An alignment stage device

Abstract

The application discloses a kind of alignment platform devices including X-axis drive mechanism, Y-axis drive mechanism, T-axis drive mechanism and Z-axis drive mechanism.The sliding table of X-axis drive mechanism is fixedly connected with Y-axis drive mechanism, and can drive it to move along X-axis;Y-axis sliding seat of Y-axis drive mechanism is connected with T-axis drive mechanism, and drives it to move along Y-axis.T-axis drive mechanism includes Y-axis connecting plate, Z-axis connecting plate, and power component, adjusting component and support component between the two.The upper end of adjusting component is rotatably connected with Z-axis connecting plate, the lower end of adjusting component is fixedly connected with Y-axis connecting plate, adjusting component has intermediate transition piece that can generate relative motion with Y-axis connecting plate and Z-axis connecting plate in middle part, the moving end of power component is connected with intermediate transition piece, and pushes intermediate transition piece, so that Z-axis connecting plate rotates around support component.Z-axis connecting plate is connected with suction disc mounting plate, and pushes suction disc mounting plate to lift.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing equipment, in particular to a kind of alignment platform device. BACKGROUND

[0002] Liquid crystal display module bonding equipment is used to position and bond chip and glass. During positioning, liquid crystal display module bonding equipment needs to drive glass to move in X-axis, Y-axis, Z-axis direction and rotate around T-axis.

[0003] The existing liquid crystal display module bonding equipment mostly uses servo motor to drive hollow rotating platform, harmonic reducer or direct drive motor to realize alignment of T-axis rotating angle of alignment platform. But hollow rotating platform or harmonic reducer has the defects of complex structure, difficult maintenance, low repeatability, etc.;And the positioning accuracy of direct drive motor depends on the resolution of encoder, and the control method is complex, the price is high, the delivery time is long, the bearing is easily damaged after long time fast back and forth movement, and the equipment maintenance cost is high. Moreover, the existing T-axis driving mode is mostly applied to small and medium-sized alignment platform, and for large-size alignment platform, the expandable range of T-axis is small, and there are defects such as poor mechanism stability, low stiffness, high cost, high maintenance cost, etc.

[0004] Therefore, how to provide a technical scheme capable of solving the above problems is a technical problem urgently needed to be solved by those skilled in the art. SUMMARY

[0005] The purpose of the present application is to provide an alignment platform device, which horizontally pushes the intermediate transition piece to move, so that the intermediate transition piece drives the Z-axis connecting plate to rotate around the support assembly, thereby simplifying the structure of the alignment platform device and improving its stability and stiffness.

[0006] To achieve the above purpose, the present application provides an alignment platform device, comprising:

[0007] X-axis driving mechanism, comprising bottom plate and sliding table, the sliding table is connected with the mover, and the bottom plate is provided with stator for driving the mover to move along X-axis;

[0008] Y-axis driving mechanism, comprising connecting seat fixedly connected with the sliding table and Y-axis sliding seat connected with the connecting seat, the connecting seat can drive the Y-axis sliding seat to move along Y-axis;

[0009] The T-axis driving mechanism comprises a Y-axis connecting plate and a Z-axis connecting plate, the Y-axis connecting plate is connected with the Y-axis sliding table, a power assembly, an adjusting assembly and a supporting assembly are arranged between the Y-axis connecting plate and the Z-axis connecting plate, the upper end of the adjusting assembly is rotatably connected with the Z-axis connecting plate, the lower end of the adjusting assembly is fixedly connected with the Y-axis connecting plate, the middle part of the adjusting assembly is provided with an intermediate transition piece capable of generating relative motion with the Y-axis connecting plate and the Z-axis connecting plate, and the moving end of the power assembly is connected with the intermediate transition piece to push the Z-axis connecting plate to rotate around the supporting assembly.

[0010] The Z-axis driving mechanism comprises a Z-axis base connected with a Z-axis connecting plate and a platform mounting plate connected with a suction disc mounting plate, and a lifting assembly is arranged between the Z-axis base and the platform mounting plate to push the suction disc mounting plate to lift.

[0011] Preferably, the adjusting assembly comprises an X-axis guide rail fixedly connected with the Y-axis connecting plate, a cross roller bearing mounted in the Z-axis connecting plate and a Y-axis guide rail connected with the cross roller bearing, the intermediate transition piece is a bidirectional fixed block, the upper side of the bidirectional fixed block is provided with a Y-axis sliding block, the Y-axis sliding block is provided with a Y-axis sliding groove matched with the Y-axis guide rail, and the lower side of the bidirectional fixed block is provided with an X-axis sliding block, and the X-axis sliding block is provided with an X-axis sliding groove matched with the X-axis guide rail.

[0012] Preferably, the supporting assembly comprises a supporting column fixedly connected with the Y-axis connecting plate and a supporting bearing mounted in the Z-axis connecting plate.

[0013] Preferably, the power assembly comprises a T-axis servo motor fixedly connected with the Y-axis connecting plate, a T-axis screw thread connected in transmission with the T-axis servo motor and a T-axis nut connecting block fixedly connected with the Y-axis sliding block, the shaft of the T-axis servo motor and the T-axis screw thread are parallel to the X-axis, and the T-axis nut connecting block is provided with a T-axis nut threadedly matched with the T-axis screw thread.

[0014] Preferably, the power assembly further comprises two T-axis bearing supports fixedly connected with the Y-axis connecting plate, and the T-axis bearing supports are both provided with bearings matched with the T-axis screw thread.

[0015] Preferably, the lower side of the platform mounting plate is fixedly connected with a wedge-shaped block, the upper side of the Z-axis base is fixedly connected with a Z-axis motor seat, the lifting assembly comprises a Z-axis servo motor fixedly connected with the Z-axis motor seat, a Z-axis screw thread connected in transmission with the Z-axis servo motor and a Z-axis nut fixing block matched with the wedge-shaped block, the Z-axis nut fixing block is connected with a Z-axis nut matched with the Z-axis screw thread, and horizontal movement of the Z-axis nut fixing block can push the wedge-shaped block to lift.

[0016] Preferably, the upper side of the Z-axis base is further provided with a horizontal guide rail, and the Z-axis nut fixing block is provided with a horizontal sliding block matched with the horizontal guide rail.

[0017] Preferably, the upper side of the Z-axis base is provided with a sliding block fixing seat, and the sliding block fixing seat is provided with a vertical sliding block, and the lower side of the platform mounting plate is provided with a guide rail fixing plate, and one side of the guide rail fixing plate is provided with a vertical guide rail matched with the vertical sliding block.

[0018] Preferably, one side of the Z-axis nut fixing block is provided with an inclined installation guide rail, the lower side of the wedge-shaped block is provided with an inclined installation sliding block, the inclined installation sliding block has an inclined installation sliding groove, and the inclined installation guide rail is installed in the inclined installation sliding groove.

[0019] Preferably, the guide rail fixing plate and the sliding block fixing seat are both four, and are distributed in a rectangular shape, the horizontal guide rail is arranged in the center of the rectangle formed by the four sliding block fixing seats, and the wedge-shaped block is located in the center of the rectangle formed by the four guide rail fixing plates.

[0020] The alignment platform device provided by the present application comprises an X-axis driving mechanism, a Y-axis driving mechanism, a T-axis driving mechanism and a Z-axis driving mechanism. The sliding table of the X-axis driving mechanism is fixedly connected with the Y-axis driving mechanism and can drive it to move along the X-axis. The Y-axis sliding seat of the Y-axis driving mechanism is connected with the T-axis driving mechanism and drives it to move along the Y-axis. The T-axis driving mechanism comprises a Y-axis connecting plate, a Z-axis connecting plate, and a power component, an adjusting component and a supporting component located between the two. The upper end of the adjusting component is rotatably connected with the Z-axis connecting plate, the lower end of the adjusting component is fixedly connected with the Y-axis connecting plate, the middle part of the adjusting component has an intermediate transition piece capable of generating relative motion with the Y-axis connecting plate and the Z-axis connecting plate, the moving end of the power component is connected with the intermediate transition piece and pushes the intermediate transition piece, so as to make the Z-axis connecting plate rotate around the supporting component. The Z-axis connecting plate is connected with the suction disc mounting plate and pushes the suction disc mounting plate to rise and fall. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the following embodiment or prior art description will be briefly introduced. Obviously, the drawings in the following description are only embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of the provided drawings.

[0022] Figure 1 The structural schematic diagram of the alignment platform device provided by the present application is shown in the figure.

[0023] Figure 2 The structural schematic diagram of the alignment platform device provided by the present application is shown in the figure. Figure 1 The structural schematic diagram of the Z-axis driving mechanism is shown in the figure.

[0024] Figure 3 For Figure 1 The structural schematic diagram of the T-axis driving mechanism;

[0025] Figure 4 For Figure 1 The structural schematic diagram of the Y-axis driving mechanism;

[0026] Figure 5 For Figure 1 The structural schematic diagram of the X-axis driving mechanism;

[0027] Figure 6 For Figure 5 The structural schematic diagram of the power assembly;

[0028] Figure 7 For Figure 5 The structural schematic diagram of the adjusting assembly;

[0029] Figure 8 For Figure 5 The structural schematic diagram of the supporting assembly.

[0030] Wherein, Figures 1 to 8 The reference signs in the drawings are as follows:

[0031] X-axis driving mechanism 1, Y-axis driving mechanism 2, T-axis driving mechanism 3, Z-axis driving mechanism 4, chuck mounting plate 5, bottom plate 11, sliding table 12, stator 13, rotor 14, connecting seat 21, Y-axis sliding seat 22, Y-axis connecting plate 31, Z-axis connecting plate 32, power assembly 33, T-axis servo motor 331, T-axis motor seat 332, T-axis shaft coupling 333, T-axis screw 334, T-axis nut connecting block 335, T-axis nut 336, T-axis bearing support 337, adjusting assembly 34, X-axis guide rail 341, X-axis sliding block 342, bidirectional fixing block 343, Y-axis sliding block 344, Y-axis guide rail 345, locking plate 346, adjusting fixed plate 347, cross roller bearing 348, bearing gland 349, supporting assembly 35, supporting column 351, supporting fixed plate 352, supporting bearing 353, locking cover 354, Z-axis base 401, platform mounting plate 402, Z-axis servo motor 403, Z-axis motor seat 404, Z-axis screw 405, Z-axis shaft coupling 406, Z-axis nut 407, Z-axis nut fixed block 408, horizontal guide rail 409, horizontal sliding block 410, obliquely mounted guide rail 411, wedge-shaped block 412, obliquely mounted sliding block 413, Z-axis mounting seat 414, vertical guide rail 415, vertical sliding block 416, sliding block fixed seat 417, guide rail fixed plate 418. DETAILED DESCRIPTION

[0032] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments of the present application, all the other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0033] In order to enable the person skilled in the art to better understand the present application, the present application will be further described in detail below with reference to the drawings and specific embodiments.

[0034] Please refer to Figures 1 to 8 , Figure 1 the structural schematic view of the alignment platform device provided by the present application; Figure 2 is Figure 1 the structural schematic view of the Z-axis driving mechanism in the present application; Figure 3 is Figure 1 the structural schematic view of the T-axis driving mechanism in the present application; Figure 4 is Figure 1 the structural schematic view of the Y-axis driving mechanism in the present application;

[0035] Figure 5 is Figure 1 the structural schematic view of the X-axis driving mechanism in the present application; Figure 6 is Figure 5 the structural schematic view of the power assembly in the present application; Figure 7 is Figure 5 the structural schematic view of the adjusting assembly in the present application; Figure 8 is Figure 5 the structural schematic view of the supporting assembly in the present application.

[0036] The alignment platform device provided by the present application has the structure as shown in Figure 1 , which comprises an X-axis driving mechanism 1, a Y-axis driving mechanism 2, a T-axis driving mechanism 3 and a Z-axis driving mechanism 4. The X-axis driving mechanism 1 comprises a bottom plate 11 and a sliding table 12, as shown in Figure 3 , the bottom plate 11 is fixedly connected with the rack of the liquid crystal display module bonding equipment, and the sliding table 12 is used for connecting the Y-axis driving mechanism 2. The sliding table 12 is connected with a mover 14, and the bottom plate 11 is provided with a stator 13 for driving the mover 14 to move along the X-axis. The cooperation mode between the stator 13 and the mover 14 can refer to a linear motor, which will not be described here.

[0037] The Y-axis driving mechanism 2 comprises a connecting seat 21 and a sliding seat, as shown in Figure 4As shown, the connecting seat 21 is fixedly connected with the sliding table 12, and the connecting seat 21 can drive the Y-axis sliding seat 22 to move along the Y-axis. The structure of the Y-axis driving mechanism 2 can refer to a servo-driven linear module, which will not be described here. The X-axis driving mechanism 1 and the Y-axis driving mechanism 2 can be set in size as needed, and both have the advantages of simple structure, low cost, large rigidity, and high stability.

[0038] The T-axis driving mechanism 3 includes a Y-axis connecting plate 31 and a Z-axis connecting plate 32, as shown in the figure. Figure 5 As shown, the Y-axis connecting plate 31 is connected with the Y-axis sliding table 12, and the Z-axis connecting plate 32 is connected with the Z-axis driving mechanism 4. A power assembly 33, an adjusting assembly 34, and a supporting assembly 35 are arranged between the Y-axis connecting plate 31 and the Z-axis connecting plate 32. The upper end of the supporting assembly 35 is rotatably connected with the Z-axis connecting plate 32, and the lower end is fixedly connected with the Y-axis connecting plate 31. The upper end of the adjusting assembly 34 is rotatably connected with the Z-axis connecting plate 32, and the lower end is fixedly connected with the Y-axis connecting plate 31. The adjusting assembly 34 has an intermediate transition piece in the middle. The lower side of the intermediate transition piece is movably connected with the Y-axis connecting plate 31, and the upper side of the intermediate transition piece is movably connected with the Z-axis connecting plate 32. The moving direction of the intermediate transition piece relative to the Y-axis connecting plate 31 is not parallel to the moving direction of the intermediate transition piece relative to the Z-axis connecting plate 32. The moving end of the power assembly 33 is connected with the intermediate transition piece and applies a pushing force to the intermediate transition piece. The direction of the pushing force is not parallel to the connecting line of the supporting assembly 35 and the adjusting assembly 34, so that the Z-axis connecting plate 32 can rotate around the supporting assembly 35 under the action of the pushing force.

[0039] The Z-axis driving mechanism 4 includes a Z-axis base 401, a platform mounting plate 402, and a lifting assembly. As shown in the figure, Figure 2 The Z-axis base 401 is fixedly connected with the Z-axis connecting plate 32, and the platform mounting plate 402 is fixedly connected with the chuck mounting plate 5. The chuck mounting plate 5 is provided with a chuck and an air path connected with the chuck. By adjusting the air path on the chuck mounting plate 5, different sizes of panels can be controlled. The lifting assembly is located between the Z-axis base 401 and the platform mounting plate 402, and the lifting mechanism can push the chuck mounting plate 5 to lift.

[0040] In this embodiment, the alignment platform device moves along the X-axis through the X-axis driving mechanism 1, moves along the Y-axis through the Y-axis driving mechanism 2, moves along the Z-axis through the Z-axis driving mechanism 4, and rotates around the T-axis through the T-axis driving mechanism 3, thereby realizing the alignment of the liquid crystal display screen. The X-axis driving mechanism 1 and the Y-axis driving mechanism 2 have the advantages of simple structure, low cost, large rigidity, and high stability. The T-axis driving mechanism 3 is provided with the supporting assembly 35 and the adjusting assembly 34, which cooperate with the power assembly 33 to realize rotation, and have the advantages of small size, strong anti-deformation ability, flexible structure design, low cost, and convenient maintenance.

[0041] Optionally, the adjusting assembly 34 further comprises an X-axis guide rail 341, a Y-axis guide rail 345 and a cross roller bearing 348, as shown in Figure 7 As described above, the X-axis guide rail 341 is fixedly connected with the Y-axis connecting plate 31 and extends along the X-axis direction, and the Y-axis guide rail 345 is rotatably connected with the Z-axis connecting plate 32. The intermediate transition piece is a bidirectional fixing block 343, and an X-axis sliding block 342 is arranged between the bidirectional fixing block 343 and the X-axis guide rail 341. The X-axis sliding block 342 is provided with an X-axis sliding groove matched with the X-axis guide rail 341. A Y-axis sliding block 344 is arranged on the upper side of the bidirectional fixing block 343, and the Y-axis sliding block 344 is provided with a Y-axis sliding groove matched with the Y-axis guide rail 345. The bidirectional fixing block 343 is connected with the power assembly 33 through the Y-axis sliding block 344.

[0042] The upper side of the Y-axis guide rail 345 is connected with a locking plate 346, and the locking plate 346 is provided with a connecting column on the upper side. The axis of the connecting column intersects with the center line of the Y-axis rail and is perpendicular to the center line. The inner ring of the cross roller bearing 348 is connected with the connecting column, and the outer ring of the cross roller bearing 348 is connected with the Z-axis connecting plate 32, so that the Y-axis guide rail 345 can rotate relative to the Z-axis connecting plate 32. An adjusting fixing plate 347 is arranged between the locking plate 346 and the cross roller bearing 348, and the adjusting fixing plate 347 is used for fixedly connecting with the Z-axis connecting plate 32. The connecting column is in clearance fit with the adjusting fixing plate 347. The upper end of the connecting column is provided with a bearing pressing cover 349, and the bearing pressing cover 349 is matched with the inner ring of the cross roller bearing 348.

[0043] Optionally, as shown in Figure 8 The support assembly 35 comprises a support column 351, a support bearing, a support fixing plate 352 and a locking cover 354. The lower end of the support column 351 is provided with a flange plate, and the flange plate is fixedly connected with the Y-axis connecting plate 31. The support bearing 353 is located at the upper part of the support column 351, the inner ring of the support bearing is connected with the support column 351, and the outer ring of the support bearing is connected with the Z-axis connecting plate 32, so that the support column 351 can rotate relative to the Z-axis connecting plate 32. The support fixing plate 352 is located below the support bearing 353 and is used for fixedly connecting with the Z-axis connecting plate 32. The support column 351 is in clearance fit with the support fixing plate 352. The locking cover 354 is located above the support bearing and is in contact with the inner ring of the support bearing 353.

[0044] Optionally, as shown in Figure 5 and Figure 6As shown, the power assembly 33 comprises a T-axis servo motor 331, a T-axis screw rod 334 and a T-axis nut connecting block 335. The Y-axis connecting plate 31 is provided with a T-axis motor seat 332 and two T-axis bearing supports 337. The T-axis servo motor 331 is fixedly connected with the T-axis motor seat 332, the shaft of the T-axis servo motor 331 is parallel to the X-axis, and the T-axis servo motor 331 is connected with the T-axis screw rod 334 through a T-axis shaft coupling 333. The T-axis screw rod 334 is inserted into the two T-axis bearing supports 337 and connected with the T-axis bearing supports 337 through bearings. The part of the T-axis screw rod 334 between the two T-axis bearing supports 337 has external threads, and the T-axis nut connecting block 335 is located between the two T-axis bearing supports 337, and the T-axis nut connecting block 335 is provided with a T-axis nut 336 which is threadedly connected with the T-axis screw rod 334.

[0045] During operation, the T-axis servo motor 331 drives the T-axis screw rod 334 to rotate, thereby pushing the T-axis nut connecting block 335 to move in the direction parallel to the X-axis. The T-axis nut connecting block 335 is connected with the bidirectional fixed block 343 through the Y-axis sliding block 344, and drives the X-axis sliding block 342, the Y-axis sliding block 344 and the bidirectional fixed block 343 to move along the X-axis guide rail 341. At the same time, the adjusting assembly 34 applies a pushing force to the Z-axis connecting plate 32. Since the connecting line between the adjusting assembly 34 and the supporting assembly 35 is not parallel to the X-axis, the Z-axis connecting plate 32 rotates around the supporting assembly 35 under the action of the pushing force.

[0046] Optionally, at least one adjusting assembly 34 for assisting the rotation of the Z-axis connecting plate 32 is further arranged between the Z-axis connecting plate 32 and the Y-axis connecting plate 31. Figure 5 As shown, two adjusting assemblies 34 for assisting the rotation of the Z-axis connecting plate 32 are arranged between the Z-axis connecting plate 32 and the Y-axis connecting plate 31, and the two adjusting assemblies 34 are not connected with the T-axis nut connecting block 335. The connecting line between the adjusting assembly 34 for assisting the rotation of the Z-axis connecting plate 32 and the supporting assembly 35 is perpendicular to the connecting line between the adjusting assembly 34 for driving the rotation of the Z-axis connecting plate 32 and the supporting assembly 35. The adjusting assembly 34 for assisting the rotation of the Z-axis connecting plate 32 can realize multi-point support of the Z-axis connecting plate 32, thereby improving the rigidity of the device. Of course, the user can also set the number of the adjusting assemblies 34 for assisting the rotation of the Z-axis connecting plate 32 according to the needs, and the X-axis guide rail 341 and the Y-axis guide rail 345 of the adjusting assembly 34 for assisting the rotation of the Z-axis connecting plate 32 need to be adjusted in position according to the rotation direction of the Z-axis connecting plate 32.

[0047] In the embodiment, the power assembly 33, the adjusting assembly 34 and the supporting assembly 35 cooperate to push the Z-axis connecting plate 32 to rotate, and the power assembly 33, the adjusting assembly 34 and the supporting assembly 35 have simple structure and low maintenance cost. In addition, the adjusting assembly 34 and the supporting assembly 35 can support the Z-axis connecting plate 32 at multiple points, thereby improving the rigidity and stability of the device. Meanwhile, the adjusting assembly 34 and the supporting assembly 35 can be set according to the size of the device, and have large expandable range, and are suitable for large-size panel bonding.

[0048] In the prior art, for the liquid crystal display screen module bonding device corresponding to a large-size platform, the center distance between the motor shaft and the synchronous pulley is large, the tensioning effect is poor, the transmission precision is low, and the maintenance cost is high. Moreover, the servo motor is vertically placed, the space utilization rate is low, the space span of the device is large, the rigidity is low, and the stability is poor.

[0049] Alternatively, as shown in Figure 2 The lower side of the platform mounting plate 402 is fixedly connected with a wedge-shaped block 412, the upper side of the Z-axis base 401 is fixedly connected with a Z-axis motor seat 404 and a Z-axis mounting seat 414, and the lifting assembly includes a Z-axis servo motor 403, a Z-axis screw rod 405 and a Z-axis nut fixing block 408. The Z-axis nut fixing block 408 is located below the wedge-shaped block 412, one end of the Z-axis screw rod 405 is connected with the rotating shaft of the Z-axis servo motor 403 through a Z-axis shaft coupling 406, and the other end is connected with the Z-axis nut fixing block 408. The Z-axis screw rod 405 is parallel to the rotating shaft of the Z-axis servo motor 403 and the Z-axis base 401, the Z-axis servo motor 403 is fixedly connected with the Z-axis motor seat 404, and the Z-axis screw rod 405 is rotatably connected with the Z-axis mounting seat 414. The side of the Z-axis nut fixing block 408 close to the Z-axis servo motor 403 is provided with a Z-axis nut 407 which is threadedly connected with the Z-axis screw rod 405, and the Z-axis nut fixing block 408 is provided with a clearance groove for the Z-axis screw rod 405. The lower side of the wedge-shaped block 412 is obliquely arranged, the distance between the wedge-shaped block 412 and the platform mounting plate 402 gradually decreases along the direction close to the Z-axis motor seat 404, the side of the Z-axis nut fixing block 408 away from the Z-axis motor seat 404 is matched with the wedge-shaped block 412 and parallel to the lower side of the wedge-shaped block 412. The Z-axis servo motor 403 drives the Z-axis screw rod 405 to rotate, and then drives the Z-axis nut fixing block 408 to move. The Z-axis nut fixing block 408 exerts an oblique pushing force on the wedge-shaped block 412 during the movement, and the component of the pushing force in the direction perpendicular to the platform mounting plate 402 can drive the platform mounting plate 402 to lift.

[0050] Optionally, the upper side of the Z-axis base 401 is provided with a sliding block fixing seat 417, and a vertical sliding block 416 vertically arranged on the Z-axis base 401 is arranged in the sliding block fixing seat 417. The lower side of the platform mounting plate 402 is provided with a guide rail fixing plate 418, and a vertical guide rail 415 of the platform mounting plate 402 is arranged on the side of the guide rail fixing plate 418 facing the sliding block fixing seat 417. The vertical guide rail 415 cooperates with the vertical sliding block 416, and in the process of lifting the platform mounting plate 402, the sliding block fixing seat 417 and the guide rail fixing plate 418 can limit the horizontal displacement of the platform mounting plate 402, and the vertical guide rail 415 and the vertical sliding block 416 cooperate to reduce the resistance in the lifting process. Of course, the user can also use other structures of the limiting component to horizontally limit the platform mounting plate 402, such as a limiting guide column and a limiting guide pipe.

[0051] Optionally, the Z-axis nut fixing block 408 is provided with an inclined guide rail 411 away from the Z-axis motor seat 404, and the lower side of the wedge-shaped block 412 is provided with an inclined sliding block 413 having an inclined sliding groove in the inclined sliding block 413. The inclined guide rail 411 is installed in the inclined sliding groove. In the process of horizontal movement of the Z-axis nut fixing block 408, the inclined sliding block 413 slides along the inclined sliding groove, thereby pushing the platform mounting plate 402 to lift.

[0052] Optionally, the upper side of the Z-axis base 401 is provided with a horizontal guide rail 409 parallel to the Z-axis screw rod 405, and the horizontal guide rail 409 is located below the wedge-shaped block 412. The lower side of the Z-axis nut fixing block 408 is provided with a horizontal sliding block 410 cooperating with the horizontal guide rail 409. The horizontal guide rail 409 cooperates with the horizontal sliding block 410 to reduce the resistance in the movement of the Z-axis nut fixing block 408 and reduce energy loss.

[0053] Optionally, as shown in Figure 2 The guide rail fixing plate 418 and the sliding block fixing seat 417 are both four, the four guide rail fixing plates 418 are distributed in a rectangular shape on the lower side of the platform mounting plate 402, and the wedge-shaped block 412 is located in the center of the rectangle formed by the four guide rail fixing plates 418. The four sliding block fixing seats 417 are distributed in a rectangular shape on the upper side of the Z-axis base 401, and correspond to the positions of the four guide rail fixing plates 418. The horizontal guide rail 409 is arranged in the center of the rectangle formed by the four sliding block fixing seats 417.

[0054] In the embodiment, the Z-axis screw rod 405 and the Z-axis servo motor 403 in the Z-axis driving mechanism 4 are arranged in parallel to the Z-axis base 401, and the lifting of the platform mounting plate 402 is realized by pushing the wedge-shaped block 412 through the Z-axis nut fixing block 408. The arrangement of the Z-axis screw rod 405 and the Z-axis servo motor 403 can make full use of the space between the Z-axis base 401 and the platform mounting plate 402, and improve the space utilization of the alignment platform device. Meanwhile, the guide rail fixing plate 418 and the sliding block fixing seat 417 are arranged between the Z-axis base 401 and the platform mounting plate 402, and the rigidity of the alignment platform device is improved.

[0055] It should be noted that the relational terms herein such as first and second, and the like, are used solely to distinguish one from another entity without necessarily requiring or implying any actual relationship or order between such entities.

[0056] The alignment platform device provided by the present application is described in detail above. The principles and implementation modes of the present application are described by applying specific examples in this paper, and the above description of the embodiments is only used to help understand the method of the present application and its core idea. It should be pointed out that for ordinary skilled in the art, without departing from the principles of the present application, the present application can be improved and modified in several ways, and these improvements and modifications also fall within the protection scope of the claims of the present application.

Claims

1. A positioning platform device, characterized in that, Include: X-axis drive mechanism (1), including the base plate (11) and the sliding table (12), the sliding table (12) is connected with the mover (14), the base plate (11) is equipped with the stator (13) for driving the mover (14) moves along X-axis; Y-axis drive mechanism (2), including the connecting seat (21) fixedly connected with the sliding table (12) and the Y-axis sliding seat (22) connected with the connecting seat (21), the connecting seat (21) can drive the Y-axis sliding seat (22) moves along Y-axis; The T-axis driving mechanism (3) comprises a Y-axis connecting plate (31) and a Z-axis connecting plate (32), the Y-axis connecting plate (31) is connected with the sliding table (12), and the Y-axis connecting plate (31) and the Z-axis connecting plate (32) are provided with a power assembly (33), at least one adjusting assembly (34) and a supporting assembly (35). The upper end of the adjusting assembly (34) is rotatably connected with the Z-axis connecting plate (32), the lower end of the adjusting assembly (34) is fixedly connected with the Y-axis connecting plate (31), the middle part of the adjusting assembly (34) is provided with an intermediate transition piece capable of generating relative motion with the Y-axis connecting plate (31) and the Z-axis connecting plate (32), the moving end of the power assembly (33) is connected with the intermediate transition piece to push the Z-axis connecting plate (32) to rotate around the supporting assembly (35), at least one adjusting assembly (34) for assisting the rotation of the Z-axis connecting plate (32) is arranged between the Z-axis connecting plate (32) and the Y-axis connecting plate (31), and the connecting line between the adjusting assembly (34) for assisting the rotation of the Z-axis connecting plate (32) and the supporting assembly (35) vertically drives the connecting line between the adjusting assembly (34) and the supporting assembly (35); wherein the adjusting assembly (34) comprises an X-axis guide rail (341) fixedly connected with the Y-axis connecting plate (31), a cross roller bearing (348) mounted in the Z-axis connecting plate (32) and a Y-axis guide rail (345) connected with the cross roller bearing (348), the intermediate transition piece is a bidirectional fixed block (343), the upper side of the bidirectional fixed block (343) is provided with a Y-axis sliding block (344), the Y-axis sliding block (344) is provided with a Y-axis sliding groove matched with the Y-axis guide rail (345), the lower side of the bidirectional fixed block (343) is provided with an X-axis sliding block (342), the X-axis sliding block (342) is provided with an X-axis sliding groove matched with the X-axis guide rail (341), the upper side of the Y-axis guide rail (345) is connected with a locking plate (346), the upper side of the locking plate (346) is provided with a connecting column, the axis of the connecting column intersects and is perpendicular to the middle line of the Y-axis guide rail (345), the inner ring of the cross roller bearing (348) is connected with the connecting column, the outer ring of the cross roller bearing (348) is connected with the Z-axis connecting plate (32), the locking plate (346) and the cross roller bearing (348) are provided with an adjusting fixed plate (347), the adjusting fixed plate (347) is used for being fixedly connected with the Z-axis connecting plate (32), and the connecting column is in clearance fit with the adjusting fixed plate (347).The power assembly (33) comprises a T-axis servo motor (331) fixedly connected with the Y-axis connecting plate (31), a T-axis screw rod (334) in transmission connection with the T-axis servo motor (331), and a T-axis nut connecting block (335) fixedly connected with the Y-axis sliding block (344), the shaft of the T-axis servo motor (331) and the T-axis screw rod (334) are parallel to the X-axis, and the T-axis nut connecting block (335) is provided with a T-axis nut (336) in threaded connection with the T-axis screw rod (334); Z-axis drive mechanism (4), including the Z-axis base (401) connected with the Z-axis connecting plate (32) and the platform mounting plate (402) connected with the chuck mounting plate (5), the Z-axis base (401) and the platform mounting plate (402) are equipped with the lifting assembly for lifting the chuck mounting plate (5).

2. The alignment stage device of claim 1, wherein, The support assembly (35) includes a support column (351) fixedly connected with the Y-axis connecting plate (31) and a support bearing (353) mounted in the Z-axis connecting plate (32).

3. The alignment stage device of claim 1, wherein, The power assembly (33) further includes two T-axis bearing supports (337) fixedly connected with the Y-axis connecting plate (31), and each of the T-axis bearing supports (337) is provided with a bearing matched with the T-axis screw rod (334).

4. The alignment stage device according to any one of claims 1 to 3, wherein, The lower side of the platform mounting plate (402) is fixedly connected with a wedge block (412), the upper side of the Z-axis base (401) is fixedly connected with a Z-axis motor seat (404), the lifting assembly includes a Z-axis servo motor (403) fixedly connected with the Z-axis motor seat (404), a Z-axis screw rod (405) in transmission connection with the Z-axis servo motor (403), and a Z-axis nut fixing block (408) matched with the wedge block (412), the Z-axis nut fixing block (408) is connected with a Z-axis nut (407) matched with the Z-axis screw rod (405), and horizontal movement of the Z-axis nut fixing block (408) can drive the wedge block (412) to lift.

5. The alignment stage device of claim 4, wherein, The upper side of the Z-axis base (401) is further provided with a horizontal guide rail (409), and the Z-axis nut fixing block (408) is provided with a horizontal sliding block (410) matched with the horizontal guide rail (409).

6. The alignment stage device of claim 5, wherein, The upper side of the Z-axis base (401) is provided with a sliding block fixing seat (417), the sliding block fixing seat (417) is provided with a vertical sliding block (416), and the lower side of the platform mounting plate (402) is provided with a guide rail fixing plate (418), one side of the guide rail fixing plate (418) towards the sliding block fixing seat (417) is provided with a vertical guide rail (415) matched with the vertical sliding block (416).

7. The alignment stage device of claim 4, wherein, One side of the Z-axis nut fixing block (408) is provided with an inclined guide rail (411), the lower side of the wedge block (412) is provided with an inclined sliding block (413), the inclined sliding block (413) has an inclined sliding groove, and the inclined guide rail (411) is mounted in the inclined sliding groove.

8. The alignment stage device of claim 6, wherein, The guide rail fixed plate (418) and the slider fixed seat (417) are all 4, and are in rectangular distribution, the horizontal guide rail (409) is arranged in the rectangular center formed by 4 the slider fixed seat (417), and the wedge block (412) is located in the rectangular center formed by 4 the guide rail fixed plate (418).

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