Micro-channel heat exchanger and manufacturing method thereof

Abstract

This invention provides a microchannel heat exchanger and its fabrication method, relating to the field of semiconductor structure manufacturing. The microchannel heat exchanger and its fabrication method include a flat tube, with a set of guide tubes fixedly connected to both the left and right sides of the flat tube. A heat exchange cavity is provided inside the flat tube, and multiple sets of uniformly arranged transversely spaced fins are fixedly connected within the heat exchange cavity. By inserting W-shaped insert fins between the spaced fins, a stable fin fixing structure is generated using the shape characteristics of the W-shaped insert fins, increasing the transport channel, increasing the heat exchange distance, and improving the heat exchange quality. After grinding and polishing, a blank B is obtained. The blank B is immersed in an aluminum solution A until the aluminum solution A completely covers the blank B. The blank B is then removed and cooled to 80 degrees Celsius, adding an aluminum coating to the heat-conducting and heat-exchanging fins, improving fin strength while preventing fin oxidation.

Description

Technical Field

[0001] This invention relates to the field of semiconductor structure manufacturing technology, specifically to a microchannel heat exchanger and its manufacturing method. Background Technology

[0002] Microchannels, also known as microchannel heat exchangers, are heat exchangers with channel equivalent diameters of 10-1000 μm. These heat exchangers have dozens of tiny flow channels inside a flat tube. At both ends of the flat tube, a circular manifold is connected. The manifold contains baffles that divide the flow channels of the heat exchanger into several flow paths. The engineering background of microchannel heat exchangers originated from the cooling of high-density electronic devices in the 1980s and the heat transfer problems of microelectromechanical systems that emerged in the 1990s. As semiconductor technology continues to develop towards multifunctionality, high performance, and miniaturization, the heat density of high-speed electronic devices has reached 5-10 MW / m2. Heat dissipation has become a major bottleneck in their development and a key research and focus of academic and industrial research.

[0003] The need to integrate microchannel heat exchangers presents significant challenges to the high-density, miniaturized integration of the system. Furthermore, to achieve optimal heat dissipation performance, the microchannel heat exchanger needs to be integrated into the area where heat dissipation is most significant, which adds another layer of complexity to the system design. Additionally, the copper heat exchange components inside the heat exchanger are prone to oxidation, which reduces heat exchange efficiency and increases the frequency of component replacements. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention provides a microchannel heat exchanger and its manufacturing method, which solves the problems of limited heat dissipation performance and easy oxidation of components caused by the small size and miniaturization of existing microchannel heat exchangers.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a microchannel heat exchanger, comprising a flat tube, wherein a set of guide tubes are fixedly connected to both the left and right sides inside the flat tube, and a heat exchange cavity is provided inside the flat tube, wherein multiple sets of uniformly horizontally arranged partition fins are fixedly connected inside the heat exchange cavity, and multiple sets of uniformly horizontally arranged partition fins are provided inside the heat exchange cavity.

[0006] Preferably, the two sets of guide tubes pass through the front and rear sidewalls of the flat tube respectively, and a set of W-shaped insert fins is provided between the two sets of separator fins.

[0007] A method for manufacturing a microchannel heat exchanger, wherein the flat tube, the flow guide tube, the heat exchange cavity and the partition fins are integrally cast.

[0008] Preferably, the flat tube, the guide tube, the heat exchange chamber, and the partition fins comprise the following percentages by mass of raw materials: 80%–85% aluminum, 10%–12% silver nitrate, and 1%–3% hydrofluoric acid.

[0009] Preferably, the W-shaped insert fin comprises the following percentages by weight of raw materials: 60%–70% copper, 20%–25% aluminum, 2%–3% zinc chloride, and 1%–2% hexachloroethane.

[0010] Preferably, the method for preparing the flat tube, the guide tube, the heat exchange cavity, and the partition fins includes the following steps:

[0011] a. First, place 80%–85% by mass of aluminum and 10%–12% by mass of silver nitrate in a high-temperature melting furnace. Heat the furnace at 600–700 degrees Celsius for 2–3 hours. After heating for 1–1.5 hours, add 1%–3% by mass of hydrofluoric acid solution to the furnace and continue mixing and heating at 600–700 degrees Celsius until the aluminum is completely melted and fused with silver nitrate. After the aluminum is completely melted, the hydrofluoric acid modifies the aluminum to obtain molten metal A, which is then allowed to stand at 600–650 degrees Celsius.

[0012] b. Pour molten metal A into mold A, which is composed of a flat tube, a guide tube, a heat exchange chamber, and partition fins. Decrease the temperature of mold A by 100 degrees Celsius every 20-30 minutes until the temperature of mold A reaches 80-100 degrees Celsius, so that molten metal A cools and solidifies into a blank A composed of a flat tube, a guide tube, a heat exchange chamber, and partition fins. After grinding and polishing, an integrated finished part A of flat tube, guide tube, heat exchange chamber, and partition fins is obtained and left to stand at 80-100 degrees Celsius.

[0013] Preferably, the method for preparing the W-shaped insert fin includes the following steps:

[0014] I. First, take 60% to 70% of the mass of copper and place it in a melting furnace. Heat the copper in the melting furnace at a temperature of 1090 to 1100 degrees Celsius until it is completely melted to obtain copper molten liquid B. Pour the copper molten liquid B into a mold B with W-shaped insert fins at a temperature of 1090 to 1100 degrees Celsius. Decrease the temperature of mold B by 500 degrees Celsius every 1 to 1.5 hours until the temperature of mold B reaches 80 to 100 degrees Celsius. The copper molten liquid B in mold B cools and solidifies into a blank with W-shaped insert fins. After grinding and polishing, the blank B is obtained.

[0015] II. Next, place 20%–25% by mass of aluminum, 2%–3% by mass of zinc chloride, and 1%–2% by mass of hexachloroethane into the melting furnace. The melting furnace is pre-filled with nitrogen. Heat the furnace at 700–720 degrees Celsius until the aluminum is completely melted to obtain molten aluminum A. Immerse the billet B in the molten aluminum A until the molten aluminum A completely covers the billet B. Remove the billet B and cool it to 80–100 degrees Celsius. After grinding and polishing, the finished product B with W-shaped insert fins is obtained.

[0016] Preferably, the finished part B with W-shaped insert fins is inserted into the finished part A in sequence, and the finished part A is spot-welded and sealed to finally obtain the finished microchannel heat exchanger.

[0017] This invention provides a microchannel heat exchanger and its manufacturing method. It has the following beneficial effects:

[0018] 1. This invention adds multiple sets of partition fins inside a flat tube and manufactures them as an integral part of the flat tube. By inserting W-shaped insert fins between the partition fins, a stable fin fixing structure is generated by utilizing the shape characteristics of the W-shaped insert fins. This also increases the conveying channel, increases the heat exchange distance, and improves the heat exchange quality.

[0019] 2. In this invention, molten copper B is poured into a mold B, which is formed by W-shaped insert fins 5, at a temperature of 1100 degrees Celsius. The molten copper B in the mold B cools and solidifies into a blank in the shape of W-shaped insert fins 5. After grinding and polishing, blank B is obtained. Blank B is then immersed in aluminum solution A until aluminum solution A completely covers blank B. Blank B is then removed and cooled to 80 degrees Celsius. This adds an aluminum coating to the heat-conducting and heat-exchanging fins, improving the strength of the fins while preventing fin oxidation. Attached Figure Description

[0020] Figure 1 This is an isometric schematic diagram of the device of the present invention;

[0021] Figure 2 This is a schematic diagram of the internal structure of the device of the present invention;

[0022] Figure 3 This is a front view schematic diagram of the internal structure of the device of the present invention.

[0023] Among them, 1. flat tube; 2. flow guide tube; 3. heat exchange cavity; 4. partition fins; 5. W-shaped insert fins. Detailed Implementation

[0024] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0025] Example:

[0026] like Figure 1-3As shown, this embodiment of the invention provides a microchannel heat exchanger, including a flat tube 1. A set of guide tubes 2 are fixedly connected to both the left and right sides inside the flat tube 1. A heat exchange cavity 3 is provided inside the flat tube 1. Multiple sets of uniformly horizontally arranged partition fins 4 are fixedly connected inside the heat exchange cavity 3. Multiple sets of uniformly horizontally arranged partition fins 4 are provided inside the heat exchange cavity 3.

[0027] Two sets of guide pipes 2 pass through the front and rear side walls of the flat pipe 1 respectively. A set of W-shaped insert fins 5 is provided between the two sets of partition fins 4. By utilizing the shape characteristics of the W-shaped insert fins, a stable fin fixing structure is generated, and the conveying channel is increased, the heat exchange distance is increased, and the heat exchange quality is improved.

[0028] This invention provides a method for manufacturing a microchannel heat exchanger, wherein the flat tube 1, the guide tube 2, the heat exchange cavity 3, and the partition fins 4 are integrally cast.

[0029] The flat tube 1, the guide tube 2, the heat exchange chamber 3 and the partition fins 4 contain the following percentages of raw materials by mass: 85% aluminum, 12% silver nitrate, and 3% hydrofluoric acid.

[0030] W-shaped insert fin 5 comprises the following percentages of raw materials by weight: 70% copper, 25% aluminum, 3% zinc chloride, and 2% hexachloroethane.

[0031] The preparation method of the flat tube 1, the guide tube 2, the heat exchange cavity 3 and the partition fins 4 includes the following steps:

[0032] a. First, place 85% by mass of aluminum and 12% by mass of silver nitrate in a high-temperature melting furnace and heat at 600 degrees Celsius for 2 hours. After heating for 1 hour, add 3% by mass of hydrofluoric acid solution to the high-temperature melting furnace and continue mixing and heating at 600 degrees Celsius until the aluminum is completely melted and fused with silver nitrate. After the aluminum is completely melted, the hydrofluoric acid modifies the aluminum to obtain molten metal A, which is then allowed to stand at 600 degrees Celsius.

[0033] b. Pour molten metal A into mold A, which is composed of flat tube 1, guide tube 2, heat exchange cavity 3 and partition fins 4. Decrease the temperature of mold A by 100 degrees Celsius every 0 minutes until the temperature of mold A reaches 80 degrees Celsius, so that molten metal A cools and solidifies into a blank A composed of flat tube 1, guide tube 2, heat exchange cavity 3 and partition fins 4. After grinding and polishing, an integrated finished part A of flat tube 1, guide tube 2, heat exchange cavity 3 and partition fins 4 is obtained and left to stand at 100 degrees Celsius.

[0034] The preparation method of W-shaped insert fin 5 includes the following steps:

[0035] I. First, take 70% of the mass of copper and place it in a melting furnace. Heat it in the melting furnace at 1100 degrees Celsius until the copper is completely melted to obtain copper molten liquid B. Pour it into mold B, which is formed by W-shaped insert fins 5, at 1100 degrees Celsius. Decrease the temperature of mold B by 500 degrees Celsius every 1.5 hours until the temperature of mold B reaches 100 degrees Celsius. The copper molten liquid B in mold B cools and solidifies into a blank in the shape of W-shaped insert fins 5. After grinding and polishing, the blank B is obtained.

[0036] II. Next, place 25% by mass of aluminum, 3% by mass of zinc chloride, and 2% by mass of hexachloroethane into a melting furnace. The melting furnace is pre-filled with nitrogen. Heat the mixture in the melting furnace at 720 degrees Celsius until the aluminum is completely melted to obtain aluminum molten liquid A. Immerse the blank B in the aluminum molten liquid A until the aluminum molten liquid A completely covers the blank B. This adds an aluminum coating to the heat-conducting and heat-exchanging fins, improving the strength of the fins while preventing oxidation. Remove the blank B and cool it to 80 degrees Celsius. After grinding and polishing, the finished part B with W-shaped inserted fin 5 is obtained.

[0037] The finished part B with W-shaped insert fin 5 is inserted into the finished part A in sequence, and the finished part A is spot welded and sealed to finally obtain the finished microchannel heat exchanger.

[0038] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A method for manufacturing a microchannel heat exchanger, characterized in that: The microchannel heat exchanger includes a flat tube (1), with a set of guide tubes (2) fixedly connected to the left and right sides of the flat tube (1). A heat exchange chamber (3) is provided inside the flat tube (1), and multiple sets of uniformly horizontally arranged partition fins (4) are fixedly connected inside the heat exchange chamber (3). The two sets of guide tubes (2) pass through the front and rear side walls of the flat tube (1) respectively, and a set of W-shaped insert fins (5) is provided between the two sets of partition fins (4). The flat tube (1), the guide tube (2), the heat exchange chamber (3) and the partition fins (4) contain the following percentages of raw materials: 80% to 85% aluminum, 10% to 12% silver nitrate, and 1% to 3% hydrofluoric acid; The preparation method of the flat tube (1), the guide tube (2), the heat exchange cavity (3) and the partition fins (4) includes the following steps: a. First, place 80%–85% by mass of aluminum and 10%–12% by mass of silver nitrate in a high-temperature melting furnace. Heat the furnace at 600–700 degrees Celsius for 2–3 hours. After heating for 1–1.5 hours, add 1%–3% by mass of hydrofluoric acid solution to the furnace and continue mixing and heating at 600–700 degrees Celsius until the aluminum is completely melted and fused with silver nitrate. After the aluminum is completely melted, the hydrofluoric acid modifies the aluminum to obtain molten metal A, which is then allowed to stand at 600–650 degrees Celsius. b. Pour the molten metal A into a mold A which is composed of a flat tube (1), a guide tube (2), a heat exchange chamber (3) and a partition fin (4). Decrease the temperature of the mold A by 100 degrees Celsius every 20 to 30 minutes until the temperature of the mold A reaches 80 to 100 degrees Celsius, so that the molten metal A cools and solidifies into a blank A composed of a flat tube (1), a guide tube (2), a heat exchange chamber (3) and a partition fin (4). After grinding and polishing, an integrated finished part A of the flat tube (1), the guide tube (2), the heat exchange chamber (3) and the partition fin (4) is obtained and left to stand at 80 to 100 degrees Celsius. The preparation method of the W-shaped insert fin (5) includes the following steps: I. First, take 60% to 70% of the mass of copper and place it in a melting furnace. Heat and melt it in the melting furnace at a temperature of 1090 to 1100 degrees Celsius until the copper is completely melted to obtain copper molten liquid B. Pour it into a mold B made of W-shaped insert fins (5) at a temperature of 1090 to 1100 degrees Celsius. Decrease the temperature of mold B by 500 degrees Celsius every 1 to 1.5 hours until the temperature of mold B reaches 80 to 100 degrees Celsius. The copper molten liquid B in mold B cools and solidifies into a blank in the shape of W-shaped insert fins (5). After grinding and polishing, the blank B is obtained. II. Then, place 20% to 25% by mass of aluminum, 2% to 3% by mass of zinc chloride and 1% to 2% by mass of hexachloroethane into the melting furnace. The melting furnace is pre-filled with nitrogen. Heat and melt the aluminum in the melting furnace at a temperature of 700 to 720 degrees Celsius until the aluminum is completely melted to obtain aluminum melt A. Immerse the billet B in the aluminum melt A until the aluminum melt A completely covers the billet B. Take out the billet B and cool it to 80 to 100 degrees Celsius. After grinding and polishing, the finished product B with W-shaped insert fins (5) is obtained.

2. The method for manufacturing a microchannel heat exchanger according to claim 1, characterized in that: The flat tube (1), the guide tube (2), the heat exchange chamber (3) and the partition fins (4) are integrally cast.

3. The method for manufacturing a microchannel heat exchanger according to claim 1, characterized in that: The W-shaped insert fin (5) comprises the following percentages of raw materials: 60%–70% copper, 20%–25% aluminum, 2%–3% zinc chloride, and 1%–2% hexachloroethane.

4. The method for manufacturing a microchannel heat exchanger according to claim 1, characterized in that: The manufacturing method includes the following steps: insert the finished part B with W-shaped insert fins (5) into the finished part A in sequence, and spot weld the finished part A to seal it, and finally obtain the finished product of the microchannel heat exchanger.

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