Gas leakage prevention cooling box and gas leakage sensing system

Abstract

The present invention relates to a gas leakage prevention cooling box and a gas leakage sensing system, which can safely protect against leakage of gases with various chemical properties from the connection of pipes. The present invention is characterized by comprising: a main body shell comprising a first half and a second half, an internal chamber disposed in the center, a flange connecting the first and second pipes located in the internal chamber, pipe mounting holes disposed at the front and rear sides of the internal chamber, pipes connected around the flanges located in the pipe mounting holes, the first and second halves being face-to-face joined with the flanges disposed therebetween, thereby supporting the connection between the first and second pipes; and a cooling fan disposed in the first half of the main body shell for supplying external air to the internal chamber.

Description

Technical Field

[0001] The present invention relates to a manufacturing equipment for semiconductors or similar products, and in particular to a gas leakage prevention cooling box and a gas leakage sensing system, which can safely protect and prevent gases with various chemical properties from leaking from the connection parts of pipelines. Background Art

[0002] Generally, the semiconductor manufacturing process roughly includes the front process (manufacturing process) and the back process (assembly process). The so-called front process refers to the process of evaporating a thin film on a wafer in various processing chambers (Chamber), and repeatedly etching the evaporated film selectively to process a specific pattern, that is, the process of manufacturing a semiconductor chip (Chip). The so-called back process refers to the process of separating the chips manufactured in the above-mentioned front process one by one, combining them with the lead frame and assembling them into a finished product.

[0003] In semiconductor manufacturing processes, high-temperature, high-pressure gases are transported through pipelines, along with powders of various chemical properties. Therefore, it is crucial to control the gas flow to prevent leaks at the connections between pipelines.

[0004] Therefore, O-rings are installed between the flanges of the two pipes to prevent leakage while squeezing them. However, existing pipe connection components create a small gap between the two sides of the center ring and the pipe flanges, which in turn creates vortexes. This creates a pressure difference across the gap, allowing gas to reach and contact the O-rings. Consequently, the O-rings are damaged by chemical corrosion, oxidation, and carbonization from the high-temperature gas, ultimately leading to a fatal leak.

[0005] Prior art literature

[0006] Patent documents

[0007] (Patent Document 1) Korean Patent Publication No. 2019-0058968 (May 30, 2019) Summary of the Invention

[0008] The present invention is proposed to solve all the existing problems mentioned above. The purpose of the present invention is to provide a gas leakage prevention cooling box and a gas leakage sensing system, which can safely protect and prevent gases with various chemical properties from leaking from the connection parts of the pipeline.

[0009] In order to achieve the above-mentioned purpose, a gas leakage prevention cooling box according to the technical idea of ​​the present invention is arranged at the connection part of the first pipe and the second pipe, which can prevent gas leakage. The first pipe and the second pipe are used in the manufacture of any product in the product group including semiconductor products or are connected to each other for transferring gas used in the manufacture of any product in the product group including semiconductor products. The technical structure of the gas leakage prevention cooling box is characterized in that it includes: a main body shell, which includes a first half body and a second half body, an internal chamber is provided in the central part, the connection part flange of the first pipe and the second pipe is located in the internal chamber, pipe mounting holes are provided on the front and rear sides of the internal chamber, and the pipes connected with the flange as the center are located in the pipe mounting holes, the first half body and the second half body are face to face with each other in the form of a connection part flange of the first pipe and the second pipe provided in the middle, thereby supported at the connection part of the first pipe and the second pipe; and a cooling fan, which is provided in the first half body of the main body shell, for supplying external air to the internal chamber.

[0010] The feature here is that a storage box is formed in the internal chamber of the main body shell, which is separated by a space narrower than the internal chamber and accommodates the connecting flange of the first pipe and the second pipe. Even if gas leaks from the connecting part of the first pipe and the second pipe, it can be blocked to prevent the gas from leaking into the internal chamber. The storage box is divided into two half bodies along the first half body and the second half body, so that when the first half body and the second half body are combined face to face, the half bodies of the storage box are also combined face to face with the connecting flange of the first pipe and the second pipe as the center. Air circulation holes connected to the internal chamber are respectively formed in the first half body and the second half body of the main body shell, so that external air is supplied to the internal chamber through the cooling fan and discharged after heat exchange with the storage box.

[0011] Another feature is that one end of the first half body and the second half body of the main body shell are hinged to each other, so that the first half body and the second half body rotate and open and close around the hinge axis, and the connecting parts of the first pipe and the second pipe can be engaged.

[0012] Another feature is that the gas leakage prevention cooling box also includes: a center ring module, which includes a center ring and an O-ring, the center ring is located in a groove formed on the inner side of the flange periphery of the first pipe and the second pipe, and the O-ring is installed along the outer peripheral surface of the center ring and is squeezed between the flange periphery to prevent gas leakage; and a clamp, which clamps the connecting flange of the first pipe and the second pipe from the outside, and an O-ring is provided in the middle of the connecting flange of the first pipe and the second pipe and squeezes the O-ring.

[0013] Another feature is that the center ring module further includes: a pair of sealing rings, which are arranged in a protruding form along the corners of both sides of the outer peripheral surface of the center ring and are squeezed into the groove of the flange.

[0014] Another feature is that a gas sensing sensor is further provided on the main body shell, and the gas sensing sensor senses gas leaked from the connection portion between the first pipe and the second pipe.

[0015] Another feature is that a port is provided on the outside of the main body shell, the port is arranged in a protruding shape, connected to the storage box, and guides the gas leaked from the connection part of the first pipe and the second pipe, and is combined with a transparent cover, which cuts off the external leakage of the gas guided through the port, and a gas sensing tape that changes color when it comes into contact with the gas is provided on the inner side of the transparent cover as a gas sensing sensor.

[0016] Another feature is that the ports are respectively provided on a plurality of outer walls on opposite sides of the main body shell in a protruding form, and a transparent cover and a gas sensing tape are provided on each port.

[0017] In addition, the technical structure of the gas leakage detection system according to the present invention is characterized in that it includes: the aforementioned gas leakage prevention cooling box; a controller, if the gas sensing sensor senses a gas leakage, the controller identifies the gas leakage and notifies it; and an alarm, which receives a control signal transmitted from the controller and issues a gas leakage alarm.

[0018] According to the gas leakage prevention cooling box and gas leakage sensing system of the present invention, external air is used to cool the connection part of the pipeline, thereby minimizing the problem that the O-ring is easily hardened and damaged at high temperature, and can safely protect and prevent gases with various chemical properties from leaking from the connection part of the pipeline.

[0019] In addition, the present invention opens the internal cavity of the main body shell to supply abundant external air for cooling, and at the same time isolates and accommodates the connection part of the pipe by a storage box having a size smaller than the internal cavity. Therefore, even if gas leaks from the connection part of the pipe, it can be cut off so that the gas does not leak to the outside, and the gas leaking from the connection part of the pipe can be sensed more quickly.

[0020] In addition, the present invention can double-safely cut off gas leakage from the connection part of the pipeline by arranging an O-ring and a center ring in the center ring module. In addition, the storage box arranged inside the main body shell can triple-cut off gas leakage. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 and Figure 2 is a perspective view of a cooling box for preventing gas leakage according to an embodiment of the present invention.

[0022] Figure 3 2 is a side view of a cooling box for preventing gas leakage according to an embodiment of the present invention.

[0023] Figure 4 is based on Figure 3 AA cross-sectional view.

[0024] Figure 5 FIG. 1 is a perspective view of an open state of a gas leakage prevention cooling box according to an embodiment of the present invention.

[0025] Figure 6 It is a perspective view of a state in which a first pipe and a second pipe connected are installed in an open state of a gas leakage prevention cooling box according to an embodiment of the present invention.

[0026] Figure 7 It is an assembly diagram for illustrating a center ring module and a clamp in a cooling box for preventing gas leakage according to an embodiment of the present invention.

[0027] Figure 8 It is a longitudinal sectional view for explaining the structure of a center ring module in a gas leakage prevention cooling box according to an embodiment of the present invention.

[0028] Figure 9 1 is a reference diagram for explaining a gas leakage prevention cooling box according to a modified embodiment of the present invention.

[0029] Description of labels

[0030] 110: Main body shell 120: Cooling fan module

[0031] 130: Gas sensor 140: Storage box

[0032] 150: Center ring module 160: Clamp DETAILED DESCRIPTION

[0033] A gas leakage prevention cooling box according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. The present invention can be modified in many ways and has various forms. Specific embodiments are illustrated in the drawings and are intended to be described in detail herein. However, this is not intended to limit the present invention to a specific disclosed form, and it should be understood that all changes, equivalents, and even substitutes within the scope of the concept and technology of the present invention are included. When describing each of the drawings, similar reference numerals are used for similar components. With respect to the drawings, the size of the structure is enlarged compared to the actual size in order to ensure the clarity of the present invention, or the size of the structure is reduced compared to the actual size in order to understand the general structure.

[0034] In addition, the terms such as first and second can be used when describing a variety of constituent elements, but the constituent elements are not limited by the terms. The terms are used only for the purpose of distinguishing one constituent element from other constituent elements. For example, without departing from the scope of the present invention, the first constituent element can be named as the second constituent element, and similarly, the second constituent element can also be named as the first constituent element. In addition, if there are no other definitions, all terms used herein, including technical terms or scientific terms, have the same meaning as those generally understood by persons with general knowledge in the technical field to which the present invention belongs. Terms with the same meaning as defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning possessed in the context of the relevant technology. If not clearly defined in this application, they should not be ideally or excessively interpreted as formal meanings.

[0035] <Example>

[0036] Figure 1 and Figure 2 is a perspective view of a gas leakage prevention cooling box according to an embodiment of the present invention, Figure 3 is a side view of a gas leakage prevention cooling box according to an embodiment of the present invention, Figure 4 is based on Figure 3 The cross-sectional view of AA, Figure 5 is a perspective view of an open state of a gas leakage prevention cooling box according to an embodiment of the present invention, Figure 6 It is a perspective view of a state in which a first pipe and a second pipe connected are installed in an open state of a gas leakage prevention cooling box according to an embodiment of the present invention.

[0037] As shown in the accompanying drawings, a gas leakage prevention cooling box according to an embodiment of the present invention is used when manufacturing any product in a product group including semiconductor products or for transferring gas used when manufacturing any product in a product group including semiconductor products. The connection part of the first pipe P1 and the second pipe P2 is provided in the form of wrapped flanges f1 and f2. The main components of the gas leakage prevention cooling box include: a main body shell 110, which is provided at the connection part of the first pipe P1 and the second pipe P2 and is supported; a cooling fan module 120, which is used to cool the connection part of the first pipe P1 and the second pipe P2; a sensor module 130, which is used to sense gas leaked from the connection part of the first pipe P1 and the second pipe P2; a center ring module 150 and a clamp 160, which are used to seal the connection part of the first pipe P1 and the second pipe P2.

[0038] The gas leakage prevention cooling box according to an embodiment of the present invention is configured to safely protect gases having various chemical properties from leaking from the connection portion between the first pipe P1 and the second pipe P2 through the above-mentioned components, and can also quickly sense gas leakage even if it occurs.

[0039] Hereinafter, the gas leakage prevention cooling box according to an embodiment of the present invention will be described in detail with the above-mentioned components as the center.

[0040] As shown, the housing 110 has a square box-like shape, with an internal chamber 111 defined in the center. Flanges f1 and f2, which connect the first and second pipes P1 and P2, are located within this internal chamber. Pipe mounting holes 112 are provided on the front and rear sides of this internal chamber 111. Pipes connected around flanges f1 and f2 are located within these holes. Preferably, as shown, the pipe mounting holes 112 are formed in a semicircular shape, separated by the first and second halves 110a and 110b. A split connector 113 is provided to form holes corresponding to the first and second pipes P1 and P2.

[0041] Here, the main housing 110 comprises a first half 110a and a second half 110b hinged at one end, facing each other. A pair of hook hinges 115 are provided at the other end, securing the first and second halves 110a, 110b when closed. This prevents the first and second halves 110a, 110b from completely separating, allowing them to be simultaneously connected and released while opening and closing around a hinge axis 114. This configuration allows the gas leakage prevention cooling box of the present invention to be simply configured such that the flanges f1 and f2 at the connection of the first and second pipes P1, P2 engage. Air flow holes 111a are formed in each of the first and second halves 110a, 110b of the main housing 110, communicating with the internal chamber 111. This allows external air to be supplied to the internal chamber 111 via a cooling fan 121, exchange heat with the storage box 140, and then be exhausted.

[0042] Furthermore, a storage box 140 is formed within the internal chamber 111 of the main body housing 110. This storage box 140, separated by a narrower space than the internal chamber 111, contains a space 140a for accommodating the flanges f1 and f2 at the connection between the first and second pipes P1 and P2. The storage box 140 prevents gas leaking from the connection between the first and second pipes P1 and P2 from escaping through the air vents 111a into the open internal chamber 111, instead directing it through the port 116 and into contact with the gas sensor. Thus, by providing the storage box 140 within the internal chamber 111 of the main body housing 110, gas leaking from the connection between the first and second pipes P1 and P2 is not dispersed within the relatively wide internal chamber 111, but rather is confined to the narrower space 140a of the storage box 140. This allows the gas sensor to detect a higher concentration of gas even if the same amount of gas leaks, allowing for more rapid detection. Here, the port 116 is a tubular member provided in a protruding manner on the outer wall of the main housing 110 and communicates with the storage space 140a of the storage box 140. The port 116 is provided with a sensor module 130 including a gas sensor.

[0043] The storage box 140 is divided into two halves 141 along the first and second halves 110a, 110b. When the first and second halves 110a, 110b are joined face-to-face, the halves 141 of the storage box 140 also join face-to-face, centered around the flanges f1 and f2 connecting the first and second pipes P1, P2. Pipe mounting portions 141a for the pipes are formed along the facing lines of the halves 141 of the storage box 140. When the halves 141 face each other, a circular hole is formed. A sealing ring 142 is provided along the facing lines to prevent gas leakage into the storage box 140.

[0044] The cooling fan module 120 is disposed on the outer side of the first half body 110a of the main body shell 110, and plays the role of supplying external air to the internal chamber 111 through the air circulation holes 111a of the main body shell 110. The cooling fan module 120 is combined with the outer side of the first half body 110a and includes a fan housing 122 and a cooling fan 121. The fan housing 122 has an opening 122a for air inlet and outlet, and the cooling fan 121 is disposed inside the fan housing 122. According to the above structure, as Figure 4 As shown, the rotation of the cooling fan 121 allows fresh external air to be supplied to the internal chamber 111 through the air circulation holes 111a, thereby effectively cooling the connection between the first pipe P1 and the second pipe P2 in the internal chamber 111. This can minimize the problem of the O-ring 152 and the sealing ring 153 of the center ring module 150, which are disposed between the flanges f1 and f2 of the connection between the first pipe P1 and the second pipe P2, being easily hardened or corroded due to high temperature.

[0045] The sensor module 130 senses the gas leaked from the connection portion of the first pipe P1 and the second pipe P2, thereby helping managers or workers to quickly identify the gas leak. Figure 3 、 Figure 5 and Figure 6 As shown, the sensor module 130 includes a transparent cover 131 and a gas-sensing tape 132. The transparent cover 131 of the sensor module 130 is coupled to a port 116 protruding from the outer wall of the main housing 110. The gas-sensing tape 132 is affixed to the inner side of the transparent cover 131 and changes color when it comes into contact with leaking gas. The gas-sensing tape 132 can be purchased and used as a commercially available product. According to the structure of the sensor module 130, if gas leaks from the connection between the first pipe P1 and the second pipe P2, the leaked gas diffuses through the storage box 140 containing the connection flanges f1 and f2, and is guided through the port 116 to the interior of the transparent cover 131, immediately coming into contact with the gas-sensing tape 132. In this way, the gas-sensing tape 132 changes color, allowing the administrator to easily identify it with the naked eye.

[0046] It is worth noting that in the structure of the above-mentioned sensor module 130, a port 116 is provided in a protruding form on the outside of the main body shell 110 to guide the gas leaked from the inside of the main body shell 110, and a transparent cover 131 with a gas sensing tape 132 attached is provided on the port 116 protruding to the outside of the main body shell 110, so that if it protrudes to the outside of the main body shell 110 but not completely to the opposite side, the gas sensing tape 132 is located at a position that can be well observed from most directions.

[0047] Regarding the structure of the sensor module 130, as a more preferred form, Figure 9 As shown, the port 116 and the sensor module 130 can be constructed in a deformed form by being respectively arranged on opposite sides of the main housing 110, so that managers or workers can easily confirm gas leakage with the naked eye regardless of their location.

[0048] In this way, if the gas leakage prevention cooling box of the present invention is provided with a gas sensing sensor, a controller and an alarm can be additionally added together with the gas leakage prevention cooling box to realize a gas leakage sensing system, wherein, if the gas sensing sensor senses a gas leakage, the controller identifies and notifies the gas leakage, and the alarm receives the control signal transmitted from the controller and issues a gas leakage alarm.

[0049] The center ring module 150 plays a role in sealing the gap to prevent gas from leaking between the flanges f1 and f2 that are connected face to face at the connection portion of the first pipe P1 and the second pipe P2. Figure 8 As shown, the center ring module 150 includes a center ring 151, an O-ring 152, and a sealing ring 153. The center ring 151 is a ring-shaped frame component located in the groove f3 formed inside the flanges f1 and f2 of the first pipe P1 and the second pipe P2. Figure 8 As shown, a mounting groove 151b is formed on the outer circumference of the center ring to stably mount the O-ring. An O-ring 152 is installed along the outer circumference of the center ring 151 and is squeezed between the peripheries of the flanges f1 and f2 to prevent gas leakage. A pair of sealing rings 153 are provided, protruding along the corners of the outer circumference of the center ring 151 and squeezed into the grooves f3 of the flanges f1 and f2. It is noteworthy that, unlike the prior art, a pair of sealing rings 153 are added to double-block gas leakage along with the O-ring 152. Furthermore, an advantage is that the O-ring 152 and the sealing ring 153 are continuously cooled by the external air supplied to the internal chamber 111 by the cooling fan 121, minimizing the problems of hardening and damage caused by high temperature, thereby more stably preventing gas leakage.

[0050] like Figure 4 、 Figure 6 and Figure 7 As shown, the clamp 160 clamps the flanges f1 and f2 of the connection portion of the first pipe P1 and the second pipe P2 from the outside. An O-ring 152 is provided between the flanges f1 and f2 of the connection portion of the first pipe P1 and the second pipe P2 and squeezes the O-ring 152 so that the O-ring 152 can be kept squeezed between the flanges f1 and f2. Figure 4 As shown in the enlarged portion of , a support member 161 for supporting from the opposite side may be additionally provided on the inner circumferential surface of the clamp 160 so that the O-ring 152 is stably located in the mounting groove 151 b of the center ring 150 .

[0051] While preferred embodiments of the present invention have been described above, the present invention is susceptible to various modifications, variations, and equivalents. It goes without saying that the present invention can be appropriately modified and applied in the same manner. Therefore, the foregoing description does not limit the scope of the present invention, which is defined by the following claims.

Claims

1. A gas leakage prevention cooling box, provided at the connection portion of a first pipe and a second pipe, to prevent gas leakage. The first pipe and the second pipe are connected to each other for use in manufacturing any product in a group of products including semiconductor products or for transferring gas used in manufacturing any product in a group of products including semiconductor products. The gas leakage prevention cooling box is characterized by comprising: a body shell comprising a first half body and a second half body, an inner chamber being provided in a central portion, a flange for connecting the first and second pipes being located in the inner chamber, pipe mounting holes being provided at the front and rear sides of the inner chamber, pipes connected around the flange being located in the pipe mounting holes, the first half body and the second half body being coupled face to face with the flange for connecting the first and second pipes being provided therebetween, thereby supporting the connection between the first and second pipes; and a cooling fan disposed on the first half of the body shell for supplying external air to the internal chamber; A receiving box is formed in the inner chamber of the main body shell, which is separated by a space narrower than the inner chamber and receives the flange of the connection portion of the first pipe and the second pipe. Even if gas leaks from the connection portion of the first pipe and the second pipe, the gas can be cut off to prevent leakage into the inner chamber. A port is also provided on the outer wall of the main body shell. The port is configured to be in a protruding shape and is connected to the storage box to guide the gas leaked from the connection portion of the first pipe and the second pipe. The port is also combined with a transparent cover to cut off external leakage of the gas guided through the port. A gas sensing tape that changes color upon contact with the gas is provided on the inner side of the transparent cover as a gas sensing sensor.

2. The gas leakage prevention cooling box according to claim 1, characterized in that: The storage box is divided into two halves along the first half body and the second half body, so that when the first half body and the second half body are combined face to face, the halves of the storage box are also combined face to face with the flange of the connection portion of the first pipe and the second pipe as the center. Air circulation holes communicating with the internal chamber are respectively formed on the first half body and the second half body of the main body shell, so that external air is supplied to the internal chamber through the cooling fan and is discharged after heat exchange with the storage box.

3. The gas leakage preventing cooling box according to claim 2, characterized in that: One end portion of the first half body and the second half body of the main body shell are hingedly connected to each other, so that the first half body and the second half body rotate around the hinge axis and open and close, and the connecting portion of the first pipe and the second pipe are engaged.

4. The gas leakage prevention cooling box according to claim 2, characterized in that: Also includes: a center ring module comprising a center ring and an O-ring, wherein the center ring is located in a groove formed inside the flange peripheries of the first and second pipes, and the O-ring is installed along the outer circumference of the center ring and is squeezed between the flange peripheries to prevent gas leakage; and The clamp clamps the connecting flanges of the first pipeline and the second pipeline from the outside, an O-ring is arranged between the connecting flanges of the first pipeline and the second pipeline, and the O-ring is squeezed.

5. The gas leakage prevention cooling box according to claim 4, characterized in that: The center ring module also includes: A pair of sealing rings are provided in a protruding form along the corner portions of both sides of the outer peripheral surface of the center ring and are pressed into the groove of the flange.

6. The gas leakage preventing cooling box according to claim 2, characterized in that: The gas sensing sensor senses gas leaking from a connection portion between the first pipe and the second pipe.

7. The gas leakage prevention cooling box according to claim 1, characterized in that: The ports are respectively arranged on a plurality of outer walls on opposite sides of the main body shell in a protruding form, and a transparent cover and a gas sensing tape are both arranged on each port.

8. A gas leakage sensing system, characterized in that: include: The gas leakage preventing cooling box according to any one of claims 6 to 7; a controller, which identifies and notifies the gas leak if the gas sensing sensor senses a gas leak; and An alarm receives a control signal transmitted from the controller and issues a gas leakage alarm.

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