A control method for interaction between a SMIF switch and an automatic transport system, and a SMIF switch

Abstract

The present invention relates to a control method for interaction between a SMIF switch and an automatic conveying system and the SMIF switch, the control method comprising the following steps: adding a DIO communication board in the SMIF switch; connecting an E84 transceiver to a SMIF control board in the SMIF switch through the DIO communication board; forwarding the signal received by the E84 transceiver from the active end to a main device controller through a communication port; the main device controller transmits the feedback signal back to the SMIF controller through the communication port according to the SEMI protocol; and then the SMIF controller transmits the feedback signal to the E84 transceiver through the DIO communication board to complete the E84 communication function. The advantages are: providing a SMIF switch with a docking function, the SMIF switch replaces or assists the main device controller to complete the E84 interactive docking with the automatic conveying system; solving the problem that the existing machine does not have the E84 function or the original manufacturer does not cooperate in upgrading the E84 function.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and more particularly to a control method for interaction between a SMIF switch and an automatic transport system and the SMIF switch. Background Art

[0002] In semiconductor manufacturing plants, as the size of wafers increases, the weight of carriers increases, and the manufacturing process becomes more complicated, there is a trend to introduce automatic handling systems (AMHS) represented by AGV / OHT. In AMHS, equipment and OHV (overhead crane) / AGV use photosensitive (Photo) transponder wireless communication to synchronize the loading and unloading of carriers between the active end (OHV, AGV) and the passive end (equipment). This Photo PI / O communication protocol is based on the E84 standard set by the International Semiconductor Industry Association (SEMI) and regulates the communication control between equipment and OHV / AGV.

[0003] Currently, newly established wafer fabs, whether 8-inch or 12-inch wafer fabs, have begun to introduce OHV / AGV automation systems. Even existing 8-inch wafer fabs that have been in operation for many years have begun to introduce automatic handling systems to improve handling efficiency and save manpower. When introducing new equipment, wafer fabs can purchase or require the original equipment manufacturer to develop equipment with E84 docking system or function;

[0004] Currently, through the interaction of E84 signals, the active end transmission system (OHV / AGV) can automatically, efficiently and safely place the wafer carrier (FOUP / POD) to the passive end equipment loading port. In semiconductor wafer factories, the equipment loading port is generally an 8-inch or 12-inch SMIF loadport. According to the E84 handshake communication protocol established by the International Semiconductor Industry Association (SEMI), during the loading and unloading process, the signal handshake between the active and passive ends must follow the sequence and time of the process specifications, and the system must also monitor in real time. If there is a violation or timeout, an error message must be reported and the handshake must be stopped. If necessary, the carrier transmission action must be stopped to ensure the safety of personnel and goods.

[0005] like Figure 3As shown in the figure, the standard practice is that the passive E84 transceiver is directly connected to the controller of the main device, and the main device controller completes the signal interaction with the transmission system (OHT / AGV). The SEMI standard strictly regulates the order and time of the interaction; however, many wafer fabs will purchase idle equipment from foreign production lines and migrate them in. In addition, most of the existing machines in the factory do not have the E84 function or the original manufacturers do not cooperate in upgrading the E84 function, and even the newly purchased machines themselves do not have the E84 function, etc., which results in the main device controller being unable to directly connect to the E84 transceiver.

[0006] The preceding description is intended to provide general background information and does not necessarily constitute prior art. Summary of the invention

[0007] The object of the present invention is to provide a control method for interaction between a SMIF opener and an automatic handling system and a SMIF opener. When the main device does not have the E84 function, the SMIF opener is used to replace or assist in completing the E84 rendezvous and docking with the automatic handling system.

[0008] The present invention provides a control method for interaction between a SMIF switch and an automatic handling system, comprising the following steps:

[0009] S1: Add a DIO communication board in the SMIF switch;

[0010] S2: The E84 transceiver is connected to the SMIF control board in the SMIF switch through the DIO communication board;

[0011] S3: The SMIF control board forwards the signal received by the E84 transceiver from the active end to the main device controller through the communication port;

[0012] S4: The main device controller transmits the feedback signal back to the SMIF controller through the communication port according to the SEMI protocol;

[0013] S5: The SMIF controller then transmits the data to the E84 transceiver through the DIO communication board to complete the E84 communication function.

[0014] Furthermore, the communication port in step S3 is RS-232 or TCP / IP.

[0015] Furthermore, the control method for the interaction between the SMIF opener and the automatic handling system also includes:

[0016] S11: Add an E84 control board to the SMIF switch, and connect the E84 transceiver to the E84 control board via a DB25 interface;

[0017] S12: The E84 control board is connected to the SMIF control board in the SMIF switch through the DIO signal, and the state of the E84 control board is transmitted to the SMIF controller through the PIO signal;

[0018] S13: The SMIF controller then transmits the E84 status to the main device controller through the communication port;

[0019] S14: The automatic transport system receives the instruction and moves to the designated SMIF opening and closing position where materials need to be loaded and unloaded, and docks with the passive end E84;

[0020] S15: After the E84 control board obtains the correct state of the wafer carrier on the SMIF and the safety interlock condition of the SMIF machine from the SMIF control board through the PIO signal, the E84 controller begins to perform signal interaction with the active end according to the timing of the SEMI standard specification;

[0021] S16: The logic of the passive end signal processing is placed in the E84 control board, and the E84 control board completes the processing of the active end E84 signal interaction;

[0022] S17: At the same time, the E84 communication status is uploaded to the SMIF control board through the DIO ready / busy / error signal;

[0023] S18: After the E84 signal interaction is successfully completed, the automatic transport system completes the loading and unloading of the wafer box on the SMIF;

[0024] S19: The E84 control board notifies the SMIF controller with a ready signal, completing the entire process of the handshake communication protocol for E84 material transmission.

[0025] Furthermore, the E84 control board is an independent control board capable of processing the E84 handshake communication protocol.

[0026] Furthermore, the step S13 also includes directly transmitting the E84 control board status to the main device controller via a DIO signal.

[0027] Furthermore, the automatic transport system is an OHV or an AGV.

[0028] The present invention also provides a SMIF opener and closeer, and the interactive connection between the SMIF opener and closeer and the automatic transport system is realized through the control method for the interaction between the SMIF opener and closeer and the automatic transport system.

[0029] Furthermore, the SMIF opener and closeer comprises a DIO communication board and a SMIF control board, and the DIO communication board and the SMIF control board are installed in the SMIF opener and closeer; the DIO communication board is connected to the SMIF control board via a PIO board of the SMIF control board.

[0030] Furthermore, the SMIF switch also includes an E84 control board, and the E84 control board is connected to the SMIF control board via a PIO board of the SMIF control board, and the state of the E84 control board is transmitted to the SMIF control board via a DIO signal.

[0031] The control method for the interaction between the SMIF opener and the automatic transport system provided by the present invention provides a SMIF opener with a docking function, and the SMIF opener replaces or assists the main equipment controller to complete the E84 interactive docking with the automatic transport system; it solves the problem that the existing machine does not have the E84 function or the original manufacturer does not cooperate in upgrading the E84 function. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 A flowchart of a control method for interaction between a SMIF opener and a automatic transport system provided in Embodiment 1 of the present invention.

[0033] Figure 2 A flowchart of a control method for interaction between a SMIF opener and a automatic handling system provided in Embodiment 2 of the present invention.

[0034] Figure 3 It is a schematic diagram of the signal interaction module between the controller of the main device and the E84 transceiver in the prior art.

[0035] Figure 4 This is a module schematic diagram of the SMIF switch provided in Example 1 of the present invention.

[0036] Figure 5 A schematic diagram of a module of a SMIF switch provided in Embodiment 2 of the present invention. DETAILED DESCRIPTION

[0037] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0038] The terms "first", "second", "third", "fourth" and the like in the description and claims of the present invention are used to distinguish similar objects and are not necessarily used to describe a particular order or sequence.

[0039] Example 1

[0040] Figure 1 This is a flow chart of the control method for the interaction between the SMIF opening and closing device and the automatic handling system provided in Example 1 of the present invention. Figure 1 The control method for interaction between a SMIF opener and an automatic handling system provided by an embodiment of the present invention comprises the following steps:

[0041] S1: Add a DIO communication board in the SMIF switch;

[0042] S2: The E84 transceiver is connected to the SMIF control board in the SMIF switch through the DIO communication board;

[0043] S3: The SMIF control board forwards the signal received by the E84 transceiver from the active end to the main device controller through the communication port (RS-232 or TCP / IP);

[0044] S4: The main device controller transmits the feedback signal back to the SMIF controller through the communication port according to the SEMI protocol;

[0045] S5: The SMIF controller then transmits the data to the E84 transceiver through the DIO communication board to complete the E84 communication function.

[0046] Figure 4 This is a schematic diagram of the module of the SMIF switch provided in Example 1 of the present invention. Figure 4 The embodiment of the present invention further provides a SMIF opener and closeer, and the interactive connection between the SMIF opener and closeer and the automatic handling system is realized through the control method for the interaction between the SMIF opener and closeer and the automatic handling system.

[0047] Specifically, the SMIF opener and closeer includes a DIO communication board (E84 Extend Board) and a SMIF control board. The DIO communication board (E84 Extend Board) and the SMIF control board are installed in the SMIF opener and closeer; the DIO communication board is connected to the SMIF control board through the PIO board of the SMIF control board.

[0048] It should be noted that the E84 docking system is composed of an active end E84 transceiver with a robot arm, a passive end E84 transceiver and a corresponding control system in pairs; the main device end that receives the material is the passive end. This embodiment is for the main device controller that cannot connect to the E84 transceiver, but has the interactive ability to process E84 signals.

[0049] The present invention provides a control method for the interaction between a SMIF switch and an automatic transport system, and provides a SMIF switch with a docking function. A main device controller can process E84 signals, but cannot connect to an E84 transceiver. The SMIF switch assists the main device controller to complete the E84 interactive docking with the automatic transport system. The problem that the existing machine does not have the E84 function or the original manufacturer does not cooperate in upgrading the E84 function is solved.

[0050] Example 2

[0051] The control method for the interaction between the SMIF switch and the automatic transport system provided in this embodiment is designed for a host device that can neither connect to the E84 transceiver nor process the interaction of the E84 signal.

[0052] Figure 2 This is a flow chart of a control method for interaction between a SMIF opening and closing device and an automatic transport system provided in Embodiment 2 of the present invention. Figure 2 The control method for interaction between the SMIF opener and the automatic transport system provided by the embodiment of the present invention also includes:

[0053] S11: Add an E84 COMMBoard to the SMIF switch, and connect the E84 transceiver to the E84 COMMBoard via a DB25 interface.

[0054] S12: The E84 control board is connected to the SMIF control board in the SMIF switch through the DIO signal, and the state of the E84 control board is transmitted to the SMIF control board through the DIO signal;

[0055] S13: The SMIF control board then transmits the E84 status to the main device controller through the communication port;

[0056] S14: The automatic transport system receives the instruction and moves to the designated SMIF opening and closing position where materials need to be loaded and unloaded, and docks with the passive end E84;

[0057] S15: After the E84 control board obtains the correct state of the wafer carrier on the SMIF and the safety interlock condition of the SMIF machine from the SMIF control board through the DIO signal, the E84 controller begins to perform signal interaction with the active end according to the timing of the SEMI standard specification;

[0058] S16: The logic of the passive end signal processing is placed in the E84 control board, and the E84 control board completes the processing of the active end E84 signal interaction;

[0059] S17: At the same time, the E84 communication status is uploaded to the SMIF control board through DIO ready / busy / error signals;

[0060] S18: After the E84 signal interaction is successfully completed, the automatic transport system completes the loading and unloading of the wafer box on the SMIF;

[0061] S19: The E84 control board notifies the SMIF control board with a ready signal, completing the entire process of the handshake communication protocol for E84 material transmission.

[0062] It should be noted that the E84 control board is an independent control board capable of processing the E84 handshake communication protocol; in step S13, the E84 control board can also directly transmit the E84 control board status to the main equipment controller through the DIO signal; the automatic transport system is an OHV or AGV.

[0063] Figure 5 This is a schematic diagram of a module of a SMIF switch provided by Embodiment 2 of the present invention. Figure 5 The embodiment of the present invention further provides a SMIF opener and closeer, and the interactive connection between the SMIF opener and closeer and the automatic handling system is realized through the control method of the interaction between the SMIF opener and closeer and the automatic handling system.

[0064] Specifically, the SMIF switch also includes an E84 control board, which is connected to the SMIF control board in the SMIF switch through a DIO signal, and transmits the state of the E84 control board to the SMIF control board through the DIO signal. The SMIF switch replaces the main device controller to complete the E84 interactive docking with the automatic transport system; the problem that the existing machine does not have the E84 function or the original manufacturer does not cooperate to upgrade the E84 function is solved.

[0065] Based on the above description, it can be seen that the advantages of the present invention are:

[0066] 1. The control method for the interaction between the SMIF opener and the automatic transport system provided by the present invention provides a SMIF opener with a docking function, and the SMIF opener replaces or assists the main equipment controller to complete the E84 interactive docking with the automatic transport system; it solves the problem that the existing machine does not have the E84 function or the original manufacturer does not cooperate in upgrading the E84 function.

[0067] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A control method for interaction between a SMIF switch and an automatic handling system, characterized in that: The following steps are involved: S1: Add a DIO communication board in the SMIF switch; S2: The E84 transceiver is connected to the SMIF control board in the SMIF switch through the DIO communication board; S3: The SMIF control board forwards the signal received by the E84 transceiver from the active end to the main device controller through the communication port; S4: The main device controller transmits the feedback signal back to the SMIF controller through the communication port according to the SEMI protocol; S5: The SMIF controller then transmits the data to the E84 transceiver through the DIO communication board to complete the E84 communication function.

2. The control method for interaction between a SMIF switch and an automatic handling system according to claim 1, characterized in that: The communication port in step S3 is RS-232 or TCP / IP.

3. A control method for interaction between a SMIF switch and an automatic handling system, characterized in that: The following steps are involved: S11: Add an E84 control board to the SMIF switch, and connect the E84 transceiver to the E84 control board via a DB25 interface; S12: The E84 control board is connected to the SMIF control board in the SMIF switch through the DIO signal, and the state of the E84 control board is transmitted to the SMIF controller through the PIO signal; S13: The SMIF controller then transmits the E84 status to the main device controller through the communication port; S14: The automatic transport system receives the instruction and moves to the designated SMIF opening and closing position where materials need to be loaded and unloaded, and docks with the passive end E84; S15: After the E84 control board obtains the correct state of the wafer carrier on the SMIF and the safety interlock condition of the SMIF machine from the SMIF control board through the PIO signal, the E84 controller begins to perform signal interaction with the active end according to the timing of the SEMI standard specification; S16: The logic of the passive end signal processing is placed in the E84 control board, and the E84 control board completes the processing of the active end E84 signal interaction; S17: At the same time, the E84 communication status is uploaded to the SMIF control board through the DIO ready / busy / error signal; S18: After the E84 signal interaction is successfully completed, the automatic transport system completes the loading and unloading of the wafer box on the SMIF; S19: The E84 control board notifies the SMIF controller with a ready signal, completing the entire process of the handshake communication protocol for E84 material transmission.

4. The control method for interaction between a SMIF switch and an automatic handling system according to claim 3, characterized in that: The E84 control board is an independent control board capable of processing the E84 handshake communication protocol.

5. The control method for interaction between a SMIF switch and an automatic handling system according to claim 3, characterized in that: The step S13 also includes directly transmitting the E84 control board status to the main device controller via a DIO signal.

6. The control method for interaction between a SMIF switch and an automatic handling system according to claim 3, characterized in that: The automatic transport system is an OHV or an AGV.

7. A SMIF switch, characterized in that: The interactive connection between the SMIF opener and the automatic handling system is achieved by the control method for the interaction between the SMIF opener and the automatic handling system as described in any one of claims 1 to 6.

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