A device for transferring samples in a vacuum chamber of a secondary ion mass spectrometer

Abstract

The present invention relates to a device for transferring samples in a vacuum chamber of a secondary ion mass spectrometer. The present invention includes a sample stage, a sample holder and a magnetic transfer rod; the sample stage is used to be fixed on a movable stage of a sample chamber of a secondary ion mass spectrometer, the sample stage includes a fixed base and a left side wall, a right side wall and a rear side wall arranged on the fixed base, the left side wall, the right side wall and the rear side wall enclose forming a mounting groove; the sample holder is arranged in the mounting groove, a receiving cavity is provided through the middle of the sample holder, the receiving cavity is used to fix a sample loading device containing multiple samples, and an assembly groove is provided on the front end face of the sample holder; the magnetic transfer rod includes a bottom plate and a rod portion, one end of the rod portion is fixedly connected to the plate surface of the bottom plate, the bottom plate is detachably fixed in the assembly groove, and the magnetic transfer rod is used to drive the sample holder to enter or move out of the mounting groove in the direction of the front side of the sample stage. The present invention has a simple structure, is easy to operate, and has precise positioning, and can effectively deliver samples to a designated area and take them out in a vacuum environment.

Description

Technical Field

[0001] The present invention relates to the technical field of secondary ion mass spectrometers, and in particular to a device for transferring samples in a vacuum chamber of a secondary ion mass spectrometer. Background Art

[0002] Secondary ion mass spectrometry (SIMS) is an analytical method used to analyze the surface components and impurities of solid materials. It bombards the sample surface with a high-energy ion beam, bombarding secondary particles (including secondary ions) from the sample surface. By collecting and analyzing the charged secondary ions, a spectrum containing the charge-to-mass ratio information of various component elements on the sample surface can be obtained. These include mass spectra, depth profiles, and ion images; linear scanning can obtain the concentration distribution of ions along a certain line, and by comparing isotope ion counts, the abundance of isotopes can be obtained. SIMS has very high detection sensitivity, detection limit, and resolution in both surface and depth directions. The excellent and unique functions of SIMS make SIMS an irreplaceable key technology in many scientific research and industrial production fields.

[0003] Because of its extremely high sensitivity, SIMS is particularly well-suited for quantitative analysis of doping, elements and their isotopes, impurities, and material composition in micro-regions. Before using SIMS to analyze a sample, it must be moved to a designated area under a vacuum to prepare for analysis.

[0004] However, the existing sample transfer device cannot match the structure of the secondary ion mass spectrometer and cannot functionally meet the secondary ion mass spectrometer's requirements for precise positioning in a vacuum. Summary of the Invention

[0005] Based on this, the purpose of the present invention is to provide a device for transferring samples in the vacuum chamber of a secondary ion mass spectrometer, which has a simple structure, easy operation, precise positioning, and small size, and can effectively deliver and remove samples to a designated area in a vacuum environment.

[0006] The present invention is achieved in the following ways:

[0007] A device for transferring samples in a vacuum chamber of a secondary ion mass spectrometer, comprising a sample stage, a sample holder and a magnetic transfer rod;

[0008] The sample stage is used to be fixed on the sample chamber movable stage of the secondary ion mass spectrometer, and the sample stage includes a fixed base and a left side wall, a right side wall and a rear side wall arranged on the fixed base, and the left side wall, the right side wall and the rear side wall enclose each other to form a mounting groove;

[0009] The sample holder is arranged in the mounting groove, a receiving cavity is provided through the middle of the sample holder, the receiving cavity is used to fix a sample loading device containing a plurality of samples, and a mounting groove is provided on the front end surface of the sample holder;

[0010] The magnetic transfer rod includes a base plate and a rod portion, one end of the rod portion is fixedly connected to the plate surface of the base plate, and the base plate is detachably fixed in the assembly groove. The magnetic transfer rod is used to drive the sample holder in the direction of the front side of the sample stage into or out of the installation groove according to the externally applied magnetic force.

[0011] Furthermore, two outer sides of the sample holder are respectively provided with guide rails parallel to the moving direction of the sample stage;

[0012] The inner sides of the left side wall and the right side wall are respectively provided with limiting grooves corresponding to the guide rails, and the guide rails are used to slide in the limiting grooves.

[0013] Furthermore, the sample stage also includes a left limit bracket and a right limit bracket, and the left limit bracket and the right limit bracket each include a fixing part, a limiting part, and a connecting part located therebetween, and the fixing part is fixedly connected to the outer sides of the left side wall and the right side wall, respectively, and the limiting part is inclined inward so that the limiting part forms a certain angle with the upper step surfaces of the left side wall and the right side wall, for forming the limiting groove.

[0014] Furthermore, the upper end surface of the guide rail is an inclined surface and is recessed inward to form a guide groove;

[0015] The limiting portion is a rectangular panel, and both ends of the panel are tilted outwards. When the sample holder is installed in the installation groove, the limiting portion is partially placed in the guide groove.

[0016] Furthermore, the bottom plate includes two arc surfaces arranged opposite to each other, and corresponding installation positions are provided with matching arc surfaces;

[0017] The assembly groove includes a circular inner groove and a rectangular outer groove, the diameter of the circular inner groove is larger than the width of the rectangular outer groove; the bottom plate can pass through the rectangular outer groove, rotate and be fixed in the circular inner groove.

[0018] Furthermore, a positioning hole is provided at the center of the circular inner groove, and a positioning bead is correspondingly provided on the plate surface of the bottom plate away from the rod portion.

[0019] Furthermore, stepped fixing blocks are provided on the left and right sides of the installation groove, and the upper end surfaces of the stepped fixing blocks abut against the bottom surface of the sample holder.

[0020] Furthermore, the moving platform is fixedly connected to a driving motor located outside the vacuum via a bellows.

[0021] Furthermore, the fixed base is provided with a through hole for assembling and fixing with the mobile station;

[0022] A plurality of mounting holes are provided on the side wall of the sample holder, and the mounting holes are used for assembling and fixing with the sample loading device.

[0023] Furthermore, the sample holder is in the shape of a rectangle with rounded corners, and the mounting hole is provided through the rounded corners.

[0024] The present invention provides a device for transferring samples in the vacuum chamber of a secondary ion mass spectrometer. The device moves a sample holder fixed with a sample loading device from a sample stage of a pre-set cavity in a vacuum to a sample stage in a sample chamber through a magnetic transfer rod. The device has a simple structure, convenient operation, precise positioning, and a small size. It can effectively deliver samples to a designated area and take them out in a vacuum environment, and can be used repeatedly.

[0025] For better understanding and implementation, the present invention is described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 Schematic diagram of the structure of a device for transferring samples in a vacuum chamber of a secondary ion mass spectrometer according to an embodiment of the present invention;

[0027] Figure 2 This is a structural diagram of a sample stage of a device for transferring samples in a vacuum chamber of a secondary ion mass spectrometer according to an embodiment of the present invention;

[0028] Figure 3 This is a structural diagram of a sample holder for transferring samples in a vacuum chamber of a secondary ion mass spectrometer according to an embodiment of the present invention;

[0029] Figure 4 This is a structural diagram of a magnetic transfer rod of a device for transferring samples in a vacuum chamber of a secondary ion mass spectrometer in an embodiment of the present invention.

[0030] Reference numerals:

[0031] 1. Sample holder; 11. Accommodating cavity; 12. Assembly groove; 13. Guide rail; 131. Guide groove; 2. Sample stage; 21. Fixed base; 22. Left side wall; 23. Right side wall; 24. Rear side wall; 25. Stepped fixing block; 26. Through hole; 27. Left limit bracket; 28. Right limit bracket; 281. Fixing part; 282. Limiting part; 283. Connecting part; 3. Magnetic transfer rod. DETAILED DESCRIPTION

[0032] In order to make the objectives, technical solutions and advantages of the present application clearer, the embodiments of the present application will be described in further detail below with reference to the accompanying drawings.

[0033] It should be clear that the embodiments described are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments of the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the embodiments of the present application.

[0034] The terms used in the embodiments of the present application are for the purpose of describing specific embodiments only and are not intended to limit the embodiments of the present application. The singular forms "a," "the," and "the" used in the embodiments of the present application and the appended claims are also intended to include plural forms unless the context clearly indicates otherwise. It should also be understood that the term "and / or" used herein refers to and includes any or all possible combinations of one or more associated listed items.

[0035] When the following description refers to the accompanying drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present application. On the contrary, they are merely examples of devices and methods consistent with some aspects of the present application as detailed in the appended claims. In the description of the present application, it should be understood that the terms "first", "second", "third", etc. are only used to distinguish similar human bodies, and are not necessarily used to describe a specific order or sequence, nor can they be understood as indicating or implying relative importance. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0036] In addition, in this application, unless otherwise specified, "plurality" refers to two or more. "And / or" describes the relationship between related entities, indicating that three possible relationships exist. For example, "A and / or B" can mean: A exists alone, A and B exist simultaneously, or B exists alone. The character " / " generally indicates that the related entities are in an "or" relationship.

[0037] In response to the technical problems mentioned in the background technology, the present application provides a device for transferring samples in a vacuum chamber. The device is arranged in a secondary ion mass spectrometer and is used in a vacuum environment. It is used to deliver the sample to the position to be analyzed before sample analysis. The position to be analyzed is the landing point of the primary beam. The primary beam bombards the sample surface, causing the secondary beam to escape from the sample surface.

[0038] Specifically, it includes a sample holder 1, a sample stage 2 and a magnetic transfer rod 3. The sample stage 2 is used to be fixed on the sample chamber moving stage of the secondary ion mass spectrometer. The sample stage 2 includes a fixed base 21 and a left side wall 22, a right side wall 23 and a rear side wall 24 arranged on the fixed base 21. The left side wall 22, the right side wall 23 and the rear side wall 24 enclose a mounting groove; the sample holder 1 is arranged in the mounting groove, and a accommodating cavity 11 is provided through the middle of the sample holder 1. The accommodating cavity 11 is used to fix a sample loading device containing multiple samples, and an assembly groove 12 is provided on the front end face of the sample holder 1; the magnetic transfer rod 3 includes a bottom plate and a rod portion, one end of the rod portion is fixedly connected to the plate surface of the bottom plate, and the bottom plate is detachably fixed in the assembly groove 12. The magnetic transfer rod 3 is used to drive the sample holder 1 to enter or move out of the mounting groove in the direction of the front side of the sample stage 2 according to the externally applied magnetic force.

[0039] Optionally, sample stage 2 can be a truncated cone with an overall height ranging from 20 to 30 mm and a diameter ranging from 31 to 41 mm. The fixed base 21 is also provided with a through-hole 26 for inserting a hexagonal screw to secure it to the movable stage. Optionally, stepped fixing blocks 25 are provided on the left and right sides of the mounting slot of sample stage 2. The upper end surfaces of these stepped fixing blocks 25 are designed to abut against the bottom surface of sample holder 1, reducing the sliding friction distance between the bottom surface of sample holder 1 and the inner side surface of the mounting slot, while also reducing the weight of sample stage 2 and minimizing its impact on testing.

[0040] Optionally, the sidewalls of the sample holder 1 are provided with multiple mounting holes for mounting and securing the sample holder. In one specific example, the sample holder 1 is rectangular with rounded corners, and the mounting holes extend through the rounded corners to meet the required threaded hole depth. This structure also avoids stress concentration and deformation, making it less likely to get stuck during movement. The height of the sample holder 1 ranges from 8 to 18 mm, and the diameter of the largest rounded corners ranges from 33 to 43 mm.

[0041] Optionally, the two outer sides of the sample holder 1 are further provided with guide rails 13 that move in the same direction as the sample stage 2. The inner sides of the left side wall 22 and the right side wall 23 are respectively provided with limiting grooves corresponding to the guide rails 13, and the guide rails 13 are used to slide within the limiting grooves. The sample stage 2 also includes a left limiting bracket 27 and a right limiting bracket 28. The left limiting bracket 27 and the right limiting bracket 28 each include a fixing portion 281, a limiting portion 282, and a connecting portion 283 located therebetween. The fixing portion 281 is fixedly connected to the outer sides of the left side wall 22 and the right side wall 23, respectively. Optionally, two fixing holes are each provided on the left side wall 22 and the right side wall 23, and the limiting bracket can be fixed to the left side wall 22 and the right side wall 23 by a flat head screw. The limiting portion 282 is tilted inward so that the limiting portion 282 forms a certain angle with the upper step surface of the left side wall 22 and the right side wall 23, which is used to form a limiting groove, so that the guide rail 13 slides within the limiting groove formed by the limiting portion 282 and the upper step surface.

[0042] The upper end surface of the guide rail 13 is inclined and recessed inward to form a guide groove 131. The stopper 282 is a rectangular panel with outwardly tilted ends. When the sample holder 1 is installed in the mounting groove, the stopper 282 partially fits into the guide groove 131. The stopper groove and guide groove 131 of the sample stage 2 mate with the guide rail 13 on the sample holder 1. After the stopper 282 slides into the guide rail 13, it geometrically limits the sample holder 1, fixing the relative position of the stopper 282 and the guide rail 13 and preventing the sample holder 1 from sliding back and forth.

[0043] Optionally, the base plate of the magnetic transfer rod 3 includes two arcuate surfaces arranged opposite to each other; the assembly groove 12 includes a circular inner groove and a rectangular outer groove, the arcuate surface of the circular inner groove matches the arcuate surface of the base plate, and the diameter of the circular inner groove is larger than the width of the rectangular outer groove; the base plate can be rotated and fixed in the circular inner groove through the rectangular outer groove. A positioning hole is provided at the center of the circular inner groove, and a positioning bead is provided on the plate surface of the base plate away from the rod portion, so that when the magnetic transfer rod 3 is assembled and fixed to the sample stage 2, the positioning bead cooperates with the positioning hole to achieve positioning. Optionally, the thickness of the base plate is 1 to 5 mm.

[0044] Optionally, the moving stage is fixedly connected to a driving motor located outside the vacuum through a bellows, which can be a stepping motor or a piezoelectric ceramic brake, so that the moving stage can drive the sample stage 2 to move precisely in the X-axis and Y-axis directions.

[0045] The steps of using a device for transferring a sample in a vacuum chamber of a secondary ion mass spectrometer provided by the present invention are as follows:

[0046] (1) Use a magnet outside the vacuum to control the magnetic transfer rod 3 to enter the assembly groove 12 until the bottom plate of the magnetic transfer rod 3 enters the positioning hole in the circular inner groove and contacts the positioning bead;

[0047] (2) Control the magnetic transfer rod 3 to rotate 90° so that the magnetic transfer rod 3 is assembled and fixed to the sample holder 1;

[0048] (3) The sample holder 1 is placed into the sample chamber and moved until the rear end surface of the sample holder 1 abuts against the rear side wall 24 of the sample stage 2, and the magnetic transfer rod 3 is controlled to return to its original position;

[0049] (4) After the test is completed, take out the sample holder 1 in the same way.

[0050] The device for transferring samples in the vacuum chamber of a secondary ion mass spectrometer provided by the present invention is first required to manually place multiple samples in parallel in a sample loading device at the same time; the sample loading device is assembled and fixed on a sample holder 1 through a mounting hole; the sample holder 1 is then fixed on a sample stage of a preset chamber; the preset chamber door is closed and vacuum is drawn; after reaching the required vacuum degree, the vacuum valve between the preset chamber and the sample chamber is opened; the sample holder 1 is then transferred from the sample stage of the preset chamber to the sample stage 2 of the sample chamber by using a magnetic transfer rod 3; the vacuum valve between the preset chamber and the sample chamber is closed; outside the vacuum, the movement of the moving stage is controlled by software to drive the sample to the primary beam landing point for testing; during the test, the sample is moved to the primary beam landing point position in sequence by the moving stage, and the position and direction of the sample in contact with the ion beam remain unchanged, thereby realizing reference comparison testing of different samples.

[0051] The present invention provides a device for transferring samples in the vacuum chamber of a secondary ion mass spectrometer. The device moves a sample holder fixed with a sample loading device from a sample stage of a pre-set cavity in a vacuum to a sample stage in a sample chamber through a magnetic transfer rod. The device has a simple structure, convenient operation, precise positioning, and a small size. It can effectively deliver samples to a designated area and take them out in a vacuum environment, and can be used repeatedly.

[0052] The above-described embodiments merely illustrate several implementations of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, and all such variations and improvements fall within the scope of protection of the present invention.

Claims

1. A device for transferring samples in a vacuum chamber of a secondary ion mass spectrometer, characterized in that: Including a sample stage, a sample holder and a magnetic transfer rod; The sample stage is used to be fixed on the sample chamber movable stage of the secondary ion mass spectrometer, and the sample stage includes a fixed base and a left side wall, a right side wall and a rear side wall arranged on the fixed base, and the left side wall, the right side wall and the rear side wall enclose each other to form a mounting groove; The sample holder is arranged in the mounting groove, a receiving cavity is provided through the middle of the sample holder, the receiving cavity is used to fix a sample loading device containing a plurality of samples, and a mounting groove is provided on the front end surface of the sample holder; The magnetic transfer rod includes a base plate and a rod portion, one end of the rod portion is fixedly connected to the plate surface of the base plate, and the base plate is detachably fixed in the assembly groove. The magnetic transfer rod is used to drive the sample holder to enter or move out of the installation groove in the direction of the front side of the sample stage; The assembly groove includes a circular inner groove and a rectangular outer groove, the diameter of the circular inner groove is larger than the width of the rectangular outer groove; the bottom plate can pass through the rectangular outer groove, rotate and be fixed in the circular inner groove.

2. The device for transferring samples in a vacuum chamber of a secondary ion mass spectrometer according to claim 1, characterized in that: The two outer sides of the sample holder are also provided with guide rails parallel to the moving direction of the sample stage; The inner sides of the left side wall and the right side wall are respectively provided with limiting grooves corresponding to the guide rails, and the guide rails are used to slide in the limiting grooves.

3. The device for transferring samples in a vacuum chamber of a secondary ion mass spectrometer according to claim 2, wherein: The sample stage also includes a left limit bracket and a right limit bracket, each of which includes a fixing portion, a limit portion and a connecting portion located therebetween, the fixing portion being fixedly connected to the outer sides of the left side wall and the right side wall respectively, the limit portion being inclined toward the inner side of the mounting groove so that the limit portion forms a certain angle with the upper step surfaces of the left side wall and the right side wall, for forming the limit groove.

4. The device for transferring samples in a vacuum chamber of a secondary ion mass spectrometer according to claim 3, wherein: The upper end surface of the guide rail is an inclined surface and is recessed inward to form a guide groove; The limiting portion is a rectangular panel, and both ends of the panel are tilted outwards. When the sample holder is installed in the installation groove, the limiting portion is partially placed in the guide groove.

5. The device for transferring samples in a vacuum chamber of a secondary ion mass spectrometer according to claim 1, wherein: The bottom plate includes two arc surfaces arranged opposite to each other, and corresponding installation positions are provided with matching arc surfaces.

6. The device for transferring samples in a vacuum chamber of a secondary ion mass spectrometer according to claim 5, characterized in that: A positioning hole is provided at the center of the circular inner groove, and a positioning bead is correspondingly provided on the plate surface of the bottom plate away from the rod portion.

7. The device for transferring samples in a vacuum chamber of a secondary ion mass spectrometer according to claim 1, characterized in that: Step-shaped fixing blocks are further provided on the left and right sides of the installation groove, and the upper end surfaces of the step-shaped fixing blocks abut against the bottom surface of the sample holder.

8. The device for transferring samples in a vacuum chamber of a secondary ion mass spectrometer according to claim 1, characterized in that: The moving platform is fixedly connected to a driving motor located outside the vacuum via a bellows.

9. The device for transferring samples in a vacuum chamber of a secondary ion mass spectrometer according to claim 1, characterized in that: The fixed base is provided with a through hole for assembling and fixing with the mobile station; A plurality of mounting holes are provided on the side wall of the sample holder, and the mounting holes are used for assembling and fixing with the sample loading device.

10. The device for transferring samples in a vacuum chamber of a secondary ion mass spectrometer according to claim 9, characterized in that: The sample holder is in the shape of a rounded rectangle, and the mounting hole is provided through the rounded corner.

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