Odor sensor, odor measuring system, and method for manufacturing odor sensor

Abstract

Provided is an odor sensor capable of using an additive that cannot be used in an odor sensor having a high-molecular coating, an odor measurement system using the odor sensor, and a method for manufacturing the odor sensor. An odor sensor (10) includes a plurality of sensor elements (11) having a substance adsorption film (13) that adsorbs an odor substance and a detector (15) that detects adsorption of the odor substance to the substance adsorption film (13). The substance adsorption film (13) is a porous particle film including particles (21) formed of a compound having silicon and oxygen as a skeleton and a surface modifier that modifies a surface of the particles (21), and the composition of the particles (21) and / or the surface modifier of at least a portion of the plurality of sensor elements (11) is different for each.

Description

TECHNICAL FIELD

[0001] The present application relates to an odor sensor for measuring odor, an odor measuring system provided with the odor sensor, and a manufacturing method of the odor sensor. BACKGROUND

[0002] As an odor sensor, an odor sensor in which a polymer coating film is formed on the surface of a quartz crystal resonator is known (for example, Patent Document 1). In addition, in order to detect a variety of odors, it is known that the kind of a skeleton polymer of the polymer coating film is changed, and the kind of an additive added to the skeleton polymer is changed.

[0003] PRIOR ART DOCUMENTS

[0004] PATENT DOCUMENTS

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 5-187986 SUMMARY

[0006] PROBLEMS TO BE SOLVED BY THE INVENTION

[0007] In the odor sensor in which the polymer coating film is formed, in order to detect a variety of odors, an additive added to the skeleton polymer is studied. However, for an additive that hinders the odor detection performance of the skeleton polymer, it is sometimes difficult to add to the skeleton polymer.

[0008] MEANS FOR SOLVING THE PROBLEMS

[0009] The present application is completed in view of the above-described circumstances, and an exemplified problem thereof is to provide an odor sensor capable of using an additive that cannot be used in an odor sensor having a polymer coating film, an odor measuring system using the odor sensor, and a manufacturing method of the odor sensor.

[0010] In order to solve the above-described problems, the present application has the following configurations.

[0011] (1) An odor sensor including a plurality of sensor elements, the sensor element having: a substance adsorption film that adsorbs an odor substance; and a detection portion that detects adsorption of the odor substance to the substance adsorption film, the substance adsorption film being a porous particulate film including particulates and a surface modifier, the particulates including a compound having silicon and oxygen as a skeleton, the surface modifier modifying a surface of the particulates, the composition of the particulates and / or the surface modifier of at least a part of the plurality of sensor elements being different respectively.

[0012] (2) An odor measurement system including the odor sensor of any one of solutions 1 to 10, which detects an odor of an odor sample, and a data processing section which generates odor data obtained by associating each electric signal acquired from the plurality of sensor elements included in the odor sensor with information on the odor sample.

[0013] (3) A method of manufacturing an odor sensor including a plurality of sensor elements each having a substance adsorption film that adsorbs an odor substance and a detection section that detects adsorption of the odor substance to the substance adsorption film, the method comprising:

[0014] a film arrangement step of arranging a particulate film on detection surfaces of the plurality of detection sections arranged adjacent to each other, the particulate film being a porous particulate film including particulates including a compound having silicon and oxygen as a skeleton, the particulate film covering the plurality of detection sections adjacent to each other; and

[0015] a surface modification step of applying a surface modifier that modifies a surface of the particulates to a surface of the particulate film, and applying different surface modifiers to each of predetermined regions on the surface of the particulate film.

[0016] Further objects and other features of the present application will become apparent from the following preferred embodiments with reference to the accompanying drawings.

[0017] Effects of the Invention

[0018] According to the present application, it is possible to provide an odor sensor capable of using an additive that cannot be used in an odor sensor having a high-molecular coating film, an odor measurement system using the odor sensor, and a method of manufacturing the odor sensor. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1A is a plan view of the odor sensor 10.

[0020] Figure 1B is a cross-sectional view of the odor sensor 10 taken along line A-A' of Figure 1A

[0021] Figure 2A is a cross-sectional view of the substance adsorption film 13.

[0022] Figure 2B is a cross-sectional view of the particulate 21.

[0023] Figure 2C is a cross-sectional view of the particulate 21 including the electrically conductive particulate 27a.

[0024] Figure 2D ​is a cross-sectional view of the particle 21 of the electrically conductive fine particle 27b for internal use.

[0025] Figure 3 is a schematic view of the odor measurement system 1.

[0026] Figure 4A is a plan view of the odor sensor 100.

[0027] Figure 4B is Figure 4A a B-B' cross-sectional view of

[0028] Figure 5 is an explanatory view showing an outline of a manufacturing method of the odor sensor 10.

[0029] Figure 6 is a schematic view of the odor sensor array 205 and a partially enlarged view thereof.

[0030] Figure 7 is a graph showing a reaction characteristic of the odor sensor A.

[0031] Figure 8 is a graph showing a reaction characteristic of the odor sensor B. DETAILED DESCRIPTION

[0032] [Embodiment 1]

[0033] Hereinafter, the odor sensor 10 of Embodiment 1 will be described in order with reference to the drawings.

[0034] In Embodiment 1, "odor" refers to an odor that a person or a living being including a person can acquire as olfactory information, and is a concept including a molecular monomer or a molecular group composed of different molecules that are collectively present at respective concentrations.

[0035] In Embodiment 1, a substance in which a molecular monomer constituting the above-described odor or a molecular group composed of different molecules is collectively present at a respective concentration is referred to as an "odor substance". Among them, the odor substance sometimes broadly refers to a substance that can be adsorbed to a substance adsorption film of the odor sensor described later in a broad sense. That is, a plurality of odor substances that are causes are included in "odor", and in addition, a substance that is not recognized as an odor substance or an unknown odor substance can exist, and thus a substance that is not regarded as a cause of odor can also be generally included.

[0036] <Odor Sensor 10>

[0037] Figure 1A is a plan view of the odor sensor 10. Figure 1B is Figure 1AA-A' cross-sectional view. The odor sensor 10 is a sensor including a plurality of sensor elements 11 having a substance adsorbing film 13 that adsorbs odor substances, and a detector 15 that detects adsorption of odor substances to the substance adsorbing film 13. The plurality of sensor elements 11 are arranged on a sensor substrate 17. Each sensor element 11 is connected to an electronic circuit (not shown in Figure 1A and Figure 1B .

[0038] As shown in Figure 1A and Figure 1B , the sensor element 11 is composed of the detector 15 and the substance adsorbing film 13 provided on the surface of the detector 15. The substance adsorbing film 13 preferably covers the entire surface of the detector 15. That is, the size of the detector 15 is preferably the same as or smaller than the formation range of the substance adsorbing film 13. Further, a plurality of detectors 15 can be provided within the formation range of one substance adsorbing film 13.

[0039] The sensor element 11 can also be provided with a plurality of detectors 15 on the sensor substrate 17, as shown in Figure 1A , six sensor elements 11 are arranged in a manner to depict an equilateral triangle. At this time, the substance adsorbing films 13 of adjacent sensor elements 11 do not contact or are insulated from each other. Note that the sensor elements 11 do not necessarily need to be arranged in order on the sensor substrate 17, and can be provided at random or in an arbitrary pattern.

[0040] At least some of the plurality of sensor elements 11 provided on the sensor substrate 17 preferably have substance adsorbing films 13 that have different adsorption properties for odor substances from each other. The plurality of sensor elements 11 can all be composed of different substance adsorbing films 13, or there can be no substance adsorbing films 13 having the same adsorption properties. The composition of the substance adsorbing film 13 can vary depending on the composition of the microparticles 21, the composition of the surface modifier, the combination of the microparticles 21 and the surface modifier, and the like. That is, even for the same odor substance (or aggregate thereof), the substance adsorbing films 13 having different adsorption properties exhibit different adsorption properties. In Figure 1A and Figure 1B , the substance adsorbing films 13 are all shown to be the same for convenience, but in fact, they have different adsorption properties from each other. Note that the adsorption properties of the substance adsorbing films 13 of the respective sensor elements 11 do not necessarily need to be all different, and there can be sensor elements 11 provided with substance adsorbing films 13 having the same adsorption properties.

[0041] <Substance Adsorbing Film 13>

[0042] Figure 2Ais a cross-sectional view of the substance adsorbing film 13. The substance adsorbing film 13 is a fine particle film including fine particles 21 formed of a compound having silicon and oxygen as a skeleton and a surface modifier that modifies the surface of the fine particles 21. As shown in Figure 2A , the substance adsorbing film 13 is a porous fine particle film in which a large number of fine pores 23 are formed by the plurality of fine particles 21. The surface of the fine particles 21 is modified by the surface modifier. Note that, in Figure 2A , a case where the surface of the fine particles 21 is modified by the surface modifier is not shown. In Embodiment 1, the fine particles 21 are primary particles (particles that are not agglomerated).

[0043] The thickness of the substance adsorbing film 13 can be appropriately selected depending on the characteristics of the odor substance that is the adsorption target. For example, the thickness of the substance adsorbing film 13 can be set to a range of 10 nm to 10 μm, and is preferably set to 50 nm to 800 nm. If the thickness of the substance adsorbing film 13 is less than 10 nm, sufficient sensitivity is sometimes not obtained. In addition, if the thickness of the substance adsorbing film 13 exceeds 10 μm, the upper limit of the weight that can be detected by the detector 15 is sometimes exceeded due to the weight of the substance adsorbing film 13 itself.

[0044] < Fine Particle 21 >

[0045] Figure 2A The fine particle 21 shown in FIG. 1 is a hollow silica particle having a void inside. As the fine particle 21, as long as it is a fine particle formed of a compound having silicon and oxygen as a skeleton, it is not limited to a hollow silica particle. That is, the fine particle 21 is a fine particle formed of a compound mainly including silicon oxide, and is a fine particle formed of a compound including a skeleton having a Si-O-Si bond. As the fine particle including a compound having silicon and oxygen as a skeleton, for example, there can be mentioned a solid structure fine particle such as a silica nanoparticle, a silsesquioxane, a network silica, a linear silica, a linear or network nanosilica, a hollow structure fine particle such as a hollow silica, a mesoporous silica, a nanoporous silica, a linear silica, a fine-pore structure fine particle such as a mesoporous silica, a nanoporous silica, a network silica, a linear silica, a linear or network nanosilica, and the like. Note that, among the above-mentioned particles, a plurality of particles of each structure classified as a solid structure, a hollow structure, or a fine-pore structure can take each structure. The shape of the fine particle 21 is not particularly limited, and can be spherical, rod-like, or other irregular shapes. The fine particle 21 can be a crystalline fine particle or a non-crystalline fine particle.

[0046] As the fine particles 21, fine particles having a fine pore structure and / or a hollow structure among the above-described various particles are preferable, and fine particles having a fine pore structure and having a hollow structure are particularly preferable. By using fine particles 21 having a fine pore structure and / or a hollow structure, the specific gravity of the fine particles 21 becomes small, and the weight of the substance adsorption film 13 can be reduced. This is advantageous in that, in a case where the detector 15 detects a phenomenon accompanying a change in the weight of the substance adsorption film 13 caused by adsorption of an odor substance, the detection sensitivity as the odor sensor 10 is improved. For example, in a case where the detector 15 is a quartz crystal microbalance (QCM) sensor (hereinafter, also referred to as a "QCM sensor"), the weight of the substance adsorption film 13 is preferably 2% or less of the weight of the quartz crystal resonator of the QCM sensor.

[0047] The fine particles 21 are advantageous in that, by having a fine pore structure, the surface area increases, the surface to be modified by the surface modifier described later increases, and the effects of the surface modifier are easily exhibited. In addition, in a case where the fine particles 21 have a hollow structure, as described later, a substance that changes the characteristics of the fine particles 21, such as a conductive fine particle, can be enclosed, and thus the fine particles 21 are advantageous.

[0048] Figure 2B is a schematic view of a cross section of the fine particles 21. In Embodiment 1, the fine pores 25 refer to pores formed in the fine particles 21. The fine particles 21 in which the fine pores 25 are formed can have a solid structure, or can have a hollow structure. On the other hand, the pores 23 refer to pores formed in the fine particle film (substance adsorption film 13) by the fine particles 21. In general, pores refer to pores that pass through from one of a film and a particle to the other, but in Embodiment 1, pores that do not pass through can also be included.

[0049] The size of the fine particles 21 is not particularly limited, and for example, fine particles having an average particle diameter of 2 nm to 1000 μm can be used.

[0050] The fine particles 21 can contain conductive fine particles. The conductive fine particles can form a skeleton of the fine particles 21 together with silicon and oxygen, can be wrapped in the skeleton of the fine particles 21, or can be present dispersed in the inside of the fine particles 21.

[0051] In a case where the fine particles 21 have a hollow structure, conductive fine particles can be enclosed in the hollow portions (void portions). The conductive fine particles enclosed in the hollow portions (void portions) can be a single fine particle, or can be a plurality of fine particles. Figure 2C is a schematic view of a cross section of the fine particles 21 in which the conductive fine particles 27a are enclosed. Figure 2D is a schematic view of a cross section of the fine particles 21 in which the conductive fine particles 27b are enclosed.

[0052] As the electrically conductive fine particles, there is no particular limitation as long as they have electric conductivity, and examples thereof include gold, silver, copper, aluminum, nickel, iron, platinum, palladium, tungsten, molybdenum, zinc, tin, carbon, electrically conductive ceramics, and the like. The electrically conductive fine particles contained in or enclosed by the fine particles 21 can be one kind, two or more kinds, or an alloy of a plurality of kinds of the above-described metals.

[0053] In the case where the fine particles 21 are hollow particles that enclose electrically conductive fine particles, the substance adsorption film 13 is preferably combined with a detector 15 that detects a change in electric conductivity, which will be described later. In a state where the hollow particles that enclose electrically conductive fine particles are in contact, a capacitor can be configured with two electrically conductive fine particles across the shell of the hollow particle. In the case where the surface of the fine particles 21 in this state is modified by a surface modifier, if an odor substance adheres, the dielectric constant changes, and the adsorption of the odor substance can be detected in the form of a change in electric conductivity.

[0054] <Surface modifier>

[0055] The surface modifier is an additive that is added to the fine particles 21 in order to modify the surface of the fine particles 21. By changing the amount (concentration), kind, or the like of the added surface modifier, the adsorption properties of the substance adsorption film 13 with respect to an odor substance can be changed. The surface modifier is not particularly limited as long as it can modify the surface properties of the fine particles 21 formed of a compound having silicon and oxygen as a skeleton. The surface modifier can be a substance that modifies the surface properties of the fine particles 21 by forming a chemical bond by reacting with the surface of the fine particles 21, or a substance that modifies the surface properties of the fine particles 21 by physically adhering to the surface of the fine particles 21. As the surface modifier, examples thereof include inorganic acids such as phosphoric acid, boric acid, and the like, organic acids such as formic acid, acetic acid, propionic acid, octanoic acid, palmitic acid, oxalic acid, succinic acid, maleic acid, fumaric acid, p-toluenesulfonic acid, 10-camphorsulfonic acid, bis-2-ethylhexylsulfosuccinic acid, methylphosphonic acid, chloromethylphosphonic acid, phenylphosphonic acid, methylphosphinic acid, di-2-ethylhexylphosphoric acid, and the like, inorganic salts such as common salt, and the like, organic salts such as sodium dodecyl sulfate, sodium laurate, and the like, ionic liquids such as 1-ethyl-3-methylimidazolium trifluoromethanesulfonate, and the like, silane coupling agents such as dichlorodimethylsilane, trimethylchlorosilane, methyltriethoxysilane, ethyltriethoxysilane, vinyltriethoxysilane, 3-aminopropyltriethoxysilane, butyldimethylchlorosilane, phenyltrimethoxysilane, nonafluorohexyltrimethoxysilane, octadecyltrimethylchlorosilane, heptadecafluorodecyltrimethoxysilane, and the like, silylating agents such as 1,1,1,3,3,3-hexamethyldisilazane, tetramethylsilane, trimethyl(tridecafluorohexyl)silane, trimethylsilylmethoxyacetate, 2-(trimethylsilyl)pyridine, trimethyl(pentafluorophenyl)silane, 1,1,3,3-tetramethyldisilazane, 1-(dimethylethylsilyl)imidazole, triisocyanatomethyl)silane, and the like. These compounds can be used alone or in combination with two or more kinds.

[0056] In the case where the odor sensor 10 has a detection sensor that detects a change in weight as the detector 15, the surface modifier can be a compound that reacts with a conductive polymer to reduce the conductivity of the conductive polymer. As a substance adsorption film of a conventional odor sensor, a conductive polymer is used, and an additive is sometimes added in order to change the physical properties thereof. In the odor sensor 10 having a detection sensor that detects a change in weight as the detector 15, by using the fine particles 21 formed of a compound having silicon and oxygen as a skeleton as the base material of the substance adsorption film 13, even an additive that is considered to be difficult to use in the conventional odor sensor, that is, a compound that reacts with a conductive polymer to reduce the conductivity of the conductive polymer, can be used without particular difficulty. As the compound that reacts with a conductive polymer to reduce the conductivity of the conductive polymer, for example, there can be mentioned formic acid, propionic acid, palmitic acid, oxalic acid, succinic acid, maleic acid, fumaric acid, and the like, organic acids having a carboxyl group, p-toluenesulfonic acid, 10-camphorsulfonic acid, bis-2-ethylhexylsulfosuccinic acid, and the like, organic acids having a sulfonic group, methylphosphonic acid, chloromethylphosphonic acid, phenylphosphonic acid, methylphosphinic acid, di-2-ethylhexylphosphoric acid, and the like, organic acids having a phosphoric acid group, and the like. In addition, as the compound that reacts with a conductive polymer to reduce the conductivity of the conductive polymer, there can be mentioned an organic acid derivative and the like that generates the above-described organic acid through hydrolysis or the like. These organic acids can be used singly as the surface modifier, or two or more kinds thereof can be used in combination. In addition, the organic acid can have a plurality of the above-described respective functional groups. In the case where the organic acid has a plurality of the above-described respective functional groups, the kinds of the functional groups can be one kind, or two or more kinds thereof can be combined. In the case where the odor sensor 10 has a detection sensor that detects a change in electric characteristics as the detector 15, as the surface modifier, a conductor that uses a carbon-based material, a nano-metal material, or the like as a main component can be used. In the case where the odor sensor 10 has a detection sensor that detects a change in electric characteristics as the detector 15, by studying the detection method, the same surface modifier as in the case where the detection sensor that detects a change in the above-described weight is used as the detector 15 can be used.

[0057] <Method of manufacturing substance adsorption film 13>

[0058] Next, a method of manufacturing the substance adsorption film 13 including the fine particles 21 and the surface modifier will be described. The manufacturing of the substance adsorption film 13 includes a film arrangement step and a surface modification step.

[0059] In the film arrangement step, first, a fine particle film is arranged on the detection surface of the detector 15, the fine particle film being a porous fine particle film containing fine particles formed of a compound having silicon and oxygen as a skeleton, and covering the detector 15. Specifically, a fine particle dispersion in which the fine particles 21 are dispersed in a solvent is applied. As the solvent in which the fine particles 21 are dispersed, there is no particular limitation as long as it is a solvent in which the fine particles 21 formed of a compound having silicon and oxygen as a skeleton can be dispersed, and, for example, water, ethanol, N-methylpyrrolidone (NMP), or the like can be used. The thickness of the fine particle dispersion applied on the surface of the detector 15 can be adjusted so that the thickness after drying becomes a predetermined thickness.

[0060] Next, the applied fine particle dispersion is dried. The drying conditions are not particularly limited as long as they are conditions under which the solvent used for applying the fine particle dispersion is appropriately evaporated, forming a structure of the fine particles 21 that becomes the base material of the substance adsorption film 13. As the drying conditions, for example, heating at 100°C for 1.5 hours under normal pressure can be set.

[0061] Next, in the surface modification step, a surface modifier that modifies the surface of the fine particles 21 is applied to the surface of the fine particle film arranged in the film arrangement step. Specifically, the surface modifier is applied to the structure of the fine particles 21 (base material of the substance adsorption film 13) obtained by drying. The amount of the surface modifier applied is not particularly limited as long as it can be appropriately dispersed and applied within a desired range. For example, the surface modifier is diluted with an appropriate solvent, and the diluted solvent is sprayed using an inkjet device or the like, whereby the surface modifier can be applied to the desired range of the structure of the fine particles 21. The solvent in which the surface modifier is diluted is not particularly limited, and, for example, water, ethanol, or the like can be used. The surface modifier can be applied to the entire structure of the fine particles 21, or only to a desired part thereof. At this time, a different kind of surface modifier can be applied to part or all of the remaining part of the structure of the fine particles 21. Alternatively, even if the same surface modifier is applied to part or all of the remaining part of the structure of the fine particles 21, the dilution concentration can be changed. In order to change the dilution concentration to apply the surface modifier, for example, the moving speed of the nozzle of the inkjet device, the amount of spraying, the number of spraying, or the like can be adjusted.

[0062] Next, the structure of the fine particles 21 to which the surface modifier is applied is dried. The drying conditions are not particularly limited as long as the solvent used to dilute the surface modifier is appropriately evaporated, and the surface of the fine particles 21 is appropriately modified by the surface modifier. As the drying conditions, for example, heating at 100°C for 1 hour under normal pressure can be set.

[0063] The amount of the surface modifier applied (added) to the fine particles 21 is not particularly limited as long as it can modify the surface of the fine particles 21.

[0064] Detector 15 (detection section)

[0065] The detector 15 has a function as a detection section or a signal conversion section (converter) that detects a phenomenon accompanying a change in physical, chemical, electrical, or the like characteristics of the substance adsorption film 13 caused by an odor substance adsorbed to the surface of the substance adsorption film 13, and outputs the measurement data as, for example, an electrical signal. That is, the detector 15 is a detection sensor that detects the adsorption state of the odor substance to the surface of the substance adsorption film 13. As the signal output by the detector 15 as the measurement data, an electrical signal, light, or the like can be given, and from these signals, information such as a change in electrical resistance, a change in vibration frequency, or the like is output.

[0066] As the detector 15, as long as it is a detection sensor that can detect a phenomenon accompanying a change in physical, chemical, electrical, or the like characteristics of the substance adsorption film 13, there is no particular limitation, and various detection sensors can be appropriately used. As the change in physical, chemical, electrical, or the like characteristics detected by the detector 15, for example, a change in weight of the substance adsorption film 13, a change in electrical characteristics such as electrical conductivity, or the like caused by the odor substance being adsorbed to the surface of the substance adsorption film 13 can be given.

[0067] As the detector 15, specifically, a detection sensor that detects a change in weight such as a quartz crystal microbalance (QCM) sensor, a micro electro mechanical system (MEMS) sensor, a cantilever type sensor, a surface acoustic wave (SAW) sensor, a field effect transistor (FET) sensor, a charge coupled device sensor, a MOS field effect transistor sensor, a metal oxide semiconductor sensor, a complementary metal oxide film semiconductor (CMOS) sensor, an organic conductive polymer sensor, an electrochemical sensor, or the like, and a detection sensor that detects a change in electrical characteristics such as a complementary metal oxide film semiconductor (CMOS) sensor or the like can be given. Among these, as the detection sensor that detects a change in weight, a quartz crystal microbalance (QCM) sensor or the like is preferable, and as the detection sensor that detects a change in electrical characteristics, a complementary metal oxide film semiconductor (CMOS) sensor or the like is preferable. Hereinafter, a case where a quartz crystal microbalance (QCM) sensor (hereinafter, also referred to as a "QCM sensor") is used as the detector 15 will be described.

[0068] Quartz Crystal Microbalance (QCM) Sensor

[0069] In a case where the QCM sensor is used as the detector 15, as the excitation electrode, an electrode can be provided on both surfaces of the quartz crystal resonator. In order to detect a higher Q value, a separate electrode can also be provided on a single surface. In addition, the excitation electrode can also be provided on the sensor substrate 17 side of the quartz crystal resonator with the sensor substrate 17 interposed therebetween. Furthermore, in the case where the QCM sensor is used as the detector 15, the excitation electrode can also be provided on the surface of the substance adsorption film 13. Figure 1B In the case where the QCM sensor is used as the detector 15, the excitation electrode is not illustrated.

[0070] The excitation electrode can be formed from any conductive material. Specifically, materials used as excitation electrodes include inorganic materials such as gold, silver, platinum, chromium, titanium, aluminum, nickel, nickel alloys, silicon, carbon, and carbon nanotubes, as well as organic materials such as conductive polymers such as polypyrrole and polyaniline.

[0071] like Figure 1A and Figure 1B As shown, the detector 15 can be designed to be a flat plate shape. Figure 1A As shown, the shape of the flat plate can be circular, but it can also be a quadrilateral, square, ellipse, or other shapes. In addition, the shape of the detector 15 is not limited to a flat plate shape, and its thickness can also be varied, and it can also form concave or convex parts.

[0072] When the detector 15 uses a resonator such as a quartz crystal resonator sensor, by varying the resonant frequency of each resonator in the multiple sensor elements 11, the influence (crosstalk) from other resonators coexisting on the same sensor substrate 17 can be reduced. The resonant frequency can be arbitrarily designed so that each resonator on the same sensor substrate 17 exhibits different sensitivities for a given vibration frequency. The resonant frequency can be varied, for example, by adjusting the resonator or the thickness of the material adsorption film 13.

[0073] <Sensor substrate 17>

[0074] The sensor substrate 17 is a substrate on which the detector 15 and the material adsorption film 13 on its surface can be disposed. Silicon substrates, substrates made of quartz crystal, printed wiring substrates, ceramic substrates, resin substrates, etc., can be used. Furthermore, the substrate is a multilayer wiring substrate such as an interpolation substrate, with excitation electrodes for oscillating the quartz crystal resonator, mounting wiring, electrodes for energizing, and other wiring arranged at arbitrary positions to enable the multiple detectors 15 to function individually.

[0075] like Figure 1A As shown, the sensor substrate 17 can be divided into a sensor section 17a with a plurality of sensor elements 11 and a gripping section 17b on which no sensor elements are disposed. Since no sensor elements are disposed on the surface of the gripping section 17b, a person can grip it with fingers, tweezers, or the like. Therefore, the odor sensor 10 can be configured to be detachable from a chip in the odor measuring device of the odor measuring system 1 described later.

[0076] By being configured as above, the odor sensor 10 having the plurality of sensor elements 11 each having a substance adsorption film 13 of a different odor substance adsorption property can be obtained. Thus, in the case where the odor of the air containing a certain odor substance or a composition thereof is measured with the odor sensor 10, the odor substance or the composition thereof is similarly brought into contact with the substance adsorption film 13 of each sensor element 11, but the odor substance is adsorbed to each substance adsorption film 13 in a different manner. That is, in each substance adsorption film 13, the amount of adsorption of the odor substance is different. Therefore, in each sensor element 11, the detection result of the detector 15 is different. Thus, for a certain odor substance or a composition thereof, the number of sensor elements 11 (substance adsorption films 13) provided in the odor sensor 10 is generated based on the measurement data of the detector 15.

[0077] The group of measurement data generated by the odor sensor 10 by measuring a certain odor substance or a composition thereof is generally specific (unique) to a specific odor substance or a composition of odor substances. Therefore, by utilizing the measurement data of the odor sensor 10, it is possible to recognize an odor in the form of an odor substance alone or a composition (mixture) of odor substances.

[0078] <Odor measurement system 1>

[0079] The odor measurement system 1 has the above-described odor sensor 10 and a data processing section, and generates odor data based on the odor of an odor sample detected by the odor sensor 10. The data processing section generates odor data in which each electric signal acquired from the plurality of sensor elements 11 provided in the odor sensor 10 is associated with information of the odor sample. The data processing section is configured to include at least a central processing device (CPU) 51 and a storage device 53. Figure 3 is a schematic view of the odor measurement system 1.

[0080] As the odor measurement system 1, specifically, an information processing terminal provided with the odor sensor 10 can be provided. As the information processing terminal, for example, a computer, a tablet terminal, a smart phone, a mobile phone, and the like can be given. In addition, the odor measurement system 1 can also be realized by a combination of the information processing terminal provided with a reading section capable of reading a detection signal of the chip-type odor sensor 10, the central processing device (CPU) 51, and the storage device 53, and the chip-type odor sensor 10.

[0081] As shown in Figure 3 , the detectors 15 of the respective sensor elements 11 of the odor sensor 10 are communicably connected to the central processing device (CPU) 51 of the data processing section via internal wiring of the sensor substrate 17. Thus, the signals detected by the detectors 15 are transmitted to the central processing device 51.

[0082] The central processing device (CPU) 51 has a function of generating odor data based on the acquired signals. This function is realized by the central processing device (CPU) 51 executing an odor data generation program P1 stored in the storage device 53 to which the central processing device (CPU) 51 can be communicatively connected. The odor data can be, for example, data in which IDs, names of information as odor samples, and data detected in each sensor element 11 are associated with each other. The data detected in each sensor element 11 can be numerically converted according to a prescribed process by the odor data generation program P1. The generated odor data can be stored in the storage device 53 as an odor database D1, for example.

[0083] <Odor recognition system>

[0084] The odor measurement system 1 can constitute a part of an odor recognition system that outputs whether the odor measured by the odor measurement system 1 agrees with known odor data, the degree of similarity to the known odor data. As shown in FIG. 8, the odor recognition system can be constituted by the odor measurement system and an odor data server 60 communicatively connected via the Internet N, for example. The odor measurement system 1 can have a communication device 55 for communicatively connecting with other information processing terminals, and can be connected with the odor data server 60 using the communication device 55. The odor recognition system can have a sensor arrangement information server 70 communicatively connected via the Internet N, as shown in FIG. 9. Furthermore, the odor data server 60 and the sensor arrangement information server 70 can not be connected via the Internet N, but can be communicatively connected within an intranet or within the odor measurement system 1. Figure 3 Figure 3

[0085] In the odor data server 60, known odor data can be accumulated and stored. For example, odor data measured using the odor measurement system 1 can be transmitted to the odor data server 60 and stored.

[0086] By comparing odor data measured using the odor measurement system 1 and known odor data stored in the odor data server 60, it is possible to output whether the measured odor data agrees with the known odor data, the degree of similarity to the known odor data, and the like.

[0087] ​​In the sensor arrangement information server 70, arrangement information of the plurality of sensor elements 11 in the odor sensor 10 can be stored in advance. As the arrangement information, at least position information of each sensor element 11 on the odor sensor 10 and composition information of the substance adsorption film 13 formed on the sensor element 11 can be included. As the composition information of the substance adsorption film 13, composition information of the substrate (microparticle 21) of the substance adsorption film 13 and composition information of the additive (surface modifier) can be provided.

[0088] By using the sensor arrangement information server 70, the substance adsorption film 13 formed on each sensor element 11 of the odor sensor 10 can be changed for each odor sensor 10, and the kind (kind of composition) of the substance adsorption film 13 can be increased. That is, by combining the odor data obtained by measuring using the odor measuring system 1 having a specific odor sensor 10 and the arrangement information of the specific odor sensor 10 stored in the sensor arrangement information server 70, the odor data measured by the specific odor sensor 10 can be uniquely determined. By comparing the odor data thus determined with the known odor data stored in the odor data server 60, it is possible to output whether the measured odor data is consistent with the known odor data, the degree of similarity to the known odor data, and the like.

[0089] [Embodiment 2]

[0090] As Embodiment 2, the odor sensor 100 in which a plurality of sensor elements 111 are arranged adjacent to each other with the detector 115 as the respective detection unit will be described. Note that the portions not involved in the description of Embodiment 2 below are provided to be the same as the configuration of the odor sensor 10 of Embodiment 1, and the same reference numerals are used for the components.

[0091] Figure 4A is a plan view of the odor sensor 100. Figure 4B is a B-B' cross-sectional view of Figure 4A . In the odor sensor 100, each detector 115 is arranged adjacent to each other on the sensor substrate 17. The substance adsorption film 113 is formed on the surface of the adjacent detectors 115, and the adjacent detectors 115 are covered with the substance adsorption film 113. The substance adsorption film 113 is shared between the adjacent detectors 115 of the plurality of sensor elements 111. That is, in Figure 4A and Figure 4B , a single substance adsorption film 113 is formed on the surface of all the adjacent detectors 115. In this case, the surface modifier added (applied) to the surface of the microparticle 21 as the substrate does not change in each single detector 115, and the surface of the microparticle 21 is modified with one kind of surface modifier in the range covering the plurality of detectors 115.

[0092] As the detector 115, a detector that detects a change in the electrical conductivity of the substance adsorption film 113 caused by the adsorption of the odor substance is preferable. Further, in the case of a detector that detects a change in the weight of the substance adsorption film 113, since the substance adsorption film 113 is shared with other detectors 115, it is sometimes not possible to accurately detect the change in the weight.

[0093] As the detector 115, specifically, a field effect transistor (FET) sensor, a charge coupled device sensor, a MOS field effect transistor sensor, a metal oxide semiconductor sensor, a complementary metal oxide semiconductor (CMOS) sensor, an organic conductive polymer sensor, an electrochemical sensor, and the like are preferable, and a complementary metal oxide semiconductor (CMOS) sensor is particularly preferable.

[0094] <Method for manufacturing odor sensor 100>

[0095] The substance adsorption film 113 of the odor sensor 100 can be manufactured by a film arrangement process and a surface modification process on the detection surface of the detector 115. The method for manufacturing the configuration other than the substance adsorption film 113 of the odor sensor 100 is not particularly limited, and can be manufactured based on a publicly known method or the manufacturing method of the odor sensor 10.

[0096] In the film arrangement process of the substance adsorption film 113, a porous particulate film containing the microparticles 21 is arranged on the detection surfaces of the plurality of detectors 115 arranged adjacent to each other, and the plurality of detectors 115 are covered with the particulate film. Further, the film arrangement process is the same as the film arrangement process in the manufacturing method of the substance adsorption film 13 except that the detectors 115 are arranged adjacent to each other.

[0097] In the surface modification process of the substance adsorption film 113, the surface of the particulate film arranged in the film arrangement process is coated with a surface modifier. At this time, the surface modification process is different from the surface modification process in the manufacturing method of the substance adsorption film 13 in that a different surface modifier is coated on each of the prescribed regions of the surface of the particulate film. Here, the plurality of detectors 115 are arranged under the prescribed regions of the particulate film, and these detectors 115 share at least the substance adsorption film 113 in the prescribed regions.

[0098] Figure 5 is an explanatory diagram showing an outline of the manufacturing method of the odor sensor 10. In the surface modification process in the manufacturing method of the odor sensor 100, as shown in Figure 5As shown, an inkjet spraying device can be used. That is, by spraying a surface modifier coated on a microparticle film from an inkjet nozzle 123, the surface modifier can be coated on a designated area 119a of the microparticle film surface. Then, in order to spray the next designated area 119b, the inkjet head 121 can be moved along the material adsorption film 113 to the next designated area 119b to spray the surface modifier. At this time, the surface modifier sprayed in the next designated area 119b preferably has a different composition than the surface modifier sprayed in the initial designated area 119a.

[0099] The designated regions 119a and 119b can also be continuous. That is, spraying can begin from the designated region 119a, and while spraying, the inkjet head 121 can be moved along the material adsorption film 113 to coat a large area of ​​the microparticle film with a surface modifier. Furthermore, by further coating the area already coated with a surface modifier with a surface modifier of other compositions, a region coated with two types of surface modifiers can be formed. Additionally, when the inkjet head 121 is moved while spraying the surface modifier, the spray volume can be adjusted to create a region where the amount of surface modifier applied continuously varies.

[0100] [Implementation Method 3]

[0101] <Odor Sensor Arrangement>

[0102] Next, as Embodiment 3, the odor sensor arrangement 205 will be described. It should be noted that in the following description of Embodiment 3, the parts not mentioned are assumed to have the same configuration as the odor sensor 10 of Embodiment 1, and the same reference numerals are used.

[0103] Figure 6 This is a schematic diagram and a partial enlarged view of the odor sensor array 205. Figure 6 In the diagram, a magnified view of the odor sensor 200, located at the upper right of the odor sensor array 205, and its vicinity is shown within a circle. Figure 6 The image shows an odor sensor 200 with 3 sensor elements arranged in a planar configuration (3 in the Y direction and 3 in the X direction) or 5 in the Y direction and 6 in the X direction, totaling 30 arranged in a planar configuration. In each odor sensor 200, the 9 sensor elements 201 each have a different substance adsorption membrane 203.

[0104] The odor sensor array 205 arranges two or more odor sensors 200 including the sensor element 201. As the odor sensor 200, the same odor sensor as the odor sensor 10 described in Embodiment 1 can be used, which includes two or more sensor elements 201 having a substance adsorption film 203 that adsorbs an odor substance and a detection section that judges an adsorption state of the odor substance on the substance adsorption film 203. The adsorption characteristics of each substance adsorption film 203 possessed by the two or more sensor elements are different from each other.

[0105] The odor sensor array 205 arranges two or more odor sensors described above, and thus can detect the adsorption states of odor substances at two or more different positions. Thereby, it is possible to detect the position information of the odor substance or the gas including the odor substance.

[0106] Since the amounts of adsorption of the odor substance on the substance adsorption film 203 can be measured at two or more different positions, it is possible to grasp the moving direction of the odor substance or the gas including the odor substance based on the difference in the amount of adsorption of the odor substance in each odor sensor. That is, it is possible to detect the moving direction of the odor substance. For example, by detecting the so-called "smoke odor" or the like generated in a smoke state before a fire with the odor sensor array 205, it is possible to detect from which direction the smoke odor moves, and it is considered to be useful for determining the origin of the fire.

[0107] In addition, it is possible to record the measured values in each odor sensor of the odor sensor array 205 in time series. Thereby, it is possible to grasp the distance moved by the odor substance over time. Of course, it is also possible to grasp the concentration distribution of the odor substance at the positions of the odor sensor array 205 corresponding to each odor sensor and the migration process thereof.

[0108] The odor sensors 200 included in the odor sensor array 205 can be the same or different, and in the case of grasping the moving direction of a specific odor substance, it is preferable that each odor sensor 200 commonly has at least one substance adsorption film 203 possessed by each odor sensor 200. In addition, it is more preferable that each odor sensor 200 commonly has a combination of the substance adsorption films 203 possessed by each odor sensor 200. Furthermore, it is preferable that each odor sensor 200 is the same odor sensor.

[0109] The overall shape of the odor sensor array 205 is not particularly limited, and for example, as shown in FIG. 1, it can be a flat plate-shaped odor sensor array 205 in which each sensor element 201 of each odor sensor is arranged in a planar shape, or each odor sensor 200 is arranged in a planar shape. If the overall shape of the odor sensor array 205 is a flat plate shape, it is easy to be disposed at an arbitrary planar site such as a wall, a ceiling, a floor, or the like. Figure 6 If the overall shape of the odor sensor array 205 is a flat plate shape, it is easy to be disposed at an arbitrary planar site such as a wall, a ceiling, a floor, or the like.

[0110] The overall shape of the odor sensor array 205 can be a cylindrical shape or a spherical shape in which the surface is covered with the odor sensor 200. By making the overall shape a cylindrical shape or a spherical shape like this, the moving direction of the odor substance can be grasped three-dimensionally.

[0111] As a method of manufacturing the odor sensor array 205, there is no particular limitation, and the detection surface of the detector 15 can be divided into a region 207 corresponding to the range of the odor sensor, further divided into a small region 208 corresponding to the range of the sensor element 201 in the region 207, and on this basis, different substance adsorption films 203 can be formed in each small region 208.

[0112] Hereinafter, the odor sensor will be described more specifically using examples.

[0113] [Example 1]

[0114] As the odor sensor 10 of Embodiment 1, the reaction characteristics to ammonia were confirmed for an odor sensor having a substance adsorption film 13 containing silica-coated nickel particles as the fine particles 21 and octanoic acid as the surface modifier (hereinafter referred to as "odor sensor A"). Here, the silica-coated nickel particles are fine particles in which the nickel particles as the conductive fine particles 27a are covered with a silica film. The detector 15 of the odor sensor A was provided as a QCM sensor. Figure 2C

[0115] A graph showing the reaction characteristics to ammonia based on the odor sensor A is shown in FIG. 6. Figure 7 In FIG. 6, the vertical axis represents the change in the vibration frequency (Hz) detected by the QCM sensor as the reaction when the odor sensor measures ammonia. Figure 7 Figure 7 Each column chart of FIG. 6 shows, from left to right, the change in the vibration frequency based on the odor sensor when the substance adsorption film is a film containing polyaniline (hereinafter "PA"), a film in which only the silica-coated nickel particles are applied (hereinafter "Si") without a surface modifier, a film in which only octanoic acid as the surface modifier is applied (hereinafter "octanoic acid"), a film in which a substance in which polyaniline and octanoic acid are mixed is applied (hereinafter "PA+octanoic acid"), and a film in which a substance in which the silica-coated nickel particles and octanoic acid are mixed is applied (hereinafter "Si+octanoic acid"). Figure 7 Figure 7 Figure 7 Figure 7 Figure 7

[0116] Figure 7 ​​​​​​​The results for "Si + octanoic acid" represent the results for odor sensor A. Odor sensor A, which has a substance adsorption membrane 13 containing nickel particles coated with silica with an octanoic acid-modified surface, exhibits a significantly larger change in vibration frequency compared to the unmodified odor sensor "Si" and the odor sensor "octanoic acid" which does not contain particles 21. Furthermore, even compared to the conventionally known odor sensor "PA" with a membrane formed from polyaniline and the odor sensor "PA + octanoic acid" formed by adding octanoic acid to polyaniline, the change in vibration frequency of odor sensor A is significantly larger.

[0117] [Example 2]

[0118] As an example of the odor sensor 10 in Embodiment 1, for an odor sensor (hereinafter referred to as "odor sensor B") having a substance adsorption membrane 13 comprising silica-coated nickel particles as microparticles 21 and a silanizing agent as a surface modifier, the reaction characteristics with water, ammonia, acetic acid, ethanol, acetone, and hexane were confirmed. Here, the silica-coated nickel particles are... Figure 2C The nickel particles 27a shown in particle 21 are conductive particles covered by a silicon dioxide film. The detector 15 of the odor sensor A is a CMOS sensor. 1,1,1,3,3,3-hexamethyldisilazane is used as the silanizing agent.

[0119] The graph representing the reaction characteristics of each sample (water, ammonia, acetic acid, ethanol, acetone, and hexane) obtained by odor sensor B is shown in the figure. Figure 8 .exist Figure 8 In the figure, the vertical axis represents the result (voltage (V)) detected by the CMOS sensor as the reaction of the odor sensor when measuring each sample. Figure 8 The bars in the bar chart, from left to right, represent samples of water ( Figure 8 water), ammonia Figure 8 "ammo" in Chinese, acetic acid ( Figure 8 "AA" in Chinese, ethanol ( Figure 8 "etha" in Chinese), acetone ( Figure 8 ("ace"), hexane ( Figure 8 The results of the odor sensor when "hex" is used are shown. The adsorption membranes for each sample are shown as membranes coated only with silica-coated nickel particles (without surface modifiers). Figure 8 In the middle, a hollow bar chart), a film coated with a substance made of a mixture of silica-coated nickel particles and octanoic acid. Figure 8 The results of the odor sensor (in the shaded bar chart).

[0120] exist Figure 8 In the graph, the shaded bars represent the results from odor sensor B. According to... Figure 8As is apparent, the odor sensor B having the substance adsorption film 13 of the nickel particles with the silica film in which the surface is modified with the silane agent showed a significant difference from the odor sensor in which the surface is not modified (hollow column) only for specific samples such as ethanol "etha", and the odor sensor B was given the recognition of the kind of odor.

[0121] The above describes the preferred embodiments of the present application, but the present application is not limited to this, and various modifications and changes can be made within the scope of the gist. For example, the present application includes the following gist.

[0122] (Gist 1) The gist of the odor sensor is to include a plurality of sensor elements having:

[0123] a substance adsorption film that adsorbs an odor substance; and

[0124] a detection section that detects adsorption of the odor substance to the substance adsorption film,

[0125] the substance adsorption film is a porous particulate film including particulates and a surface modifier, the particulates are formed of a compound having silicon and oxygen as a skeleton, and the surface modifier modifies the surface of the particulates,

[0126] the composition of the particulates and / or the surface modifier of at least a part of the plurality of sensor elements is different respectively.

[0127] Thus, it is possible to provide an odor sensor that can use an additive that cannot be used in an odor sensor having a high molecular film.

[0128] (Gist 2) In the odor sensor, the particulates can have a fine pore structure and / or a hollow structure.

[0129] (Gist 3) In the odor sensor, the particulates can contain conductive particulates, or in the case where the particulates have a hollow structure, the conductive particulates are contained in the hollows.

[0130] (Gist 4) In the odor sensor, the surface modifier can contain at least one selected from inorganic acid, organic acid, inorganic salt, organic salt, and ionic liquid.

[0131] (Gist 5) In the odor sensor, the detection section can be a detector that detects a phenomenon accompanying a change in the weight of the substance adsorption film caused by the adsorption of the odor substance.

[0132] (Gist 6) In the odor sensor, the plurality of sensor elements can be arranged on a substrate at a prescribed interval.

[0133] (Aspect 7) In the odor sensor, the detector can be a quartz crystal microbalance (QCM) sensor, and the weight of the substance adsorption film can be 2% or less of the weight of a quartz crystal resonator of the quartz crystal microbalance (QCM) sensor.

[0134] (Aspect 8) In the odor sensor, the detection unit can be a detector that detects a change in the electrical conductivity of the substance adsorption film caused by adsorption of the odor substance.

[0135] (Aspect 9) In the odor sensor, the surface modifier can be a compound that reacts with the electrically conductive polymer to reduce the electrical conductivity of the electrically conductive polymer.

[0136] (Aspect 10) In the odor sensor, the respective detection units of a plurality of sensor elements can be arranged adjacent to each other, and each substance adsorption film can be shared between adjacent detection units of adjacent sensor elements, covering the adjacent detection units.

[0137] (Aspect 11) The odor measurement system is characterized by comprising: the odor sensor according to any one of Aspects 1 to 10, which detects an odor of an odor sample; and a data processing unit that generates odor data obtained by associating each electrical signal acquired from a plurality of sensor elements included in the odor sensor with information of the odor sample.

[0138] (Aspect 12) The method of manufacturing an odor sensor includes:

[0139] a substance adsorption film that adsorbs an odor substance; and

[0140] a detection unit that detects adsorption of the odor substance to the substance adsorption film, the method of manufacturing an odor sensor including:

[0141] a film arrangement step of arranging a particulate film on detection surfaces of a plurality of the detection units arranged adjacent to each other, the particulate film being a porous particulate film including particulates formed of a compound having silicon and oxygen as a skeleton, the particulate film covering the adjacent plurality of the detection units; and

[0142] a surface modification step of applying a surface modifier that modifies a surface of the particulates to a surface of the particulate film, and applying different surface modifiers to each of predetermined regions of the surface of the particulate film.

[0143] Explanation of Reference Signs

[0144] 1: Odor measurement system

[0145] 10, 100, 200: Odor sensor

[0146] 11, 201: sensor element

[0147] 13, 113, 203: substance adsorbing film

[0148] 15, 115: detector

[0149] 17: sensor substrate

[0150] 21: fine particle

[0151] 23: fine hole

[0152] 25: fine hole

[0153] 27: electrically conductive fine particle

[0154] 51: central processing device

[0155] 53: storage device

[0156] 55: communication device

[0157] 60: odor data server

[0158] 70: sensor arrangement information server

[0159] 119a, 119b: prescribed area

[0160] 121: inkjet head

[0161] 123: inkjet nozzle

[0162] 205: odor sensor arrangement

[0163] 207: subarea

[0164] 208: subarea section

Claims

1. An odor sensor comprising a plurality of sensor elements, the sensor elements having: a substance adsorption film that adsorbs an odor substance; and a detection section that detects adsorption of the odor substance to the substance adsorption film based on a change in electrical conductivity of the substance adsorption film, the substance adsorption film being a porous particulate film comprising particulates and a surface modifier, the particulates comprising a compound having silicon and oxygen as a skeleton, the particulates having a hollow structure and containing electrically conductive particulates in the hollow portions, the surface modifier modifying a surface of the particulates, the composition of the particulates and / or the surface modifier of at least a portion of the plurality of sensor elements being different for each of the sensor elements. The particulates also have a fine pore structure. The surface modifier contains at least one selected from the group consisting of inorganic acids, organic acids, inorganic salts, organic salts, and ionic liquids. The plurality of sensor elements are arranged at a prescribed interval on a substrate.

2. The odor sensor of claim 1, wherein, The surface modifier is a compound that reacts with an electrically conductive polymer to reduce the electrical conductivity of the electrically conductive polymer.

3. The odor sensor according to claim 1 or 2, wherein, The detection sections of the plurality of sensor elements are arranged adjacent to each other, and 4. The odor sensor of claim 1, wherein, Each of the substance adsorption films is shared between the adjacent detection sections of the adjacent plurality of sensor elements, covering the adjacent detection sections.

5. The odor sensor of claim 1, wherein, 7. An odor measurement system comprising: the odor sensor according to any one of claims 1 to 6 that detects an odor of an odor sample; and a data processing section that generates odor data obtained by associating each electric signal acquired from the plurality of sensor elements included in the odor sensor with information of the odor sample.

6. The odor sensor according to claim 1 or 2, wherein, The odor sensor comprising a plurality of sensor elements, the sensor elements having: a substance adsorption film that adsorbs an odor substance; and a detection section that detects adsorption of the odor substance to the substance adsorption film based on a change in electrical conductivity of the substance adsorption film, the substance adsorption film being a porous particulate film comprising particulates and a surface modifier, the particulates comprising a compound having silicon and oxygen as a skeleton, the particulates having a hollow structure and containing electrically conductive particulates in the hollow portions, the surface modifier modifying a surface of the particulates, the composition of the particulates and / or the surface modifier of at least a portion of the plurality of sensor elements being different for each of the sensor elements. The particulates also have a fine pore structure. The surface modifier contains at least one selected from the group consisting of inorganic acids, organic acids, inorganic salts, organic salts, and ionic liquids. The plurality of sensor elements are arranged at a prescribed interval on a substrate. The surface modifier is a compound that reacts with an electrically conductive polymer to reduce the electrical conductivity of the electrically conductive polymer.

8. A method of manufacturing an odor sensor, wherein, The detection sections of the plurality of sensor elements are arranged adjacent to each other, and Each of the substance adsorption films is shared between the adjacent detection sections of the adjacent plurality of sensor elements, covering the adjacent detection sections.

7. An odor measurement system comprising: the odor sensor according to any one of claims 1 to 6 that detects an odor of an odor sample; and a data processing section that generates odor data obtained by associating each electric signal acquired from the plurality of sensor elements included in the odor sensor with information of the odor sample. The odor sensor comprising a plurality of sensor elements, the sensor elements having: a substance adsorption film that adsorbs an odor substance; and a detection section that detects adsorption of the odor substance to the substance adsorption film based on a change in electrical conductivity of the substance adsorption film, the substance adsorption film being a porous particulate film comprising particulates and a surface modifier, the particulates comprising a compound having silicon and oxygen as a skeleton, the particulates having a hollow structure and containing electrically conductive particulates in the hollow portions, the surface modifier modifying a surface of the particulates, the composition of the particulates and / or the surface modifier of at least a portion of the plurality of sensor elements being different for each of the sensor elements. The particulates also have a fine pore structure. The surface modifier contains at least one selected from the group consisting of inorganic acids, organic acids, inorganic salts, organic salts, and ionic liquids. The plurality of sensor elements are arranged at a prescribed interval on a substrate. The surface modifier is a compound that reacts with an electrically conductive polymer to reduce the electrical conductivity of the electrically conductive polymer. The detection sections of the plurality of sensor elements are arranged adjacent to each other, and Each of the substance adsorption films is shared between the adjacent detection sections of the adjacent plurality of sensor elements, covering the adjacent detection sections.

7. An odor measurement system comprising: the odor sensor according to any one of claims 1 to 6 that detects an odor of an odor sample; and a data processing section that generates odor data obtained by associating each electric signal acquired from the plurality of sensor elements included in the odor sensor with information of the odor sample.

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