Anti-collision device and lithography equipment

Abstract

The present invention provides an anti-collision device and a lithography device, wherein the anti-collision device includes an anti-collision component and a control component. When an external force hits a buffer component in the anti-collision component, the buffer component pushes the piston component in the anti-collision component to move toward a pressure chamber located in a shell of the anti-collision component to compress the pressure chamber, and the pressure chamber generates a reaction force, thereby buffering the external force. At the same time, when the buffer component pushes the piston to move toward the pressure chamber, when the sensor installed on the buffer component and the sensor installed on the shell separate from each other or approach each other to a predetermined distance, the control component issues an instruction. In this way, when the anti-collision device is used to prevent the motion table from collision, it can not only buffer the force generated by the external force collision, but also control the movement of the motion table by issuing instructions through the control component, thereby avoiding the problem of damage to the motion table caused by secondary or multiple collisions caused by the continued movement of the motion table.

Description

Technical Field

[0001] The present invention relates to the technical field of photolithography, and in particular to an anti-collision device and photolithography equipment. Background Art

[0002] Photolithography is a very important process in semiconductor manufacturing. It is a process of transferring a series of patterns on a mask to the corresponding layer of the substrate in sequence through exposure. It is considered to be the core step in large-scale integrated circuit manufacturing. A series of complex and time-consuming photolithography processes in semiconductor manufacturing are mainly completed by corresponding photolithography equipment.

[0003] The lithography equipment includes multiple moving stages, such as a workpiece stage, a mask stage, etc., and the position of each moving stage needs to be adjusted during specific lithography. Inevitably, the moving stage of the lithography equipment may experience accidental collisions in various situations during operation. In order to protect the various precision components in the lithography equipment, especially the coarse and fine motion stages, from being damaged in collisions, it is essential to design a reliable and effective anti-collision device. At present, an anti-collision device is usually installed on the workpiece moving stage to prevent collisions, but when or after the collision occurs, the collision cannot be known to the technician, and the moving stage continues to move, which usually causes secondary or even multiple collisions, resulting in motor damage and derivative accidents caused thereby, such as the impact of motor burnout on the cleanliness of the lithography machine environment. Summary of the invention

[0004] The purpose of the present invention is to provide an anti-collision device and a lithography device to solve the problem that in the prior art lithography device, after the workpiece stage is impacted by the anti-collision device, a second or even multiple collisions may still occur, resulting in damage to the workpiece stage.

[0005] In order to solve the above technical problems, the present invention provides an anti-collision device, comprising:

[0006] An anti-collision assembly, the anti-collision assembly includes a hydraulic buffer and a buffer assembly, the hydraulic buffer includes a housing and a piston assembly, the housing has a first cavity, one end of the piston assembly extends into the first cavity to divide the first cavity into a pressure cavity and a hydraulic cavity with liquid, the other end of the piston assembly is connected to the buffer assembly, and is used for the buffer assembly to push the piston to move toward the pressure cavity to squeeze the pressure cavity when an external force hits the buffer assembly;

[0007] A control component, the control component includes a feeler installed on the buffer component and a sensor installed on the shell, the sensor and the feeler are used to separate from each other to a predetermined distance when the buffer component pushes the piston to move toward the pressure chamber to issue an instruction.

[0008] Optionally, the control assembly further includes a first fixing rod and a cross rod, wherein the first fixing rod is fixed to the buffer assembly, one end of the cross rod is fixed to the first fixing rod, and the other end extends toward the shell and is fixed with the sensor.

[0009] Optionally, the control component further includes a second fixing rod, one end of the second fixing rod is fixed to the shell, and the sensor is fixed to the other end of the second fixing rod.

[0010] Optionally, the buffer assembly includes a bracket and a buffer head, the bracket is fixed on an end of the piston assembly away from the shell, the sensor is mounted on the bracket, and the buffer head is mounted on a side of the bracket away from the shell.

[0011] Optionally, the bracket has a mounting groove, the buffer head is installed in the mounting groove and protrudes from the bracket, and the portion of the buffer head protruding from the bracket is used to be impacted by external force.

[0012] Optionally, the buffer assembly further includes a connecting pin, which passes through the mounting slot and the buffer head to install the buffer head in the mounting slot.

[0013] Optionally, the buffer assembly further includes a buckle ring, which is sleeved on a portion of the connecting pin protruding from the bracket and abuts against the bracket.

[0014] Optionally, the buffer head has a second cavity, and at least one reinforcement ring surrounding the second cavity is provided on the inner wall of the buffer head, and the reinforcement ring is used to enhance the force resistance of the buffer head.

[0015] Optionally, the reinforcement ring is arranged intermittently.

[0016] Optionally, there are multiple reinforcement rings, the multiple reinforcement rings are arranged at intervals, and the intervals between adjacent reinforcement rings are equal.

[0017] Optionally, the bracket includes a first bracket and a second bracket connected to each other, the sensor is mounted on the first bracket, the second bracket is fixed to an end of the piston assembly away from the housing, and the buffer head is mounted on the second bracket.

[0018] Optionally, there is a gap between the first bracket and the second bracket, and the bracket further includes an adjusting member, which spans the gap and is connected to the first bracket and the second bracket to adjust the width of the gap.

[0019] Optionally, the piston assembly includes a piston and a piston rod, and the hydraulic buffer also includes a limit block located in the first cavity, and the limit block is at least arranged around the piston rod to limit the piston assembly; and the piston assembly and the limit block divide the first cavity into a hydraulic chamber and a pressure chamber.

[0020] Optionally, the limit stopper is arranged around the inner wall of the shell, and a liquid outlet hole is provided on the limit stopper located between the hydraulic chamber and the pressure chamber.

[0021] Optionally, the hydraulic buffer also includes an elastic member, which is arranged on the piston assembly between the housing and the buffer assembly; and / or the hydraulic buffer also includes a buffer chamber located in the housing, which is arranged on a side of the pressure chamber away from the piston assembly, and the elastic member is arranged in the buffer chamber.

[0022] Optionally, the elastic member includes a spring.

[0023] Optionally, the hydraulic buffer further includes at least one seal, and the seal is at least arranged at the junction of the piston assembly and the housing to seal the first cavity.

[0024] To solve the above problems, the present invention also provides a lithography device, which includes a frame with a chamber, a moving table located in the chamber, and an anti-collision device as described above, wherein the anti-collision device is installed on the moving table or on the inner wall of the frame to cushion the moving table from external force impact.

[0025] Optionally, the number of the anti-collision devices is four, and the four anti-collision devices are installed at the four corners of the workpiece table, or the four anti-collision devices are grouped in pairs, and two groups of anti-collision devices are installed on two opposite inner walls of the frame.

[0026] The present invention provides an anti-collision device, which includes an anti-collision component and a control component. When an external force hits a buffer component in the anti-collision component, the buffer component pushes the piston component in the anti-collision component to move toward a pressure chamber located in a shell of the anti-collision component to compress the pressure chamber, and the pressure chamber generates a reaction force, thereby buffering the external force. At the same time, when the buffer component pushes the piston to move toward the pressure chamber, the sensor installed on the buffer component and the sensor installed on the shell separate from each other or approach each other to a predetermined distance, and the control component issues a command. In this way, when the anti-collision device is used to prevent the sports table from collision, it can not only buffer the force generated by the external force collision, but also avoid the problem of damage to the sports table caused by secondary or multiple collisions caused by the continued movement of the sports table. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic structural diagram of an anti-collision device according to an embodiment of the present invention.

[0028] Figure 2 It is a schematic structural diagram of a hydraulic buffer in an anti-collision device according to an embodiment of the present invention.

[0029] Figure 3 It is a schematic structural diagram of a buffer head in a buffer assembly in an anti-collision device according to an embodiment of the present invention.

[0030] Figure 4 1 is another schematic diagram of the structure of the buffer assembly in the anti-collision device according to an embodiment of the present invention.

[0031] Figure 5 It is a schematic diagram of the side structure of a lithography device according to an embodiment of the present invention.

[0032] Figure 6 It is a schematic diagram of the top view of the structure of a lithography device according to an embodiment of the present invention.

[0033] Figure 7 2 is another side view structural schematic diagram of a lithography device according to an embodiment of the present invention.

[0034] Figure 8 1 is another schematic top view of the structure of the lithography device according to an embodiment of the present invention.

[0035] Reference numerals

[0036] 1- Anti-collision components;

[0037] 11-Hydraulic buffer;

[0038] 111-housing; 112-piston assembly;

[0039] 1121-piston; 1122-piston rod;

[0040] 113-limit stopper; 114-seal;

[0041] 115-elastic member; 116-check valve;

[0042] 117-locking nut;

[0043] 11A-first cavity; 11B-buffer cavity;

[0044] 11A1-pressure chamber; 11A2-hydraulic chamber;

[0045] 11A3-liquid outlet;

[0046] 12- buffer assembly;

[0047] 121-Stand;

[0048] 122-buffer head; 1221-reinforcement ring;

[0049] 123-connecting pin; 124-retaining ring;

[0050] 125-second bracket; 126-first bracket;

[0051] 12A-gap; 122A-second cavity;

[0052] 125A-second screw hole; 125B-second adjustment hole;

[0053] 126A-first screw hole; 126B-first adjustment hole;

[0054] 13- coupling;

[0055] 2- Control components;

[0056] 21-tactile sensor; 22-second fixing rod;

[0057] 23- sensor; 24- crossbar;

[0058] 25- first fixing rod;

[0059] 10- Anti-collision device;

[0060] 20-Sports platform;

[0061] 30-Frame; 30A-Chamber. DETAILED DESCRIPTION

[0062] The anti-collision device and lithography equipment proposed in the present invention are further described in detail below in conjunction with the accompanying drawings and specific embodiments. According to the following description, the advantages and features of the present invention will become clearer. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis that each drawing needs to show is different, and sometimes different proportions are used.

[0063] Figure 1 It is a schematic structural diagram of an anti-collision device according to an embodiment of the present invention. Figure 2 FIG. 1 is a schematic diagram of the structure of a hydraulic buffer in an anti-collision device according to an embodiment of the present invention. Figure 1 and Figure 2 As shown, the anti-collision device 10 disclosed in this embodiment includes:

[0064] An anti-collision component 1, the anti-collision component 1 includes a hydraulic buffer 11 and a buffer component 12, the hydraulic buffer 11 includes a housing 111 and a piston component 112, the housing 111 has a first cavity 11A, one end of the piston component 112 extends into the first cavity 11A to divide the first cavity 11A into a pressure cavity 11A1 and a hydraulic cavity 11A2 with liquid, the other end of the piston component 112 is connected to the buffer component 12, and when an external force hits the buffer component 12, the buffer component 12 pushes the piston 1121 toward the pressure cavity 11A1 to squeeze the pressure cavity 11A1. And,

[0065] The control component 2 includes a sensor 21 installed on the buffer component 12 and a sensor 23 installed on the housing 111. The sensor 23 and the sensor 21 are used to separate from each other or approach each other to a predetermined distance when the buffer component 12 pushes the piston 1121 toward the pressure chamber 11A1 to issue an instruction.

[0066] The anti-collision device 10 of the present embodiment includes the anti-collision component 1 and the control component 2. When an external force hits the buffer component 12 in the anti-collision component 1, the buffer component 12 pushes the piston component 112 in the anti-collision component 1 toward the pressure chamber 11A1 located in the shell 111 of the anti-collision component 1 to compress the pressure chamber 11A1, and the pressure chamber 11A1 generates a reaction force to buffer the external force. At the same time, when the buffer component 12 pushes the piston 1121 toward the pressure chamber 11A1, when the sensor 21 installed on the buffer component 12 and the sensor 23 installed on the shell 111 separate from each other or approach each other to a predetermined distance, the control component 2 issues an instruction. In this way, when the anti-collision device 10 is used to prevent the sports table from collision, it can not only buffer the force generated by the external force collision, but also control the movement of the sports table by issuing instructions through the control component 2, thereby avoiding the problem of damage to the sports table caused by secondary or multiple collisions caused by the continued movement of the sports table.

[0067] For details, please continue to Figure 1 and Figure 2 As shown, in this embodiment, the hydraulic buffer 11 further includes a limit stopper 113 located in the first cavity 11A, and the piston assembly 112 includes a piston 1121 and a piston rod 1122, one end of the piston rod 1122 is fixedly connected to the piston 1121, and the other end of the piston rod 1122 is connected to the buffer assembly 12. The buffer assembly 12 and the piston rod are connected to each other through a coupling 13.

[0068] Further, continue to participate Figure 2 As shown, the limit stopper 113 is at least arranged around the piston rod 1122 to limit the position of the piston assembly 112. Furthermore, the piston assembly 112 and the limit stopper 113 divide the first cavity 11A into a hydraulic cavity 11A2 and a pressure cavity 11A1.

[0069] For details, please continue to Figure 1 As shown, in this embodiment, the stopper 113 is irregular and at least partially surrounds the inner wall of the housing 111, and a hydraulic chamber 11A2 is formed between the stopper 113 and the inner wall of the housing 111, and liquid is contained in the hydraulic chamber 11A2. In addition, when the stopper 113 is completely disposed around the inner wall of the housing 111, the space between the stopper 113 and the piston 1121 forms the pressure chamber 11A1. When the stopper 113 partially surrounds the inner wall of the housing 111, the space between the inner wall of the housing 111, the stopper 113 and the piston 1121 forms the pressure chamber 11A1. In addition, in this embodiment, a liquid outlet hole 11A3 is formed on the stopper 113 between the pressure chamber 11A1 and the hydraulic chamber 11A2, and the liquid outlet hole 11A3 is used for the liquid in the hydraulic chamber 11A2 to flow from the hydraulic chamber 11A2 to the pressure chamber 11A2, or from the pressure chamber 11A1 to the hydraulic chamber 11A2. In addition, there is air in the pressure chamber 11A1.

[0070] For details, please continue to Figure 1 Combined with Figure 2As shown, in this embodiment, when an external force hits the buffer assembly 12, the buffer assembly 12 moves toward the pressure chamber 11A1, thereby driving the piston rod 1122 to move toward the pressure chamber 11A1, and the piston rod 1122 drives the piston 1121 to move to squeeze the pressure chamber 11A1. In this way, the volume of the pressure chamber 11A1 becomes smaller, and the pressure of the pressure chamber 11A1 increases. When the pressure of the pressure chamber 11A1 is greater than the pressure of the hydraulic chamber 11A2, the liquid in the pressure chamber 11A1 flows to the hydraulic chamber 11A2 through the liquid outlet 11A3. When the external force is removed and does not hit the buffer assembly 12, the larger pressure of the pressure chamber 11A1 pushes the piston assembly 112 to move away from the pressure chamber 11A1, and the volume of the pressure chamber 11A1 increases and the pressure decreases. When the pressure of the pressure chamber 11A1 is lower than the pressure of the hydraulic chamber 11A2, the liquid in the hydraulic chamber 11A2 flows to the hydraulic chamber 11A2 through the liquid outlet 11A3, and the volume of the pressure chamber 11A1 increases, further pushing the piston assembly 112 to move away from the pressure chamber 11A1. When the piston 1121 is stuck on the limit portion of the limit stopper 113, the piston assembly 112 stops moving, and the collision prevention device 10 is reset. Figure 2 As shown, the piston 1121 is now clamped on the limiting portion of the limiting stopper 113, and the limiting portion may be composed of a portion of the limiting stopper 113 surrounding the piston rod 1122 and concave toward the pressure chamber 11A1.

[0071] Further, continue to participate Figure 2 As shown, in this embodiment, the hydraulic buffer 11 further includes an elastic member 115, and the elastic member 115 is disposed on the piston assembly 112 between the housing 111 and the buffer assembly 12. Specifically, in this embodiment, the elastic member 115 is a spring, and the elastic member 115 is sleeved on the piston rod 1122 between the housing 111 and the buffer assembly 12, and one end of the elastic member 115 is fixed to the housing 111, and the other end is fixed to the coupling 13. In this way, when the buffer assembly 12 is impacted by an external force to move toward the pressure chamber 11A1 to squeeze the pressure chamber 11A1, the elastic member 115 is compressed, generating a compression force opposite to the direction of the external force, so as to offset at least part of the impact of the external force. When the external force is removed, the piston assembly 112 and the buffer assembly 12 move in a direction away from the pressure chamber 11A1; at this time, the elastic member 115 is reset to prevent the piston assembly 112 and the buffer assembly 12 from moving too fast and causing the piston 1121 to have an excessive impact on the limit stopper 113. In addition, optionally, the elastic member 115 can also be a block, such as a block made of rubber or other materials.

[0072] Further, continue to participate Figure 2 As shown, in this embodiment, the hydraulic buffer 11 also has a buffer chamber 11B, and the buffer chamber 11B is located in the housing 111 and is arranged on the side of the pressure chamber 11A1 away from the piston assembly 112, and the elastic member 115 is arranged in the buffer chamber 11B. In this embodiment, one end of the elastic member 115 abuts or is fixedly connected to the inner wall of the housing 111 away from the piston assembly 112, and the other end abuts or is fixedly connected to the partition that separates the buffer chamber 11B and the pressure chamber 11A1. The partition can be movably arranged along the movement direction of the piston assembly 112. The partition can be composed of a separately arranged plate-like structure, or it can be composed of a partial structure of the limit stopper 113. The specific structure and formation method of the partition are not specifically limited here. In this way, when the buffer assembly 12 is impacted by an external force and moves toward the pressure chamber 11A1 to squeeze the pressure chamber 11A1, the elastic member 115 is compressed, generating a compression force in the opposite direction of the external force to offset at least part of the impact of the external force. When the external force is removed, the piston assembly 112 and the buffer assembly 12 move in a direction away from the pressure chamber 11A1. At this time, the elastic member 115 is stretched, generating a stretching force in the opposite direction of the movement of the piston assembly 112 and the buffer assembly 12, so as to prevent the piston assembly 112 and the buffer assembly 12 from moving too fast and causing the piston 1121 to have an excessive impact on the limit stopper 113. In addition, in this embodiment, the elastic member 115 is arranged on the piston assembly 112 between the shell 111 and the buffer assembly 12, and can also be arranged in the buffer cavity 11B, or there are two elastic members 115, and the two elastic members 115 are respectively arranged on the piston assembly 112 between the shell 111 and the buffer assembly 12 and in the buffer cavity 11B.

[0073] Further, continue to participate Figure 2As shown, the hydraulic buffer 11 of this embodiment further includes a locking nut 117, which is fixed on the inner wall of the housing 111 or the piston rod 1122 and extends into the elastic member 115 to adjust the length of the working part of the elastic member 115, so that the elastic member 115 can be suitable for impacts of different pressures. Specifically, the part of the elastic member 115 located in the buffer chamber 11B close to the inner wall of the housing 111 away from the piston assembly 112 can be compressed, or the part of the elastic member 115 located on the piston assembly 112 close to the housing 111 can be compressed; and the locking nut 117 is extended into the position between the compressed part and the non-compressed part of the elastic member 115, and then the locking nut 117 is tightened, so that the compressed part of the elastic member 115 cannot work, and the non-compressed part works. In this way, the length of the working part of the elastic member 115 can be adjusted, so that the elastic member 115 can be suitable for impacts of different pressures.

[0074] Further, continue to participate Figure 2 As shown, in this embodiment, the hydraulic buffer 11 further includes at least one sealing member 114, which is disposed at least at the junction of the piston assembly 112 and the housing 111 to seal the first cavity 11A and prevent the liquid in the hydraulic cavity 11A2 from flowing out of the hydraulic buffer 11. At the same time, the sealing member 114 can also be disposed at the junction of the buffer cavity 11B and the pressure cavity 11A1 to seal the pressure cavity 11A1. In addition, the sealing member 114 can be a sealing ring or a sealing film.

[0075] In addition, in this embodiment, continue to Figure 2 As shown, the hydraulic buffer 11 of this embodiment further includes a check valve 116, which is disposed at the junction of the buffer chamber 11B and the pressure chamber 11A1, and is used to prevent the pressure in the pressure chamber 11A1 from being too high and causing damage to the hydraulic buffer 11. The structure and working principle of the check valve 116 are well known in the art and will not be described in detail herein.

[0076] Further, continue to participate Figure 2 Combine Figure 1As shown, in this embodiment, the buffer assembly 12 includes a bracket 121 and a buffer head 122, the bracket 121 is fixed on one end of the piston assembly 112 away from the housing 111, the buffer head 122 is installed on the side of the bracket 121 away from the housing 111, and the bracket 121 is also installed with the feeler 21. In this embodiment, the buffer head 122 is used to generate a force opposite to the external force when it is hit by an external force, so as to first absorb part of the impact force generated by the external force. In this embodiment, the buffer head 122 is made of high-strength, high-toughness, high-cleanliness metal material or non-metal material or composite material, such as precipitation hardened stainless steel, high-quality maraging steel, beryllium bronze, spring steel or 2Cr13, or a metal-based composite material based on these, or POM (polyoxymethylene plastic), part of silicone rubber or a non-metal-based material based on these.

[0077] The control assembly 2 further includes a first fixing rod 25 and a cross rod 24, wherein the first fixing rod 25 is fixed to the bracket 121 of the buffer assembly 12, and one end of the cross rod 24 is fixed to the first fixing rod 25, and the other end extends toward the housing 111 and is fixed with the feeler 21. In this embodiment, the feeler 21 is fixed to the end of the cross rod 24, and the feeler 21 protrudes from the cross rod 24 and extends in a direction away from the housing 111.

[0078] Furthermore, the control assembly 2 further includes a second fixing rod 22, one end of the second fixing rod 22 is fixed to the housing 111, and the other end of the second fixing rod 22 is fixed to the sensor 23. Figure 1As shown, in this embodiment, the feeler 21 is located between the sensor 23 and the buffer assembly 12, and when the anti-collision device 10 is not impacted by an external force, the feeler 21 and the sensor 23 are in contact. The feeler 21 may be, for example, a metal sheet. The sensor 23 may be a distance sensor, and the sensor 23 is capable of measuring the distance between the feeler 21 and itself. When the buffer assembly 12 is impacted, the buffer assembly 12 moves toward the pressure chamber 11A1 to drive the feeler 21 fixed at the end of the crossbar 24 to move toward the pressure chamber 11A1, so that the feeler 21 and the sensor 23 are separated from each other, and when the feeler 21 and the sensor 23 are separated from each other to a predetermined distance, an instruction is issued. In addition, in an optional embodiment, the sensor 23 is located between the feeler 21 and the buffer assembly 12, and when the anti-collision device 10 is not impacted by an external force, there is a certain distance between the sensor 23 and the feeler 21. When the buffer assembly 12 is hit, the buffer assembly 12 moves toward the pressure chamber 11A1 to drive the sensor 21 fixed at the end of the cross bar 24 to move toward the pressure chamber 11A1, so that the sensor 21 and the sensor 23 approach each other. When the sensor 21 and the sensor 23 approach each other to a predetermined distance, an instruction is issued.

[0079] In this embodiment, the instruction is, for example, an alarm instruction, that is, an alarm is issued to warn the staff that the anti-collision device 10 is hit during use. Alternatively, the instruction may also be a stop instruction, that is, when the anti-collision device 10 is used for anti-collision, the stop instruction is used to control the anti-collision device 10 to stop the carrier from moving to prevent collision. And, the instruction may also be a recording instruction to upload the fault information to the fault management library so that the staff can perform fault analysis to obtain the cause of the fault and improve the fault.

[0080] Figure 3 FIG. 1 is a schematic diagram of the structure of a buffer head in a buffer assembly in an anti-collision device according to an embodiment of the present invention. Figure 3 Combined with Figure 1 and Figure 2 As shown, in this embodiment, the bracket 121 has a mounting groove (not shown), the opening of the mounting groove (not shown) is arranged on a side of the bracket 121 away from the piston assembly 112, the buffer head 122 is installed in the mounting groove (not shown) and protrudes from the bracket 121, and the portion of the buffer head 122 protruding from the bracket 121 is used to be impacted by external force to absorb the impact force generated by the external force impact. In this embodiment, the bracket is a cylinder.

[0081] The buffer head 122 has a second cavity 122A, and the second cavity 122A passes through the buffer head 122. The buffer assembly 12 also includes a connecting pin 123, and the connecting pin 123 passes through the bracket 121 and the second cavity 122A of the buffer head 122 to install the buffer head 122 in the installation groove (not shown). The buffer assembly 12 also includes a buckle 124, and the buckle 124 is sleeved on the portion of the connecting pin 123 protruding from the bracket 121 and abutting against the bracket 121. For details, continue to refer to Figure 3 As shown, the buffer head 122 may be in a circular shape, and when the buffer head 122 is impacted, the kinetic energy of the impact is converted into the rotational kinetic energy of the buffer head 122. In addition, the material forming the buffer head 122 may be a flexible material, such as rubber, etc. When the buffer head 122 is flexibly set, its own reliability is enhanced, and it can further absorb part of the energy, and is more suitable for the photolithography environment.

[0082] Further, continue to participate Figure 3 As shown, in this embodiment, at least one reinforcing ring 1221 surrounding the second cavity 122A is provided on the inner wall of the buffer head 122, and the reinforcing ring 1221 is used to enhance the resistance of the buffer head 122. The material used for the reinforcing ring 1221 is the same as that of the buffer head 122, and no further details are given here.

[0083] Further, continue to participate Figure 3 As shown, in this embodiment, the reinforcing ring 1221 is intermittently arranged, so as to increase the force resistance of the reinforcing ring 1221 and improve the force resistance of the buffer head 122 .

[0084] Furthermore, in this embodiment, there are multiple reinforcing rings 1221, and the multiple reinforcing rings 1221 are arranged at intervals, and the intervals between adjacent reinforcing rings 1221 are equal. In this way, not only can the resistance of the buffer head 122 be enhanced, but also the resistance of each part of the buffer head 122 can be uniform.

[0085] Figure 4 FIG. 2 is another schematic diagram of the structure of the buffer assembly in the anti-collision device according to an embodiment of the present invention. Figure 4 Combined with Figure 1 to Figure 3As shown, in this embodiment, the bracket 121 includes a first bracket 126 and a second bracket 125 connected to each other, the first bracket 126 is mounted with the feeler 21, the second bracket 125 is fixed to the end of the piston assembly 112 away from the housing 111, and the buffer head 122 is mounted on the second bracket 125. Specifically, one end of the first fixing rod 25 is fixed to the first bracket 126, and the other end extends in a direction away from the first bracket 126. A first screw hole 126A is provided on the first bracket 126, and a screw passes through the first screw hole 126A to fix the first fixing rod 25 and the first bracket 126 to each other. One end of the cross bar 24 is fixed to the first fixing rod 25, and the other end extends toward the housing 111, and the other end of the cross bar 24 is fixed with the feeler 21.

[0086] The second bracket 125 is provided with a second screw hole 125A, and the extension direction of the second screw hole 125A is the same as the extension direction of the piston assembly 112. The second cavity 122A of the buffer head 122 is aligned with the second screw hole 125A, so that the screw can be extended into the second cavity 122A and passed through the second screw hole 125A and then tightened on the piston rod 1122 or the coupling 13. The coupling 13 is sleeved on the piston rod 1122.

[0087] And, the first bracket 126 and the second bracket 125 are arranged opposite to each other and partially connected, so that there is a gap 12A between the first bracket 126 and the second bracket 125. Optionally, the part where the first bracket 126 and the second bracket 125 are connected is fixedly connected, for example, integrally formed, or fixedly connected by welding. Optionally, the first bracket 126 and the second bracket 125 can also be detachably connected by bolts. When the first bracket 126 and the second bracket 125 are detachably connected, if the first bracket 126 or the second bracket 125 is damaged, the damaged first bracket 126 or the second bracket 125 can be replaced.

[0088] Further, continue to participate Figure 4 As shown, the first bracket 126 has a first adjustment hole 126B, the second bracket 125 has a second adjustment hole 125B, and the bracket 121 also includes an adjusting member (not shown), which spans the gap 12A and is connected to the first bracket 126 through the first adjustment hole 126B, and is connected to the second bracket 125 through the second adjustment hole 125B to adjust the width of the gap 12A.

[0089] Specifically, when the adjusting member (not shown) is connected to the first bracket 126 and the second bracket 125, and the distance between the adjusting member (not shown) and the connection point between the first bracket 126 and the second bracket 125 is greater than the distance between the first adjustment hole 126B and the second adjustment hole 125B when the adjusting member (not shown) is not provided on the bracket 121, the adjusting member (not shown) can increase the width of the gap 12A. When the adjusting member (not shown) is connected to the first bracket 126 and the second bracket 125, and the distance between the adjusting member (not shown) and the connection point between the first bracket 126 and the second bracket 125 is less than the distance between the first adjustment hole 126B and the second adjustment hole 125B when the adjusting member (not shown) is not provided on the bracket 121, the adjusting member (not shown) can reduce the width of the gap 12A.

[0090] Figure 5 It is a schematic diagram of the side structure of a lithography device according to an embodiment of the present invention. Figure 6 is a schematic diagram of a top view of a lithography device according to an embodiment of the present invention. This embodiment also discloses a lithography device, Figure 5 and Figure 6 , and combined with Figure 1 and Figure 2 As shown, in this embodiment, the lithography equipment includes a frame 30 having a chamber 30A, a moving table 20 located in the chamber 30A, and the anti-collision device 10 as described above is installed on the moving table 20 to cushion the impact of the external force on the moving table 20.

[0091] Specifically, in this embodiment, when the moving platform 20 moves in the chamber 30A, if the moving platform 20 approaches the inner wall of the frame 30 and collides with the inner wall of the frame 30, the buffer head 122 in the buffer assembly 20 in the anti-collision device 10 fixed on the moving platform 30 is impacted by the external force generated by the frame 30. At this time, the buffer head 122 first generates a force in the opposite direction of the external force to buffer the impact of the external force. At the same time, the buffer head 122 deforms and rotates to absorb part of the force, and after the structure is repeatedly impacted, it can still recover to its original state to maintain the initial design shape. Afterwards, the buffer assembly 20 moves toward the pressure chamber 11A1 located in the hydraulic buffer 11 under the impact of the external force, so as to drive the piston assembly 112 to move toward the pressure chamber 11A1, so that the piston 1121 compresses the pressure chamber 11A1, and the pressure chamber 11A1 generates a force in the opposite direction of the external force to buffer the external force. During this process, the elastic member 115 also generates a force in the opposite direction to the external force to buffer the external force. In addition, when the buffer assembly 12 is impacted by the external force and moves toward the pressure chamber 11A1, the buffer assembly 12 drives the feeler 21 fixed thereon to move, so that the feeler 21 and the sensor 23 are separated from each other. When the feeler 21 and the sensor 23 are separated from each other to a predetermined distance, the sensor 23 issues a command.

[0092] Wherein, the instruction is, for example, an alarm instruction, that is, an alarm device can be set on the lithography equipment, and an alarm can be sounded according to the alarm instruction to inform the staff that the moving table 20 has collided with the frame 30, so that the staff can perform maintenance. Alternatively, the instruction can also be a stop instruction issued to the moving table 20, and the sensor 23 can be connected to the control system of the moving table 20 for communication, so that when the sensor 21 and the sensor 23 are separated from each other or approach each other to a predetermined distance, the sensor 23 issues a stop instruction to the control system of the moving table 20 to control the moving table 20 to stop moving. In this embodiment, the predetermined distance is 0, that is, when the sensor 21 and the sensor 23 are separated from each other or approach each other, a stop instruction is issued to stop the moving table 20. Optionally, the instruction can also be a reverse instruction, that is, when the moving table 20 collides with the inner wall of the frame 30, the moving table 20 moves in a direction away from the inner wall of the frame 30 to move away from the inner wall of the frame 30. Optionally, the instruction may also be a recording instruction, that is, the fault information may be uploaded to a fault management library so that staff can perform fault analysis to obtain the cause of the fault and improve the fault.

[0093] Among them, in this embodiment, there are four anti-collision devices 10, and the moving platform 20 is rectangular. The four anti-collision devices 10 are installed at the four corners of the moving platform 20. In this way, when the moving platform 20 moves in the chamber 30A, it can be used to fully cushion the moving platform from external force impact.

[0094] Further, in this embodiment, the anti-collision device 10 can be installed on the moving stage 20 by providing a mounting hole (not shown) on the housing 111 and passing the bracket 121 through the mounting hole (not shown). In addition, in this embodiment, the moving stage 20 is, for example, a mask stage, and the mask stage is used to carry a substrate, and the substrate can be, for example, a silicon substrate, a wafer or a glass substrate. In addition, the chamber 30A is a vacuum chamber.

[0095] Figure 7 2 is another side view structural schematic diagram of a lithography device according to an embodiment of the present invention. Figure 8 FIG. 2 is another schematic diagram of a top view of a lithography apparatus according to an embodiment of the present invention. Figure 7 and Figure 8 , and participate Figure 1 and Figure 2 As shown, in this embodiment, the anti-collision device 10 can also be installed on the inner wall of the frame 30. When the anti-collision device 10 is installed on the inner wall of the frame 30, the weight of the sports platform 20 can be reduced. Figure 7 and Figure 8 As shown, in this embodiment, the number of the anti-collision devices 10 is four, and the four anti-collision devices 10 are arranged in groups of two, and the two groups of the anti-collision devices 10 are installed on two opposite inner walls of the frame 30. And the distance between each group of the anti-collision devices 10 is less than the width of one side of the sports platform 20 corresponding to the group of the anti-collision devices 10. Optionally, there are multiple anti-collision devices 10, and the multiple anti-collision devices 10 are installed at intervals on all the inner walls of the frame 30, so that the sports platform 20 can be fully protected from colliding with the inner wall of the frame 30.

[0096] The above description is only a description of the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention. Any changes or modifications made by a person skilled in the art in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. An anti-collision device, characterized in that: include: An anti-collision assembly, the anti-collision assembly includes a hydraulic buffer and a buffer assembly, the hydraulic buffer includes a housing and a piston assembly, the housing has a first cavity, one end of the piston assembly extends into the first cavity to divide the first cavity into a pressure cavity and a hydraulic cavity with liquid, the other end of the piston assembly is connected to the buffer assembly, and is used for the buffer assembly to push the piston to move toward the pressure cavity to squeeze the pressure cavity when an external force hits the buffer assembly; A control component, the control component includes a feeler installed on the buffer component and a sensor installed on the shell, the sensor and the feeler are used to separate from each other or approach each other to a predetermined distance when the buffer component pushes the piston to move toward the pressure chamber to issue an instruction.

2. The anti-collision device according to claim 1, characterized in that: The control assembly further comprises a first fixing rod and a cross rod, wherein the first fixing rod is fixed on the buffer assembly, one end of the cross rod is fixed on the first fixing rod, and the other end extends toward the housing and is fixed with the sensor.

3. The anti-collision device according to claim 1, characterized in that: The control assembly further includes a second fixing rod, one end of which is fixed to the housing, and the sensor is fixed to the other end of the second fixing rod.

4. The anti-collision device according to claim 1, characterized in that: The buffer assembly comprises a bracket and a buffer head. The bracket is fixed on one end of the piston assembly away from the housing. The feeler is mounted on the bracket. The buffer head is mounted on a side of the bracket away from the housing.

5. The anti-collision device according to claim 4, characterized in that: The bracket has a mounting groove, the buffer head is mounted in the mounting groove and protrudes from the bracket, and the portion of the buffer head protruding from the bracket is used to be impacted by external force.

6. The anti-collision device according to claim 5, characterized in that: The buffer assembly also includes a connecting pin, which passes through the bracket and the buffer head to install the buffer head in the installation groove.

7. The anti-collision device according to claim 6, characterized in that: The buffer assembly also includes a buckle ring, which is sleeved on a portion of the connecting pin protruding from the bracket and abuts against the bracket.

8. The anti-collision device according to claim 4, characterized in that: The buffer head has a second cavity. At least one reinforcement ring surrounding the second cavity is arranged on the inner wall of the buffer head. The reinforcement ring is used to enhance the force resistance of the buffer head.

9. The anti-collision device according to claim 8, characterized in that: The reinforcing rings are arranged intermittently.

10. The anti-collision device according to claim 8, characterized in that: There are a plurality of reinforcing rings, the plurality of reinforcing rings are arranged at intervals, and the intervals between adjacent reinforcing rings are equal.

11. The anti-collision device according to claim 4, characterized in that: The bracket includes a first bracket and a second bracket connected to each other, the sensor is installed on the first bracket, the second bracket is fixed on an end of the piston assembly away from the housing, and the buffer head is installed on the second bracket.

12. The anti-collision device according to claim 11, characterized in that: There is a gap between the first bracket and the second bracket, and the bracket further includes an adjusting member, which spans the gap and is connected to the first bracket and the second bracket to adjust the width of the gap.

13. The anti-collision device according to claim 1, characterized in that: The piston assembly includes a piston and a piston rod, and the hydraulic buffer also includes a limit block located in the first cavity, and the limit block is at least arranged around the piston rod to limit the piston assembly; and the piston assembly and the limit block divide the first cavity into a hydraulic cavity and a pressure cavity.

14. The anti-collision device according to claim 13, characterized in that: The limit stopper is arranged around the inner wall of the shell, and a liquid outlet hole is arranged on the limit stopper located between the hydraulic chamber and the pressure chamber.

15. The anti-collision device according to claim 1, characterized in that: The hydraulic buffer also includes an elastic member, which is arranged on the piston assembly between the housing and the buffer assembly; and / or the hydraulic buffer also includes a buffer chamber located in the housing, which is arranged on a side of the pressure chamber away from the piston assembly, and the elastic member is arranged in the buffer chamber.

16. The anti-collision device according to claim 15, characterized in that: The elastic member includes a spring.

17. The anti-collision device according to claim 1, characterized in that: The hydraulic buffer further includes at least one sealing member, which is disposed at least at the junction of the piston assembly and the housing to seal the first cavity.

18. A lithography apparatus, characterized in that: The lithography equipment includes a frame having a chamber, a moving table located in the chamber, and the anti-collision device described in any one of claims 1 to 17, wherein the anti-collision device is installed on the moving table or on the inner wall of the frame to cushion the moving table from external force impact.

19. The lithographic apparatus according to claim 18, wherein: The number of the anti-collision devices is four, and the four anti-collision devices are installed at the four corners of the sports platform, or the four anti-collision devices are grouped in twos, and two groups of anti-collision devices are installed on two opposite inner walls of the frame.

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