Carriage and method for supporting components of substrate processing apparatus

Abstract

The present invention provides a method for supporting components of a trolley and a substrate processing device. The trolley of the present invention is used to support components of the device on the outside of the substrate processing device so that they can be taken out to the outside by sliding in the lateral direction. The trolley includes: a trolley body having wheels and being movable on the ground, and including a first supporting portion for supporting the components; and a second supporting portion connected to the trolley body in a manner capable of moving between a first position in which the lateral width of the trolley becomes a first length and a second position in which the lateral width becomes a second length greater than the first length, and is used to support the components together with the first supporting portion at least in the second position. According to the present invention, when the components of the substrate processing device are taken out of the device and supported on the trolley, the space occupied by the trolley can be reduced as necessary.

Description

Technical Field

[0001] The present invention relates to a method for supporting components of a carriage and a substrate processing apparatus. Background Art

[0002] An example of a processing apparatus that processes semiconductor wafers (hereinafter referred to as wafers) serving as substrates is a wafer inspection apparatus that inspects the electrical characteristics of semiconductor devices formed on the wafers. Patent Document 1 discloses such a wafer inspection apparatus and describes how components constituting a unit of the wafer inspection apparatus are removed from the unit and placed on a carriage for maintenance.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 2020-21967. Summary of the Invention

[0006] Problems to be solved by the invention

[0007] The present invention provides a technology that can reduce the space occupied by a carriage when necessary when components of the apparatus are taken out of the apparatus and supported on the carriage.

[0008] Technical means to solve the problem

[0009] The trolley of the present invention is used to support the components of the substrate processing device on the outside of the substrate processing device so that they can be taken out to the outside by sliding in the lateral direction. The trolley includes: a trolley main body, which has wheels and can move on the ground, and includes a first support part that supports the components; and a second support part, which is connected to the trolley main body in a manner that can move between a first position in which the lateral width of the trolley becomes a first length and a second position in which the lateral width becomes a second length larger than the first length, and is used to support the components together with the first support part at least in the second position.

[0010] Effects of the Invention

[0011] According to the present invention, when the components of the apparatus are taken out of the substrate processing apparatus to the outside of the apparatus and supported on a carriage, the space occupied by the carriage can be reduced as necessary. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a top view of a wafer inspection apparatus using a carriage according to the first embodiment of the present invention.

[0013] Figure 2It is a schematic perspective view showing the trolley and the tester supported by the trolley.

[0014] Figure 3 It is a schematic side view of the trolley.

[0015] Figure 4 It is a schematic side view of the trolley.

[0016] Figure 5 1 is a top view of the trolley.

[0017] Figure 6 1 is a top view of the trolley.

[0018] Figure 7 It is a schematic longitudinal sectional side view of the support platform constituting the above-mentioned carriage.

[0019] Figure 8 It is a schematic longitudinal sectional side view of the support platform constituting the above-mentioned carriage.

[0020] Figure 9 It is a schematic longitudinal sectional rear view of the support platform.

[0021] Figure 10 It is a side view for showing the position of the ball provided on the said support base.

[0022] Figure 11 It is a top view of the vehicle according to the second embodiment.

[0023] Figure 12 1 is a top view of the trolley.

[0024] Figure 13 It is a schematic longitudinal sectional side view of the support platform constituting the above-mentioned carriage.

[0025] Figure 14 It is a schematic longitudinal sectional side view of the support platform constituting the above-mentioned carriage.

[0026] Figure 15 This is a perspective view of a cart according to a third embodiment.

[0027] Figure 16 1 is a top view of the trolley.

[0028] Figure 17 1 is a top view of the trolley.

[0029] Figure 18 It is a schematic side view of the support platform constituting the above-mentioned carriage.

[0030] Figure 19 It is a schematic side view of the support platform constituting the above-mentioned carriage.

[0031] Figure 20It is a top view of the vehicle according to the fourth embodiment.

[0032] Figure 21 1 is a top view of the trolley.

[0033] Figure 22 It is a schematic side view of the support platform constituting the above-mentioned carriage.

[0034] Figure 23 It is a schematic side view of the support platform constituting the above-mentioned carriage.

[0035] Description of Reference Numerals

[0036] 1 Wafer inspection device

[0037] 2 Tester

[0038] 3 cars

[0039] 31 Pillars

[0040] 34 casters

[0041] 42 front desk

[0042] 44 rear stage DETAILED DESCRIPTION

[0043] (First embodiment)

[0044] The trolley 3 of the first embodiment of the present invention is used for maintaining a wafer inspection apparatus 1 as a substrate processing apparatus installed in a clean room of a factory. Figure 1 Detailed description of the wafer inspection apparatus 1 is provided. The wafer inspection apparatus 1 includes a loader 11 and a unit tower 12, which are connected to each other in the transverse direction. In this example, the unit tower 12 is composed of 12 units 13. When viewed from the connection direction between the loader 11 and the unit tower 12, the units 13 are arranged in a 4×3 matrix. In other words, the units 13 are arranged in three layers in the longitudinal direction.

[0045] The loader 11 is equipped with a platform 14 for placing a carrier C for storing wafers W, and a transfer mechanism 15 for transferring wafers W between the carrier C on the platform 14 and each unit 13. Each unit 13 inspects the electrical characteristics of the wafers W, such as the conduction state of the circuits formed on the wafers W. Further describing the units 13, a card component (not shown) and a tester 2 are provided within the unit 13 as components of the unit 13. The lower surface of the card component faces the upper surface of the wafer W, and terminals are provided on this lower surface for contact with the upper surface of the wafer W to perform the aforementioned inspection.

[0046] Also refer to Figure 2As described in the perspective view of FIG, the tester 2 is a component equipped with a circuit board, etc., on which the circuits used for the above-mentioned inspection are formed. It is connected to the card component from above for use. Furthermore, the tester 2 is configured so that, when separated from the card component, it can be removed horizontally by an operator to the outside of the unit 13, and the removed portion can be maintained. This removal direction is the side opposite to the side connected to the loader 11, and this removal direction is used as the rear direction in the following description. Furthermore, the left and right sides in the following description refer to the left and right sides when viewed from the rear toward the front.

[0047] The tester 2 is constructed from a rectangular main body 21, which is symmetrical and elongated from front to back, and ridges 22 extending forward and backward from the left and right side surfaces of the main body 21. Within the unit 13, these ridges 22, acting as supported portions, are supported from below by supporting members (not shown), maintaining the tester 2 in a horizontal position. Furthermore, components 23 and 24 are located on the front and rear sides of the main body 21, respectively.

[0048] To maintain the tester 2, specifically, to maintain (including inspecting and replacing) the components 23 and 24, the tester 2 is slid and removed from the cell 13 to expose the components 23 and 24 to be maintained. The aforementioned trolley 3 is used to support the portion of the protrusion 22 exposed to the outside of the cell 13 from below during this removal of the tester 2. The trolley 3 is movable on the cleanroom floor and is positioned behind the cell tower 12 for use during maintenance of the tester 2.

[0049] However, for example, multiple wafer inspection apparatuses 1 may be installed in a clean room, sometimes arranged in a front-to-back arrangement. Meanwhile, the use of larger testers 2 is being studied. Consequently, if the wafer inspection apparatuses 1 are enlarged and their footprint increases, the front-to-back width of the space behind the unit tower 12 may become relatively narrow, even without changing the number of wafer inspection apparatuses 1 installed in the clean room. In this case, if the front-to-back width of the cart 3 located behind the unit tower 12 is relatively large, there is a concern that the passage of people between the apparatuses during maintenance of the testers 2 will be constantly obstructed, and it is desirable to prevent this from occurring.

[0050] As described above, components 23 and 24 are located at different positions on the front and rear sides of the tester 2. Therefore, when repairing component 24 on the rear side, the amount of tester 2 removed can be smaller than when repairing component 23 on the front side. Consequently, the width (lateral width) of the carriage 3 supporting the tester 2 can also be smaller in the removal direction. Therefore, the carriage 3 is configured to adjust its lateral width according to the amount of tester 2 removed from the unit 13.

[0051] Figure 2 This is a schematic perspective view of the trolley 3. Figure 3 、 Figure 4 It is a schematic side view of the trolley 3. When the component 24 is maintained, the trolley 3 is as shown in FIG. Figure 3 As shown in FIG. 1 , the first length is relatively small and is arranged at the rear of the unit tower 12. The rear side of the tester 2 is supported by the trolley 3, and the front side of the tester 2 is supported by the unit 13. In addition, when the component 23 is maintained, the front and rear widths are as shown in FIG. Figure 4 As shown, the trolley 3 is positioned behind the unit tower 12 in a state of a second length that is larger than the first length, and the tester 2 is entirely removed from the unit 13 and supported on the trolley 3. That is, the trolley 3 supports the tester 2 when it is removed from the apparatus by a first removal amount that is relatively small, while supporting the tester 2 when it is removed from the apparatus by a second removal amount that is larger than the first removal amount, when it is in a state of the second length.

[0052] Before describing the structure of the trolley 3 in detail, Figures 2 to 4 The schematic structure is described below. In addition, the trolley 3 is movable as described above, but the front, back, left, and right used in the following description of the trolley 3, unless otherwise specified, are assumed to be the front, back, left, and right in the state of being arranged at the rear of the unit tower 12 to support the tester 2 as described above. In order to be able to take out and support the tester 2 from the three layers of units 13 arranged in the longitudinal direction, the trolley 3 includes three layers of support platforms 4 in the longitudinal direction according to the height of each unit 13. Moreover, corresponding to the configuration of the protrusion 22 of the tester 2 described above, two support platforms 4 are provided in pairs on each layer, separated from each other on the left and right. Therefore, a total of six support platforms 4 are provided, and one tester 2 is supported by two support platforms 4 on the left and right.

[0053] The support platform 4 can be extended and retracted forward and backward by switching between the shortened state and the extended state. Figure 3 、 Figure 4 As shown in the figure, the front and rear width of the trolley 3 is changed. In addition, a plurality of balls 49 (in the front and rear) as rolling bodies are provided on each support platform 4. Figure 2 (not shown in the figure), the balls 49 directly support the removed protrusion 22 from below. Specifically, when removing the tester 2, the balls 49 in contact with the protrusion 22 roll as the protrusion 22 moves, enabling removal with relatively little force. Furthermore, even when returning the removed tester 2 to the unit 13, the rolling of the balls 49 allows for a relatively small return force.

[0054] Hereinafter, referring to the top view of the carriage 3, Figure 5 、 Figure 6 , as a schematic longitudinal sectional side view of the support platform 4 Figure 7 、 Figure 8Here, Figure 5 、 Figure 7 and Figure 2 、 Figure 3 Similarly, the state in which the front-rear width of the carriage 3 is the first length (therefore, the support platform 4 is in a shortened state) is shown. Figure 6 、 Figure 8 and Figure 4 Similarly, the state in which the front-rear width of the carriage 3 is the second length (therefore, the support platform 4 is in the extended state) is shown.

[0055] The trolley 3 includes four pillars extending in the vertical direction. Regarding these pillars, the left and right pillars arranged on the front side are designated as 31, and the left and right pillars arranged on the rear side are designated as 32. The pillars 31 and 32 are connected to each other by beams 33, and the beams 33 extend left and right and are arranged in multiple layers up and down. The pillars 31 and 32 arranged in front and back are connected to each other by a support platform 4. Casters 34 are provided at the lower ends of the pillars 31 and 32 (see Figure 3 、 Figure 4 ), each caster 34 can rotate about a vertical axis to change its orientation. Therefore, as described above, the cart 3 can freely move on the ground and assume a desired configuration by rolling the wheels constituting the casters 34. Stoppers 35 are provided on the casters 34 on the support posts 31 to secure the wheels of the casters 34.

[0056] The support platforms 4 on each level are constructed similarly. Furthermore, the left and right support platforms 4, which form a pair on the same level, are formed approximately mirror-symmetrically about the left and right centers of the cart 3. Here, the right support platform 4 will be described as a representative example. As described above, the support platforms 4 are telescopic, but in their shortened state, they are constructed as flat rectangular parallelepipeds, with their front ends supported by support pillars 31 and their rear ends supported by support pillars 32. Furthermore, the support platforms 4 are arranged so that their long sides are aligned in the front-to-back direction when viewed from above, and extend from the support pillars 31 and 32 toward the left and right centers of the cart 3 when viewed from the front.

[0057] like Figures 5 to 8 As shown, the support platform 4 is composed of a base 41, a front platform 42, an intermediate platform 43, a rear platform 44, and a sliding portion 45. Four sliding portions 45 are provided, each consisting of a rail 46 and a rail 47 that engage with each other in a manner that allows sliding in the extension direction. The front platform 42, the intermediate platform 43, and the rear platform 44 are components for supporting the protrusion 22 of the tester 2. Each of them is formed into a flat rectangular parallelepiped and is arranged in this order from front to back. Therefore, the front platform 42 becomes the front end of the support platform 4 connected to the support column 31, and the rear platform 44 becomes the rear end of the support platform 4 connected to the support column 32. In terms of front-to-back length, the front platform 42 > the rear platform 44 > the intermediate platform 43.

[0058] The base 41 is a plate-like body that is long and thick-walled in the front and back. The lower side of the intermediate platform 43 passes through the base 41 and is fixed to the center of the length direction of the base 41. Therefore, according to the way of observation, the front and rear sides of the base 41 are configured to protrude from the intermediate platform 43. In addition, a recess 51 is formed at the lower part of the rear side of the front platform 42. The front side of the base 41 enters the recess 51, and the recess 51 and the front side of the base 41 are connected to each other by two sliding parts 45 (one sliding part) arranged symmetrically on the left and right. In detail, as shown in the schematic longitudinal rear view Figure 9 As shown, rails 46 (first sliding components) of each sliding portion 45 are fixedly installed on the left and right walls of the recess 51, and rails 47 (second sliding components) of each sliding portion 45 are fixedly installed on the left and right sides of the front side of the base 41.

[0059] Furthermore, a recess 52 is formed in the lower portion of the front side of the rear table 44. The rear side of the base 41 enters this recess 52, and two slides 45 (other slides) connect the recess 52 and the rear side of the base 41. Specifically, rails 46 (first slide components) for each slide 45 are fixed to the left and right walls of the recess 52, and rails 47 (second slide components) for each slide 45 are fixed to the left and right sides of the rear side of the base 41. Therefore, rails 47 are provided on the front and rear sides of the intermediate table 43 via the base 41. With this structure, the front table 42 and the rear table 44 are each capable of sliding relative to the base 41. When the support table 4 is shortened, the front table 42 and the rear table 44 are in contact with the front and rear sides of the intermediate table 43, respectively. When the support table 4 is extended, the front table 42 and the rear table 44 are separated from the intermediate table 43.

[0060] The front table 42 corresponds to the first support portion, and the middle table 43 and the rear table 44 correspond to the second support portion. The middle table 43 corresponds to the middle support portion, and the rear table 44 corresponds to the end support portion located on the opposite side of the middle table 43 from the front table 42 in the front-to-back direction. Furthermore, the positions of the middle table 43 and the rear table 44 relative to the shortened state of the front table 42 are the first position, and the positions of the middle table 43 and the rear table 44 relative to the extended state of the front table 42 are the second position. Furthermore, as described above, the support table 4 is disposed on the left and right sides, so the group consisting of the front table 42, the middle table 43, and the rear table 44 is disposed on the left and right sides.

[0061] Small-diameter through-holes 53 are provided on the upper surfaces of the front stage 42 and the rear stage 44, opening into the recesses 51 and 52, respectively. Furthermore, two recesses are provided on the upper surface of the base 41, spaced apart front and back, in front of the intermediate stage 43, and two recesses are provided on the rear of the intermediate stage 43. Of these two recesses, formed front and back relative to the intermediate stage 43, the one closer to the intermediate stage 43 is designated as recess 54, and the one further away from the intermediate stage 43 is designated as recess 55. The left and right positions of recesses 54 and 55 align with the left and right positions of the through-hole 53, and by extending or contracting the support stage 4, the through-hole 53 can overlap with either recess 54 or recess 55.

[0062] By inserting a pin 56 from above the front table 42 into each through-hole 53 and allowing the lower end of the pin 56 to enter the recess 54 or the recess 55, the relative position of the front table 42 and the intermediate table 43 in the front-back direction can be fixed. Furthermore, by inserting a pin 56 from above the rear table 44 into the through-hole 53 and allowing the lower end of the pin 56 to enter the recess 54 or the recess 55, the relative position of the rear table 44 and the intermediate table 43 in the front-back direction can be fixed. When securing the support table 4 in the shortened state, the pin 56 enters the recess 54, and when securing the support table 4 in the extended state, the pin 56 enters the recess 55.

[0063] A position limiting portion 57, which is a protrusion extending in the front and rear directions, is provided on the upper surface of each of the front table 42 and the rear table 44. The position limiting portion 57 is arranged near the center of the left and right sides of the trolley 3 and limits the left and right position of the tester 2 to be removed by abutting against the protrusion 22 of the tester 2 to be removed. In addition, a stopper 58, which is a protrusion extending in the left and right directions, is provided on the upper surface of the rear table 44 at a position further rearward than the position limiting portion 57. The stopper 58 limits the front and rear position of the tester 2 to be removed by abutting against the rear end of the protrusion 22 of the tester 2 to be removed.

[0064] The aforementioned balls 49 are provided on the upper surfaces of the front stage 42, the middle stage 43, and the rear stage 44, and a plurality of the balls 49 are arranged in a row at intervals from each other at a position closer to the left and right center of the carriage 3 than the position limiting portion 57. Figure 7 、 Figure 8 As shown, each ball 49 is arranged on the front stage 42, the middle stage 43, and the rear stage 44 via the base 40. In addition, in order to avoid complication of the figure, in the figure illustrating the first embodiment, Figure 7 、 Figure 8 and the following Figure 10 In the figures other than FIG, the base 40 is omitted. In this example, a plurality of balls 49 are provided on each of the front stage 42 and the rear stage 44, and one ball 49 is provided on the middle stage 43.

[0065] In addition, a locking mechanism 36 is provided on the rear end side of the front table 42. The locking mechanism 36 includes a main body 37 fixed to the front table 42 and a front end portion 38 protruding from the main body 37 toward the left and right center sides of the trolley 3, and the protrusion amount of the front end portion 38 is adjustable. By adjusting the protrusion amount, the front end portion 38 enters a hole portion (not shown) formed on the side of the main body 21 of the tester 2 taken out by the trolley 3. Thereby, the tester 2 can be fixed to the trolley 3. In addition, as described above, the support table 4 on the right side and the support table 4 on the left side are roughly mirror-symmetrical, but the locking mechanism 36 is only provided on the support table 4 on the right side. In the trolley 3 constructed as described above, the front table 42, the pillar 31 and the casters 34 thereunder constitute the trolley body.

[0066] Next, the process of supporting the tester 2 with the trolley 3 when the front part 23 of the tester 2 is repaired will be described. The support table 4 is fixed in a shortened state, so that the trolley 3 becomes Figure 3 、 Figure 5 The trolley 3 is placed on standby at a position offset from the area where the tester 2 is removed, behind the cell tower 12, at the first length shown. The operator adjusts the orientation of the trolley 3 so that the longitudinal direction of the support table 4 is aligned front to back, and after bringing the trolley 3 close to the rear of the cell 13 containing the tester 2 to be maintained, the operator secures the wheel of the front caster 34 with the stopper 35 of the front caster 34, thereby fixing the position of the front support 31 of the trolley 3.

[0067] Next, the operator removes the pins 56 from the support platform 4, and after the length of the support platform 4 is changed, the operator pulls the support column 32 on the rear side of the trolley 3 backward and uses the casters 34 on the rear side connected to the support column 32 to shift the position of the support column 32. In this way, the three-layer support platform 4 is extended at once, and the front-to-back width of the trolley 3 is expanded, and the length of the trolley 3 becomes Figure 4 、 Figure 6 The second length described in the etc. Afterwards, the operator inserts the removed pin 56 into the support platform 4 to fix the support platform 4 in the extended state.

[0068] The operator then removes the tester 2 from the unit 13 containing the tester 2 to be maintained by horizontally moving it rearward. This causes the main body 21 of the tester 2 to enter between the support platforms 4 arranged on the left and right sides, and the rear end of the protrusion 22 of the tester 2 rests on the balls 49 on the front side of the support platform 4 at the level corresponding to the unit 13. This results in the unit 13 and the carriage 3 each supporting the tester 2. The operator removes the tester 2 further rearward, and the protrusion 22 moves along the row of balls 49. As described above, the balls 49 supporting the protrusion 22 roll as the protrusion 22 moves.

[0069] When the rear end of the protrusion 22 contacts the stopper 58 and the entire tester 2 is taken out and supported on the trolley 3, the operator fixes the tester 2 to the trolley 3 using the locking mechanism 36. Figure 6 、 Figure 8 , respectively, show the tester 2 and the protrusion 22 of the tester 2 after removal. Since the component 23 is exposed to the outside of the cell 13, the operator can perform maintenance on the component 23. After maintenance, the tester 2 is returned from the trolley 3 to the cell 13 in the reverse order of the above process, and the trolley 3 is retracted from the rear of the cell tower 12.

[0070] The case of maintaining the component 23 on the front side of the tester 2 has been described above. However, when maintaining the component 24 on the rear side of the tester 2, the pin 56 is not removed. The same process as that of the case of maintaining the component 23 is followed, except that the support table 4 is kept in the shortened state (i.e., the trolley 3 is kept at the first length) and the tester 2 is removed. Figure 5 、 Figure 7 , the tester 2 and the protrusion 22 of the tester 2 are shown in the state where the trolley 3 maintains the first length and has been removed. In this state, the front end side of the tester 2 is supported by the unit 13, and the rear end side of the tester 2 is supported by the trolley 3. Of the components 23 and 24, only component 24 is exposed outside the unit 13, allowing maintenance of component 24.

[0071] In addition, regarding the positional relationship between the arrangement of the balls 49 and the tester 2, refer to the side view when the support table 4 is extended and removed as described above. Figure 10 For explanation. Point P represents the center of gravity of the tester 2 when viewed from the side. With respect to the plurality of balls 49 arranged front to back, the largest distance among the distances between adjacent balls 49 is set to L1. Specifically, the distance between the ball 49 arranged at the rear end side of the front table 42 and the ball 49 of the middle table 43, and the distance between the ball 49 arranged at the front end side of the rear table 44 and the ball 49 of the middle table 43 are L1. Moreover, if the distance between the rear end (the end in the removal direction) of the protrusion 22 of the tester 2 and the front and rear of the center of gravity P is set to L2, then the distance L2 ≥ the distance L1.

[0072] Assuming that distance L2 is less than distance L1, observing the movement of the protrusions 22 on the two balls 49 forming distance L1 when removing the tester 2, the center of gravity P of the tester 2 passes over the front ball 49 and is positioned rearward before the rear end of the protrusion 22 reaches the rear ball 49. This causes the tester 2 to tilt, with the rear end of the tester 2 descending between the two balls 49. Specifically, by ensuring that distance L2 is greater than or equal to distance L1, the balls 49 are positioned so that the rear end of the protrusions 22 is supported by the balls 49 when the center of gravity P is positioned between the balls 49 in the front-to-back direction, enabling stable removal of the tester 2 with minimal force. Furthermore, when the support table 4 is in the shortened state, distance L1 is less than distance L1 in the extended state. Therefore, as in the shortened state, distance L2 is greater than or equal to distance L1, enabling stable removal of the tester 2.

[0073] Thus, the trolley 3 is configured to change its lateral width by extending and retracting the support platform 4 in accordance with the amount of tester 2 removed for maintenance. This allows the tester 2 to be supported even when the removal amount is large, and when a small amount is sufficient, the lateral width of the trolley 3 can be kept small, ensuring a relatively large space behind the trolley 3. Consequently, when the trolley 3 is supporting the tester 2, it is possible to prevent the trolley 3 from obstructing the passage of people.

[0074] Furthermore, the support platforms 4 on each level are connected to each other via support columns 32, serving as connecting members. Therefore, by moving these support columns 32 as described above, the support platforms 4 on each level can be extended and retracted at once. Therefore, after positioning the trolley 3 behind the cell tower 12 for maintenance on the component 23, or by adjusting the length of the trolley 3, the tester 2 can be removed. Furthermore, since the support platforms 4 on each level can be extended and retracted at once, the tester 2 can be retreated from the rear of the cell tower 12 to another location after returning it to the cell 13 or by adjusting the length of the trolley 3. Furthermore, the left and right support platforms 4 are also connected to each other via beams 33 and support columns 32, allowing for simultaneous extension and retraction, further enabling the length of the trolley 3 to be adjusted. Furthermore, since casters 34 that roll on the ground are provided at the lower ends of the support columns 32, the operator can adjust the length of the trolley 3 by extending and retracting the support platform 4 with minimal effort.

[0075] (Second embodiment)

[0076] Refer to the top view Figure 11 、 Figure 12 , as a schematic side view Figure 13 、 Figure 14The trolley 3A of the second embodiment will be described focusing on the differences from the trolley 3. The front, back, left, and right used in the description of the trolleys of the second embodiment and thereafter also refer to the case where the trolley is positioned behind the unit 13 to support the tester 2.

[0077] This trolley 3A includes a support platform 4A in place of support platform 4. Support platform 4A also expands and contracts in the same way as support platform 4, thereby changing the length of trolley 3A. However, since support platform 4A lacks intermediate platform 43, the relative positions of front platform 42 and rear platform 44 change during expansion and contraction. In other words, whereas the support platform 4 of trolley 3 previously described expands and contracts in two stages, the support platform 4A of this trolley 3A expands and contracts in a single stage, and only two slides 45 are provided on each support platform 4A.

[0078] The rear end of the base 41 of the support platform 4A is fixed to the rear platform 44. Furthermore, the front side of the base 41, like the base 41 of the support platform 4, is inserted into a recess 51 provided in the front platform 42. The left and right side walls of the recess 51 are connected to the left and right side surfaces of the front side of the base 41 via sliding portions 45. With this structure, the length of the support platform 4A can be changed by changing the relative position of the front platform 42 and the rear platform 44 as described above. When the support platform 4A is shortened, the front platform 42 and the rear platform 44 are in contact.

[0079] As mentioned above, the support platform 4A is a single-stage telescopic structure. Figure 13 、 Figure 14 As shown, only one pin 56 for fixing the length of the support platform 4 is provided on each support platform 4, and the through-hole 53 for inserting the pin 56 is also opened only in the recess 51 of the front platform 42. In addition, a recess 54 for inserting the pin 56 for fixing the support platform 4A in the shortened state and a recess 55 for inserting the pin 56 for fixing the support platform 4A in the extended state are also provided on the rear side and the front side of the base 41.

[0080] However, since the support platform 4A lacks the intermediate platform 43, the maximum distance L1 between the adjacent front and rear balls 49 becomes relatively large when the support platform 4A is extended. Specifically, the distance between the balls 49 at the front end of the rear platform 44 and the balls 49 at the rear end of the front platform 42 is relatively long, but they are arranged so that the distance L2 ≥ the distance L1 is achieved. Furthermore, in the subsequent embodiments, the balls 49 are arranged so that this relationship is achieved.

[0081] This trolley 3A is used in the same process as trolley 3 to support the removed tester 2. Similar to trolley 3, this trolley 3A can be shortened in width, except when the amount of tester 2 removed needs to be increased, thus achieving the same effects as trolley 3. Furthermore, this trolley 3A has a relatively small number of components, which is advantageous from the perspective of reducing manufacturing costs.

[0082] (Third embodiment)

[0083] Refer to the schematic three-dimensional diagram Figure 15 , as a top view Figure 16 、 Figure 17 , and a schematic side view of the support platform 4B and the extension platform 61 constituting the trolley 6 Figure 18 、 Figure 19 The following describes the trolley 6 of the third embodiment, focusing on the differences from the trolley 3. First, the schematic structure of the trolley 6 will be described. The trolley 6 includes a support platform 4B having a structure substantially identical to the support platform 4 in the shortened state of the trolley 3. The support platform 4B, like the support platform 4, is arranged on the trolley 6 in three upper and lower layers and in the left and right directions.

[0084] However, the support platforms 4B do not extend. Instead, a horizontal extension platform 61 is provided behind each support platform 4B on the trolley 6 at the same height as the support platform 4B. Thus, like the support platforms 4B, the extension platforms 61 are arranged in three vertical and horizontal layers. Furthermore, the left and right extension platforms 61 form a pair, supporting the left and right sides of the rear side of the tester 2. Furthermore, in this third embodiment, the support platform 4B serves as the first support portion, and the extension platform 61 serves as the second support portion.

[0085] Moreover, the extension table 61 can be rotated around the vertical axis to change its orientation, and the horizontal width of the trolley 6 can be changed by the orientation change (position change). Regarding the horizontal width of the trolley 6, when the first length is relatively short, only the support table 4 of the support table 4 and the extension table 61 is used to support the tester 2, and as in the case of using the trolley 3, only a part of the tester 2 is supported by the trolley 6 for maintenance of the component 24. And, when it is a second length that is larger than the first length, the support table 4 and the extension table 61 are used to support the tester 2, and as in the case of using the trolley 3, the entire tester 2 is supported by the trolley 6 for maintenance of the component 23. In addition, Figure 16 、 Figure 18 Indicates that the extension platform 61 is in the first position and the trolley 6 is in the first length state. Figure 15 、 Figure 17 、 Figure 19 The extension platform 61 is in the second position and the lateral width of the carriage 6 is shown to be the second length.

[0086] The following describes the various components of the trolley 6 in detail. In the following description, the center side of the trolley in the left-right direction is referred to as the left-right center side, and the opposite side is referred to as the left-right outer side. Regarding the support platform 4B, a difference from the support platform 4 is that the stopper 58 located behind the row of balls 49 arranged in a front-to-back arrangement is removable. This is so that when the length of the trolley 6 is changed, as described later, by replacing the stopper 58 between the aforementioned position of the support platform 4 and the extension platform 61, the front and rear positions of the removed tester 2 can be properly adjusted in each of the first and second length states.

[0087] In order not to hinder the rotation of the extension platform 61, each support 32 does not pass through the support platform 4B, and supports the support platform 4B from the rear side. In addition, a support 62 extending in the vertical direction is provided on the rear side of each support 32, and the side surface of the rear side of these supports 32 is connected to the side surface of the front side of the support 62 by a hinge 63. Moreover, the axis 64 constituting the hinge 63 is along the longitudinal direction, more specifically, along the vertical direction. Therefore, the support 62 can rotate around the axis 64, and the support 62 can be arranged in a position ( Figure 17 Position) and other positions ( Figure 16 For ease of explanation, the following description assumes that the support 62 is in the aforementioned single position, unless otherwise specified. This single position is where the lateral width of the carriage 6 is the second length, the extension platform 61 is in the second position, and the hinge 63 is closed. Furthermore, the left-right position of the shaft 64 is aligned with the side surfaces of the support pillars 32 and 62, located toward the left-right center.

[0088] Furthermore, a support 65 extending in the vertical direction is provided at a position away from the support 62 in the rear direction, and the supports 62 and 65 are connected to each other by an extension platform 61 and a beam 66 extending in the front and rear directions (see FIG. Figure 15 ). Moreover, the beam 66 connects the lower end of the support 62 and the lower end of the support 65, and a caster 67 is provided below it.

[0089] Next, the extension platform 61 will be described. The extension platforms 61 provided on the left and right sides are formed in a mirror-symmetrical manner with respect to the left and right centers of the vehicle 6A. Figure 17As shown, the extension platform 61 is formed into a rectangular plate with its long side extending in the front-to-back direction when viewed from above. Its front and rear ends are fixed to support posts 62 and 65, respectively. Therefore, the support platform 61 at the second position extends from the shaft 64, which serves as the rotation axis, through the support post 62, toward the side opposite to the support platform 4B, which serves as the first support portion. Furthermore, the extension platform 61 is arranged so as to extend from the support posts 62 and 65 toward the left-right center. The left-right center edge of the extension platform 61 is aligned with the left-right center edge of the support platform 4B arranged in front of the extension platform 61.

[0090] On the upper surface of the extension platform 61, a position limiting portion 57, identical in structure to that provided on the support platform 4B, is provided, extending in the front-to-back direction, at the portion extending from the support pillars 62 and 65 as described above. The left-right position of this position limiting portion 57 is identical to the left-right position of the position limiting portion 57 of the support platform 4B arranged in front of the extension platform 61. Furthermore, a plurality of balls 49 are arranged in the front-to-back direction on the upper surface of the extension platform 61, closer to the left-right center than the position of the position limiting portion 57. The left-right position of these balls 49 is identical to the left-right position of the balls 49 of the support platform 4B arranged in front of the extension platform 61. Furthermore, a stopper 58 is detachably provided behind each ball 49 in the extension platform 61.

[0091] Furthermore, a connecting member 71 is provided on the left and right outer sides of the longitudinal center of each of the support 32 and the support 62 (see FIG. Figure 15 ). The connecting member 71 is formed to extend from the side of the support 32 and the side of the support 62 to the rear and the front respectively. Figure 17 As shown, through-holes 72 are bored vertically through these connecting members 71, and the through-holes 72 overlap one another. Pins 56 are inserted through these through-holes 72. This secures the pillars 32 and 62 to one another, and the front-to-back length of the carriage 6 is fixed at a second length. By removing the pins 56 from the connecting members 71, the pillars 62 can be rotated, allowing the front-to-back length of the carriage 6 to be changed.

[0092] In addition, on the left and right outer sides of the center portion of the length direction of each support 65, there is provided a connecting component 73 extending from the side portion of the support 65 toward the rear, and a through hole 74 is provided in the vertical direction on the connecting component 73. When the front and rear length of the trolley 6 is set to a relatively short first length, each support 65 is rotated so as to approach the left and right center of the trolley 6, and is arranged in a left and right state. The position of the extension platform 61 in this state is the first position. In this first position, when viewed from above, the long sides of the extension platform 61 are aligned in the left and right directions, and the short sides are aligned in the front and back directions. Therefore, the extension platform 61 is in a state of extending from the shaft 64 serving as the rotation axis via the support 62 to the left and right center sides of the trolley 6 (refer to Figure 16 ).

[0093] In this manner, the extension platform 61 rotates so that its orientation changes by 90° between when the carriage 6 is at the first length and when it is at the second length. Furthermore, as described above, when the carriage 6 is at the first length and the struts 65 are aligned horizontally, the through-holes 74 of the connecting members 73 overlap vertically. By inserting the pins 56 through these through-holes, the struts 65 are fixed to each other, and the carriage 6 is fixed at the first length.

[0094] Next, when repairing the front part 23 of the tester 2, the process of using the trolley 6 to support the tester 2 will be described, focusing on the differences from the steps when using the trolley 3 to support the tester 2. First, the trolley 6 is used to support the tester 2. Figure 16 The first length shown is fixed, and the stopper 58 is set on the support platform 4B. After the operator moves the trolley 6 to the rear of the unit 13, he fixes the wheel of the caster 34 with the stopper 35 of the caster 34 below the support 31 in the same way as when working with the trolley 3. Then, the operator removes the pin 56 inserted into the connecting member 73, as shown in FIG. Figure 16 As shown by the middle arrow, the support columns 65 are rotated to separate from each other to change the orientation of the extension platform 61 so that the longitudinal direction of the extension platform 61 coincides with the front-rear direction, thereby setting the lateral width of the carriage 6 to the second length.

[0095] Then, the operator rotates the support 65 to insert the removed pin 56 into the overlapping connecting parts 71. After fixing the direction of the extension table 61, the operator removes the stopper 58 from the support table 4 and replaces it with the extension table 61. Then, the operator removes the tester 2 from the unit 13 to the rear, so that the protrusion 22 rests on the balls 49 of the support table 4 and the extension table 61. After removing the tester 2 until the protrusion 22 contacts the stopper 58, the operator secures the tester 2 to the trolley 6 using the locking mechanism 36. Figure 17 、 Figure 193 and 4 show the tester 2 and the protrusion 22 of the tester 2 in the state where the removal is completed.

[0096] When repairing the component 24 on the rear side of the tester 2, the process is the same as when repairing the component 23, except that the pin 56 is not removed, the support 65 is not rotated, and the stopper 58 is not replaced, and the trolley 6 takes out the tester 2 at the first length. Figure 16 、 Figure 18 , respectively, show the tester 2 in a state where the trolley 6 has been removed while maintaining the first length, and the protruding strip 22 of the tester 2. Furthermore, when the removed tester 2 is returned to the unit 13, the reverse process of the removal process is performed in both cases of removing the trolley 6 to the first length and removing the trolley 6 to the second length.

[0097] Similar to the trolleys 3 and 3A, this trolley 6 can also be reduced in width, except when supporting the tester 2 for maintenance of the component 23. With this reduced width, sufficient space can be secured at the rear of the trolley 6. Furthermore, since this trolley 6 does not include the sliding portion 25, its structure is simple, further reducing manufacturing costs and making it preferable. However, in this trolley 6, the extension table 61 does not support the tester 2 when the trolley is set to the first length. Therefore, to minimize the trolley's width in the first length, it is preferable that the rear table 44 slides, as in the trolleys 3 and 3A, and also supports the tester 2 in the first length. Furthermore, in this trolley 6, the support 32 and the extension table 61 are connected via the support 62. However, a hinge 63 can also be arranged at the same height as the extension table 61, eliminating the support 62 and directly connecting the extension table 61 to the support 32 via the hinge 63. When the support column 62 is not provided as described above, the caster 67 provided on the beam 66 connecting the support column 62 and the support column 65 may be provided at the lower end of the support column 65 , for example.

[0098] (Fourth embodiment)

[0099] Refer to the top view Figure 20 、 Figure 21 and a schematic side view of the support platform 4C and the extension platform 61 constituting the trolley 6A. Figure 22 、 Figure 23 The following describes a trolley 6A according to the fourth embodiment, focusing on differences from the trolley 6. Similarly to the trolley 6, the lateral width of the trolley 6A is changed between a first length and a second length by rotating the extension table 61. Figure 20 、 Figure 22 Indicates the state of the first length, Figure 21 、 Figure 23However, as will be described in detail later, in the carriage 6A, the path along which the extension table 61 rotates when the length of the carriage 6A is changed is different from that of the carriage 3 .

[0100] First, the state in which the trolley 6A is at the second length and the extension platform 61 is at the second position will be described. Figure 21 As shown, the trolley 6A includes a support platform 4C in place of the support platform 4B. This support platform 4C has a substantially identical structure to the support platform 4B of the trolley 6, but differs from the support platform 4B in that a notch is provided at the rear portion on the left and right sides. If this notch 76 is designated as a rectangular shape when viewed from above, it is elongated from front to back. Therefore, by forming this notch 76, the support platform 4C protrudes rearward from the center in the left and right directions, and this protrusion is designated as 77. The support column 32 is arranged so as to extend through the left and right sides of the rear end of this protrusion 77, thereby supporting the support platform 4C.

[0101] The extension platform 61 provided on the carriage 6A has a relatively small width in the left-right direction and is arranged so as to extend rearward from the aforementioned protrusion 77. The carriage 6A is not provided with a support column 62. Instead, the front end of the extension platform 61 is connected to the rear side surface of the support column 32 via a hinge 63. When the carriage 6A is at its second length, the hinge 63 is closed, and the left and right positions of the axis 64 of the hinge 63 are aligned with the left-right outer side surfaces of the support column 32 and the extension platform 61. Similar to the carriage 6, the rear end of the extension platform 61 extends through and is supported by a support column 65.

[0102] By configuring as described above, the extension platform 61 can rotate about the shaft 64 so as to pass through a position on the left and right outside of the protrusion 77. Next, the state in which the trolley 6A is at the first length, that is, the state in which the extension platform 61 is at the first position when viewed, will be described. The orientation of the extension platform 61 when the trolley 6A is at the first length differs by 180 degrees from the orientation of the extension platform 61 when the trolley 6A is at the second length, as shown in FIG. Figure 20 As shown, the extension platform 61 and the support column 65 are positioned so as to be accommodated within the notch 73 when viewed from above. Specifically, the extension platform 61 extends from the shaft 64, which serves as the rotation axis, toward the side where the support platform 4C (first support portion) is located in the front-to-back direction. Furthermore, the extension platform 61, the support column 65, and the support platform 4C, when accommodated within the notch 73, form a rectangular shape when viewed from above.

[0103] The connecting members 71 and 73 described in the description of the trolley 6, which are inserted through the pins 56 to secure the trolley at the first and second lengths, can be placed at any position so that the extension table 61 is secured to the support table 4C in the various positions described above. This trolley 6A is also operated using the same procedures as trolley 6. Since the lateral width can be changed, similar to the previously described trolleys, the space behind the tester 2 can be prevented from becoming permanently narrow when supporting it.

[0104] Furthermore, when the trolley 6A is at its first length, the extension platform 61 is accommodated in the notch 73 of the support platform 4C, as described above, resulting in a state in which the support platform 4C and the extension platform 61 are aligned horizontally. This arrangement of the platforms is preferred because the lateral width of the trolley 6A at its first length can be further reduced. However, with this configuration, the extension platform 61 moves outward in the horizontal direction of the support platform 4C when the lateral width of the trolley 6A is changed, requiring a relatively large amount of space to the left and right of the trolley 6A. Therefore, from the perspective of reducing the space required for the trolley to the left and right, it is preferred that the area required for the extension platform 61 to rotate is limited to the rear of the support platform 4B, as in the case of the trolley 6 described above.

[0105] In the above-described embodiments, the rolling elements for supporting the protrusions 22 of the tester 2 are configured as balls 49. However, any other type of structure, such as rollers, may be used as long as the protrusions 22 can be moved by rolling. Furthermore, as long as the wear between the support platform 4 and the extension platform 61 and the protrusions 22 is relatively low, the tester 2 can be moved, and thus, a structure without rolling elements is also possible.

[0106] In the above-described embodiments, the support platform 4 is also provided with three layers in order to be able to individually remove and support the tester 2 from the units 13 stacked in three layers. However, the number of layers of the support platform 4 can be appropriately set according to the number of stacked units 13 and is not limited to three layers. Furthermore, the number of layers of the support platform 4 is not limited to multiple layers, and the carriage may be configured so as to include only one layer.

[0107] Furthermore, any component of the substrate processing apparatus supported by the carriage can be any component that can be moved laterally from the apparatus to support it. Therefore, the application of the carriage is not limited to the wafer inspection apparatus 1; it can be applied to any substrate processing apparatus that includes a component that can be moved laterally to adjust the amount of wafers removed from the apparatus. Furthermore, the position where the component is supported can be appropriately varied depending on the shape and structure of the component. For example, a configuration in which the carriage supports the component's left and right center portions is also possible. In other words, the carriage is not limited to a configuration having a pair of left and right support portions.

[0108] The embodiments disclosed herein are to be considered in all respects as illustrative and non-restrictive. The embodiments described above may be omitted, replaced, modified, or combined in various ways without departing from the scope of the appended claims and the spirit thereof.

Claims

1. A trolley for supporting components of a substrate processing apparatus outside the apparatus so as to be taken out of the apparatus by sliding in a lateral direction, characterized in that: include: a trolley body having wheels and being movable on the ground, and including a first support portion for supporting the components; and a second support portion connected to the trolley body so as to be movable between a first position in which the lateral width of the trolley is a first length and a second position in which the lateral width is a second length greater than the first length, and configured to support the component together with the first support portion at least in the second position; When the lateral direction in which the component is taken out is the rear direction, The first supporting portion and the second supporting portion are separately provided in the left-right direction to support the left and right sides of the component, respectively. The first supporting portion and the second supporting portion in each group are arranged in a front-to-back direction, and their relative positions in the front-to-back direction are changeable. A sliding portion is provided which is composed of a first sliding member and a second sliding member which can slide against each other. The first supporting portion and the second supporting portion are provided with the first sliding member and the second sliding member, respectively. The second support portion includes: an intermediate support portion provided on the side of the first support portion in the front-rear direction; and an end side support portion provided on the side opposite to the first support portion with respect to the intermediate support portion, The sliding part is provided with a plurality of The first supporting portion and the intermediate supporting portion are respectively provided with the first sliding component and the second sliding component in the sliding portion, and the relative positions of the first supporting portion and the intermediate supporting portion in the front-back direction are changeable. The first sliding member and the second sliding member of the other sliding portion are provided on the end side supporting portion and the intermediate supporting portion, respectively. The relative positions of the end side supporting portion and the intermediate supporting portion in the front-rear direction are changeable.

2. The trolley according to claim 1, wherein: A base portion is provided, the base portion being capable of changing its relative position in the front-rear direction with respect to the first support portion. The second support portion is provided so as to be movable in the left-right direction of the base portion. The second support portion at the first position is aligned with the first support portion in the left-right direction. The second support portion at the second position is aligned with the first support portion in the front-rear direction.

3. The trolley according to claim 1, wherein: The second supporting portion in each of the groups is rotatable around a rotation axis. The second support portion extends at the second position on the side opposite to the first support portion with respect to the rotation axis.

4. The trolley according to claim 3, wherein: The rotation axis is an axis along the longitudinal direction.

5. The trolley according to any one of claims 1 to 4, characterized in that: The first supporting portion and the second supporting portion are provided in multiple layers in the longitudinal direction.

6. The trolley according to claim 5, wherein: The second supporting portions in each layer are connected to each other via a connecting member so as to be able to change positions between the first position and the second position at a time.

7. The trolley according to claim 6, wherein: The connecting member is provided with wheels for moving in a rolling manner on the ground.

8. The trolley according to any one of claims 1 to 4, characterized in that: The first supporting portion and the second supporting portion are each provided with a rolling element that supports a supported portion of the component from below and rolls in association with movement of the supported portion.

9. The trolley according to claim 8, wherein: The rolling elements are arranged at intervals in the front-to-back direction. In each of the states where the second supporting portion is located at the first position and the second position, the maximum distance between adjacent rolling elements in the front-to-rear direction is less than the distance between the rear end of the supported portion and the center of gravity of the component in the front-to-rear direction.

10. A method for supporting components of a substrate processing device, characterized in that: include: a step of moving a trolley including a trolley body having wheels on the ground; The step of supporting the component of the substrate processing apparatus, which is taken out of the substrate processing apparatus by a first take-out amount in the lateral direction, on the first supporting portion provided on the trolley body, in a state where the second supporting portion connected to the trolley body is located at a first position and the lateral width of the trolley is a first length; a step of setting the position of the second support portion to a second position so that the lateral width of the carriage becomes a second length greater than the first length; and The step of supporting the component that is taken out of the substrate processing apparatus in the lateral direction by a second take-out amount greater than the first take-out amount by using the first supporting portion and the second supporting portion in a state in which the lateral width of the carriage is the second length, When the lateral direction in which the component is taken out is the rear direction, The first supporting portion and the second supporting portion are separately provided in the left-right direction to support the left and right sides of the component, respectively. The first supporting portion and the second supporting portion in each group are arranged in a front-to-back direction, and their relative positions in the front-to-back direction are changeable. A sliding portion is provided which is composed of a first sliding member and a second sliding member which can slide against each other. The first supporting portion and the second supporting portion are provided with the first sliding member and the second sliding member, respectively. The second support portion includes: an intermediate support portion provided on the side of the first support portion in the front-rear direction; and an end side support portion provided on the side opposite to the first support portion with respect to the intermediate support portion. The sliding part is provided with a plurality of The supporting method further comprises: The step of changing the relative position of the first supporting portion and the intermediate supporting portion in the front-rear direction by providing the first sliding member and the second sliding member of the sliding portion to the first supporting portion and the intermediate supporting portion respectively; and The step of changing the relative positions of the end side support portion and the intermediate support portion in the front-rear direction by providing the first sliding member and the second sliding member of the other sliding portion to the end side support portion and the intermediate support portion, respectively.

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