A quartz boat structure for wafer baking

Abstract

The invention discloses a quartz boat structure for wafer baking, comprising an upper top plate and a lower bottom plate, at least one crankshaft structure is rotatably connected between the upper top plate and the lower bottom plate, at least one vertical rod is fixed between the edge positions of the upper top plate and the lower bottom plate, the vertical rod is provided with a slot, and the crankshaft structure comprises a plurality of connecting shafts and a U-shaped arm fixedly connected between adjacent connecting shafts. The invention can facilitate the horizontal placement of wafers into the quartz boat, and can keep the wafers stable and prevent the wafers from falling off when the quartz boat moves.

Description

Technical Field

[0001] The invention relates to the field of quartz boats, in particular to a quartz boat structure for wafer baking. Background Art

[0002] At present, wafer baking uses a vertical quartz boat as a carrier. The structure of the quartz boat is as follows: Figure 1 , Figure 2 As shown, it includes an axially vertical upper top plate 1 and a lower bottom plate 2, the upper top plate 1 and the lower bottom plate 2 are coaxial, a cylindrical area is determined between the upper top plate 1 and the lower bottom plate 2, and a plurality of vertical rods 3 are connected between the edge positions of the upper top plate 1 and the lower bottom plate 2, and each vertical rod 3 is provided with a multi-layer card slot on one side facing the cylindrical area, and the multi-layer card slot positions of the plurality of vertical rods 3 correspond to each other, and the rounded angle of the arc formed by the plurality of vertical rods 3 is greater than or equal to 180 degrees. When working, the wafer 4 is placed in the cylindrical area and located at the height of one layer of the card slot of the vertical rod 3, so that the wafer 4 is horizontal, and the card slots of the vertical rods 3 at the same layer cooperate with each other to clamp the side of the wafer 4, thereby forming a fixation for the wafer 4.

[0003] Since the quartz boat needs to rotate, lift, etc. when baking the wafers, in order to adjust the posture so that the wafers are fully baked, the arc-shaped fillet formed by the vertical rods 3 is generally set to be greater than 180 degrees, so that the wafers can be effectively fixed around the wafers 4 to prevent the wafers 4 from falling off from the cylindrical area when the quartz boat moves. However, the problem with the quartz boat structure with vertical rods 3 distributed greater than 180 degrees is that it is difficult to put the wafers 4 in. The wafers 4 must first be placed vertically through the gaps between adjacent vertical rods 3 and stuffed into the cylindrical area, and then the wafers 4 are adjusted to be horizontal. During the adjustment process of the wafer 4, it is easy to collide with the surrounding vertical rods 3, which leads to damage.

[0004] In order to solve this problem, some quartz boats have an arc-shaped fillet of 180 degrees formed by the vertical rods 3 (such as Figure 2 As shown), it is equivalent to that each vertical rod 3 is located outside one radial side of the cylindrical area. Although the quartz boat with this structure can allow the wafer 4 to be delivered into the cylindrical area in a flat state (that is, the wafer 4 is delivered from the side without the vertical rod 3), since the wafer 4 can be delivered flatly, the wafer 4 can also fall off flatly, so the problem of wafer 4 falling off still exists. Summary of the invention

[0005] The purpose of the present invention is to provide a quartz boat structure for wafer baking, so as to solve the problems of difficult placement and easy falling of wafers in the prior art quartz boat.

[0006] In order to achieve the above object, the technical solution adopted by the present invention is:

[0007] A quartz boat structure for wafer baking, comprising an upper top plate and a lower bottom plate, characterized in that at least one crankshaft structure is rotatably connected between the upper top plate and the lower bottom plate, the crankshaft structure comprises a plurality of vertical connecting shafts and U-shaped arms fixedly connected between adjacent connecting shafts, the U-shaped arms are in a horizontally flat state with the U-shaped surface parallel to the vertical direction, and also comprise at least one vertical rod connected between the edge positions of the upper top plate and the lower bottom plate, the vertical rod being provided with a slot corresponding to the height position of each U-shaped arm.

[0008] Furthermore, there are two crankshaft structures, one of which is rotatably connected between the centers of the upper top plate and the lower bottom plate, and the other crankshaft structure is rotatably connected between the upper top plate and the lower bottom plate near the center.

[0009] Furthermore, there are two crankshaft structures, and the connection positions of the two crankshaft structures at the upper top plate are symmetrical to each other according to the center, and the corresponding two crankshaft structures are symmetrical to each other according to the center at the connection positions of the lower bottom plate.

[0010] Furthermore, when there are multiple vertical rods, the rounded angle of the arc formed by the multiple vertical rods is less than 180 degrees.

[0011] Furthermore, the slot on the vertical rod is a step slot.

[0012] Furthermore, it also includes an electric drive device arranged on at least one of the upper top plate and the lower bottom plate, and the electric drive device is connected to the corresponding shaft end of the crankshaft structure, and the crankshaft structure is driven to rotate by the electric drive device.

[0013] In the present invention, at least one rotatable crankshaft structure is provided, and each curved arm of the crankshaft structure cooperates with the corresponding slots of the vertical rod to fix the multi-layer wafer. When the wafer needs to be placed, the crankshaft structure can be rotated so that the rounded angle of the arc formed by the end of the curved arm and the vertical rod is less than 180 degrees, so that the wafer can be placed flat; when the wafer needs to be fixed, the crankshaft structure can be rotated so that the rounded angle of the arc formed by the end of the curved arm and the vertical rod is greater than 180 degrees, so that the wafer can be fixed on all sides.

[0014] Compared with the prior art, the present invention can facilitate the horizontal placement of wafers into the quartz boat and can fix the wafers from all sides when necessary. It has the advantages of being easy to use and can keep the wafers stable and prevent the wafers from falling off when the quartz boat moves. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the structure of a quartz boat in the prior art.

[0016] Figure 2 It is a top view of the internal structure of a quartz boat in the prior art.

[0017] Figure 3 It is a front view of the structure when the crankshaft structure of the present invention is symmetrical.

[0018] Figure 4 yes Figure 3 Front view of the structure when the wafer is placed.

[0019] Figure 5 yes Figure 3 Top view of the internal structure.

[0020] Figure 6 yes Figure 3 Top view of the structure when the wafer is placed.

[0021] Figure 7 yes Figure 3 A top view of the working state of the structure when the wafer is fixed after the wafer is placed.

[0022] Figure 8 It is a top view of the structure when one of the crankshaft structures of the present invention is located at the center.

[0023] Fig. 9 yes Figure 8 A top view of the working state of the structure when the wafer is fixed after the wafer is placed.

[0024] Fig.10 It is a top view of the structure of a single crankshaft structure of the present invention. DETAILED DESCRIPTION

[0025] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0026] like Figure 3 , Figure 4 , Figure 5 As shown, the present invention provides a quartz boat structure for wafer baking, comprising an upper top plate 1 and a lower bottom plate 2 located below the upper top plate 1, wherein the upper top plate 1 and the lower bottom plate 2 are axially vertical and coaxial, and a cylindrical region is determined by the upper top plate 1 and the lower bottom plate 2, wherein the upper top plate 1 is the top of the cylindrical region, and the lower bottom plate 2 is the bottom of the cylindrical region.

[0027] A vertical rod 3 is fixedly connected between the rear edges of the upper top plate 1 and the lower bottom plate 2, or a plurality of vertical rods 3 are fixedly connected. When there are a plurality of vertical rods 3, the rounded angle of the arc formed by the plurality of vertical rods 3 is less than 180 degrees. A plurality of slots 5 are provided on one side of each vertical rod 3 facing the cylindrical region. The slots 5 are step-groove structures. The slots 5 on each vertical rod 3 are distributed vertically. When there are a plurality of vertical rods 3, the slots 5 correspond to each other in position.

[0028] A crankshaft structure is rotatably connected between the upper top plate 1 and the lower bottom plate 2 at the center-left position, and a crankshaft structure is also rotatably connected between the upper top plate 1 and the lower bottom plate 2 at the center-right position, and the two crankshaft structures are symmetrical to each other along the central axis of the cylindrical region. Specifically, the crankshaft structure includes multiple coaxial vertical connecting shafts 7 and U-shaped arms 6 arranged between adjacent connecting shafts 7, and the U-shaped arms 6 are placed horizontally as a whole, and the U-shaped surface of the U-shaped arms 6 is parallel to the vertical direction, the U-shaped mouth of the U-shaped arms 6 faces the center direction of the cylindrical region, and the U-shaped bottom of the U-shaped arms 6 faces the edge direction of the cylindrical region, and the two ends of the U-shaped mouth of each U-shaped arm 6 are respectively fixedly connected to the corresponding two connecting shafts 6. In addition, the positions of each U-shaped arm 6 of each crankshaft structure correspond to the positions of the slots 5 of the vertical rod 3 one by one, so that at each layer of height, the wafer 4 placed at the height of the layer is fixed by the slots 5 of the vertical rod 3 and the U-shaped mouth of the U-shaped arms 6. Furthermore, the total length of the corresponding layers of the U-shaped arms 6 in the two crankshaft structures when they are in the same radial direction is greater than the diameter of the wafer 4 .

[0029] An electric drive device 8 consisting of a rotor and a stator is installed at the top of the upper top plate 1 corresponding to each crankshaft structure position, wherein the rotor is fixed to the upper end of the uppermost connecting shaft in the corresponding crankshaft structure, and the stator is distributed around the rotor and electrically connected to an external power supply, similar to an electric motor. When power is turned on, the crankshaft structure as a whole rotates with the rotor, thereby realizing automatic rotation and adjustment of the crankshaft structure. Of course, a rotation sensor can also be integrated on the rotor to detect the rotation angle of the crankshaft structure.

[0030] like Figure 6 As shown, when the wafer 4 needs to be placed, the two crankshaft structures are rotated so that the arc angle determined by the outermost ends of the vertical rod 3 and the U-shaped arms 6 in the two crankshaft structures (i.e., the U-shaped bottom) is less than or equal to 180 degrees ( Figure 6 In this way, the wafer 4 can be placed horizontally and fixed by the U-shaped opening of a layer of slots 5 and U-shaped arms 6.

[0031] like Figure 7 As shown, after the wafer 4 is placed, when it is necessary to fix the wafer 4, the two crankshaft structures are rotated. Since the total length of the two U-shaped arms 6 in the same layer in the same radial direction is greater than the diameter of a wafer 4, there is sufficient margin for the U-shaped arms 6 to rotate. Therefore, after the rotation, the arc angle determined by the outermost ends of the vertical rod 3 and the U-shaped arms 6 in the two crankshaft structures is greater than 180 degrees. At this time, the clamping groove 5 of the vertical rod 3 and the U-shaped mouth of the U-shaped arm 6 cooperate with each other to fix the wafer 4 on all sides to prevent the wafer 4 from falling off when the quartz boat moves as a whole.

[0032] like Figure 8As shown, as a variation of the present invention, when there are two crankshaft structures, one of the crankshaft structures can be rotatably connected between the center of the upper top plate 1 and the lower bottom plate 2, and the other crankshaft structure is rotatably connected to the right of the center between the upper top plate 1 and the lower bottom plate 2. Fig. 9 As shown, when the wafer 4 needs to be fixed after being placed, the crankshaft structure on the right side of the center can be kept stationary, and only the crankshaft structure at the center is rotated, so that the wafer 4 can be effectively fixed.

[0033] like Fig.10 As shown, as a variation structure of the present invention, the present invention may have only one crankshaft structure, and the crankshaft structure may cooperate with at least two vertical rods 3. The crankshaft structure is preferably connected between the centers of the upper top plate 1 and the lower bottom plate 2, so that by rotating the crankshaft structure, the fillet of the arc determined by the two vertical rods 3 and the outermost ends of the crankshaft structure can have a range of less than or equal to 270 degrees, thereby not only enabling the wafer to be placed flat in the cylindrical area, but also effectively fixing the wafer.

[0034] The embodiments described in the present invention are merely descriptions of the preferred implementation modes of the present invention, and are not intended to limit the concept and scope of the present invention. Without departing from the design concept of the present invention, various modifications and improvements made to the technical solutions of the present invention by engineers and technicians in this field should fall within the protection scope of the present invention. The technical contents for which protection is sought in the present invention have all been recorded in the claims.

Claims

1. A quartz boat structure for wafer baking, comprising an upper top plate and a lower bottom plate, wherein the upper top plate and the lower bottom plate define a cylindrical region, wherein the upper top plate is the top of the cylindrical region and the lower bottom plate is the bottom of the cylindrical region, characterized in that: A crankshaft structure is rotatably connected between the upper top plate and the lower bottom plate, and the crankshaft structure includes multiple vertical connecting shafts and U-shaped arms fixedly connected between adjacent connecting shafts, wherein the U-shaped arms are in a horizontally flat state with the U-shaped surface parallel to the vertical direction, the U-shaped mouth of the U-shaped arm faces the center direction of the cylindrical area, and the U-shaped bottom of the U-shaped arm faces the edge direction of the cylindrical area; There are two crankshaft structures, one of which is rotatably connected between the centers of the upper top plate and the lower bottom plate, and the other crankshaft structure is rotatably connected between the upper top plate and the lower bottom plate near the center; or the two crankshaft structures are symmetrical to each other at the connection positions of the upper top plate, and the corresponding two crankshaft structures are symmetrical to each other at the connection positions of the lower bottom plate; It also includes at least one vertical rod connected between the edge positions of the upper top plate and the lower bottom plate, and the vertical rod is provided with a slot corresponding to the height position of each U-shaped arm. At each level of height, the slot of the vertical rod and the U-shaped mouth of the U-shaped arm cooperate to fix the wafer placed at the height of that level, and the slot of the vertical rod and the U-shaped mouth of the U-shaped arm cooperate to fix the wafer on all sides.

2. A quartz boat structure for wafer baking according to claim 1, characterized in that: When there are multiple vertical bars, the rounded angle of the arc formed by the multiple vertical bars is less than 180 degrees.

3. The quartz boat structure for wafer baking according to claim 1, characterized in that: The clamping groove on the vertical rod is a step groove.

4. The quartz boat structure for wafer baking according to claim 1, characterized in that: It also includes an electric drive device arranged on at least one of the upper top plate and the lower bottom plate, the electric drive device is connected to the corresponding shaft end of the crankshaft structure, and the crankshaft structure is driven to rotate by the electric drive device.

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