Arrayed discharge element and array electrode type pulsed discharge gas laser

Abstract

The application discloses an array discharge element and an array electrode type pulse discharge gas laser. The array discharge element comprises a metal substrate, a plurality of unit electrodes and a plurality of pre-ionization needles. The metal substrate is provided with a plurality of electrode mounting holes arranged in an array. The unit electrodes are correspondingly mounted in each electrode mounting hole. The pre-ionization needles are correspondingly sleeved at the inner central positions of the unit electrodes. The gas laser comprises the array discharge element, a peaking capacitor, a plurality of energy storage capacitors and a ground electrode. The discharge element is connected with the plurality of energy storage capacitors in correspondence. One end of the peaking capacitor is connected with the discharge element, and the other end is connected with the ground electrode. The pre-ionization needles are uniformly distributed on the electrode plane, so that the ionization charges of the electrode space are more uniformly distributed, the effect of overall uniform pre-ionization is achieved, and the uniform main discharge is facilitated.

Description

Technical Field

[0001] This invention relates to the field of high-power gas laser technology, and more specifically to an array-type discharge element and an array electrode type pulsed discharge gas laser. Background Technology

[0002] The energy optoelectronics industry, represented by lasers, has become an important category of modern high-tech industries. In the laser field, although solid-state laser technology has made great strides, gas lasers have consistently been an important high-power laser device, achieving technological advancements and applications. This is due to the high power, low operating cost, simple maintenance, and long lifespan of gas lasers. In particular, the destructive mechanism of pulsed lasers is a much more complex combination of mechanical and thermal effects, allowing for more effective energy transfer to the target and generating impact effects unattainable by continuous-wave laser radiation. This makes such lasers a powerful tool for specialized processing.

[0003] Currently, the power of commercially available high-power pulsed gas lasers is mainly in the 2kW-5kW range, while applications such as cutting and modification require laser power of around 10,000 watts. Therefore, there is still a significant gap between the current power requirements and market demands. The development of high-power pulsed gas laser devices primarily focuses on improving output power and operational stability. For pulsed discharge-excited lasers, increasing the excitation energy can achieve high power output; increasing the repetition frequency can increase output power; and compressing the laser pulse width can improve the laser's effect. However, all of these undoubtedly increase the load on the discharge system, making it difficult to maintain a uniform and stable discharge state. This necessitates new structures to meet the requirements of uniform discharge and stable operation under high current. For high-power pulsed gas lasers, the state of the main discharge electrode becomes a crucial factor determining laser performance. A significant portion of laser performance degradation is caused by abnormal discharges resulting from localized electrode ablation, changes in local surface features, and multiple fixed-point discharges.

[0004] Therefore, how to achieve high-power laser output by changing the electrode operating conditions is a problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0005] In view of this, the present invention provides an array-type discharge element and an array electrode type pulsed discharge gas laser.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] An array-type discharge element includes a metal substrate, multiple unit electrodes, and multiple pre-ionization needles; the metal substrate has multiple electrode mounting holes arranged in an array; each unit electrode is installed in a corresponding electrode mounting hole; each pre-ionization needle is fitted onto the center of the internal part of each unit electrode.

[0008] Furthermore, the unit electrode has a cylindrical structure, and the top of the unit electrode has an annular baffle; the inner ring area of ​​the annular baffle is 1 / 3 of the outer ring area.

[0009] Furthermore, it also includes an insulating layer disposed between the inner wall of the unit electrode and the pre-ionization needle.

[0010] Furthermore, both the unit electrode and the pre-ionization needle are made of high-temperature resistant and ablation-resistant alloy materials, and the insulating layer is made of ceramic.

[0011] Furthermore, the cylindrical portion of the unit electrode is made of stainless steel.

[0012] Furthermore, the height of the pre-ionization needle is not higher than the inner wall of the unit electrode.

[0013] Furthermore, the inner diameter of the unit electrode is 6mm, the outer diameter is 10mm, and the height is 15mm, with a spacing of 2mm between two adjacent unit electrodes; the diameter of the pre-ionization needle is 2mm and the height is 12mm; an insulating layer of corresponding size with a thickness of 2mm and a height of 10mm is provided between the unit electrode and the pre-ionization needle.

[0014] Furthermore, the dimensions of the metal substrate are: 60mm wide, 1000mm long, and 25mm high; 400 unit electrodes are arranged on the metal substrate; 5 unit electrodes are arranged in each column along the width direction of the metal substrate, and 80 unit electrodes are arranged in each row along the length direction of the metal substrate.

[0015] An array electrode type pulsed gas laser is characterized by comprising an array discharge element, a peaking capacitor, multiple energy storage capacitors and a ground electrode, wherein the discharge element is connected to the multiple energy storage capacitors respectively, one end of the peaking capacitor is connected to the discharge element and the other end is connected to the ground electrode.

[0016] The beneficial effects of this invention are:

[0017] As can be seen from the above technical solutions, compared with the prior art, the present invention discloses an array-type discharge element and an array electrode type pulsed discharge gas laser. The uniform distribution of pre-ionization needles on the electrode plane can make the ionization charge in the electrode space more uniformly distributed, achieving the effect of overall uniform pre-ionization, which is beneficial to the uniformity of the main discharge.

[0018] The needle-like tip structure of the cylindrical electrode is also conducive to the initiation and progress of discharge, making each cylindrical electrode an essential discharge unit. The energy distribution of the discharge body formed by this combination will be more uniform, which will suppress the formation of abnormal discharge phenomena.

[0019] The high-temperature resistant and ablation-resistant alloy electrode material of the cylindrical electrode also plays a role in stabilizing discharge. The effective maintenance of the electrode shape is the guarantee of stable discharge. Traditional electrode forms, due to their large electrode size, cannot be processed using alloy electrode materials, and therefore cannot achieve the excellent discharge performance of the electrode in this example. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0021] Figure 1 The attached figure is a top view of an array-type discharge element provided by the present invention;

[0022] Figure 2 The attached figure is a side view of an array-type discharge element provided by the present invention;

[0023] Figure 3 The attached figure is a schematic diagram of the unit electrode structure of an array-type discharge element provided by the present invention;

[0024] Figure 4 The attached figure is a circuit diagram of an array electrode type pulsed gas laser provided by the present invention. Detailed Implementation

[0025] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0026] like Figure 1 , Figure 2 and Figure 3The present invention discloses an array-type discharge element, including a metal substrate, multiple unit electrodes 1 and multiple pre-ionization needles 3. The metal substrate is provided with multiple electrode mounting holes, which are distributed in an array. A unit electrode 1 is installed in each array-type electrode mounting hole, and a pre-ionization needle 3 is installed at the center of each unit electrode 1.

[0027] In this unit, a unit electrode 1 and a pre-ionization needle 3 constitute a needle unit. The needle unit is mechanically fixed in the electrode mounting hole on the metal substrate. The electrode mounting holes are evenly distributed on the metal substrate. Therefore, the pre-ionization needle 3 is also evenly distributed on the electrode plane of the metal substrate. This can make the ionization charge in the electrode space more evenly distributed, achieving the effect of overall uniform pre-ionization, which is beneficial to the uniformity of the main discharge.

[0028] In another embodiment, the unit electrode 1 is a cylindrical electrode, which includes a top circular surface and a circular through hole on the top circular surface to form a top ring. The area of ​​the circular through hole is 1 / 3 of the top circular surface. In this embodiment, the tip structure of the cylindrical electrode is also conducive to the initiation and execution of discharge, so that each cylindrical structure becomes an inevitable discharge unit. In this way, the energy distribution of the discharge body will be more uniform, thereby suppressing abnormal discharge phenomena.

[0029] In this embodiment, an insulating layer 2 is also included, which is disposed between the inner wall of the unit electrode 1 and the pre-ionization needle 3.

[0030] In this embodiment, the cylindrical part of the cylindrical electrode is made of stainless steel, and the top annular part and the pre-ionization needle 3 are made of ablation-resistant alloy material; the insulating layer 2 between the cylindrical electrode and the pre-ionization needle 3 is made of ceramic material.

[0031] In another embodiment, both the unit electrode 1 and the pre-ionization needle 3 are made of high-temperature resistant and ablation-resistant alloy materials. The high-temperature resistant and ablation-resistant alloy electrode material of the cylindrical electrode can play a role in stabilizing discharge. The effective maintenance of the electrode shape is the guarantee of stable discharge. The smelting of high-temperature electrode materials requires extremely high technical and equipment conditions. General industrial production can only produce small-sized wires or rods. Electrode sizes that meet the requirements of high-power laser excitation are simply impossible to produce. This is due to the dual constraints of high-temperature alloy smelting technology and equipment. Therefore, the excellent discharge performance of the electrode in this example cannot be achieved.

[0032] In another embodiment, the height of the pre-ionization needle 3 is not higher than the height of the inner wall of the unit electrode 1.

[0033] In another embodiment, the inner diameter of the cylindrical electrode is 6mm, the outer diameter is 10mm, the height is 15mm, and the distance between the cylinders is 2mm; the pre-ionization needle 3 has a diameter of 2mm and a height of 12mm; the cylindrical electrode and the pre-ionization needle 3 are separated by an insulating cylinder of the corresponding size with a wall thickness of 2mm and a height of 10mm.

[0034] In another embodiment, the dimensions of the metal substrate are: 60 mm wide, 1000 mm long, and 25 mm high; the width direction of the metal substrate has 5 unit electrodes 1 per row, the length direction has 80 unit electrodes 1 per row, and the total number of unit electrodes 1 is 400.

[0035] like Figure 4 The present invention also discloses an array electrode type pulsed gas laser, including an array discharge element, a peaking capacitor, multiple energy storage capacitors and a ground electrode. The discharge element is connected to the multiple energy storage capacitors respectively. One end of the peaking capacitor is connected to the discharge element and the other end is connected to the ground electrode.

[0036] This includes n energy storage capacitors C1-Cn, each connected to N / n unit electrodes 1, where N is the total number of electrodes; Cp is the peaking capacitor; and HV is the voltage source. During operation, switch SW is turned on, and C1-Cn discharge through the pre-ionization needle 3, forming ionized gas in the center region of the electrodes. This causes a sharp drop in gas impedance between the main electrodes, enabling capacitor Cp to discharge between the main electrodes. The cylindrical electrode structure itself facilitates discharge, and the guidance of the pre-ionization structure effectively ensures the discharge of unit electrodes 1. This maintains a uniform discharge state across the entire electrode system, effectively suppressing discharge uncertainties. Simultaneously, the surface of the metal substrate exhibits ablation-resistant properties, ensuring stability under high conduction energies.

[0037] The peaking capacitor Cp is also an array, consisting of two groups of capacitors evenly distributed on both sides of the electrode, not a single capacitor. The mechanism of the peaking capacitor Cp is that during the main discharge, i.e., when C1 is turned on, the peaking capacitor Cp is charged first, instead of discharging between the electrodes. This process gives the excitation pulse a better steepness, thus improving the electro-optical conversion efficiency. The inductor L's function is to charge C1. During discharge, since it's a nanosecond pulse, this inductor is essentially an open circuit and does not affect the discharge.

[0038] In another embodiment, it can be used as an array-type ground electrode. When the main capacitor Cn is fully charged, it is positive at the top and negative at the bottom. When discharge is triggered by SW, the positive terminal of capacitor Cn is connected to the ground electrode of the laser. That is, during discharge, the grounded electrode becomes the high-voltage electrode at the instant of discharge, and the upper electrode becomes the ground electrode. During the discharge process, the main discharge capacitor Cn first charges Cp, and then Cp performs the discharge process between the main electrodes. Because the array discharge element first has a charging process for Cp, this leads to the formation of a uniform plasma at the electrode array location, i.e., the entire surface of the ground electrode. This is a pre-ionization process for the subsequent main discharge of Cp, which is of great significance for the rapid establishment and uniform occurrence of the main discharge.

[0039] This invention can be used in 500W-class excimer lasers and 5000W-class pulsed CO2 lasers, which can improve the industrialization of high-power pulsed discharge gas lasers.

[0040] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the apparatus disclosed in the embodiments, since it corresponds to the method disclosed in the embodiments, the description is relatively simple; relevant parts can be referred to the method section.

[0041] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An array electrode type pulsed gas laser, characterized in that, It includes an array-type discharge element, a switch SW, a peaking capacitor Cp, n energy storage capacitors, and a ground electrode; the array-type discharge element is connected to the multiple energy storage capacitors respectively, one end of the peaking capacitor is connected to the discharge element, and the other end is connected to the ground electrode; one end of the switch is connected to the power supply terminal of the energy storage capacitor, and the other end is grounded. The array-type discharge element includes a metal substrate, multiple unit electrodes, and multiple pre-ionization needles; the metal substrate is provided with multiple electrode mounting holes arranged in an array; each unit electrode is installed in each of the electrode mounting holes; each pre-ionization needle is fitted into the center of the unit electrode. There are n energy storage capacitors C1-Cn, and each of the energy storage capacitors is connected to N / n unit electrodes, where N is the total number of electrodes; During operation, switch SW is turned on, and C1-Cn discharge through the pre-ionization needle. During the discharge process, the main discharge capacitor Cn first charges Cp, and then Cp performs the discharge process between the main electrodes.

2. The array electrode type pulsed gas laser according to claim 1, characterized in that, The unit electrode has a cylindrical structure, and the top of the unit electrode has an annular baffle; the inner ring area of ​​the annular baffle is 1 / 3 of the outer ring area.

3. The array electrode type pulsed gas laser according to claim 1, characterized in that, It also includes an insulating layer disposed between the inner wall of the unit electrode and the pre-ionization needle.

4. The array electrode type pulsed gas laser according to claim 3, characterized in that, Both the unit electrode and the pre-ionization needle are made of high-temperature resistant and ablation-resistant alloy materials, and the insulating layer is made of ceramic.

5. The array electrode type pulsed gas laser according to claim 4, characterized in that, The cylindrical part of the unit electrode is made of stainless steel.

6. The array electrode type pulsed gas laser according to claim 1, characterized in that, The height of the pre-ionization needle is not higher than the inner wall of the unit electrode.

7. The array electrode type pulsed gas laser according to claim 1, characterized in that, The inner diameter of the unit electrode is 6mm, the outer diameter is 10mm, and the height is 15mm. The distance between two adjacent unit electrodes is 2mm. The diameter of the pre-ionization needle is 2mm and the height is 12mm. An insulating layer of corresponding size, 2mm thick and 10mm high, is provided between the unit electrode and the pre-ionization needle.

8. The array electrode type pulsed gas laser according to claim 1, characterized in that, The dimensions of the metal substrate are: 60mm wide, 1000mm long, and 25mm high; 400 unit electrodes are arranged on the metal substrate; 5 unit electrodes are arranged in each column along the width direction of the metal substrate, and 80 unit electrodes are arranged in each row along the length direction of the metal substrate.

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