-arm serial connectors 31 abut against the multiple connection pads 13 of the signal transmission board 1, while the abutting ends 313 of the multiple single-arm serial connectors 31 abut against the multiple metal pads 21 of the test circuit board 2.

[0058] In other words, the abutting column 314 of any one of the single-arm serial connectors 31 abuts against one of the two plates, and the abutting end portion 313 of any one of the single-arm serial connectors 31 abuts against the other of the two plates, but the present invention is not limited thereto. Figure 12 As shown, the plurality of abutting posts 314 may also be oriented toward different sides from the corresponding cantilever 312 in the second direction D2 (eg, Figure 12 The top supporting column 314 and the top supporting end portion 313 of each of the single-arm serial connecting members 31 are respectively located on opposite sides of the cantilever 312 (such as: Figure 12that is, the abutting columns 314 and the abutting ends 313 of the plurality of single-arm serial connectors 31 are respectively abutted against the two plates (such as the signal transmission board 1 and the test circuit board 2).

[0059] Furthermore, if Figure 1 and Figure 2 As shown, in any of the single-arm serial connectors 31 of this embodiment, the signal transmission board 1 and the test circuit board 2 are pressed against the top support column 314 and the top support end 313 of the plate-shaped connector 3, so that the cantilever 312 is elastically bent, and the two ends of the top support column 314 protrude from the opposite sides of the insulating layer 32 (e.g., Figure 4 ), thereby effectively reducing the overall thickness of the plate-shaped connector 3, but the present invention is not limited thereto. For example, the force exerted by the signal transmission board 1 and the test circuit board 2 on the plate-shaped connector 3 can be adjusted according to design requirements (e.g., Figure 3 ).

[0060] like Figure 1 As shown, the probe head 4 is disposed on the top surface 11 of the signal transmission board 1, and the probe head 4 can be electrically coupled to the test circuit board 2 through the signal transmission board 1 and the plate-shaped connector 3. The probe head 4 includes a positioning base 41 and a plurality of conductive probes 42 passing through the positioning base 41. One end of each conductive probe 42 (e.g., Figure 1 The bottom end of the conductive probe 42 in the conductive probe 42 passes through the positioning seat 41 and abuts against the top surface 11 of the signal transmission board 1, and the other end of each conductive probe 42 (such as: Figure 1 The top of the conductive probe 42 in the conductive probe 42 passes through the positioning base 41 and is used to press against an object to be tested (such as a semiconductor chip).

[0061] It should be noted that the conductive probe 42 in this embodiment is a conductive and flexible long strip, but the conductive probe 42 of the present invention is not limited to rectangular conductive probes, circular conductive probes, or conductive probes of other structures. In addition, the probe head 4 in this embodiment is described as a vertical probe head, but the specific structure of the probe head 4 can be adjusted and varied according to design requirements and is not limited by the present invention.

[0062] [Technical Effects of the Embodiments of the Invention]

[0063] In summary, in the plate-shaped connector, its single-arm serial connector, and wafer testing assembly disclosed in the embodiments of the present invention, the abutting post and the abutting end are combined with the cantilever to elastically abut two panels (e.g., the signal transmission board and the test circuit board), thereby eliminating the need for soldering. Furthermore, because the single-arm serial connector is detachably crimped to the two panels, the components of the wafer testing assembly can be easily disassembled, thereby facilitating subsequent inspection and maintenance of the wafer testing assembly.

[0064] Furthermore, in the plate-shaped connector, its single-arm serial connector, and chip testing assembly disclosed in the embodiments of the present invention, the cantilever is designed to be coplanar with the carrier, which not only helps to improve the production yield, but also when the cantilever is bent under force, the stress will be evenly distributed on the cantilever, thereby effectively reducing the probability of the cantilever breaking from the carrier.

[0065] The contents disclosed above are only preferred feasible embodiments of the present invention and do not limit the patent scope of the present invention. Therefore, all equivalent technical changes made using the contents of the present invention description and drawings are included in the patent scope of the present invention.

Claims

1. A wafer testing assembly, characterized in that: The wafer testing assembly comprises: a signal transmission board, used to connect to a probe head; a test circuit board for electrically coupling to a test machine; and A plate-shaped connector, clamped between the signal transmission board and the test circuit board; wherein the plate-shaped connector includes: A plurality of single-arm serial connecting members are arranged at intervals from each other and each comprises: a carrier; a cantilever extending from the inner sidewall of the carrier along a first direction and arranged coplanar with the carrier; a supporting column extending from the cantilever along a second direction perpendicular to the first direction; and an abutting end portion, formed by extending in a curved manner from a distal end edge of the cantilever, and spaced apart from the abutting post in the first direction; and an insulating layer connecting the carriers of the plurality of single-arm serial connectors, wherein the top support column of each single-arm serial connector protrudes out of the insulating layer; wherein the abutting posts of the plurality of single-arm serial connectors abut against one of the signal transmission board and the test circuit board, and the abutting ends of the plurality of single-arm serial connectors abut against the other of the signal transmission board and the test circuit board; The signal transmission board and the test circuit board can be electrically coupled to each other through the plate-shaped connector.

2. The wafer testing assembly according to claim 1, wherein: In any of the single-arm serial connectors, the cantilever includes a lever arm portion connected to the inner side wall and a free end portion extending from the lever arm portion, the top support column is integrally connected to the free end portion, and the top support end portion is formed by extending in a curved manner from the free end portion; wherein the top support column and the portion of the inner side wall connected to the lever arm portion are spaced apart by a distance between 100 microns and 600 microns.

3. The wafer testing assembly according to claim 2, wherein: In any of the single-arm serial connecting parts, the arm portion is formed with an adjustment hole extending from the free end portion to the inner side wall and having a penetrating shape.

4. The wafer testing assembly according to claim 2, wherein: In any one of the single-arm serial connectors, the abutting post has a thickness compared to the free end portion, which is 100% to 300% of the thickness of the free end portion.

5. The wafer testing assembly according to claim 1, wherein: The chip testing assembly further includes a screw set, and the signal transmission board, the plate-shaped connector and the test circuit board are fixed through the screw set to maintain relative positions with each other; any electrical transmission path between the test circuit board, the plate-shaped connector and the signal transmission board is not achieved by any welding material.

6. The wafer testing assembly according to claim 1, wherein: The insulating layer is formed with a plurality of through-shaped cut-off holes, each of the single-arm serial connectors includes at least one residual arm extending from the outer wall of the carrier, and the free end of at least one residual arm of each single-arm serial connector is exposed in one of the cut-off holes.

7. The wafer testing assembly according to claim 6, wherein: There is a cut-off hole between any two adjacent single-arm serial connection members.

8. The wafer testing assembly according to claim 1, wherein: In any one of the single-arm serial connectors, the signal transmission board and the test circuit board press on the plate-shaped connector to elastically bend the cantilever, and allow both ends of the abutting column to protrude from opposite sides of the insulating layer.

9. A plate-shaped connector, characterized in that: The plate-shaped connector is used to be clamped between two plates so that the two plates can be electrically coupled to each other. The plate-shaped connector includes: A plurality of single-arm serial connecting members are arranged at intervals from each other and each comprises: a carrier; a cantilever extending from the inner sidewall of the carrier along a first direction and arranged coplanar with the carrier; a supporting column extending from the cantilever along a second direction perpendicular to the first direction; and an abutting end portion, formed by extending in a curved manner from a terminal edge of the cantilever, and the abutting end portion is spaced apart from the abutting post in the first direction; and an insulating layer connecting the carriers of the plurality of single-arm serial connectors, wherein the top support column of each single-arm serial connector protrudes out of the insulating layer; Wherein, the abutting columns and the abutting ends of the plurality of single-arm serial connecting members abut against the two plate members respectively.

10. A single-arm serial connector of a plate-shaped connector, characterized in that: The single-arm serial connector of the plate-shaped connector is used to be clamped between two plates so that the two plates can be electrically coupled to each other. The single-arm serial connector includes: a carrier; a cantilever extending from the inner sidewall of the carrier along a first direction and arranged coplanar with the carrier; a supporting column extending from the cantilever along a second direction perpendicular to the first direction; and an abutting end portion, formed by extending in a curved manner from the end edge of the cantilever, and the abutting end portion is spaced apart from the abutting post in the first direction; Wherein, the abutting column of the single-arm serial connecting member abuts against one of the two plate members, and the abutting end portions of the plurality of single-arm serial connecting members abut against the other of the two plate members.

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