Displacement amplification mechanism, actuator, polishing device, electronic parts processing device, distributor and air valve

Abstract

The present invention provides a displacement amplification mechanism, a polishing device, an actuator, an electronic component processing device, a dispenser, and an air valve that can easily control a drive system. The displacement amplification mechanism includes: a base, which is a base plate; a piezoelectric element, one end of which is connected to a mounting surface of the base and extends along a first longitudinal direction; a support member, one end of which is mounted on the mounting surface in parallel with the piezoelectric element and extends along a second longitudinal direction intersecting the first longitudinal direction; an action member, which is connected to the other end of each of the piezoelectric element and the support member and displaces in a displacement direction different from both the first and second longitudinal directions as the piezoelectric element expands and contracts; and a compression member, which is connected to each of the base and the action member and compresses the piezoelectric element along the first longitudinal direction.

Description

Technical Field

[0001] [Related Applications]

[0002] This application claims priority to PCT International Application No. PCT / JP2020 / 000358, filed on January 8, 2020, entitled “Displacement amplification mechanism, actuator, polishing device, electronic parts processing device, dispenser and air valve,” with the Japan Patent Office as the receiving office, the disclosure of which is incorporated herein by reference in its entirety.

[0003] The invention relates to a displacement amplifying mechanism, an actuator, a polishing device, an electronic parts processing device distributor and an air valve. Background Art

[0004] Piezoelectric elements (pressure-sensitive elements) have traditionally been used to generate desired displacement using relatively low voltages. These elements consist of alternating layers of thin electrodes and materials exhibiting a piezoelectric effect, converting force into voltage or vice versa.

[0005] Since piezoelectric elements can expand and contract slightly by controlling voltage, they are used in various fields, including inkjet printer inkjet mechanisms and control mechanisms for actuators.

[0006] A piezoelectric element expands and contracts when voltage is applied, but since the resulting displacement is small, a displacement amplification mechanism is used to amplify the displacement of the expanded and contracted piezoelectric element and apply it to an object.

[0007] Patent Document 1 discloses a displacement amplification mechanism that can efficiently amplify and output the amount of displacement by displacing two piezoelectric elements.

[0008] Prior art literature

[0009] Patent Literature

[0010] Patent Document 1: International Publication No. 2019 / 009035 Summary of the Invention

[0011] Problems to be solved by the invention

[0012] However, in conventional displacement amplification mechanisms, since two piezoelectric elements are used, it is necessary to control the driving of each piezoelectric element, which has caused a problem in that it is difficult to control the driving system for obtaining a desired displacement.

[0013] Therefore, an object of the present invention is to provide a displacement amplification mechanism, a polishing device, an actuator, an electronic component processing device, a dispenser, and an air valve that can easily control a drive system.

[0014] Solutions for solving problems

[0015] The present invention provides a displacement amplification mechanism, characterized in that it comprises: a base, which is a base plate; a piezoelectric element, one end of which is connected to the mounting surface of the base and extends along a first long side direction; a supporting component, one end of which is mounted on the mounting surface in parallel with the piezoelectric element and extends along a second long side direction intersecting the first long side direction; an action portion, which is connected to the other end of the piezoelectric element and the supporting component, and displaces in a displacement direction as the piezoelectric element expands and contracts, and the displacement direction is a direction different from both the first long side direction and the second long side direction; and a compression component, which is connected to the base and the action portion, and compresses the piezoelectric element along the first long side direction.

[0016] Furthermore, the rigidity of the piezoelectric element in the first longitudinal direction may be equal to or less than the rigidity of the supporting member in the second longitudinal direction.

[0017] Furthermore, a connecting member for connecting one end portion and the base portion of the piezoelectric element may be provided, and the connecting member may be formed of a material having a higher thermal expansion coefficient than that of the supporting member.

[0018] Alternatively, the connecting member may be formed integrally with the base.

[0019] Furthermore, a connecting member for connecting the other end portion of the piezoelectric element and the action portion may be provided, and the connecting member may be formed of a material having a higher thermal expansion coefficient than that of the supporting member.

[0020] Alternatively, the connecting member may be formed integrally with the acting portion.

[0021] The rigidity of the support member in the displacement direction may be less than or equal to the rigidity of the piezoelectric element in the displacement direction.

[0022] Furthermore, in a cross section of the support member viewed in the second longitudinal direction, a section moment of inertia about a central axis perpendicular to the displacement direction and passing through the center of the support member in the displacement direction may differ depending on the position in the second longitudinal direction.

[0023] Furthermore, a hinge member may be provided at at least one of one end portion of the piezoelectric element in the first longitudinal direction and one end portion of the support member in the second longitudinal direction, and the hinge member may promote deformation of the piezoelectric element and the support member in the displacement direction.

[0024] Furthermore, a hinge member may be provided at at least one of the other end portion of the piezoelectric element in the first longitudinal direction and the other end portion of the support member in the second longitudinal direction, and the hinge member may promote deformation of the piezoelectric element and the support member in the displacement direction.

[0025] Alternatively, two compression members may be provided, each of which may be disposed at a position sandwiching the piezoelectric element and the support member.

[0026] In addition, it is also possible that, in a plan view including the first long side direction and the second long side direction, the compression component extends along a third long side direction that intersects the first long side direction and the second long side direction, and a telescopic portion that can be telescoped in the third long side direction is formed on the compression component.

[0027] Furthermore, at least one of the compression members may extend in the first longitudinal direction, and a telescopic portion that is telescopic in the first longitudinal direction may be formed in the compression member extending in the first longitudinal direction.

[0028] In addition, the polishing device of the present invention comprises: a base, which is a base plate; a piezoelectric element, one end of which is connected to the mounting surface of the base and extends along the first long side direction; a supporting member, one end of which is mounted on the mounting surface in parallel with the piezoelectric element and extends along the second long side direction intersecting the first long side direction; an action portion, which is connected to the other end of each of the piezoelectric element and the supporting member, and displaces in a direction different from both the first long side direction and the second long side direction, i.e., a displacement direction, as the piezoelectric element expands and contracts, the action portion displaces in a direction different from both the first long side direction and the second long side direction, i.e., a displacement direction; a compression member, which is connected to each of the base and the action portion, and compresses the piezoelectric element along the first long side direction; and a polishing portion, which is arranged in the action portion on a surface opposite to the surface on which the piezoelectric element and the supporting member are mounted.

[0029] In addition, the actuator of the present invention comprises: a base, which is a base plate; a piezoelectric element, one end of which is connected to the mounting surface of the base and extends along the first long side direction; a supporting member, one end of which is mounted on the mounting surface in parallel with the piezoelectric element and extends along the second long side direction intersecting the first long side direction; an action portion, which is connected to the other end of each of the piezoelectric element and the supporting member, and displaces in a direction different from both the first long side direction and the second long side direction, i.e., a displacement direction, as the piezoelectric element expands and contracts; a compression member, which is connected to each of the base and the action portion, and compresses the piezoelectric element along the first long side direction; and a driving portion, which supplies voltage or current to the piezoelectric element and the supporting member to drive the piezoelectric element to expand and contract.

[0030] Furthermore, the actuator of the present invention may be used to drive an actuator used for processing electronic components in an electronic component apparatus that processes sheet-shaped electronic components, for example.

[0031] Furthermore, in the actuator of the present invention, the electronic component processing device may be a measuring device for measuring characteristics of the electronic component, and the actuator may be a measuring probe for contacting the electronic component to measure the characteristics.

[0032] In addition, in the actuator of the present invention, the electronic component processing device may be a measuring device for measuring the characteristics of the electronic component, the working member may be a suction nozzle for adsorbing the electronic component, and the electronic component adsorbed by the suction nozzle may contact the measuring terminal for measuring the characteristics.

[0033] In addition, in the actuator of the present invention, the electronic component processing device can also be an insertion device that inserts electronic components into a carrier when the electronic components are taped, and the working member is a suction nozzle for adsorbing the electronic components, and the electronic components adsorbed by the suction nozzle are inserted into the carrier.

[0034] Furthermore, the dispenser of the present invention includes: a liquid discharge member into which liquid is introduced and which discharges the introduced liquid; a valve that discharges and blocks the liquid from the liquid discharge member; and the actuator that drives the valve.

[0035] In addition, the air valve of the present invention comprises: a valve body, which has an air pressure chamber into which pressurized air is introduced and an air exhaust port leading from the air pressure chamber to the outside; a valve body, which moves inside the air pressure chamber to close and open the air exhaust port; and the actuator, which is arranged in the air pressure chamber and drives the valve body.

[0036] Effects of the Invention

[0037] In the displacement amplification mechanism of the present invention, a piezoelectric element and a support member are mounted on the base, and an action portion is mounted on the piezoelectric element and the support member. Therefore, displacement of the piezoelectric element along the first longitudinal direction causes the action portion to displace in the displacement direction. Because the displacement amplification mechanism is constructed using only a single piezoelectric element, control of the drive system can be simplified compared to using two piezoelectric elements.

[0038] Furthermore, since the displacement amplification mechanism includes a compression member, a preload in the compression direction can be applied to the piezoelectric element, thereby making it difficult for a load in the tensile direction to be applied to the piezoelectric element, which is easily damaged by such a load. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 This is an example of a front view of a displacement amplification mechanism according to one embodiment.

[0040] Figure 2 This is an example of a perspective view of a displacement amplification mechanism.

[0041] Figure 3 This is an example of a front view of a compression component in a displacement amplification mechanism.

[0042] Figure 4This is an example of a front view of the displacement amplification mechanism in a state where the compression member is not attached.

[0043] Figure 5 yes Figure 4 Examples of (a) BB line cross-sectional view and (b) CC line cross-sectional view.

[0044] Figure 6 This is an example of a front view of the displacement amplification mechanism of the first modification.

[0045] Figure 7 This is an example of a perspective view of the displacement amplification mechanism according to the first modification.

[0046] Figure 8 This is an example of a front view of a compression member according to a first modification.

[0047] Figure 9 This is an example of a side view of the displacement amplifying mechanism according to the first modified example in a state where the compression member is not attached.

[0048] Figure 10 This is an example of a front view of a displacement amplification mechanism according to a second modification.

[0049] Figure 11 This is an example of a front view of a compression member according to a second modification.

[0050] Figure 12 This is an example of a front view showing an example of an actuator using a displacement amplification mechanism.

[0051] Figure 13 It means Figure 12 An example of a front view of an example of an actuator used to drive a measurement probe, which is an actuator used in processing electronic components.

[0052] Figure 14 This is an example of a diagram showing a state where electrical characteristics of an electronic component are measured by a measurement probe.

[0053] Figure 15 It means Figure 12 FIG. 1 is a front view of another example of an actuator used to drive a suction nozzle, which is an actuator used in handling electronic components.

[0054] Figure 16 This is an example of a diagram showing an example of a measuring device for measuring an electronic component using an actuator to which a suction nozzle is attached.

[0055] Figure 17 This is an example of a diagram showing an example of an insertion device that loads electronic components into a carrier tape using an actuator equipped with a suction nozzle.

[0056] Figure 18 This is an example of a cross-sectional view showing a gas valve according to one embodiment.

[0057] Figure 19 This is an example of a front view of a polishing device according to one embodiment.

[0058] Figure 20 This is an example of a partially cutaway front view of a dispenser according to one embodiment.

[0059] Figure 21 It means Figure 20 An example of a cross-sectional view of a state in which the liquid discharge component of the dispenser is closed.

[0060] Figure 22 It means Figure 20 An example of a cross-sectional view of a state in which the liquid discharge component of a dispenser is opened.

[0061] Figure 23 This is an example of a front view showing another modified example of the displacement amplification mechanism.

[0062] Figure 24 This is an example of a front view and a perspective view showing another modified example of the displacement amplification mechanism.

[0063] Figure 25 These are six views and a perspective view showing another modified example of the displacement amplification mechanism.

[0064] Figure 26 These are six views and a perspective view showing another modified example of the displacement amplification mechanism.

[0065] Figure 27 This is an example of a front view showing a modified example of the displacement amplification mechanism in which the connecting member 50 is not provided. DETAILED DESCRIPTION

[0066] (Displacement amplification mechanism 1)

[0067] First, a displacement amplifying mechanism 1 according to an embodiment of the present invention will be described.

[0068] Figure 1 It is a front view of the displacement amplifying mechanism 1 according to one embodiment of the present invention.

[0069] like Figure 1 As shown, the displacement amplifying mechanism 1 is a mechanism using a piezoelectric element 20 , and amplifies the displacement of the piezoelectric element 20 that expands and contracts according to applied voltage and applies the amplified displacement to an object.

[0070] The displacement amplifying mechanism 1 includes a base 10 , a piezoelectric element 20 , a support member 30 , an action portion 40 , a connecting member 50 , and a compression member 60 .

[0071] The base 10 is a portion that serves as a base for the displacement amplifying mechanism 1 . For example, when the displacement amplifying mechanism 1 is employed in various devices described later, the base 10 is attached to the device.

[0072] The base 10 has a pair of mounting portions 11 formed side by side for mounting the piezoelectric element 20 and the support member 30. The base 10 may be of any shape or material as long as it can be mounted on various devices provided with the mounting portions 11 and the displacement amplifying mechanism 1.

[0073] Specifically, if Figure 1 As shown, the base 10 can be set to a rectangular shape. In addition, as a material, for example, a metal with a certain degree of rigidity such as stainless steel can be used.

[0074] One end of the piezoelectric element 20 is connected to the mounting surface of the base 10 . The piezoelectric element 20 is formed in an elongated shape extending along the first longitudinal direction D1 . The mounting surface of the base 10 is formed in the mounting portion 11 .

[0075] The piezoelectric element 20 is a component that expands and contracts according to the applied voltage. Figure 1 As shown in FIG. 1 , the piezoelectric element 20 is connected to the mounting portion 11 on one side via a connecting member 50 described later. Figure 1 As shown, it is formed into a rectangular shape. As a main material constituting the piezoelectric element 20, a piezoelectric body such as PZT (lead zirconate titanate) can be used. This piezoelectric body is a substance having a piezoelectric effect.

[0076] The piezoelectric element 20 may also have a stacked structure consisting of alternating thin electrodes and thin piezoelectric bodies. This stacked structure enables large displacement even at low voltages. Furthermore, while the piezoelectric element 20 is shown in this example as a rectangular shape, it is not particularly limited to a rectangular shape and may be any shape as long as it allows displacement to be efficiently applied to the action portion 40 through the piezoelectric effect.

[0077] One end portion of the support member 30 is mounted on the mounting surface in parallel with the piezoelectric element 20. The support member 30 is formed in an elongated shape extending in a second longitudinal direction D2 intersecting the first longitudinal direction D1 in a plan view.

[0078] The rigidity of the piezoelectric element 20 in the first longitudinal direction D1 is less than the rigidity of the support member 30 in the second longitudinal direction D2. That is, when the support member 30 is stretched in the second longitudinal direction D2 and the piezoelectric element 20 is stretched in the first longitudinal direction D1, the support member 30 is less likely to deform, or both deform by the same amount.

[0079] Here, when the piezoelectric element 20 expands and contracts, the support member 30 also deforms accordingly. Furthermore, the front end of the action portion 40 displaces along the displacement direction D4. At this time, the piezoelectric element 20 and the support member 30 also deform along the displacement direction D4.

[0080] Furthermore, the rigidity of the support member 30 in the displacement direction D4 is lower than the rigidity of the piezoelectric element 20 in the displacement direction D4. In addition, in the cross section of the support member 30 viewed from the second longitudinal direction D2, the section moment of inertia about the central axis M perpendicular to the displacement direction D4 and passing through the center of the support member 30 in the displacement direction D4 varies depending on the position in the second longitudinal direction D2. Figure 5 This point is described in detail.

[0081] Figure 5 (a) Yes Figure 4 The BB line cross-sectional view in the figure is as follows: Figure 5 (b) Yes Figure 4 Sectional view along line C-C.

[0082] like Figure 4 and Figure 5 As shown, the cross-sectional shape of the support member 30 is different depending on the position in the second longitudinal direction D2. Figure 5 Compared with the cross-sectional shape shown in (b), Figure 5 The cross-sectional shape shown in (a) has a larger cross-sectional moment of inertia.

[0083] This is because Figure 5 In the cross-sectional shape shown in (b), the partially cut-away lightening portion 30A is formed to reduce the sectional moment of inertia about the central axis M. Thus, the support member 30 can secure greater freedom in cross-sectional shape than the piezoelectric element 20 .

[0084] like Figure 1 As shown, the action portion 40 is connected to the other end of each of the piezoelectric element 20 and the support member 30. As the piezoelectric element 20 expands or contracts, the action portion 40 displaces in a displacement direction D4 that is different from both the first longitudinal direction D1 and the second longitudinal direction D2. As the piezoelectric element 20 expands or contracts, the support member 30 also deforms accordingly. Furthermore, the front end of the action portion 40 displaces in the displacement direction D4.

[0085] The connection member 50 connects one end portion of the piezoelectric element 20 and the mounting portion 11 of the base 10. The connection member 50 is formed of a material having a higher thermal expansion coefficient than that of the support member 30.

[0086] The connecting member 50 may also be formed integrally with the mounting portion 11 of the base 10 .

[0087] Furthermore, the connecting member 50 may not be provided. In this case, one end portion of the piezoelectric element 20 is directly connected to the mounting portion 11 .

[0088] Alternatively, the connecting member 50 may be disposed at the other end of the piezoelectric element 20 instead of at one end of the piezoelectric element 20. In other words, the connecting member 50 may connect the other end of the piezoelectric element 20 and the action portion 40. In this case, the connecting member 50 may be formed integrally with the action portion 40.

[0089] like Figure 1 As shown, the compression member 60 is connected to each of the base portion 10 and the action portion 40 , and compresses the piezoelectric element 20 along the first longitudinal direction D1 .

[0090] like Figure 2 As shown in FIG. 1 , two compression members 60 are provided. The two compression members 60 are respectively arranged at positions sandwiching the piezoelectric element 20 and the support member 30 .

[0091] like Figure 3 As shown in the plan view, the compression member 60 extends along the third longitudinal direction D3 intersecting the first longitudinal direction D1 and the second longitudinal direction D2. The compression member 60 is formed with an expandable portion 61 that is expandable and contractible in the third longitudinal direction D3.

[0092] like Figure 3 As shown, the telescopic portion 61 extends along the third longitudinal direction D3 in a plan view and is formed into a bellows shape that repeatedly bends. The illustrated example is a structure that bends at three locations in the third longitudinal direction, but the present invention is not limited to this example and the shape can be changed arbitrarily.

[0093] The expansion and contraction portion 61 is formed in the middle portion of the compression member 60 in the third longitudinal direction D3 .

[0094] The compression member 60 has fixed portions 62 formed at both ends in the third longitudinal direction D3. The fixed portions 62 are formed to have a large width dimension in a direction perpendicular to the third longitudinal direction D3.

[0095] like Figure 4 As shown in FIG, a fixing slit 70 is formed in each of the action portion 40 and the base portion 10. Figure 1 As shown, the compression member 60 is installed in the fixing slit 70. At this time, the compression member 60 is stretched and installed in a slightly stretched state. This content will be described in detail below.

[0096] Figure 3 The two fixing portions 62 shown are formed at a size L1 ratio in the third longitudinal direction D3 to each other. Figure 4 The illustrated fixing slits 70 of the acting portion 40 and the base portion 10 are shorter than each other in a dimension L2 in the third longitudinal direction D3 .

[0097] Therefore, when the compression member 60 is installed in the fixing slit 70 of the action portion 40 and the base portion 10, the compression member 60 is stretched in the third longitudinal direction D3, elastically deformed to a slightly elongated state, and then installed in this state. Thus, after the compression member 60 is installed in the fixing slit 70, the compression member 60 recovers its deformation in the third longitudinal direction D3, thereby applying a compressive force from the compression member 60 to the action portion 40 and the base portion 10.

[0098] (First Modification of the Displacement Amplifying Mechanism 1)

[0099] Next, use Figures 6 and 7 A description will be given of the displacement amplifying mechanism 2 according to the first modified example. Figure 6 2 is a front view of the displacement amplification mechanism 2 of the first modified example. Figure 7 is a perspective view of the displacement amplification mechanism 2 of the first modified example, Figure 8 1 is a front view of the compression member 60B in the displacement amplification mechanism 2 of the first modified example. Figure 9 It is a side view of the displacement amplifying mechanism 2 according to the first modified example before the compression member 60B is attached.

[0100] The displacement amplification mechanism 2 of the first modified example differs from the displacement amplification mechanism of the first embodiment in the location where the compression member 60B is mounted. Specifically, one of the two compression members 60B extends along the piezoelectric element 20 in the first longitudinal direction D1, while the other extends along the support member 30 in the second longitudinal direction D2. Furthermore, the compression member 60B extending along the first longitudinal direction D1 is formed with an expandable portion 61B that is expandable and contractible in the first longitudinal direction D1.

[0101] Fixed portions 62B are formed at both ends of the compression member 60B in the first longitudinal direction D1. The fixed portions 62B are formed to have a large width dimension in a direction perpendicular to the first longitudinal direction D1.

[0102] Figure 8 The two fixing portions 62B shown are formed at a size L3 ratio in the third longitudinal direction D3 to each other. Figure 9 The illustrated fixing slits 70 of the acting portion 40 and the base portion 10 are shorter than each other in a dimension L4 in the third longitudinal direction D3 .

[0103] Therefore, when the compression member 60B is installed in the fixing slit 70 of the action portion 40 and the base 10 , the compression member 60B is stretched in the first longitudinal direction D1 and elastically deformed into a slightly stretched state, and is installed in this state.

[0104] Thus, after the compression member 60B is attached to the fixing slit 70 , the compression member 60B is deformed in the third longitudinal direction D3 , thereby applying the compressive force from the compression member 60B to the piezoelectric element 20 via the action portion 40 and the base 10 .

[0105] (Second Modification of the Displacement Amplifying Mechanism 1)

[0106] Next, use Figure 10 and Figure 11 , the displacement amplification mechanism 3 of the second modified example is described. Figure 10 2 is a front view of the displacement amplification mechanism 3 of the second modified example. Figure 11 It is a front view of the compression member 60 in the displacement amplifying mechanism 3 according to the second modified example.

[0107] The displacement amplifying mechanism 3 of the second modification differs from the displacement amplifying mechanism of the first embodiment in the shape of the compression member 60. Specifically, the compression member 60 of the displacement amplifying mechanism 3 of this modification does not have an expansion portion 61 and extends straightly in the third longitudinal direction D3 as a whole.

[0108] Figure 11 The two fixing portions 62 shown are formed at a size L5 ratio in the third longitudinal direction D3 to each other. Figure 10 The illustrated fixing slits 70 of the acting portion 40 and the base portion 10 are shorter than each other in a dimension L2 in the third longitudinal direction D3 .

[0109] Therefore, when the compression member 60 is installed in the fixing slit 70 of the action portion 40 and the base portion 10, the compression member 60 is stretched in the first longitudinal direction D1, elastically deformed to a slightly elongated state, and then installed in this state. Thus, after the compression member 60 is installed in the fixing slit 70, it is restored and deformed in the third longitudinal direction D3, thereby applying a compressive force from the compression member 60 to the action portion 40 and the base portion 10.

[0110] In addition, as another modification, a hinge component that promotes deformation in the displacement direction D4 may be provided on the piezoelectric element 20 and the support component 30 at least on one of the end portions in the first long side direction D1 of the piezoelectric element 20 and the end portions in the second long side direction D2 of the support component 30.

[0111] Such a hinge member may be provided at least one of the other end portion of the piezoelectric element 20 in the first longitudinal direction D1 and the other end portion of the support member 30 in the second longitudinal direction D2 .

[0112] Figure 23 It is a front view showing another modified example of the displacement amplification mechanism.

[0113] In the displacement amplification mechanism 2, it is required to convert the PZT's expansion and contraction energy into energy in the displacement direction D4 of the action portion 40 with minimal waste. However, in order to convert the PZT's expansion and contraction deformation in the displacement direction D4 (vertical motion) of the action portion 40, the PZT and support member 30 must be deformed by bending vertically.

[0114] Energy is required for bending, but much of this energy is wasted. By forming a narrower portion (hinge portion 35) in the center of the support member 30, the energy associated with bending can be reduced. The vertical motion energy of the action portion can be increased by this reduced energy, thereby facilitating bending.

[0115] On the other hand, if the width of the hinge portion 35 is excessively reduced, the rigidity of the support member 30 is reduced, and the force generated by the up and down movement of the action portion 40 is reduced. Therefore, the up and down movement energy of the action portion 40 extracted to the output is also reduced. Therefore, there is an appropriate range for the hinge width and length. As an example, it is ideal to set the width of the hinge portion 35 to be less than about 30% of the thickness of the support member 30, and to set the length to be about 5% or more of the length of the support member 30. By setting it to this structure, compared with the structure without the hinge portion 35, the amplitude of the up and down movement of the action portion 40 is increased by about 10% or more, and the up and down movement energy of the action portion 40 extracted is increased by about 5% or more.

[0116] Figure 24 It is a front view and a perspective view showing another modified example of the displacement amplification mechanism.

[0117] By placing the hinge portion 35 close to the action portion 40 and attaching additional screws to the hinge portion 35, the resonance frequency of the actuator can be increased. Figure 23 In comparison, the resonance frequency can be increased by more than 10%.

[0118] Figure 25 These are six views and a stereoscopic view showing another modified example of the displacement amplification mechanism.

[0119] exist Figure 25 In the structure of the support member 30 and the base 10, the thickness t is set to be greater than Figure 24 The base 10 is thinner, for example, to 1.6 mm, thereby providing a more compact displacement amplification mechanism 2. By integrally molding the support member 30 with the base 10 and adopting a construction method such as stamping, not only can the number of parts be reduced, but production costs can also be suppressed. Furthermore, since they are integrally molded, the fastening rigidity between the support member 30 and the base 10 is the strength of the material itself. As a result, more of the force generated by the piezoelectric element 20 is transmitted to the action portion 40, resulting in an increase in the resonant frequency and the kinetic energy extracted from the action portion 40.

[0120] Figure 26 These are six views and a stereoscopic view showing another modified example of the displacement amplification mechanism.

[0121] exist Figure 26 In the structure, by reducing the number of parts, the fastening locations between the components can be minimized, thereby improving the rigidity of the structure. As a result, the generated force taken out from the action portion 40 can be maximized.

[0122] As described above, according to the displacement amplification mechanisms 1-3 of this embodiment, the piezoelectric element 20 and the support member 30 are mounted on the base 10, and the action portion 40 is mounted on the piezoelectric element 20 and the support member 30. Therefore, displacement of the piezoelectric element 20 in the first longitudinal direction D1 causes the action portion 40 to be displaced in the displacement direction D4. Thus, since the displacement amplification mechanisms 1-3 are constructed using only a single piezoelectric element 20, control of the drive system can be simplified compared to using two piezoelectric elements 20.

[0123] Furthermore, since the displacement amplifying mechanisms 1 to 3 include the compression member 60, a compression preload can be applied to the piezoelectric element 20. This can reduce the tensile load from being applied to the piezoelectric element 20, which is easily damaged by the tensile load.

[0124] Furthermore, the rigidity of the piezoelectric element 20 in the first longitudinal direction D1 is lower than the rigidity of the support member 30 in the second longitudinal direction D2. This prevents energy loss due to deformation of the support member 30 when the piezoelectric element 20 expands and contracts in the first longitudinal direction D1. This improves the energy efficiency of the displacement amplification mechanisms 1 to 3.

[0125] Furthermore, a connecting member 50 is provided to connect one end portion of the piezoelectric element 20 and the base portion 10. The connecting member 50 is formed from a material having a higher coefficient of thermal expansion than the support member 30. Therefore, even if the support member 30 experiences a greater thermal expansion than the piezoelectric element 20, the connecting member 50 will also experience a greater thermal expansion than the support member 30. This can suppress a significant difference in the total thermal expansion of the piezoelectric element 20 and the connecting member 50 on one side of the structure connecting the base portion 10 and the acting portion 40, and the thermal expansion of the supporting member 30 on the other side. This can also prevent the initial position of the acting portion 40 in the displacement direction D4 from significantly changing due to the influence of heat.

[0126] Furthermore, when the connecting member 50 is formed integrally with the base 10 , the number of parts can be reduced.

[0127] Figure 27 This is a front view showing a modified example of the displacement amplification mechanism in which the connecting member 50 is not provided. Figure 27The structure does not include a connecting member 50 , but the piezoelectric element 20 connects the action portion 40 and the base portion 10 , thereby reducing the number of parts and reducing production costs.

[0128] Even when the connecting member 50 is provided at a position connecting the other end portion of the piezoelectric element 20 and the action portion 40 , a large difference in the amount of thermal expansion between the piezoelectric element 20 and the support member 30 can be suppressed as described above.

[0129] In addition, the rigidity of the support member 30 in the displacement direction D4 is lower than the rigidity of the piezoelectric element 20 in the displacement direction D4. Therefore, when the action part 40 displaces along the displacement direction D4 as the piezoelectric element 20 expands and contracts, the support member 30 can suppress the displacement of the action part 40 in the displacement direction D4.

[0130] Furthermore, in a cross section of the support member 30 as viewed along the second longitudinal direction D2, the moment of inertia about a central axis M, which is perpendicular to the displacement direction D4 and passes through the center of the support member 30 in the displacement direction D4, varies depending on the position in the second longitudinal direction D2. That is, unlike the piezoelectric element 20, which has a laminated structure, for example, the support member 30 can maintain a degree of freedom in its shape. This makes it easy to provide portions of the support member 30 that are susceptible to local deformation, and the overall displacement characteristics of the displacement amplification mechanisms 1 to 3 can be adjusted based on the shape of the support member 30.

[0131] In addition, a hinge component is provided at each of one end portion in the first long side direction D1 of the piezoelectric element 20 and one end portion in the second long side direction D2 of the supporting member 30 to promote deformation of the piezoelectric element 20 and the supporting member 30 in the displacement direction D4. In this case, the piezoelectric element 20 and the supporting member 30 can be easily deformed in the displacement direction D4 through the hinge component.

[0132] Even when the hinge member is provided at each of the other end portion in the first longitudinal direction D1 of the piezoelectric element 20 and the other end portion in the second longitudinal direction D2 of the support member 30 , the same effects as described above can be achieved.

[0133] In addition, since two compression components 60 are provided and are respectively arranged at positions sandwiching the piezoelectric element 20 and the support component 30 , compression force can be uniformly applied to the piezoelectric element 20 and the support component 30 compared to a structure in which the piezoelectric element 20 and the support component 30 are compressed by a single compression component 60 .

[0134] Furthermore, when the compression member 60 is provided with the retractable portion 61, the compression member 60 can be easily extended along the third longitudinal direction D3 when the compression member 60 is attached to the base 10 and the action portion 40. This ensures ease of assembly of the compression member 60.

[0135] (Actuator)

[0136] Next, an example in which the displacement amplifying mechanism 1 of the present invention is used as an actuator will be described.

[0137] Figure 12 1 is a front view showing an example of an actuator 1000 using the displacement amplifying mechanism 2 according to the first modification. The actuator 1000 is a control machine that is driven by electrical commands to perform a predetermined motion.

[0138] The actuator 1000 includes a displacement amplifying mechanism 2 and a driving unit 80. The driving unit 80 supplies voltage or current to the piezoelectric element 20 and the supporting member 30 to drive the piezoelectric element 20 to expand and contract.

[0139] (Example of using an actuator to drive an actuator used in processing electronic components)

[0140] Figure 13 It means Figure 12 This is a front view of an example of an actuator used to drive an actuator used in processing electronic components. A measuring probe 1101, or the actuator, is attached to the tip of the actuator 40 of the actuator 1000. The actuator is used, for example, to contact a sheet of electronic components and evaluate their properties.

[0141] The drive unit 80 supplies voltage or current to the piezoelectric element 20, causing it to displace by a predetermined amount. This amplified displacement is then transmitted to the measurement probe 1101, causing it to displace in the displacement direction D4. Furthermore, the drive unit 80 stops supplying voltage or current to the piezoelectric element 20. This allows the measurement probe 1101 to return to its original position.

[0142] Figure 14 11 is a diagram showing a state where the electrical characteristics of an electronic component are measured by a measurement probe 1101 .

[0143] like Figure 14 As shown, a measuring device used with a measurement probe 1101 includes a rotatable turntable 1090 having a plurality of circumferentially arranged storage slots 1091 for storing electronic components 1080. Furthermore, by rotating turntable 1090 and repeatedly displacing (moving up and down) the measurement probe 1101, which serves as an active element, at high speed using a drive unit 80, the electrical characteristics of the electronic components 1080 stored in the plurality of storage slots 1091 are sequentially measured.

[0144] That is, when the turntable 1090 is rotated and the electronic component 1080 stored in the storage groove 1091 reaches the measurement position directly above the measurement probe 1101, the measurement probe 1101 is displaced upward.

[0145] In this way, the tip of measurement probe 1101 contacts electrode 1081 provided on the bottom surface of electronic component 1080, and the electrical characteristics of electronic component 1080 are measured. After the measurement, measurement probe 1101 is moved downward and retracted. Then, when the next electronic component 1080 reaches the measurement position, the same operation is repeated, and these operations are repeated at high speed.

[0146] Thus, by using the actuator 1000 for measuring electronic components, the measuring probe as an actuator can be driven at high speed with a practical stroke. In addition, the damage caused by stretching of the piezoelectric element 20 and the influence of thermal expansion and creep can be reduced.

[0147] In the above, an example in which the measuring probe 1101 of the measuring device is used as the effector is described, but the effector is not limited to the measuring probe.

[0148] Figure 15 This figure shows a state where the actuator 1000 equipped with a suction nozzle 1102 as an actuator is used in an electronic component processing apparatus, and shows a case where the actuator to be driven is the suction nozzle for sucking electronic components.

[0149] Figure 15 The structure shown is similar to the structure shown in FIG. 1 except that the acting member installed on the acting portion 40 of the actuator 1000 is replaced by a suction nozzle 1102. Figure 13 The structures shown are the same.

[0150] The suction nozzle 1102 is attached to the action portion 40 in a manner extending in the vertical direction. The suction nozzle 1102 is connected to a suction mechanism (not shown). Then, a suction mechanism such as a vacuum pump provided on the suction mechanism sucks the electronic component to the suction port 1104 at the lower end of the suction nozzle 1102.

[0151] The actuator 1000 can be used in a measuring device for measuring electronic components. Figure 16 An example of a measuring device in this case is shown in FIG. The measuring device has an actuator 1000 (see Figure 15 ), suction nozzle 1102, adsorption mechanism, turntable 1110, base plate 1120, and measuring fixture 1130.

[0152] The turntable 1110 is rotatably provided and has a plurality of storage grooves 1111 along the circumferential direction for storing the electronic components 1080. The storage grooves 1111 are provided to penetrate the turntable 1110.

[0153] Electronic component 1080 is stored in storage groove 1111 with electrode 1081 facing downward. Base plate 1120 rotatably supports turntable 1110, and its surface serves as the conveying surface for electronic component 1080. Base plate 1120 also has a through-hole 1121 formed therein. A suction nozzle 1102, serving as a working element, is positioned above through-hole 1121, and a measuring jig 1130 is positioned below through-hole 1121. Measuring jig 1130 is mounted on stand 1140, and measurement terminals 1131 are provided on its upper surface at positions corresponding to electrodes 1081 of electronic component 1080.

[0154] Moreover, by supplying a specified voltage or current to the piezoelectric element 20 while rotating the turntable 1110, the suction nozzle 1102 serving as the working part is repeatedly displaced (moved up and down) at high speed via the action part 40, and the electronic components 1080 stored in multiple storage slots 1111 are sequentially adsorbed and their electrical characteristics are measured.

[0155] That is, when the turntable 1110 is rotated and the electronic component 1080 stored in the storage groove 1111 is transported along the transport surface of the base plate 1120 and reaches a position corresponding to the through hole 1121 , the electronic component 1080 is sucked onto the suction nozzle 1102 .

[0156] Then, in this state, the suction nozzle 1102 is displaced downward to bring the electrodes 1081 of the electronic component 1080 into contact with the measurement terminals 1131 of the measurement jig 1130 , and the electrical characteristics of the electronic component 1080 are measured.

[0157] After measurement, the nozzle 1102 is moved upward, returning the electronic component 1080 sucked by the nozzle 1102 to the conveying surface to release the suction. Then, the same action is performed again when the next electronic component 1080 reaches the position corresponding to the through hole 1121, and these actions are repeated at high speed.

[0158] In this case, since only the working member is replaced by the suction nozzle 1102 from the measurement probe 1101 , the same effect as that of the case of using the measurement probe 1101 can be obtained.

[0159] In addition, the actuator 1000 equipped with the suction nozzle 1102 can also be used as an insertion device for loading electronic components into a carrier tape. Figure 17 An example of an insertion device at this time is shown in FIG. The insertion device has an actuator 1000 (see Figure 15 ), suction nozzle 1102, adsorption mechanism, turntable 1150, base plate 1160, and magnet 1180.

[0160] like Figure 17As shown, the turntable 1150 is rotatable and has a plurality of storage slots 1151 along the circumferential direction for storing the electronic components 1080. The storage slots 1151 are provided to penetrate the turntable 1150.

[0161] The base 1160 rotatably supports the turntable 1150 , and its surface serves as a conveyance surface for the electronic components 1080 .

[0162] Furthermore, carrier tape 1170 is movably disposed below base plate 1160. Carrier tape 1170 has a plurality of cavities 1171 for accommodating electronic components 1080 provided at equal intervals.

[0163] A through hole 1161 is formed in the base plate 1160 , a suction nozzle 1102 serving as a working member is provided above the through hole 1161 , and a magnet 1180 is provided below the carrier tape 1170 at a position corresponding to the through hole 1161 .

[0164] Furthermore, while rotating the turntable 1150 and moving the carrier tape 1170, a voltage or current is supplied to the piezoelectric element 20, causing the suction nozzle 1102, which serves as an actuator, to repeatedly displace (move up and down) at high speed.

[0165] Thus, electronic components 1080 stored in a plurality of storage slots 1151 are sequentially inserted into cavities 1171 of carrier tape 1170. That is, turntable 1150 is rotated.

[0166] Then, the electronic component 1080 stored in the storage groove 1151 is transported along the conveying surface of the base plate 1160. When it reaches the position corresponding to the through hole 1161, the electronic component 1080 is adsorbed onto the suction nozzle 1102, and the cavity 1171 is located at the position corresponding to the through hole 1161.

[0167] Then, in this state, the suction nozzle 1102 is displaced downward to release the adsorption of the suction nozzle 1102 and insert the electronic component 1080 into the cavity 1171. After insertion, the suction nozzle 1102 is displaced upward and returns to the cavity 1171 through the through hole 1161 and the receiving groove 1151. Figure 17 location.

[0168] Then, the same operation is performed again when the next electronic component 1080 reaches the position corresponding to the through hole 1161. These operations are repeated at high speed. In addition, the magnet 1180 is used to apply electromagnetic attraction to the electronic component 1080 in the cavity 1171 to stabilize the posture of the electronic component 1080.

[0169] As described above, even when the suction nozzle 1102 is used for the insertion device, the same effects as those obtained when the measurement probe 1101 is used can be obtained.

[0170] (Air valve)

[0171] Next, a gas valve using the actuator of the above-described embodiment will be described. Figure 18 This is a cross-sectional view showing a gas valve according to one embodiment. A gas valve is a machine that arbitrarily seals and discharges gas supplied into the interior.

[0172] like Figure 18 As shown, the air valve 3000 has a housing 3102 that divides an air pressure chamber 3101 into which pressurized air is introduced and forms an air exhaust port 3103 leading from the air pressure chamber 3101 to the outside, a valve body 3200 that operates to close and open the air exhaust port 3103, and an actuator 3300 that drives the valve body 3200.

[0173] The actuator 3300 has a configuration in which the displacement amplifying mechanism 1 of the first embodiment is provided with a driving unit 80 .

[0174] An air supply port 3104 is formed in the housing 3102 that defines the air pressure chamber 3101. Pressurized air is introduced from an air pressure supply source (not shown) through the air supply port 3104. The air supply port 3104 and the base 10 of the displacement amplifying mechanism 1 are arranged on different planes.

[0175] The air outlet 3103 is provided at a location of the wall of the housing 3102 so as to discharge the gas from the air pressure chamber 3101 to the outside of the air valve 3000 .

[0176] The valve body 3200 can be formed of, for example, a rubber sheet.

[0177] exist Figure 18 In the example shown, the air supply port 3104 is provided at a position corresponding to the piezoelectric element 20, that is, a position where the air supplied from the air supply port 3104 easily strikes the piezoelectric element 20. This allows for the expected cooling effect of the piezoelectric element 20 by the flow of air supplied from the air supply port 3104. Furthermore, when the air supply port 3104 is arranged in a straight line with the air exhaust port 3103, the pressure loss from the air supply port 3104 to the air exhaust port 3103 can be minimized.

[0178] The housing 3102 and the cover (not shown) can be made of a resin material such as aluminum die casting or PPS. In a plan view, the cover is formed in the same shape as the housing 3102 and is sealed inside the housing 3102 by being joined to the housing 3102.

[0179] In the case of aluminum die casting, the housing 3102 and the cover (not shown) can be joined airtightly by appropriately sandwiching a sealing material and tightening screws. In the case of a resin material, ultrasonic welding or laser welding can be applied.

[0180] In the thus configured air valve 3000, the driving unit 80 of the actuator 3300 supplies voltage or current to the piezoelectric element 20, causing the piezoelectric element 20 to expand and contract, thereby outputting an amplified displacement from the action unit 40. This causes the valve body 3200 to displace in the displacement direction D4, creating a gap between the valve body 3200 and the air outlet 3103. Consequently, compressed air supplied from the air supply port 3104 passes through the spaces on both sides of the actuator 3300, through the created gap, and out of the air outlet 3103.

[0181] Alternatively, when no voltage is applied to the piezoelectric element 20, the closed air outlet 3103 is blocked by the valve body 3200, and by causing the piezoelectric element 20 to produce a contraction displacement, the valve body 3200 is separated from the air outlet 3103, and the air outlet 3103 is opened, becoming normally closed so that compressed air is ejected from the air outlet 3103.

[0182] Alternatively, the air outlet 3103 may be in an open state when no voltage is applied, and when the piezoelectric element 20 is extended and displaced by application of voltage, the valve body 3200 may be displaced, and the air outlet 3103 may be normally open so as to be blocked.

[0183] In this way, the piezoelectric element 20 can be extended and displaced, thereby preventing air leakage and the like.

[0184] (Polishing device)

[0185] Next, a polishing apparatus using the displacement amplifying mechanism 1 of the first embodiment will be described. The polishing apparatus is an apparatus that automatically polishes an object to be polished.

[0186] Figure 19 This is a front view showing an example of the structure of a polishing device 900 using the displacement amplifying mechanism 1 according to the first embodiment of the present invention. The polishing device 900 includes the displacement amplifying mechanism 1 and a polishing unit 800 provided on the surface of the action portion 40 opposite to the surface in contact with the piezoelectric element 20.

[0187] The polishing device 900 is mounted on the action portion 40 of the displacement amplifying mechanism 1 . The polishing portion 800 as a polishing tool has its tip in contact with the object 901 or in contact with the object 901 with loose abrasive grains 902 interposed therebetween.

[0188] Here, in the polishing method illustrated, free abrasive grains 902 mixed with liquid are provided at the polishing position, and the polishing portion 800 slides on the surface of the object to be polished 901 by causing the piezoelectric element 20 to expand and contract, thereby polishing the object to be polished 901. However, a polishing method may also be used in which diamond abrasive grains or the like are directly fixed to the polishing portion 800 to polish the object to be polished.

[0189] Even if the polishing apparatus 900 is configured such that the object 901 is mounted on the action portion 40 and the polishing unit 800 is fixed, similar polishing can be performed because the relative movement between the polishing unit 800 and the object 901 remains unchanged.

[0190] By adopting such a configuration in the polishing apparatus 900 , it is possible to provide the polishing apparatus 900 that can efficiently eliminate the tensile force applied to the piezoelectric element 20 and effectively prevent damage to the piezoelectric element 20 or separation of the connection portion caused by the tensile force applied to the piezoelectric element 20 .

[0191] (distributor)

[0192] Next, a dispenser using the actuator of the above embodiment will be described. The dispenser is a device that automatically switches between filling and discharging of a liquid.

[0193] Figure 20 1 is a partially cutaway front view of a dispenser according to one embodiment of the present invention. Figure 21 It means closed Figure 20 A sectional view of a state of a liquid discharge component of a dispenser. Figure 22 Yes means open Figure 20 A sectional view of a state of a liquid discharge component of a dispenser.

[0194] like Figure 20 As shown, dispenser 2000 includes a liquid discharge member 2100 into which liquid is introduced and discharges the introduced liquid, a valve 2200 that discharges and blocks liquid from liquid discharge member 2100, and an actuator 2300 that drives valve 2200. Actuator 2300 is a configuration in which displacement amplification mechanism 2 of the first modified example includes drive unit 80.

[0195] like Figure 21 As shown, the liquid discharge component 2100 has a main body 2101, a liquid chamber 2102 in which a valve 2200 formed in the main body 2101 is inserted, a liquid inlet portion 2103 for introducing liquid into the liquid chamber 2102, a liquid discharge port 2104 connected to the bottom of the liquid chamber 2102, and a valve seat 2105 arranged at the bottom of the liquid chamber 2102 for the front end of the valve 2200 to sit on.

[0196] The front end of the valve 2200 is formed into a spherical rod shape and extends in the vertical direction. The liquid chamber 2102 is formed into a cylindrical shape corresponding to the shape of the valve 2200. As for the valve 2200, generally, as Figure 21 As shown, its front end is seated on the valve seat 2105, closing the liquid discharge port 2104. In this state, the liquid will not be discharged.

[0197] The valve 2200 is driven by the actuator 2300 to rise and fall along the displacement direction D4. Figure 21The state drives the actuator 2300 to make the valve 2200 rise, such as Figure 22 As shown, the liquid discharge port 2104 is opened and liquid is discharged from the liquid discharge port 2104.

[0198] Actuator 2300 is Figure 12 The actuator 1000 has the same structure.

[0199] The valve 2200 is mounted on the action part 40. To reduce weight, the action part 40 may be made of high-strength aluminum material, and the central portion may be processed into a thin-walled portion 501 as shown in the figure.

[0200] Furthermore, by applying a voltage to the piezoelectric element 20 through the driving unit 80, the piezoelectric element 20 expands, thereby driving the action unit 40 upward, thereby raising the valve 2200. Furthermore, by releasing the voltage applied to the piezoelectric element 20, the valve 2200 can be lowered. Alternatively, the piezoelectric element 20 can be caused to contract to move the valve 2200 vertically.

[0201] Furthermore, the base 10 of the actuator 2300 is supported by the base 2400. The base 2400 also supports the liquid discharge member 2100.

[0202] Alternatively, when no voltage is applied to the piezoelectric element 20, Figure 21 As shown, the liquid outlet 2104 is blocked by the valve 2200, and the piezoelectric element 20 is extended and displaced. Figure 22 As shown, the valve 2200 is raised, the liquid discharge port 2104 is opened, and the liquid is discharged from the liquid discharge port 2104 in a normally closed state.

[0203] Alternatively, when no voltage is applied, the valve 2200 may open the liquid outlet 2104 , and when the piezoelectric element 20 contracts due to voltage application, the valve 2200 may descend and become normally open with the liquid outlet 2104 blocked.

[0204] (Other Applications)

[0205] While the embodiments of the present invention have been described above, they are to be construed as illustrative in all respects and not restrictive, and the embodiments may be omitted, replaced, or modified in various ways without departing from the scope and spirit of the present invention.

[0206] For example, the displacement amplification mechanism 1 of one embodiment of the present invention can be configured in series or in parallel for multiple uses. In this case, multiple displacement amplification mechanisms 1 can be connected in series, that is, the base 10 of a displacement amplification mechanism 1 can be connected to the active portion 40 of another displacement amplification mechanism 1, thereby further amplifying the displacement. This method is particularly effective in locations with severely limited space. Alternatively, a variation of this connection method is possible, such as combining two displacement amplification mechanisms 1 at a 90° angle.

[0207] Furthermore, in the above embodiment, the piezoelectric element 20 is described as the expansion element. However, any expansion element is not particularly limited, and other elements having expansion functions such as magnetostrictive elements or shape memory alloys may also be used.

[0208] Description of Reference Numerals

[0209] 1: Displacement amplification mechanism

[0210] 10: Base

[0211] 11: Installation

[0212] 20: Piezoelectric element

[0213] 30: Supporting parts

[0214] 40: Action part

[0215] 50: Connecting parts

[0216] 70: Fixed slit

[0217] 80: Drive unit

[0218] 800: Polishing department

[0219] 900: Polishing device

[0220] 1000: Actuator

[0221] 2000: Allocator

[0222] 3000: Air valve.

Claims

1. A displacement amplification mechanism comprising: A base, wherein the base is a base plate; a piezoelectric element, one end of which is connected to the mounting surface of the base and extends along the first long side direction; a supporting member, one end of which is mounted on the mounting surface in parallel with the piezoelectric element and extends along a second longitudinal direction intersecting the first longitudinal direction; an action portion connected to the other end of each of the piezoelectric element and the support member and displaced in a displacement direction different from both the first long side direction and the second long side direction as the piezoelectric element expands and contracts; and a compression member connected to each of the base portion and the action portion to compress the piezoelectric element along the first long side direction; The first long side direction and the second long side direction intersect at the action portion side, The compression member is not arranged in a space surrounded by the piezoelectric element, the support member, and the base.

2. The displacement amplification mechanism according to claim 1, characterized in that: The rigidity of the piezoelectric element in the first longitudinal direction is less than or equal to the rigidity of the supporting member in the second longitudinal direction.

3. The displacement amplification mechanism according to claim 1 or 2, characterized in that: A connecting member is provided to connect the one end portion of the piezoelectric element and the base portion, The connecting member is formed of a material having a higher thermal expansion coefficient than that of the supporting member.

4. The displacement amplification mechanism according to claim 1 or 2, characterized in that: A connecting member is provided to connect the one end portion of the piezoelectric element and the base portion, The connecting member is formed integrally with the base.

5. The displacement amplification mechanism according to claim 1 or 2, characterized in that: A second connecting member is provided to connect the other end portion of the piezoelectric element and the action portion, The second connection member is formed of a material having a higher thermal expansion coefficient than that of the support member.

6. The displacement amplification mechanism according to claim 1 or 2, characterized in that: A second connecting member is provided to connect the other end portion of the piezoelectric element and the action portion, The second connecting member is formed integrally with the acting portion.

7. The displacement amplification mechanism according to any one of claims 1 to 6, characterized in that: The rigidity of the support member in the displacement direction is less than or equal to the rigidity of the piezoelectric element in the displacement direction.

8. The displacement amplification mechanism according to any one of claims 1 to 7, characterized in that: In a cross section of the support member viewed in the second longitudinal direction, a section moment of inertia about a central axis perpendicular to the displacement direction and passing through the center of the support member in the displacement direction varies depending on a position in the second longitudinal direction.

9. The displacement amplification mechanism according to any one of claims 1 to 8, characterized in that: A hinge member is provided at at least one of one end portion of the piezoelectric element in the first longitudinal direction and one end portion of the support member in the second longitudinal direction, and the hinge member promotes deformation of the piezoelectric element and the support member in the displacement direction.

10. The displacement amplification mechanism according to any one of claims 1 to 8, characterized in that: A hinge member is provided at at least one of the other end portion of the piezoelectric element in the first longitudinal direction and the other end portion of the support member in the second longitudinal direction. The hinge member promotes deformation of the piezoelectric element and the support member in the displacement direction.

11. The displacement amplification mechanism according to any one of claims 1 to 8, characterized in that: Two compression members are provided, and are respectively arranged at positions sandwiching the piezoelectric element and the support member.

12. The displacement amplification mechanism according to any one of claims 1 to 11, characterized in that: In a plan view including the first long side direction and the second long side direction, the compression member extends along a third long side direction intersecting the first long side direction and the second long side direction. The compression member is formed with an expandable portion that is expandable and contractible in the third longitudinal direction.

13. The displacement amplification mechanism according to any one of claims 1 to 11, characterized in that: The compression member extends along the first longitudinal direction, and an expandable portion that is expandable and contractible in the first longitudinal direction is formed on the compression member extending along the first longitudinal direction.

14. The displacement amplification mechanism according to any one of claims 1 to 13, characterized in that: The front end of the action portion is a flat surface.

15. A polishing device comprising: A base, wherein the base is a base plate; a piezoelectric element, one end of which is connected to the mounting surface of the base and extends along the first long side direction; a supporting member, one end of which is mounted on the mounting surface in parallel with the piezoelectric element and extends along a second longitudinal direction intersecting the first longitudinal direction; an action portion connected to the other end of each of the piezoelectric element and the support member, and displaced in a direction different from both the first longitudinal direction and the second longitudinal direction, that is, a displacement direction, as the piezoelectric element expands and contracts; a compression component connected to the base portion and the action portion, respectively, for compressing the piezoelectric element along the first long side direction; as well as a polishing portion provided on a surface of the action portion opposite to a surface on which the piezoelectric element and the support member are mounted, The first long side direction and the second long side direction intersect at the action portion side, The compression member is not arranged in a space surrounded by the piezoelectric element, the support member, and the base.

16. An actuator comprising: A base, wherein the base is a base plate; a piezoelectric element, one end of which is connected to the mounting surface of the base and extends along the first long side direction; a supporting member, one end of which is mounted on the mounting surface in parallel with the piezoelectric element and extends along a second longitudinal direction intersecting the first longitudinal direction; an action portion connected to the other end of each of the piezoelectric element and the support member, and displaced in a direction different from both the first long side direction and the second long side direction, that is, a displacement direction, as the piezoelectric element expands and contracts; a compression component connected to the base portion and the action portion, respectively, for compressing the piezoelectric element along the first long side direction; as well as a driving unit that supplies voltage or current to the piezoelectric element and the supporting member to drive the piezoelectric element to expand and contract, The first long side direction and the second long side direction intersect at the action portion side, The compression member is not arranged in a space surrounded by the piezoelectric element, the support member, and the base.

17. The actuator according to claim 16, wherein: In an electronic component processing apparatus that processes electronic components, an operating element for processing the electronic components is driven.

18. The actuator according to claim 16, wherein In a measuring device for measuring characteristics of an electronic component, the actuator drives a measuring probe for contacting the electronic component to measure the characteristics.

19. The actuator according to claim 16, wherein: In a measuring device for measuring characteristics of an electronic component, a suction nozzle for sucking the electronic component is driven to bring the electronic component sucked by the suction nozzle into contact with a measurement terminal for measuring the characteristics.

20. The actuator according to claim 16, wherein In an insertion device for inserting electronic components into a carrier tape, electronic components sucked by a suction nozzle for sucking the electronic components are inserted into the carrier tape.

21. A dispenser comprising: a liquid discharge member configured to receive liquid therein and discharge the introduced liquid; a valve that discharges and blocks the liquid from the liquid discharge member; and The actuator of claim 16, wherein the actuator drives the valve.

22. A gas valve comprising: a valve body having an air pressure chamber for introducing pressurized air and an air discharge port leading from the air pressure chamber to the outside; a valve body that operates inside the air pressure chamber to close and open the air exhaust port; and The actuator according to claim 16 is provided in the air pressure chamber and drives the valve body.

23. The displacement amplification mechanism according to any one of claims 1 to 14, characterized in that: The support member is formed integrally with the base.

24. The polishing device according to claim 15, characterized in that The support member is formed integrally with the base.

25. An actuator according to any one of claims 16 to 20, characterized in that The support member is formed integrally with the base.

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