A high-density ultrafine-grained molybdenum alloy target preparation equipment and process

Abstract

The invention discloses a high-density ultrafine-grained molybdenum alloy target material preparation device, including a frame, a cold isostatic pressing cylinder and a hydraulic booster pump, the frame is welded with a cold isostatic pressing cylinder, a hydraulic booster pump and a support plate, and a movable block is arranged in the frame, a fixed cylinder is arranged in the cold isostatic pressing cylinder, and a rubber sheath is attached to the inner wall of the fixed cylinder, the water outlet end of the hydraulic booster pump is sealed and connected with a water guide pipe flange, and the other end of the water guide pipe is connected and communicated with the cold isostatic pressing cylinder outer wall flange, and through holes are evenly opened on the fixed cylinder, one end of the rubber sheath is open and wrapped around the end face of the fixed cylinder, and is sealed and bonded to the end face of the fixed cylinder. In the whole operation process of the invention, feeding, compacting and vacuuming can be carried out simultaneously, and it is convenient to take materials, so that there is no need to package and disassemble the rubber sheath, and there is no need to frequently move the rubber sheath, which greatly simplifies the operation process, effectively improves work efficiency, and is conducive to large-scale production.

Description

Technical Field

[0001] The present invention relates to the technical field of molybdenum alloy target material preparation, and in particular to a high-density ultrafine-grained molybdenum alloy target material preparation device and process. Background Art

[0002] The current molybdenum alloy target preparation processes include vacuum melting and powder smelting. However, in order to improve the density of the alloy target and its excellent mechanical and physical properties, powder smelting is usually used. In the powder smelting process, the alloy powder needs to be cold isostatically pressed and hot isostatically pressed. When the existing cold isostatic pressing equipment is in operation, the alloy powder needs to be first loaded into a rubber sheath, followed by sealing, preliminary mechanical compaction and vacuuming. Then, the rubber sheath is placed in the cold isostatic pressing equipment. After the cold isostatic pressing equipment is completed, the rubber sheath is opened and the blank is taken out. The entire operation process is relatively cumbersome and the work efficiency is low. It is not conducive to large-scale production and manufacturing and cannot meet people's use needs. In view of the defects existing in the above prior art, it is necessary to further improve it to make it more practical so as to meet actual usage conditions. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art or related art.

[0004] Therefore, the object of the present invention is to provide a high-density ultrafine-grained molybdenum alloy target preparation device and process.

[0005] The utility model provides a high-density ultrafine-grained molybdenum alloy target material preparation equipment, including a frame, a cold isostatic pressing cylinder and a hydraulic booster pump, the frame is welded with the cold isostatic pressing cylinder, the hydraulic booster pump and the support plate, and a movable block is arranged in the frame, a fixed cylinder is arranged in the cold isostatic pressing cylinder, and a rubber sheath is attached to the inner wall of the fixed cylinder, the water outlet end of the hydraulic booster pump is sealed and connected with the flange of the water guide pipe, and the other end of the water guide pipe is connected and communicated with the flange of the outer wall of the cold isostatic pressing cylinder, through holes are evenly opened on the fixed cylinder, one end of the rubber sheath is open and wrapped around the end face of the fixed cylinder, and is sealed and bonded to the end face of the fixed cylinder, a rotating plate is attached to the movable block, and a sealing plate is welded and connected to the top surface of the rotating plate, and a sealing plate is penetrated through the center of the sealing plate A fixing column welded to it, and a sealing ring is welded to the surface of the sealing plate facing the cold isostatic pressing cylinder, one end of the fixing column is connected to the material guide pipe through a tee, and the other end of the fixing column is provided with a second fixing plate, the fixing column is sleeved with a first mounting ring and a second mounting ring, and the fixing column is provided with a second connecting pipe, the material guide pipe is welded and connected to the material box, and the material box is bolted to the bracket, the bracket is welded and fixed to the sealing plate, and a fan is bolted to the bracket, the air outlet end of the fan is welded and connected to the side wall of the material box, both ends of the tee are threadedly sealed with the rotating column and the material guide pipe, and the other port of the tee is threadedly sealed with the first connecting pipe, and a pneumatic booster pump and a vacuum pump are bolted to the support plate.

[0006] Furthermore, the frame is in the shape of a rectangular frame, and a screw rod and a sliding rod are arranged in the frame, and a first forward and reverse motor is bolted to one side of the frame, the screw rod passes through the movable block and is threadedly connected to the movable block, and both ends of the screw rod are movably connected to the frame wall bearing, the sliding rod passes through the movable block and is slidably connected to the movable block, and both ends of the sliding rod are welded to the frame wall, and the output shaft of the first forward and reverse motor is keyed to one end of the screw rod.

[0007] Furthermore, the cold isostatic pressing cylinder is open at one end facing the sealing plate, and a first through groove for inserting a mounting cylinder is provided at the other end of the cold isostatic pressing cylinder. The mounting cylinder is welded to the wall of the first through groove, and the mounting cylinder is welded to one end of the fixed cylinder. The fixed cylinder and the fixed column are coaxial, and the inner diameter of the fixed cylinder is larger than the diameter of the second fixed plate.

[0008] Furthermore, the installation tube is provided with symmetrically distributed telescopic rods, and the inner walls of the installation tube and the fixed tube are provided with sliding grooves, and the sliding grooves on the two are aligned with each other, one end of the telescopic rod is welded to a first fixed plate, and the other end of the telescopic rod is welded to a fixed block, the first fixed plate is fixedly bonded to the outer wall of the bottom end of the rubber sleeve, the end face of the fixed block is welded to a sliding block adapted to the sliding groove, and the cross-sections of the sliding block and the sliding groove are both "T"-shaped, and the sliding block is inserted into the sliding groove.

[0009] Furthermore, the movable block is penetrated by a rotating column movably connected to its bearing, and a second forward and reverse motor is bolted to the bottom end of the movable block, the output shaft of the second forward and reverse motor is key-connected to the bottom end of the rotating column, and the top end of the rotating column is welded to the bottom surface of the rotating plate, the bottom surface of the rotating plate is welded with a rotating block, and a rotating groove matching the rotating block is opened on the top surface of the movable block, the rotating block is in a circular ring shape, the rotating groove is in an arc shape, and the cross-sections of both are "T"-shaped structures, and the rotating block is embedded in the rotating groove.

[0010] Furthermore, a cavity is opened in the wall of the fixed column, and an air outlet is opened on the wall of the fixed column between the first mounting ring and the second mounting ring. The air outlet is connected to the cavity, and the cross-section of the cavity is circular. One end of the second connecting tube is welded to the fixed column, and the second connecting tube is connected to the cavity.

[0011] Furthermore, a material guide groove is provided inside the fixed column, and a material guide hole is provided on the outer circular wall of one end of the fixed column facing the second fixed plate, the material guide hole and the material guide groove are connected, and the material guide groove is connected with an end face of one side of the fixed column, the second fixed plate is a hollow structure inside, and a second through groove is provided on the second fixed plate facing one end of the fixed column, and discharge holes are evenly provided on the side wall of the second fixed plate, one end of the fixed column is inserted into the second fixed plate through the through groove, and the fixed column is fixedly connected to the side wall of the second fixed plate by fixing bolts, a sealing rubber ring is fixedly bonded to the groove wall of the second through groove, and the second through groove is sealed and fitted to the outer wall of the fixed column through the sealing rubber ring.

[0012] Furthermore, the inner circular wall of the first mounting ring is welded to the fixed column, and a circular groove is opened on the side wall of the first mounting ring, a circular rubber ring is fixedly bonded in the groove, the diameter of the second mounting ring is smaller than the diameter of the first mounting ring, and an inner sealing ring is fixedly bonded on the inner circular wall of the second mounting ring, and an outer sealing ring is fixedly bonded on the outer circular wall thereof, the outer sealing ring and the inner sealing ring are both made of polytetrafluoroethylene, and the inner circular wall of the inner sealing ring is sealingly fitted with the fixed column.

[0013] Furthermore, a sponge gasket is fixedly bonded to the hole wall of the discharge hole, and a sealing block is arranged in the sponge gasket, the discharge hole, the sponge gasket and the sealing block are all conical in cross-section, a guide rod is welded to one end of the sealing block, and one end of the guide rod is inserted into the guide column, one end of the guide column is welded to the inner wall of the second fixed plate, and an elastic spring is sleeved on the guide column, and both ends of the elastic spring are welded to the inner wall of the second fixed plate and the sealing block.

[0014] A high-density ultrafine-grained molybdenum alloy target preparation process comprises the following steps:

[0015] S1, mixing molybdenum element powder and other element powders uniformly through a mixing device;

[0016] S2, putting the evenly mixed powder in S1 into the rubber sleeve, and performing preliminary pressing and vacuuming;

[0017] S3, cold isostatic pressing the element powder in the rubber sheath by a cold isostatic pressing cylinder;

[0018] S4, after the cold isostatic pressing is completed, the rubber sleeve inner blank is taken out and loaded into the stainless steel sleeve, and then pressed into shape by hot isostatic pressing equipment.

[0019] The high-density ultrafine-grained molybdenum alloy target preparation device and process of the present invention have the following beneficial effects:

[0020] The present invention is provided with a sealing plate, which is movable and on which a fixing column, a first mounting ring, a second mounting ring and a second fixing plate are arranged, and a feeding channel is formed between the fixing column and the second fixing plate;

[0021] When the sealing plate is fitted with the cold isostatic pressing cylinder, the fixing column drives the first mounting ring, the second mounting ring and the second fixing plate to be inserted into the fixing cylinder, and the second fixing plate cooperates with the first fixing plate to stretch the rubber sheath, thereby forming a cavity between the rubber sheath, the fixing column and the second mounting ring, and element powder can be fed into the cavity through the feeding channel, thereby realizing automatic loading;

[0022] After the feeding is completed, since the second mounting ring is a movable structure on the fixed column, the alloy element powder can be compacted by the movement of the second mounting ring. After the compaction is completed, the vacuum structure can be evacuated through the feeding channel;

[0023] When the cold isostatic pressing operation is completed, the fixing column will drive the first mounting ring, the second mounting ring and the second fixing plate to move out of the fixing cylinder. During the moving out, the blank and the rubber sleeve can be automatically separated. Since the second fixing plate and the fixing column are detachable structures, the blank on the fixing column can be easily removed after the second fixing plate is removed.

[0024] Therefore, during the whole operation process, loading, compacting and vacuuming can be carried out simultaneously, and the material can be easily taken out. In this way, there is no need to package and disassemble the rubber sheath, and there is no need to frequently move the rubber sheath, which greatly simplifies the operation process, effectively improves work efficiency, and is conducive to large-scale production. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which

[0026] Figure 1It is a schematic structural diagram of the cold isostatic pressing cylinder and the sealing plate of the present invention when they are combined;

[0027] Figure 2 It is a structural schematic diagram of the cold isostatic pressing cylinder and the sealing plate of the present invention when they are separated;

[0028] Figure 3 It is a schematic diagram of the structure of the installation tube and the fixing tube of the present invention;

[0029] Figure 4 It is a schematic diagram of the telescopic pull rod and the fixed block structure of the present invention;

[0030] Figure 5 It is a schematic diagram of the longitudinal section structure of the movable block and the rotating plate of the present invention from a side view;

[0031] Figure 6 It is a schematic diagram of the three-dimensional structure of the fixing column of the present invention;

[0032] Figure 7 It is a schematic diagram of a partial cross-sectional structure of a fixing column of the present invention;

[0033] Figure 8 It is a schematic cross-sectional structure diagram of the fixing column and the second fixing plate of the present invention;

[0034] Fig. 9 It is a schematic diagram of the explosion structure of the second fixing plate of the present invention;

[0035] Fig.10 It is a partial top view structural schematic diagram of the present invention;

[0036] In the figure: 1, frame; 2, cold isostatic pressure cylinder; 3, hydraulic booster pump; 4, water guide pipe; 5, mounting cylinder; 6, fixed cylinder; 7, rubber sleeve; 8, first fixed plate; 9, telescopic pull rod; 10, fixed block; 11, sliding block; 12, sliding groove; 13, through hole; 14, first forward and reverse motor; 15, screw rod; 16, sliding rod; 17, movable block; 18, rotating plate; 19, second forward and reverse motor; 20, rotating column; 21, rotating block; 22, sealing plate; 23, sealing ring; 24, fixed column; 25, first mounting ring; 251, groove; 252, rubber Ring; 26, second mounting ring; 261, outer sealing ring; 262, inner sealing ring; 27, second fixing plate; 271, discharge hole; 272, sponge gasket; 273, sealing block; 274, guide rod; 275, guide column; 276, elastic spring; 28, tee; 29, material guide pipe; 30, material box; 31, fan; 32, material guide trough; 33, material guide hole; 34, first connecting pipe; 35, second connecting pipe; 36, cavity; 37, air outlet; 38, support plate; 39, pneumatic booster pump; 40, vacuum pump; 41, fixing bolt; 42, bracket. DETAILED DESCRIPTION

[0037] In order to more clearly understand the above-mentioned purpose, features and advantages of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

[0038] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the protection scope of the present invention is not limited to the specific embodiments disclosed below.

[0039] See also Figure 1-10 The present invention provides a technical solution: a high-density ultrafine-grained molybdenum alloy target preparation equipment, including a frame 1, a cold isostatic pressing cylinder 2 and a hydraulic booster pump 3, the frame 1 is welded with the cold isostatic pressing cylinder 2, the hydraulic booster pump 3 and the support plate 38, the cold isostatic pressing cylinder 2 is provided with a fixed cylinder 6, and the inner wall of the fixed cylinder 6 is fitted with a rubber sheath 7, the water outlet end of the hydraulic booster pump 3 is sealed with a flange of a water guide pipe 4, and the other end of the water guide pipe 4 is flange-connected and communicated with the outer wall of the cold isostatic pressing cylinder 2, and the fixed cylinder 6 is uniformly A through hole 13 is opened, one end of the rubber sheath 7 is open and wrapped around the end face of the fixed cylinder 6, and is sealed and bonded to the end face of the fixed cylinder 6. The hydraulic booster pump 3 can supply water to the cold isostatic pressing cylinder 2 through the water pipe 4. In this way, while continuously supplying water, the water pressure in the cold isostatic pressing cylinder 2 can be increased. The water pressure can be applied to the rubber sheath 7 through the through hole 13 on the fixed cylinder 6, and then the element powder in the rubber sheath 7 can be pressed and formed. In order to improve the forming effect and quality, multiple groups of hydraulic booster pumps 3 can be set.

[0040] The cold isostatic pressing cylinder 2 is open at one end facing the sealing plate 22, and the other end of the cold isostatic pressing cylinder 2 is provided with a first through groove for inserting the mounting cylinder 5, the mounting cylinder 5 is welded to the wall of the first through groove, and the mounting cylinder 5 is welded to one end of the fixed cylinder 6, symmetrically distributed telescopic rods 9 are arranged in the mounting cylinder 5, and the inner walls of the mounting cylinder 5 and the fixed cylinder 6 are provided with sliding grooves 12, and the sliding grooves 12 on the two are aligned with each other, one end of the telescopic rod 9 is welded to a first fixed plate 8, and the other end of the telescopic rod 9 is welded to a fixed block 10, the first fixed plate 8 is fixedly bonded to the outer wall of the bottom end of the rubber sheath 7, the end face of the fixed block 10 is welded to a sliding block 11 adapted to the sliding groove 12, and the cross-sections of the sliding block 11 and the sliding groove 12 are both "T"-shaped, the sliding block 11 is inserted into the sliding groove 12, and the setting of the telescopic rod 9 can fix the first fixed plate 8, and then through the first fixed plate 8 The rubber sheath 7 can be shaped so that the rubber sheath 7 as a whole forms a cylindrical shape, so that it can fit with the inner wall of the fixed tube 6, which is convenient for subsequent cold isostatic pressing operations. At the same time, the telescopic rod 9 is a multi-stage design, which can improve its own telescopic range. Through the extension and retraction of the telescopic rod 9, the first fixed plate 8 can move horizontally. When the telescopic rod 9 is extended to the maximum length, the fixed block 10 can move horizontally along the sliding groove 12 through the sliding block 11. In this way, the telescopic rod 9 can move horizontally inside the installation tube 5 and the fixed tube 6 through the fixed block 10, thereby increasing the horizontal movement range of the first fixed plate 8. When the first fixed plate 8 is moved out of the fixed tube 6, the rubber sheath 7 can be turned out from the fixed tube 6 as a whole, which is convenient for subsequent material removal. When the first fixed plate 8 moves into the fixed tube 6, the rubber sheath 7 can be put into the fixed tube 6, which is convenient for subsequent loading operations.

[0041] A movable block 17 is arranged in the frame 1, a rotating plate 18 is attached to the movable block 17, and a sealing plate 22 is welded to the top surface of the rotating plate 18. The frame 1 is in a rectangular frame shape, and a screw rod 15 and a sliding rod 16 are arranged in the frame 1, and a first forward and reverse motor 14 is bolted to one side of the frame 1, the screw rod 15 passes through the movable block 17 and is threadedly connected to the movable block 17, and both ends of the screw rod 15 are movably connected to the wall bearing of the frame 1, and the sliding rod 16 passes through the movable block 17 and is slidably connected to the movable block 17. The two ends of the sliding rod 16 are welded to the wall of the frame 1, and the output shaft of the first forward and reverse motor 14 is key-connected with one end of the screw rod 15. After the first forward and reverse motor 14 is running, it can drive the screw rod 15 to rotate axially on the frame 1. Since the movable block 17 can only move linearly along the sliding rod 16, the movable block 17 can move horizontally under the drive of the screw rod 15, so that the movable block 17 drives the sealing plate 22 to move through the rotating plate 18, so that the sealing plate 22 can be adjusted in the horizontal direction.

[0042] The movable block 17 is penetrated by a rotating column 20 movably connected to its bearing, and the bottom end of the movable block 17 is bolted with a second forward and reverse motor 19, the output shaft of the second forward and reverse motor 19 is key-connected to the bottom end of the rotating column 20, and the top end of the rotating column 20 is welded to the bottom surface of the rotating plate 18, the bottom surface of the rotating plate 18 is welded with a rotating block 21, and the top surface of the movable block 17 is provided with a rotating groove adapted to the rotating block 21, the rotating block 21 is in a circular ring shape, the rotating groove is in an arc shape, and the cross-sections of both are in a "T"-shaped structure, and the rotating block 21 is embedded in the rotating groove, the second forward and reverse motor 19 The rotating column 20 can be driven to rotate axially on the movable block 17, and then the rotating column 20 can drive the rotating plate 18 to rotate axially, and the rotating plate 18 can drive the sealing plate 22 to rotate, thereby realizing the angle adjustment of the sealing plate 22. The rotating block 21 and the rotating groove are coaxial, and the rotating block 21 can rotate axially along the rotating groove. At the same time, the "T"-shaped design of the two can not only ensure that the rotating plate 18 can rotate axially smoothly, but also will not separate from the movable block 17 during the axial rotation, thereby ensuring that the movable block 17 can drive the sealing plate 22 to move horizontally through the rotating plate 18.

[0043] A fixing column 24 welded to the sealing plate 22 passes through the center thereof, and a sealing ring 23 is welded to the surface of the sealing plate 22 facing the cold isostatic pressing cylinder 2, and a sealing rubber pad is fixedly bonded to the sealing ring 23. When the sealing plate 22 is fitted with the cold isostatic pressing cylinder 2, the sealing ring 23 can be fitted with the side wall of the cold isostatic pressing cylinder 2, and the sealing rubber pad can improve the overall sealing performance, thereby ensuring that no leakage occurs during cold isostatic pressing.

[0044] A second fixing plate 27 is provided at one end of the fixing column 24, and a first mounting ring 25 and a second mounting ring 26 are sleeved on the fixing column 24. When the fixing column 24 moves with the sealing plate 22, it can drive the first mounting ring 25, the second mounting ring 26 and the second fixing plate 27 to move synchronously, and the fixing cylinder 6 and the fixing column 24 are coaxial, and the inner diameter of the fixing cylinder 6 is larger than the diameter of the second fixing plate 27. In this way, it is ensured that the second mounting ring 26 and the second fixing plate 27 will not scratch the rubber sheath 7 when moving into the fixing cylinder 6, thereby avoiding damage, and the structure is reasonable.

[0045] One end of the fixed column 24 is connected to the material guide pipe 29 through a tee 28, the material guide pipe 29 is welded and connected to the material box 30, and the material box 30 is bolted to the bracket 42, the bracket 42 is welded and fixed to the sealing plate 22, and a fan 31 is bolted to the bracket 42, and the air outlet end of the fan 31 is welded and connected to the side wall of the material box 30, and a material guide groove 32 is opened inside the fixed column 24, and a material guide hole 33 is opened on the outer circular wall of one end of the fixed column 24 facing the second fixed plate 27, and the material guide hole The second fixing plate 27 is hollow inside, and the second fixing plate 27 is provided with a second through slot facing one end of the fixing column 24, and the side wall of the second fixing plate 27 is evenly provided with discharge holes 271, one end of the fixing column 24 is inserted into the second fixing plate 27 through the through slot, and the fixing column 24 is fixedly connected to the side wall of the second fixing plate 27 by a fixing bolt 41, and the groove wall of the second through slot is fixedly bonded with The sealing rubber ring is formed on the second groove, and the second through groove is sealed and fitted with the outer wall of the fixing column 24 through the sealing rubber ring. When operation is required, the sealing plate 22 can be driven to move and merge with the cold isostatic pressing cylinder 2. In this process, the sealing plate 22 can drive the fixing column 24 and the second fixing plate 27 to be inserted into the fixing cylinder 6. The second fixing plate 27 will fit with the inner wall of the bottom end of the rubber sheath 7, the first mounting ring 25 will fit with the open end of the rubber sheath 7, and the second mounting ring 26 will move into the rubber sheath 7. At this time, the rubber A cavity is formed between the sleeve 7, the fixing column 24 and the second mounting ring 26. Then, the alloy element powder is loaded into the material box 30, and the fan 31 is powered on and driven to operate. The fan 31 generates a high-pressure airflow and sends it into the fan 31. In this way, the high-pressure airflow carries the element powder through the guide pipe 29 and the tee 28 into the guide groove 32, and is sprayed into the second fixing plate 27 through the guide hole 33, and finally sprayed into the cavity through the discharge hole 271, so that pneumatic automatic feeding can be performed.

[0046] A sponge gasket 272 is fixedly bonded to the hole wall of the discharge hole 271, and a sealing block 273 is arranged in the sponge gasket 272. The cross-sections of the discharge hole 271, the sponge gasket 272 and the sealing block 273 are all conical. A guide rod 274 is welded to one end of the sealing block 273, and one end of the guide rod 274 is inserted into a guide column 275. One end of the guide column 275 is welded to the inner wall of the second fixed plate 27, and an elastic spring 276 is sleeved on the guide column 275. Both ends of the elastic spring 276 are welded to the inner wall of the second fixed plate 27 and the sealing block 273. When the high-speed airflow drives the element powder into the second fixed plate 27, the second fixed plate 27 The air pressure inside will gradually increase, and finally push the sealing block 273 open, so that the high-speed airflow can drive the element powder to be ejected from the discharge hole 271, realizing pneumatic feeding. When the feeding is completed, the sealing block 273 will move horizontally along the guide column 275 through the guide rod 274 under the elastic force of the elastic spring 276, and finally move back to the discharge hole 271 and seal the discharge hole 271, thereby preventing the element powder in the cavity from entering the second fixed plate 27. At the same time, the shape design of the sealing block 273 is such that after it is moved out of the discharge hole 271, the diameter of its inner end is smaller, ensuring that the element powder will not be hindered during ejection, thereby realizing rapid feeding and reasonable structure.

[0047] The inner wall of the first mounting ring 25 is welded to the fixing column 24, and a circular groove 251 is provided on the side wall of the first mounting ring 25, and a circular rubber ring 252 is fixedly bonded in the groove 251. The diameter of the second mounting ring 26 is smaller than that of the first mounting ring 25, and an inner sealing ring 262 is fixedly bonded on the inner wall of the second mounting ring 26, and an outer sealing ring 261 is fixedly bonded on the outer wall thereof. Both the outer sealing ring 261 and the inner sealing ring 262 are made of polytetrafluoroethylene, and the inner wall of the inner sealing ring 262 is sealed and fitted with the fixing column 24. When the first mounting ring 25 is fitted with the open end of the rubber sheath 7 , will contact the rubber sheath 7 through the rubber ring 252 thereon, so that the rubber ring 252 and the rubber sheath 7 can form a sealing structure, and the material design of the outer sealing ring 261 and the inner sealing ring 262 makes the overall friction coefficient of the two low, and then when the inner sealing ring 262 moves along the fixing column 24, the two can also maintain the sealing structure to achieve active sealing, and at the same time, when the first mounting ring 25 moves into the rubber sheath 7, the outer circular wall of the outer sealing ring 261 can fit the inner wall of the rubber sheath 7, so that when the outer sealing ring 261 moves in the rubber sheath 7, the two can also maintain the sealing structure,

[0048] A second connecting pipe 35 is provided on the fixed column 24, a cavity 36 is provided in the wall of the fixed column 24, and an air outlet 37 is provided on the wall of the fixed column 24 between the first mounting ring 25 and the second mounting ring 26, the air outlet 37 is connected to the cavity 36, and the cross section of the cavity 36 is annular, one end of the second connecting pipe 35 is welded to the fixed column 24, and the second connecting pipe 35 is connected to the cavity 36, when the feeding is finished, the second connecting pipe 35 can be connected to the pneumatic booster pump 39 through a pipeline, so that the pneumatic booster pump 39 The air can be continuously transported into the cavity 36 through the second connecting pipe 35, and finally transported to between the first mounting ring 25 and the second mounting ring 26 through the air outlet 37. Since the first mounting ring 25 is fixed on the fixing column 24, when the air pressure in the first mounting ring 25 and the second mounting ring 26 gradually increases, the air pressure will push the first mounting ring 25 to move along the fixing column 24. In this way, when the first mounting ring 25 moves, the element powder in the cavity can be compacted, which can improve the subsequent cold isostatic pressing effect.

[0049] Both ends of the tee 28 are threadedly sealed with the rotating column 20 and the guide pipe 29, and the other end of the tee 28 is threadedly sealed with the first connecting pipe 34. A pneumatic booster pump 39 and a vacuum pump 40 are bolted to the support plate 38. After the element powder is compacted, the first connecting pipe 34 can be connected to the vacuum pump 40. Valves are provided on the first connecting pipe 34 and the guide pipe 29. When feeding, the valve on the first connecting pipe 34 can be closed, and when vacuuming, the valve on the guide pipe 29 can be closed. , ensuring that the feeding operation and the vacuum operation do not interfere with each other, so that at this time, the first connecting pipe 34 is connected through the tee 28, the material guide groove 32 and the material guide hole 33, and the material guide hole 33 can form a connecting structure with the pores in the sponge gasket 272 through the second fixed plate 27, so that the vacuum pump 40 can extract the air in the element powder in the cavity through the pores in the sponge gasket 272 to realize the vacuum operation of the element powder. The setting of the sponge gasket 272 can avoid the waste caused by the powder entering the second fixed plate 27 during the vacuum operation.

[0050] After the vacuum operation is completed, the hydraulic booster pump 3 can be started to perform cold isostatic pressing operation through the cold isostatic pressing cylinder 2. During this process, the element powder in the cavity can be pressed into blanks. After the operation is completed, the sealing plate 22 is driven to separate from the cold isostatic pressing cylinder 2. The sealing plate 22 can drive the fixed column 24 and the second fixed plate 27 to be pulled out from the fixed cylinder 6. When pulling out, the rubber sheath 7 can be turned over to facilitate the separation of the rubber sheath 7 from the blank. Then the rotating plate 18 is driven to rotate, which can drive the sealing plate 22 to rotate 90°. Finally, the fixing bolts 41 are removed, and the second fixed plate 27 can be removed from the fixed column 24, so that the blank on the fixed column 24 can be taken out. The operation is simple and convenient.

[0051] A high-density ultrafine-grained molybdenum alloy target preparation process comprises the following steps:

[0052] S1, mixing molybdenum element powder and other element powders uniformly through a mixing device;

[0053] S2, putting the evenly mixed powder in S1 into the rubber sleeve, and performing preliminary pressing and vacuuming;

[0054] S3, cold isostatic pressing the element powder in the rubber sheath by a cold isostatic pressing cylinder;

[0055] S4, after the cold isostatic pressing is completed, the rubber sleeve inner blank is taken out and loaded into the stainless steel sleeve, and then pressed into shape by hot isostatic pressing equipment.

[0056] In the description of this specification, the description of the terms "one embodiment", "some embodiments", "specific embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0057] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A high-density ultrafine-grained molybdenum alloy target material preparation device, comprising a frame (1), a cold isostatic pressing cylinder (2) and a hydraulic booster pump (3), Features: The frame (1) is welded with a cold isostatic pressing cylinder (2), a hydraulic booster pump (3) and a support plate (38), and a movable block (17) is arranged in the frame (1). A fixed cylinder (6) is arranged in the cold isostatic pressing cylinder (2), and a rubber sheath (7) is attached to the inner wall of the fixed cylinder (6). The water outlet end of the hydraulic booster pump (3) is flange-sealed with a water guide pipe (4), and the other end of the water guide pipe (4) is flange-connected and communicated with the outer wall of the cold isostatic pressing cylinder (2). The fixed cylinder (6) The movable block (17) is provided with through holes (13) uniformly thereon, one end of the rubber sheath (7) is open and wrapped around the end surface of the fixed cylinder (6), and is sealed and bonded to the end surface of the fixed cylinder (6), a rotating plate (18) is attached to the movable block (17), and a sealing plate (22) is welded to the top surface of the rotating plate (18), a fixing column (24) welded thereto is passed through the center of the sealing plate (22), and a sealing plate (22) is welded to the surface of the sealing plate (22) facing the cold isostatic pressing cylinder (2) on one side thereof A ring (23) is provided on the fixing column (24), one end of the fixing column (24) is connected to the material guide pipe (29) through a tee (28), and the other end of the fixing column (24) is provided with a second fixing plate (27), the fixing column (24) is sleeved with a first mounting ring (25) and a second mounting ring (26), and the fixing column (24) is provided with a second connecting pipe (35), the material guide pipe (29) is welded and connected to the material box (30), and the material box (30) is bolted to the bracket (42), and the bracket ( The support plate (42) is welded and fixed to the sealing plate (22), and a fan (31) is bolted to the support plate (42), the air outlet end of the fan (31) is welded and connected to the side wall of the material box (30), the two ends of the tee (28) are threadedly sealed to the rotating column (20) and the material guide pipe (29), and the other end of the tee (28) is threadedly sealed to the first connecting pipe (34), and a pneumatic booster pump (39) and a vacuum pump (40) are bolted to the support plate (38). The cold isostatic pressing cylinder (2) is open at one end facing the sealing plate (22), and a first through groove for inserting the mounting cylinder (5) is provided at the other end of the cold isostatic pressing cylinder (2). The mounting cylinder (5) is welded to the wall of the first through groove, and the mounting cylinder (5) is welded to one end of the fixing cylinder (6). The fixing cylinder (6) and the fixing column (24) are coaxial, and the inner diameter of the fixing cylinder (6) is greater than the diameter of the second fixing plate (27). A cavity (36) is provided in the wall of the fixing column (24), and an air outlet hole (37) is provided on the wall of the fixing column (24) between the first mounting ring (25) and the second mounting ring (26), the air outlet hole (37) and the cavity (36) are connected, and the cross section of the cavity (36) is annular, one end of the second connecting pipe (35) is welded to the fixing column (24), and the second connecting pipe (35) and the cavity (36) are connected, The fixing column (24) is provided with a material guide groove (32) inside, and a material guide hole (33) is provided on the outer circular wall of one end of the fixing column (24) facing the second fixing plate (27), the material guide hole (33) is connected with the material guide groove (32), and the material guide groove (32) is connected with an end surface of one side of the fixing column (24), the second fixing plate (27) is hollow inside, and a second through groove is provided on the second fixing plate (27) facing one end of the fixing column (24), and discharge holes (271) are evenly provided on the side wall of the second fixing plate (27), one end of the fixing column (24) is inserted into the second fixing plate (27) through the through groove, and the fixing column (24) is fixedly connected to the side wall of the second fixing plate (27) by fixing bolts (41), a sealing rubber ring is fixedly bonded to the groove wall of the second through groove, and the second through groove is sealed and fitted with the outer wall of the fixing column (24) through the sealing rubber ring.

2. A highly dense ultrafine-grained molybdenum alloy target preparation device according to claim 1, Features: The frame (1) is in the shape of a rectangular frame, and a screw rod (15) and a sliding rod (16) are arranged inside the frame (1), and a first forward and reverse motor (14) is fixed to one side of the frame (1) by bolts, the screw rod (15) passes through a movable block (17) and is threadedly connected to the movable block (17), and two ends of the screw rod (15) are movably connected to the bearing of the wall of the frame (1), the sliding rod (16) passes through the movable block (17) and is slidably connected to the movable block (17), and two ends of the sliding rod (16) are welded to the wall of the frame (1), and the output shaft of the first forward and reverse motor (14) is keyed to one end of the screw rod (15).

3. A highly dense ultrafine-grained molybdenum alloy target preparation device according to claim 1, Features: The installation tube (5) is provided with symmetrically distributed telescopic rods (9), and the inner walls of the installation tube (5) and the fixed tube (6) are provided with sliding grooves (12), and the sliding grooves (12) on the two are aligned with each other. One end of the telescopic rod (9) is welded to a first fixed plate (8), and the other end of the telescopic rod (9) is welded to a fixed block (10), the first fixed plate (8) is fixedly bonded to the outer wall of the bottom end of the rubber sheath (7), the end face of the fixed block (10) is welded to a sliding block (11) adapted to the sliding groove (12), and the cross-sections of the sliding block (11) and the sliding groove (12) are both "T"-shaped, and the sliding block (11) is inserted into the sliding groove (12).

4. A highly dense ultrafine-grained molybdenum alloy target preparation device according to claim 2, Features: The movable block (17) is penetrated by a rotating column (20) movably connected to its bearing, and a second forward and reverse motor (19) is bolted to the bottom end of the movable block (17), the output shaft of the second forward and reverse motor (19) is key-connected to the bottom end of the rotating column (20), and the top end of the rotating column (20) is welded to the bottom surface of the rotating plate (18), the bottom surface of the rotating plate (18) is welded to a rotating block (21), and the top surface of the movable block (17) is provided with a rotating groove adapted to the rotating block (21), the rotating block (21) is in an annular shape, the rotating groove is in an arc shape, and both have a "T"-shaped cross-section, and the rotating block (21) is embedded in the rotating groove.

5. A highly dense ultrafine-grained molybdenum alloy target preparation device according to claim 1, Features: The inner circular wall of the first mounting ring (25) is welded to the fixed column (24), and the side wall of the first mounting ring (25) is provided with an annular groove (251), and an annular rubber ring (252) is fixedly bonded in the groove (251). The diameter of the second mounting ring (26) is smaller than the diameter of the first mounting ring (25), and an inner sealing ring (262) is fixedly bonded on the inner circular wall of the second mounting ring (26), and an outer sealing ring (261) is fixedly bonded on the outer circular wall thereof. Both the outer sealing ring (261) and the inner sealing ring (262) are made of polytetrafluoroethylene, and the inner circular wall of the inner sealing ring (262) is sealed and fitted with the fixed column (24).

6. A highly dense ultrafine-grained molybdenum alloy target preparation device according to claim 1, Features: A sponge gasket (272) is fixedly bonded to the hole wall of the discharge hole (271), and a sealing block (273) is arranged in the sponge gasket (272). The discharge hole (271), the sponge gasket (272) and the sealing block (273) are all conical in cross-section. A guide rod (274) is welded to one end of the sealing block (273), and one end of the guide rod (274) is inserted into a guide column (275). One end of the guide column (275) is welded to the inner wall of the second fixed plate (27), and an elastic spring (276) is sleeved on the guide column (275). Both ends of the elastic spring (276) are welded to the inner wall of the second fixed plate (27) and the sealing block (273).

7. A process for implementing the high-density ultrafine-grained molybdenum alloy target preparation device as claimed in claim 1, Features: The following steps are included: S1, mixing molybdenum element powder and other element powders uniformly through a mixing device; S2, putting the evenly mixed powder in S1 into the rubber sleeve, and performing preliminary pressing and vacuuming; S3, cold isostatic pressing the element powder in the rubber sheath by a cold isostatic pressing cylinder; S4, after the cold isostatic pressing is completed, the rubber sleeve inner blank is taken out and loaded into the stainless steel sleeve, and then pressed into shape by hot isostatic pressing equipment.

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