A locking mechanism for the lower furnace lid of a vertical crystal growth furnace

Abstract

The present invention discloses a locking mechanism for the lower furnace cover of a vertical crystal growth furnace, which relates to the technical field of locking mechanisms and includes a locking component and a driving system arranged on a frame. The locking component includes a linkage block, a mounting seat, a connecting rod seat, and a driving structure. The mounting seat is used to be connected to the frame or the furnace body. The driving structure is arranged at one end of the mounting seat, the connecting rod seat is arranged at the other end of the mounting seat, the linkage block is movably connected to the connecting rod seat, the driving structure is in transmission connection with the linkage block, and the driving system is in power connection with the driving structure. 1. The automatic locking of the lower furnace cover is realized through a simple mechanism, avoiding the tedious and time-consuming manual operation and the possible risks. 2. By designing and adding a redundant protection system in the driving system, the self-locking function of the furnace cover is realized in the case of missing driving force, power failure, pipeline breakage, and damage to the driving reversing valve.

Description

Technical Field

[0001] The present invention relates to the technical field of locking mechanisms, and particularly to a locking mechanism for the lower furnace cover of a vertical crystal growth furnace. Background Art

[0002] As an important third-generation semiconductor material, silicon carbide (SiC) is an ideal material for fabricating high-temperature, high-frequency, high-power, high-voltage, and radiation-resistant electronic devices, and has important application values in the fields of military, aerospace, solid-state lighting, and power electronics. Therefore, it has become one of the frontiers and high points of the global semiconductor material industry.

[0003] Physical Vapor Transport (PVT) is a commonly used method for growing silicon carbide crystals. In this method, a silicon carbide seed crystal is set on the cover or the top of a graphite crucible, and the graphite crucible is filled with silicon carbide powder as the growth raw material. By controlling the growth temperature, the growth raw material is decomposed into gas-phase components and then transported to the seed crystal under the drive of the axial temperature gradient inside the graphite crucible to grow silicon carbide crystals.

[0004] After the silicon carbide furnace finishes crystal growth, new raw materials need to be replaced and added for continuous crystal growth. Each time of loading requires opening the lower furnace cover. To seal the furnace cover and the furnace chamber, the threaded bolt connection method requires manual disassembly of the screws each time, which is time-consuming, laborious, and reduces efficiency, and may also cause accidents and injuries. Locking the furnace cover in the form of a rotating ring has a complex design and a high cost. Therefore, how to quickly and conveniently open and lock the furnace cover to improve production efficiency has become a problem to be solved. Summary of the Invention

[0005] To solve the above technical problems, the present invention provides a locking mechanism for the lower furnace cover of a vertical crystal growth furnace, which can quickly and conveniently open and lock the furnace cover to improve production efficiency.

[0006] To achieve the above object, the present invention provides the following solution:

[0007] The present invention provides a locking mechanism for the lower furnace cover of a vertical crystal growth furnace, including a locking assembly and a drive system disposed on a frame or a furnace body. The locking assembly includes a linkage block, a mounting seat, a connecting rod seat, and a drive structure. The mounting seat is used to connect with the frame or the furnace body. The drive structure is disposed at one end of the mounting seat. The connecting rod seat is disposed at the other end of the mounting seat. The linkage block is movably connected with the connecting rod seat. The drive structure is in transmission connection with the linkage block. The drive system is in power connection with the drive structure.

[0008] Optionally, the drive structure includes a cylinder or a hydraulic cylinder, and the cylinder or the hydraulic cylinder is disposed at one end of the mounting seat.

[0009] Optionally, the drive structure further includes a cylinder rod joint, one end of the cylinder rod joint is connected to the cylinder rod of the cylinder, and the other end of the cylinder rod joint is rotatably connected to one end of the linkage block.

[0010] Optionally, the drive system can be a drive pipeline system, including a main drive pipeline and a redundant protection pipeline. The main drive pipeline provides driving force for the rod chamber and the rodless chamber of the cylinder block respectively, and the redundant protection pipeline provides driving force for the rodless chamber of the cylinder block.

[0011] Optionally, the redundant protection pipeline includes a pilot-operated check valve. The pilot port of the pilot-operated check valve is connected to the rod chamber of the cylinder block, and the pilot-operated check valve is connected to the rodless chamber of the cylinder block.

[0012] Optionally, the main drive pipeline includes a drive reversing valve and a connecting pipeline; the redundant protection pipeline further includes a two-position three-way normally open reversing valve, a shuttle valve and a connecting pipeline; the drive reversing valve is a two-position five-way reversing valve. In the state where the furnace door is locked, the pressure supply port of the two-position three-way normally open reversing valve is connected to the first inlet of the shuttle valve, the pressure supply port of the two-position five-way reversing valve is connected to the second inlet of the shuttle valve, the outlet of the shuttle valve is connected to the pilot-operated check valve, and the rod chamber of the cylinder block is connected to the pressure discharge port of the two-position five-way reversing valve.

[0013] Optionally, the drive structure is an electric push rod.

[0014] Optionally, a long circular hole is provided through the side of the linkage block, and a second rotating shaft is arranged in the long circular hole. Both ends of the second rotating shaft are connected to the connecting rod seat.

[0015] Optionally, a shock-absorbing pressure block is arranged on one side of the linkage block facing the lower furnace cover.

[0016] Optionally, a plurality of the locking assemblies are evenly arranged on the frame along the periphery of the lower furnace cover.

[0017] The present invention has achieved the following technical effects compared with the prior art:

[0018] 1. The automatic locking of the lower furnace cover is realized through a simple mechanism, avoiding the cumbersome and time-consuming manual operation and possible risks.

[0019] 2. By designing and adding a redundant protection system in the drive system, the self-locking function of the furnace cover is realized in the case of lack of driving force, power failure, pipeline damage, and damage of the drive reversing valve. Description of the Drawings

[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the accompanying drawings required for use in the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can be obtained based on these drawings.

[0021] Figure 1 It is a schematic structural diagram of the lower furnace cover locking mechanism of the vertical crystal growth furnace of the present invention installed on the frame;

[0022] Figure 2 It is a schematic structural diagram of the usage state of the lower furnace cover locking mechanism of the vertical crystal growth furnace of the present invention installed on the frame;

[0023] Figure 3 It is a schematic structural diagram of the locking component in the lower furnace cover locking mechanism of the vertical crystal growth furnace of the present invention;

[0024] Figure 4 It is a schematic structural diagram of the drive system in the lower furnace cover locking mechanism of the vertical crystal growth furnace of the present invention;

[0025] Figure 5 It is a schematic structural diagram of the lower furnace cover locking mechanism of the vertical crystal growth furnace of the present invention installed on the furnace body;

[0026] Figure 6 It is a schematic structural diagram of the usage state of the lower furnace cover locking mechanism of the vertical crystal growth furnace of the present invention installed on the furnace body.

[0027] Explanation of reference numerals: 1, shuttle valve; 2, two-position three-way normally open reversing valve; 3, two-position five-way reversing valve;

[0028] 100, locking component; 200, lower furnace cover; 300, furnace body; 400, frame;

[0029] 101, cylinder; 102, mounting seat; 103, cylinder rod joint; 104, connecting rod seat; 105, linkage block; 106, first rotating shaft; 107, second rotating shaft; 108, pressing block; 109, quick connector; 110, pilot-operated check valve. Detailed implementation manners

[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0031] Such as Figures 1 to 4As shown in the figure, this embodiment provides a locking mechanism for the lower furnace cover of a vertical crystal growth furnace, which includes a locking assembly 100 and a driving pipeline system arranged on a frame 400. The locking assembly 100 includes a linkage block 105, a mounting seat 102, a connecting rod seat 104, and a driving structure. The mounting seat 102 is used to connect with the frame 400. The driving structure is arranged at one end of the mounting seat 102. The connecting rod seat 104 is arranged at the other end of the mounting seat 102. The linkage block 105 is movably connected with the connecting rod seat 104. The driving structure is in transmission connection with the linkage block 105. The driving pipeline system is in power connection with the driving structure.

[0032] In this specific embodiment, the mounting seat 102 is in a "Ji" - shaped structure. There are three groups of screw holes arranged at the open end of the mounting seat 102. Two of the groups of screw holes are used to connect with the frame 400, and the other group of screw holes is used to connect with the connecting rod seat 104.

[0033] The driving structure includes a cylinder 101. The end of the cylinder body of the cylinder 101 is fixed at the closed end of the mounting seat 102. The piston rod of the cylinder 101 passes through the closed end of the mounting seat 102 and is connected to one end of a piston rod joint 103 through a bolt.

[0034] The connecting rod seat 104 is in a "Pi" - shaped structure. The closed end of the connecting rod seat 104 is connected to a group of screw holes at the open end of the mounting seat 102 through screws. A second rotating shaft 107 is arranged at the open end of the connecting rod seat 104.

[0035] The linkage block 105 is a block - shaped body. A receiving groove is arranged at one end of the linkage block 105. The side wall of the receiving groove is connected to a first rotating shaft 106. The other end of the piston rod joint 103 is connected to the first rotating shaft 106. Through the first rotating shaft 106, the linkage block 105 and the piston rod joint 103 are rotatably connected. A long circular hole is arranged through the side wall of the linkage block 105. The second rotating shaft 107 passes through the long circular hole. Thus, when the piston rod of the cylinder extends, the movement track of the linkage block 105 is determined as a rotational movement that rotates upward to lock the lower furnace cover 200.

[0036] The driving pipeline system includes a main driving pipeline composed of a five-port two-position reversing valve 3 and connecting pipelines, and a redundant protection pipeline composed of a pilot-operated check valve 110, a three-port two-position normally open reversing valve 2, a shuttle valve 1 and connecting pipelines; the pilot port of the pilot-operated check valve 110 is communicated with the rod chamber of the cylinder 101, and in the state where the furnace door is locked, the air outlet of the pilot-operated check valve 110 is communicated with the rodless chamber of the cylinder 101; the air outlet of the three-port two-position normally open reversing valve 2 is communicated with the first inlet of the shuttle valve 1, the air outlet of the five-port two-position reversing valve 3 is communicated with the second inlet of the shuttle valve 1, the outlet of the shuttle valve 1 is communicated with the inlet of the pilot-operated check valve 110, and the rod chamber of the cylinder 101 is communicated with the exhaust port of the five-port two-position reversing valve 3. The redundant protection pipeline is communicated with the rodless chamber of the cylinder 101.

[0037] If the lower cover of the furnace body needs to be opened, it is necessary to supply air to the rod chamber of the cylinder and the pilot port of the pilot-operated check valve 110 while exhausting the gas on the rodless chamber side of the cylinder 101. At this time, it is necessary to supply power to the three-port two-position normally open reversing valve 2 and the five-port three-position reversing valve 3 at the same time. After power is supplied to the three-port two-position normally open reversing valve 2, it will no longer supply air to the rodless chamber side of the cylinder 101. After power is supplied to the five-port three-position reversing valve 3, it will supply air to the rod chamber of the cylinder and the pilot port of the pilot-operated check valve 110, and at the same time, the gas in the rodless chamber of the cylinder 101 can be discharged from the five-port three-position reversing valve. When the machine is powered off, the five-port two-position reversing valve 3 still supplies air to the rodless chamber of the cylinder 101, so the gas in the rodless chamber of the cylinder 101 cannot be discharged and the furnace cover cannot be opened. When the machine is out of gas or the pipeline is damaged, no gas enters the pilot port of the pilot-operated check valve 110. Since the rodless chamber of the cylinder 101 is communicated with the air outlet of the pilot-operated check valve 110, when no gas enters the pilot port of the pilot-operated check valve, the gas in the rodless chamber of the cylinder 101 cannot be discharged from the air outlet of the pilot-operated check valve 110 and the furnace cover cannot be opened. When the driving solenoid valve 3 is damaged, since the three-port two-position normally open reversing valve 2 can still supply air to the rodless chamber of the cylinder 101, the gas in the rodless chamber of the cylinder 101 cannot be discharged and the furnace cover cannot be opened. Therefore, in the states of power failure, gas cut-off, pipeline damage, and damage of the driving reversing valve of the machine, the gas inside the rodless chamber of the cylinder 101 cannot be discharged, the rod of the cylinder 101 will remain extended, and the lower furnace cover 200 will still remain locked.

[0038] A pressing block 108 is arranged on one side of the linkage block 105 facing the lower furnace cover 200. The pressing block 108 has a lower hardness, which avoids the noise and possible damage generated when the linkage block 105 directly collides with the lower furnace cover 200. The pressing block 108 is connected to the linkage block 105 by countersunk head screws, which is convenient for replacement after the pressing block 108 is worn.

[0039] Four of the locking assemblies 100 are evenly arranged along the upper edge of the frame 400 around the lower furnace cover 200. The cylinders 101 in the four locking assemblies 100 are connected in parallel through air pipes to enable a reversing valve to control multiple cylinders simultaneously.

[0040] In this embodiment, the locking assembly 100 is installed on the frame 400. In other specific embodiments, as Figure 5 and Figure 6 shown, the locking assembly 100 can also be directly installed on the furnace body 300.

[0041] In this embodiment, the drive system is a pneumatic system. In other embodiments, the drive system can also be a hydraulic system, and 101 can also be a hydraulic cylinder.

[0042] In this embodiment, a pipeline system is used to drive the cylinder 101 to move for locking the furnace cover. In other embodiments, 101 can also be directly selected as an electric push rod. Since the electric push rod is driven by electricity and has a power-off holding force, the furnace cover locking and power-off self-locking functions can be achieved without additionally increasing a drive system at this time.

[0043] It should be noted that for those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be encompassed by the present invention, and any reference signs in the claims should not be regarded as limiting the claims involved.

[0044] Specific examples are used in this specification to elaborate on the principles and implementation manners of the present invention. The description of the above embodiments is only used to help understand the method and its core idea of the present invention; at the same time, for those of ordinary skill in the art, there will be changes in the specific implementation manners and application scopes according to the idea of the present invention. In summary, the content of this specification should not be construed as a limitation to the present invention.

Claims

1. A locking mechanism for the lower furnace cover of a vertical crystal growth furnace, characterized in that, Comprising a locking assembly and a drive system provided on a frame or a furnace body, the locking assembly including a linkage block, a mounting seat, a connecting rod seat and a drive structure; the mounting seat is used for connecting with the frame or the furnace body, the drive structure is arranged at one end of the mounting seat, the connecting rod seat is arranged at the other end of the mounting seat, the linkage block is movably connected with the connecting rod seat, the drive structure is in transmission connection with the linkage block, and the drive system is in power connection with the drive structure; the drive system is a drive pipeline system, including a main drive pipeline and a redundant protection pipeline, the main drive pipeline provides driving force for the rod chamber and the rodless chamber of the cylinder body respectively, and the redundant protection pipeline provides driving force for the rodless chamber of the cylinder body; the redundant protection pipeline includes a pilot-operated check valve, the pilot port of the pilot-operated check valve is communicated with the rod chamber of the cylinder body, and the pilot-operated check valve is communicated with the rodless chamber of the cylinder body; the main drive pipeline includes a drive reversing valve and a connecting pipeline; the redundant protection pipeline further includes a two-position three-way normally open reversing valve, a shuttle valve and a connecting pipeline; the drive reversing valve is a two-position five-way reversing valve. In the state where the furnace door is locked, the pressure supply port of the two-position three-way normally open reversing valve is communicated with the first inlet of the shuttle valve, the pressure supply port of the two-position five-way reversing valve is communicated with the second inlet of the shuttle valve, the outlet of the shuttle valve is communicated with the pilot-operated check valve, and the rod chamber of the cylinder body is communicated with the pressure discharge port of the two-position five-way reversing valve; a long circular hole is provided through the side surface of the linkage block, and a second rotating shaft is arranged in the long circular hole, and both ends of the second rotating shaft are connected with the connecting rod seat.

2. The lower furnace cover locking mechanism of the vertical crystal growth furnace according to claim 1, characterized in that The drive structure includes a cylinder or a hydraulic cylinder, and the cylinder or the hydraulic cylinder is arranged at one end of the mounting seat.

3. The lower furnace cover locking mechanism of the vertical crystal growth furnace according to claim 2, characterized in that, The drive structure further includes a cylinder rod joint, one end of the cylinder rod joint is connected with the cylinder rod of the cylinder, and the other end of the cylinder rod joint is rotatably connected with one end of the linkage block.

4. The lower furnace cover locking mechanism of the vertical crystal growth furnace according to claim 1, characterized in that, The drive structure is an electric push rod.

5. The lower furnace cover locking mechanism of the vertical crystal growth furnace according to claim 1, characterized in that, A shock-absorbing pressing block is arranged on one side of the linkage block facing the lower furnace cover.

6. The lower furnace cover locking mechanism of the vertical crystal growth furnace according to claim 1, characterized in that A plurality of the locking assemblies are uniformly arranged on the frame along the periphery of the lower furnace cover.

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