Electron Beam Control Coil Magnetic Field Detection System and Its Detection Method

Abstract

The present invention discloses an electron beam control coil magnetic field detection system and a detection method thereof. The detection system includes a non-magnetic optical platform, an electron beam control coil, a multi-dimensional electric control displacement module disposed on the non-magnetic optical platform, a magnetic field measurement sensor driven by the multi-dimensional electric control displacement module to move within the magnetic field generated by the electron beam control coil, and a test controller communicatively connected to the magnetic field measurement sensor. The detection system utilizes a magnetic field measurement device and an automated electric control displacement system, in combination with a main control module, to perform automated magnetic field scanning on different shaped regions, thereby obtaining relatively comprehensive magnetic field measurement data and a magnetic field spatial distribution map.

Description

Technical Field

[0001] The present invention relates to the technical field of coil magnetic field measurement, and particularly to an electron beam control coil magnetic field detection system and a detection method thereof. Background Art

[0002] An electron beam generating device is a high-performance heating device. After the electron beam is emitted, it usually needs to be transmitted over a long distance. The electrons in the electron beam carry negative charges, and the repulsive force between them will cause the electron beam to diverge quickly during the transmission process, and then be intercepted by metal components, resulting in heat transfer, which causes certain harm to the system. In order to obtain a high-quality electron beam, it is necessary to constrain the electron beam during the transmission process.

[0003] The focusing magnetic field coil is an important way to achieve the stable transmission of a high-quality electron beam, and its performance determines the focusing and energy stability of electrons. The working principle of the scanning coil is to use the deflection effect of the magnetic field on electrons to make the electron beam deflect controllably under the dual action of the electric field and the magnetic field. Therefore, the test and analysis of the magnetic field characteristics of the electron beam control magnetic field coil (focusing coil, scanning coil) are helpful for adjusting the electron beam energy system and providing a judgment basis for the subsequent consistency of the coil magnetic field.

[0004] At present, the magnetic field detection means of the coil mainly uses a gaussmeter made by the Hall effect for testing, and the magnetic field values inside the focusing coil and the scanning coil are tested by manually moving the Hall probe. However, limited by the problems of the positioning accuracy of the test points and the test efficiency, the manual test is mainly applicable to the linear scanning in the axial or radial direction of the coil, and it is impossible to accurately analyze the overall magnetic field distribution inside the coil. Summary of the Invention

[0005] The purpose of the present invention is to provide an electron beam control coil magnetic field detection system for the problem that the overall magnetic field distribution inside the coil cannot be accurately analyzed in the prior art.

[0006] Another aspect of the present invention is to provide a detection method for the electron beam control coil magnetic field detection system.

[0007] The technical solution adopted to achieve the purpose of the present invention is as follows:

[0008] An electron beam control coil magnetic field detection system includes a non-magnetic optical platform, an electron beam control coil, a multi-dimensional electric control displacement module arranged on the non-magnetic optical platform, a magnetic field measurement sensor driven by the multi-dimensional electric control displacement module to move in the magnetic field generated by the electron beam control coil, and a test controller communicatively connected to the magnetic field measurement sensor, wherein:

[0009] The multi-dimensional electronically controlled displacement module includes a five-dimensional electronically controlled displacement platform and a motor controller for controlling the movement of each motor in the five-dimensional electronically controlled displacement platform. The five-dimensional electronically controlled displacement platform is fixedly installed on a non-magnetic optical platform. The five-dimensional electronically controlled displacement platform includes a three-dimensional electronically controlled translation stage for driving the magnetic field measurement sensor to perform three-dimensional linear motion along the X-axis, Y-axis, and Z-axis in the Cartesian coordinate system, an electronically controlled rotary stage W-axis for driving the magnetic field measurement sensor to rotate around the Z-axis in the Cartesian coordinate system, and an electronically controlled translation stage U-axis for adjusting the rotation radius of the magnetic field measurement sensor. The magnetic field measurement sensor is fixed on the tabletop of the electronically controlled translation stage U-axis.

[0010] In the above technical solution, the three-dimensional electronically controlled translation stage includes an electronically controlled translation stage X-axis, an electronically controlled translation stage Y-axis, and an electronically controlled translation stage Z-axis. The electronically controlled rotary stage W-axis is fixed on the tabletop of the electronically controlled translation stage Z-axis. The electronically controlled translation stage U-axis is installed on the tabletop of the electronically controlled rotary stage W-axis. The magnetic field measurement sensor is fixed on the tabletop of the electronically controlled translation stage U-axis through a fixture.

[0011] In the above technical solution, the motor controller includes a motion control main board and a stepper motor driver. The motion control main board is respectively communicatively connected to the control module and the stepper motor driver.

[0012] In the above technical solution, the electron beam control coil is installed on the tabletop of the non-magnetic optical platform through a positioning tooling and is driven by a stable DC current output by a DC regulated power supply.

[0013] In the above technical solution, the magnetic field measurement sensor is a three-axis Hall probe, and the test controller is a three-axis gaussmeter.

[0014] In the above technical solution, the electron beam control coil magnetic field detection system further includes a main control module. The main control module is respectively communicatively connected to the motor controller and the test controller.

[0015] In the above technical solution, the electron beam control coil includes a magnetic field coil and a magnetic field coil power supply electrically connected thereto. The magnetic field coil includes a focusing coil and a scanning coil.

[0016] In the above technical solution, the electronically controlled translation stage X-axis includes a first stepper motor, a first base plate, a first transmission lead screw, a first transmission guide rail, and a first slider. Two first transmission guide rails are fixed on the first base plate. The first base plate is fixed on the non-magnetic optical platform. The first stepper motor is connected to the first transmission lead screw through a coupling to drive the first transmission lead screw to rotate. The first slider and the first transmission lead screw form a transmission mechanism through ball bearings. The first slider freely slides on the first transmission guide rail under the drive of the first transmission lead screw to achieve translational motion along the X-axis direction of the horizontal plane in the Cartesian coordinate system.

[0017] In the above technical solution, the Y-axis of the electric control translation stage includes a second stepping motor, a second base plate, a second transmission lead screw, a second transmission guide rail, and a second slider. Two second transmission guide rails are fixed on the second base plate, and the second base plate is fixed on the first slider. The second stepping motor is connected to the second transmission lead screw through a coupling to drive the second transmission lead screw to rotate. The second slider and the second transmission lead screw form a transmission mechanism through balls. The second slider freely slides on the second transmission guide rail driven by the second transmission lead screw to achieve translational motion along the Y-axis direction of the horizontal plane in the Cartesian coordinate system.

[0018] In the above technical solution, the Z-axis of the electric control translation stage is assembled by a third base plate, four pillar transmission guide rails, a third transmission lead screw, a third slider, a top plate, and a third stepping motor. Four pillar transmission guide rails are fixed between the third base plate and the top plate. The third base plate is fixed on the second slider. The third stepping motor is connected to the third transmission lead screw through a coupling to drive the third transmission lead screw to rotate. The third slider and the third transmission lead screw form a transmission mechanism through balls. The third slider freely slides on the four pillar transmission guide rails driven by the third transmission lead screw to achieve translational motion along the Z-axis direction of the vertical plane in the Cartesian coordinate system.

[0019] In the above technical solution, the W-axis of the electric control rotary stage includes a fourth stepping motor, a worm and worm gear transmission mechanism, and a rotary table surface. The positioning surface of the worm and worm gear transmission mechanism is fixed on the third slider. The fourth stepping motor drives the worm in the worm and worm gear transmission mechanism to rotate through a coupling, thereby driving the rotary table surface connected to the worm of the worm and worm gear transmission mechanism to rotate, achieving rotational motion around the Z-axis direction of the vertical plane in the Cartesian coordinate system.

[0020] In the above technical solution, the U-axis of the electric control translation stage includes a fifth stepping motor, a fifth base plate, a fifth transmission lead screw, a fifth transmission guide rail, and a fifth slider. Two fifth transmission guide rails are fixed on the fifth base plate, and the fifth base plate is fixed on the rotary table surface. The fifth stepping motor is connected to the fifth transmission lead screw through a coupling to drive the fifth transmission lead screw to rotate. The fifth slider and the fifth transmission lead screw form a transmission mechanism through balls. The fifth slider freely slides on the fifth transmission guide rail driven by the fifth transmission lead screw.

[0021] In the above technical solution, when the fifth slider is at the zero position of the U-axis, the axis of the fixture for fixing the three-axis Hall probe coincides with the rotation axis of the W-axis of the electric control rotary stage. When the fifth slider is at U = U position, the three-axis Hall probe fixture will perform a circular motion driven by the W-axis with the rotation axis of the W-axis as the center and a length of U as the radius.

[0022] On the other hand of the present invention, a method for the electron beam control coil magnetic field detection system to perform magnetic field distribution scanning is characterized by including the following steps:

[0023] Step 1: Connect each motor in the five-dimensional electric control displacement platform to the motor controller, and connect the magnetic field measurement sensor to the test controller;

[0024] Step 2: Power on the test controller and the motor controller to work;

[0025] Step 3: Run the main control module, and establish a serial communication connection between the main control module and the test controller and the motor controller;

[0026] Step 4: Through the main control module, control the X-axis of the electric control translation stage, the Y-axis of the electric control translation stage, and the Z-axis of the electric control translation stage respectively to move the magnetic field measurement sensor to the initial position of the measured electron beam control coil;

[0027] Step 5: Select a suitable control mode according to the required scanning dimension:

[0028] (1) If two-dimensional scanning is performed, enter the line scanning control mode, and select the moving axis according to the scanning shape. If a straight line scan is required, set the operating parameters of the X-axis of the electric control translation stage, the Y-axis of the electric control translation stage, or the Z-axis of the electric control translation stage; if a curve scan is required, set the operating parameters of the W-axis of the electric control rotary stage;

[0029] (2) If three-dimensional scanning is performed, enter the surface scanning control mode, and select the combination form of moving axes according to the scanning shape. If a rectangular surface scan is required, set the operating parameters of the X-axis and the Y-axis of the electric control translation stage, or the X-axis and the Z-axis of the electric control translation stage, or the Y-axis and the Z-axis of the electric control translation stage; if a circular plane scan is required, set the operating parameters of the W-axis of the electric control rotary stage and the U-axis of the electric control translation stage; if a cylindrical surface scan is required, set the operating parameters of the W-axis of the electric control rotary stage and the Z-axis of the electric control translation stage;

[0030] Step 6: After completing the parameter setting in Step 5, execute the automatic scanning process: The main control module will automatically control the five-dimensional electric control displacement platform to execute the scanning trajectory according to the set parameters, and automatically save the displacement coordinates and the corresponding magnetic field data during the scanning process;

[0031] Step 7: When the scanning process ends, the main control module performs data processing:

[0032] (1) In the data plotting unit of the main control module, perform data plotting operations according to the scanning dimension. If line scanning is performed, two-dimensional data plotting is performed; if surface scanning is performed, three-dimensional data plotting is performed. The plotting operation can represent the change trend of the magnetic field with displacement, or the three-dimensional distribution of the magnetic field in space;

[0033] (2) In the data viewing unit of the main control module, the test data can be exported to an Excel spreadsheet for data storage and further analysis.

[0034] Step 8: After the end of this test process, select the next operation as needed:

[0035] (1) If a next test is required, return to Step 4, adjust the initial position of the magnetic field measurement sensor, and retest.

[0036] (2) If no other tests are needed, turn off the control module, power off the test controller and the motor controller, and end the test.

[0037] Compared with the prior art, the beneficial effects of the present invention are:

[0038] 1. The detection system of the present invention utilizes a magnetic field measurement device and an automated electric control displacement system, combined with a host computer control software, to perform automated magnetic field scanning on different-shaped regions, obtaining relatively comprehensive magnetic field measurement data and magnetic field spatial distribution maps, providing an important theoretical basis for solving the optimization of the electron beam energy system, and having typical engineering practice guiding significance.

[0039] 2. The multi-dimensional electric control displacement system adopted by the present invention has four translational degrees of freedom and one rotational degree of freedom in space. On the one hand, it enriches the scanning range and can realize the scanning of straight lines, rectangular regions, circular regions, and cylindrical regions. On the other hand, through the selection of mechanical structure components and the use of a ball screw and a worm and worm gear reducer in combination, the positioning accuracy during the scanning process is improved, ensuring the accuracy of the test data.

[0040] 3. The gaussmeter adopted by the present invention is a high-precision and high-sensitivity three-axis gaussmeter. On the one hand, it can simultaneously measure the magnetic field intensities in three directions at a certain point in space. Compared with a single-axis gaussmeter that can only measure the magnetic field intensity in one direction each time, the test efficiency is improved. On the other hand, the three-axis Hall probe has a small volume, with a diameter of only 2 mm, which is beneficial to improving the flexibility of testing in a narrow space, and a small active area, with a diameter of only 0.15 mm, which is beneficial to providing the sensitivity of spatial magnetic field measurement.

[0041] 4. The main control module (the control software in the host computer) adopted by the present invention has both magnetic field data acquisition and displacement control functions, can realize the automated control of the scanning process, and does not require manual supervision, improving the test efficiency. The automated management of test data can realize functions such as real-time display of data, data plotting, data storage, and data export, facilitating the analysis of test data in the later stage. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 It is a schematic structural diagram of an electron beam control coil magnetic field detection system;

[0043] Figure 2 It is the process for the automatic detection of the magnetic field of the electron beam control coil.

[0044] In the figure: 1 - non-magnetic optical platform, 2 - X-axis stepper motor of the electric control translation stage, 3 - X-axis bottom plate of the electric control translation stage, 4 - X-axis driving lead screw of the electric control translation stage, 5 - X-axis driving guide rail of the electric control translation stage, 6 - X-axis slider of the electric control translation stage, 7 - Y-axis bottom plate of the electric control translation stage, 8 - Y-axis driving guide rail of the electric control translation stage, 9 - Y-axis slider of the electric control translation stage, 10 - Y-axis driving lead screw of the electric control translation stage, 11 - Y-axis stepper motor of the electric control translation stage, 12 - Z-axis bottom plate of the electric control translation stage, 13 - Z-axis four-pillar driving guide rail of the electric control translation stage, 14 - Z-axis driving lead screw of the electric control translation stage, 15 - Z-axis slider of the electric control translation stage, 16 - Z-axis top plate of the electric control translation stage, 17 - Z-axis stepper motor of the electric control translation stage, 18 - W-axis stepper motor of the electric control rotary stage, 19 - W-axis worm and gear driving mechanism of the electric control rotary stage, 20 - W-axis rotary table surface of the electric control rotary stage, 21 - U-axis stepper motor of the electric control translation stage, 22 - U-axis bottom plate of the electric control translation stage, 23 - U-axis driving lead screw of the electric control translation stage, 24 - U-axis driving guide rail of the electric control translation stage, 25 - U-axis slider of the electric control translation stage, 26 - three-axis Hall probe fixture, 27 - three-axis Hall probe, 28 - electron beam control coil. Specific embodiments

[0045] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0046] Embodiment 1

[0047] An electron beam control coil magnetic field detection system includes a non-magnetic optical platform 1, an electron beam control coil, a multi-dimensional electric control displacement module disposed on the non-magnetic optical platform 1, a magnetic field measurement sensor driven by the multi-dimensional electric control displacement module to move in the magnetic field generated by the electron beam control coil, and a test controller communicatively connected to the magnetic field measurement sensor, wherein:

[0048] The multi-dimensional electric control displacement module includes a five-dimensional electric control displacement platform and a motor controller for controlling the movement of each motor in the five-dimensional electric control displacement platform. The five-dimensional electric control displacement platform is installed and fixed on the non-magnetic optical platform. The five-dimensional electric control displacement platform includes a three-dimensional electric control translation stage for driving the magnetic field measurement sensor to perform three-dimensional linear motion in the X-axis, Y-axis, and Z-axis in the Cartesian coordinate system, an electric control rotary stage W-axis for driving the magnetic field measurement sensor to rotate around the Z-axis in the Cartesian coordinate system, and an electric control translation stage U-axis for adjusting the rotation radius of the magnetic field measurement sensor. The magnetic field measurement sensor is fixed on the table surface of the electric control translation stage U-axis.

[0049] The motor controller controls the movements of five axes in the five-dimensional electric control displacement platform, thereby regulating the movement trajectory of the magnetic field measurement sensor. During the movement, the magnetic field measurement sensor transmits the sensed signals to the test controller, and the test controller calculates and outputs data.

[0050] Preferably, the three-dimensional electric control translation stage includes an X-axis of the electric control translation stage, a Y-axis of the electric control translation stage, and a Z-axis of the electric control translation stage. The W-axis of the electric control rotary stage is fixed on the tabletop of the Z-axis of the electric control translation stage, and the U-axis of the electric control translation stage is installed on the tabletop of the W-axis of the electric control rotary stage. The magnetic field measurement sensor is fixed on the tabletop of the U-axis of the electric control translation stage through a fixture 26.

[0051] Preferably, the motor controller includes a motion control main board and a stepper motor driver. The motion control main board is communicatively connected to the host computer and the stepper motor driver respectively. The motion control main board has a serial communication function with the host computer software. After receiving the control instruction from the host computer, the motion control main board sends a specified number of PWM pulses to the stepper motor driver to drive the stepper motors on the five axes to rotate, thereby driving the translation stage in the five-dimensional electric control displacement platform to move or the rotary stage to rotate.

[0052] Preferably, the electron beam control coil 28 is installed on the tabletop of the non-magnetic optical platform 1 through a positioning tooling and is driven by a stable DC current output by a DC regulated power supply to generate a magnetic field.

[0053] Preferably, the magnetic field measurement sensor is a three-axis Hall probe, and the test controller is a three-axis gaussmeter. The three-axis Hall probe is made based on the Hall effect principle and includes three Hall chips orthogonal in space, which can simultaneously measure the magnetic fields in three directions at a certain point in space. The three-axis Hall probe is fixed on the tabletop of the U-axis in the five-dimensional electric control displacement platform through a fixture as the magnetic field measurement sensor and is placed inside the magnetic field coil. The three-axis gaussmeter provides a stable working current for the three-axis Hall probe, collects and analyzes the Hall voltage signals generated by the three-axis Hall probe in the magnetic field, converts them into magnetic field signals, and displays the readings on the front panel liquid crystal screen.

[0054] Specifically, the three-axis Hall probe 27 and the three-axis gaussmeter are connected through a shielded cable. The three-axis gaussmeter provides a working current of 2 - 10 mA for the three Hall chips in a constant current mode. The three Hall chips of the three-axis Hall probe 27 generate Hall voltages linearly related to the magnetic field intensity in the magnetic field due to the Hall effect. The amplification and filtering circuit of the gaussmeter amplifies and filters the original voltage signals output by the Hall probe, and after passing through the AD acquisition circuit, they are converted into digital signals and enter the CPU. The CPU calculates the magnetic field intensity data measured by each channel according to the calibration data (magnetic field - voltage correspondence) of each Hall chip, and uploads the magnetic field data and frequency data of the three channels to the host computer through the serial port.

[0055] Preferably, the automated detection system further includes a main control module, which is communicatively connected to the motor controller and the test controller respectively. The motor controller feeds back the real-time position coordinates of the five-dimensional electric control displacement platform to the main control module for display and storage by the main control module. The main control module controls the five-dimensional electric control displacement platform to drive the three-axis Hall probe to perform an automated scanning motion along the path set by the user, and during this process, collects the magnetic field data uploaded by the three-axis gaussmeter through the serial port, combines the magnetic field data and the coordinate data of the five-dimensional electric control displacement platform for storage and display, and uses them for operations such as two-dimensional and three-dimensional drawing.

[0056] Preferably, the electron beam control coil includes a magnetic field coil and a magnetic field coil power supply electrically connected thereto, and the magnetic field coil includes a focusing coil and a scanning coil. The magnetic field coil power supply provides a stable working current for the focusing coil and the scanning coil to drive the coil to generate a magnetic field. The scanning methods of both the focusing coil and the scanning coil are to scan along a circular trajectory. Finally, the collected data is processed by different methods. The focusing coil mainly focuses on the consistency of the values at each point, specifically, the fluctuation of the magnitude of the magnetic induction intensity and the ratio of the absolute value. The scanning coil mainly focuses on the angle between the maximum value of the magnetic induction intensity and 0, and compares it with 90 degrees to see the size of the difference.

[0057] Embodiment 2

[0058] Preferably, the X-axis of the electric control translation stage includes a first stepping motor 2, a first base plate 3, a first transmission lead screw 4, a first transmission guide rail 5 and a first slider 6. Two first transmission guide rails 5 are fixed on the first base plate 3, and the first base plate 3 is fixed on the non-magnetic optical platform 1. The first stepping motor 2 is connected to the first transmission lead screw 4 through a coupling to drive the first transmission lead screw 4 to rotate. The first slider 6 and the first transmission lead screw 4 form a transmission mechanism through balls, and the first slider 6 freely slides on the first transmission guide rail 5 driven by the first transmission lead screw 4 to achieve translational motion along the X-axis direction of the horizontal plane in the Cartesian coordinate system. The first base plate 3 of the X-axis of the electric control translation stage is fixedly connected to the tabletop of the non-magnetic optical platform 1 by screws.

[0059] The Y-axis of the electric control translation stage includes a second stepping motor 11, a second base plate 7, a second transmission lead screw 10, second transmission guide rails 8, and a second slider 9. The two second transmission guide rails 8 are fixed to the second base plate 7, and the second base plate 7 is fixed to the first slider 6. The second stepping motor 11 is connected to the second transmission lead screw 10 through a coupling to drive the second transmission lead screw 10 to rotate. The second slider 9 and the second transmission lead screw 10 form a transmission mechanism through balls. The second slider 9 freely slides on the second transmission guide rails 8 driven by the second transmission lead screw 10 to achieve translational motion along the Y-axis direction of the horizontal plane in the Cartesian coordinate system. The second base plate 7 of the Y-axis of the electric control translation stage is fixedly connected to the table surface of the first slider 6 of the X-axis of the electric control translation stage through screws.

[0060] The Z-axis of the electric control translation stage is assembled by a third base plate 12, four-column transmission guide rails 13, a third transmission lead screw 14, a third slider 15, a top plate 16, and a third stepping motor 17. The four column transmission guide rails 13 are fixed between the third base plate 12 and the top plate 16. The third base plate 12 is fixed to the second slider 9. The third stepping motor 17 is connected to the third transmission lead screw 14 through a coupling to drive the third transmission lead screw 14 to rotate. The third slider 15 and the third transmission lead screw 14 form a transmission mechanism through balls. The third slider 15 freely slides on the four-column transmission guide rails 13 driven by the third transmission lead screw 14 to achieve translational motion along the Z-axis direction of the vertical plane in the Cartesian coordinate system. The third base plate 12 of the Z-axis of the electric control translation stage is fixedly connected to the table surface of the second slider 9 of the Y-axis of the electric control translation stage through screws.

[0061] The W-axis of the electric control rotary stage includes a fourth stepping motor 18, a worm and gear transmission mechanism 19, and a rotary table surface 20. The positioning surface of the worm and gear transmission mechanism 19 is fixed to the third slider 15. The fourth stepping motor 18 drives the worm in the worm and gear transmission mechanism 19 to rotate through a coupling, thereby driving the rotary table surface 20 connected to the gear of the worm and gear transmission mechanism 19 to rotate, achieving rotational motion around the Z-axis direction of the vertical plane in the Cartesian coordinate system. The worm and gear transmission mechanism 19 of the W-axis of the electric control rotary stage is fixed to the extended arm protruding from the third slider 15 of the Z-axis of the electric control translation stage through screws.

[0062] The U-axis of the electric control translation stage includes a fifth stepper motor 21, a fifth base plate 22, a fifth driving lead screw 23, a fifth driving guide rail 24, and a fifth slider 25. Two fifth driving guide rails 24 are fixed on the fifth base plate 22, and the fifth base plate 22 is fixed on the rotary table surface 20. The fifth stepper motor 21 is connected to the fifth driving lead screw 23 through a coupling to drive the fifth driving lead screw 23 to rotate. The fifth slider 25 and the fifth driving lead screw 23 form a transmission mechanism through balls, and the fifth slider 25 slides freely on the fifth driving guide rail 24 under the drive of the fifth driving lead screw 23. The fifth base plate 22 of the U-axis of the electric control translation stage and the rotary table surface 20 of the W-axis of the electric control rotary stage are fixedly connected by screws.

[0063] The fixture 26 is installed and fixed on the table surface of the fifth slider 25. When the fifth slider 25 is at the zero position of the U-axis, the axis of the fixture 26 for fixing the three-axis Hall probe coincides with the rotation axis of the W-axis of the electric control rotary stage. When the fifth slider 25 is at the position of U = U0, the three-axis Hall probe fixture will perform a circular motion with the rotation axis of the W-axis as the center and the length U0 as the radius under the drive of the W-axis.

[0064] Embodiment 3

[0065] As Figure 2 shown, the method for scanning the magnetic field distributions of the focusing coil and the scanning coil by adopting the above electron beam control coil magnetic field detection system is specifically as follows.

[0066] Step 1: Connect each motor in the five-axis electric control displacement platform to the motor controller, and connect the magnetic field measurement sensor to the test controller.

[0067] Connect the X-axis stepper motor 2 of the electric control translation stage, the Y-axis stepper motor 11 of the electric control translation stage, the Z-axis stepper motor 17 of the electric control translation stage, the W-axis stepper motor 18 of the electric control rotary stage, and the U-axis stepper motor 21 of the electric control translation stage to the motor controller through shielded cables; connect the magnetic field measurement sensor (three-axis Hall probe 27) to the test controller (three-axis gaussmeter) through a shielded cable.

[0068] Step 2: Power on the test controller (three-axis gaussmeter) and the motor controller.

[0069] Step 3: Run the control software of the main control module (host computer), and establish serial communication connections between the software and the test controller (three-axis gaussmeter) and the motor controller.

[0070] Step 4: Operate the control software of the main control module (host computer), and move the magnetic field measurement sensor (three-axis Hall probe 27) to the initial position of the coil to be measured by respectively controlling the X-axis, Y-axis, and Z-axis of the electric control translation stage.

[0071] Step 5. Select an appropriate control method according to the required scanning dimension:

[0072] (1) If two-dimensional scanning is to be performed, enter the line scanning control mode, select the motion axis according to the scanning shape. If linear scanning is required, set the operating parameters of the X-axis, Y-axis, or Z-axis of the electric control translation stage; if curve scanning is required, set the operating parameters of the W-axis of the electric control rotary stage.

[0073] (2) If three-dimensional scanning is to be performed, enter the surface scanning control mode, select the combination form of motion axes according to the scanning shape. If rectangular surface scanning is required, set the operating parameters of the X-axis and Y-axis (horizontal plane) or X-axis and Z-axis (vertical plane) or Y-axis and Z-axis (vertical plane) of the electric control translation stage; if circular plane scanning is required, set the operating parameters of the W-axis of the electric control rotary stage and the U-axis of the electric control translation stage; if cylindrical surface scanning is required, set the operating parameters of the W-axis of the electric control rotary stage and the Z-axis of the electric control translation stage.

[0074] Step 6. After completing the scanning parameter settings, execute the automatic scanning process. The main control module (host computer) will automatically control the five-dimensional electric control displacement platform to execute the scanning trajectory according to the set parameters, and automatically save the displacement coordinates and the corresponding magnetic field data during the scanning process.

[0075] Step 7. After the scanning process is completed, enter the data management interface of the host computer software:

[0076] (1) In the data plotting unit, perform data plotting operations according to the scanning dimension. If line scanning is performed, perform two-dimensional data plotting; if surface scanning is performed, perform three-dimensional data plotting. The plotting operation can characterize the change trend of the magnetic field with displacement, and can also characterize the three-dimensional distribution of the magnetic field in space;

[0077] (2) In the data viewing unit, the test data can be exported to an Excel table for convenient data storage and further analysis.

[0078] Step 8. After the end of this test process, select the next operation according to the need:

[0079] (1) If the next test is required, return to Step 4, adjust the initial position of the magnetic field measurement sensor (triaxial Hall probe 27) and retest;

[0080] (2) If no other tests are needed, turn off the control module (host computer), power off the test controller (triaxial gaussmeter) and the motor controller, and end the test.

[0081] For ease of explanation, spatial relative terms such as "upper", "lower", "left", "right", etc. are used in the embodiments to describe the relationship of one element or feature shown in the drawings relative to another element or feature. It should be understood that, in addition to the orientation shown in the drawings, the spatial terms are intended to include different orientations of the device during use or operation. For example, if the device in the drawings is inverted, an element described as being "below" other elements or features will be positioned "above" the other elements or features. Thus, the exemplary term "below" can encompass both upper and lower orientations. The device may be otherwise positioned (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein can be interpreted accordingly.

[0082] Moreover, relative terms such as "first" and "second" are used merely to distinguish one component with the same name from another, and do not necessarily require or imply any actual relationship or order between these components.

[0083] The above description is only a preferred embodiment of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements can be made, and these improvements should also be regarded as the protection scope of the present invention.

Claims

1. An electron beam control coil magnetic field detection system, characterized in that, It includes a non-magnetic optical platform, electron beam control coils, a multi-dimensional electrically controlled displacement module disposed on the non-magnetic optical platform, a magnetic field measurement sensor driven by the multi-dimensional electrically controlled displacement module to move within the magnetic field generated by the electron beam control coils, and a test controller communicatively connected to the magnetic field measurement sensor, wherein: The multi-dimensional electrically controlled displacement module includes a five-dimensional electrically controlled displacement platform and a motor controller for controlling the movement of each motor in the five-dimensional electrically controlled displacement platform. The five-dimensional electrically controlled displacement platform is fixedly installed on the non-magnetic optical platform. The five-dimensional electrically controlled displacement platform includes a three-dimensional electrically controlled translation stage for driving the magnetic field measurement sensor to perform three-dimensional linear motion along the X-axis, Y-axis, and Z-axis in the Cartesian coordinate system, an electrically controlled rotary stage W-axis for driving the magnetic field measurement sensor to rotate around the Z-axis in the Cartesian coordinate system, and an electrically controlled translation stage U-axis for adjusting the rotation radius of the magnetic field measurement sensor. The magnetic field measurement sensor is fixed on the tabletop of the electrically controlled translation stage U-axis. The three-dimensional electrically controlled translation stage includes an electrically controlled translation stage X-axis, an electrically controlled translation stage Y-axis, and an electrically controlled translation stage Z-axis. The electrically controlled rotary stage W-axis is fixed on the tabletop of the electrically controlled translation stage Z-axis, and the electrically controlled translation stage U-axis is installed on the rotary tabletop of the electrically controlled rotary stage W-axis. The electrically controlled translation stage U-axis includes a fifth stepper motor, a fifth base plate, a fifth transmission lead screw, a fifth transmission guide rail, and a fifth slider. Two fifth transmission guide rails are fixed on the fifth base plate. The fifth base plate is fixed on the rotary tabletop of the electrically controlled rotary stage W-axis. The fifth stepper motor is connected to the fifth transmission lead screw through a coupling to drive the fifth transmission lead screw to rotate. The fifth slider and the fifth transmission lead screw form a transmission mechanism through balls, and the fifth slider freely slides on the fifth transmission guide rail under the drive of the fifth transmission lead screw. When the fifth slider is at the zero position of the U-axis, the axis of the fixture for fixing the magnetic field measurement sensor coincides with the rotation axis of the electrically controlled rotary stage W-axis. When the fifth slider is at U = U position, the fixture of the magnetic field measurement sensor will perform a circular motion around the rotation axis of the W-axis with a radius of length U under the drive of the W-axis. The electron beam control coil magnetic field detection system further includes a main control module, and the main control module is communicatively connected to the motor controller and the test controller respectively.

2. The electron beam control coil magnetic field detection system according to claim 1, characterized in that, The motor controller includes a motion control main board and a stepper motor driver, and the motion control main board is communicatively connected to the main control module and the stepper motor driver respectively.

3. The electron beam control coil magnetic field detection system according to claim 1, wherein The electron beam control coils are installed on the tabletop of the non-magnetic optical platform through a positioning tooling and are driven by a stable DC current output by a DC regulated power supply.

4. The electron beam control coil magnetic field detection system according to claim 1, wherein, The magnetic field measurement sensor is fixed on the tabletop of the electrically controlled translation stage U-axis through a fixture. The magnetic field measurement sensor is a three-axis Hall probe, and the test controller is a three-axis gaussmeter.

5. The electron beam control coil magnetic field detection system according to claim 1, wherein The electron beam control coils include magnetic field coils and a magnetic field coil power supply electrically connected thereto, and the magnetic field coils include a focusing coil and a scanning coil.

6. The electron beam control coil magnetic field detection system according to claim 1, characterized in that The X-axis of the electric control translation stage includes a first stepping motor, a first base plate, a first transmission lead screw, a first transmission guide rail, and a first slider. Two first transmission guide rails are fixed on the first base plate, and the first base plate is fixed on the non-magnetic optical platform. The first stepping motor is connected to the first transmission lead screw through a coupling to drive the first transmission lead screw to rotate. The first slider and the first transmission lead screw form a transmission mechanism through balls. The first slider freely slides on the first transmission guide rail driven by the first transmission lead screw to achieve translational motion along the X-axis direction of the horizontal plane in the Cartesian coordinate system.

7. The electron beam control coil magnetic field detection system according to claim 6, characterized in that, The Y-axis of the electric control translation stage includes a second stepping motor, a second base plate, a second transmission lead screw, a second transmission guide rail, and a second slider. Two second transmission guide rails are fixed on the second base plate, and the second base plate is fixed on the first slider. The second stepping motor is connected to the second transmission lead screw through a coupling to drive the second transmission lead screw to rotate. The second slider and the second transmission lead screw form a transmission mechanism through balls. The second slider freely slides on the second transmission guide rail driven by the second transmission lead screw to achieve translational motion along the Y-axis direction of the horizontal plane in the Cartesian coordinate system.

8. The electron beam control coil magnetic field detection system according to claim 7, wherein The Z-axis of the electric control translation stage includes a third base plate, a four-pillar transmission guide rail, a third transmission lead screw, a third slider, a top plate, and a third stepping motor. Four pillar transmission guide rails are fixed between the third base plate and the top plate. The third base plate is fixed on the second slider. The third stepping motor is connected to the third transmission lead screw through a coupling to drive the third transmission lead screw to rotate. The third slider and the third transmission lead screw form a transmission mechanism through balls. The third slider freely slides on the four-pillar transmission guide rail driven by the third transmission lead screw to achieve translational motion along the Z-axis direction of the vertical plane in the Cartesian coordinate system.

9. The electron beam control coil magnetic field detection system according to claim 8, wherein The W-axis of the electric control rotary stage includes a fourth stepping motor, a worm and worm gear transmission mechanism, and a rotary table surface. The positioning surface of the worm and worm gear transmission mechanism is fixed on the third slider. The fourth stepping motor drives the worm in the worm and worm gear transmission mechanism to rotate through a coupling, thereby driving the rotary table surface connected to the worm gear of the worm and worm gear transmission mechanism to rotate, achieving rotational motion around the Z-axis direction of the vertical plane in the Cartesian coordinate system.

10. The method for magnetic field distribution scanning of the electron beam control coil magnetic field detection system according to any one of claims 1-9, characterized in that, It includes the following steps: Step 1: Connect each motor in the five-dimensional electric control displacement platform to the motor controller, and connect the magnetic field measurement sensor to the test controller; Step 2: Power on the test controller and the motor controller to work; Step 3: Run the main control module and establish a serial communication connection between the main control module and the test controller and the motor controller; Step 4: Through the main control module, control the X-axis of the electric control translation stage, the Y-axis of the electric control translation stage, and the Z-axis of the electric control translation stage respectively to move the magnetic field measurement sensor to the initial position of the measured electron beam control coil; Step 5: Select a suitable control method according to the required scanning dimension: (1) If two-dimensional scanning is performed, enter the line scanning control mode, select the motion axis according to the scanning shape. If linear scanning is required, set the operating parameters of the X-axis, Y-axis, or Z-axis of the electric control translation stage; if curve scanning is required, set the operating parameters of the W-axis of the electric control rotary stage. (2) If three-dimensional scanning is performed, enter the surface scanning control mode, select the combination form of motion axes according to the scanning shape. If rectangular surface scanning is required, set the operating parameters of the X-axis and Y-axis of the electric control translation stage, or the X-axis and Z-axis of the electric control translation stage, or the Y-axis and Z-axis of the electric control translation stage; if circular plane scanning is required, set the operating parameters of the W-axis of the electric control rotary stage and the U-axis of the electric control translation stage; if cylindrical surface scanning is required, set the operating parameters of the W-axis of the electric control rotary stage and the Z-axis of the electric control translation stage. Step 6, after completing the parameter setting in Step 5, execute the automatic scanning process: the main control module will automatically control the five-dimensional electric control displacement platform to execute the scanning trajectory according to the set parameters, and automatically save the displacement coordinates and the corresponding magnetic field data during the scanning process. Step 7, when the scanning process ends, the main control module performs data processing: (1) In the data plotting unit of the main control module, perform data plotting operations according to the scanning dimension. If line scanning is performed, two-dimensional data plotting is carried out; if surface scanning is performed, three-dimensional data plotting is carried out. The plotting operation can characterize the change trend of the magnetic field with displacement or the three-dimensional distribution of the magnetic field in space. (2) In the data viewing unit of the main control module, the test data can be exported to an Excel table for data saving and further analysis. Step 8, after the end of this test process, select the next operation according to the need: (1) If the next test is required, return to Step 4, adjust the initial position of the magnetic field measurement sensor and retest. (2) If no other tests are needed, turn off the main control module, power off the test controller and the motor controller, and end the test.

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