Physical property analysis method, physical property analysis specimen, and method for preparing the same

Abstract

The present application discloses a physical property analysis method, a physical property analysis test piece and a preparation method thereof. The preparation method of the physical property analysis test piece includes: providing a test piece to be analyzed; and forming a contrast enhancement layer on the surface of the test piece to be analyzed according to the material of the test piece to be analyzed. The contrast enhancement layer includes a plurality of first material layers and a plurality of second material layers stacked on each other. The materials of the first material layer and the second material layer are different, and the thickness of each layer in the plurality of first material layers and the plurality of second material layers does not exceed 0.1 nm. The difference between the average gray scale value of the surface layer image of the test piece to be analyzed captured by an electron microscope and the average gray scale value of the contrast enhancement layer image is at least 50. The physical property analysis method, the physical property analysis test piece and the preparation method thereof provided by the present application can not only provide protection for the test piece to be analyzed, but also improve the contrast and edge sharpness of the image of the test piece to be analyzed at the edge, so as to save time cost.

Description

Technical Field

[0001] The present application relates to a physical property analysis method, a physical property analysis specimen, and a preparation method thereof, and particularly to a physical property analysis method, a physical property analysis specimen, and a preparation method thereof using an electron microscope. Background Art

[0002] As the size of electronic components (such as integrated circuit components) gradually shrinks, in electronic components, the line width and line pitch of the circuits are getting narrower and narrower, and the manufacturing difficulty is also increasing accordingly. Therefore, the manufacturing process of electronic components will be continuously improved to maintain the process yield of electronic components.

[0003] Since defects may be generated due to process errors during the manufacturing process of electronic components, resulting in a decrease in the yield of electronic components. In order to find out the possible causes of defects and thus improve the process, it is often necessary to use instruments for detection and physical property analysis. Currently, the instruments most commonly used for physical property analysis are mainly electron microscopes, such as transmission electron microscopes (TEM), scanning electron microscopes (SEM), and focused ion beam electron microscopes (FIB).

[0004] Taking the transmission electron microscope (TEM) as an example, it mainly uses an electron beam to form an image. Therefore, samples suitable for detection by a transmission electron microscope (TEM) usually need to be thinned to about 50 - 100 nm. However, the detailed structure of the sample may be damaged during the thinning process, resulting in distorted detection results and making it difficult to find the real cause of the yield decrease. Therefore, before thinning the sample, at least one protective layer will be formed on the surface of the sample to prevent the sample from being damaged during the thinning process.

[0005] However, there are many types of samples, and the sample may include a variety of different materials. Therefore, when using a transmission electron microscope to capture the image of the sample, it may be difficult to distinguish the boundary between the sample and the protective layer because the surface material of the sample is the same as that of the protective layer, or because the color gradation between the sample image and the protective layer image is too similar, increasing the difficulty of image capture. In addition, in the image captured by the transmission electron microscope, the surface topography of the sample is also difficult to identify because the acutance is too low.

[0006] Although, through subsequent image processing, the edge sharpness of the image can be improved, but if the color difference between the sample image and the protective layer image is too small, the improvement effect is very limited. In this way, not only does it take more time for image processing, increasing the time cost of detection and analysis, but the image processing result may also cause image distortion, making it difficult to analyze and find defects in a short time. In view of this, how to improve the physical property analysis method or the physical property analysis specimen preparation method to overcome the above disadvantages is still one of the important issues that the industry currently wants to solve. Summary of the Invention

[0007] The technical problem to be solved by this application is to provide a physical property analysis method, a physical property analysis specimen and a preparation method thereof in view of the deficiencies of the prior art, which can not only protect the specimen to be analyzed, but also improve the contrast and edge sharpness of the image of the specimen to be analyzed at the edge, so as to save time costs.

[0008] To solve the above technical problems, one of the technical solutions adopted by this application is to provide a method for a physical property analysis specimen, which includes: providing a specimen to be analyzed; and forming a contrast enhancement layer on the surface of the specimen to be analyzed according to the material of the specimen to be analyzed, wherein the contrast enhancement layer includes a plurality of first material layers and a plurality of second material layers stacked on top of each other, the materials of the first material layer and the second material layer are different, and the thickness of each layer in the plurality of first material layers and the plurality of second material layers does not exceed 0.1 nm. The difference between the average gray scale value of the surface layer image of the specimen to be analyzed captured by an electron microscope and the average gray scale value of the contrast enhancement layer image is at least 50.

[0009] Furthermore, before forming the contrast enhancement layer, a heat treatment or a surface modification treatment is performed on the specimen to be analyzed.

[0010] Optionally, when performing the surface modification treatment, the specimen to be analyzed is treated with plasma or ultraviolet light.

[0011] Furthermore, the preparation method of the physical property analysis specimen further includes: forming a protective layer on the contrast enhancement layer, and the protective layer is a conductive layer or an insulating layer.

[0012] Furthermore, the thickness range of the contrast enhancement layer is from 2 nm to 30 nm.

[0013] Furthermore, the contrast enhancement layer is formed by atomic layer deposition process, and the process temperature is 40 °C to 200 °C.

[0014] Furthermore, the material of the first material layer is an oxide, carbide, nitride or oxynitride of a first element, the material of the second material layer is an oxide, carbide, nitride or oxynitride of a second element, and the difference between the atomic number of the first element and the atomic number of the second element is at least greater than 20.

[0015] Furthermore, each of the first element and the second element is selected from one of the groups consisting of metal elements, non-metal elements and any combination thereof.

[0016] Furthermore, the metal element is aluminum, hafnium, titanium, platinum, indium, tin, zirconium, gallium, molybdenum or tantalum, and the non-metal element is selected from silicon, boron, selenium, tellurium or arsenic.

[0017] Further, the contrast enhancement layer is formed by an atomic layer deposition process, and the steps of forming the contrast enhancement layer by an atomic layer deposition process include: placing a test piece to be analyzed into a coating cavity; sequentially introducing and exhausting a first element precursor gas, a purge gas, and a first reaction gas into the coating cavity to form one layer of the first material layer; sequentially introducing and exhausting a second element precursor gas, a purge gas, and a second reaction gas into the coating cavity to form one layer of the second material layer; wherein, the first element precursor gas, the purge gas, the first reaction gas, the second element precursor gas, and the second reaction gas are all exhausted out of the coating cavity through an exhaust pipeline at an exhaust rate, and the exhaust rate is at least 8 times the supply rate of the first reaction gas and the supply rate of the second reaction gas.

[0018] Further, the first reaction gas and the second reaction gas are the same, and both are introduced into the coating cavity through a reaction gas supply pipeline, and the ratio range between the supply rate of the first element precursor gas and the supply rate of the first reaction gas is from 0.7 to 1.5, or the ratio range between the supply rate of the second element precursor gas and the supply rate of the second reaction gas is from 0.7 to 1.5.

[0019] To solve the above technical problems, another technical solution adopted by this application is to provide a physical property analysis test piece, which includes: a test piece to be analyzed and a contrast enhancement layer. The contrast enhancement layer is disposed on the surface of the test piece to be analyzed, and includes a plurality of first material layers and a plurality of second material layers stacked on each other. The materials of the first material layer and the second material layer are different, and the thickness of each layer in the plurality of first material layers and the plurality of second material layers does not exceed 0.1 nm. The difference between the average gray scale value of the surface layer image of the test piece to be analyzed captured by an electron microscope and the average gray scale value of the contrast enhancement layer image is at least 50.

[0020] Further, the physical property analysis test piece further includes: a protective layer, which is disposed on the contrast enhancement layer, wherein the protective layer is a conductive layer or an insulating layer.

[0021] Further, the thickness range of the contrast enhancement layer is from 2 nm to 30 nm. Optionally, the contrast enhancement layer is an atomic layer deposition film layer.

[0022] Further, the material of the first material layer is an oxide, carbide, nitride, or oxynitride of a first element, the material of the second material layer is an oxide, carbide, nitride, or oxynitride of a second element, and the difference between the atomic number of the first element and the atomic number of the second element is at least greater than 20.

[0023] Further, the first element and the second element are each selected from one of the groups consisting of metal elements, non-metal elements, and any combination thereof. Optionally, the metal element is aluminum, hafnium, titanium, platinum, indium, tin, zirconium, gallium, molybdenum, or tantalum, and the non-metal element is selected from silicon, boron, selenium, tellurium, or arsenic.

[0024] To solve the above technical problems, another technical solution adopted in this application is to provide a physical property analysis method. First, a physical property analysis specimen is made, and the steps of making the physical property analysis specimen include: providing a specimen to be analyzed, and forming a contrast enhancement layer on the surface of the specimen to be analyzed according to the material of the specimen to be analyzed. After that, an image of the physical property analysis specimen is captured, wherein the image of the physical property analysis specimen includes a contrast enhancement layer image and a specimen image to be analyzed. The difference between the average gray scale value of the contrast enhancement layer image and the average gray scale value of the surface layer image of the specimen to be analyzed is at least 50.

[0025] Further, the contrast enhancement layer is a composite film layer, which includes a plurality of first material layers and a plurality of second material layers stacked on each other. The materials of the first material layer and the second material layer are different, and the thickness of each layer in the plurality of first material layers and the plurality of second material layers does not exceed 0.1 nm.

[0026] Further, the material of the first material layer is an oxide, carbide, nitride, or oxynitride of a first element, the material of the second material layer is an oxide, carbide, nitride, or oxynitride of a second element, and the difference between the atomic numbers of the first element and the second element is at least greater than 20.

[0027] Further, the physical property analysis method further includes: establishing a gray scale value database, wherein the gray scale value database at least includes the correspondence between the material of the specimen to be analyzed and the average gray scale value of the image of the specimen to be analyzed, and the correspondence between the material of the contrast enhancement layer and the average gray scale value of the contrast enhancement layer image.

[0028] Further, the contrast enhancement layer is a composite film layer, which includes a plurality of first material layers and a plurality of second material layers stacked on each other, and the correspondence between the material of the contrast enhancement layer and the gray scale value of the contrast enhancement layer image is the correspondence between the gray scale value of the contrast enhancement layer image and the number of first material layers or the number of second material layers. The physical property analysis method further includes: before the step of forming the contrast enhancement layer, referring to the gray scale value database to determine the ratio of the number of first material layers to the number of second material layers, so that the difference between the gray scale value of the contrast enhancement layer image and the gray scale value of the specimen image to be analyzed is at least 50.

[0029] Further, when capturing the cross-sectional image of the physical property analysis specimen, a transmission electron microscope is used for capturing.

[0030] Furthermore, the step of fabricating the physical property analysis specimen further includes: forming a protective layer on the contrast enhancement layer, and the protective layer is a conductive layer or an insulating layer.

[0031] Furthermore, the step of fabricating the physical property analysis specimen further includes: performing a heat treatment or a surface modification treatment on the specimen to be analyzed before forming the contrast enhancement layer.

[0032] Furthermore, the contrast enhancement layer is formed by an atomic layer deposition process, and the step of forming the contrast enhancement layer by the atomic layer deposition process includes: placing the specimen to be analyzed in a coating chamber; sequentially introducing and exhausting a first element precursor gas, a purge gas, and a first reaction gas in the coating chamber to form one layer of a first material layer; sequentially introducing and exhausting a second element precursor gas, a purge gas, and a second reaction gas in the coating chamber to form one layer of a second material layer; wherein, the first element precursor gas, the purge gas, the first reaction gas, the second element precursor gas, and the second reaction gas are all exhausted outside the coating chamber through an exhaust pipeline at an exhaust rate, and the exhaust rate is at least more than 8 times the rate of any reaction gas introduced into the coating chamber.

[0033] Furthermore, the first reaction gas is the same as the second reaction gas, and both are introduced into the coating chamber through a reaction gas supply pipeline, and the ratio between the supply rate of the first element precursor gas and the supply rate of the first reaction gas or the ratio between the supply rate of the second element precursor gas and the supply rate of the second reaction gas ranges from 0.7 to 1.5.

[0034] One beneficial effect of the present application is that the physical property analysis method, the physical property analysis specimen, and its preparation method provided by the present application can, through the technical solutions of "forming a contrast enhancement layer on the surface of the specimen to be analyzed" and "the difference between the average gray scale value of the surface image of the specimen to be analyzed captured by an electron microscope and the average gray scale value of the contrast enhancement layer image is at least 50", the contrast enhancement layer can not only protect the specimen to be analyzed, but also improve the contrast and edge sharpness of the image of the specimen to be analyzed at the edge, thereby reducing the time cost of detection and analysis.

[0035] To further understand the features and technical content of the present application, please refer to the following detailed description and drawings of the present application. However, the provided drawings are only for reference and illustration purposes and are not used to limit the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a flowchart of the physical property analysis method of one embodiment of the present application.

[0037] Figure 2This is a partial cross-sectional schematic diagram of the test piece to be analyzed in the embodiment of the present application.

[0038] Figure 3 This is a partial cross-sectional schematic diagram of the physical property analysis test piece in one embodiment of the present application.

[0039] Figure 4 Is Figure 3 A partial enlarged schematic diagram in region IV.

[0040] Figure 5 This is a partial enlarged schematic diagram of the comparative strengthening layer in another embodiment of the present application.

[0041] Figure 6 This is a partial enlarged schematic diagram of the comparative strengthening layer in yet another embodiment of the present application.

[0042] Figure 7 This is a transmission electron microscope photograph of the comparative strengthening layer in different embodiments of the present application.

[0043] Figure 8 This is a partial cross-sectional schematic diagram of the physical property analysis test piece in another embodiment of the present application.

[0044] Figure 9 This is a transmission electron microscope photograph of the physical property analysis test piece in yet another embodiment of the present application.

[0045] Figure 10 This is a transmission electron microscope photograph of the physical property analysis test piece in yet another embodiment of the present application. Detailed implementation manners

[0046] The following are specific examples to illustrate the implementation manners of the present application regarding "physical property analysis method, physical property analysis test piece and its preparation method". Those skilled in the art can understand the advantages and effects of the present application from the content disclosed in this specification. The present application can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present application. Additionally, the drawings of the present application are only simple schematic illustrations and are not drawn according to actual sizes, which is stated in advance. The following implementation manners will further elaborate on the relevant technical content of the present application, but the disclosed content is not used to limit the protection scope of the present application. Additionally, the term "or" used herein should, depending on the actual situation, possibly include any one or a combination of more of the related listed items.

[0047] [First Embodiment]

[0048] Refer to Figure 1, an embodiment of the present application provides a physical property analysis method. The aforementioned physical property analysis method can be performed using an electron microscope. The electron microscope is, for example, a transmission electron microscope (TEM), a scanning electron microscope (SEM), or a focused ion beam electron microscope (FIB), which is not limited in the present application. In step S1, a physical property analysis specimen is prepared. In the embodiment of the present application, the step of preparing the physical property analysis specimen at least includes: in step S11, providing a specimen to be analyzed; and in step S12, forming a contrast enhancement layer on the surface of the specimen to be analyzed according to the material of the specimen to be analyzed. The following details the method for preparing the physical property analysis specimen in the embodiment of the present application.

[0049] The physical property analysis method in the embodiment of the present application further includes: in step S2, capturing an image of the physical property analysis specimen, wherein the image of the physical property analysis specimen includes a contrast enhancement layer image and a specimen image to be analyzed, and the difference between the average gray scale value of the contrast enhancement layer image and the average gray scale value of the surface layer image of the specimen to be analyzed is at least 50. Specifically, the image of the physical property analysis specimen can be captured by an electron microscope to perform physical property analysis on the specimen to be analyzed.

[0050] The following will further illustrate the method for preparing the physical property analysis specimen in the embodiment of the present application and the detailed process of the physical property analysis method.

[0051] Please refer to Figure 2 , which shows a partial cross-sectional schematic diagram of the specimen to be analyzed in one embodiment of the present application. The specimen to be analyzed 1 can be a semi-finished or finished product of a semiconductor component. For example, the specimen to be analyzed 1 is, for example, a transistor element, a diode element, a laser element, a light-emitting diode element, a resistor element, an inductor element, an integrated circuit element formed by any combination thereof, or a semi-finished product during the manufacturing process of the foregoing various elements, which is not limited in the present application.

[0052] The specimen to be analyzed 1 in this embodiment includes a substrate 10 and a plurality of microstructures 11 located on the substrate 10. Accordingly, the surface 1s of the specimen to be analyzed 1 in this embodiment is not a flat surface. The width of each microstructure 11 or the spacing between any two adjacent microstructures 11 can be in the micron or nanometer range. In addition, the aforementioned microstructures 11 can be the circuits of an integrated circuit element, the gates of transistor elements, the three-dimensional structures of fin field-effect transistors, or a microlens array, etc., which is not limited in the present application. In some cases, when performing physical property analysis on the specimen to be analyzed 1, it is to detect whether there are defects in the microstructures 11 to determine whether the process flow used to form the microstructures 11 needs to be improved.

[0053] It should be noted that the test piece 1 to be analyzed in this embodiment is only used for illustration to explain the physical property analysis method and the manufacturing method of the physical property analysis test piece of the present application, and is not used to limit the present application. The structure of the test piece 1 to be analyzed will vary according to the type of component to be manufactured. That is to say, the structure of the test piece 1 to be analyzed may be simpler or more complex. For example, the test piece 1 to be analyzed does not necessarily have the microstructure 11 and only includes the substrate 10. In another embodiment, in addition to having the microstructure 11, the test piece 1 to be analyzed may further include one or more film layers covering the substrate 10 and the microstructure 11, which is not limited in the present application. In addition, Figure 2 the cross-sectional shape of the microstructure 11 shown in [Figure] has been simplified for ease of illustration and is not used to limit the present application. Accordingly, each microstructure 11 may have other shapes.

[0054] In one embodiment, the material of the substrate 10 is different from that of the microstructure 11. The materials of the substrate 10 and the microstructure 11 may each be selected from the group consisting of metal materials, semiconductor materials, glass, ceramic materials, plastic materials, and any combination thereof. Among them, semiconductor materials are, for example, silicon, germanium, silicon carbide, gallium arsenide, gallium nitride, indium gallium nitride, aluminum gallium nitride, and the like. In another embodiment, the material of the microstructure 11 may also be the same as that of the substrate 10, which is not limited in the present application.

[0055] Please refer to Figure 1 step S12 of [Figure] and refer to Figure 3 , Figure 3 is a partial cross-sectional schematic diagram of the physical property analysis test piece of one embodiment of the present application. The contrast enhancement layer 2 is formed on the surface 1s of the test piece 1 to be analyzed. In this embodiment, the contrast enhancement layer 2 conformally covers the surface 1s of the test piece 1 to be analyzed to protect the test piece 1 to be analyzed. In addition, when detecting the physical property analysis test piece M1, the contrast enhancement layer 2 can be used to increase the contrast and sharpness of the test piece 1 to be analyzed at the edge. In one embodiment, the thickness range of the contrast enhancement layer 2 is from 2 nm to 30 nm.

[0056] It should be noted first that when capturing an image of the physical property analysis test piece M1 with an electron microscope (such as a transmission electron microscope), in the image of the physical property analysis test piece M1, the difference between the average gray scale value of the image of the contrast enhancement layer 2 and the average gray scale value of the surface layer image of the test piece 1 to be analyzed is at least 50. It should be noted first that the image captured by the electron microscope is usually a gray scale image. The brightness of each pixel in the gray scale image can be represented by 2n bits, where n is a positive integer. In this embodiment, 8 bits (i.e., n = 4) can be used to represent the gray scale value of each pixel, and the gray scale value range is from 0 (black) to 255 (white).

[0057] In addition, the average gray scale value of the aforementioned contrast enhancement layer 2 image refers to the average value of the gray scale values of multiple pixels in the contrast enhancement layer 2 image. For example, assuming that there are X pixels P1 to Px in the contrast enhancement layer 2 image, and the gray scale values of the X pixels P1 to Px are G1 to Gx respectively, then the average gray scale value G can be expressed by the following relational expression: G = (G1 + G2 + G3 +... + Gx) / X, but the present application is not limited thereto. In other embodiments, other algorithms may also be used according to actual applications to obtain the average value of the gray scale values. The aforementioned average value is, for example, a geometric mean, a harmonic mean, a geometric-harmonic mean, an arithmetic-geometric mean, and the like.

[0058] Similarly, the average gray scale value of the surface layer image of the aforementioned test piece 1 to be analyzed refers to the average value of the gray scale values of multiple pixels in the surface layer image of the test piece 1 to be analyzed. In addition, the surface layer of the aforementioned test piece 1 to be analyzed refers to the range from the surface of the test piece 1 to the interior of about 2 to 20 nm. When the difference between the average gray scale value of the contrast enhancement layer 2 image and the average gray scale value of the surface layer image of the test piece 1 to be analyzed is 50, the images of the test piece 1 to be analyzed and the contrast enhancement layer 2 can be recognized by the human eye in the image of the physical property analysis test piece M1.

[0059] Furthermore, in the present application, the material of the contrast enhancement layer 2 will be selected according to the surface layer material of the test piece 1 to be analyzed, so that the images of the test piece 1 to be analyzed and the contrast enhancement layer 2 can be clearly distinguished in the image of the physical property analysis test piece M1. Specifically, regardless of the gray scale value of the contrast enhancement layer 2 image or the surface layer image of the test piece 1 to be analyzed, it is related to the atomic number of the elements it contains. That is to say, the larger the atomic number of the elements contained in the contrast enhancement layer 2 or the surface layer of the test piece 1 to be analyzed, the lower the gray scale value of most of the pixels captured by the electron microscope (such as a transmission electron microscope) in the contrast enhancement layer 2 image or the surface layer of the test piece 1 to be analyzed, and the darker the color. Therefore, if the material of the test piece 1 to be analyzed contains elements with a large atomic number, and a surface layer image of the test piece 1 to be analyzed with a darker color (including more pixels with low gray scale values) will be obtained in subsequent physical property analysis, the material of the contrast enhancement layer 2 preferably contains elements with a small atomic number to obtain a contrast enhancement layer 2 image with a lighter color (or including more pixels with high gray scale values).

[0060] In one embodiment, the material of the contrast enhancement layer 2 may be an oxide, nitride, or oxynitride of a metal element, or an oxide, carbide, nitride, or oxynitride of a non-metal element. The metal element is, for example, aluminum, hafnium, titanium, platinum, indium, tin, zirconium, gallium, molybdenum, or tantalum, and the non-metal element is silicon, boron, selenium, tellurium, or arsenic, but the present application is not limited thereto. As long as the average gray scale value of the image of the contrast enhancement layer 2 differs from the average gray scale value of the surface image of the test piece 1 to be analyzed by 50, so that the boundary between the test piece 1 to be analyzed and the contrast enhancement layer 2 can be recognized by the human eye, the present application does not limit the material of the contrast enhancement layer 2. However, in this embodiment, it may be necessary to prepare a variety of precursor gases or raw materials for forming the contrast enhancement layer 2 to match the test piece 1 of different materials.

[0061] Accordingly, in another embodiment, the contrast enhancement layer 2 may include at least two materials, and one of the two materials contains an element with a larger atomic number, and the other contains an element with a smaller atomic number. By adjusting the ratio of the at least two materials, the average gray scale value of the image of the contrast enhancement layer 2 can be adjusted.

[0062] Please refer to Figure 4 , Figure 4 For Figure 3 a partial enlarged schematic view of region IV. In this embodiment, the contrast enhancement layer 2 is a composite film layer, which includes a plurality of first material layers 21 and a plurality of second material layers 22 stacked on each other, and the materials of the first material layer 21 and the second material layer 22 are different. Further, one of the first material layer 21 and the second material layer 22 may contain an element with a smaller atomic number, and the other contains an element with a larger atomic number, but the present application is not limited thereto.

[0063] In one embodiment, the material of the first material layer 21 is an oxide, nitride, or oxynitride of a first element, and the material of the second material layer 22 is an oxide, nitride, or oxynitride of a second element. The first element and the second element are each selected from one of the groups consisting of metal elements, non-metal elements, and any combination thereof. The metal element is, for example, aluminum, hafnium, titanium, platinum, indium, tin, zirconium, gallium, molybdenum, or tantalum, and the non-metal element is silicon, boron, selenium, tellurium, or arsenic, but the present application is not limited thereto.

[0064] The thickness of each first material layer 21 and each second material layer 22 does not exceed 0.1 nm. In addition, each first material layer 21 (or second material layer 22) may include multiple monolayers. In one embodiment, each first material layer 21 includes 1 to 3 single-atom layers, and each second material layer 22 includes 1 to 3 single-atom layers.

[0065] It should be noted that although Figure 4As shown, multiple first material layers 21 and second material layers 22 are stacked on top of each other. However, in reality, since each first material layer 21 and each second material layer 22 are very thin, it is difficult to observe the boundary or obvious stratification between the first material layer 21 and the second material layer 22 under existing electron microscopes at magnifications lower than a specific magnification (e.g., 800K times) or resolutions lower than 4K.

[0066] It should be noted that in one embodiment, the number of layers of the first material layer 21 is correlated with the concentration of the first element, and the number of layers of the second material layer 22 is positively correlated with the concentration of the second element. Since the materials of the first material layer 21 and the second material layer 22 contain elements with different atomic numbers respectively, when subsequently using an electron microscope, such as a transmission electron microscope, to capture an image of the physical property analysis specimen M1, the number of layers of the first material layer 21 and the number of layers of the second material layer 22 will affect the average gray scale value of the contrast enhancement layer 2 image.

[0067] That is to say, in the embodiment of the present application, by alternately forming multiple first material layers 21 and multiple second material layers 22, the gray scale effect of the image of the contrast enhancement layer 2 captured during subsequent physical property analysis is adjusted in terms of overall visual perception. In this way, by changing the ratio between the number of layers of the first material layer 21 and the number of layers of the second material layer 22 in the contrast enhancement layer 2, a contrast enhancement layer 2 image with different average gray scale values can be obtained. Further, this embodiment applies the concept similar to the halftone technology. By changing the number of layers and the stacking method of the first material layer 21 and the second material layer 22, the overall gray scale effect of the captured contrast enhancement layer 2 image can be changed visually.

[0068] Accordingly, in this embodiment, there is no need to prepare multiple precursor gases or raw materials to match different types of specimens 1 to be analyzed. Instead, only the precursor gases or raw materials used to form two or three specific materials need to be prepared, and a contrast enhancement layer 2 that can enhance the edge contrast and sharpness of the image of the specimen 1 to be analyzed can be produced for specimens 1 made of different materials.

[0069] In other words, for two test pieces 1 to be analyzed that are respectively composed of different materials, the two contrast enhancement layers 2 to be formed may contain the same materials, but the proportions of these materials in the two contrast enhancement layers 2 will be different. Assume that the first material layer 21 of the contrast enhancement layer 2 is an alumina layer, and the second material layer 22 is a hafnium oxide layer. For example, when the material of the test piece 1 to be analyzed is silicon dioxide, most of the pixels in the surface image of the test piece 1 to be analyzed have relatively high gray-scale values and are lighter in color. Accordingly, the number of layers of the second material layer 22 (hafnium oxide layer) in the contrast enhancement layer 2 can be increased, that is, the proportion of hafnium element in the contrast enhancement layer 2 is increased, and the multiple second material layers 22 are dispersedly located at different positions in the contrast enhancement layer 2 instead of being concentrated in a specific area, so that most of the pixels in the image of the entire contrast enhancement layer 2 have relatively low gray-scale values, thereby reducing the average gray-scale value. In this way, the color of the image of the contrast enhancement layer 2 (the overall gray-scale degree is relatively low) will visually be darker than the color of the surface image of the test piece 1 to be analyzed (the overall gray-scale degree), thus highlighting the edge contour of the image of the test piece 1 to be analyzed.

[0070] For example, when the material of the test piece 1 to be analyzed is silicon, most of the pixels in the image of the test piece 1 to be analyzed have relatively low gray-scale values and are darker in color. Accordingly, the number of layers of the first material layer 21 (alumina layer) in the contrast enhancement layer 2 can be increased, that is, the proportion of aluminum element in the contrast enhancement layer 2 is increased, and the multiple first material layers 21 are dispersedly located at different positions in the contrast enhancement layer 2, so that most of the pixels in the image of the contrast enhancement layer 2 have relatively high gray-scale values, thereby increasing the average gray-scale value of the image of the contrast enhancement layer 2 and making the color of the image of the contrast enhancement layer 2 visually lighter than the color of the surface image of the test piece 1 to be analyzed.

[0071] It is worth mentioning that in one embodiment, the difference between the atomic number of the first element of the first material layer 21 and the atomic number of the second element of the second material layer 22 is at least greater than 20. In a preferred embodiment, the difference between the atomic number of the first element and the atomic number of the second element is greater than 40. In yet another preferred embodiment, the difference between the atomic number of the first element and the atomic number of the second element is greater than 70. The greater the difference between the atomic number of the first element and the atomic number of the second element, the wider the range within which the average gray-scale value of the image of the contrast enhancement layer 2 can be adjusted.

[0072] For example, if the first material layer 21 is an alumina layer and the second material layer 22 is a hafnium oxide layer, the difference between the atomic number of the first element (aluminum) and the atomic number of the second element (hafnium) is 59. By adjusting the ratio of the first material layer 21 to the second material layer 22, the range within which the average gray-scale value of the image of the contrast enhancement layer 2 can be adjusted is from 0 to 150.

[0073] However, the contrast enhancement layer 2 of the embodiments of the present application may further include a third material layer. By adjusting the proportions of the first material layer 21, the second material layer 22, and the third material layer, the gray scale value of the image of the contrast enhancement layer 2 is also adjusted.

[0074] In addition, it should be noted that although Figure 4 shows that the first material layer 21 is connected to the surface of the test piece 1 to be analyzed, there is a second material layer 22 between any two closest first material layers 21, and there is a first material layer 21 between any two closest second material layers 22, the present application is not limited thereto.

[0075] Please refer to Figure 5 , Figure 5 which is a partial enlarged schematic diagram of the contrast enhancement layer of another embodiment of the present application. Components of this embodiment that are the same as those of the Figure 4 embodiment have the same reference numerals, and the same parts will not be described again. In the contrast enhancement layer 2 of this embodiment, the number of layers of the first material layer 21 is greater than the number of layers of the second material layer 22. Specifically, in the contrast enhancement layer 2 of this embodiment, one layer of the second material layer 22 is formed only after every two layers of the first material layer 21 are formed, but the present application is not limited thereto. In other embodiments, it may also be that two layers of the second material layer 22 are formed after every three layers of the first material layer 21 are formed.

[0076] When the atomic number of the first element of the first material layer 21 is less than the atomic number of the second element of the second material layer 22, compared with the Figure 4 embodiment, Figure 5 in the image of the contrast enhancement layer 2 of

[0077] Please refer to Figure 6 , Figure 6 which is a partial enlarged schematic diagram of the contrast enhancement layer of yet another embodiment of the present application. Components of this embodiment that are the same as those of the Figure 4 embodiment have the same reference numerals, and the same parts will not be described again. In the contrast enhancement layer 2 of this embodiment, the number of layers of the first material layer 21 is less than the number of layers of the second material layer 22. Specifically, in the contrast enhancement layer 2 of this embodiment, one layer of the first material layer 21 is formed only after every two layers of the second material layer 22 are formed, and the second material layer 22 is connected to the surface 1s of the test piece 1 to be analyzed, but the present application is not limited thereto.

[0078] When the atomic number of the first element of the first material layer 21 is less than the atomic number of the second element of the second material layer 22, compared with the Figure 4 embodiment, Figure 6In the image of the contrast enhancement layer 2, the gray scale values of most pixels are relatively low, and it has a darker color (or a lower average gray scale value).

[0079] Based on the above, after selecting the materials of the first material layer 21 and the second material layer 22, by adjusting the number of layers of the first material layer 21 and the second material layer 22 in the contrast enhancement layer 2, the average gray scale value of the contrast enhancement layer 2 can be changed, so as to be applicable to different test specimens 1 to be analyzed.

[0080] It is worth mentioning that the physical property analysis method of the embodiment of the present application may further include: establishing a gray scale value database. The gray scale value database may include the correspondence between the material of the test specimen 1 to be analyzed and the average gray scale value of the image of the test specimen 1 to be analyzed, as well as the correspondence between the material of the contrast enhancement layer 2 and the average gray scale value of the image of the contrast enhancement layer 2. For example, the gray scale value database may include two different comparison tables, comparison charts or combinations thereof to present the above two correspondences, but the present application is not limited thereto.

[0081] Furthermore, when the contrast enhancement layer 2 is a composite film layer and at least includes the first material layer 21 and the second material layer 22, the correspondence between the material of the contrast enhancement layer 2 and the average gray scale value of the image of the contrast enhancement layer 2 may refer to the correspondence between the average gray scale value of the image of the contrast enhancement layer 2 and the number of layers of the first material layer 21 or the number of layers of the second material layer 22, or the correspondence between the average gray scale value of the image of the contrast enhancement layer 2 and the concentration of the first element or the concentration of the second element.

[0082] Hereinafter, taking the first material layer 21 as an alumina layer and the second material layer 22 as a hafnium oxide layer as an example to illustrate the correspondence between the average gray scale value of the image of the contrast enhancement layer 2 and the concentration of the first element or the second element, but the present application is not limited thereto. The image of the contrast enhancement layer 2 can be captured by an electron microscope, such as: a transmission electron microscope, a scanning electron microscope or a focused ion beam electron microscope. In the present application, taking the transmission electron microscope image as an example, one example of the gray scale value database is illustrated.

[0083] Please refer to Figure 7 , Figure 7 is the transmission electron microscope photograph of the contrast enhancement layer of different embodiments of the present application. In addition, please refer to Table 1 below, which respectively shows the ratio between the number of aluminum layers and the number of hafnium layers in the contrast enhancement layers 2A to 2E of Figure 7 and the range of the average gray scale values respectively corresponding to the images of the contrast enhancement layers 2A to 2E. The number of aluminum layers is positively correlated with the aluminum concentration, and the number of hafnium layers is positively correlated with the hafnium concentration.

[0084] Table 1:

[0085] Number of Aluminum (Al) Layers: Number of Hafnium (Hf) Layers Average Grayscale Value Range Contrast Enhancement Layer 2A 1:0 125-150 Contrast Enhancement Layer 2B 3:1 100-125 Contrast Enhancement Layer 2C 1:1 75-100 Contrast Enhancement Layer 2D 1:3 50-75 Contrast Enhancement Layer 2E 0:1 0-25

[0086] With reference to the above table and Figure 7 It can be seen that when the number of hafnium layers in the contrast enhancement layer 2A is zero, a relatively large portion of the pixels in the image of the contrast enhancement layer 2A have a relatively high gray scale value. Therefore, the image of the contrast enhancement layer 2A has the highest average gray scale value and appears lighter in color. As the ratio between the number of hafnium layers and the number of aluminum layers increases, the average gray scale value gradually decreases. Accordingly, a relatively large portion of the pixels in the image of the contrast enhancement layer 2E have a relatively low gray scale value. Therefore, the image of the contrast enhancement layer 2E has the lowest average gray scale value and appears darker in color.

[0087] Similarly, when the first material layer 21 and the second material layer 22 are other types of materials, by capturing images of the contrast enhancement layer 2 with different compositions using an electron microscope, the average gray scale values corresponding to the contrast enhancement layer 2 with different compositions can be obtained, and then a gray scale value database can be established. Accordingly, before the step (S12) of forming the contrast enhancement layer 2, according to the gray scale value database, the ratio of the number of layers of the first material layer to the number of layers of the second material layer can be determined so that the difference between the average gray scale value of the image of the contrast enhancement layer 2 and the gray scale value of the surface image of the test piece 1 to be analyzed is at least 50.

[0088] In one embodiment, the contrast enhancement layer 2 can be formed by an atomic layer deposition process. That is to say, the contrast enhancement layer 2 is an atomic layer deposition film layer. As mentioned above, the size of each microstructure 11 of the test piece 1 to be analyzed may be in the micrometer or nanometer range. Compared with using other chemical vapor deposition processes or physical vapor deposition processes, the contrast enhancement layer 2 formed by the atomic layer deposition process will have a higher step coverage rate and better thickness uniformity. In this way, it can be avoided that due to poor step coverage rate, the surface contour of the test piece 1 to be analyzed cannot be clearly identified when detecting the physical property analysis test piece.

[0089] In a preferred embodiment, step S1 of fabricating the physical property analysis specimen may further include: before forming the contrast enhancement layer 2, performing a heat treatment or a surface modification treatment on the specimen to be analyzed 1. The aforementioned surface modification treatment is, for example, using plasma or ultraviolet light to perform surface modification on the surface 1s of the specimen to be analyzed 1, so as to form free radicals on the surface 1s of the specimen to be analyzed 1, such as: oxygen radicals, nitrogen radicals or hydroxyl radicals, which helps to generate chemical reactions and reduce the process temperature of the atomic layer deposition process. In one embodiment, when performing the atomic layer deposition process to form the contrast enhancement layer 2, the process temperature is 40°C to 200°C. In addition, after performing the surface modification treatment and then forming the contrast enhancement layer 2, the adhesion of the contrast enhancement layer 2 can also be improved.

[0090] In this embodiment, the steps of forming the contrast enhancement layer 2 by using the atomic layer deposition process include: placing the specimen to be analyzed 1 into a coating cavity; sequentially introducing and exhausting a first elemental precursor gas, a purge gas, and a first reaction gas in the coating cavity to form one layer of the first material layer 21; sequentially introducing and exhausting a second elemental precursor gas, a purge gas, and a second reaction gas in the coating cavity to form one layer of the second material layer 22.

[0091] Specifically, taking the formation of Figure 4 the contrast enhancement layer 2 as an example, after placing the specimen to be analyzed 1 into the coating cavity and evacuating the coating cavity, the order of introducing gases into the coating cavity is: (1) the first elemental precursor gas; (2) the purge gas; (3) the first reaction gas; (4) the purge gas; (5) the second elemental precursor gas; (6) the purge gas; (7) the second reaction gas; and (8) the purge gas, so as to form at least one layer of the first material layer 21 and at least one second material layer 22. Then, repeat the aforementioned order of (1) to (8) to alternately form the first material layer 21 and the second material layer 22 until the thickness of the contrast enhancement layer 2 reaches a predetermined value.

[0092] It should be noted that when sequentially introducing the first elemental precursor gas, the purge gas, the first reaction gas, the second elemental precursor gas or the second reaction gas, a suction pipeline is also used to exhaust the remaining gas introduced into the coating cavity outside the coating cavity. In the embodiment of the present application, by increasing the diameter of the suction pipeline, the pumping rate is increased. Further, by increasing the diameter of the suction pipeline, the pumping rate is at least 8 times more than the supply rate of the reaction gas (the first or second reaction gas).

[0093] In addition, taking the first material layer 21 as an alumina layer and the second material layer 22 as a hafnium oxide layer as an example, the first reaction gas is the same as the second reaction gas. In one embodiment, the first reaction gas and the second reaction gas can be introduced into the coating cavity through the same reaction gas supply pipeline. In the embodiment of the present application, by increasing the diameter of the reaction gas supply pipeline, the supply amount of the first reaction gas or the second reaction gas per unit time is increased. In a preferred embodiment, the ratio range between the supply rate of the first element precursor gas and the supply rate of the first reaction gas is from 0.7 to 1.5, or the ratio range between the supply rate of the second element precursor gas and the supply rate of the second reaction gas reaches from 0.7 to 1.5. In this way, not only can the coating rate be increased, but also the pollution of the coating cavity during the coating process can be reduced.

[0094] In addition, in the embodiment of the present application, the step (S1) of preparing the physical property analysis test piece may further include: forming a protective layer on the contrast enhancement layer.

[0095] Please refer to Figure 8 , Figure 8 which is a partial cross-sectional schematic diagram of the physical property analysis test piece according to another embodiment of the present application. Compared with the physical property analysis test piece M1 of the previous embodiment, the physical property analysis test piece M2 of this embodiment further includes a protective layer 3, which is disposed on the contrast enhancement layer 2 to further protect the test piece 1 to be analyzed. The protective layer 3 can be a conductive layer or an insulating layer. Further, the material of the protective layer 3 is, for example, but not limited to, aluminum, alumina, epoxy resin, and the like. In one embodiment, the protective layer 3 is a conductive layer, which can avoid electrostatic accumulation and damage the physical property analysis test piece M2.

[0096] The thickness of the protective layer 3 is greater than the thickness of the contrast enhancement layer 2. In one embodiment, the thickness of the protective layer 3 is between 100 nm and 3 μm. In addition, the protective layer 3 can be formed on the contrast enhancement layer 2 by existing processes such as physical vapor deposition, chemical vapor deposition, coating, etc., and the present application is not limited.

[0097] Please refer to Figure 9 , which shows a transmission electron microscope photograph of the physical property analysis test piece according to another embodiment of the present application. As described above, the material of the contrast enhancement layer 2 can include only oxides, nitrides, or oxynitrides of a single element, or oxides, nitrides, or oxynitrides containing two or more elements. As long as the average gray scale value of the image of the contrast enhancement layer 2 differs from the average gray scale value of the surface image of the test piece 1 to be analyzed by 50, the effects of the present application can be achieved. In this embodiment, the material of the test piece 1 to be analyzed is silicon, and the material of the contrast enhancement layer 2 is titanium oxide (TiO x ). Figure 9As can be seen from the transmission electron microscope photograph shown, most of the pixels of the surface image of the test piece 1 to be analyzed have a low gray-scale value and are darker in color, while most of the pixels of the image of the contrast enhancement layer 2 have a high gray-scale value and are lighter in color, so as to enhance the edge contrast and edge sharpness of the test piece 1 to be analyzed.

[0098] Please refer to Figure 10 , Figure 10 , which is a transmission electron microscope photograph of a physical property analysis test piece according to another embodiment of the present application. In this embodiment, the material of the test piece 1 to be analyzed is silicon oxide, and the material of the contrast enhancement layer 2 is hafnium oxide (HfO x ). As can be seen from the transmission electron microscope photograph shown Figure 10 , most of the pixels of the image of the test piece 1 to be analyzed have a high gray-scale value and are lighter in color, while most of the pixels of the image of the contrast enhancement layer 2 have a low gray-scale value and are darker in color, so as to enhance the edge contrast and edge sharpness of the test piece 1 to be analyzed.

[0099] [Advantages of the Embodiment]

[0100] One of the advantages of the present application is that the physical property analysis method, the physical property analysis test piece and the preparation method thereof provided by the present application can, through the technical solutions of "forming a contrast enhancement layer 2 on the surface of the test piece to be analyzed" and "the difference between the gray-scale value of the image of the test piece 1 to be analyzed captured by an electron microscope and the gray-scale value of the image of the contrast enhancement layer 2 is at least 50", not only protect the test piece to be analyzed, but also improve the contrast and sharpness of the image of the test piece to be analyzed at the edge, thereby reducing the time cost of detection and analysis.

[0101] Furthermore, the contrast enhancement layer 2 can be a composite film layer, which at least includes two different material layers, for example: a plurality of first material layers 21 and a plurality of second material layers 22 stacked on each other, and the thickness of each layer of the plurality of first material layers 21 and the plurality of second material layers 22 does not exceed 0.1 nm. By alternately forming multiple layers of the first material layer 21 and multiple layers of the second material layer 22, and changing the ratio of the first material layer 21 to the second material layer 22 in the contrast enhancement layer 2, the image of the contrast enhancement layer 2 can have different gray-scale effects visually, so as to be applicable to test pieces 1 of a variety of different materials.

[0102] That is to say, by adjusting the ratio of the first material layer 21 to the second material layer 22, the average gray-scale value of the image of the contrast enhancement layer 2 can be adjusted within a specific range, so as to be applicable to enhancing the contrast and edge sharpness at the edge of the image of the test piece 1 to be analyzed with different average gray-scale values. In this way, there is no need to develop processes for a variety of contrast enhancement layers 2 made of different materials to correspond to the images of test pieces 1 to be analyzed with different average gray-scale values.

[0103] In addition, in the physical property analysis method of one embodiment of the present application, a grayscale value database can also be established to determine the ratio and stacking method of the number of layers of the first material layer 21 and the number of layers of the second material layer 22, so that the difference between the average grayscale value of the image of the contrast enhancement layer 2 and the average grayscale value of the surface image of the test piece 1 to be analyzed is at least 50. In this way, according to the type of the test piece 1 to be analyzed, the production method of the contrast enhancement layer 2 can be quickly determined, and the process development time of the contrast enhancement layer 2 can be shortened.

[0104] The content disclosed above is only a preferred and feasible embodiment of the present application, and does not limit the protection scope of the claims of the present application. Therefore, all equivalent technical changes made by using the content of the specification and drawings of the present application are included in the protection scope of the claims of the present application.

Claims

1. A method for preparing a physical property analysis specimen, characterized in that The preparation method of the physical property analysis specimen includes: providing a specimen to be analyzed; and forming a contrast enhancement layer on the surface of the specimen to be analyzed according to the material of the specimen to be analyzed, wherein the contrast enhancement layer includes a plurality of first material layers and a plurality of second material layers stacked on each other, the materials of the first material layer and the second material layer are different, and the thickness of each layer of the plurality of first material layers and the plurality of second material layers does not exceed 0.1 nm; wherein the difference between the average gray scale value of the image of the specimen to be analyzed captured by an electron microscope and the average gray scale value of the surface layer image of the contrast enhancement layer is at least 50.

2. The method for preparing a physical property analysis test piece according to claim 1, wherein, Before forming the contrast enhancement layer, a heat treatment or a surface modification treatment is performed on the specimen to be analyzed.

3. The method for preparing the physical property analysis test piece according to claim 2, wherein, When performing the surface modification treatment, the specimen to be analyzed is treated by plasma or ultraviolet light.

4. The preparation method of the physical property analysis test piece according to claim 1, characterized in that, The preparation method of the physical property analysis specimen further includes: forming a protective layer on the contrast enhancement layer, and the protective layer is a conductive layer or an insulating layer.

5. The method for preparing a physical property analysis specimen according to claim 1, characterized in that, The thickness range of the contrast enhancement layer is from 2 nm to 30 nm.

6. The method for preparing a physical property analysis specimen according to claim 1, characterized in that, The contrast enhancement layer is formed by an atomic layer deposition process, and the process temperature is 40 °C to 200 °C.

7. The method for preparing a physical property analysis test piece according to claim 1, wherein, The material of the first material layer is an oxide, carbide, nitride or oxynitride of a first element, the material of the second material layer is an oxide, carbide, nitride or oxynitride of a second element, and the difference between the atomic numbers of the first element and the second element is greater than 20.

8. The method for preparing a physical property analysis specimen according to claim 7, wherein, The first element and the second element are each selected from one of the groups consisting of metal elements, non-metal elements and any combination thereof.

9. The method for preparing a physical property analysis specimen according to claim 8, wherein, The metal element is aluminum, hafnium, titanium, platinum, indium, tin, zirconium, gallium, molybdenum or tantalum, and the non-metal element is selected from silicon, boron, selenium, tellurium or arsenic.

10. The method for preparing a physical property analysis test piece according to claim 1, characterized in that, The contrast enhancement layer is formed by an atomic layer deposition process, and the steps of forming the contrast enhancement layer by using the atomic layer deposition process include: placing the specimen to be analyzed in a coating cavity; sequentially introducing and discharging a first element precursor gas, a purge gas and a first reaction gas in the coating cavity to form one of the first material layers; sequentially introducing and discharging a second element precursor gas, the purge gas and a second reaction gas in the coating cavity to form one of the second material layers; wherein the first element precursor gas, the purge gas, the first reaction gas, the second element precursor gas and the second reaction gas are all discharged outside the coating cavity through an exhaust pipeline at an exhaust rate; the exhaust rate is more than 8 times the supply rate of the first reaction gas and more than 8 times the supply rate of the second reaction gas.

11. The method for preparing a physical property analysis specimen according to claim 10, characterized in that, The first reactive gas is the same as the second reactive gas, and both are introduced into the coating cavity through a reactive gas supply pipeline. The ratio range between the supply rate of the first element precursor gas and the supply rate of the first reactive gas is from 0.7 to 1.5, or the ratio range between the supply rate of the second element precursor gas and the supply rate of the second reactive gas is from 0.7 to 1.

5.

12. A physical property analysis test piece, characterized in that, The physical property analysis test piece includes: a test piece to be analyzed and a contrast enhancement layer. Among them, the contrast enhancement layer is disposed on the surface of the test piece to be analyzed and includes a plurality of first material layers and a plurality of second material layers stacked on top of each other. The materials of the first material layer and the second material layer are different, and the thickness of each layer in the plurality of first material layers and the plurality of second material layers does not exceed 0.1 nm; wherein, the difference between the average gray scale value of the surface layer image of the test piece to be analyzed captured by an electron microscope and the average gray scale value of the contrast enhancement layer image is at least 50.

13. The physical property analysis test piece according to claim 12, wherein, The physical property analysis test piece further includes: a protective layer disposed on the contrast enhancement layer, wherein the protective layer is a conductive layer or an insulating layer.

14. The physical property analysis test piece according to claim 12, characterized in that, The thickness range of the contrast enhancement layer is from 2 nm to 30 nm.

15. The physical property analysis specimen according to claim 12, wherein The contrast enhancement layer is an atomic layer deposition film layer.

16. The physical property analysis test piece according to claim 12, wherein, The material of the first material layer is an oxide, carbide, nitride or oxynitride of a first element, and the material of the second material layer is an oxide, carbide, nitride or oxynitride of a second element, and the difference between the atomic numbers of the first element and the second element is greater than 20.

17. The physical property analysis test piece according to claim 16, characterized in that, The first element and the second element are each selected from one of the groups consisting of metal elements, non-metal elements and any combination thereof.

18. The physical property analysis test piece according to claim 17, wherein The metal element is aluminum, hafnium, titanium, platinum, indium, tin, zirconium, gallium, molybdenum or tantalum, and the non-metal element is selected from silicon, boron, selenium, tellurium or arsenic.

19. A physical property analysis method, characterized in that, The physical property analysis method includes: Fabricating a physical property analysis test piece, which includes: Providing a test piece to be analyzed; and Forming a contrast enhancement layer on the surface of the test piece to be analyzed according to the material of the test piece to be analyzed; and Capturing an image of the physical property analysis test piece, wherein the image of the physical property analysis test piece includes a contrast enhancement layer image and a test piece to be analyzed image; Among them, the difference between the average gray scale value of the contrast enhancement layer image and the average gray scale value of the surface layer image of the test piece to be analyzed is at least 50.

20. The physical property analysis method according to claim 19, characterized in that The contrast enhancement layer is a composite film layer, which includes a plurality of first material layers and a plurality of second material layers stacked on top of each other. The materials of the first material layer and the second material layer are different, and the thickness of each layer in the plurality of first material layers and the plurality of second material layers does not exceed 0.1 nm.

21. The physical property analysis method according to claim 20, characterized in that, The material of the first material layer is an oxide, carbide, nitride or oxynitride of a first element, and the material of the second material layer is an oxide, carbide, nitride or oxynitride of a second element, and the difference between the atomic numbers of the first element and the second element is greater than 20.

22. The physical property analysis method according to claim 19, characterized in that, The physical property analysis method further includes: A grayscale value database is established, wherein the grayscale value database at least includes the correspondence between the material of the test piece to be analyzed and the average grayscale value of the image of the test piece to be analyzed, and the correspondence between the material of the contrast enhancement layer and the average grayscale value of the image of the contrast enhancement layer.

23. The physical property analysis method according to claim 22, wherein, The contrast enhancement layer is a composite film layer, which includes a plurality of first material layers and a plurality of second material layers stacked on each other, and the correspondence between the material of the contrast enhancement layer and the grayscale value of the image of the contrast enhancement layer is the correspondence between the grayscale value of the image of the contrast enhancement layer and the number of layers of the first material layer or the number of layers of the second material layer, and the physical property analysis method further includes: Before the step of forming the contrast enhancement layer, referring to the grayscale value database, to determine the ratio of the number of layers of the first material layer to the number of layers of the second material layer, so that the difference between the grayscale value of the image of the contrast enhancement layer and the grayscale value of the image of the test piece to be analyzed is at least 50.

24. The physical property analysis method according to claim 19, characterized in that, When capturing the cross-sectional image of the physical property analysis test piece, a transmission electron microscope is used for capturing.

25. The physical property analysis method according to claim 19, characterized in that, The step of manufacturing the physical property analysis test piece further includes: forming a protective layer on the contrast enhancement layer, and the protective layer is a conductive layer or an insulating layer.

26. The physical property analysis method according to claim 19, wherein The step of manufacturing the physical property analysis test piece further includes: before forming the contrast enhancement layer, performing a heat treatment or a surface modification treatment on the test piece to be analyzed.

27. The physical property analysis method according to claim 19, wherein The contrast enhancement layer is formed by an atomic layer deposition process, and the step of forming the contrast enhancement layer by using the atomic layer deposition process includes: Placing the test piece to be analyzed into a coating cavity; Sequentially introducing and exhausting a first element precursor gas, a purge gas, and a first reaction gas in the coating cavity to form one of the first material layers; Sequentially introducing and exhausting a second element precursor gas, the purge gas, and a second reaction gas in the coating cavity to form one of the second material layers; Wherein, the first element precursor gas, the purge gas, the first reaction gas, the second element precursor gas, and the second reaction gas are all discharged outside the coating cavity through an exhaust pipeline at an exhaust rate, and the exhaust rate is more than 8 times the rate of any of the reaction gases introduced into the coating cavity.

28. The physical property analysis method according to claim 27, wherein The first reaction gas is the same as the second reaction gas, and both are introduced into the coating cavity through a reaction gas supply pipeline, and the ratio between the supply rate of the first element precursor gas and the supply rate of the first reaction gas or the ratio between the supply rate of the second element precursor gas and the supply rate of the second reaction gas ranges from 0.7 to 1.5.

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