A symmetrical metasurface optical device

By designing symmetric nanopillar arrangements in metasurface optics, the problem that conventional metasurface optics cannot eliminate asymmetric aberrations is solved, and a better imaging effect is achieved.

CN114966915BActive Publication Date: 2025-04-01SHPHOTONICS LTD
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Patent Information

Application Number
CN202210579614.4
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-05-25
Publication Date
2025-04-01
Estimated Expiration
2042-05-25

AI Technical Summary

Technical Problem

Conventional metasurface optics cannot eliminate asymmetric aberrations, resulting in unsatisfactory imaging results.

Method used

A symmetrical metasurface optical device is designed, and the symmetric center of the nanopillars does not coincide with the center of the substrate. Through the arrangement of non-uniform or uniformly symmetrically distributed nanopillars, the optical properties of the optical device perpendicular to the axial direction are changed, thereby eliminating asymmetric aberrations.

Benefits of technology

Through this design, asymmetric aberrations can be effectively eliminated and the imaging quality of optical devices can be improved.

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Abstract

The embodiment of the present application discloses a symmetrical metasurface optical device, which includes a substrate and a plurality of nanocolumns symmetrically arranged on the end face of the substrate, wherein the optical properties of the plurality of nanocolumns are different. The arrangement and distribution of the nanocolumns conform to the following rules: when the nanocolumns with the same optical properties in the plurality of nanocolumns are uniformly and symmetrically arranged, the symmetry centers of the plurality of nanocolumns do not coincide with the center of the substrate; when the symmetry centers of the plurality of nanocolumns coincide with the center of the substrate, the nanocolumns with the same optical properties in the plurality of nanocolumns are non-uniformly and symmetrically distributed. The nanocolumns are arranged on the substrate according to the rules, and then the incident light can be coupled into the symmetrical metasurface optical device. At the same time, the symmetrical metasurface optical device can be used as an asymmetric optical waveguide to change the optical properties of the symmetrical metasurface optical device perpendicular to the axial direction, thereby eliminating asymmetric aberrations.
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Description

Technical Field

[0001] The embodiments of the present application relate to the field of optical technology, and in particular to an eccentrically symmetrical metasurface optical device. Background Art

[0002] The imaging principle is that an optical device (such as a lens) performs a series of processing on the light emitted by the original object, and converges the processed light to obtain the image of the original object. However, it is difficult to achieve the ideal optical processing properties when manufacturing optical devices, so there is a difference between the image of the processed light and the actual image of the original object. This difference is called "aberration" in the field of optics. Aberrations include symmetrical aberrations and asymmetrical aberrations.

[0003] A common optical device is a metasurface device. A metasurface structure refers to a type of optical material composed of nanopillars that can achieve performance that traditional optical materials cannot achieve. In order to eliminate the aberration of the metasurface device or other optical devices in the system, a commonly used metasurface device structure is that the nanopillars of the metasurface device are symmetrical based on polar coordinates, and the center of the nanopillar arrangement structure coincides with the center of the device.

[0004] Symmetrical aberrations are generally eliminated by changing the axial optical properties of the optical device, while asymmetric aberrations need to be eliminated by changing the optical properties perpendicular to the axial direction of the optical device. The polar-symmetrical structure of the nanocolumn, as a symmetrical optical waveguide, only changes the axial optical properties but does not change the optical properties perpendicular to the axial direction. Therefore, asymmetric aberrations cannot be eliminated. Summary of the invention

[0005] The embodiments of the present application provide a symmetrical metasurface optical device, which can solve the problem that conventional metasurface optical devices cannot eliminate asymmetric aberrations.

[0006] To solve the above technical problems, the embodiments of the present invention provide the following technical solutions:

[0007] A symmetrical metasurface optical device comprises: a substrate and a plurality of nanorods symmetrically arranged on an end surface of the substrate, wherein the plurality of nanorods have different optical properties;

[0008] When the symmetry centers of the plurality of nanorods coincide with the center of the substrate, the nanorods with the same optical properties in the plurality of nanorods are distributed non-uniformly and symmetrically; or,

[0009] When the nanocolumns with the same optical properties in the plurality of nanocolumns are arranged uniformly and symmetrically, the symmetry centers of the plurality of nanocolumns do not coincide with the center of the substrate.

[0010] In some optional embodiments, when the nanocolumns with the same optical properties among the multiple nanocolumns are uniformly and symmetrically arranged, the symmetry centers of the multiple nanocolumns do not coincide with the center of the substrate, including: the multiple nanocolumns are arranged into at least two symmetric regions, wherein each of the at least two symmetric regions includes a symmetry center.

[0011] In some optional embodiments, when the nanocolumns with the same optical properties among the multiple nanocolumns are uniformly and symmetrically arranged, the symmetry centers of the multiple nanocolumns do not coincide with the center of the substrate, including: the nanocolumns with the same optical properties among the multiple nanocolumns are periodically arranged based on polar coordinates on the end surface of the substrate, and the origin of the polar coordinates is the symmetry center of the multiple nanocolumn arrangement structure; wherein the periodic arrangement refers to arrangement according to preset arrangement rules, and the preset arrangement rules include corresponding to each nano queue, the number of nanocolumns with the same optical properties in the queue, the positions of nanocolumns with different optical properties, and the distance between adjacent nanocolumns.

[0012] In some optional embodiments, when the nanocolumns with the same optical properties among the multiple nanocolumns are uniformly and symmetrically arranged, the symmetry centers of the multiple nanocolumns do not coincide with the center of the substrate, including: arranging the multiple nanocolumns in mutually perpendicular row and column periods on the end surface of the substrate.

[0013] In some optional embodiments, the cross-sectional shape of any nano-pillar of the plurality of nano-pillars includes any one of the following: circle, square, star, ring, pentagon and hexagon.

[0014] In some optional embodiments, the plurality of nanorods may be made of at least two materials, and at least one of the dispersion coefficient, refractive index and absorption coefficient of the at least two materials is different.

[0015] In some optional embodiments, the material of any nanocolumn in a first part of the plurality of nanocolumns is the same material, and the material of any nanocolumn in a second part of the plurality of nanocolumns is different from the first material.

[0016] In some optional embodiments, when the symmetry center of the multiple nanocolumns coincides with the center of the substrate, the non-uniform symmetrical arrangement of the nanocolumns with the same optical properties among the multiple nanocolumns includes: the nanocolumns with the same optical properties among the multiple nanocolumns are vortex-symmetrical based on the symmetry center, and the nanocolumns with different optical properties among the multiple nanocolumns are adjacent in the vortex-symmetrical structure.

[0017] In order to solve the problems existing in conventional metasurface optical devices, the present application example proposes a symmetrical metasurface optical device, which includes a substrate and a plurality of nanocolumns symmetrically arranged on the end face of the substrate, wherein the optical properties of the plurality of nanocolumns are different. In this scheme, the arrangement and distribution of the nanocolumns conform to the following rules: when the nanocolumns with the same optical properties in the plurality of nanocolumns are uniformly and symmetrically arranged, the symmetry center of the plurality of nanocolumns does not coincide with the center of the substrate; when the symmetry center of the plurality of nanocolumns coincides with the center of the substrate, the nanocolumns with the same optical properties in the plurality of nanocolumns are non-uniformly and symmetrically distributed. The nanocolumns are arranged on the substrate according to the rules, and then the incident light can be coupled into the symmetrical metasurface optical device. At the same time, the symmetrical metasurface optical device can be used as an asymmetric optical waveguide to change the optical properties of the symmetrical metasurface optical device perpendicular to the axial direction, thereby eliminating asymmetric aberrations. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solution of the present application, the drawings required for use in the embodiments are briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0019] Figure 1 is a schematic diagram of the structure of a symmetrical metasurface optical device shown in an embodiment of the present invention;

[0020] Figure 2 is a side schematic diagram of a super surface structure shown in an embodiment of the present invention;

[0021] Figure 3 is a schematic diagram of the polar coordinate periodic arrangement distribution of nanorods shown in an embodiment of the present invention;

[0022] Figure 4 Schematic diagram of nanocolumn vortex distribution shown in an embodiment of the present invention.

[0023] Figures 1 to 4 The components indicated by the numbers in the figure are: 1 the center of the substrate, 2 the symmetry center of the plurality of nanorods, 3 the substrate, 4 the nanorods, 5 the origin of the polar coordinates. DETAILED DESCRIPTION

[0024] The technical solution of the embodiment of the present application will be described below in conjunction with the drawings in the embodiment of the present application.

[0025] The terms used in the following embodiments of the present application are only for the purpose of describing specific embodiments, and are not intended to be used as limitations to the present application. As used in the specification and the appended claims of the present application, the singular expressions "one", "a kind of", "described", "above", "the" and "this" are intended to also include plural expressions, unless there is a clear contrary indication in the context. It should also be understood that although the terms first, second, etc. may be used to describe a certain class of objects in the following embodiments, the objects should not be limited to these terms. These terms are only used to distinguish the specific objects of this class of objects. The same is true for other classes of objects that may be described using the terms first, second, etc. in the following embodiments, which will not be repeated here.

[0026] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, an embodiment of the present invention proposes a symmetrical metasurface optical device, comprising: a substrate 3 and a plurality of nanopillars 4 symmetrically arranged on the end face of the substrate, wherein the optical properties of the plurality of nanopillars 4 are different; wherein the symmetry center of the plurality of nanopillars refers to the symmetry center of the nanopillar structure region, and the center 1 of the substrate is the center of the symmetrical metasurface optical device. When the symmetry center of the nanopillar structure region coincides with the center 1 of the substrate, the nanopillars with the same optical properties in the plurality of nanopillars 4 are non-uniformly symmetrically distributed; or, when the nanopillars with the same optical properties in the plurality of nanopillars 4 are uniformly symmetrically arranged, the symmetry center of the nanopillar structure region does not coincide with the center 1 of the substrate.

[0027] In this embodiment, the material of the substrate 3 is usually a wafer, but the material of the substrate 3 includes but is not limited to the wafer in this embodiment, and may also be other materials. A plurality of nanocolumns are arranged on the end face of the substrate according to a preset array. Since the difference in the optical properties of the nanocolumns mainly depends on the shape and material of the column, etc., through different materials, positions, shapes, periods, arrangements, heights, etc. of the nanocolumns, an arrangement effect of non-uniform symmetrical distribution or uniform symmetrical distribution of the plurality of nanocolumns can be achieved.

[0028] It can be seen that by adopting the present implementation method, a symmetrical metasurface optical device is provided, which includes a substrate and a plurality of nanocolumns symmetrically arranged on the end face of the substrate. The nanocolumns are arranged on the substrate according to preset rules, so that the incident light can be coupled into the symmetrical metasurface optical device. At the same time, the symmetrical metasurface optical device can be used as an asymmetric optical waveguide to change the optical properties of the symmetrical metasurface optical device perpendicular to the axial direction, thereby eliminating asymmetric aberrations.

[0029] In some embodiments of the present invention, when nanocolumns with the same optical properties in a plurality of nanocolumns 4 are uniformly and symmetrically arranged, the symmetry centers of the plurality of nanocolumns 4 do not coincide with the center of the substrate 3, including: the plurality of nanocolumns are arranged into at least two symmetric regions, wherein each of the at least two symmetric regions includes a symmetry center.

[0030] In this embodiment, the nanocolumns with the same optical properties in the plurality of nanocolumns 4 are uniformly and symmetrically arranged, and the situation that the symmetry center of the nanocolumn structure area does not coincide with the center 1 of the substrate includes the first situation: the plurality of nanocolumns on the end surface of the substrate are arranged in two symmetric areas through their different materials, positions, shapes, periods, arrangements, heights, etc., each symmetric area has a symmetry center, and at least one of the two symmetry centers does not coincide with the center of the substrate. Of course, the number of symmetric areas of the arrangement of the nanocolumns on the end surface of the substrate may not be 2, and may be greater than 2, and at least one of these symmetry centers does not coincide with the center 1 of the substrate.

[0031] In some embodiments of the present invention, when nanocolumns with the same optical properties among multiple nanocolumns are uniformly and symmetrically arranged, the symmetry centers of the multiple nanocolumns 4 do not coincide with the center of the substrate, including: nanocolumns with the same optical properties among multiple nanocolumns are periodically arranged on the end face of the substrate 3 based on polar coordinates, and the origin 5 of the polar coordinates is the symmetry center of the multiple nanocolumn arrangement structure; wherein, periodic arrangement refers to arrangement according to preset arrangement rules, and the preset arrangement rules include corresponding to each nano queue, the number of nanocolumns with the same optical properties in the queue, the positions of nanocolumns with different optical properties, and the distance between adjacent nanocolumns.

[0032] In this embodiment, the nanocolumns with the same optical properties in the plurality of nanocolumns 4 are arranged uniformly and symmetrically, and the situation where the symmetry center of the nanocolumn structure area does not coincide with the center 1 of the substrate includes the second situation: by calculating the number of nanocolumns with the same optical properties, the positions of nanocolumns with different optical properties, and the spacing between adjacent nanocolumns, the plurality of nanocolumns are arranged according to the polar coordinate periodicity, such as Figure 3 , and the polar coordinate origin 5 is the center of the polar coordinate periodic arrangement area of ​​the nanorods, and does not coincide with the center 1 of the substrate.

[0033] In some embodiments of the present invention, when nanocolumns with the same optical properties in a plurality of nanocolumns are arranged uniformly and symmetrically, the symmetry centers of the plurality of nanocolumns do not coincide with the center of the substrate, including: arranging the plurality of nanocolumns on the end surface of the substrate in rows and columns that are perpendicular to each other.

[0034] In this embodiment, nanocolumns with the same optical properties in multiple nanocolumns 4 are uniformly and symmetrically arranged, and the situation where the center of symmetry of the nanocolumn structure area does not coincide with the center 1 of the substrate includes a third situation: by calculating the number of nanocolumns with the same optical properties, the positions of nanocolumns with different optical properties and the spacing between adjacent nanocolumns, multiple nanocolumns are arranged in rows and columns that are perpendicular to each other on the end surface of the substrate.

[0035] Of course, the nanocolumns with the same optical properties in the plurality of nanocolumns 4 are evenly and symmetrically arranged, and the situation where the symmetry center of the nanocolumn structure region does not coincide with the center 1 of the substrate is not limited to the above three situations, and there may be other situations.

[0036] In some embodiments of the present invention, the cross-sectional shape of any nanorod of the plurality of nanorods includes any one of the following: circle, square, star, ring, pentagon and hexagon.

[0037] In this embodiment, the cross-sectional shapes of the plurality of nano-pillars are circular, square and star-shaped. Of course, the shape of the nano-pillars is not limited to the shape in this embodiment, but may be other shapes.

[0038] In some embodiments of the present invention, the materials of the plurality of nanorods include at least two materials, and at least one of the dispersion coefficient, the refractive index and the absorption coefficient of the at least two materials is different.

[0039] In some embodiments of the present invention, the material of any nanocolumn in the first part of the plurality of nanocolumns is the same material, and the material of any nanocolumn in the second part of the plurality of nanocolumns is different from the first material.

[0040] In this embodiment, the materials of the plurality of nanocolumns are of two kinds, and the dispersion coefficients, refractive indices and absorption coefficients of the two materials are different. The first part of nanocolumns includes at least one nanocolumn, and the specific number should be determined according to the functional design of the metasurface optical device; each nanocolumn in the first part of nanocolumns is made of the same material; the material of the nanocolumns in the second part is different from the material of the nanocolumns in the first part. Of course, the material types of the nanocolumns can be more than two, and at least two of the materials of these nanocolumns have different optical properties, and the optical properties are different as long as at least one of the parameters such as the dispersion coefficient, refractive index and absorption coefficient in the embodiment is different.

[0041] In some embodiments of the present invention, when the symmetry center of multiple nanocolumns 4 coincides with the center 1 of the substrate, the non-uniform symmetrical arrangement of nanocolumns with the same optical properties in the multiple nanocolumns includes: the nanocolumns with the same optical properties in the multiple nanocolumns are vortex-symmetrical based on the symmetry center, and the nanocolumns with different optical properties in the multiple nanocolumns are adjacent in the vortex-symmetrical structure.

[0042] In this embodiment, the symmetry center of the nanocolumn structure region coincides with the center 1 of the substrate, and the nanocolumns with the same optical properties in the plurality of nanocolumns 4 are arranged in an uneven and symmetrical manner, including: Figure 4 The vortex symmetry shown is non-uniformly distributed, the nanopillars with the same optical properties are arranged in a vortex symmetric manner, and the nanopillars with different optical properties are arranged adjacent to each other in the vortex symmetric structure, and the center of the vortex symmetry coincides with the center 1 of the substrate.

[0043] In summary, a symmetrical metasurface optical device with the structure described in the embodiment of the present application is adopted, in which the nanocolumns are arranged on the substrate of the device according to preset rules, so that the incident light can be coupled into the symmetrical metasurface optical device. At the same time, the symmetrical metasurface optical device can be used as an asymmetric optical waveguide to change the optical properties of the symmetrical metasurface optical device perpendicular to the axial direction, thereby eliminating asymmetric aberrations.

[0044] Although the optional embodiments of the present application have been described, those skilled in the art, once informed of the basic creative concept, may make additional changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiment and all changes and modifications falling within the scope of the present application.

[0045] The specific implementation methods described above further illustrate the purpose, technical solutions and beneficial effects of the present application in detail. It should be understood that the above description is only the specific implementation method of the present application and is not intended to limit the scope of protection of the present application. Any modifications, equivalent substitutions, improvements, etc. made on the basis of the technical solutions of the present application should be included in the scope of protection of the present invention.

Claims

1. A symmetrical metasurface optical device, characterized in that: The symmetrical metasurface optical device comprises: a substrate and a plurality of nanorods symmetrically arranged on an end surface of the substrate, wherein the plurality of nanorods have different optical properties; When the nanocolumns with the same optical properties among the plurality of nanocolumns are arranged uniformly and symmetrically, the symmetry centers of the plurality of nanocolumns do not coincide with the center of the substrate; Symmetrical metasurface optical devices can be used as asymmetric optical waveguides to change the optical properties of symmetric metasurface optical devices perpendicular to the axis. Among them, the symmetry center of multiple nanocolumns refers to the symmetry center of the nanocolumn structure area, and the center of the substrate is the center of the symmetrical metasurface optical device.

2. The symmetrical metasurface optical device according to claim 1, characterized in that: When the nanocolumns with the same optical properties in the multiple nanocolumns are uniformly and symmetrically arranged, the symmetry centers of the multiple nanocolumns do not coincide with the center of the substrate, including: the multiple nanocolumns are arranged into at least two symmetric regions, wherein each of the at least two symmetric regions includes a symmetry center.

3. The symmetrical metasurface optical device according to claim 1, characterized in that: When the nanocolumns with the same optical properties among the plurality of nanocolumns are uniformly and symmetrically arranged, the symmetry centers of the plurality of nanocolumns do not coincide with the center of the substrate, including: the nanocolumns with the same optical properties among the plurality of nanocolumns are periodically arranged on the end surface of the substrate based on polar coordinates, and the origin of the polar coordinates is the symmetry center of the arrangement structure of the plurality of nanocolumns; The periodic arrangement refers to an arrangement according to a preset arrangement rule, wherein the preset arrangement rule includes the number of nanocolumns with the same optical properties in each nanocolumn, the positions of nanocolumns with different optical properties, and the distance between adjacent nanocolumns.

4. The symmetrical metasurface optical device according to claim 1, characterized in that: When the nanocolumns with the same optical properties in the multiple nanocolumns are uniformly and symmetrically arranged, the symmetry centers of the multiple nanocolumns do not coincide with the center of the substrate, including: arranging the multiple nanocolumns on the end surface of the substrate in rows and columns that are perpendicular to each other.

5. The symmetrical metasurface optical device according to claim 1, characterized in that: The cross-sectional shape of any nano-pillar of the plurality of nano-pillars includes any one of the following: circle, square, star, ring, pentagon and hexagon.

6. The symmetrical metasurface optical device according to claim 1, characterized in that: The plurality of nanorods may be made of at least two materials, and at least one of a dispersion coefficient, a refractive index and an absorption coefficient of the at least two materials is different.

7. The symmetrical metasurface optical device according to claim 6, characterized in that: The material of any nano-column in the first part of the plurality of nano-columns is the same material, and the material of any nano-column in the second part of the plurality of nano-columns is different from the first material.