Material Control System

Abstract

In the material control system provided by the present invention, the storage module stores the characteristic information of the machine tool and the raw materials, and the characteristic information includes the machine tool name, the raw material part number, the raw material batch number, the raw material expiration time, the raw material replacement time, the initial total amount after the raw material replacement, and the raw material usage amount corresponding to the machine tool parameters; the acquisition module obtains in real time the machine tool parameters used after the raw material replacement on the machine tool, the machine tool parameters correspond to the raw material, and obtains the quantity of goods passing through corresponding to the machine tool parameters; the calculation module calculates the consumption amount of the raw material on the machine tool according to the quantity of goods passing through and the raw material usage amount corresponding to the machine tool parameters, and calculates the difference between the initial total amount after the raw material replacement and the consumption amount to obtain the remaining amount of the raw material on the machine tool, so as to facilitate the evaluation of the expiration risk of the raw material on the machine tool, and further enable the user to have enough time to implement adjustment decisions to avoid the expiration of the raw material on the machine tool, which helps to reduce cost losses.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing technology, and particularly to a material control system. Background Art

[0002] Chip production has extremely high requirements for raw materials. Metal ions, particulate matter, chemical properties, etc. in the raw materials are all limited within a very small fluctuation range. Due to the relatively active chemical properties of some raw materials themselves, over time, their properties are prone to change, resulting in their inability to meet the chip production requirements, that is, some raw materials are prone to expiration. Moreover, the arrival validity period of some raw materials at the factory is very short. For example, photoresist generally has an arrival validity period of only 2 to 6 months. Currently, chip production factories (Fabs) will have a special material management department to control the procurement of raw materials within the factory.

[0003] However, the control of the expiration date of raw materials on the machine is still a blind spot at present. Due to the large number of machines and the unbalanced types and quantities of goods passing through the machines (Run goods), there is often a situation where one type of raw material on the machine is continuously consumed while another type of raw material remains unused for a long time. When receiving the message that the raw materials on the machine are about to expire, there is often not enough time to adjust the combination of goods passing through the machine to consume the raw materials that are about to expire; if the expired raw materials are continued to be used, product quality problems are likely to occur, but scrapping the expired raw materials will cause cost losses. Therefore, how to monitor the raw materials on the machine urgently needs to be solved. Summary of the Invention

[0004] One of the objectives of the present invention is to provide a material control system that can monitor the remaining amount of raw materials on the machine in real time, so as to evaluate the expiration risk of the raw materials on the machine, and enable the user to have enough time to implement adjustment decisions to avoid the expiration of the raw materials on the machine, which helps to reduce cost losses.

[0005] To achieve the above objective, the present invention provides a material control system. The material control system includes:

[0006] A storage module for storing the characteristic information of the machine and the raw materials, where the characteristic information includes the machine name, raw material part number, raw material batch number, raw material expiration time, raw material replacement time, initial total amount after raw material replacement, and the raw material usage amount corresponding to the machine parameters;

[0007] An acquisition module for acquiring in real time the machine parameters used by the machine after replacing the raw materials, where the machine parameters correspond to the raw materials, and acquiring the quantity of goods passing through corresponding to the machine parameters; and

[0008] A calculation module, configured to calculate the consumption amount of the raw material on the machine according to the quantity of goods passing through and the usage amount of the raw material corresponding to the machine parameters, and calculate the difference between the initial total amount of the raw material after replacement and the consumption amount to obtain the remaining amount of the raw material on the machine.

[0009] Optionally, the obtaining module obtains the quantity of goods passing through corresponding to the raw material on the machine between two raw material replacement times; the calculation module calculates the actual total usage amount of the raw material on the machine between two raw material replacement times, and calculates the unit usage amount m1 of the raw material on the machine, where m1 = M1 / n1, M1 is the actual total usage amount of the raw material between two raw material replacement times, and n1 is the quantity of goods passing through corresponding to the raw material between two raw material replacement times.

[0010] Optionally, the actual total usage amount M1 of the raw material on the machine between two raw material replacement times = A*x1, where A is the initial total amount of the raw material after replacement, and x1 is the number of replacements of the raw material within two raw material replacement times.

[0011] Optionally, the material control system is used to monitor multiple raw materials on multiple machines; the material control system uses a data statistical analysis system to monitor the unit usage amounts of the same raw material on multiple machines to find abnormal machines with outlier unit usage amounts of the raw material and issue an alarm.

[0012] Optionally, the initial value of the usage amount of the raw material corresponding to the machine parameters is set by engineering personnel; after the set number of raw material replacements on the machine, the material control system replaces the initial value of the usage amount of the raw material corresponding to the machine parameters with the unit usage amount of the raw material.

[0013] Optionally, the calculation module calculates the average daily usage amount of the raw material on the machine, and calculates the sustainable time t of the raw material on the machine, where t = M2 / m2, M2 is the remaining amount of the raw material on the machine, and m2 is the average daily usage amount of the raw material on the machine;

[0014] The material control system further includes an early warning module, and the early warning module judges the expiration risk of the raw material on the machine according to the expiration time of the raw material and the sustainable time of the raw material.

[0015] Optionally, when T0 + t ≤ T1, the warning module determines that there is no risk of expiration of the raw material on the machine, where T0 is the time the raw material has been stored, t is the sustainable time of the raw material, and T1 is the expiration time of the raw material; when T0 + t > T1, the warning module determines that there is a risk of expiration of the raw material on the machine, and the warning module issues an expiration alarm.

[0016] Optionally, the average daily consumption m2 of the raw material on the machine is m2 = M1 / T2, where M1 is the total actual consumption of the raw material between two raw material replacement times, T2 is the time difference between two raw material replacement times, and the unit of T2 is days.

[0017] Optionally, when the raw material is out of the warehouse, the warehouse personnel set a material identification code on the package of the raw material. The material identification code carries some of the characteristic information, and some of the characteristic information includes the raw material part number, the raw material batch number, the raw material expiration time, and the initial total amount after the raw material is replaced; the replacement personnel use a handheld device to log in to the material control system, scan the machine identification code of the machine with the handheld device to enter the machine name, and use the handheld device to scan the material identification code to enter some of the characteristic information. After scanning the machine identification code and the material identification code, the material control system immediately captures the time on the handheld device as the raw material replacement time.

[0018] Optionally, the acquisition module obtains the machine parameters used by the machine after replacing the raw material and the corresponding goods passing quantity at intervals of a set time.

[0019] Optionally, the acquisition module obtains information from the MES database.

[0020] Optionally, the raw materials include photoresist, anti-reflection coating, wet process chemical solution, target material, and / or special gas.

[0021] The material control system of the present invention includes a storage module, an acquisition module, and a calculation module; the storage module is used to store the characteristic information of the machine tools and raw materials, and the characteristic information includes the machine tool name, raw material part number, raw material batch number, raw material expiration time, raw material replacement time, the initial total amount after the raw material replacement, and the raw material usage amount corresponding to the machine tool parameters; the acquisition module is used to obtain in real time the machine tool parameters used after the raw material replacement on the machine tool, the machine tool parameters corresponding to the raw material, and obtain the quantity of goods passing through corresponding to the machine tool parameters; the calculation module is used to calculate the consumption amount of the raw material on the machine tool according to the quantity of goods passing through and the raw material usage amount corresponding to the machine tool parameters, and find the difference between the initial total amount after the raw material replacement and the consumption amount to obtain the remaining amount of the raw material on the machine tool. That is to say, the material control system of the present invention can monitor in real time the remaining amount of raw materials on the machine tool, so as to facilitate the assessment of the expiration risk of the raw materials on the machine tool, and further enable the user to have enough time to implement adjustment decisions to avoid the expiration of the raw materials on the machine tool, which helps to reduce cost losses; moreover, it is conducive to the material management personnel to accurately master the remaining amount of raw materials in the factory and facilitate the material management personnel to make reasonable purchases.

[0022] Furthermore, the material control system can calculate the unit usage amount of the raw material on the machine tool to monitor the unit usage amount of the raw material on the machine tool, and further can timely detect the abnormal situation of the unit usage amount of the raw material on the machine tool, which helps to avoid yield losses.

[0023] Furthermore, the material control system can monitor multiple types of raw materials on multiple machine tools; the material control system uses a data statistical analysis system to monitor the unit usage amounts of the same raw material on multiple machine tools to find out the abnormal machine tools with outlier values of the unit usage amount of the raw material and give an alarm, which helps to find abnormal machine tools among many machine tools, and further can avoid yield losses.

[0024] Furthermore, the material control system can calculate the sustainable time t of the raw material on the machine tool, and the warning module of the material control system judges the expiration risk of the raw material on the machine tool according to the raw material expiration time and the sustainable time of the raw material, so as to realize the real-time and automatic monitoring of the expiration risk of the raw material on the machine tool, and the monitoring accuracy is relatively high, which can effectively avoid the expiration of the raw material on the machine tool and can avoid human errors in personnel monitoring. Description of the Drawings

[0025] Figure 1 It is a test result diagram of the photosensitivity of a photoresist.

[0026] Figure 2 It is a change curve of the number of particulate impurities in a photoresist.

[0027] Figure 3Statistics of the usage of photoresist A and photoresist B in multiple coating and developing machines within half a year.

[0028] Figure 4 Schematic diagram of the structure of the material control system according to an embodiment of the present invention.

[0029] Figure 5 Schematic diagram of the principle of the material control system according to an embodiment of the present invention.

[0030] Figure 6 Unit usage control chart of the same raw material for multiple machines in an embodiment of the present invention.

[0031] Reference numerals:

[0032] 10 - Storage module; 20 - Acquisition module; 30 - Calculation module; 40 - Warning module. Detailed implementation manners

[0033] Figure 1 It is a test result graph of the photosensitivity of a photoresist. Among them, Figure 1 the abscissa is the storage time of the photoresist, and the ordinate is the critical dimension offset (CD Bias) of the product obtained by using the photoresist for production testing. The inventor's research found that as Figure 1 shown, when stored at a low temperature of 7°C for six months, the fluctuation of the critical dimension offset of the product is not large, that is, the photoresist can maintain stable photosensitivity; however, when stored at room temperature of 23°C (i.e., on the machine), the fluctuation of the critical dimension offset of the product is large, that is, the photosensitivity of the photoresist changes sharply over time, which will affect the stability of the critical dimensions of the product.

[0034] Figure 2 It is a change curve of the number of particulate impurities in a photoresist. Among them, Figure 2 the abscissa is the storage time of the photoresist, and the ordinate is the number of particulate impurities, and the size of the particulate impurities counted is above 0.2 microns. As Figure 2 shown, under the storage conditions of low temperature of 7°C or room temperature of 23°C, as time goes by, the number of particulate impurities contained in the photoresist increases rapidly, and the increase in particulate impurities will affect the performance of the photoresist.

[0035] The inventor also found that in actual production, it is very difficult for the machine to consume different raw materials evenly, and there are many factors for this situation, such as production efficiency considerations or quality considerations. Figure 3 Statistics of the usage of photoresist A and photoresist B in multiple coating and developing machines within half a year. From Figure 3It can be seen that although the overall consumption of photoresist A and photoresist B on each machine tool is huge, there is still a risk of photoresist expiration on individual machine tools. For example, there is a risk of expiration for photoresist A on coater / developer 01, photoresist A on coater / developer 02, photoresist B on coater / developer 08, photoresist B on coater / developer 09, and photoresist B on coater / developer 11.

[0036] That is to say, the existing material control method still has deficiencies, and there is still a risk of expiration for the raw materials on the machine tools.

[0037] In order to monitor the remaining amount of raw materials on the machine tool in real time, so as to evaluate the expiration risk of the raw materials on the machine tool, and enable the user to have enough time to implement adjustment decisions to avoid the expiration of the raw materials on the machine tool and reduce cost losses, this embodiment provides a material control system.

[0038] The material control system proposed by the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. According to the following description, the advantages and features of the present invention will be clearer. It should be noted that the drawings are all in a very simplified form and use non-precise scales, only for the purpose of conveniently and clearly assisting in explaining the purpose of the embodiments of the present invention.

[0039] Figure 4 It is a schematic structural diagram of a material control system according to an embodiment of the present invention. Figure 5 It is a schematic diagram of the principle of a material control system according to an embodiment of the present invention. Refer to Figure 4 and Figure 5 The material control system includes a storage module 10, an acquisition module 20, and a calculation module 30. The storage module 10 is used to store the characteristic information of the machine tool and the raw materials. The characteristic information includes the machine tool name, the raw material part number, the raw material batch number, the raw material expiration time, the raw material replacement time, the initial total amount after the raw material replacement, and the raw material usage amount corresponding to the machine tool parameters. The acquisition module 20 is used to obtain in real time the machine tool parameters used by the machine tool after replacing the raw materials. The machine tool parameters correspond to the raw materials, and obtain the quantity of goods passing through corresponding to the machine tool parameters. The calculation module 30 is used to calculate the consumption amount of the raw materials on the machine tool according to the quantity of goods passing through and the raw material usage amount corresponding to the machine tool parameters, and calculate the difference between the initial total amount after the raw material replacement and the consumption amount to obtain the remaining amount of the raw materials on the machine tool.

[0040] The raw materials controlled by the material control system may include organic materials, wet process chemicals, target materials, and / or special gases. Organic materials may include photoresists and / or anti-reflection coating materials.

[0041] The characteristic information in the storage module 10 may also include machine tool parameters and raw material names. Refer to Figure 5, in this embodiment, when the raw materials are out of the warehouse, the warehouse personnel can set a material identification code on the package of the raw materials. The material identification code carries part of the characteristic information, and part of the characteristic information includes the raw material name, raw material part number, raw material batch number, raw material expiration time, and the initial total amount after the raw material is replaced. Taking photoresist as an example, the material identification code can be printed on paper and pasted outside the photoresist bottle. A machine identification code can be set on each machine.

[0042] The replacement personnel can use a handheld device to log in to the material control system, and then use the handheld device to scan the machine identification code of the machine to enter the machine name into the material control system, and use the handheld device to scan the material identification code to enter part of the characteristic information. After scanning the machine identification code and the material identification code, the material control system can immediately capture the time on the handheld device as the raw material replacement time. The handheld device can be a PDA (Personal Digital Assistant) device. However, it is not limited to this, and the handheld device can also be other devices with a scanning function and can be network-connected to the material control system.

[0043] In the initial stage of using the material control system, the amount of raw materials used corresponding to the machine parameters in the characteristic information is set by the engineering personnel, that is, the initial value of the amount of raw materials used corresponding to the machine parameters is set by the engineering personnel. In one embodiment, after the material control system is used for a period of time, the engineering personnel can regularly update the machine parameters to ensure the accuracy of the remaining amount of raw materials calculated by the material control system and improve the control accuracy of the material control system. However, it is not limited to this, and the amount of raw materials used corresponding to the machine parameters can be updated by other means.

[0044] In this embodiment, most of the content of the characteristic information is scanned and entered through a handheld device, which can reduce the human error of personnel entry and reduce the workload of the replacement personnel.

[0045] When the goods are transferred on the machine are completed each time, the machine parameters, the quantity of goods transferred, and the time of goods transfer used for the goods transfer can be uploaded to the DataBase. The DataBase can be a MES database. The machine parameters in the characteristic information can be entered by the engineering personnel or retrieved from the MES database.

[0046] The material control system can control multiple types of raw materials for multiple machines. Among the characteristic information stored in the storage module 10, one type of raw material has a corresponding raw material name, raw material part number, raw material batch number, and raw material expiration time. Multiple types of raw materials can be stored on one machine, and various raw materials on the machine have corresponding raw material replacement times and the initial total amount after the raw material is replaced.

[0047] For ease of explanation, the following takes the material control system's control of a certain raw material on a certain machine as an example; when the material control system controls multiple raw materials on multiple machines, it can be understood as a repeated operation of the material control system's control of a certain raw material on a certain machine.

[0048] The obtaining module 20 is used to obtain in real time the machine parameters used by the machine after replacing the raw material. The machine parameters correspond to the raw material on the machine, and obtain the quantity of goods passing through corresponding to the machine parameters. See Figure 5 , the obtaining module 20 can query the MES database to capture the machine parameters used by the machine after replacing the raw material and the quantity of goods passing through corresponding to the machine parameters from the MES database. It should be noted that when the machine is in production, consuming the raw material on the machine when calling a machine parameter for production, so there is a corresponding relationship between the machine parameters and the raw material.

[0049] In this embodiment, the obtaining module 20 can obtain the machine parameters used by the machine after replacing the raw material and the quantity of goods passing through corresponding to the machine parameters at intervals of a set time. The set interval time can be 30 minutes, 1 hour, 2 hours, etc., and is not limited here. More specifically, the set time for the obtaining module 20 to perform the obtaining action interval can be set according to the goods passing frequency of the machine.

[0050] The calculation module 30 is used to calculate the consumption of the raw material on the machine according to the quantity of goods passing through corresponding to the machine parameters used by the machine after replacing the raw material and the consumption of the raw material corresponding to the machine parameters, and subtract the consumption of the raw material from the initial total amount after the raw material replacement to obtain the remaining amount of the raw material on the machine.

[0051] For example, for a certain raw material, the remaining amount M2 of the raw material on the machine = A - X * Y, where M2 is the remaining amount of the raw material on the machine, A is the initial total amount after the raw material replacement (taking photoresist as an example, A is the total amount of a bottle of photoresist before use), X is the consumption of the raw material corresponding to the machine parameter using the raw material, and Y is the quantity of goods passing through corresponding to the machine parameter after the machine replaces the raw material.

[0052] It should be noted that when only one machine parameter on the machine uses this raw material, X is the usage amount of the raw material corresponding to this machine parameter, and Y is the quantity of goods passing through corresponding to this machine parameter. When both the first machine parameter and the second machine parameter use this raw material, the remaining amount M2 of this raw material on the machine = A - X * Y. X can be the average value of the usage amount of the raw material corresponding to the first machine parameter and the usage amount of the raw material corresponding to the second machine parameter, and Y can be the total quantity of goods passing through when using the first machine parameter and the total quantity of goods passing through when using the second machine parameter after the machine replaces the raw material; or, the remaining amount M2 of this raw material on the machine = A - X1 * Y1 - X2 * Y2. At this time, X1 is the usage amount of the raw material corresponding to the first machine parameter, X2 is the usage amount of the raw material corresponding to the second machine parameter, Y1 is the quantity of goods passing through corresponding to the first machine parameter after the machine replaces the raw material, and Y2 is the quantity of goods passing through corresponding to the second machine parameter after the machine replaces the raw material. When more than three machine parameters use this raw material, the calculation method of the remaining amount of the raw material can be deduced by analogy.

[0053] In this embodiment, the material control system can calculate the unit usage amount of the raw material on the machine to monitor the unit usage amount of the raw material on the machine, and then can timely detect abnormal situations in the unit usage amount of the raw material on the machine, which helps to avoid the loss of product yield caused by abnormal unit usage amount of the raw material on the machine and improve the production yield.

[0054] Specifically, the obtaining module 20 can obtain the quantity of goods passing through corresponding to this raw material during the period between two raw material replacement times of the machine; the calculation module 30 can calculate the actual total usage amount of this raw material during the period between two raw material replacement times of the machine, and further calculate the unit usage amount m1 of this raw material on the machine (taking photoresist as an example, m1 is the amount of photoresist consumed by the machine to produce one wafer), m1 = M1 / n1, where M1 is the actual total usage amount of this raw material during the period between two raw material replacement times, and n1 is the quantity of goods passing through corresponding to this raw material during the period between two raw material replacement times. Among them, when the obtaining module 20 obtains the quantity of goods passing through corresponding to this raw material during the period between two raw material replacement times of the machine, it can first use the correspondence between the machine parameter and the raw material to obtain the quantity of goods passing through corresponding to the machine parameter associated (corresponding) with the raw material to be controlled, and the sum of the quantity of goods passing through corresponding to the associated machine parameters is the quantity of goods passing through corresponding to this raw material during the period between two raw material replacement times of the machine.

[0055] The actual total usage amount M1 of the raw material between two raw material replacement times can satisfy the formula M1 = A * x1, where A is the initial total amount after the raw material replacement, and x1 is the number of replacements of the raw material within two raw material replacement times. For the convenience of calculation, the unit usage amount of the raw material of the machine tool in one raw material replacement cycle can be calculated, that is, the unit usage amount of the raw material between two consecutive raw material replacement times of the machine tool. In this way, M1 can be equal to the initial total amount A after the raw material replacement.

[0056] It should be noted that when the material control system monitors multiple types of raw materials on multiple machine tools, refer to Figure 5 , the remaining amount and unit usage amount of each raw material of each machine tool can be calculated. Moreover, the material control system can transmit the remaining amount and unit usage amount of each raw material of each machine tool to the data statistical analysis system and monitor them using the data statistical analysis system.

[0057] For example, the data statistical analysis system monitors the remaining amount of each raw material of each machine tool. When the remaining amount of the raw material of the machine tool exceeds the set lower limit, the data statistical analysis system can issue an alarm, and the operator can replace the raw material on the machine tool in a timely manner. The data statistical analysis system can separately monitor the unit usage amount of each raw material of each machine tool. When the change condition of the unit usage amount value of the raw material on the machine tool violates the management rules of the data statistical analysis system, the data statistical analysis system can issue an alarm, and the operator can check the machine tool according to the alarm to timely detect the abnormality of the machine tool and reduce the yield loss caused by the machine tool abnormality.

[0058] The data statistical analysis system can also monitor the unit usage amount of the same raw material of multiple machine tools to find out the abnormal machine tools with abnormal unit usage amount values of the raw material, which helps to reduce the yield loss. Figure 6 This is the unit usage amount control chart of the same raw material of multiple machine tools in an embodiment of the present invention. As Figure 6 shown, the data statistical analysis system can summarize and statistically analyze the unit usage amount values of the same raw material of multiple machine tools in the same control chart. Through this control chart, the operator can directly observe whether there are machine tools with abnormal unit usage amounts of the raw material; further, the upper control limit and the lower control limit can also be set in the data statistical analysis system. When the unit usage amount of the raw material of any machine tool exceeds the upper control limit or the lower control limit, the data statistical analysis system can issue an alarm. The data statistical analysis system can be an SPC system. However, it is not limited thereto, and the data statistical analysis system can also be other data analysis systems.

[0059] In one embodiment, the initial value of the raw material usage corresponding to the machine parameters is set by engineering personnel. Since the initial value of the raw material usage corresponding to the machine parameters is set by engineering personnel based on their experience, and the unit usage of the raw material on the machine is calculated based on the actual total usage of the raw material and the actual quantity of the raw material passing through during the actual production process of the machine, the unit usage of the raw material is more accurate than the initial value of the raw material usage corresponding to the machine parameters. Therefore, after the set number of times of raw material replacement on the machine, the material control system can replace the initial value of the raw material usage corresponding to the machine parameters with the unit usage of the raw material on the machine, or in other words, replace the initial value of the raw material usage corresponding to the machine parameters with the unit usage of the raw material on the machine. In this way, the self-update of the raw material usage corresponding to the machine parameters can be achieved, and it helps to improve the control accuracy of the material control system.

[0060] In this embodiment, the material control system can also calculate the sustainable time t of the raw material on the machine. Specifically, the calculation module 30 calculates the average daily usage of the raw material on the machine and calculates the sustainable time t of the raw material on the machine, where t = M2 / m2, and M2 is the remaining quantity of the raw material on the machine, and m2 is the average daily usage of the raw material.

[0061] The average daily usage m2 of the raw material on the machine = M1 / T2, where M1 is the actual total usage of the raw material between two raw material replacement times, and T2 is the time difference between two raw material replacement times. The unit of T2 can be days. It should be noted that "two raw material replacement times" are two times in the raw material replacement history of the machine.

[0062] See Figure 4 and Figure 5 , the material control system may further include a warning module 40. The warning module 40 determines the expiration risk of the raw material on the machine according to the expiration time of the raw material and the sustainable time of the raw material. Specifically, T0 is the time the raw material has been stored, t is the sustainable time of the raw material, and T1 is the expiration time of the raw material. When T0 + t ≤ T1, the warning module 40 determines that there is no expiration risk for the raw material on the machine; when T0 + t > T1, the warning module 40 determines that there is an expiration risk for the raw material on the machine, and the warning module 40 issues an expiration alarm. In this way, the real-time and automatic monitoring of the expiration risk of the raw material on the machine can be achieved, and the monitoring accuracy is relatively high, which can effectively avoid the expiration of the raw material on the machine and avoid human errors in human monitoring.

[0063] The material control system of this embodiment includes a storage module 10, an acquisition module 20, and a calculation module 30; the storage module 10 is used to store the characteristic information of the machine tool and the raw materials, and the characteristic information includes the machine tool name, the raw material part number, the raw material batch number, the raw material expiration time, the raw material replacement time, the initial total amount after the raw material replacement, and the raw material usage amount corresponding to the machine tool parameters; the acquisition module 20 is used to acquire in real time the machine tool parameters used after the raw material replacement on the machine tool, the machine tool parameters corresponding to the raw materials, and obtain the quantity of goods passing through corresponding to the machine tool parameters; the calculation module 30 is used to calculate the consumption amount of the raw materials on the machine tool according to the quantity of goods passing through and the raw material usage amount corresponding to the machine tool parameters, and calculate the difference between the initial total amount after the raw material replacement and the consumption amount to obtain the remaining amount of the raw materials on the machine tool. That is to say, the material control system of this embodiment can monitor in real time the remaining amount of the raw materials on the machine tool, so as to facilitate the evaluation of the expiration risk of the raw materials on the machine tool, and further enable the user to have enough time to implement adjustment decisions to avoid the expiration of the raw materials on the machine tool, which helps to reduce cost losses; moreover, it is beneficial for the material management personnel to accurately master the remaining amount of the raw materials in the factory, and facilitate the material management personnel to make reasonable purchases.

[0064] It can be understood that the material control system of the present invention may include multiple computers, hardware, and devices interconnected through a communication unit such as a network, or include a single computer, hardware, or device that implements the process of the present invention. The computer may include a central processing unit (CPU), a memory, and input / output components, etc., and the input / output components are, for example, a keyboard, a mouse, a touch screen, a display, etc. The "module" or "unit" used herein generally refers to a component of the present invention, such as a logically separable software (computer program), hardware, or an equivalent component. For example, the storage module 10, the acquisition module 20, the calculation module 30, and the warning module 40 in the material control system may be combined and implemented in one module, or any one of the modules may be split into multiple modules, or at least part of the functions of one or more of these modules may be combined with at least part of the functions of other modules and implemented in one module. According to the embodiments of the present invention, at least one of each module is generally implemented in a manner of cooperating with hardware in the form of a software program. However, all (or a part of them) may also be implemented in the form of electronic hardware or a software program. Whether in the form of software or hardware, its individual parts can be implemented by those familiar with the fields of electronics and software. Therefore, the details are not described in this specification.

[0065] The above description is only a description of the preferred embodiments of the present invention and does not limit any scope of the rights of the present invention. Any person skilled in the art can make possible changes and modifications to the technical solution of the present invention by using the methods and technical contents disclosed above without departing from the spirit and scope of the present invention. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the technical solution of the present invention shall fall within the protection scope of the technical solution of the present invention.

Claims

1. A material control system, characterized in that, Comprising: A storage module for storing the characteristic information of the machine tool and the raw materials, where the characteristic information includes the machine tool name, raw material part number, raw material batch number, raw material expiration time, raw material replacement time, initial total amount after raw material replacement, and raw material usage amount corresponding to the machine tool parameters; An acquisition module for acquiring in real time the machine tool parameters used by the machine tool after replacing the raw materials, where the machine tool parameters correspond to the raw materials, and acquiring the quantity of goods passing through corresponding to the machine tool parameters; And A calculation module for calculating the consumption amount of the raw materials on the machine tool according to the quantity of goods passing through and the raw material usage amount corresponding to the machine tool parameters, and taking the difference between the initial total amount after raw material replacement and the consumption amount to obtain the remaining amount of the raw materials on the machine tool; The acquisition module acquires the quantity of goods passing through corresponding to the raw materials between two raw material replacement times of the machine tool, the calculation module calculates the actual total usage amount of the raw materials on the machine tool between two raw material replacement times, and calculates the unit usage amount m1 of the raw materials on the machine tool, m1 = M1 / n1, where M1 is the actual total usage amount of the raw materials between two raw material replacement times, and n1 is the quantity of goods passing through corresponding to the raw materials between two raw material replacement times; the initial value of the raw material usage amount corresponding to the machine tool parameters is set by engineering personnel; after the set number of raw material replacements of the machine tool, the material control system replaces the initial value of the raw material usage amount corresponding to the machine tool parameters with the unit usage amount of the raw materials; The material control system uses a data statistical analysis system to monitor the unit usage amounts of the same raw materials on multiple machine tools to find abnormal machine tools with outlier unit usage amounts of the raw materials and issue an alarm.

2. The material control system according to claim 1, characterized in that, The actual total usage amount M1 of the raw materials on the machine tool between two raw material replacement times = A * x1, where A is the initial total amount after raw material replacement, and x1 is the number of raw material replacements within two raw material replacement times.

3. The material control system according to claim 1, characterized in that, The material control system is used to monitor multiple types of raw materials on multiple machine tools.

4. The material control system according to claim 1, characterized in that, The calculation module calculates the average daily usage amount of the raw materials on the machine tool and calculates the sustainable time t of the raw materials on the machine tool, t = M2 / m2, where M2 is the remaining amount of the raw materials on the machine tool, and m2 is the average daily usage amount of the raw materials on the machine tool; The material control system further includes an early warning module, and the early warning module judges the expiration risk of the raw materials on the machine tool according to the raw material expiration time and the sustainable time of the raw materials.

5. The material control system according to claim 4, characterized in that, When T0 + t ≤ T1, the early warning module judges that there is no expiration risk for the raw materials on the machine tool, where T0 is the time the raw materials have been stored, t is the sustainable time of the raw materials, and T1 is the raw material expiration time; when T0 + t > T1, the early warning module judges that there is an expiration risk for the raw materials on the machine tool, and the early warning module issues an expiration alarm.

6. The material control system according to claim 4, characterized in that, The average daily consumption m2 of the raw materials on the machine platform is m2 = M1 / T2, where M1 is the total actual consumption of the raw materials between two raw material replacement times, and T2 is the time difference between two raw material replacement times, and the unit of T2 is days.

7. The material control system according to claim 1, characterized in that, When the raw materials are out of the warehouse, the warehouse personnel set a material identification code on the package of the raw materials. The material identification code carries some of the characteristic information, and some of the characteristic information includes the raw material part number, the raw material batch number, the expiration time of the raw materials, and the initial total amount after the raw materials are replaced. The replacement personnel use a handheld device to log in to the material control system, scan the machine identification code of the machine platform with the handheld device to enter the machine name, and scan the material identification code with the handheld device to enter some of the characteristic information. After scanning the machine identification code and the material identification code, the material control system immediately captures the time on the handheld device as the raw material replacement time.

8. The material control system according to claim 1, characterized in that, The acquisition module obtains the machine parameters used by the machine platform after replacing the raw materials and the corresponding goods passing quantity at intervals of a set time.

9. The material control system according to claim 1, characterized in that, The acquisition module obtains information from the MES database.

10. The material control system according to claim 1, characterized in that, The raw materials include photoresist, anti-reflection coating material, wet process liquid medicine, target material, and / or special gas.

Images