Reflector assembly

Abstract

A reflector assembly includes: a reflector device having a support portion and a movable reflector portion configured to be movable relative to the support portion; and a package having a light incident opening and accommodating and holding the reflector device in a manner such that light incident from the light incident opening can be incident on the movable reflector portion. The package is provided with a vent hole for connecting the inside of the package with the outside.

Description

Technical Field

[0001] One aspect of the present disclosure relates to a reflector assembly. Background Art

[0002] A mirror assembly is known that includes an optical scanning device having a movable mirror portion and a package that accommodates the optical scanning device (see, for example, Patent Documents 1 and 2). In this mirror assembly, a light incident opening of a package body is blocked by a window member, and the interior of the package is hermetically sealed.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent document 1: Japanese Patent Application Publication No. 2018-17832.

[0006] Patent document 2: Japanese Patent Application Publication No. 2016-99567. Summary of the invention

[0007] Problem that the invention aims to solve

[0008] In the above-mentioned reflector assembly, condensation may occur on the window member due to the temperature difference between the inside and the outside of the package. An object of one aspect of the present disclosure is to provide a reflector assembly capable of suppressing condensation from occurring in the package.

[0009] Technical solutions to the problem

[0010] One aspect of the present disclosure provides a reflector assembly, comprising: a reflector device having a supporting portion and a movable reflector portion configured to be movable relative to the supporting portion; and a package having a light incident opening and housing and holding the reflector device in a manner such that light incident from the light incident opening can be incident on the movable reflector portion, and a vent is provided in the package for connecting the interior of the package with the exterior.

[0011] In this reflector assembly, ventilation can be achieved between the inside and outside of the package through the vent hole, and as a result, condensation can be suppressed from occurring in the package.

[0012] The minimum width of the vent in the predetermined direction may be smaller than the minimum distance between the movable mirror unit and the fixed portion of the mirror assembly. In this case, the movement of the movable mirror unit can be prevented from being hindered by dust entering the package through the vent.

[0013] Alternatively, the movable reflector unit includes a movable unit and a reflector disposed on the movable unit, and the minimum width of the vent in a predetermined direction is smaller than the minimum distance between the support unit and the movable unit when viewed from a direction perpendicular to the reflector. In this case, dust entering the package from the vent can be prevented from being sandwiched between the support unit and the movable unit, and the movement of the movable reflector unit can be prevented from being obstructed by dust.

[0014] Alternatively, the minimum width of the vent in the predetermined direction may be smaller than the minimum distance between the movable mirror portion and the fixed portion of the reflector assembly when the movable reflector portion moves to the maximum position within the movable range relative to the support portion. In this case, even when the movable reflector portion moves to the maximum position within the movable range relative to the support portion, it is possible to suppress the movement of the movable reflector portion from being hindered by dust entering the package through the vent.

[0015] Alternatively, the package may include: a main body having a light incident opening and holding a reflector device; and a window member disposed on the main body in a manner covering the light incident opening, wherein the vent is formed by a gap between the main body and the window member. In this case, the vent can be easily formed. In addition, because the vent is located near the window member, the temperature and humidity of the air near the window member are easily close to the temperature and humidity of the air outside the package, which can further suppress the occurrence of condensation.

[0016] Alternatively, a convex portion may be provided on the top surface of the main body, the window member may be arranged on the top surface in contact with the convex portion, and a gap may be formed between the top surface and the window member. In this case, the vent can be formed more easily.

[0017] Alternatively, the package includes: a main body having a light incident opening and holding a reflector device; and a window member disposed on the main body so as to cover the light incident opening, and the vent is formed by joining a portion of the window member to the main body and leaving the remaining portion of the window member unjoined to the main body. In this case, the vent can be easily formed.

[0018] Alternatively, the vent may be formed by a light incident opening. In this case, the vent can be easily formed. In addition, since the light incident opening also serves as the vent, condensation can be effectively suppressed.

[0019] Alternatively, the vent is covered with a peelable film. In this case, dust can be prevented from entering the package from the vent when the reflector assembly is transported, etc. In addition, when the reflector assembly is used, the film can be peeled off to open the vent.

[0020] Alternatively, the package has a main body provided with a light incident opening and holding a reflector device, the vent is formed by the light incident opening, the vent is covered by a peelable film bonded to the main body, and the width of the film bonded to the main body is narrower than the width of the light incident opening. In this case, since the vent is formed by the light incident opening, the vent can be easily formed. In addition, since the light incident opening also serves as the vent, condensation can be effectively suppressed. In addition, since the vent is covered by a peelable film, dust can be prevented from entering the package through the vent when the reflector assembly is transported. When the reflector assembly is used, the film can be peeled off to open the vent. Moreover, since the width of the film bonded to the main body is narrower than the width of the light incident opening, it is easy to peel off the film, and adhesive is not likely to remain in the main body.

[0021] Effects of the Invention

[0022] According to an aspect of the present disclosure, a reflector assembly capable of suppressing condensation from occurring within a package can be provided. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a top view of a reflector assembly according to an embodiment.

[0024] Figure 2 It is along Figure 1 Cross-sectional view of line II-II.

[0025] Figure 3 It is along Figure 1 Cross-sectional view along line III-III.

[0026] Figure 4 It is along Figure 1 Cross-sectional view of IV-IV.

[0027] Figure 5 is a top view of the light scanning device.

[0028] Figure 6 This is a top view of another example of an optical scanning device.

[0029] Figure 7 This is a top view of another example of an optical scanning device.

[0030] Figure 8 It is along Figure 7 Cross-sectional view along line XIII-XIII.

[0031] Fig. 9 is a cross-sectional view of a reflector assembly according to a first modified example.

[0032] Fig.10 is a cross-sectional view of a reflector assembly according to a second modified example. DETAILED DESCRIPTION

[0033] Hereinafter, one embodiment of the present disclosure will be described in detail with reference to the accompanying drawings. In the following description, the same reference numerals are used for the same or corresponding elements, and repeated descriptions are omitted.

[0034] [Overall structure of the reflector assembly]

[0035] like Figure 1 to Figure 4 As shown, the reflector assembly 100 includes an optical scanning device (reflector device) 1 and a package 40 for accommodating the optical scanning device 1. The package 40 has a main body 41 and a window member 51. The main body 41 is provided with a light incident opening 41a opened on one side S1 in a predetermined direction (Z-axis direction). The main body 41 holds the optical scanning device 1 in a manner that light incident from the light incident opening 41a can be incident on the optical scanning device 1. The window member 51 is arranged in a manner that covers the light incident opening 41a.

[0036] [Structure of optical scanning device]

[0037] like Figure 5 As shown, the optical scanning device 1 includes a support portion 2, a movable reflector portion 10 that can swing relative to the support portion 2, and a magnetic field generating portion M. The movable reflector portion 10 includes a first movable portion 3, a second movable portion 4, a pair of first connecting portions 5, a pair of second connecting portions 6, and a reflector 7. The support portion 2, the first movable portion 3, the second movable portion 4, the pair of first connecting portions 5, and the pair of second connecting portions 6 are integrally formed of, for example, an SOI (Silicon on Insulator) substrate. That is, the optical scanning device 1 is configured as a MEMS device. The magnetic field generating portion M is configured, for example, by including a permanent magnet using a Halbach array, and is formed into a substantially rectangular parallelepiped shape.

[0038] The first movable portion 3 is formed in, for example, a rectangular plate shape. When viewed from the optical axis direction A, the second movable portion 4 is formed in, for example, a rectangular ring shape so as to surround the first movable portion 3 with a gap therebetween. When viewed from the optical axis direction A, the support portion 2 is formed in, for example, a rectangular frame shape so as to surround the second movable portion 4 with a gap therebetween. That is, when viewed from the optical axis direction A, the support portion 2 is formed in a frame shape so as to surround the first movable portion 3 and the second movable portion 4.

[0039] The first movable part 3 is connected to the second movable part 4 via a pair of first connecting parts 5 in a manner that allows it to swing around the first axis X1. That is, the first movable part 3 is supported by the supporting part 2 in a manner that allows it to swing around the first axis X1. The first movable part 3 includes a first part 31 and a second part 32. When observed from the optical axis direction A, the first part 31 is formed in, for example, a circular shape. When observed from the optical axis direction A, the second part 32 is formed in, for example, a rectangular ring shape. When observed from the optical axis direction A, the first part 31 is surrounded by the second part 32 and is connected to the second part 32 via a plurality of (two in this example) connecting parts 33. That is, a gap is formed between the first part 31 and the second part 32 in addition to the plurality of connecting parts 33.

[0040] The connection portion 33 is located, for example, at the center of two sides intersecting the second axis X2 in the inner edge of the rectangular shape of the second portion 32. That is, in this example, the connection portion 33 is located on the second axis X2. The first portion 31 only needs to be connected to the second portion 32 at least in the direction along the second axis X2.

[0041] The second movable portion 4 is connected to the support portion 2 via a pair of second connecting portions 6 in a manner that allows it to swing around the second axis X2. That is, the second movable portion 4 is supported by the support portion 2 in a manner that allows it to swing around the second axis X2. The first axis X1 and the second axis X2 are perpendicular to the optical axis direction A and intersect each other (in this example, they are orthogonal to each other). In addition, when observed from the optical axis direction A, the first portion 31 can also be formed in a rectangular shape or a polygonal shape. When observed from the optical axis direction A, the first portion 31 can also be formed in a circular shape (for example, an elliptical shape). When observed from the optical axis direction A, the second portion 32 can also be formed in a polygonal ring or a circular ring shape that is larger than a pentagon.

[0042] A pair of first connecting parts 5 are arranged on the first axis X1 in a gap between the second portion 32 of the first movable part 3 and the second movable part 4, with the first movable part 3 interposed therebetween. Each first connecting part 5 functions as a torsion bar. A pair of second connecting parts 6 are arranged on the second axis X2 in a gap between the second movable part 4 and the support part 2, with the second movable part 4 interposed therebetween. Each second connecting part 6 functions as a torsion bar.

[0043] The reflector 7 is arranged on the first part 31 of the first movable part 3. The reflector 7 is formed on the surface of the first part 31 on the opposite side of the magnetic field generating part M in a manner including the intersection of the first axis X1 and the second axis X2. The reflector 7 is formed into a circular, elliptical or rectangular film shape by a metal material such as aluminum, an aluminum alloy, gold or silver. The surface of the reflector 7 on the opposite side of the first movable part 3 constitutes a reflector surface 7a extending perpendicularly to the optical axis direction A. When observed from the optical axis direction A, the center of the reflector 7 coincides with the intersection of the first axis X1 and the second axis X2. In this way, the reflector 7 is arranged on the first part 31 connected to the second part 32 via a plurality of connecting parts 33, so that even if the first movable part 3 swings around the first axis X1 at the resonance frequency level, deformation such as bending of the reflector 7 can be suppressed.

[0044] The optical scanning device 1 includes a first driving coil 11, a second driving coil 12, wirings 15a, 15b, wirings 16a, 16b, electrode pads 21a, 21b, and electrode pads 22a, 22b. Figure 2 In FIG. 1 , for convenience of explanation, the first drive coil 11 and the second drive coil 12 are indicated by dashed lines, and the wirings 15 a and 15 b and the wirings 16 a and 16 b are indicated by solid lines.

[0045] The first drive coil 11 is provided in the second portion 32 of the first movable portion 3. The first drive coil 11 is wound a plurality of times in a spiral shape (vortex shape) in the outer region (i.e., the second portion 32) of the reflector 7 when viewed from the optical axis direction A. The magnetic field generated by the magnetic field generating unit M acts on the first drive coil 11.

[0046] The first drive coil 11 is arranged in a groove formed on the surface of the first movable part 3. That is, the first drive coil 11 is embedded in the first movable part 3. One end of the first drive coil 11 is connected to the electrode pad 21a via the wiring 15a. The wiring 15a extends from the first movable part 3 to the support part 2 via the first connecting part 5 on one side, the second movable part 4 and the second connecting part 6 on one side. The wiring 15a and the electrode pad 21a are integrally formed of a metal material such as tungsten, aluminum, gold, silver, copper or aluminum alloy. The first drive coil 11 and the wiring 15a are connected to each other.

[0047] The other end of the first drive coil 11 is connected to the electrode pad 21b via the wiring 15b. The wiring 15b extends from the first movable portion 3 to the support portion 2 via the first connecting portion 5 on the other side, the second movable portion 4 and the second connecting portion 6 on the other side. The wiring 15b and the electrode pad 21b are integrally formed of a metal material such as tungsten, aluminum, gold, silver, copper or an aluminum alloy. The first drive coil 11 and the wiring 15b are connected to each other.

[0048] The second driving coil 12 is provided on the second movable part 4. The second driving coil 12 is wound multiple times in a spiral shape (vortex shape) on the second movable part 4. The magnetic field generated by the magnetic field generating part M acts on the second driving coil 12. The second driving coil 12 is arranged in a groove formed on the surface of the second movable part 4. That is, the second driving coil 12 is embedded in the second movable part 4.

[0049] One end of the second drive coil 12 is connected to the electrode pad 22a via the wiring 16a. The wiring 16a extends from the second movable portion 4 to the support portion 2 via the second connecting portion 6 on one side. The wiring 16a and the electrode pad 22a are integrally formed of a metal material such as tungsten, aluminum, gold, silver, copper or an aluminum alloy. In addition, the second drive coil 12 and the wiring 16a are connected to each other.

[0050] The other end of the second drive coil 12 is connected to the electrode pad 22b via the wiring 16b. The wiring 16b extends from the second movable portion 4 to the support portion 2 via the second connecting portion 6 on the other side. The wiring 16b and the electrode pad 22b are integrally formed of a metal material such as tungsten, aluminum, gold, silver, copper or an aluminum alloy. In addition, the second drive coil 12 and the wiring 16b are connected to each other.

[0051] An example of the operation of the movable mirror unit 10 in the optical scanning device 1 is given. As a first example, a high-frequency drive current is applied to the first drive coil 11. At this time, since the magnetic field generated by the magnetic field generating unit M acts on the first drive coil 11, a Lorentz force is generated in the first drive coil 11. As a result, the first movable unit 3 is swung around the first axis X1 at the resonance frequency, for example.

[0052] In addition, a driving current of a certain magnitude is applied to the second driving coil 12. At this time, since the magnetic field generated by the magnetic field generating unit M acts on the second driving coil 12, a Lorentz force is generated in the second driving coil 12. Thus, the second movable unit 4 is rotated around the second axis X2, for example, according to the magnitude of the driving current, and is stopped in this state. Thus, according to the optical scanning device 1, the reflector 7 can reflect light from a specified light source and scan at the same time. Light is incident on the reflector surface 7a from the outside through the window component 51, and is reflected by the reflector surface 7a and emitted to the outside through the window component 51. In the first example, the first movable unit 3 oscillates at a resonant frequency and the second movable unit 4 is used statically.

[0053] As a second example, similar to the operation of the first movable part 3 in the first example, the first movable part 3 oscillates at the resonance frequency by applying a high-frequency drive current to the first drive coil 11, and the second movable part 4 oscillates at the resonance frequency by applying a high-frequency drive current to the second drive coil 12. Thus, in the second example, both the first movable part 3 and the second movable part 4 oscillate at the resonance frequency.

[0054] As a third example, similar to the operation of the second movable part 4 in the first example, a certain amount of driving current is applied to the first driving coil 11, so that the first movable part 3 rotates around the first axis X1 according to the amount of the driving current and stops, and a certain amount of driving current is applied to the second driving coil 12, so that the second movable part 4 rotates around the second axis X2 according to the amount of the driving current and stops. In this way, in the third example, both the first movable part 3 and the second movable part 4 are used statically.

[0055] As a fourth example, for example, when the second movable part 4 is not provided, by applying a high-frequency drive current to the first drive coil 11, only the first movable part 3 swings according to the resonance frequency. And, as a fifth example, in the same case, by applying a drive current of a certain magnitude to the first drive coil 11, the first movable part 3 rotates around the first axis X1 according to the magnitude of the drive current and stops. In the fourth and fifth examples, only the first movable part 3 is driven.

[0056] In addition, if Figure 2 As shown, the support portion 2 is supported by the magnetic field generating portion M, and the first movable portion 3 and the second movable portion 4 are separated from the magnetic field generating portion M. Thus, the first movable portion 3 and the second movable portion 4 can rotate without interfering with the magnetic field generating portion M.

[0057] [Package structure]

[0058] like Figure 1 to Figure 4 As shown, the main body 41 of the package 40 is formed into, for example, a roughly rectangular parallelepiped shape. The main body 41 is made of a resin material such as PPS (polyphenylene sulfide) or PP (polypropylene) and is formed by injection molding. When the main body 41 is made of a resin material, it may be reinforced with a filler. The main body 41 may also be formed of a metal material such as Al, Fe or an alloy thereof. A recess 42 is formed in the main body 41, which opens on one side S1. The opening of the recess 42 constitutes the above-mentioned light incident opening 41a.

[0059] The window member 51 is formed by forming anti-reflection films on both surfaces of a rectangular flat substrate formed of a light-transmitting material such as glass. As described above, the window member 51 covers the light incident opening 41a. The window member 51 has a pair of main surfaces 51a extending perpendicularly to the Z-axis direction, a pair of side surfaces 51b extending perpendicularly to the X-axis direction, and a pair of side surfaces 51c extending perpendicularly to the Y-axis direction. The pair of side surfaces 51b and the pair of side surfaces 51c are continuous with the pair of main surfaces 51a.

[0060] The recessed portion 42 of the main body 41 includes a device placement portion 43 for placing the optical scanning device 1 and a wiring placement portion 44 for placing wiring and the like extending to the outside from the optical scanning device 1. The device placement portion 43 includes a first surface 43a extending obliquely relative to the main surface 51a of the window member 51, a second surface 43b extending from the first surface 43a and perpendicular to the first surface 43a, and a pair of third surfaces 43c extending from the first surface 43a and perpendicular to the Z-axis direction.

[0061] The optical scanning device 1 is arranged in the device arrangement portion 43 in a state where the magnetic field generating portion M contacts the first surface 43a, the second surface 43b, and the pair of third surfaces 43c. As a result, the optical scanning device 1 is in a state where the reflective mirror surface 7a of the movable reflective mirror portion 10 is inclined relative to the main surface 51a of the window member 51. The optical scanning device 1 is arranged, for example, so that the first axis X1 is parallel to the X-axis direction and the second axis X2 is parallel to the Y-axis direction.

[0062] The wiring configuration portion 44 has a first surface 44a inclined relative to the main surface 51a of the window member 51 and a second surface 44b continuous with the first surface 44a and curved. For example, a plurality of electrode pads are configured on the first surface 44a. The wiring extending from the optical scanning device 1 and the wiring WR extending to the outside of the package 40 through the second surface 44b are electrically connected to these electrode pads. The wiring WR is electrically connected to an external terminal configured on the outside of the reflector assembly 100. In this example, the wiring WR is arranged on the surface of the main body 41 and extends to the outside, but it can also extend to the outside through the inside of the main body 41. The wiring WR can also be electrically connected to one end of a lead terminal having one end embedded in the main body and the other end exposed outside the package 40. The second surface 44b does not have to be bent.

[0063] When observed from the Z-axis direction (in other words, when observed from a direction perpendicular to the main surface 51a of the window member 51), the light incident opening 41a is roughly rectangular in shape. More specifically, when observed from the Z-axis direction, the light incident opening 41a includes a rectangular region corresponding to the device configuration portion 43 and a rectangular region corresponding to the wiring configuration portion 44. The width of the region corresponding to the wiring configuration portion 44 in the Y-axis direction is narrower than the width of the region corresponding to the device configuration portion 43 in the Y-axis direction. Figure 1 In FIG. 4 , the edge of the light incident opening 41 a is indicated by a dotted line.

[0064] The main body 41 has a frame-shaped side wall 45 that defines the recess 42. When viewed from the Z-axis direction, the side wall 45 is substantially rectangular and surrounds the optical scanning device 1. The side wall 45 has a top surface 45a located closest to the one side S1, an inner surface 45b extending along the Z-axis direction, and an inclined surface 45c connected to the top surface 45a and the inner surface 45b. The top surface 45a extends perpendicularly to the Z-axis direction, and the inclined surface 45c extends obliquely with respect to the Z-axis direction so as to approach the one side S1 as it approaches the top surface 45a.

[0065] In addition, the side wall 45 has a pair of outer surfaces 45d extending along a plane intersecting the X-axis direction, and a pair of outer surfaces 45e extending along a plane intersecting the Y-axis direction. In this example, the pair of outer surfaces 45d extend perpendicularly to the X-axis direction. The pair of outer surfaces 45e includes a first portion 45f extending parallel to the Z-axis direction and a second portion 45g extending obliquely relative to the Z-axis direction. The side wall 45 has a pair of first wall portions 46 opposing each other in the X-axis direction and a pair of second wall portions 47 opposing each other in the Y-axis direction.

[0066] The second portion 45g is arranged on the other side (the side opposite to the one side S1) relative to the first portion 45f, and extends to the end of the other side of the main body 41. By forming the second portion 45g, the width of the main body 41 (side wall 45) in the Y-axis direction becomes narrower as it approaches the other side. Thus, in the case where the main body 41 is formed by injection molding, the molded product can be easily removed from the molding die. In addition, since not only the second portion 45g is formed but also the first portion 45f parallel to the Z-axis direction is formed, the reflector assembly 100 can be aligned by pushing the first portion 45f when the reflector assembly 100 is installed in the optical system, and the alignment accuracy of the reflector assembly 100 can be improved.

[0067] The package 40 further includes a protrusion 61 provided on the top surface 45a of the side wall 45. The protrusion 61 extends along the edge of the light incident opening 41a. When viewed from the Z-axis direction, the protrusion 61 is in a rectangular ring shape and surrounds the light incident opening 41a. By forming the protrusion 61, a step portion 62 is formed between the inner surface 61a of the protrusion 61 and the top surface 45a.

[0068] The protrusion 61 extends along the outer edge of the top surface 45a. When viewed from the Y-axis direction ( Figure 2 ), the outer surface 61b of the protrusion 61 is located on the same plane as the outer surface 45d of the side wall 45. When viewed from the X-axis direction ( Figure 3), the outer surface 61b of the protrusion 61 is located on the same plane as the first portion 45f of the outer surface 45e of the side wall 45. The protrusion 61 is made of, for example, the same resin material as the main body 41 and is formed integrally with the main body 41. The main body 41 and the protrusion 61 are formed simultaneously by, for example, one-time injection molding to form a single component. The protrusion 61 has a pair of first portions 64 respectively provided on a pair of first wall portions 46 of the side wall 45 and a pair of second portions 65 respectively provided on a pair of second wall portions 47 of the side wall 45.

[0069] Three convex portions (contact portions) 63 are provided on the top surface 45a of the side wall 45. When viewed from the Z-axis direction, each convex portion 63 is arranged on the inner side of the protrusion 61. Each convex portion 63 has a flat contact surface 63a facing one side S1. The contact surface 63a extends perpendicularly to the Z-axis direction and has a circular shape, for example.

[0070] The window member 51 is arranged on the step portion 62 in a manner covering the light incident opening 41a. That is, the window member 51 is arranged on the top surface 45a on the inner side of the protrusion 61 and covers the light incident opening 41a. One of the pair of main surfaces 51a of the window member 51 (hereinafter also simply referred to as the main surface 51a) is opposite to the top surface 45a of the side wall 45, and the side surfaces 51b and 51c of the window member 51 are opposite to the inner surface 61a of the protrusion 61. The main surface 51a of the window member 51 is in contact (contact) with the abutment surface 63a of the convex portion 63. As a result, in the area of ​​the top surface 45a where the abutment surface 63a is not provided, a gap G1 is formed between the main surface 51a of the window member 51 and the top surface 45a. In addition, a gap G2 is formed between the side surfaces 51b and 51c of the window member 51 and the inner surface 61a of the protrusion 61. That is, the side surfaces 51b and 51c are separated from the inner surface 61a.

[0071] The gap G1 and the gap G2 are connected to each other. The gaps G1 and G2 form a vent 80 that connects the inside and outside of the package 40. That is, the vent 80 is formed by the gaps G1 and G2 between the main body 41 and the window member 51. The air between the inside and outside of the package 40 can flow through the vent 80.

[0072] The window component 51 is joined to the main body 41 by a bonding material 70 such as low-melting-point glass. The window component 51 is joined to the main body 41 at the four corners when viewed from the Z-axis direction, for example. In addition to the four corners, or instead of them, the window component 51 may also be joined to the main body 41 by a bonding material at the contact portion with the abutment surface 63a. At the portion where the window component 51 is joined to the main body 41, the main body 41 and the window component 51 are blocked by the bonding material 70, and a gap G1 (vent 80) is not formed between the main body 41 and the window component 51. On the other hand, at the portion where the window component 51 is not joined to the main body 41, a gap G1 (vent 80) is formed between the main body 41 and the window component 51. That is, the vent 80 can be formed by joining a portion of the window component 51 to the main body 41, while the remaining portion of the window component 51 is not joined to the main body 41.

[0073] The end surface 61c of one side S1 of the protrusion 61 is located on one side S1 over the entire circumference (at any position on the end surface 61c) relative to the window member 51. That is, the height H of the protrusion 61 from the top surface 45a is greater than the sum of the thickness T1 of the window member 51 (the distance between the pair of main surfaces 51a) and the height of the convex portion 63 from the top surface 45a (the length of the gap G1 in the Z-axis direction). The thickness T1 of the window member 51 is, for example, about 0.6 mm.

[0074] The thickness T2 of the protrusion 61 is smaller than the height H of the protrusion 61 from the top surface 45a. The thickness T2 of the protrusion 61 is thinner than the thickness T1 of the window member 51. The thickness T2 of the protrusion 61 is the thickness of the protrusion 61 in the direction perpendicular to the extension direction. For example, the portion of the protrusion 61 extending perpendicularly to the X-axis direction is the thickness in the X-axis direction, and the portion extending perpendicularly to the Y-axis direction is the thickness in the Y-axis direction. The thickness T2 of the protrusion 61 is the maximum thickness of the protrusion 61. For example, in the case where a portion of the protrusion 61 is formed into a shape with a tapered tip as in the embodiment, the thickness T2 of the protrusion 61 is the thickness of the thickest portion of the protrusion 61. In this example, one of a pair of portions extending along the Y-axis direction in the protrusion 61 is formed into a shape with a tapered tip and has an inclined surface 61d. Thus, the configuration operation of the window member 51 to the step portion 62 can be facilitated. In addition, the protrusion 61 can be easily flexed and deformed.

[0075] [Structure of the vent]

[0076] The minimum width W of the vent 80 is smaller than the minimum distance L between the movable mirror portion 10 and a portion of the mirror assembly 100 whose position is fixed.

[0077] First, the minimum width W of the vent 80 is described. If the direction from the inside of the package 40 to the outside is set as the extension direction of the vent 80, the minimum width W of the vent 80 is the minimum width of the cross section perpendicular to the extension direction. When the vent 80 is composed of gaps G1 and G2 as in the embodiment, the extension direction of the portion of the gap G1 formed between the window member 51 and the first wall portion 46 of the side wall 45 is the X-axis direction ( Figure 2 ), the extending direction of the portion of the gap G1 formed between the window member 51 and the second wall portion 47 of the side wall 45 is the Y-axis direction ( Figure 3 ) The extending direction of the vent 80 in the gap G2 is the Z-axis direction.

[0078] In the embodiment, the minimum width W1 of the gap G1 is the width of the gap G1 in the Z direction. As for the minimum width W2 of the gap G2, the portion of the gap G2 formed between the window member 51 and the first portion 64 of the protrusion 61 is the width of the gap G2 in the X direction ( Figure 2 ), the portion of the gap G2 formed between the window member 51 and the second portion 65 of the protrusion 61 is the width of the gap G2 in the Y direction ( Figure 3 ). In this example, the minimum width W1 of the gap G1 is the same throughout the entire extension direction of the gap G1, and the minimum width W2 of the gap G2 is the same throughout the entire extension direction of the gap G2. The minimum width W1 is equal to the minimum width W2. Therefore, the minimum width W of the vent 80 is equal to the minimum width W1 of the gap G1 and the minimum width W2 of the gap G2. When the minimum width W1 is narrower than the minimum width W2, the minimum width W of the vent 80 is the minimum width W1, and when the minimum width W2 is narrower than the minimum width W1, the minimum width W of the vent 80 is the minimum width W2.

[0079] In the embodiment, the shape of the gap G1 on the cross section perpendicular to the extension direction is consistent in the extension direction, but the shape of the gap G1 on the cross section perpendicular to the extension direction may also change in the extension direction. In this case, with respect to the minimum width W1 of the gap G1, the minimum width is the minimum width of the narrowest cross section. Unlike the embodiment, when the minimum width of the gap G1 in the Y direction is narrower than the minimum width of the gap G1 in the Z direction, the minimum width W1 of the gap G1 is the width of the gap G1 in the Y direction. In these points, the gap G2 is also the same.

[0080] The minimum distance L is the minimum distance between the movable reflector portion 10 and the fixed position portion of the reflector assembly 100. In the embodiment, the fixed position portion of the reflector assembly 100 refers to all elements of the reflector assembly 100 except the movable reflector portion 10, specifically, the support portion 2 and the magnetic field generating portion M of the optical scanning device 1, and the package 40.

[0081] exist Figure 5 In the optical scanning device 1 shown, the minimum distance L is the minimum distance between the support part 2 and the second movable part 4 when viewed from the optical axis direction A (a direction perpendicular to the reflector 7), and is the distance between the support part 2 and the second movable part 4 in a direction parallel to the first axis X1.

[0082] exist Figure 6 In the optical scanning device 1A shown, the minimum distance L is the minimum distance between the support portion 2 and the second movable portion 4 when viewed from the optical axis direction A, and is the distance L1 between the support portion 2 and the second movable portion 4 in a direction parallel to the first axis X1. In this example, the distance L1 is equal to the distance L2 between the support portion 2 and the second movable portion 4 in a direction parallel to the second axis X2, and the distance L3 between the support portion 2 and the second connecting portion 6 in a direction parallel to the first axis X1. When the distances L1, L2, and L3 are different, the minimum distance L is the shortest distance among the distances L1, L2, and L3. The distance between the support portion 2 and the second connecting portion 6 refers to the distance in a direction perpendicular to the extension direction of the second connecting portion 6. Figure 6 In the example of FIG. 1 , the first movable portion 3 is formed in a circular plate shape.

[0083] exist Figure 7 and Figure 8 In the optical scanning device 1B shown, the second movable part 4 and the second connecting part 6 are not provided, and the first movable part 3 is connected to the support part 2 via the first connecting part 5. The movable reflector part 10 swings only around the first axis X1. The first movable part 3 is formed in a circular shape. The support part 2 has a flat base part 2a extending in a manner opposite to the first movable part 3 (movable reflector part 10). The base part 2a is configured in a manner that the movable reflector part 10 (first movable part 3) does not contact the base part 2a even when the movable reflector part 10 rotates around the first axis X1 to the maximum vibration angle.

[0084] In the optical scanning device 1B, the minimum distance between the support portion 2 and the movable reflector portion 10 when viewed from the optical axis direction A is set to L4. The minimum distance L4 is, for example, the distance between the support portion 2 and the first connecting portion 5 in a direction perpendicular to the optical axis direction A and the first axis X1. In this example, the distance between the support portion 2 and the first connecting portion 5 is equal to the distance (shortest distance) between the support portion 2 and the first movable portion 3. The distance between the support portion 2 and the first connecting portion 5 refers to the distance in a direction perpendicular to the extending direction of the first connecting portion 5.

[0085] exist Figure 8, the movable reflector portion 10 is shown in the state where it is rotated to the maximum vibration angle (moved to the maximum position within the movable range) relative to the support portion 2 around the first axis X1. In the optical scanning device 1B, the minimum distance between the movable reflector portion 10 and the support portion 2 when the movable reflector portion 10 is rotated to the maximum vibration angle relative to the support portion 2 around the first axis X1 is set to L5. The minimum distance L5 is, for example, the minimum distance between the first movable portion 3 and the base portion 2a of the support portion 2 in the optical axis direction A. Figure 2 As shown, when the movable mirror portion 10 is opposite to the magnetic field generating portion M, the minimum distance L5 is the minimum distance between the movable mirror portion 10 and the magnetic field generating portion M in the optical axis direction A. As another example, when the movable mirror portion 10 is opposite to the main body portion 41 of the package 40, the minimum distance L5 is the minimum distance between the movable mirror portion 10 and the main body portion 41 in the optical axis direction A when the movable mirror portion 10 is rotated to the maximum vibration angle.

[0086] In the optical scanning device 1B, the minimum distance L is the shorter of the minimum distances L4 and L5. In this example, the minimum distance L4 is equal to the minimum distance L5. In other words, the minimum distance L4 is the minimum distance between the support part 2 and the movable reflector part 10 when the movable reflector part 10 is not rotated (moved) relative to the support part 2. In other words, the minimum distance L5 is the minimum distance between the support part 2 and the movable reflector part 10 when the movable reflector part 10 is rotated within the rotatable range relative to the support part 2.

[0087] Even when the reflector assembly 100 includes any of the optical scanning devices 1, 1A, and 1B, the minimum width W of the vent 80 is smaller than the minimum distance L between the movable reflector unit 10 and the fixed position portion of the reflector assembly 100. Thus, it is possible to prevent the movement of the movable reflector unit 10 from being hindered by dust that enters the package 40 through the vent 80.

[0088] [Function and Effect]

[0089] As described above, the package 40 of the reflector assembly 100 is provided with the vent 80 that communicates the inside and outside of the package 40. Thus, the inside and outside of the package 40 can be ventilated through the vent 80, and as a result, condensation in the package 40 can be suppressed.

[0090] The minimum width W of the vent 80 is smaller than the minimum distance L between the movable mirror portion 10 and the fixed portion of the mirror assembly 100 . This can prevent the movement of the movable mirror portion 10 from being hindered by dust entering the package 40 through the vent 80 .

[0091] The minimum width W of the vent 80 is smaller than the minimum distance L between the support portion 2 and the first movable portion 3 or the second movable portion 4 when viewed from the optical axis direction A. Thus, dust that enters the package 40 from the vent 80 can be prevented from being caught between the support portion 2 and the first movable portion 3 or the second movable portion 4, and the movement of the movable reflector portion 10 can be prevented from being obstructed by the dust.

[0092] The minimum width W of the vent 80 is smaller than the minimum distance L between the movable mirror portion 10 and the fixed portion of the reflector assembly 100 when the movable reflector portion 10 moves to the maximum position within the movable range relative to the support portion 2. Thus, even when the movable reflector portion 10 moves to the maximum position within the movable range relative to the support portion 2, it is possible to suppress the movement of the movable reflector portion 10 from being hindered by dust that enters the package 40 through the vent 80.

[0093] The vent 80 may also be formed by the gaps G1 and G2 between the main body 41 and the window member 51. Thus, for example, the vent 80 can be formed more simply than when the vent 80 is formed by a through hole formed in the main body 41. In addition, since the vent 80 is located near the window member 51, the temperature and humidity of the air near the window member 51 are easily close to the temperature and humidity of the air outside the package 40, and the occurrence of condensation can be further suppressed.

[0094] The window member 51 is arranged on the top surface 45a in a manner of contacting the convex portion 63 provided on the top surface 45a of the main body 41, and a gap G1 is formed between the top surface 45a and the window member 51. Thus, the vent 80 can be formed more simply. In addition, the contact area between the window member 51 and the main body 41 can be reduced, and the skewness of the window member 51 caused by the difference in thermal expansion coefficient between the window member 51 and the main body 41 can be suppressed.

[0095] The vent 80 is formed by joining a portion of the window member 51 to the main body 41, while the remaining portion of the window member 51 is not joined to the main body 41. Thus, the vent 80 can be easily formed. In addition, the contact area between the window member 51 and the main body 41 can be reduced, and the skewness of the window member 51 caused by the difference in thermal expansion coefficient between the window member 51 and the main body 41 can be suppressed.

[0096] [Modifications]

[0097] Fig. 9 Schematic diagram of a reflector assembly 100A according to a first modified example. Fig. 9 The cross section shown is similar to that along Figure 1The cross section of the IX-IX line of the reflector assembly 100A corresponds to that of the IX-IX line of the reflector assembly 100A. In the reflector assembly 100A, the vent 80A is composed of a through hole formed in the main body 41. More specifically, the vent 80A is formed in the second wall portion 47 of the side wall 45 of the main body 41 and extends along the Y direction. The vent 80A is, for example, circular in shape in a cross section perpendicular to the extension direction. In the reflector assembly 100A, the minimum width W of the vent 80A is also smaller than the minimum distance L between the movable reflector portion 10 and the fixed position portion of the reflector assembly 100. In this case, the minimum width W of the vent 80A is the diameter of the circular cross section perpendicular to the extension direction. The cross-sectional shape of the vent 80A is not limited to a circular shape, and may be, for example, a rectangular shape. In the first variant, no gaps G1 and G2 are formed between the window component 51 and the main body 41, and the window component 51 and the main body 41 may also be blocked and sealed airtightly.

[0098] As in the above-described embodiment, according to the first modification, ventilation can be achieved between the inside and the outside of the package 40 through the vent hole 80A, and as a result, the occurrence of condensation in the package 40 can be suppressed.

[0099] exist Fig.10 In the reflector assembly 100B of the second modified example shown, the vent 80B is formed by the light incident opening 41a of the main body 41. That is, in the reflector assembly 100B, the window component 51 is not provided, and the light incident opening 41a is not covered by the window component 51. The vent 80B is covered by a peelable film 90 bonded to the main body 41. In this example, the film 90 is bonded to the entire end surface 61c of the protrusion 61. In the cross section perpendicular to the reflector 7, the width R1 of the film 90 bonded to the main body 41 is narrower than the width R2 of the light incident opening 41a. The width R1 is narrower than the thickness (minimum thickness) R3 of the side wall 45 of the main body 41.

[0100] As in the above-mentioned embodiment, through the second modified example, it is also possible to ventilate the inside and outside of the package 40 through the vent 80B, and as a result, it is possible to suppress condensation in the package 40. In addition, since the vent 80B is composed of the light incident opening 41a, the vent 80B can be simply formed. In addition, since the light incident opening 41a also serves as the vent 80B, condensation can be effectively suppressed (condensation does not occur itself). In addition, since no element that can reflect light is configured on the optical path of the light incident from the light incident opening 41a to the movable reflector portion 10, the generation of diffuse light can be suppressed. In addition, since the vent 80B is covered by a peelable film 90, dust can be prevented from entering the package 40 from the vent 80B when the reflector assembly 100B is transported. When the reflector assembly 100B is used, the film 90 can be peeled off to open the vent 80B. Furthermore, since the width R1 of the film 90 bonded to the main body 41 is narrower than the width R2 of the light incident opening 41a, the film 90 is easily peeled off and adhesive is not likely to remain on the main body 41. In the second modified example, the projection 61 is not provided, and the film 90 may be bonded to the top surface 45a of the side wall 45 of the main body 41.

[0101] The present disclosure is not limited to the above-mentioned embodiments and modified examples. For example, the materials and shapes of each structure are not limited to the above-mentioned materials and shapes, and various materials and shapes can be used. In the above-mentioned embodiment or the first modified example, the vents 80, 80A may also be covered by a peelable film. The vent 80 may also be composed of a through hole formed in the window member 51. In this case, it can be regarded that the vent 80 is composed of the light incident opening 41a. In the above-mentioned embodiment, the convex portion 63 may not be provided on the top surface 45a of the side wall 45. Even in this case, the vent 80 can be formed by joining a part of the window member 51 to the main body 41, while the remaining part of the window member 51 is not joined to the main body 41. In the above-mentioned embodiment, the protrusion 61 may not be provided on the top surface 45a of the side wall 45. In this case, the vent 80 may also be composed only of the gap G1.

[0102] In the above-mentioned embodiment, the first modification, and the second modification, the minimum width W of the vents 80, 80A, 80B in a predetermined direction (a certain direction) may be smaller than the minimum distance L between the movable mirror portion 10 and the portion whose position is fixed in the mirror assembly 100. That is, in the above-mentioned embodiment, the first modification, and the second modification, the minimum width W of the vents 80, 80A, 80B in all directions perpendicular to the extending direction of the vents 80, 80A, 80B is smaller than the minimum distance L, but the minimum width W of the vents 80, 80A, 80B in at least one direction perpendicular to the extending direction of the vents 80, 80A, 80B may be smaller than the minimum distance L, and the minimum widths of the vents 80, 80A, 80B in other directions perpendicular to the extending direction may not necessarily be smaller than the minimum distance L.

[0103] The main body 41 may accommodate and hold the optical scanning device 1 in such a manner that light incident from the light incident opening 41a can be incident on the optical scanning device 1, and may have any structure. For example, the base portion supporting the optical scanning device 1 may also be configured separately from the side wall 45. In the optical scanning device 1 of the embodiment, the movable reflector portion 10 is driven by an electromagnetic force, but the movable reflector portion 10 may also be driven by an electrostatic force or a piezoelectric element. In the above embodiment, the movable reflector portion 10 is configured to be swingable (movable) around the first axis X1 and the second axis X2, but the movable reflector portion 10 may also be configured to be movable along the optical axis direction A. In the above embodiment, the magnetic field generating portion M is configured inside the package 40, but the magnetic field generating portion M may also be configured outside the package 40.

[0104] Description of Reference Numerals

[0105] 1…optical scanning device (reflector device), 2…support portion, 3…first movable portion, 4…second movable portion, 7…reflector, 10…movable reflector portion, 40…package, 41…main body portion, 41a…light incident opening, 45a…top surface, 51…window component, 63…convex portion (abutting portion), 80, 80A, 80B…vent, 90…membrane, 100, 100A, 100B…reflector assembly, G1…gap (vent 80), G2…gap (vent 80), L…minimum distance, W…minimum width.

Claims

1. A reflector assembly, comprising: A reflector device having a support portion and a movable reflector portion configured to be movable relative to the support portion; as well as a package having a light incident opening and housing and holding the reflector device in such a manner that light incident from the light incident opening can be incident on the movable reflector portion, The package is provided with a vent hole for connecting the inside of the package with the outside. The package comprises: a main body including the light incident opening opened on one side of a predetermined direction and a bottom surface located on the other side of the predetermined direction; and a window member arranged on the main body in a manner covering the light incident opening. The vent is provided on the one side relative to the bottom surface in the predetermined direction.

2. The reflector assembly according to claim 1, wherein: A minimum width of the vent in the predetermined direction is smaller than a minimum distance between the movable mirror portion and a portion of the mirror assembly whose position is fixed.

3. The reflector assembly according to claim 1 or 2, wherein: The movable mirror unit includes a movable portion and a mirror provided on the movable portion. A minimum width of the ventilation opening in the predetermined direction is smaller than a minimum distance between the support portion and the movable portion when viewed from a direction perpendicular to the reflector.

4. The reflector assembly according to any one of claims 1 to 3, wherein: The minimum width of the vent in the predetermined direction is smaller than a minimum distance between the movable mirror portion and a fixed portion of the mirror assembly when the movable mirror portion moves to a maximum position within a movable range relative to the support portion.

5. The reflector assembly according to any one of claims 1 to 4, wherein: The package comprises: a main body provided with the light incident opening and holding the reflector device; and a window member disposed on the main body so as to cover the light incident opening, The vent is formed by a gap between the main body and the window member.

6. The reflector assembly according to claim 5, wherein: A convex portion is provided on the top surface of the main body. The window member is arranged on the top surface so as to be in contact with the convex portion. The gap is formed between the top surface and the window member.

7. The reflector assembly according to any one of claims 1 to 6, wherein: The package comprises: a main body provided with the light incident opening and holding the reflector device; and a window member disposed on the main body so as to cover the light incident opening, The vent is formed by joining a portion of the window member to the main body and leaving the remaining portion of the window member unjoined to the main body.

8. The reflector assembly according to any one of claims 1 to 7, wherein: The vent is formed by the light incident opening.

9. The reflector assembly according to any one of claims 1 to 8, wherein: The vent is covered by a peelable film.

10. The reflector assembly according to claim 1, wherein: The package has a main body portion provided with the light incident opening and holding the reflector device, The vent is formed by the light incident opening, The vent is covered by a peelable film adhered to the main body, The width of the film bonded to the main body is narrower than the width of the light incident opening.

11. The reflector assembly according to any one of claims 1 to 10, wherein: The package has a main body portion provided with the light incident opening and holding the reflector device, In the main body, the light incident opening is opened on one side of the predetermined direction, The main body has a frame-shaped side wall defining a recess, the side wall having a pair of outer surfaces extending along a plane intersecting a first direction, and a pair of outer surfaces extending along a plane intersecting a second direction, the first direction being perpendicular to the prescribed direction, and the second direction being perpendicular to the prescribed direction and the first direction, Each of the pair of outer surfaces extending along a plane intersecting the second direction includes: A first portion extending parallel to the prescribed direction and a second portion extending obliquely with respect to the prescribed direction.

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