A semiconductor light emitting element having a hydrogen evolution layer

Abstract

The invention relates to the technical field of semiconductor optoelectronic devices, and in particular to a semiconductor light-emitting element with a hydrogen evolution layer, which comprises, from bottom to top, a substrate, an n-type semiconductor, a multi-quantum well, a p-type semiconductor and a hydrogen evolution layer, wherein the hydrogen evolution layer is above the p-type semiconductor and immersed in an electrochemical solution, and adsorbs H atoms in a Mg-H complex of the p-type semiconductor under an external bias voltage by an electrochemical method, reduces hydrogen binding energy and hydrogen adsorption Gibbs period free energy, and performs desorption, forms H2 to discharge from the surface, improves the ionization rate of Mg, reduces the acceptor activation energy of Mg, and improves the hole concentration of the p-type semiconductor.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor photoelectric devices, in particular to a semiconductor light-emitting element with a hydrogen evolution layer. Background Art

[0002] Semiconductor components, especially semiconductor light-emitting components, have a wide range of adjustable wavelengths, high luminous efficiency, energy saving and environmental protection, long service life of more than 100,000 hours, small size, strong designability and other factors. They have gradually replaced incandescent lamps and fluorescent lamps and become the light source for ordinary household lighting. They are also widely used in new scenarios, such as indoor high-resolution display screens, outdoor display screens, mobile TV backlighting, street lights, car lights, flashlights and other application fields. The low Mg solubility, high Mg ionization energy, high acceptor activation energy and low Mg ionization efficiency of the p-type contact layer of traditional nitride semiconductors lead to free hole concentrations generally lower than 5E17cm -3 ; In particular, the ionization energy and acceptor activation energy of Mg gradually increase with the increase of Al content, resulting in a further decrease in the hole density. Summary of the invention

[0003] In order to solve the above technical problems, the present invention provides a semiconductor light-emitting element with a hydrogen evolution layer, wherein the hydrogen evolution layer is above a p-type semiconductor, and adsorbs H atoms in the Mg-H complex of the p-type semiconductor under an external bias voltage by an electrochemical method, reduces the hydrogen binding energy and the Gibbs period free energy of hydrogen adsorption, and desorbs, forming H2 to discharge from the surface, thereby increasing the ionization rate of Mg and reducing the acceptor activation energy of Mg, and increasing the hole concentration of the p-type semiconductor.

[0004] To achieve the above object, the present invention is implemented by adopting the following technical solutions:

[0005] A semiconductor light emitting element with a hydrogen evolution layer comprises, from bottom to top, a substrate, an n-type semiconductor, a multi-quantum well, a p-type semiconductor and a hydrogen evolution layer, wherein the hydrogen evolution layer is located above the p-type semiconductor and immersed in an electrochemical solution, and adsorbs and desorbs H atoms in a Mg-H complex of the p-type semiconductor.

[0006] In the above technical solution, the hydrogen evolution layer is Ti3C2O x 、Ti3C2O x -Pt, Ti3C2O x -Pt SA 、Ti3C2O2、Ti3C2O 2-y 、Ti3C 2-z O 2-y -Pt SA 、Ti3C2O 2-y -N-Pt SA, AlGaN:Mg, GaN:Mg, GaN:Si, InGaN:Mg, InGaN:Si, InGaN:Mg, AlInGaN:Mg, AlInGaN:Si, any one or any combination, where 0≤x≤5, 0≤y≤5, 0≤z≤5.

[0007] In the above technical solution, the hydrogen evolution layer is Ti3C2O x 、Ti3C2O x -Pt, Ti3C2O x -Pt SA 、Ti3C2O2、Ti3C2O 2-y 、Ti3C 2-z O 2-y -Pt SA 、Ti3C2O 2-y -N-Pt SA Any one or any combination of , where 0≤x≤5, 0≤y≤5, 0≤z≤5.

[0008] In the above technical solution, the hydrogen evolution layer is Ti3C2O x 、Ti3C2O x -Pt, Ti3C2O x -Pt SA 、Ti3C2O2、Ti3C2O 2-y 、Ti3C 2-z O 2-y -Pt SA 、Ti3C2O 2-y -N-Pt SA A combination of any one or more of and any one or more of AlGaN:Mg, GaN:Mg, GaN:Si, InGaN:Mg, InGaN:Si, InGaN:Mg, AlInGaN:Mg, AlInGaN:Si, where 0≤x≤5, 0≤y≤5, 0≤z≤5.

[0009] In the above technical solution, any combination of the hydrogen evolution layer includes but is not limited to the following structures: Ti3C2O x / Ti3C2O x -Pt, Ti3C2O x / Ti3C2O x -Pt SA 、Ti3C2O x / Ti3C2O2、Ti3C2O x / Ti3C2O 2-y 、Ti3C2O x / Ti3C 2-z O 2-y -Pt SA<h2 style=";text-align:left;direction:ltr">Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt, Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O2, Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt, Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2, Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O2 / Ti3C2O2 Ti3C2O2<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> Ti3C2O2 / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt, Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2, Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt, Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2, Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt, Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2, Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O2-y -N-Pt SA / Ti3C2O 2-y 、Ti3C 2-z OR 2-y -N-Pt SA / Ti3C 2-z OR 2-y -Pt SA 、Ti3C 2-z OR 2-y -N-Pt SA / Ti3C2O 2-y -N-Pt SA 、GaN:Mg / Ti3C2O x -Pt、GaN:Mg / Ti3C2O x -Pt SA 、GaN:Mg / Ti3C2O2、GaN:Mg / Ti3C2O 2-y 、GaN:Mg / Ti3C 2-z OR 2-y -Pt SA 、GaN:Mg / Ti3C2O 2-y -N-Pt SA 、AlGaN:Mg / Ti3C2O x -Pt、AlGaN:Mg / Ti3C2O x -Pt SA 、AlGaN:Mg / / Ti3C2O2、AlGaN:Mg / Ti3C2O 2-y 、AlGaN:Mg / Ti3C 2-z OR 2-y -Pt SA 、AlGaN:Mg / Ti3C2O 2-y -N-Pt SA 、AlGaN:Mg / GaN:Mg / Ti3C2O x -Pt、AlGaN:Mg / GaN:Mg / Ti3C2O x -Pt SA 、AlGaN:Mg / GaN:Mg / Ti3C2O2、AlGaN:Mg / GaN:Mg / Ti3C2O 2-y 、AlGaN:Mg / GaN:Mg / Ti3C 2-z OR 2-y -Pt SA 、AlGaN:Mg / GaN:Mg / Ti3C2O 2-y -N-Pt SA 、GaN:Mg / GaN:Si / Ti3C2O x-Pt、GaN:Mg / GaN:Si / Ti3C2O x -Pt SA 、GaN:Mg / GaN:Si / Ti3C2O2、GaN:Mg / GaN:Si / Ti3C2O 2-y 、GaN:Mg / GaN:Si / Ti3C 2-z OR 2-y -Pt SA 、GaN:Mg / GaN:Si / Ti3C2O 2-y -N-Pt SA 、GaN:Mg / GaN:Si、GaN:Mg / InGaN:Si、AlGaN:Mg / GaN:Mg、AlGaN:Mg / GaN:Si、AlGaN:Mg / InGaN:Si、 AlGaN:Mg / GaN:Mg / GaN:Si、AlGaN:Mg / GaN:Mg / InGaN:Si、AlInGaN:Mg / GaN:Mg、AlInGaN:Mg / GaN:S i、AlInGaN:Mg / InGaN:Si、AlInGaN:Mg / GaN:Mg / GaN:Si、AlInGaN:Mg / GaN:Mg / InGaN:Si、AlInGaN:Mg / GaN:Si :Mg / AlGaN:Si、GaN:Mg / InGaN:Mg、AlGaN:Mg / InGaN:Mg、AlGaN:Mg / InGaN:Mg、GaN:Mg / Ti3C2O x / Ti3C2O x -Pt、GaN:Mg / Ti3C2O x / Ti3C2O x -Pt SA 、GaN:Mg / Ti3C2O x / Ti3C2O2、GaN:Mg / Ti3C2O x / Ti3C2O 2-y 、GaN:Mg / Ti3C2O x / Ti3C 2-z OR 2-y -Pt SA 、GaN:Mg / Ti3C2O x / Ti3C2O 2-y -N-Pt SA 、GaN:Mg / Ti3C2O x -Pt / Ti3C2O x -Pt、GaN:Mg / Ti3C2O x -Pt / Ti3C2O x -Pt SA<h2 style=";text-align:left;direction:ltr">GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O2, GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O2 / Ti3C2O2<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O2 / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x<h2 style=";text-align:left;direction:ltr">-Pt、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2- <h2 style=";text-align:left;direction:ltr"> z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z<h2 style=";text-align:left;direction:ltr">O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O2, AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O2 / Ti3C2O2<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O2 / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2- <h2 style=";text-align:left;direction:ltr"> z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2-z O 2-y -N-Pt SA / Ti3C 2-z O 2-y -Pt SA 、AlGaN:Mg / Ti3C 2-z O 2-y -N-Pt SA / Ti3C2O 2-y -N-Pt SA .

[0010] In the above technical solution, the hydrogen evolution layer is above the p-type semiconductor, and adsorbs H atoms in the Mg-H complex of the p-type semiconductor under an external bias voltage by an electrochemical method, reduces the hydrogen binding energy and the Gibbs period free energy of hydrogen adsorption, and desorbs to form H2 to discharge from the surface, thereby increasing the ionization rate of Mg and reducing the acceptor activation energy of Mg, and increasing the hole concentration of the p-type semiconductor.

[0011] In the above technical solution, the hydrogen evolution layer can reduce the hydrogen adsorption Gibbs free energy of the Mg-H complex of the p-type semiconductor from 0.8 eV to close to 0 eV.

[0012] In the above technical solution, the chemical solution of the electrochemical method is any one or any combination of KCl, HCl, NaCl, and AgCl.

[0013] In the above technical scheme, the n-type semiconductor, multiple quantum well, and p-type semiconductor include any one or any multiple combination of GaN, AlGaN, InGaN, AlInGaN, AlN, InN, AlInN, SiC, Ga2O3, BN, GaAs, GaP, InP, AlGaAs, AlInGaAs, AlGaInP, InGaAs, AlInAs, AlInP, AlGaP, and InGaP.

[0014] In the above technical scheme, the substrate includes any one of sapphire, silicon, Ge, SiC, AlN, GaN, GaAs, InP, sapphire / SiO2 composite substrate, sapphire / AlN composite substrate, sapphire / SiNx, magnesium aluminum spinel MgAl2O4, MgO, ZnO, ZrB2, LiAlO2 and LiGaO2 composite substrate.

[0015] In the above technical solution, the semiconductor light emitting element includes a semiconductor light emitting diode, a semiconductor laser diode, a semiconductor laser, and a semiconductor laser element. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a schematic structural diagram of a semiconductor light emitting element having a hydrogen evolution layer according to an embodiment of the present invention;

[0017] Reference numerals: 100: substrate; 101: n-type semiconductor, 102: multiple quantum wells, 103: p-type semiconductor, 104: hydrogen evolution layer. DETAILED DESCRIPTION

[0018] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0019] like Figure 1 As shown, a semiconductor light emitting element with a hydrogen evolution layer according to an embodiment of the present invention comprises, from bottom to top, a substrate 100, an n-type semiconductor 101, a multi-quantum well 102, a p-type semiconductor 103 and a hydrogen evolution layer 104, wherein the substrate 100 is a substrate on which nitride semiconductor crystals can be epitaxially grown, and a substrate having a high transmittance (for example, a transmittance of the light being above 50%) in the wavelength range of light emitted by the semiconductor light emitting element can be selected and used; the n-type semiconductor 101, the multi-quantum well 102, the p-type semiconductor 103 and the hydrogen evolution layer 104 are sequentially included. The layers 104 are sequentially stacked on the substrate 100, and the stacked semiconductor layers are stacked by methods such as metal organic chemical vapor deposition (MOCVD), metal organic vapor phase epitaxy (MOVPE), molecular beam epitaxy (MBE) and hydride vapor phase epitaxy (HVPE); the multi-quantum well 102 is composed of a stacked structure in which well layers and barrier layers are alternately stacked; the hydrogen evolution layer 104 is located above the p-type semiconductor and immersed in the electrochemical solution, adsorbing H atoms in the Mg-H complex of the p-type semiconductor 103 and desorbing them.

[0020] The p-type contact layer of traditional nitride semiconductors has low Mg solubility, high Mg ionization energy, high acceptor activation energy, and low Mg ionization efficiency, which leads to the free hole concentration generally being lower than 5E17cm -3 ; In particular, the ionization energy and acceptor activation energy of Mg gradually increase with the increase of Al component, resulting in a further decrease in hole density. The present invention sets a hydrogen evolution layer 104 above the p-type semiconductor 103, and the hydrogen evolution layer 104 is evaporated above the p-type semiconductor and immersed in the electrochemical solution. The surface of the p-type semiconductor is connected to the cathode. Under the action of the electric field, H+ ions in the Mg-H complex will be attracted to the surface of the p-type semiconductor by the hydrogen evolution layer material to form H2, and escape from the surface of the p-type semiconductor, thereby realizing the desorption and desorption of H, and the Mg-H bond is continuously interrupted, thereby increasing the hole concentration of the p-type semiconductor.

[0021] In some embodiments of the present invention, the hydrogen evolution layer may be Ti3C2O x 、Ti3C2O x -Pt, Ti3C2O x -PtSA 、Ti3C2O2、Ti3C2O 2-y 、Ti3C 2-z O 2-y -Pt SA 、Ti3C2O 2-y -N-Pt SA , any one or any combination of AlGaN:Mg, GaN:Mg, GaN:Si, InGaN:Mg, InGaN:Si, InGaN:Mg, AlInGaN:Mg, AlInGaN:Si, where 0≤x≤5, 0≤y≤5, 0≤z≤5, the hydrogen evolution layer can be grown on the p-type semiconductor by vapor phase epitaxy, liquid phase epitaxy, magnetic cavity sputtering, chemical vapor deposition CVD, metal organic chemical vapor deposition MOCVD and the like.

[0022] In some other embodiments of the present invention, the hydrogen evolution layer may be Ti3C2O x 、Ti3C2O x -Pt, Ti3C2O x -Pt SA 、Ti3C2O2、Ti3C2O 2-y 、Ti3C 2-z O 2-y -Pt SA 、Ti3C2O 2-y -N-Pt SA Any one or any combination of , where 0≤x≤5, 0≤y≤5, 0≤z≤5.

[0023] In some preferred embodiments of the present invention, the hydrogen evolution layer is Ti3C2O x 、Ti3C2O x -Pt, Ti3C2O x -Pt SA 、Ti3C2O2、Ti3C2O 2-y 、Ti3C 2-z O 2-y -Pt SA 、Ti3C2O 2-y -N-Pt SA A combination of any one or more of and any one or more of AlGaN:Mg, GaN:Mg, GaN:Si, InGaN:Mg, InGaN:Si, InGaN:Mg, AlInGaN:Mg, AlInGaN:Si, where 0≤x≤5, 0≤y≤5, 0≤z≤5.

[0024] The hydrogen evolution layer 104 is above the p-type semiconductor 103, and adsorbs H atoms in the Mg-H complex of the p-type semiconductor under an external bias voltage by an electrochemical method, reduces the hydrogen binding energy and the hydrogen adsorption Gibbs period free energy, and desorbs to form H2 to discharge from the surface, thereby increasing the ionization rate of Mg and reducing the acceptor activation energy of Mg, and increasing the hole concentration of the p-type semiconductor.

[0025] As a specific implementation of the above technical solution, the arbitrary combination of the hydrogen evolution layer 104 includes but is not limited to the following structures: Ti3C2O x / Ti3C2O x -Pt, Ti3C2O x / Ti3C2O x -Pt SA 、Ti3C2O x / Ti3C2O2、Ti3C2O x / Ti3C2O 2-y 、Ti3C2O x / Ti3C 2-z O 2-y -Pt SA 、Ti3C2O x / Ti3C2O 2-y -N-Pt SA 、Ti3C2O x -Pt / Ti3C2O x -Pt, Ti3C2O x -Pt / Ti3C2O x -Pt SA 、Ti3C2O x -Pt / Ti3C2O2, Ti3C2O x -Pt / Ti3C2O 2-y 、Ti3C2O x -Pt / Ti3C 2-z O 2-y -Pt SA 、Ti3C2O x -Pt / Ti3C2O 2-y -N-Pt SA 、Ti3C2O x -Pt SA / Ti3C2O x -Pt, Ti3C2O x -Pt SA / Ti3C2O x -Pt SA 、Ti3C2O x -Pt SA / Ti3C2O2、Ti3C2O x -Pt SA<h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O2 / Ti3C2O2 Ti3C2O2<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> Ti3C2O2 / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt, Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2, Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt, Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2, Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y<h2 style=";text-align:left;direction:ltr">Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt, Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2, Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O2 GaN:Mg / Ti3C2O2<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / / Ti3C2O2 AlGaN:Mg / Ti3C2O2<h2 style=";text-align:left;direction:ltr"> 2-y、AlGaN:Mg / Ti3C 2-z OR 2-y -Pt SA 、AlGaN:Mg / Ti3C2O 2-y -N-Pt SA 、AlGaN:Mg / GaN:Mg / Ti3C2O x -Pt、AlGaN:Mg / GaN:Mg / Ti3C2O x -Pt SA 、AlGaN:Mg / GaN:Mg / Ti3C2O2、AlGaN:Mg / GaN:Mg / Ti3C2O 2-y 、AlGaN:Mg / GaN:Mg / Ti3C 2-z OR 2-y -Pt SA 、AlGaN:Mg / GaN:Mg / Ti3C2O 2-y -N-Pt SA 、GaN:Mg / GaN:Si / Ti3C2O x -Pt、GaN:Mg / GaN:Si / Ti3C2O x -Pt SA 、GaN:Mg / GaN:Si / Ti3C2O2、GaN:Mg / GaN:Si / Ti3C2O 2-y 、GaN:Mg / GaN:Si / Ti3C 2-z OR 2-y -Pt SA 、GaN:Mg / GaN:Si / Ti3C2O 2-y -N-Pt SA 、GaN:Mg / GaN:Si、GaN:Mg / InGaN:Si、AlGaN:Mg / GaN:Mg、AlGaN:Mg / GaN:Si、AlGaN:Mg / InGaN:Si、 AlGaN:Mg / GaN:Mg / GaN:Si、AlGaN:Mg / GaN:Mg / InGaN:Si、AlInGaN:Mg / GaN:Mg、AlInGaN:Mg / GaN:S i、AlInGaN:Mg / InGaN:Si、AlInGaN:Mg / GaN:Mg / GaN:Si、AlInGaN:Mg / GaN:Mg / InGaN:Si、AlInGaN:Mg / GaN:Si :Mg / AlGaN:Si、GaN:Mg / InGaN:Mg、AlGaN:Mg / InGaN:Mg、AlGaN:Mg / InGaN:Mg、GaN:Mg / Ti3C2O x / Ti3C2O x<h2 style=";text-align:left;direction:ltr">-Pt、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O2, GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA<h2 style=";text-align:left;direction:ltr">GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O2 / Ti3C2O2<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O2 / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2- <h2 style=";text-align:left;direction:ltr"> z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O2, AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA<h2 style=";text-align:left;direction:ltr">AlGaN:Mg / Ti3C2O2 / Ti3C2O2<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O2 / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2-z O 2-y -Pt SA / Ti3C2O 2-y -N-Pt SA 、AlGaN:Mg / Ti3C 2-z O 2-y -N-Pt SA / Ti3C2O x -Pt、AlGaN:Mg / Ti3C 2-z O 2-y -N-Pt SA / Ti3C2O x -Pt SA 、AlGaN:Mg / Ti3C 2-z O 2-y -N-Pt SA / Ti3C2O2、AlGaN:Mg / Ti3C 2-z O 2-y -N-Pt SA / Ti3C2O 2-y 、AlGaN:Mg / Ti3C 2- z O 2-y -N-Pt SA / Ti3C 2-z O 2-y -Pt SA 、AlGaN:Mg / Ti3C 2-z O 2-y -N-Pt SA / Ti3C2O 2-y -N-Pt SA .

[0026] The hydrogen evolution layer 104 is above the p-type semiconductor 103, and adsorbs H atoms in the Mg-H complex of the p-type semiconductor 103 under an external bias by an electrochemical method, wherein the electrochemical method specifically comprises plating a hydrogen evolution layer on the p-type semiconductor and immersing the layer in an electrochemical solution, connecting the surface of the p-type semiconductor to a cathode, and adsorbing H atoms in the Mg-H complex under an electric field. + Ions will be attracted to the surface of the p-type semiconductor by the hydrogen evolution layer material to form H2, which will escape from the surface of the p-type semiconductor, thereby realizing the desorption and desorption of H. The Mg-H bonds will be continuously broken, thereby increasing the hole concentration of the p-type semiconductor. The chemical solution of the electrochemical method is any one or any combination of KCl, HCl, NaCl, and AgCl. Experimental verification shows that the hydrogen evolution layer can reduce the hydrogen adsorption Gibbs free energy of the Mg-H complex of the p-type semiconductor from 0.8eV to nearly 0eV.

[0027] In the present invention, the n-type semiconductor 101, the multiple quantum well 102, and the p-type semiconductor 103 include any one or any multiple combination of GaN, AlGaN, InGaN, AlInGaN, AlN, InN, AlInN, SiC, Ga2O3, BN, GaAs, GaP, InP, AlGaAs, AlInGaAs, AlGaInP, InGaAs, AlInAs, AlInP, AlGaP, and InGaP.

[0028] The substrate 100 includes but is not limited to any one of sapphire, silicon, Ge, SiC, AlN, GaN, GaAs, InP, sapphire / SiO2 composite substrate, sapphire / AlN composite substrate, sapphire / SiNx, magnesium aluminum spinel MgAl2O4, MgO, ZnO, ZrB2, LiAlO2 and LiGaO2 composite substrates.

[0029] It should be noted that semiconductor light emitting elements include but are not limited to semiconductor light emitting diodes, semiconductor laser diodes, semiconductor lasers, and semiconductor laser elements.

[0030] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A semiconductor light emitting element having a hydrogen evolution layer, comprising, from bottom to top, a substrate, an n-type semiconductor, a multiple quantum well, a p-type semiconductor and a hydrogen evolution layer, characterized in that: The hydrogen evolution layer is located above the p-type semiconductor and immersed in the electrochemical solution, adsorbing H atoms in the Mg-H complex of the p-type semiconductor and desorbing them; the hydrogen evolution layer is Ti3C2O x 、Ti3C2O x -Pt, Ti3C2O x -Pt SA 、Ti3C2O2、Ti3C2O 2-y 、Ti3C 2-z O 2-y -Pt SA 、Ti3C2O 2-y -N-Pt SA A combination of any one or more of and any one or more of AlGaN:Mg, GaN:Mg, GaN:Si, InGaN:Mg, InGaN:Si, AlInGaN:Mg, AlInGaN:Si, wherein 0≤x≤5 and x≠2, x≠2-y; 0<y≤5, 0<z≤5; the electrochemical solution is any one or any combination of KCl, HCl, NaCl, AgCl.

2. A semiconductor light emitting element having a hydrogen evolution layer as claimed in claim 1, characterized in that: Any combination of the hydrogen evolution layer includes the following structures: Ti3C2O x / Ti3C2O x -Pt, Ti3C2O x / Ti3C2O x -Pt SA 、Ti3C2O x / Ti3C2O2、Ti3C2O x / Ti3C2O 2-y 、Ti3C2O x / Ti3C 2-z O 2-y -Pt SA 、Ti3C2O x / Ti3C2O 2-y -N-Pt SA 、Ti3C2O x -Pt / Ti3C2O x -Pt, Ti3C2O x -Pt / Ti3C2O x -Pt SA 、Ti3C2O x -Pt / Ti3C2O2, Ti3C2O x -Pt / Ti3C2O 2-y 、Ti3C2O x -Pt / Ti3C 2-z O 2-y -Pt SA 、Ti3C2O x -Pt / Ti3C2O 2-y -N-Pt SA 、Ti3C2O x -Pt SA / Ti3C2O x -Pt, Ti3C2O x -Pt SA / Ti3C2O x -Pt SA 、Ti3C2O x -Pt SA / Ti3C2O2、Ti3C2O x -Pt SA / Ti3C2O 2-y 、Ti3C2O x -Pt SA / Ti3C 2-z O 2-y -Pt SA 、Ti3C2O x -Pt SA / Ti3C2O 2-y -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O2 / Ti3C2O2 Ti3C2O2<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> Ti3C2O2 / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt, Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2, Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt, Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2, Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2- <h2 style=";text-align:left;direction:ltr"> z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt, Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2, Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O2 GaN:Mg / Ti3C2O2<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / / Ti3C2O2 AlGaN:Mg / Ti3C2O2<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x -Pt、AlGaN:Mg / GaN:Mg / Ti3C2O x -Pt SA 、AlGaN:Mg / GaN:Mg / Ti3C2O2、AlGaN:Mg / GaN:Mg / Ti3C2O 2-y 、AlGaN:Mg / GaN:Mg / Ti3C 2-z OR 2-y -Pt SA 、AlGaN:Mg / GaN:Mg / Ti3C2O 2-y -N-Pt SA 、GaN:Mg / GaN:Si / Ti3C2O x -Pt、GaN:Mg / GaN:Si / Ti3C2O x -Pt SA 、GaN:Mg / GaN:Si / Ti3C2O2、GaN:Mg / GaN:Si / Ti3C2O 2-y 、GaN:Mg / GaN:Si / Ti3C 2-z OR 2-y -Pt SA 、GaN:Mg / GaN:Si / Ti3C2O 2-y -N-Pt SA 、GaN:Mg / GaN:Si、GaN:Mg / InGaN:Si、AlGaN:Mg / GaN:Mg、AlGaN:Mg / GaN:Si、AlGaN:Mg / InGaN:Si、 AlGaN:Mg / GaN:Mg / GaN:Si、AlGaN:Mg / GaN:Mg / InGaN:Si、AlInGaN:Mg / GaN:Mg、AlInGaN:Mg / GaN:S i、AlInGaN:Mg / InGaN:Si、AlInGaN:Mg / GaN:Mg / GaN:Si、AlInGaN:Mg / GaN:Mg / InGaN:Si、AlInGaN:Mg / GaN:Si :Mg / AlGaN:Si、GaN:Mg / InGaN:Mg、AlGaN:Mg / InGaN:Mg、AlGaN:Mg / InGaN:Mg、GaN:Mg / Ti3C2O x / Ti3C2O x -Pt、GaN:Mg / Ti3C2O x / Ti3C2O x -Pt SA 、GaN:Mg / Ti3C2O x / Ti3C2O2、GaN:Mg / Ti3C2O x / Ti3C2O 2-y <h2 style=";text-align:left;direction:ltr">GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O2, GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O2 / Ti3C2O2<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O2 / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> GaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、GaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr">-Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O2, AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O2 / Ti3C2O2<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O2 / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O2 / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt、AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> x <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O2、AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> AlGaN:Mg / Ti3C<h2 style=";text-align:left;direction:ltr"> 2-z <h2 style=";text-align:left;direction:ltr"> O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> / Ti3C2O<h2 style=";text-align:left;direction:ltr"> 2-y <h2 style=";text-align:left;direction:ltr"> -N-Pt<h2 style=";text-align:left;direction:ltr"> SA <h2 style=";text-align:left;direction:ltr"> 。 3. A semiconductor light emitting element having a hydrogen evolution layer as claimed in claim 1, characterized in that: The hydrogen evolution layer is above the p-type semiconductor, and adsorbs H atoms in the Mg-H complex of the p-type semiconductor under an external bias voltage by an electrochemical method, reduces hydrogen binding energy and hydrogen adsorption Gibbs period free energy, and desorbs to form H2 to discharge from the surface, thereby increasing the ionization rate of Mg and reducing the acceptor activation energy of Mg, and increasing the hole concentration of the p-type semiconductor.

4. A semiconductor light emitting element having a hydrogen evolution layer as claimed in claim 1, characterized in that: The n-type semiconductor, multiple quantum well, and p-type semiconductor include any one or any multiple combination of GaN, AlGaN, InGaN, AlInGaN, AlN, InN, AlInN, SiC, Ga2O3, BN, GaAs, GaP, InP, AlGaAs, AlInGaAs, AlGaInP, InGaAs, AlInAs, AlInP, AlGaP, and InGaP.

5. A semiconductor light emitting element having a hydrogen evolution layer as claimed in claim 1, characterized in that: The substrate includes any one of sapphire, silicon, Ge, SiC, AlN, GaN, GaAs, InP, sapphire / SiO2 composite substrate, sapphire / AlN composite substrate, sapphire / SiNx, magnesium aluminum spinel MgAl2O4, MgO, ZnO, ZrB2, LiAlO2 and LiGaO2 composite substrate.

6. A semiconductor light emitting element having a hydrogen evolution layer as claimed in claim 1, characterized in that: The semiconductor light emitting element includes a semiconductor light emitting diode and a semiconductor laser diode.

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