mask frame

Abstract

The mask frame includes a first horizontal portion, a second horizontal portion disposed below the first horizontal portion, at least one vertical portion connecting the first horizontal portion and the second horizontal portion, and a stretching rod coupled to the first horizontal portion and configured to apply a contraction force to the first horizontal portion in a longitudinal direction of the stretching rod.

Description

Technical Field

[0001] The embodiments of the present invention generally relate to mask frames and methods for manufacturing mask frames. Background Technology

[0002] The display device may include multiple pixels. Each of the multiple pixels may include a light-emitting layer disposed between opposing electrodes. The light-emitting layer can be formed by various methods, one of which is a deposition method using a mask. If, in the process of forming the light-emitting layer using a mask, the shape of the mask is deformed due to the deformation of the mask frame supporting the mask, the deposition reliability of the light-emitting layer may be reduced.

[0003] The information disclosed in this background section is only for understanding the background technology of the inventive concept, and therefore may include information that does not constitute prior art. Summary of the Invention

[0004] The apparatus and method constructed according to an exemplary implementation of the present invention can improve the formation of the light-emitting layer on the display device by using a mask frame with tension rods.

[0005] The purpose of this invention is to provide a mask frame that can improve the bending deformation of the frame.

[0006] Another object of the present invention is to provide a method for manufacturing a mask frame that can improve the bending deformation of the frame.

[0007] Other features of the inventive concept will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practice of the inventive concept.

[0008] The mask frame according to the embodiment may include: a first horizontal portion; a second horizontal portion disposed below the first horizontal portion; at least one vertical portion connecting the first horizontal portion and the second horizontal portion; and a tension rod coupled to the first horizontal portion, and the tension rod being configured to apply a contraction force to the first horizontal portion in the longitudinal direction of the tension rod.

[0009] The tension rod can be attached to the lower surface of the first horizontal section.

[0010] The first end region of the tension rod and the second end region of the tension rod opposite to the first end region can be welded to the first horizontal portion.

[0011] The tension bar may include a first region and a second region, wherein the intensity of the contraction force applied in the second region is different from the intensity of the contraction force applied in the first region.

[0012] The tension bar may be made of metal.

[0013] The tension bar can have a thickness ranging from about 50 μm to about 2 mm.

[0014] The tension bar may include a first tension bar and a second tension bar.

[0015] The first tension rod and the second tension rod can be arranged in the longitudinal direction of the first horizontal section.

[0016] The first tension rod and the second tension rod can be connected to the upper surface of the first horizontal section.

[0017] The mask frame according to the embodiment may include: a first horizontal portion; a second horizontal portion disposed below the first horizontal portion; a first vertical portion connecting the first horizontal portion and the second horizontal portion; a platform disposed below the second horizontal portion; and a tension rod connected to the first vertical portion and the platform, and configured to apply a contraction force to the first vertical portion.

[0018] The first end region of the tension rod may be rigidly attached (e.g., welded) to the first vertical portion, and the second end region of the tension rod opposite the first end region is rigidly attached (e.g., welded) to the table.

[0019] The tension bar may be made of metal.

[0020] A method for manufacturing a mask frame according to an embodiment may include: preparing a frame unit, the frame unit including a first horizontal portion, a second horizontal portion spaced apart from the first horizontal portion, and at least one vertical portion connecting the first horizontal portion and the second horizontal portion; applying a tensile force to a tension rod in the longitudinal direction of the tension rod; and connecting the tension rod to the first horizontal portion of the frame unit while the tensile force is applied to the tension rod.

[0021] The first end region of the tension rod and the second end region of the tension rod opposite to the first end region can be welded to the first horizontal portion.

[0022] The method may also include measuring the amount of bending deformation of the first horizontal portion before applying a tensile force to the tension rod in the longitudinal direction of the tension rod, and determining the strength of the tensile force based on the amount of bending deformation.

[0023] Applying tensile force to the tension rod in the longitudinal direction can include applying different tensile forces to the first and second regions of the tension rod to compensate for the amount of bending deformation.

[0024] The tension bar may be made of metal.

[0025] The tension bar can have a thickness ranging from about 50 μm to about 2 mm.

[0026] The tension bar may include a first tension bar and a second tension bar.

[0027] A first tension rod and a second tension rod can be arranged in the longitudinal direction of the first horizontal section.

[0028] Since the tension rod is connected to the mask frame according to an embodiment of the present invention, sagging or bending deformation of the first horizontal portion, the first vertical portion, and the second vertical portion of the mask frame can be prevented. After the tension force disappears from the tension rod, a contraction force can be generated in the tension rod, and deformation of the mask frame can be prevented due to the contraction force. Therefore, deposition quality can be improved during deposition processes using the mask frame.

[0029] In the method of manufacturing a mask frame according to an embodiment of the present invention, a tension rod is stretched and welded to the mask frame, thereby preventing sagging or bending deformation of the first horizontal portion, the first vertical portion, and the second vertical portion of the mask frame. That is, after the tension force is removed from the tension rod, a contraction force can be generated in the tension rod, and deformation of the mask frame can be prevented due to the contraction force.

[0030] It should be understood that both the foregoing general description and the following detailed description are illustrative and explanatory, and are intended to provide further explanation of the claimed invention. Attached Figure Description

[0031] The accompanying drawings illustrate exemplary embodiments of the invention and, together with the specification, serve to illustrate the inventive concept. The drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification.

[0032] Figure 1 This is a plan view showing a mask frame constructed according to an embodiment based on the principles of the present invention.

[0033] Figure 2 yes Figure 1 An enlarged view of region A shown in the image.

[0034] Figure 3 It is along Figure 2 The sectional view shown is taken by line I-I'.

[0035] Figure 4 , Figure 5 and Figure 6 This is an enlarged view showing the mask frame according to an embodiment.

[0036] Figure 7 This is a plan view showing the mask frame according to an embodiment.

[0037] Figure 8 yes Figure 7 An enlarged view of region B shown in the image.

[0038] Figure 9 It is along Figure 8 The sectional view shown is taken from line II-II'.

[0039] Figure 10 , Figure 11 and Figure 12 This is an enlarged view showing the mask frame according to an embodiment.

[0040] Figure 13 This is a cross-sectional view showing the mask frame according to an embodiment.

[0041] Figure 14 This is a plan view showing the mask frame according to an embodiment.

[0042] Figure 15 yes Figure 14 An enlarged view of region C shown in the image.

[0043] Figure 16 It is along Figure 15 The sectional view shown is taken from line III-III'.

[0044] Figure 17 , Figure 18 and Figure 19 This is an enlarged view showing the mask frame according to an embodiment.

[0045] Figure 20 , Figure 21 and Figure 22 This is a plan view showing the mask frame according to an embodiment.

[0046] Figure 23 and Figure 24 This is a plan view illustrating a method for manufacturing a mask frame according to an embodiment.

[0047] Figure 25 This is a plan view illustrating a method for manufacturing a mask frame according to an embodiment.

[0048] Figure 26 This is a cross-sectional view showing a method for manufacturing a mask frame according to an embodiment.

[0049] Figure 27 This is a plan view illustrating a method for manufacturing a mask frame according to an embodiment.

[0050] Figure 28 This is a plan view illustrating a method for manufacturing a mask frame according to an embodiment. Detailed Implementation

[0051] In the following description, numerous specific details are set forth for illustrative purposes to provide a thorough understanding of various embodiments or implementations of the invention. As used herein, “implementation” and “method” are interchangeable terms and are non-limiting examples of apparatuses or methods employing one or more of the inventive concepts disclosed herein. However, it will be apparent, however, that various embodiments may be practiced without these specific details or by one or more equivalent arrangements. In other illustrations, well-known structures and apparatuses are shown in block diagram form to avoid unnecessarily obscuring the various embodiments. Furthermore, the various embodiments may be different, but are not necessarily exclusive. For example, a particular shape, configuration, and characteristic of an embodiment may be used or implemented in another embodiment without departing from the inventive concept.

[0052] Unless otherwise stated, the embodiments shown should be understood as illustrative features providing different details of some ways in which the inventive concept can be implemented in practice. Therefore, unless otherwise stated, features, components, modules, layers, films, panels, regions and / or aspects (hereinafter individually or collectively referred to as “elements”) of various embodiments may be combined, separated, interchanged and / or rearranged without departing from the inventive concept.

[0053] The use of crosshairs and / or shading in accompanying drawings is generally to clarify the boundaries between adjacent elements. Therefore, unless otherwise stated, the presence or absence of crosshairs or shading does not convey or indicate any preference or requirement for particular materials, material properties, dimensions, scale, commonalities between illustrated elements, and / or any other characteristics, properties, or characteristics of the elements. Furthermore, in the accompanying drawings, the dimensions and relative dimensions of elements may be exaggerated for clarity and / or descriptive purposes. When embodiments can be implemented differently, the specific sequence of processes may be performed differently than the sequence described. For example, two consecutively described processes may be performed substantially simultaneously, or in the reverse order of their description. Moreover, the same reference numerals denote the same elements.

[0054] When a layer or element is referred to as being “on,” “connected to,” or “linked to” another element or layer, it may be directly on, directly connected to, or linked to the other element or layer, or there may be an intermediate element or layer present. However, when an element or layer is referred to as being “directly on,” “directly connected to,” or “directly linked to” another element or layer, there is no intermediate element or layer present. Therefore, the term “connection” can refer to a physical connection, electrical connection, and / or fluid connection, with or without an intermediate element. For the purposes of this disclosure, “at least one of X, Y, and Z” and “at least one selected from the set consisting of X, Y, and Z” can be interpreted as only X, only Y, only Z, or any combination of two or more of X, Y, and Z, such as, for example, XYZ, XYY, YZ, and ZZ. As used herein, the term “and / or” includes any and all combinations of one or more of the associated listed items.

[0055] Although the terms “first,” “second,” etc., may be used herein to describe various types of elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another. Therefore, without departing from the teachings of this disclosure, the first element discussed below may be referred to as the second element.

[0056] For descriptive purposes, spatial relative terms such as “beneath,” “below,” “under,” “lower,” “above,” “upper,” “over,” “higher,” and “side” (e.g., as in “sidewall”) may be used herein to describe the relationship of one element to another(s) as shown in the accompanying drawings. In addition to the orientations depicted in the drawings, the spatial relative terms are intended to cover different orientations of the device in use, operation, and / or manufacture. For example, if the device in the drawings is flipped, an element described as “below” or “under” other elements or features will then be oriented “above” other elements or features. Thus, the term “below” can encompass both above and below orientations. Furthermore, the device may be oriented in other ways (e.g., rotated 90 degrees or in other orientations), and therefore the spatial relative descriptive terms used herein should be interpreted accordingly.

[0057] The terminology used herein is for the purpose of describing particular embodiments and is not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “the” are intended to include the plural forms as well, as used herein. Furthermore, when used in this specification, the terms “comprising,” “including,” “including,” and / or “comprising” indicate the presence of stated features, integrals, steps, operations, elements, components, and / or sets thereof, but do not preclude the presence or addition of one or more other features, integrals, steps, operations, elements, components, and / or sets thereof. It should also be noted that, as used herein, the terms “substantially,” “about,” and other similar terms are used as approximate terms rather than terms of degree, and are therefore used to allow for inherent deviations in measurements, calculated values, and / or provided values ​​that will be recognized by those skilled in the art.

[0058] Various embodiments are described herein with reference to cross-sectional and / or exploded views as schematic diagrams of idealized embodiments and / or intermediate structures. Thus, deviations from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances will be expected. Therefore, the embodiments disclosed herein should not necessarily be construed as limited to the specific region shapes shown, but should include shape deviations caused, for example, by manufacturing processes. In this way, the regions shown in the figures can be schematic in nature, and the shapes of these regions may not reflect the actual shapes of the regions of the device, and are therefore not necessarily intended to be limiting.

[0059] Unless otherwise specified, all terms used herein (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure pertains. Terms, such as those defined in commonly used dictionaries, shall be interpreted as having a meaning consistent with their meaning in the context of the relevant art and shall not be interpreted in an idealized or overly formalized sense unless expressly so defined herein.

[0060] Figure 1 This is a plan view showing a mask frame constructed according to an embodiment based on the principles of the present invention. Figure 2 yes Figure 1 An enlarged view of region A shown in the image, and Figure 3 It is along Figure 2 The sectional view shown is taken by line I-I'.

[0061] refer to Figures 1 to 3 The mask frame 10 may include a first horizontal portion 100, a second horizontal portion 200, a first vertical portion 300, a second vertical portion 400, a tension rod 500, and a platform 600.

[0062] The second horizontal portion 200 can be spaced apart from the first horizontal portion 100 and can be located below the first horizontal portion 100. The first vertical portion 300 can connect the first horizontal portion 100 and the second horizontal portion 200. The second vertical portion 400 can be spaced apart from the first vertical portion 300 and can connect the first horizontal portion 100 and the second horizontal portion 200. The lower surface 110 of the first horizontal portion 100 can be parallel to the upper surface of the platform 600.

[0063] The first horizontal portion 100, the second horizontal portion 200, the first vertical portion 300, and the second vertical portion 400 can constitute an outer frame. The mask frame 10, including the first horizontal portion 100, the second horizontal portion 200, the first vertical portion 300, and the second vertical portion 400, can have a rectangular shape in which openings are formed.

[0064] Stage 600 may be disposed below the second horizontal portion 200. First horizontal portion 100, second horizontal portion 200, first vertical portion 300, and second vertical portion 400 may be disposed on stage 600. Stage 600 may be movable when performing a deposition process using mask frame 10. Stage 600 may include actuators for moving mask frame 10.

[0065] The tension rod 500 can be mounted on the first horizontal portion 100. The tension rod 500 can be connected to the lower surface 110 of the first horizontal portion 100.

[0066] The tension bar 500 may include a first end region 510 and a second end region 520 rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the lower surface 110 of the first horizontal portion 100. Specifically, the first end region 510 and the second end region 520 may represent portions of the tension bar 500 rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the lower surface 110 of the first horizontal portion 100. The first end region 510 may be defined as a portion adjacent to a first short side of the tension bar 500. The second end region 520 may be defined as a portion adjacent to a second short side and opposite to the first end region 510. The first end region 510 and the second end region 520 of the tension bar 500 may be fixed to the lower surface 110 of the first horizontal portion 100 by welding.

[0067] The mask assembly may include a mask frame 10 and a mask. When the tension rod 500 is not attached, the mask assembly may deform. Specifically, the first horizontal portion 100 may be subjected to loads due to the weight and gravity of the mask, causing it to bend in the downward direction D3. To correct this bending deformation, the tension rod 500 may be attached in a stretched state to the lower surface 110 of the first horizontal portion 100. The tension rod 500 may apply a contraction force to the first horizontal portion 100 in its longitudinal directions D1 and D2. A process for attaching the tension rod 500 to the lower surface 110 of the first horizontal portion 100 may be performed to compensate for the bending deformation occurring in the first horizontal portion 100 by inducing bending deformation in the opposite direction D4.

[0068] When the mask assembly deforms, the deposited material may fail to deposit at the predetermined location during the formation of the light-emitting layer using the mask assembly. That is, the deposition quality may be reduced. Therefore, the tension rod 500 can be connected to the first horizontal portion 100 to improve the deposition quality by preventing bending deformation of the first horizontal portion 100. The principle for correcting bending deformation will be described in detail below.

[0069] Figures 4 to 6 This is an enlarged view showing the mask frame according to an embodiment.

[0070] refer to Figure 4 The tension rod 500 may be telescopic. Specifically, the tension rod 500 may be subjected to a tensile force FA1 in the longitudinal directions D1 and D2. The tension rod 500 may be rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the lower surface 110 of the first horizontal portion 100 in a stretched state by receiving the tensile force FA1.

[0071] In the tension rod 500, the first end region 510 and the second end region 520 of the tension rod 500 can be subjected to a tensile force FA1. To compensate for bending deformation, the first end region 510 and the second end region 520 can be subjected to the same tensile force FA1 in the longitudinal directions D1 and D2 of the tension rod 500, respectively. Specifically, the first end region 510 can be subjected to a tensile force FA1 in direction D1. The second end region 520 can be subjected to the same tensile force FA1 as the first end region 510 in direction D2, opposite to direction D1. The first end region 510 and the second end region 520 can be rigidly attached (i.e., welded, glued, or attached by a mechanical connection unit (e.g., a ring)) to the lower surface 110 of the first horizontal portion 100 in a tensile state by receiving the tensile force FA1.

[0072] refer to Figure 5The tension rod 500 can be attached to the first horizontal portion 100, and the tensile force FA1 applied to the first end region 510 and the second end region 520 can disappear. When the tensile force FA1 disappears (e.g., no longer applied to the tension rod 500), the tension rod 500 can contract to return to its original state. A contraction force FA2 can be generated in the tension rod 500. The direction of the contraction force FA2 can be opposite to the direction of the tensile force FA1. The contraction force FA2 can be generated in direction D2 at the first end region 510, and in direction D1 at the second end region 520.

[0073] When a contraction force FA2 is generated in the tension rod 500, the contraction force FA2 can be applied to the first horizontal portion 100 connected to the tension rod 500. A first end region 510 and a second end region 520 rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the first horizontal portion 100 can apply the contraction force FA2 to the lower surface 110 of the first horizontal portion 100. The first end region 510 can apply the contraction force FA2 in direction D2 to the lower surface 110 of the first horizontal portion 100 adjacent to the first end region 510. The second end region 520 can apply the contraction force FA2 in direction D1 to the lower surface 110 of the first horizontal portion 100 adjacent to the second end region 520.

[0074] refer to Figure 6 When the lower surface 110 of the first horizontal portion 100 is subjected to a contraction force FA2, the central portion of the first horizontal portion 100 can deform in the upward direction D4 by the contraction force FA2. That is, bending deformation can occur in the first horizontal portion 100 in the upward direction D4. Therefore, bending deformation of the first horizontal portion 100 in the downward direction D3 and bending deformation of the first horizontal portion 100 in the upward direction D4 can be eliminated. More specifically, the first horizontal portion 100, which is not connected to the tension rod 500, may be subjected to bending deformation in the downward direction D3 due to gravity. However, since the tension rod 500 is connected to the first horizontal portion 100, bending deformation can occur in the first horizontal portion 100 in the upward direction D4. As a result, since the tension rod 500 is provided on the bottom surface of the first horizontal portion 100, bending deformation of the first horizontal portion 100 can be eliminated.

[0075] The tension bar 500 may comprise a material with a high yield strength. Yield strength can represent the maximum stress that can be applied to a material without causing plastic deformation. When plastic deformation occurs in the tension bar 500, the tension bar 500 cannot return to its original state even if the tensile force FA1 applied to it is no longer applied (i.e., the tensile force FA1 disappears). That is, the tension bar 500 may be permanently deformed. Therefore, to prevent plastic deformation in the tension bar 500, the tension bar 500 may comprise a material with a high yield strength. For example, a material with a high yield strength can represent a metal. When a tensile force FA1 less than the yield strength of a metal is applied to the tension bar 500, plastic deformation may not occur in the tension bar 500. That is, when the tensile force FA1 disappears, the tension bar 500 can return to its original state, and a contraction force FA2 can be generated in the tension bar 500.

[0076] A device may be provided for applying a tensile force FA1 to the tension rod 500. For example, a tensioning device may apply a tensile force FA1 to the tension rod 500 by stretching it. The tensioning device may be configured as a clamp to fix the first end region 510 and the second end region 520. The tensioning device may change position to stretch the tension rod 500. Furthermore, the tensioning device may include a cylinder or gear, and a motor, to stretch the tension rod 500. The tensioning device may include a load cell that detects the magnitude of the force by which the clamp moves the tension rod 500.

[0077] Refer again Figure 3 The tension bar 500 may have a thickness h ranging from about 50 μm to about 2 mm. When the thickness h of the tension bar 500 exceeds about 2 mm, the tension force FA1 cannot be easily adjusted when applying the tension force FA1 to the tension bar 500 to eliminate the bending deformation of the first horizontal portion 100. Furthermore, when the thickness h of the tension bar 500 exceeds about 2 mm, the tension bar 500 may interfere with the deposited material deposited on the light-emitting layer during the deposition process performed using the mask assembly. As a result, the deposition quality may deteriorate.

[0078] When the thickness h of the tension rod 500 is less than 50 μm, the contraction force FA2 generated in the tension rod 500 may be relatively small. That is, when the contraction force FA2 is generated to restore the tension rod 500 to its original state, it may not be possible to apply the contraction force FA2 sufficiently to the first horizontal portion 100. Furthermore, because the bending deformation of the first horizontal portion 100 in the upward direction D4 caused by the contraction force FA2 is less than the bending deformation of the first horizontal portion 100 in the downward direction D3, the bending deformation of the first horizontal portion 100 may not be eliminated.

[0079] In the case of the first horizontal portion 100 connected to the tension rod 500, the bending deformation of the first horizontal portion 100 in the downward direction D3 can be improved compared to the first horizontal portion 100 not connected to the tension rod 500. Therefore, the deposition quality can be improved during the deposition process for forming the light-emitting layer using the mask frame 10.

[0080] Figure 7 This is a plan view showing the mask frame according to an embodiment. Figure 8 yes Figure 7 An enlarged view of region B shown, and Figure 9 It is along Figure 8 The sectional view shown is taken from line II-II'.

[0081] refer to Figures 7 to 9 According to the embodiment, the mask frame 11 may include a first horizontal portion 100, a second horizontal portion 200, a first vertical portion 300, a second vertical portion 400, a tension rod 500, and a platform 600. The lower surface 110 of the first horizontal portion 100 may be inclined relative to the upper surface of the platform 600.

[0082] The tension rod 500 can be mounted on the first horizontal portion 100. The tension rod 500 can be connected to the lower surface 110 of the first horizontal portion 100.

[0083] The tension rod 500 may include a first region 530 and a second region 540. The first region 530 may be the portion adjacent to a first long side 110a of the lower surface 110. The second region 540 may be the portion adjacent to a second long side 110b of the lower surface 110. In one embodiment, the tension rod 500 may include only the first region 530 and the second region 540. However, embodiments of the invention are not limited thereto, and for example, the tension rod 500 may include three or more regions.

[0084] A first end region 510 of the tension rod 500 and a second end region 520 of the tension rod 500 opposite to the first end region 510 can be welded to a first horizontal portion 100, thereby providing a rigid attachment of the tension rod 500 to the first horizontal portion 100. Option methods for providing rigid attachment include, for example, using a resin adhesive. The first end region 510 and the second end region 520 can represent portions of the tension rod 500 rigidly attached (i.e., welded) to the lower surface 110 of the first horizontal portion 100. The first end region 510 can include an upper portion 511 of the first end region 510 positioned in a first region 530 and a lower portion 512 of the first end region 510 positioned in a second region 540. The second end region 520 can include an upper portion 521 of the second end region 520 positioned in a first region 530 and a lower portion 522 of the second end region 520 positioned in a second region 540.

[0085] and Figures 1 to 3 The mask frame 10 shown is different, in Figures 7 to 9 In the mask frame 11 shown, the lower surface 110 of the first horizontal portion 100 can be inclined relative to the upper surface of the stage 600. Figures 1 to 3 The mask frame 10 shown is similar. Figures 7 to 9 The first horizontal portion 100 of the mask frame 11 shown may bend due to the weight and gravity of the mask. However, the first horizontal portion 100 may bend in direction D6. Direction D6 may exist in the same plane as directions D5 and D3, and the angles between directions D5 and D6 and between directions D6 and D3 may be acute angles.

[0086] refer to Figure 9 and Figure 11 When the lower surface 110 of the first horizontal portion 100 is tilted, gravity can be applied to the lower surface 110 of the first horizontal portion 100 in direction D3. Therefore, the first horizontal portion 100 can bend in direction D6, i.e., bending deformation may occur. To compensate for bending deformation, the first region 530 and the second region 540 of the tension rod 500 can apply different contraction forces FB3 and FB4 to the lower surface 110 of the first horizontal portion 100, respectively. In other words, to compensate for bending deformation, the contraction force FB3 applied to the first horizontal portion 100 through the first region 530 of the tension rod 500 can be greater than the contraction force FB4 applied to the first horizontal portion 100 through the second region 540 of the tension rod 500.

[0087] A process can be performed to attach the tension rod 500 to the lower surface 110 of the first horizontal portion 100 to eliminate the bending deformation generated in the first horizontal portion 100 by the bending deformation induced in the direction D7 opposite to the direction D6.

[0088] Figures 10 to 12 This is an enlarged view showing the mask frame according to an embodiment. Figure 13 This is a cross-sectional view showing the mask frame according to an embodiment.

[0089] refer to Figure 10 The tension rod 500 may be telescopic. Specifically, the tension rod 500 may be subjected to tensile forces FB1 and FB2 in the longitudinal directions D1 and D2 of the tension rod 500. The tension rod 500 may be rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the lower surface 110 of the first horizontal portion 100 in a stretched state by receiving the tensile forces FB1 and FB2.

[0090] The first region 530 and the second region 540 of the tension rod 500 can be subjected to different tensile forces. That is, the tensile force FB1 applied to the first region 530 can be greater than the tensile force FB2 applied to the second region 540.

[0091] In the tension rod 500, the first end region 510 and the second end region 520 of the tension rod 500 can be subjected to tensile forces FB1 and FB2, respectively. To eliminate bending deformation, the upper portion 511 of the first end region 510 and the upper portion 521 of the second end region 520 can be subjected to the same tensile force FB1 in the longitudinal directions D1 and D2 of the tension rod 500, respectively. The lower portion 512 of the first end region 510 and the lower portion 522 of the second end region 520 can be subjected to the same tensile force FB2 in the longitudinal directions D1 and D2 of the tension rod 500, respectively.

[0092] More specifically, the upper portion 511 of the first end region 510 may be subjected to a tensile force FB1 in direction D1. The upper portion 521 of the second end region 520 may be subjected to the same tensile force FB1 in direction D2 as the tensile force applied to the upper portion 511 of the first end region 510. Similarly, the lower portion 512 of the first end region 510 may be subjected to a tensile force FB2 in direction D1. The lower portion 522 of the second end region 520 may be subjected to the same tensile force FB2 in direction D2 as the tensile force applied to the lower portion 512 of the first end region 510.

[0093] refer to Figure 11After the tension rod 500 has been attached to the first horizontal portion 100, the tensile force FB1 applied to the upper portion 511 of the first end region 510 and the upper portion 521 of the second end region 520, and the tensile force FB2 applied to the lower portion 512 of the first end region 510 and the lower portion 522 of the second end region 520, can disappear. When the tensile forces FB1 and FB2 disappear, the tension rod 500 can contract to return to its original state. Contraction forces FB3 and FB4 can be generated in the tension rod 500. Similar to the tensile forces, the first region 530 and the second region 540 of the tension rod 500 can be subjected to mutually different contraction forces. That is, the contraction force FB3 applied to the first region 530 can be greater than the contraction force FB4 applied to the second region 540.

[0094] The directions of contraction forces FB3 and FB4 can be opposite to the directions of tension forces FB1 and FB2. The upper portion 511 of the first end region 510 can be subjected to contraction force FB3 in direction D2, and the upper portion 521 of the second end region 520 can be subjected to contraction force FB3 in direction D1. Similarly, the lower portion 512 of the first end region 510 can be subjected to contraction force FB4 in direction D2, and the lower portion 522 of the second end region 520 can be subjected to contraction force FB4 in direction D1.

[0095] When contraction forces FB3 and FB4 are generated in the tension rod 500, these forces can be applied to the first horizontal portion 100 connected to the tension rod 500. A first end region 510 and a second end region 520 rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the first horizontal portion 100 can apply contraction forces FB3 and FB4 to the lower surface 110 of the first horizontal portion 100. The positioning of the first end region 510 at the upper portion 511 of the first region 530, the positioning of the second end region 520 at the upper portion 521 of the first region 530, and the positioning of the first end region 510 at the lower portion 512 and the positioning of the second end region 520 at the lower portion 522 of the second region 540 can apply mutually different contraction forces to the lower surface 110 of the first horizontal portion 100.

[0096] Specifically, the upper portion 511 of the first end region 510 can apply a contraction force FB3 to the lower surface 110 of the first horizontal portion 100 adjacent to the first end region 510 in direction D2. The upper portion 521 of the second end region 520 can apply a contraction force FB3 to the lower surface 110 of the first horizontal portion 100 adjacent to the second end region 520 in direction D1. The lower portion 512 of the first end region 510 can apply a contraction force FB4 to the lower surface 110 of the first horizontal portion 100 adjacent to the first end region 510 in direction D2. The lower portion 522 of the second end region 520 can apply a contraction force FB4 to the lower surface 110 of the first horizontal portion 100 adjacent to the second end region 520 in direction D1.

[0097] refer to Figure 12 and Figure 13 When the lower surface 110 of the first horizontal portion 100 is subjected to contraction forces FB3 and FB4, the central portion of the first horizontal portion 100 can deform in direction D7 by the contraction forces FB3 and FB4. That is, bending deformation can occur in direction D7 of the first horizontal portion 100. Therefore, the bending deformation of the first horizontal portion 100 in direction D6 and the bending deformation of the first horizontal portion 100 in direction D7 can cancel each other out. Specifically, the first horizontal portion 100, which is not connected to the tension rod 500, may be subjected to bending deformation in direction D6 due to gravity. However, since the tension rod 500 is connected to the first horizontal portion 100, bending deformation may occur in direction D7 of the first horizontal portion 100. As a result, the bending deformation of the first horizontal portion 100 can be eliminated.

[0098] Figure 14 This is a plan view showing the mask frame according to an embodiment. Figure 15 yes Figure 14 An enlarged view of region C shown, and Figure 16 It is along Figure 15 The sectional view shown is taken from line III-III'.

[0099] refer to Figures 14 to 16 According to the embodiment, the mask frame 12 may include a first horizontal portion 100, a second horizontal portion 200, a first vertical portion 300, a second vertical portion 400, a tension rod 500, and a platform 600. The lower surface 110 of the first horizontal portion 100 may be parallel to the upper surface of the platform 600.

[0100] A tension rod 500 may be disposed on the first horizontal portion 100. The tension rod 500 may include a first tension rod 501 and a second tension rod 502. The first tension rod 501 and the second tension rod 502 may be arranged in the longitudinal directions D1 and D2 of the first horizontal portion 100. The first tension rod 501 and the second tension rod 502 may be connected to the upper surface 120 of the first horizontal portion 100.

[0101] The first tension rod 501 may include an end region 501a and another end region 501b, which are rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the upper surface 120 of the first horizontal portion 100. Specifically, one end region 501a and the other end region 501b may represent portions of the first tension rod 501 that are rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the upper surface 120 of the first horizontal portion 100. One end region 501a may be defined as a portion adjacent to a first short side of the first tension rod 501. The other end region 501b may be defined as a portion adjacent to a second short side of the first tension rod 501 and opposite to one end region 501a. One end region 501a and the other end region 501b of the first tension rod 501 may be fixed to the upper surface 120 of the first horizontal portion 100 by welding.

[0102] The second tension bar 502 may include an end region 502a and another end region 502b, which are rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the upper surface 120 of the first horizontal portion 100. For ease of illustration, descriptions of configurations identical to those of the first tension bar 501 will be omitted.

[0103] Figures 17 to 19 This is an enlarged view showing the mask frame according to an embodiment.

[0104] refer to Figure 17 The first tension rod 501 and the second tension rod 502 may be telescopic. Specifically, the first tension rod 501 and the second tension rod 502 may be subjected to a tensile force FC1 in the longitudinal directions D1 and D2 of the first tension rod 501 and the second tension rod 502. The first tension rod 501 and the second tension rod 502 may be rigidly attached (i.e., welded, glued or attached by means of a mechanical connection unit (e.g., a ring)) to the upper surface 120 of the first horizontal portion 100 in a tensile state by receiving the tensile force FC1.

[0105] One end region 501a and the other end region 501b of the first tension rod 501 can be subjected to a tensile force FC1. Similarly, one end region 502a and the other end region 502b of the second tension rod 502 can be subjected to a tensile force FC1. To eliminate bending deformation, one end region 501a and 502a of the first tension rod 501 and the other end region 501b and 502b of the second tension rod 502 can be subjected to the same tensile force FC1 in the longitudinal directions D1 and D2 of the tension rod 500. Specifically, one end region 501a and 502a can be subjected to a tensile force FC1 in direction D1. The other end regions 501b and 502b can be subjected to the same tensile force FC1 in direction D2 as the tensile force applied to the first end region 510. The first end regions 501a and 502a and the other end regions 501b and 502b can be rigidly attached in a tensile state (i.e., welded, glued or attached by mechanical connection unit (e.g., ring)) to the upper surface 120 of the first horizontal portion 100 by receiving a tensile force FC1.

[0106] refer to Figure 18 The first tension rod 501 and the second tension rod 502 can be attached to the first horizontal portion 100, and the tensile force FC1 applied to one end region 501a and 502a and the other end region 501b and 502b can disappear. When the tensile force FC1 disappears, the first tension rod 501 and the second tension rod 502 can contract to return to their original state. A contraction force FC2 can be generated in the first tension rod 501 and the second tension rod 502. The direction of the contraction force FC2 can be opposite to the direction of the tensile force FC1. One end region 501a and 502a can be subjected to the contraction force FC2 in direction D2, and the other end region 501b and 502b can be subjected to the contraction force FC2 in direction D1.

[0107] When a contraction force FC2 is generated in the first tension rod 501 and the second tension rod 502, the contraction force FC2 can be applied to the first horizontal portion 100 connected to the first tension rod 501 and the second tension rod 502. One end region 501a and 502a and the other end region 501b and 502b, rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the first horizontal portion 100, can apply the contraction force FC2 to the upper surface 120 of the first horizontal portion 100. One end region 501a and 502a can apply the contraction force FC2 in direction D2 to the upper surface 120 of the first horizontal portion 100 adjacent to one end region 501a and 502a. The other end regions 501b and 502b can apply the contraction force FC2 in direction D1 to the upper surface 120 of the first horizontal portion 100 adjacent to the other end regions 501b and 502b.

[0108] refer to Figure 19 When the upper surface 120 of the first horizontal portion 100 is subjected to a contraction force FC2, the first horizontal portion 100 can deform in the upward direction D4 by the contraction force FC2. That is, bending deformation can occur in the first horizontal portion 100 in the upward direction D4. Therefore, the bending deformation of the first horizontal portion 100 in the downward direction D3 and the bending deformation of the first horizontal portion 100 in the upward direction D4 can cancel each other out. In detail, the first horizontal portion 100, which is not connected to the tension rod 500, may be subjected to bending deformation in the downward direction D3 due to gravity. However, since the tension rod 500 is connected to the first horizontal portion 100, bending deformation can occur in the first horizontal portion 100 in the upward direction D4. As a result, the bending deformation of the first horizontal portion 100 can be eliminated.

[0109] Figures 20 to 22 This is a plan view showing the mask frame according to an embodiment.

[0110] refer to Figures 20 to 22 The mask frame 13 may include a first horizontal portion 100, a second horizontal portion 200, a first vertical portion 300, a second vertical portion 400, a tension rod 500, and a platform 600.

[0111] The tension rod 500 can be connected to the platform 600 and one of the first vertical portion 300 and the second vertical portion 400. For example, the tension rod 500 can be connected to the first surface 300a of the first vertical portion 300 and the upper surface of the platform 600.

[0112] The tension bar 500 may include a first end region 510 rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to a first surface 300a of a first vertical portion 300 and a second end region 520 welded to a platform 600. Specifically, the first end region 510 may represent the portion of the tension bar 500 rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the first surface 300a of the first vertical portion 300. The second end region 520 may represent the portion of the tension bar 500 rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the platform 600. The first end region 510 may be defined as the portion adjacent to a first short side of the tension bar 500. The second end region 520 may be defined as the portion adjacent to a second short side of the tension bar 500 and opposite to the first end region 510. The first end region 510 of the tension rod 500 can be fixed to the first surface 300a of the first vertical portion 300 by welding, and the second end region 520 can be fixed to the platform 600 by welding.

[0113] The mask assembly may include a mask frame 13 and a mask (not shown). When the tension rod 500 is not attached, the mask assembly may deform. Specifically, the first vertical portion 300 and the second vertical portion 400 may tilt in direction D2 due to defects in the manufacturing process. To compensate for this problem, one end of the tension rod 500 may be attached in a stretched state to the first surface 300a of the first vertical portion 300. Furthermore, the other end of the tension rod 500 may be attached in a stretched state to the stage 600. When the tension rod 500 contracts, a contraction force FD2 can be generated. The tension rod 500 can apply the contraction force FD2 to the first vertical portion 300 and the stage 600 in the longitudinal directions D3 and D4 of the tension rod 500. A process can be performed to attach one end of the tension rod 500 to the first surface 300a of the first vertical portion 300 and the other end of the tension rod 500 to the stage 600, so that the inclined first vertical portion 300 and the second vertical portion 400 are erected by deformation in the direction D1 opposite to the direction D2.

[0114] refer to Figure 20 The tension rod 500 can be telescopic. Specifically, the tension rod 500 can be subjected to a tensile force FD1 in the longitudinal directions D3 and D4. The tension rod 500 can be attached to the first surface 300a of the first vertical portion 300 in a stretched state by receiving the tensile force FD1.

[0115] In the tension rod 500, a first end region 510 corresponding to one end of the tension rod 500 and a second end region 520 corresponding to the other end of the tension rod 500 can be subjected to a tensile force FD1. To eliminate bending deformation, the first end region 510 and the second end region 520 can be subjected to the same tensile force FD1 in the longitudinal directions D3 and D4 of the tension rod 500, respectively. Specifically, the first end region 510 can be subjected to a tensile force FD1 in direction D4. The second end region 520 can be subjected to the same tensile force FD1 in direction D3 as the tensile force applied to the first end region 510. The first end region 510 can be rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the first surface 300a of the first vertical portion 300 in a tensile state by receiving the tensile force FD1. The second end region 520 can be rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring) to the platform 600 in a tensile state by receiving the tensile force FD1.

[0116] refer to Figure 21After the tension rod 500 has been rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring), the tensile force FD1 applied to the first end region 510 and the second end region 520 can disappear. When the tensile force FD1 disappears, the tension rod 500 can contract to return to its original state. A contraction force FD2 can be generated in the tension rod 500. The direction of the contraction force FD2 can be opposite to the direction of the tensile force FD1. The first end region 510 can be subjected to the contraction force FD2 in direction D3, and the second end region 520 can be subjected to the contraction force FD2 in direction D4.

[0117] When a contraction force FD2 is generated in the tension rod 500, the contraction force FD2 can be applied to the first vertical portion 300 connected to the first end region 510 of the tension rod 500. The first end region 510, rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the first vertical portion 300, and the second end region 520, rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring) to the platform 600, can apply the contraction force FD2 to the first surface 300a of the first vertical portion 300 in direction D3. The first end region 510 can apply the contraction force FD2 to the first surface 300a of the first vertical portion 300 adjacent to the first end region 510 in direction D4. The second end region 520 can apply the contraction force FD2 to the platform 600 adjacent to the second end region 520 in direction D4.

[0118] refer to Figure 22 When the first surface 300a of the first vertical portion 300 is subjected to a contraction force FD2, the tilt of the first vertical portion 300 can be adjusted by the contraction force FD2. Specifically, because the platform 600 is fixed to the ground, the platform 600 adjacent to the second end region 520 can remain undeformed, and because the upper portion of the first vertical portion 300 is not fixed, the upper portion of the first vertical portion 300 adjacent to the first end region 510 can deform. That is, deformation can occur in direction D1 at the upper portion of the first vertical portion 300. Therefore, the deformation of the first vertical portion 300 tilting in direction D2 and the deformation of the first vertical portion 300 standing upright in direction D1 can cancel each other out. As a result, the tilt of the first vertical portion 300 can be corrected. Furthermore, since the first vertical portion 300 and the second vertical portion 400 are connected to the first horizontal portion 100, the tilt of the second vertical portion 400 can also be corrected.

[0119] Figure 23 and Figure 24 This is a plan view illustrating a method for manufacturing a mask frame according to an embodiment.

[0120] refer to Figure 23A frame unit 20 can be prepared. The frame unit 20 may include a first horizontal portion 100, a second horizontal portion 200, a first vertical portion 300, a second vertical portion 400, and a platform 600. First, the platform 600 can be formed. The first horizontal portion 100, the second horizontal portion 200, the first vertical portion 300, and the second vertical portion 400 can be formed on the platform 600. A drive unit for moving the frame unit 20 can be formed on the platform 600.

[0121] A second horizontal portion 200 can be formed on the platform 600. Subsequently, a first vertical portion 300 can be connected to one end of the second horizontal portion 200. A second vertical portion 400 can be spaced apart from the first vertical portion 300 and can be connected to the other end of the second horizontal portion 200. Finally, a first horizontal portion 100 can be formed above the second horizontal portion 200, and the first horizontal portion 100 can be connected to the first vertical portion 300 and the second vertical portion 400. The lower surface 110 of the first horizontal portion 100 can be parallel to the upper surface of the platform 600.

[0122] Due to the weight of the mask and gravity, the first horizontal portion 100 can be subjected to bending deformation in the downward direction D3. Therefore, the amount of bending deformation δ1 can be measured before correcting for the bending deformation. The amount of bending deformation δ1 can be measured automatically using a camera. Alternatively, the amount of bending deformation δ1 can be measured manually by an operator. In addition to the amount of bending deformation δ1 of the first horizontal portion 100, the direction of the bending deformation can also be measured. (Reference) Figure 23 The deformation of the first horizontal portion 100 in direction D3 is measured by the amount of bending deformation δ1. The amount of bending deformation δ1 can be defined as the distance between the point when the first horizontal portion 100 is in a straight state without bending deformation and the point when the first horizontal portion 100 is bent to its maximum extent.

[0123] refer to Figure 24Tensile force FA1 can be applied to the tension rod 500 in the longitudinal directions D1 and D2. Tensile force FA1 can be applied to the tension rod 500 to compensate for the amount δ1 of bending deformation. Tensile force FA1 can be applied to the tension rod 500 in the longitudinal directions D1 and D2 while maintaining the first end region 510 and the second end region 520 of the tension rod 500, respectively. That is, to compensate for the amount δ1 of bending deformation of the first horizontal portion 100 in the downward direction D3, substantially the same amount δ1 of bending deformation may be required in the upward direction D4. The required tensile force FA1 can be calculated using the measured amount δ1 of bending deformation; that is, a tensile force FA1 with a strength capable of causing bending deformation in the upward direction D4 can be applied to the tension rod 500. In other words, the magnitude of the tensile force FA1 can be determined based on the amount δ1 of bending deformation. For example, when the amount δ1 of bending deformation is relatively high, the tensile force FA1 applied to the tension rod 500 in the longitudinal directions D1 and D2 of the tension rod 500 can be relatively large. As the tensile force FA1 increases, the bending deformation in the upward direction D4 can increase. Therefore, the tensile force FA1 can be determined based on the amount of bending deformation δ1 measured.

[0124] Refer again Figure 4 and Figure 5 The tension rod 500 can be connected to the first horizontal portion 100. Specifically, the tension rod 500 can be connected to the first horizontal portion 100 while a tensile force FA1 is applied to the tension rod 500. The first end region 510 and the second end region 520 can be fixedly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the lower surface 110 of the first horizontal portion 100. In one embodiment, the tension rod 500 can be connected to the first horizontal portion 100. However, embodiments of the invention are not limited thereto, and for example, the tension rod 500 can be connected to the first vertical portion 300 and the second vertical portion 400.

[0125] After the tension rod 500 has been rigidly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the first horizontal portion 100, the tensile force FA1 applied to the first end region 510 and the second end region 520 can disappear. When the tensile force FA1 disappears, the tension rod 500 can contract to return to its original state. That is, a contraction force FA2 can be generated in the tension rod 500.

[0126] When a contraction force FA2 is generated in the tension rod 500, the contraction force FA2 can be applied to the first horizontal portion 100 connected to the tension rod 500. A first end region 510 and a second end region 520, fixedly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the first horizontal portion 100, can apply the contraction force FA2 to the lower surface 110 of the first horizontal portion 100. The first end region 510 can apply the contraction force FA2 in direction D2 to the lower surface 110 of the first horizontal portion 100 adjacent to the first end region 510. The second end region 520 can apply the contraction force FA2 in direction D1 to the lower surface 110 of the first horizontal portion 100 adjacent to the second end region 520.

[0127] refer to Figure 6 When the lower surface 110 of the first horizontal portion 100 is subjected to a contraction force FA2, the central portion of the first horizontal portion 100 can deform in the upward direction D4 by the contraction force FA2. That is, bending deformation can occur at the first horizontal portion 100 in the upward direction D4. However, when the tension rod 500 is connected to the first horizontal portion 100, the bending deformation of the first horizontal portion 100 can be counteracted. That is, the first horizontal portion 100 can have a linear shape that does not bend or only slightly bends.

[0128] For example, in Figure 23 In the first horizontal portion 100 not connected to the tension rod 500, if the amount of bending deformation δ1 is measured to be approximately 40 μm, then the amount of bending deformation δ1 in the first horizontal portion 100 connected to the tension rod 500 can be measured to be approximately 4 μm. That is, in the case of the mask frame 10 connected to the tension rod 500, the bending deformation can be improved to approximately 1 / 10 compared to the case of the mask frame 10 not connected to the tension rod 500. Although it may not be possible to set the amount of bending deformation δ1 to zero completely, if the bending deformation is improved to 1 / 10, the deposition quality can be insignificantly affected by the bending deformation. Therefore, the deposition quality can be improved during the deposition process used to form the light-emitting layer by using the mask frame 10.

[0129] The tension bar 500 may comprise a material with high yield strength. When plastic deformation occurs in the tension bar 500, even if the tensile force FA1 applied to the tension bar 500 disappears, the tension bar 500 may not be able to return to its original state. That is, the tension bar 500 may be permanently deformed. Therefore, to prevent plastic deformation in the tension bar 500, the tension bar 500 may comprise a material with high yield strength. For example, a material with high yield strength may represent a metal. When a tensile force FA1 less than the yield strength of a metal is applied to the tension bar 500, plastic deformation may not occur in the tension bar 500. That is, when the tensile force FA1 disappears, the tension bar 500 can return to its original state, and a contraction force FA2 can be generated in the tension bar 500.

[0130] The tension bar 500 may have a thickness h ranging from about 50 μm to about 2 mm. When the thickness h of the tension bar 500 exceeds about 2 mm, it may be difficult to easily adjust the tension force FA1 when applying the tension force FA1 to the tension bar 500 to eliminate the bending deformation of the first horizontal portion 100. Furthermore, when the thickness h of the tension bar 500 exceeds about 2 mm, the tension bar 500 may interfere with the deposition material deposited on the light-emitting layer during the deposition process performed using the mask assembly. As a result, the deposition quality may deteriorate.

[0131] When the thickness h of the tension rod 500 is less than 50 μm, the strength of the contraction force FA2 generated in the tension rod 500 may be relatively small. When a contraction force FA2 is generated to restore the tension rod 500 to its original state, if the thickness h of the tension rod 500 is less than 50 μm, the contraction force FA2 used to restore the tension rod 500 to its original state may be small. Therefore, the contraction force FA2 may not be able to be sufficiently applied to the first horizontal portion 100. That is, the bending deformation of the first horizontal portion 100 in the upward direction D4 due to the contraction force FA2 may be less than the bending deformation of the first horizontal portion 100 in the downward direction D3, thus the bending deformation of the first horizontal portion 100 may not be corrected.

[0132] Figure 25 This is a plan view illustrating a method for manufacturing a mask frame according to an embodiment. Figure 26 This is a cross-sectional view showing a method for manufacturing a mask frame according to an embodiment. Figure 27 This is a plan view illustrating a method for manufacturing a mask frame according to an embodiment.

[0133] refer to Figure 25 and Figure 26A frame unit 21 can be prepared. The frame unit 21 may include a first horizontal portion 100, a second horizontal portion 200, a first vertical portion 300, a second vertical portion 400, and a platform 600. The lower surface 110 of the first horizontal portion 100 may be inclined relative to the upper surface of the platform 600. (Refer to...) Figure 25 In the described method for manufacturing a mask frame, for the sake of clarity in illustrating these figures, details relating to references will be omitted below. Figure 23 and Figure 24 The process described is the same as the process described for manufacturing the mask frame.

[0134] and Figure 23 The difference lies in Figure 26 In this case, the lower surface 110 of the first horizontal portion 100 can be tilted relative to the upper surface of the stage 600, and gravity can be applied in direction D3. Therefore, due to the weight of the mask and gravity, bending deformation may occur in direction D6 at the first horizontal portion 100.

[0135] The amount of bending deformation δ2 can be measured before correcting for bending deformation. In addition to measuring the amount of bending deformation δ2 of the first horizontal portion 100, the direction of the bending deformation can also be measured. (Reference) Figure 25 and Figure 26 The deformation of the first horizontal section 100 in the direction D6 was measured by the amount of bending deformation δ2.

[0136] refer to Figure 27 The tension rod 500 may include a first region 530 and a second region 540. In one embodiment, the tension rod 500 may include only the first region 530 and the second region 540. However, embodiments of the invention are not limited thereto, and for example, the tension rod 500 may include three or more regions.

[0137] Tensile forces FB1 and FB2 can be applied to the tension rod 500 in the longitudinal directions D1 and D2. That is, tensile forces FB1 and FB2 can be applied to the tension rod 500 to compensate for the amount of bending deformation δ2. Tensile forces FB1 and FB2 can be applied in the longitudinal directions D1 and D2 of the tension rod 500 by maintaining the first end region 510 and the second end region 520 of the tension rod 500. In this case, different tensile forces can be applied to the first region 530 and the second region 540 of the tension rod 500. The first end region 510 may include an upper portion 511 of the first end region 510 positioned in the first region 530 and a lower portion 512 of the first end region 510 positioned in the second region 540. The second end region 520 may include an upper portion 521 of the second end region 520 positioned in the first region 530 and a lower portion 522 of the second end region 520 positioned in the second region 540.

[0138] To compensate for the amount δ2 of bending deformation in direction D6 of the first horizontal portion 100, a substantially similar amount δ2 of bending deformation in direction D7 may be required. The required tensile forces FB1 and FB2 can be calculated using the measured amount δ2 of bending deformation. That is, tensile forces FB1 and FB2 with magnitudes capable of causing bending deformation in direction D7 can be applied to the tension rod 500. In other words, the magnitudes of tensile forces FB1 and FB2 can be determined based on the amount δ2 of bending deformation. For example, when the amount δ2 of bending deformation is relatively high, the tensile forces FB1 and FB2 applied to the tension rod 500 in the longitudinal directions D1 and D2 of the tension rod 500 can be relatively large. As the tensile forces FB1 and FB2 increase, the bending deformation in direction D7 can increase. Therefore, the tensile forces FB1 and FB2 can be determined based on the measured amount δ2 of bending deformation.

[0139] Refer again Figure 10 and Figure 11 The tension rod 500 can be connected to the first horizontal portion 100. Specifically, the tension rod 500 can be connected to the first horizontal portion 100 with tensile forces FB1 and FB2 applied to it. The first end region 510 and the second end region 520 can be fixedly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the lower surface 110 of the first horizontal portion 100. After the tension rod 500 has been fixedly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the first horizontal portion 100, the tensile forces FB1 and FB2 applied to the upper portions 511 and 521 of the first end region 510 and the second end region 520 and the lower portions 512 and 522 of the first end region 510 and the second end region 520 can disappear. When the tensile forces FB1 and FB2 disappear, the tension rod 500 can contract to return to its original state. That is, contraction forces FB3 and FB4 can be generated in the tension rod 500. Similar to the tensile forces FB1 and FB2, the first region 530 and the second region 540 of the tension rod 500 can be subjected to contractile forces FB3 and FB4 with different magnitudes. That is, the contractile force FB3 applied to the first region 530 can be greater than the contractile force FB4 applied to the second region 540.

[0140] When contraction forces FB3 and FB4 are generated in the tension rod 500, these forces can be applied to the first horizontal portion 100 connected to the tension rod 500. A first end region 510 and a second end region 520 fixedly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the first horizontal portion 100 can apply contraction forces FB3 and FB4 to the lower surface 110 of the first horizontal portion 100. The positioning of the first end region 510 at the upper portion 511 of the first region 530, the positioning of the second end region 520 at the upper portion 521 of the first region 530, and the positioning of the first end region 510 at the lower portion 512 of the second region 540 and the positioning of the second end region 520 at the lower portion 522 of the second region 540 can apply mutually different contraction forces to the lower surface 110 of the first horizontal portion 100.

[0141] Specifically, the upper portion 511 of the first end region 510 can apply a contraction force FB3 to the lower surface 110 of the first horizontal portion 100 adjacent to the first end region 510 in direction D2. The upper portion 521 of the second end region 520 can apply a contraction force FB3 to the lower surface 110 of the first horizontal portion 100 adjacent to the second end region 520 in direction D1. The lower portion 512 of the first end region 510 can apply a contraction force FB4 to the lower surface 110 of the first horizontal portion 100 adjacent to the first end region 510 in direction D2. The lower portion 522 of the second end region 520 can apply a contraction force FB4 to the lower surface 110 of the first horizontal portion 100 adjacent to the second end region 520 in direction D1.

[0142] refer to Figure 12 and Figure 13 When the lower surface 110 of the first horizontal portion 100 is subjected to contraction forces FB3 and FB4, the central portion of the first horizontal portion 100 can deform in direction D7 by the contraction forces FB3 and FB4. That is, bending deformation can occur at the first horizontal portion 100 in direction D7. When the tension rod 500 is connected to the first horizontal portion 100, the bending deformation of the first horizontal portion 100 can be eliminated. That is, the first horizontal portion 100 can have a linear shape that does not bend or only slightly bends.

[0143] For example, in Figure 25In the case of a mask frame 11 connected to the tension rod 500, if the amount of bending deformation δ2 of the first horizontal portion 100 not connected to the tension rod 500 is measured to be approximately 40 μm, then the amount of bending deformation δ2 of the first horizontal portion 100 connected to the tension rod 500 can be measured to be approximately 4 mm. That is, in the case of a mask frame 11 connected to the tension rod 500, the bending deformation can be improved to approximately 1 / 10 of the level compared to the case of a mask frame 11 not connected to the tension rod 500. Although it may not be possible to set the amount of bending deformation δ2 to zero completely, if the bending deformation is improved to 1 / 10 of the level, the deposition quality can be insignificantly affected by the bending deformation. Therefore, the deposition quality can be improved during the deposition process used to form the light-emitting layer by using the mask frame 11.

[0144] Figure 28 This is a plan view illustrating a method for manufacturing a mask frame according to an embodiment.

[0145] refer to Figure 23 and Figure 28 A frame unit 20 can be prepared. The frame unit 20 may include a first horizontal portion 100, a second horizontal portion 200, a first vertical portion 300, a second vertical portion 400, and a platform 600. The lower surface 110 of the first horizontal portion 100 may be parallel to the upper surface of the platform 600. The tension rod 500 may include a first tension rod 501 and a second tension rod 502. The first tension rod 501 may include an end region 501a and another end region 501b, which are fixedly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the upper surface 120 of the first horizontal portion 100. Similarly, the second tension bar 502 may include an end region 502a and another end region 502b, which are fixedly attached (i.e., welded, glued or attached by means of a mechanical connection unit (e.g., a ring)) to the upper surface 120 of the first horizontal portion 100.

[0146] Due to the weight of the mask and gravity, the first horizontal portion 100 can be subjected to bending deformation in the downward direction D3. Therefore, the amount of bending deformation δ1 can be measured before correcting for the bending deformation. In addition to measuring the amount δ1 of the bending deformation of the first horizontal portion 100, the direction of the bending deformation can also be measured. (Reference) Figure 23 The deformation of the first horizontal section 100 in the direction D3 was measured by the amount of bending deformation δ1.

[0147] Tensile force FC1 can be applied to each of the first tension rod 501 and the second tension rod 502 in the longitudinal directions D1 and D2 of the tension rod 500. Tensile force FC1 can be applied to both the first tension rod 501 and the second tension rod 502 to compensate for the amount of bending deformation δ1. Tensile force FC1 can be applied in the longitudinal directions D1 and D2 of the tension rod 500 by maintaining one end region 501a and 502a of the first tension rod 501 and the other end region 501b and 502b of the second tension rod 502. That is, to compensate for the amount of bending deformation δ1 of the first horizontal portion 100 in the downward direction D3, substantially the same amount of bending deformation δ1 may be required in the upward direction D4. The required tensile force FC1 can be calculated using the measured amount of bending deformation δ1. That is, a tensile force FC1 with a magnitude capable of causing bending deformation in the upward direction D4 can be applied to the tension rod 500. In other words, the magnitude of the tensile force FC1 can be determined based on the amount of bending deformation δ1. For example, when the amount of bending deformation δ1 is relatively high, the tensile force FC1 applied to the tension rod 500 in the longitudinal directions D1 and D2 of the tension rod 500 can be relatively large. As the tensile force FC1 increases, the bending deformation in the upward direction D4 can increase. Therefore, the tensile force FC1 can be determined based on the measured amount of bending deformation δ1.

[0148] Refer again Figure 17 and Figure 18 The first tension rod 501 and the second tension rod 502 can be connected to the first horizontal portion 100. The first tension rod 501 and the second tension rod 502 can be arranged in the longitudinal directions D1 and D2 of the first horizontal portion 100. Specifically, the first tension rod 501 and the second tension rod 502 can be connected to the first horizontal portion 100 with a tensile force FC1 applied to them. One end region 501a and 502a and the other end region 501b and 502b of the first tension rod 501 and the second tension rod 502 can be fixedly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the upper surface 120 of the first horizontal portion 100. After the first tension rod 501 and the second tension rod 502 have been fixedly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) to the first horizontal portion 100, the tensile force FC1 applied to the first tension rod 501 and the second tension rod 502 can disappear. When the tensile force FC1 disappears (i.e., the tensile force FC1 is no longer applied), the first tension rod 501 and the second tension rod 502 can contract to return to their original state. That is, a contraction force FC2 can be generated in the first tension rod 501 and the second tension rod 502.

[0149] When a contraction force FC2 is generated in the first tension rod 501 and the second tension rod 502, the contraction force FC2 can be applied to the first horizontal portion 100 connected to the tension rod 500. The contraction force FC2 can be applied to the upper surface 120 of the first horizontal portion 100 by the fixedly attached (i.e., welded, glued, or attached via a mechanical connection unit (e.g., a ring)) end regions 501a and 502a of the first tension rod 501 and the second tension rod 502 to one end region 501a and the other end region 502b of the first horizontal portion 100. The contraction force FC2 can be applied in direction D2 to the upper surface 120 of the first horizontal portion 100 adjacent to one end region 501a and 502a. The other end regions 501b and 502b of the first tension rod 501 and the second tension rod 502 can apply a contraction force FC2 in the direction D1 to the upper surface 120 of the first horizontal portion 100 adjacent to the other end regions 501b and 502b.

[0150] refer to Figure 19 When the upper surface 120 of the first horizontal portion 100 is subjected to a contraction force FC2, the central portion of the first horizontal portion 100 can deform in the upward direction D4 by the contraction force FC2. That is, bending deformation can occur at the first horizontal portion 100 in the upward direction D4. Therefore, when the first tension rod 501 and the second tension rod 502 are connected to the first horizontal portion 100, the bending deformation of the first horizontal portion 100 can be eliminated. That is, the first horizontal portion 100 can have a linear shape that does not bend or only slightly bends.

[0151] For example, in Figure 23 In the case where the bending deformation δ1 of the first horizontal portion 100 not connected to the first tension rod 501 and the second tension rod 502 is measured to be approximately 40 μm, the bending deformation δ1 of the first horizontal portion 100 connected to the first tension rod 501 and the second tension rod 502 can be measured to be approximately 4 μm. That is, in the case of the mask frame 12 connected to the first tension rod 501 and the second tension rod 502, the bending deformation can be improved to approximately 1 / 10 of the level compared to the case of the mask frame 12 not connected to the first tension rod 501 and the second tension rod 502. Therefore, the deposition quality can be improved during the deposition process used to form the light-emitting layer by using the mask frame 12.

[0152] This invention can be applied to various mask assemblies that have a mask frame for vapor deposition. For example, this invention can be applied to many mask assemblies, such as metal mask assemblies for depositing organic light-emitting layers, metal mask assemblies for depositing thin films, etc.

[0153] Although certain embodiments and implementations have been described herein, other embodiments and modifications will be apparent from this specification. Therefore, the inventive concept is not limited to these embodiments, but rather to the broader scope of the appended claims and various obvious modifications and equivalent arrangements that will be apparent to those skilled in the art.

Claims

1. A mask frame, comprising: First level section; The second horizontal section is located below the first horizontal section; At least one vertical portion connects the first horizontal portion and the second horizontal portion; as well as The tension rod is connected to the first horizontal section, and Wherein, the tension rod is configured to apply a contraction force to the first horizontal portion in the longitudinal direction of the tension rod, and The tension rod is connected to the lower surface of the first horizontal section.

2. The mask frame according to claim 1, wherein, The first end region of the tension rod and the second end region of the tension rod opposite to the first end region are rigidly attached to the first horizontal portion.

3. The mask frame according to claim 1, wherein, The tension rod includes a first region and a second region, wherein the intensity of the contraction force applied from the second region is different from the intensity of the contraction force applied from the first region.

4. The mask frame according to claim 1, wherein, The tension rod is made of metal.

5. The mask frame according to claim 1, wherein, The tension rod has a thickness ranging from 50 μm to 2 mm.

6. The mask frame according to claim 1, wherein, The tension rod includes a first tension rod and a second tension rod.

7. The mask frame according to claim 6, wherein, The first tension rod and the second tension rod are arranged in the longitudinal direction of the first horizontal portion.

8. The mask frame according to claim 6, wherein, The first tension rod and the second tension rod are connected to the upper surface of the first horizontal portion.

9. A mask frame, comprising: First level section; The second horizontal section is located below the first horizontal section; The first vertical portion connects the first horizontal portion and the second horizontal portion; The platform is located below the second horizontal section; as well as A tension rod is connected to the first vertical portion and the platform, and configured to apply a contraction force to the first vertical portion.

10. The mask frame according to claim 9, wherein, The first end region of the tension rod is rigidly attached to the first vertical portion, and the second end region of the tension rod opposite to the first end region is rigidly attached to the platform.

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