Flatness measurement unit

Abstract

The present invention provides a flatness measuring unit mounted on a shelf and used to measure flatness related to the degree of deviation from the condition where four predetermined locations on the shelf are located on the same plane. The unit comprises: a main frame; and four grounding portions dispersedly arranged on the main frame and configured to ground the four predetermined locations on the shelf. The four grounding portions include two first grounding portions that are not located at diagonal positions, and two second grounding portions other than the first grounding portions. The center of gravity is set in an area including the two first grounding portions, among the four areas of the flatness measuring unit divided by two diagonal lines passing through the first and second grounding portions located at diagonal positions.

Description

Technical Field

[0001] One aspect of the present invention relates to a flatness measuring unit. Background Art

[0002] A known purge stocker includes multiple shelves for placing storage containers, and purifies the interior of the storage containers placed on the shelves using a purge gas (e.g., see Patent Document 1). In such a purge stocker, multiple nozzles for circulating the purge gas between the shelves and the storage containers are provided on the shelves.

[0003] Patent Document 1: International Publication No. 2015 / 194255 Summary of the Invention

[0004] In the above-mentioned purification stocker, when the storage container is placed on the shelf, in order to properly carry out the purification process, it is necessary to make the nozzle and the storage container close contact with a specified contact pressure. Therefore, in order to properly ground the storage container on the shelf, it is required to make the four parts on the shelf exist on the same plane. Therefore, in the above-mentioned purification stocker, it is desired to measure the flatness related to the degree of deviation from the situation where the four specified parts on the shelf exist on the same plane. As a method for measuring the flatness on such a shelf, a method of three-dimensionally measuring these four specified parts is considered, but this measurement operation takes a lot of man-hours and is unrealistic.

[0005] One aspect of the present invention has been made in view of the above-mentioned actual situation, and an object of the present invention is to provide a flatness measuring unit that can easily perform a flatness measurement operation on a shelf.

[0006] A flatness measuring unit according to one aspect of the present invention is placed on a shelf and is used to measure flatness related to the degree of deviation from the situation where four specified positions on the shelf are on the same plane. The unit comprises: a main frame; and four grounding parts, which are dispersed on four sides of the main frame and are configured to be grounded to the four specified positions on the shelf respectively, the four grounding parts including two first grounding parts that are not located at diagonal positions, and two second grounding parts other than the first grounding parts, and the center of gravity position is set in the area including the two first grounding parts among the four areas divided by two diagonal lines passing through the first grounding part and the second grounding part located at diagonal positions in the above-mentioned flatness measuring unit.

[0007] The flatness measuring unit is placed on the shelf in a manner of providing grounding parts at four prescribed locations on the shelf. Thus, a complete plane is determined by three points, and therefore, when the four prescribed locations are not located on the same plane, a gap is formed between any one of the locations and the grounding part, and therefore a value related to the gap can be measured as the flatness. At this time, since the center of gravity of the flatness measuring unit is set in an area including two first grounding parts (the weight of the first grounding part side is heavier than the weight of the second grounding part side) among the four areas divided by two diagonal lines passing through the first grounding part and the second grounding part located at diagonal positions, the two first grounding parts must be grounded to the prescribed locations of the shelf. Therefore, there is no need to measure the gaps between all the grounding parts and the prescribed locations, and it is sufficient to measure the gap between the second grounding part and the prescribed location, which can save the time of the measurement operation. As a result, the flatness measurement operation on the shelf can be easily performed.

[0008] In one aspect of the present invention, the flatness measuring unit may include a measuring device disposed around a second grounding portion of the main frame. When the flatness measuring unit is placed on a shelf, the measuring device measures the distance to a predetermined portion of the shelf corresponding to the second grounding portion or to a portion surrounding the portion. This configuration can save manpower and facilitate the flatness measurement of the shelf.

[0009] In the flatness measuring unit according to one aspect of the present invention, the second grounding portion may include a convex portion forming a spherical or convexly curved grounding surface. The minimum gap between the second grounding portion and a predetermined portion on the shelf can be easily measured from multiple directions.

[0010] In the flatness measuring unit according to one aspect of the present invention, the first grounding portion may include a groove or a recessed portion whose inner surface serves as a grounding surface. With such a configuration, the first grounding portion can be reliably grounded even with respect to an upwardly protruding portion of the shelf.

[0011] In the flatness measuring unit according to one aspect of the present invention, the grounding portion may have a lower hardness than the main frame. In such a configuration, damage to a predetermined portion of the shelf plate that is grounded by the grounding portion can be suppressed.

[0012] In one aspect of the flatness measuring unit of the present invention, a gripping portion for an operator to grip may be provided on the main frame. In such a configuration, the flatness measuring unit can be easily handled manually, making it easier to perform the flatness measurement operation on the shelf.

[0013] In one aspect of the flatness measuring unit of the present invention, a balancing weight may be provided on the first grounding portion side of the main frame. In this case, the flatness measuring unit can be reliably configured such that the weight on the first grounding portion side is heavier than the weight on the second grounding portion side.

[0014] In one aspect of the flatness measuring unit of the present invention, a pin protruding upward may be provided on the shelf, and a groove or recess may be provided on the main frame to form a gap between the pin and the flatness measuring unit when the flatness measuring unit is placed on the shelf. In this configuration, when the flatness measuring unit is placed on the shelf, the groove or recess can prevent interference with the pin on the shelf.

[0015] In one aspect of the flatness measuring unit of the present invention, a nozzle protruding upward may be provided on the shelf, and the main frame may have an opening through which the nozzle passes when the flatness measuring unit is placed on the shelf. In this configuration, when the flatness measuring unit is placed on the shelf, the opening can be used to avoid interference with the nozzle on the shelf.

[0016] One aspect of the present invention is a flatness measuring unit, which is placed on a shelf and is used to measure the flatness related to the degree of deviation from the situation where four specified positions on the shelf are on the same plane. The unit comprises: a main frame; and three grounding parts, which are dispersedly arranged on the main frame and are configured to be grounded to three of the four specified positions on the shelf, respectively, and the center of gravity is set on the inside of a triangular area with the three grounding parts as vertices in the flatness measuring unit.

[0017] In the flatness measuring unit, when placed on a shelf, the center of gravity is set inside the triangular area of the flatness measuring unit with the three grounding parts as vertices respectively, so the three grounding parts must be grounded to the specified parts of the shelf. Thus, the complete plane is determined by 3 points. Therefore, when the four specified parts are located on the same plane, a gap of a specified amount is formed between one of the four specified parts where the grounding part is not grounded and the flatness measuring unit. Therefore, the value related to the gap can be measured as flatness, which can save the man-hours of the flatness measurement operation on the shelf. Therefore, the flatness measurement operation on the shelf can be easily performed.

[0018] A flatness measuring unit according to one aspect of the present invention may include a measuring protrusion disposed on the main frame and positioned at a position corresponding to the remaining predetermined locations of the four predetermined locations on the shelf, excluding the three predetermined locations where the three grounding portions are grounded. The measuring protrusion is configured to form a gap between the measuring protrusion and the remaining predetermined location when the flatness measuring unit is placed on the shelf. Thus, flatness can be measured based on the gap between the measuring protrusion and the remaining predetermined location.

[0019] In one aspect of the flatness measuring unit of the present invention, the grounding portion may include a convex portion forming a grounding surface, and the height of the convex portion for measurement may be lower than a plane defined by the vertices of each of the three convex portions of the grounding portion. This ensures that a gap is formed between the convex portion for measurement and the remaining predetermined portion when the flatness measuring unit is placed on a shelf.

[0020] In one aspect of the flatness measuring unit of the present invention, the distance between the apex of the measuring protrusion and the plane defined by the apex of each of the three grounding portions may be greater than or equal to the maximum deviation. This allows for a more reliable configuration in which a gap is formed between the measuring protrusion and the remaining predetermined portion when the flatness measuring unit is placed on a shelf.

[0021] A flatness measuring unit according to one aspect of the present invention may include a measuring device mounted on a main frame. When the flatness measuring unit is placed on a shelf, the measuring device measures the distance to the remaining predetermined locations, or their surrounding locations, excluding the three predetermined locations where the three grounding portions are grounded. This configuration can save manpower and facilitate the flatness measurement of the shelf.

[0022] Effects of the Invention: According to one aspect of the present invention, a flatness measuring unit can be provided that can easily perform a flatness measurement operation on a shelf. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a perspective view showing a shelf on which the flatness measuring unit according to the first embodiment is placed.

[0024] Figure 2 This is a perspective view showing a state where the flatness measuring unit according to the first embodiment is placed on a shelf.

[0025] Figure 3 This is a perspective view of the flatness measuring unit according to the first embodiment as viewed from the bottom.

[0026] Figure 4 It is a perspective view showing the rear side of the flatness measuring unit according to the first embodiment.

[0027] Figure 5 It is a plan view schematically showing the flatness measuring unit according to the first embodiment.

[0028] Figure 6 This is a perspective view of the flatness measuring unit according to the second embodiment as viewed from above.

[0029] Figure 7 This is a perspective view of the flatness measuring unit according to the second embodiment as viewed from the bottom.

[0030] Figure 8 This is a perspective view showing a state where the flatness measuring unit according to the second embodiment is placed on a shelf.

[0031] Figure 9 It is a side view schematically showing the periphery of the second grounding portion in a state where the flatness measuring unit according to the second embodiment is placed on a shelf.

[0032] Figure 10 This is a perspective view showing a state where the flatness measuring unit according to the third embodiment is placed on a shelf.

[0033] Figure 11 This is a perspective view of the flatness measuring unit according to the third embodiment as viewed from the bottom.

[0034] Figure 12 This is a perspective view showing a state where the flatness measuring unit according to the fourth embodiment is placed on a shelf.

[0035] Figure 13 It is a perspective view showing the rear side of the flatness measuring unit according to the fourth embodiment.

[0036] Figure 14 It is a plan view schematically showing a flatness measuring unit according to a fourth embodiment.

[0037] Figure 15 This is a perspective view of the flatness measuring unit according to the fifth embodiment as viewed from above.

[0038] Figure 16 This is a perspective view of the flatness measuring unit according to the fifth embodiment as viewed from the bottom.

[0039] Figure 17 This is a perspective view showing a state where the flatness measuring unit according to the fifth embodiment is placed on a shelf.

[0040] Figure 18 This is a perspective view showing a state where the flatness measuring unit according to the sixth embodiment is placed on a shelf.

[0041] Figure 19 This is a perspective view of the flatness measuring unit according to the sixth embodiment as viewed from the bottom.

[0042] Explanation of symbols

[0043] 1, 51, 81, 121, 151, 181: Flatness measuring unit; 2: Main frame; 2p: Opening; 3: Grounding portion; 3a, 83a: First grounding portion; 3b: Second grounding portion; 4: Measuring device; 5: Holding portion; 7v: V-groove; 31: Protrusion; 85: V-groove (groove portion); 101, 201, 301: Shelf; 102, 302: Pin; 103, 203, 303: Nozzle; 153: Protrusion for measurement; A, A0: Area; BW, BW2, BW3: Balance weight; G: Center of gravity position; T: Diagonal line. DETAILED DESCRIPTION

[0044] An embodiment is described below with reference to the accompanying drawings. In the description of the drawings, identical elements are labeled identically, and duplicate descriptions are omitted. The dimensional ratios in the drawings do not necessarily correspond to the objects described. The terms "upper" and "lower" are used for convenience of explanation based on the illustrated conditions.

[0045] [First embodiment]

[0046] Figure 1 It is a perspective view showing the shelf 101 on which the flatness measuring unit 1 is placed. Figure 2 It is a perspective view showing the flatness measuring unit 1 placed on the shelf 101 . Figure 3 This is a perspective view of the flatness measuring unit 1 as viewed from the bottom. Figure 4 1 is a perspective view showing the rear side of the flatness measuring unit 1. The X direction corresponds to one horizontal direction, the Y direction corresponds to a horizontal direction orthogonal to the X direction, and the Z direction corresponds to a vertical direction.

[0047] like Figure 1 as well as Figure 2 As shown, the flatness measuring unit 1 is a unit placed on the shelf 101 and used to measure the flatness on the shelf 101. The flatness on the shelf 101 refers to an index related to the degree of deviation from the situation where the four prescribed parts on the shelf 101 are on the same plane. The flatness on the shelf 101 can be represented, for example, by the size of the gap (gap amount) formed between a plane determined by any three of the four prescribed parts on the shelf 101 and the remaining prescribed part. The larger the gap amount, the worse the flatness is. In addition, the flatness on the shelf 101 is not particularly limited as long as it is related to the degree of deviation, and can be various well-known indicators.

[0048] Shelves 101 form the purge rack of the purge stocker 100. The purge stocker 100 purifies the interior of storage containers using purge gas and also functions as a storage facility for multiple storage containers. Storage containers are reticle boxes or FOUPs (Front Opening Unified Pods) that hold objects such as semiconductor wafers or glass substrates. Nitrogen or air, for example, is used as the purge gas. The purge stocker 100 is, for example, located in a cleanroom.

[0049] A plurality of shelves 101 are arranged along the X direction and the Z direction in the purification storage container 100. The shelf 101 is supported by a shelf bracket BR. The shelf 101 is formed into a flat plate along the XY plane. The shelf 101 has an opening portion that is open on the front side (one side in the Y direction) when viewed from above. Storage containers are placed on the shelf 101. Three pins 102 protruding upward are provided on the shelf 101. The pins 102 are movable pins that have the function of positioning the storage container. In the example shown in the figure, the pins 102 are dispersedly arranged at three points on the upper surface of the shelf 101 that are not in a straight line when viewed from above.

[0050] Four nozzles 103 protruding upward are provided on the shelf 101. The nozzles 103 allow the purified gas to circulate between the storage container placed on the shelf 101. The upper part of the tube end of the nozzle 103 is made of a rigid body. The upper surface of the nozzle 103 is formed into a flat surface. By making the upper surface of the nozzle 103 close to the air vent of the storage container, the purified gas can be supplied to the interior of the storage container, or the excess purified gas can be discharged from the interior of the storage container. The nozzles 103 are dispersed on the four sides of the upper surface of the shelf 101. In the example shown in the figure, the nozzles 103 are dispersed at the four corners of the shelf 101 (two locations on the front side and two locations on the rear side (the other side in the Y direction)) when viewed from above. In this embodiment, on the shelf 101, the storage container is placed on the upper surface of the four nozzles 103 and supported. The upper surfaces of the four nozzles 103 correspond to the four specified locations that are the objects of flatness measurement by the flatness measurement unit 1.

[0051] like Figure 2 、 Figure 3 as well as Figure 4 As shown, the flatness measuring unit 1 includes a main frame 2 , a grounding portion 3 , a measuring device 4 , a gripping portion 5 , a guide member 7 , a battery 8 , a data logger 9 , a display 10 , and a transformer 11 .

[0052] The main frame 2 is in the shape of a plate of a size that can be placed on the shelf 101. The main frame 2 has a planar upper surface 2u and a lower surface 2d. The main frame 2 is formed of a metal such as aluminum. In the example shown in the figure, the main frame 2 is formed so that one side and the other side of the Y direction are wider in the X direction than the center portion in the Y direction (in other words, the width of the center portion in the Y direction is narrow (necked)).

[0053] The grounding portion 3 is formed separately from the main frame 2. The hardness of the grounding portion 3 is lower than that of the main frame 2. The grounding portion 3 is formed of resin. The grounding portion 3 here is formed of PEEK (Poly Ether Ether Ketone) resin with excellent wear resistance. Four grounding portions 3 are arranged dispersedly on the four sides of the main frame 2. The grounding portion 3 is configured to be grounded to the four nozzles 103 of the shelf 101 respectively. The grounding portion 3 is provided at positions corresponding to the four nozzles 103 in the main frame 2.

[0054] The four grounding portions 3 include two first grounding portions 3a and two second grounding portions 3b. The first grounding portions 3a are located at two locations on the front side of the main frame 2. The second grounding portions 3b are located at two locations on the rear side of the main frame 2. The two first grounding portions 3a are grounding portions 3 that are not located at diagonal positions among the four grounding portions 3. The two second grounding portions 3b are grounding portions 3 other than the first grounding portions 3a and are not located at diagonal positions among the four grounding portions 3. The line segment connecting the two first grounding portions 3a does not intersect the line segment connecting the two second grounding portions 3b.

[0055] The grounding portion 3 is mounted on the upper surface 2u side of the main frame 2 by screws or the like. The grounding portion 3 has a convex portion 31 constituting a spherical grounding surface. The convex portion 31 is a portion of the grounding portion 3 that passes through the main frame 2 downward and protrudes from the lower surface 2d when the grounding portion 3 is mounted on the main frame 2. The convex portion 31 is cylindrical, and its lower end surface is the grounding surface. The grounding surface is a surface that can be grounded to a specified portion of the shelf 101. The vertices (lower end points) of the convex portions 31 in the four grounding portions 3 are located on the same plane.

[0056] The measuring device 4 is installed around each of the second grounding portions 3b on the main frame 2. The measuring device 4 measures the distance to the upper surface of the rear nozzle 103 (the nozzle 103 corresponding to the second grounding portion 3b). The measuring device 4 is installed near the rear of the second grounding portion 3b. When viewed from above, the area encompassing the protrusion 31 of the second grounding portion 3b and the measuring point of the measuring device 4 is configured to converge on the upper surface of the nozzle 103.

[0057] The measuring device 4 uses, for example, a laser length measuring device. The measuring device 4 emits measuring light L downward through a measuring through-hole 2h formed in the main frame 2 and receives light reflected from the upper surface of the nozzle 103, thereby measuring the distance to the upper surface of the nozzle 103. The measuring device 4 is not particularly limited; various known devices can be used. For example, a micrometer can also be used as the measuring device 4.

[0058] The gripping portion 5 is a portion to be gripped by an operator. The gripping portion 5 is fixed to both ends in the X direction of the upper surface 2u of the main frame 2. As the gripping portion 5, a long strip-shaped member that is appropriately bent is used.

[0059] The guide component 7 is a block-shaped component having a V-groove (groove portion) 7v that is open downward and extends in the horizontal direction. The V-groove 7v is a groove with a V-shaped cross-section. Three guide components 7 are provided in the main frame 2 in such a manner that the V-groove 7v is exposed downward. The guide component 7 is mounted on the upper surface 2u side of the main frame 2 by screws or the like. The guide components 7 are dispersedly arranged on the main frame 2. The guide components 7 are provided at positions corresponding to the three pins 102, respectively. When the flatness measuring unit 1 is placed on the shelf 101, the guide component 7 accommodates the pin 102 in the V-groove 7v and forms a gap between the pin 102 and the V-groove 7v (i.e., to avoid placing the flatness measuring unit 1 on the pin 102).

[0060] The battery 8 supplies power for the flatness measuring unit 1 and is fixed to a front-center position on the upper surface 2u of the main frame 2. The data logger 9 stores the measurement results obtained by the measuring device 4. The data logger 9 is fixed to a front-center position on the upper surface 2u of the main frame 2. The display 10 displays the measurement results obtained by the measuring device 4 or stored in the data logger 9. The number of displays 10 varies depending on the number of measuring devices 4; here, two displays 10 are provided. The displays 10 are fixed to the upper surface 2u of the main frame 2, on the front side and on one and the other sides in the X direction. One display 10 displays the measurement results of one measuring device 4, while the other display 10 displays the measurement results of the other measuring device 4. The transformer 11 appropriately transforms the power supplied from the battery 8. The transformer 11 is fixed to the front side of the upper surface 2u of the main frame 2. The battery 8, data logger 9, display 10, and transformer 11 are not particularly limited; various known devices can be used.

[0061] In this embodiment, the weight of the first grounding portion 3a side of the flatness measuring unit 1 is heavier than the weight of the second grounding portion 3b side. In other words, the front side of the flatness measuring unit 1 is heavier than the rear side. Figure 5As shown, the center of gravity position G of the flatness measuring unit 1 is set in the area A0 where the two first grounding portions 3a are located, among the four areas A divided by two diagonal lines T passing through the first grounding portions 3a and the second grounding portions 3b located at diagonal positions. That is, the two grounding portions 3 located on the opposite side of the area A0 where the center of gravity position G is located, namely the second grounding portion 3b, are used as the measurement points for measuring the gap with the nozzle 103, among the four areas A divided by the two diagonal lines T connecting the four diagonal grounding portions 3. The first grounding portion 3a is the grounding portion 3 that divides the area A0. The flatness measuring unit 1 is configured so that, when viewed from above, the center of gravity position G is offset to the front side (toward the first grounding portion 3a) relative to the center in the Y direction. As shown in the drawing, in a top view (a top view of the flatness measuring unit 1 placed on the shelf 101 ), the center of gravity G is set in an area A0 including two first grounding portions 3 a among the four areas A in the flatness measuring unit 1 .

[0062] Next, an example of measuring the flatness of the shelf 101 of the purge stocker 100 using the flatness measuring unit 1 will be described.

[0063] In the shelf 101, since it is desired to make the vent (purification port surface) of the placed storage container in close contact with the four nozzles 103, the flatness of the upper surface of the four nozzles 103 is measured. First, the operator places the flatness measuring unit 1 on the flat plate, and resets the measuring device 4 to zero when all four grounding parts 3 are grounded to the flat plate. The operator holds the holding part 5 and places the flatness measuring unit 1 on the unillustrated entrance and exit port of the purification storage container 100. The operator starts the measurement of the measuring device 4 and starts recording the measurement results in the data recorder 9. Hereinafter, the measurement results of the measuring device 4 are continuously recorded in the data recorder 9 until the recording in the data recorder 9 stops.

[0064] Next, the operator sets the transfer source and transfer destination for a crane robot (not shown) in the clean stocker 100 and begins using the crane robot to transfer the flatness measuring unit 1. As a result, the flatness measuring unit 1 is transferred from the access port to the shelf 101 with the grounding portion 3 contacting the upper surfaces of the four nozzles 103.

[0065] Here, the weight of the first grounding portion 3a side in the flatness measuring unit 1 is heavier than the weight of the second grounding portion 3b side. Therefore, when the flatness measuring unit 1 is placed on the shelf 101, there is no possibility of a gap being formed between the two first grounding portions 3a and the upper surface of the nozzle 103, but there is a possibility of a gap being formed between any one of the two second grounding portions 3b and the upper surface of the nozzle 103. The amount of gap between the second grounding portion 3b and the upper surface of the nozzle 103 is measured by the measuring device 4 as the flatness. In addition, when both second grounding portions 3b are grounded to the upper surface of the nozzle 103, the flatness (gap amount) measured by the measuring device 4 is 0. After a certain period of time when the measurement results of the measuring device 4 are stable, the unit is transferred to the next shelf 101 by the lifting robot.

[0066] Next, the above-mentioned measurement and transfer are repeated for a number of shelves 101. When the flatness measurement on all shelves 101 is completed, the flatness measurement unit 1 is returned to the access port by the crane robot. The operator stops recording of the data recorder 9 and takes out the recorded data from the data recorder 9. The recorded data is continuous data from being placed on the access port to returning to the access port. Therefore, by comparing the data with the settings of the transfer source and the transfer destination, it is possible to associate which part of the data is the flatness of which shelf 101. Based on the above, the measurement of the flatness of each shelf 101 of the purification storage container 100 is completed. Afterwards, the shelf 101 and the like are adjusted based on the measured flatness as needed.

[0067] As described above, the flatness measuring unit 1 is placed on the shelf 101 with grounding portions 3 provided on the upper surfaces of the four nozzles 103 on the shelf 101. Thus, since a perfect plane is defined by three points, when the upper surfaces of the four nozzles 103 are not coplanar, a gap is formed between any of these locations and the grounding portion 3. Therefore, a value related to this gap can be measured as the flatness. In this case, the center of gravity of the flatness measuring unit 1 is located in area A0, which includes two first grounding portions 3a (the weight of the first grounding portion 3a is heavier than the weight of the second grounding portion 3b), of the four areas A divided by two diagonal lines T passing through the diagonally located first grounding portions 3a and second grounding portions 3b. Therefore, the two first grounding portions 3a are guaranteed to be grounded at predetermined locations on the shelf 101. Therefore, it is not necessary to measure the gaps between all grounding portions 3 and the nozzles 103; only the gap between the second grounding portion 3b and the nozzles 103 needs to be measured, which can save measurement time. As a result, the flatness measurement operation on the shelf 101 can be easily performed.

[0068] In the flatness measurement unit 1, a measuring device 4 is provided around the second grounding portion 3b of the main frame 2. The measuring device 4 measures the distance to the upper surface of the nozzle 103 corresponding to the second grounding portion 3b. This configuration saves manpower and facilitates the flatness measurement of the shelf 101.

[0069] In the flatness measuring unit 1, the hardness of the grounding portion 3 is lower than the hardness of the main frame 2. In such a configuration, damage to the upper surface of the nozzle 103 on the shelf 101 that is grounded by the grounding portion 3 can be suppressed.

[0070] In the flatness measuring unit 1, a grip 5 for an operator to grip is provided on the main frame 2. With such a configuration, the flatness measuring unit 1 can be easily handled manually, and the flatness measurement operation on the shelf 101 can be further easily performed.

[0071] In the flatness measuring unit 1, the main frame 2 is provided with a V-groove 7v that forms a gap between the flatness measuring unit 1 and the pins 102 on the shelf 101 when the flatness measuring unit 1 is placed on the shelf 101. With this configuration, the V-groove 7v can avoid interference with the pins 102 when the flatness measuring unit 1 is placed on the shelf 101.

[0072] In the flatness measurement unit 1, a battery 8, a data logger 9, a display 10, and a transformer 11 are installed on the first grounding portion 3a side (front side) of the main frame 2. This configuration allows the front side of the flatness measurement unit 1 to be reliably heavier than the rear side by utilizing the weight of the battery 8, data logger 9, display 10, and transformer 11. Since the flatness measurement unit 1 is equipped with at least the measuring device 4, the battery 8, and the data logger 9, it can automatically measure flatness.

[0073] [Second embodiment]

[0074] Next, a second embodiment will be described. In the description of this embodiment, differences from the above-mentioned first embodiment will be described.

[0075] Figure 6 It is a perspective view of the flatness measuring unit 51 as viewed from above. Figure 7 It is a perspective view of the flatness measuring unit 51 as viewed from the bottom. Figure 8 2 is a perspective view showing the flatness measuring unit 51 placed on the shelf 201. Figures 6 to 8 As shown, the flatness measuring unit 51 of this embodiment is placed on a shelf 201 constituting a clean rack of a clean stocker 200 .

[0076] Two upward-protruding nozzles 203 are provided on shelf 201. Nozzles 203 circulate purge gas between the container and the shelf. Nozzles 203 have a built-in spring. When viewed from above, nozzles 203 are positioned at two locations on the front side of shelf 201. On shelf 201, the front side of the container is supported by the upper surfaces of the two nozzles 203, while the rear side of the container is supported by the upper surface 201u of shelf 201.

[0077] In this embodiment, two front locations of the upper surface 201u of the shelf 201 near the nozzle 203 and two rear locations of the upper surface 201u of the shelf 201 correspond to the four predetermined locations for which flatness is measured by the flatness measuring unit 51. Specifically, because the nozzle 203 has a spring-loaded structure and is easily deformed, the four predetermined locations for which flatness is measured do not include the upper surface of the two nozzles 203, but instead include the two locations of the upper surface 201u near the nozzle 203. Alternatively, the four predetermined locations may include the upper surface of the two nozzles 203.

[0078] In the flatness measuring unit 51, the main frame 2 is a plate member having a rectangular outer shape when viewed from above. In the flatness measuring unit 51, the first grounding portion 3a is arranged at two locations on the rear side of the main frame 2. The second grounding portion 3b is arranged at two locations on the front side of the main frame 2. The flatness measuring unit 51 includes a balancing weight BW. The balancing weight BW is a block-shaped weight. The balancing weight BW is provided on the first grounding portion 3a side of the upper surface 2u of the main frame 2 (on the rear side in the illustrated example).

[0079] The flatness measuring unit 51 does not include the measuring device 4, the battery 8, the data logger 9, the display 10, and the transformer 11 (see Figure 2 In the flatness measurement unit 51, an opening 2p is provided in the main frame 2. The opening 2p is a hole that passes through the main frame 2 vertically. The opening 2p allows the nozzle 203 to pass through (be inserted through) when the flatness measurement unit 51 is placed on the shelf 201. The opening 2p is formed at both ends of the main frame 2 in the X direction, including two locations on the front side corresponding to the nozzle 203 on the shelf 201.

[0080] The flatness measuring unit 51 is heavier on the first grounding portion 3a side than on the second grounding portion 3b side. In other words, the rear side of the flatness measuring unit 51 is heavier than the front side. The flatness measuring unit 51 is configured such that, when viewed from above, its center of gravity G is offset to the rear of the center in the Y direction.

[0081] like Figure 8As shown, such a flatness measuring unit 51 is placed on the shelf 201 in such a manner that the convex portion 31 of the first grounding portion 3a is grounded to two rear portions of the upper surface 201u, and the convex portion 31 of the second grounding portion 3b is grounded to two front portions of the upper surface 201u close to the nozzle 203. The nozzle 203 of the shelf 201 is inserted into the opening 2p of the main frame 2. Here, since the first grounding portion 3a side in the flatness measuring unit 51 is heavier than the second grounding portion 3b side, a gap can be generated between any one of the two second grounding portions 3b and the upper surface 201u. Therefore, it is confirmed whether the gap gauge 56 can be inserted between the convex portion 31 of any one of the two second grounding portions 3b and the upper surface 201u, and the gap amount (the thickness of the gap gauge 56) is measured as the flatness (refer to Figure 8 The arrows in Figure 9 ).

[0082] As described above, the flatness measuring unit 51 also achieves the same effect as in the above embodiment, that is, the effect of being able to easily perform the flatness measurement operation on the shelf 201 .

[0083] In the flatness measuring unit 51, as Figure 9 As shown, the second grounding portion 3b has a convex portion 31 forming a spherical grounding surface. Therefore, when using a gap gauge 56 to measure the gap, for example, the minimum gap between the convex portion 31 of the second grounding portion 3b and the upper surface 201u of the shelf 201 can be easily measured from any direction. In other words, variations in the thickness of the insertable gap gauge 56 due to differences in the direction in which the gap gauge 56 is inserted can be suppressed.

[0084] In the flatness measuring unit 51, a balancing weight BW is provided on the first grounding portion 3a side of the main frame 2. In this case, the flatness measuring unit 51 can be reliably configured so that the first grounding portion 3a side is heavier than the second grounding portion 3b side.

[0085] In the flatness measuring unit 51, the main frame 2 has an opening 2p through which the nozzle 203 passes when the flatness measuring unit 51 is placed on the shelf 201. With this configuration, when the flatness measuring unit 51 is placed on the shelf 201, interference with the nozzle 203 can be avoided by the opening 2p.

[0086] In the flatness measuring unit 51, the gap between the second grounding portion 3b of the grounding portion 3, which is located on the front side (front side), and the shelf 201 is measured. By setting the measurement point on the front side, inserting the gap gauge 56 is easier. By setting the center of gravity position G at any position, the measurement point can be set to any position. Since the flatness measuring unit 51 does not include the measuring device 4 or the like, the structure can be simplified.

[0087] [Third embodiment]

[0088] Next, a third embodiment will be described. In the description of this embodiment, differences from the second embodiment described above will be described.

[0089] Figure 10 It is a perspective view showing the flatness measuring unit 81 placed on the shelf 301 . Figure 11 This is a perspective view of the flatness measuring unit 81 as viewed from the bottom. Figure 10 as well as Figure 11 As shown, the flatness measuring unit 81 of this embodiment is placed on a shelf 301 constituting a clean rack of a clean stocker 300 .

[0090] On the shelf 301 , the storage container placement areas R are provided at two locations so as to be aligned in the X direction.

[0091] The shelf 301 has openings at two loading locations R, each opening toward the front when viewed from above. Two nozzles 303 projecting upward are provided at each of the two loading locations R on the shelf 301. The nozzles 303 circulate purge gas between the shelf 301 and the storage container. The nozzles 303 have a accordion-like structure formed of rubber. In the illustrated example, the nozzles 303 are located at two locations on the rear side of the shelf 301 at the two loading locations R.

[0092] Two pins 302 projecting upward are provided at two locations R on the shelf 301. These pins 302 are movable pins that function to position the storage containers. In the illustrated example, the pins 302 are located at two locations on the front side of the shelf 301, as viewed from above, at the two locations R. At each location R on the shelf 301, the front side of the storage container is supported by the two pins 302, while the rear side is supported by the upper surfaces of the two nozzles 303.

[0093] In this embodiment, two rearward locations of the upper surface 301u of the shelf 301 near the nozzle 303 and the two pins 302 of the shelf 301 correspond to the four predetermined locations for which flatness is measured by the flatness measuring unit 81. Specifically, since the nozzle 303 has an accordion-like structure and is easily deformed, the four predetermined locations for flatness do not include the upper surfaces of the two nozzles 303. Instead, the two locations of the upper surface 301u near the nozzle 303 are included. Alternatively, the upper surfaces of the two nozzles 303 may be included in the four predetermined locations depending on the circumstances.

[0094] The flatness measuring unit 81 replaces the first grounding portion 3a (see Figure 6) and has a first grounding portion 83a. The first grounding portion 83a is a block-shaped component having a V-groove (groove portion) 85 that is open downward and extends along the horizontal direction 7. The V-groove 85 is a groove with a V-shaped cross section that uses the inner surface as a grounding surface. The first grounding portion 83a is provided at two front locations in the main frame 2 in such a manner that the V-groove 85 is exposed downward. The first grounding portion 83a is mounted on the upper surface 2u side of the main frame 2 by screws or the like. The first grounding portion 83a is provided at positions corresponding to the two pins 302, respectively. The first grounding portion 83a is arranged on the pin 302 in such a manner that the V-groove 85 is grounded to the pin 302 when the flatness measuring unit 81 is placed on the shelf 101.

[0095] In the flatness measurement unit 81, the second grounding portions 3b are located at two locations on the rear side of the main frame 2. In the flatness measurement unit 81, a balancing weight BW is provided on the upper surface 2u of the main frame 2, on the side of the first grounding portion 3a (in the illustrated example, on the front side). In the flatness measurement unit 81, an opening 2p provided in the main frame 2 allows the nozzle 303 to pass through (be inserted through) when the flatness measurement unit 51 is placed on the shelf 201. The opening 2p is formed on the rear side of the main frame 2.

[0096] The flatness measuring unit 81 is heavier on the first grounding portion 3a side than on the second grounding portion 3b side. In other words, the front side of the flatness measuring unit 81 is heavier than the rear side. The flatness measuring unit 81 is configured such that, when viewed from above, its center of gravity G is offset forward of the center in the Y direction.

[0097] Such a flatness measuring unit 81 is placed on the shelf 301 in such a manner that the V-groove 85 of the first grounding portion 83a is grounded to two pins 302 and the convex portion 31 of the second grounding portion 3b is grounded to two locations on the rear side of the upper surface 301u close to the nozzle 303. The nozzle 303 of the shelf 301 is inserted into the opening 2p of the main frame 2. Here, the first grounding portion 83a side in the flatness measuring unit 81 is heavier than the second grounding portion 3b side, so a gap can be generated between any one of the two second grounding portions 3b and the upper surface 301u. Therefore, it is confirmed whether the gap gauge 56 can be inserted between the convex portion 31 of any one of the two second grounding portions 3b and the upper surface 301u (refer to Figure 9 ), and measure the gap as flatness.

[0098] As described above, the flatness measuring unit 81 also achieves the same effect as in the other embodiments, that is, the effect of being able to easily perform the flatness measurement operation on the shelf 301 .

[0099] In the flatness measuring unit 81, the first grounding portion 83a has a V-groove 85 with its inner surface serving as a grounding surface. With this configuration, the first grounding portion 83a can be reliably grounded even against the pin 302 (the portion protruding upward) on the shelf 301.

[0100] [Fourth embodiment]

[0101] Next, a fourth embodiment will be described. In the description of this embodiment, descriptions overlapping with those of the first embodiment will be omitted as appropriate.

[0102] Figure 12 It is a perspective view showing the flatness measuring unit 121 placed on the shelf 101 . Figure 13 1 is a perspective view showing the rear side of the flatness measuring unit 121. Figure 12 as well as Figure 13 As shown, the flatness measuring unit 121 is placed on the shelf 101 and is used to measure the flatness of the shelf 101. The flatness measuring unit 121 is the same as the first embodiment described above, and includes a main frame 2, a grounding portion 3, a measuring device 4, a gripping portion 5, a guide member 7, a battery 8, a data logger 9, a display 10, and a transformer 11.

[0103] In this embodiment, three grounding parts 3 are dispersedly arranged on the main frame 2. The grounding parts 3 are arranged to be grounded to three nozzles 103 of the four nozzles 103 of the shelf 101 respectively. The grounding parts 3 are arranged at positions corresponding to the three nozzles 103 in the main frame 2. The three grounding parts 3 include two first grounding parts 3a and one second grounding part 3b. The first grounding part 3a is arranged at two front positions in the main frame 2. The second grounding part 3b is arranged at a rear position in the main frame 2. The second grounding part 3b is arranged at a position away from the rear side of any one of the two first grounding parts 3a. The positions of the vertices (lower end points) of the protrusions 31 in the three grounding parts 3 are located on the same plane.

[0104] The measuring device 4 of this embodiment measures the distance to the remaining nozzles 103 (hereinafter also referred to as "remaining nozzles 103") other than the three nozzles 103 on the shelf 101 to which the three grounding parts 3 are grounded, when the flatness measuring unit 121 is placed. The measuring device 4 is provided at a position away from the second grounding part 3b in the X direction on the rear side of the main frame 2. The measuring device 4 measures the distance to the upper surface of the remaining nozzles 103 to which the grounding part 3 is not grounded. The measuring device 4 emits the measuring light L downward, emits the measuring light L downward through the measuring through hole 2h formed in the main frame 2, and receives the reflected light reflected by the upper surface of the remaining nozzles 103 to measure the distance to the upper surface of the remaining nozzles 103. There is no particular limitation on the measuring device 4, and various well-known devices can be used. As the measuring device 4, for example, a micrometer can also be used. The display 10 of this embodiment is provided according to the number of measuring devices 4, and one is provided here. The display 10 is fixed to the upper surface 2 u of the main body frame 2 on the front side and one side in the X direction.

[0105] In this embodiment, if Figure 12 as well as Figure 14 As shown, the center of gravity G of the flatness measuring unit 121 is located inside the triangular region A1 of the flatness measuring unit 121, which has the three grounding portions 3 as vertices. In other words, the weight of the side of the flatness measuring unit 121 where the measuring device 4 is located is lighter than the weight of the diagonal side. As shown in the figure, the center of gravity G is located within the triangular region A1 of the TR, which is the area surrounded by the three grounding portions 3, when viewed from above.

[0106] Next, an example of measuring the flatness of the shelf 101 of the purge stocker 100 using the flatness measuring unit 121 will be described.

[0107] In the shelf 101, since it is desired to make the vent (purification port surface) of the placed storage container in close contact with the four nozzles 103, the flatness of the upper surface of the four nozzles 103 is measured. First, the operator places the flatness measuring unit 121 on the flat plate, and resets the measuring device 4 to zero when all three grounding parts 3 are grounded to the flat plate. The operator holds the holding part 5 and places the flatness measuring unit 121 on the unillustrated entrance and exit port of the purification storage container 100. The operator starts the measurement of the measuring device 4 and starts recording the measurement results in the data recorder 9. Hereinafter, the measurement results of the measuring device 4 are continuously recorded in the data recorder 9 until the recording in the data recorder 9 stops.

[0108] Next, the operator sets the transfer source and transfer destination for a crane robot (not shown) in the clean stocker 100 and begins using the crane robot to transfer the flatness measuring unit 121. The flatness measuring unit 121 is then transferred from the access port onto the shelf 101 with the grounding portion 3 contacting the upper surfaces of the three nozzles 103.

[0109] Here, the center of gravity position G of the flatness measuring unit 121 is set inside the area A1 of the triangle TR with the three grounding parts 3 as vertices. Therefore, when the flatness measuring unit 121 is placed on the shelf 101, there is no possibility of a gap forming between the three grounding parts 3 and the upper surface of the nozzle 103, and the three grounding parts 3 are reliably grounded to the upper surface of the nozzle 103. In this state, the flatness measuring unit 121 is stable. The amount of gap between the flatness measuring unit 121 and the remaining upper surface of the nozzle 103 not grounded by the grounding part 3 is measured by the measuring device 4 as the flatness. After a certain period of time when the measurement results of the measuring device 4 are stable, the flatness measuring unit 121 is moved to the next shelf 101 by the lifting robot.

[0110] If the gap amount measured by the measuring device 4 is a predetermined amount, the surface formed by the upper surfaces of the four nozzles 103 can be determined to be flat, and the flatness is 0. If the gap amount measured by the measuring device 4 is not a predetermined amount, the surface formed by the upper surfaces of the four nozzles 103 can be determined to be non-flat, and the flatness is determined based on the degree to which the gap amount deviates from the predetermined amount. The predetermined amount is the gap amount when the flatness is 0, and is predetermined.

[0111] Next, the above-mentioned measurement and transfer are repeated for a number of shelves 101. When the flatness measurement on all shelves 101 is completed, the flatness measurement unit 121 is returned to the access port by the crane robot. The operator stops recording of the data recorder 9 and takes out the recorded data from the data recorder 9. The recorded data is continuous data from being placed on the access port to returning to the access port. Therefore, by comparing the data with the settings of the transfer source and the transfer destination, it is possible to associate which part of the data is the flatness of which shelf 101. Based on the above, the measurement of the flatness of each shelf 101 of the purification storage container 100 is completed. Afterwards, the shelf 101 is adjusted based on the measured flatness as needed.

[0112] As described above, in the flatness measuring unit 121, when placed on the shelf 101, the center of gravity position G is set on the inner side of the area A1 of the triangle TR with the three grounding parts 3 as vertices, so the three grounding parts 3 must be grounded to the upper surface of the nozzle 103 of the shelf 101. Thus, the complete plane is determined by 3 points, so when the upper surfaces of the four nozzles 103 are located on the same plane, a gap of a specified amount is formed between a portion of the upper surface of the four nozzles 103 that is not grounded by the grounding part 3 and the flatness measuring unit 121. Therefore, the value related to the gap can be measured as the flatness. Since the measuring part is determined as one part, the working hours of the flatness measurement operation on the shelf 101 can be saved. Therefore, the flatness measurement operation on the shelf 101 can be easily performed.

[0113] The flatness measurement unit 121 includes a measuring device 4 mounted on the main frame 2. With the flatness measurement unit 121 mounted on the shelf 101, the measuring device 4 measures the distance to the upper surface of the nozzle 103 remaining on the shelf 101 that is not grounded by the grounding portion 3. This configuration saves manpower and facilitates flatness measurement on the shelf 101. Furthermore, only one measuring device 4 is required.

[0114] [Fifth embodiment]

[0115] Next, a fifth embodiment will be described. In the description of this embodiment, differences from the second embodiment described above will be described.

[0116] Figure 15 It is a perspective view of the flatness measuring unit 151 as viewed from above. Figure 16 It is a perspective view of the flatness measuring unit 151 as viewed from the bottom. Figure 17 2 is a perspective view showing the flatness measuring unit 151 placed on the shelf 201. Figures 15 to 17 As shown, the flatness measuring unit 151 of this embodiment is placed on a shelf 201 constituting a clean rack of a clean stocker 200 .

[0117] In the present embodiment, two front portions of the upper surface 201u of the shelf 201 close to the two nozzles 203 and two rear portions of the upper surface 201u of the shelf 201 correspond to four specified portions that are the objects of flatness measurement by the flatness measuring unit 151. In the flatness measuring unit 151, three grounding portions 3 are dispersedly arranged on the main frame 2. The grounding portion 3 is configured to be grounded to a front portion of the upper surface 201u close to one of the nozzles 203 and two rear portions of the upper surface 201u, respectively. The three grounding portions 3 include two first grounding portions 3a and one second grounding portion 3b. The first grounding portion 3a is arranged at two rear portions of the main frame 2. The second grounding portion 3b is arranged at a front portion of the main frame 2. The second grounding portion 3b is arranged at a position away from the front side of any one of the two first grounding portions 3a.

[0118] The flatness measuring unit 151 further includes a balancing weight BW2. The balancing weight BW2 is a block-shaped weight and is provided on the upper surface 2u of the main frame 2, inside a triangular region TR having three grounding portions 3 as vertices.

[0119] The flatness measuring unit 151 includes a measuring protrusion 153 disposed on the main frame 2. The measuring protrusion 153 is located at a position corresponding to the remaining predetermined location (hereinafter, the location in front of the nozzle 203 closest to the other nozzle 203) of the four predetermined locations on the shelf 201, excluding the three predetermined locations where the three grounding portions 3 are grounded. The measuring protrusion 153 is located in a position away from the front of the other of the two first grounding portions 3a. The measuring protrusion 153 is provided so as to protrude from the lower surface 2d of the main frame 2.

[0120] The measuring protrusion 153 is configured to form a gap between the measuring protrusion 153 and the remaining specified portion when the flatness measuring unit 151 is placed on the shelf 201. The height (protruding length) of the measuring protrusion 153 is lower than the plane defined by (passing through) the vertices of the protrusions 31 of the three grounding portions 3. The distance between the vertices of the measuring protrusion 153 and the plane defined by the vertices of the protrusions 31 of the three grounding portions 3 can be greater than the maximum deviation. The maximum deviation is the amount of gap between the measuring protrusion 153 and the remaining specified portion, assuming the flatness is at its maximum (the maximum deviation). The maximum deviation is a predetermined value that can be determined in advance through calculation, testing, and / or experience.

[0121] The center of gravity G of the flatness measuring unit 151 is located inside the triangle TR of the flatness measuring unit 151, with the three grounding portions 3 serving as vertices. In other words, the weight of the side of the flatness measuring unit 151 where the measuring protrusion 153 is located is lighter than the weight of the diagonal side. As shown in the figure, the center of gravity G is located within the triangle TR, the area surrounded by the three grounding portions 3, when viewed from above.

[0122] Such a flatness measuring unit 151 is placed on the shelf 201 in such a manner that the protrusion 31 of the first grounding portion 3a is grounded to two rear portions of the upper surface 201u, and the protrusion 31 of the second grounding portion 3b is grounded to one front portion of the upper surface 201u near the nozzle 203. The nozzle 203 of the shelf 201 is inserted into the opening 2p of the main frame 2. Here, in the flatness measuring unit 151, a gap is generated between the measuring protrusion 153 and the upper surface 201u. Therefore, this gap is confirmed by a gap gauge, and the flatness is measured based on the confirmation result. For example, when the gap gauge can be inserted by the specified amount, the four specified portions are determined to be flat. When a gap gauge thicker than the specified amount can be inserted, or when a gap gauge thinner than the specified amount can only be inserted, the four specified portions are determined to be non-flat.

[0123] As described above, the flatness measuring unit 151 also achieves the same effect as in the above embodiment, that is, the effect of being able to easily perform the flatness measurement operation on the shelf 201 .

[0124] The flatness measuring unit 151 includes a measuring protrusion 153. When the flatness measuring unit 151 is placed on the shelf 201, the measuring protrusion 153 is configured to form a gap with the remaining predetermined portion. This allows flatness to be measured based on the gap between the measuring protrusion 153 and the remaining predetermined portion.

[0125] In the flatness measuring unit 151, the height of the measuring protrusion 153 is lower than the plane defined by the apex of each protrusion 31 of the three grounding portions 3. This ensures that when the flatness measuring unit 151 is placed on the shelf 201, a gap is formed between the measuring protrusion 153 and the remaining predetermined portion.

[0126] In flatness measuring unit 151, the distance between the apex of measuring protrusion 153 and the plane defined by the apex of each protrusion 31 of the three grounding portions 3 is greater than or equal to the maximum deviation. This allows for a more reliable configuration in which a gap is formed between measuring protrusion 153 and the remaining predetermined portion when flatness measuring unit 151 is placed on shelf 201.

[0127] The flatness measuring unit 151 is provided with a balance weight BW2. In this case, it is possible to reliably realize a configuration in which the center of gravity G of the flatness measuring unit 151 is set inside the region of the triangle TR having the three grounding portions 3 as vertices.

[0128] [Sixth embodiment]

[0129] Next, a sixth embodiment will be described. In the description of this embodiment, differences from the third embodiment described above will be described.

[0130] Figure 18 It is a perspective view showing the flatness measuring unit 181 placed on the shelf 301 . Figure 19 This is a perspective view of the flatness measuring unit 181 as viewed from the bottom. Figure 18 as well as Figure 19 As shown, the flatness measuring unit 181 of this embodiment is placed on a shelf 301 constituting a clean rack of a clean stocker 300 .

[0131] In this embodiment, two rear portions of the upper surface 301u of the shelf 301 close to the two nozzles 303 and the two pins 302 of the shelf 301 correspond to four predetermined portions that are the objects of flatness measurement by the flatness measuring unit 181. In the flatness measuring unit 181, three grounding portions 3 are dispersedly arranged on the main frame 2. The grounding portions 3 are arranged to be grounded to two front portions of the upper surface 301u close to the two pins 302 and one rear portion of the upper surface 301u close to one of the nozzles 303. The three grounding portions 3 include two first grounding portions 83a and one second grounding portion 3b. The first grounding portion 83a is arranged at two front portions of the main frame 2. The second grounding portion 3b is arranged at a rear portion of the main frame 2. The second grounding portion 3b is arranged at a position away from the rear side of either of the two first grounding portions 83a.

[0132] The flatness measuring unit 181 further includes a balancing weight BW3. The balancing weight BW3 is a block-shaped weight and is provided on the upper surface 2u of the main frame 2, inside a triangular region TR having three grounding portions 3 as vertices.

[0133] The flatness measuring unit 181 includes a measuring protrusion 153 disposed on the main frame 2. The measuring protrusion 153 is located at a position corresponding to the remaining predetermined location (hereinafter, a location behind the nozzle 303 closest to the other nozzle 303) of the four predetermined locations on the shelf 301, excluding the three predetermined locations where the three grounding portions 3 are grounded. The measuring protrusion 153 is located at a position farther from the rear of the other of the two first grounding portions 83a. The measuring protrusion 153 is provided so as to protrude from the lower surface 2d of the main frame 2.

[0134] The measuring protrusion 153 is configured to form a gap with the remaining specified portion when the flatness measuring unit 181 is placed on the shelf 301. The height (protruding length) of the measuring protrusion 153 is lower than the plane defined by the vertices of the protrusions 31 of the three grounding portions 3. The distance between the vertex of the measuring protrusion 153 and the plane defined by the vertices of the protrusions 31 of the three grounding portions 3 may be greater than the maximum deviation. The maximum deviation is the amount of gap between the measuring protrusion 153 and the remaining specified portion, assuming the flatness is at its maximum (the maximum deviation from the plane). The maximum deviation is a predetermined value that can be determined in advance through calculation, testing, and / or experience.

[0135] The center of gravity G of flatness measurement unit 181 is located inside the triangle TR of flatness measurement unit 181, which has the three grounding portions 3 as vertices. In other words, the weight of the side of flatness measurement unit 181 where measurement protrusion 153 is located is lighter than the weight of the diagonal side. As shown in the figure, the center of gravity G is located within the triangle TR, the area surrounded by the three grounding portions 3, when viewed from above.

[0136] Such a flatness measuring unit 181 is placed on the shelf 301 in such a manner that the V-groove 85 of the first grounding portion 83a is grounded to two pins 302, and the protrusion 31 of the second grounding portion 3b is grounded to a portion of the upper surface 301u near the rear side of the nozzle 303. The nozzle 303 of the shelf 301 is inserted into the opening 2p of the main frame 2. Here, in the flatness measuring unit 181, since a gap is generated between the measuring protrusion 153 and the upper surface 301u, the gap is confirmed by a gap gauge, and the flatness is measured based on the confirmation result. For example, when the gap gauge can be inserted by the specified amount, the four specified parts are determined to be flat. When a gap gauge thicker than the specified amount can be inserted, or when a gap gauge thinner than the specified amount can only be inserted, the four specified parts are determined to be non-flat.

[0137] As described above, the flatness measuring unit 181 also achieves the same effect as the above-described embodiment system, that is, the effect of being able to easily perform the flatness measurement operation on the shelf 301 .

[0138] The flatness measuring unit 181 includes a measuring protrusion 153. When the flatness measuring unit 181 is placed on the shelf 301, the measuring protrusion 153 is configured to form a gap with the remaining predetermined portion. This allows flatness to be measured based on the gap between the measuring protrusion 153 and the remaining predetermined portion.

[0139] In flatness measuring unit 181, the height of measuring protrusion 153 is lower than the plane defined by the apex of each protrusion 31 of the three grounding portions 3. This ensures that a gap is formed between measuring protrusion 153 and the remaining predetermined portion when flatness measuring unit 181 is placed on shelf 301.

[0140] In flatness measuring unit 181, the distance between the apex of measuring protrusion 153 and the plane defined by the apex of each protrusion 31 of the three grounding portions 3 is greater than or equal to the maximum deviation. This ensures that a gap is formed between measuring protrusion 153 and the remaining predetermined portion when flatness measuring unit 181 is placed on shelf 301.

[0141] The flatness measuring unit 181 is provided with a balance weight BW3. In this case, it is possible to reliably realize a configuration in which the center of gravity G of the flatness measuring unit 181 is set inside the region of the triangle TR having the three grounding portions 3 as vertices.

[0142] [Modification]

[0143] As mentioned above, although embodiment was described, one aspect of the present invention is not limited to the above-mentioned embodiment.

[0144] In the above embodiment, the four predetermined locations where the flatness measuring units 1, 51, and 81 are provided are not particularly limited. The four predetermined locations may include various locations as long as they are locations on the shelves 101, 201, and 301. In the above embodiment, the gripping portion 5 may not be provided.

[0145] In the first embodiment, instead of the V-groove 7v that forms a gap with the pin 102 on the shelf 101, other grooves may be provided, or a recess may be provided. In the first embodiment, the measuring device 4 measures the distance to a predetermined portion on the shelf 101, but the measuring device 4 may also measure the distance to a portion surrounding the predetermined portion. In the third embodiment, in the first grounding portion 83a, instead of the V-groove 85 that uses the inner surface as a grounding surface, other grooves may be provided, or a recess may be provided. In the fourth embodiment, the measuring device 4 measures the distance to a predetermined portion on the shelf 101, but the measuring device 4 may also measure the distance to a portion surrounding the predetermined portion.

[0146] In the above embodiment, the contact surface of the second grounding portion 3b is spherical, but it may also be convex. This allows for easy measurement of the minimum gap between the second grounding portion 3b and a predetermined portion of the shelf from multiple directions. This also reduces variations in the thickness of the insertable gap gauge 56 due to the direction from which the gap gauge 56 is inserted. In the above embodiment, the balancing weights BW, BW2, and BW3 may also be omitted.

[0147] The components of the above-mentioned embodiments and modifications are not limited to the above-mentioned materials and shapes, and various materials and shapes can be applied. The components of the above-mentioned embodiments or modifications can be arbitrarily applied to the components of other embodiments or modifications. Parts of the components of the above-mentioned embodiments or modifications can be appropriately omitted within the scope of the gist of one embodiment of the present invention.

Claims

1. A flatness measuring unit, mounted on a shelf, for measuring flatness related to the degree of deviation from a state where four predetermined locations on the shelf are on the same plane, comprising: The main framework; and Four grounding parts are dispersedly arranged on the main frame and are configured to be grounded to the four predetermined locations on the shelf. The four grounding portions include two first grounding portions that are not located at diagonal positions, and two second grounding portions other than the first grounding portions. The center of gravity is set in a region including two of the first ground portions among four regions divided by two diagonal lines passing through the first ground portion and the second ground portion at diagonal positions in the flatness measuring unit.

2. The flatness measuring unit according to claim 1, wherein: A measuring device is provided, which is arranged around the above-mentioned second grounding part in the above-mentioned main frame, and measures the distance to the above-mentioned specified part or its surrounding part corresponding to the above-mentioned second grounding part on the above-mentioned shelf when the above-mentioned flatness measuring unit is placed on the above-mentioned shelf.

3. The flatness measuring unit according to claim 1, wherein: The second ground contact portion has a convex portion constituting a spherical or convexly curved ground contact surface.

4. The flatness measuring unit according to any one of claims 1 to 3, wherein: The first grounding portion has a groove or a recessed portion whose inner surface serves as a grounding surface.

5. The flatness measuring unit according to any one of claims 1 to 3, wherein: The grounding portion has a lower hardness than the main body frame.

6. The flatness measuring unit according to any one of claims 1 to 3, wherein: The main body frame is provided with a gripping portion for an operator to grip.

7. The flatness measuring unit according to any one of claims 1 to 3, wherein: A balance weight is provided on the first grounding portion side of the main frame.

8. The flatness measuring unit according to any one of claims 1 to 3, wherein: A pin protruding upward is provided on the shelf. The main body frame is provided with a groove or a recessed portion that forms a gap with the pin when the flatness measuring unit is placed on the shelf.

9. The flatness measuring unit according to any one of claims 1 to 3, wherein: A nozzle protruding upward is provided on the shelf. The main frame includes an opening through which the nozzle passes when the flatness measuring unit is placed on the shelf.

10. A flatness measuring unit, mounted on a shelf, for measuring flatness related to the degree of deviation from a state where four predetermined locations on the shelf are on the same plane, comprising: The main framework; and Three grounding parts are dispersedly arranged on the main frame and are configured to be grounded to three of the four predetermined locations on the shelf. The center of gravity is set inside a triangular region of the flatness measuring unit having the three grounding portions as vertices.

11. The flatness measuring unit according to claim 10, wherein: A measuring convex portion is provided on the main frame and is provided at a position corresponding to the remaining prescribed portions of the four prescribed portions on the shelf except for the three prescribed portions where the three grounding portions are respectively grounded. The measuring protrusion is configured to form a gap with the remaining predetermined portion when the flatness measuring unit is placed on the shelf.

12. The flatness measuring unit according to claim 11, wherein: The grounding portion has a convex portion constituting a grounding surface. The height of the measurement projection is lower than a plane defined by the vertices of the three projections of the land portion.

13. The flatness measuring unit according to claim 12, wherein: The distance between the apex of the measurement projection and a plane defined by the apexes of the three projections of the land portion is equal to or greater than a maximum deviation.

14. The flatness measuring unit according to claim 10, wherein: A measuring device is provided, which is arranged on the above-mentioned main frame. When the above-mentioned flatness measuring unit is placed on the above-mentioned shelf, the distance to the remaining specified parts or their peripheral parts other than the three specified parts where the three grounding parts are respectively grounded among the four specified parts on the above-mentioned shelf is measured.

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