Ion source device and mass spectrometer

Abstract

The present invention relates to an ion source device and a mass spectrometer, wherein the ion source device comprises: a cover plate, the cover plate being used to cover one end of a vacuum chamber; an ion source assembly, one end of the ion source assembly being provided with a first mating portion, the first mating portion being used to position and cooperate with the second mating portion; a support column, one end of the support column being connected to the cover plate, and the ion source assembly being slidably connected to the support column; a reset member, the reset member being provided between the cover plate and the ion source assembly, and the ion source assembly being reset and cooperated with the cover plate through the reset member. The above-mentioned ion source device is easy to install due to the positioning function of the first mating portion and the second mating portion, and can improve the positioning convenience of the ion source assembly and the mass analyzer, thereby ensuring the centering and positioning accuracy of the assembly after maintenance, making the ion transmission channel concentric, thereby ensuring the ion transmission efficiency of the mass spectrometer and improving the working reliability after assembly.

Description

Technical Field

[0001] The present invention relates to the technical field of mass spectrometers, and in particular to an ion source device and a mass spectrometer. Background Art

[0002] With the development of testing technology, the mass spectrometer, also known as a mass spectrometer, has emerged. It is an instrument for separating and detecting different isotopes. Based on the principle that charged particles can be deflected in an electromagnetic field, it separates and detects the composition of a substance based on the mass differences of atoms, molecules, or molecular fragments. A mass spectrometer is composed of an ion source, a mass analyzer, and an ion detector. The ion source ionizes the sample molecules under high vacuum conditions. The ionized molecules, due to the excessive energy they receive, further fragment into smaller fragment ions and neutral particles. These particles, accelerated by the electric field, acquire an average kinetic energy of equal energy and enter the mass analyzer. The mass analyzer separates ions of different masses entering simultaneously according to their mass-to-charge ratio (m / e). The separated ions then enter the ion detector, where the ion signals are collected and amplified, processed by a computer, and plotted as a mass spectrum.

[0003] Traditionally, the concentricity of the ion transmission channels between the ion source and the mass analyzer has been critical. Misalignment significantly impacts the mass spectrometer's ion transmission efficiency, significantly reducing the instrument's detection signal. Existing ion source disassembly and assembly procedures are cumbersome, and post-repair assembly accuracy is compromised, impacting mass spectrometer performance. Summary of the Invention

[0004] Based on this, it is necessary to provide an ion source device and a mass spectrometer that can effectively improve the convenience of disassembly and assembly of the ion source, improve the assembly accuracy, and avoid affecting the working performance after maintenance.

[0005] The technical solution is as follows: an ion source device is used to be installed on a vacuum chamber, the vacuum chamber includes a mass analyzer, and the mass analyzer is provided with a second matching part. The ion source device includes: a cover plate, the cover plate is used to cover one end of the vacuum chamber; an ion source assembly, one end of the ion source assembly is provided with a first matching part, the first matching part is used to position and match with the second matching part; a support column, one end of the support column is connected to the cover plate, and the ion source assembly is slidably connected to the support column; a reset member, the reset member is arranged between the cover plate and the ion source assembly, and the ion source assembly is reset and matched with the cover plate through the reset member.

[0006] The above-mentioned ion source device, during the installation process, installs the support column on the cover plate, slides the ion source assembly and the support column into connection, and sets the reset member between the cover plate and the ion source assembly. When the cover plate is set at one end of the vacuum chamber, the first matching part on the ion source assembly is positioned and matched with the second matching part in the mass analyzer, and the reset member is compressed and stored, so that the first matching part and the second matching part are stably connected. During disassembly, the cover plate is removed from the vacuum chamber, and the ion source assembly is removed as a whole, which is conducive to improving the convenience of disassembly and assembly. Due to the positioning function of the first matching part and the second matching part, the installation is convenient, and the positioning convenience of the ion source assembly and the mass analyzer can be improved, thereby ensuring the centering positioning accuracy of the assembly after maintenance, making the ion transmission channel concentric, thereby ensuring the ion transmission efficiency of the mass spectrometer, and improving the working reliability after assembly.

[0007] In one embodiment, there are more than two support columns, and the two or more support columns are spaced apart along the circumference of the ion source assembly, and the ion source assembly is slidably connected to the two or more support columns.

[0008] In one embodiment, the ion source assembly includes a heating module, an ion source chamber, a lens and a positioning ring, the heating module and the lens are respectively arranged on two opposite side surfaces of the ion source chamber, the heating module is arranged close to the cover plate, the positioning ring is connected to the lens, the first matching part is arranged on the positioning ring, and the support column is slidably connected to the outer wall of the ion source chamber.

[0009] In one embodiment, the outer wall of the ion source chamber is provided with more than two mounting feet, the mounting feet are provided with a first through-hole, the mounting feet are sleeved on the support column through the first through-hole, and the number of the mounting feet and the number of the support columns are arranged in a one-to-one correspondence.

[0010] In one embodiment, the ion source device further includes a limiting member, the limiting member is connected to the support column, and the side of the mounting foot facing the cover plate is limitedly engaged with the limiting member.

[0011] In one embodiment, the ion source assembly further includes an insulation sleeve, which is disposed on a side surface of the mounting foot close to the cover plate, the reset member is sleeved on the support column, and one end of the reset member abuts against the insulation sleeve.

[0012] In one embodiment, the thermal insulation sleeve is provided with a second through-hole, the thermal insulation sleeve is sleeved on the support column through the second through-hole, and a gap is formed between the inner wall of the second through-hole and the outer wall of the support column.

[0013] In one embodiment, the thermal insulation sleeve is made of polyetheretherketone resin.

[0014] In one embodiment, the support column is made of polyetheretherketone resin.

[0015] In one embodiment, the first matching portion is a first guiding inclined surface, and the second matching portion is a second guiding inclined surface. The first guiding inclined surface is parallel to the second guiding inclined surface and is in guiding matching.

[0016] A mass spectrometer comprises a vacuum chamber and an ion source device as described in any one of the above.

[0017] In the mass spectrometer described above, during the installation process, the support column is installed on the cover plate, the ion source assembly is slidably connected to the support column, the reset member is arranged between the cover plate and the ion source assembly, and when the cover plate is placed on one end of the vacuum chamber, the first matching portion on the ion source assembly is positioned and matched with the second matching portion in the mass analyzer, and the reset member is compressed and stored, so that the first matching portion and the second matching portion are stably connected. During disassembly, the cover plate is removed from the vacuum chamber, and the ion source assembly is removed as a whole, which is conducive to improving the convenience of disassembly and assembly. Due to the positioning function of the first matching portion and the second matching portion, installation is convenient, and the positioning convenience of the ion source assembly and the mass analyzer can be improved, thereby ensuring the centering positioning accuracy of the assembly after maintenance, making the ion transmission channel concentric, thereby ensuring the ion transmission efficiency of the mass spectrometer and improving the working reliability after assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings constituting a part of this application are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0020] Figure 1 is a schematic diagram of the overall structure of an ion source device described in one embodiment;

[0021] Figure 2 is a schematic structural diagram of an ion source assembly according to an embodiment;

[0022] Figure 3 Schematic diagram of the installation position of the ion source device described in one embodiment;

[0023] Figure 4 Schematic diagram of the structure of the ion source device after installation described in one embodiment.

[0024] Description of reference numerals:

[0025] 100. Ion source device; 110. Cover plate; 120. Ion source assembly; 121. First matching part; 122. Heating module; 123. Ion source chamber; 124. Lens; 125. Positioning ring; 126. Mounting foot; 127. First through-hole; 128. Thermal insulation sleeve; 130. Support column; 140. Reset member; 150. Limit member; 200. Vacuum chamber; 210. Mass analyzer; 220. Fixing cylinder; 221. Second matching part. DETAILED DESCRIPTION

[0026] To make the above-mentioned objects, features, and advantages of the present invention more readily apparent, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings. The following description sets forth numerous specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0027] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0028] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0029] In the present invention, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0030] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0031] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods.

[0032] See also Figure 1 、 Figure 3 and Figure 4 , Figure 1 FIG. 1 shows a schematic diagram of the overall structure of an ion source device 100 according to an embodiment of the present invention. Figure 3 FIG. 1 shows a schematic diagram of the installation position of the ion source device 100 in one embodiment of the present invention. Figure 4The structural diagram after installation of the ion source device 100 in one embodiment of the present invention is shown. An ion source device 100 provided in one embodiment of the present invention is used to be installed on a vacuum chamber 200. The vacuum chamber 200 includes a mass analyzer 210, and the mass analyzer 210 is provided with a second matching portion 221. The ion source device 100 includes: a cover plate 110, an ion source assembly 120, a support column 130 and a reset member 140. The cover plate 110 is used to cover one end of the vacuum chamber 200. For example, one end of the vacuum chamber 200 is provided with a mounting port, and the cover plate 110 is detachably connected to the vacuum chamber 200 and covers the mounting port. One end of the ion source assembly 120 is provided with a first matching portion 121, and the first matching portion 121 is used to position and cooperate with the second matching portion 221. One end of the support column 130 is connected to the cover plate 110, and the ion source assembly 120 is slidably connected to the support column 130. The reset member 140 is disposed between the cover plate 110 and the ion source assembly 120 , and the ion source assembly 120 is reset and matched with the cover plate 110 through the reset member 140 .

[0033] During installation of the ion source device 100, the support column 130 is mounted on the cover plate 110, the ion source assembly 120 is slidably connected to the support column 130, and the reset member 140 is disposed between the cover plate 110 and the ion source assembly 120. When the cover plate 110 is placed on one end of the vacuum chamber, the first mating portion 121 on the ion source assembly 120 is positioned and matched with the second mating portion 221 in the mass analyzer 210, and the reset member 140 is compressed and stored, so that the first mating portion 121 and the second mating portion 221 are stably connected. During disassembly, the cover plate 110 is removed from the vacuum chamber 200, and the ion source assembly 120 is removed as a whole, which is conducive to improving the convenience of disassembly and assembly. Due to the positioning function of the first mating part 121 and the second mating part 221, the installation is convenient, and the positioning convenience of the ion source assembly 120 and the mass analyzer 210 can be improved, thereby ensuring the centering positioning accuracy of the assembly after maintenance, making the ion transmission channel concentric, thereby ensuring the ion transmission efficiency of the mass spectrometer and improving the working reliability after assembly.

[0034] It should be noted that the first matching portion 121 is used for positioning and matching with the second matching portion 221, which should be understood as follows: after the cover 110 is connected to the vacuum chamber 200, the first matching portion 121 contacts the second matching portion 221, and positions the mass analyzer 210 and the ion source assembly 120 so that their relative positions are fixed.

[0035] Specifically, see Figure 3 and Figure 4The vacuum chamber 200 is provided with a fixed cylinder 220, and the mass analyzer 210 is fixed to the inner wall of the vacuum chamber 200 through the fixed cylinder 220. The second matching portion 221 is provided on the inner wall of the fixed cylinder 220. The mass analyzer 210 is a quadrupole mass analyzer 210 or a time-of-flight mass analyzer 210.

[0036] It should also be noted that the resetting cooperation of the ion source assembly 120 and the cover 110 through the resetting member 140 should be understood as follows: in the initial position, the resetting member 140 is not subjected to force, and the ion source assembly 120 is at the farthest position from the cover 110 on the support column 130. When the cover 110 is connected to the vacuum chamber 200, after the first matching portion 121 contacts the second matching portion 221, the mass analyzer 210 is stationary, causing the ion source assembly 120 to move closer to the cover 110, thereby causing the resetting member 140 to deform and accumulate force. When the cover 110 is fully connected to the vacuum chamber 200, the first matching portion 121 and the second matching portion 221 are positioned and matched, and the resetting member 140 releases potential energy after being free from external force, so that the ion source assembly 120 has a tendency to move away from the cover 110, thereby causing the ion source assembly 120 to tightly contact the mass analyzer 210, thereby forming the resetting of the ion source assembly 120.

[0037] In one embodiment, see Figure 1 、 Figure 3 and Figure 4 There are more than two support columns 130. The two or more support columns 130 are spaced apart along the circumference of the ion source assembly 120, and the ion source assembly 120 is slidably connected to the two or more support columns 130. Figure 1 , there are four support columns 130, and the four support columns 130 are evenly arranged along the circumference of the ion source assembly 120. Like this, it is conducive to further improving the connection stability of the ion source and the cover plate 110, and improving the overall structural stability of the ion source device 100. In addition, the four support columns 130 are slidably connected to the ion source and are conducive to ensuring the motion stability of the ion source assembly 120 on the support columns 130, thereby being conducive to further improving the centering accuracy of the ion source assembly 120 and the mass analyzer 210. Of course, the number of support columns 130 can also be other numbers, and the cross-sectional shape of the support columns 130 can also be circular, square, triangular, polygonal or other irregular shapes.

[0038] See also Figure 2 , Figure 2The structural diagram of the ion source assembly 120 in one embodiment of the present invention is shown. In one embodiment, the ion source assembly 120 includes a heating module 122, an ion source chamber 123, a lens 124 and a positioning ring 125. The heating module 122 and the lens 124 are respectively arranged on opposite sides of the ion source chamber 123. The heating module 122 is arranged near the cover plate 110. The positioning ring 125 is connected to the lens 124. The first matching portion 121 is arranged on the positioning ring 125. The support column 130 is slidably connected to the outer wall of the ion source chamber 123. In this way, the heating module 122 is arranged near the cover plate 110 to facilitate the mass analyzer 210 to be away from the heating module 122, thereby reducing heat conduction and improving the thermal insulation effect of the ion source assembly 120. The positioning ring 125 is positioned and matched with the second matching portion 221 on the mass analyzer 210, which is conducive to avoiding the wear of the ion source chamber 123 and the lens 124 after multiple uses, thereby improving the service life of the ion source assembly 120.

[0039] Optionally, the positioning ring 125 may be made of glass, crystal, metal, plastic, ceramic or other materials.

[0040] Specifically, the positioning ring 125 is made of ceramic. For example, the positioning ring 125 is made of alumina ceramic. Alumina ceramic has high mechanical strength and a long lifespan, and its thermal conductivity K is between approximately 0.03 W / (m·k) and 2.00 W / (m·k), significantly lower than the thermal conductivity K of ordinary steel (47 W / (m·k). This helps reduce heat conduction in the positioning ring 125 and improves the thermal insulation performance of the ion source assembly 120. This embodiment only provides one specific material option for the positioning ring 125, but is not intended to be limiting.

[0041] In one embodiment, see Figure 1 and Figure 2 The outer wall of the ion source chamber 123 is provided with two or more mounting feet 126, each of which is provided with a first through-hole 127. The mounting feet 126 are sleeved on the support column 130 through the first through-hole 127. The number of mounting feet 126 and support columns 130 is set in a one-to-one correspondence. Specifically, there are four support columns 130 and four mounting feet 126. In this way, the shaft hole matching method is conducive to ensuring the guiding performance of the support column 130 during the movement of the ion source assembly 120, thereby facilitating smoother movement of the ion source assembly 120. In addition, it is easy to install and has high reliability, which is conducive to improving the assembly convenience of the ion source device 100.

[0042] In one embodiment, see Figure 2The ion source device 100 further includes a stopper 150, which is connected to the support column 130. The side of the mounting foot 126 facing away from the cover plate 110 is engaged with the stopper 150. For example, the stopper 150 is a stopper clasp, which is connected to the end of the support column 130 away from the cover plate 110. In this way, the ion source assembly 120 slides along the support column 130 between the cover plate 110 and the stopper 150. The stopper 150 can prevent the ion source assembly 120 from detaching from the support column 130 when sliding, thereby ensuring the structural stability of the ion source device 100. Of course, the stopper 150 can also be a stopper structure such as a stopper plate, a stopper column, or a stopper rod.

[0043] In one embodiment, see Figure 2 、 Figure 3 and Figure 4 The ion source assembly 120 further includes a thermal insulation sleeve 128, which is disposed on a side of the mounting foot 126 near the cover plate 110. A reset member 140 is sleeved on the support column 130, with one end of the reset member 140 contacting the thermal insulation sleeve 128. As a result, when the heating module 122 generates heat, the thermal insulation provided by the thermal insulation sleeve 128 prevents the reset member 140 from directly contacting the ion source chamber 123, thereby providing thermal insulation and reducing or even preventing heat from being dissipated from the reset member 140, thereby confining most of the heat within the ion source assembly 120.

[0044] Optionally, the thermal insulation sleeve 128 may be made of glass, polymer material, crystal, plastic or other materials.

[0045] Specifically, the material of the thermal insulation sleeve 128 is plastic. For example, the material of the thermal insulation sleeve 128 is polyetheretherketone resin. Polyetheretherketone (PEEK) is a polymer composed of repeating units containing one ketone bond and two ether bonds in the main chain structure, and is a special polymer material. It has physical and chemical properties such as high temperature resistance and chemical corrosion resistance. It is a type of semi-crystalline polymer material that can be used as a high-temperature resistant structural material and electrical insulation material, and can be composited with glass fiber or carbon fiber to prepare reinforced materials. The thermal conductivity K of PEEK is 0.29W / (m·k). As a thermal insulation structure, it is beneficial to reduce the heat conduction of the ion source cavity 123 and improve the thermal insulation performance of the ion source assembly 120. This embodiment only provides a material selection for a thermal insulation sleeve 128, but is not limited to this.

[0046] Optionally, the reset member 140 may be an electronic reset device, a spring, a metal sheet, an elastic rubber or other reset structures.

[0047] Specifically, see Figure 1 、 Figure 3 and Figure 4The reset member 140 is a spring. This provides a simple structure, high reliability, low cost, and ease of use. Furthermore, the contact area with the thermal insulation sleeve 128 is small, which not only ensures a good reset effect but also further reduces heat conduction. This embodiment provides only one specific implementation of the reset member 140, but is not intended to be limiting.

[0048] Optionally, the support column 130 may be made of metal, glass, polymer material, composite material or other material types.

[0049] Specifically, the support column 130 is made of plastic, for example, polyetheretherketone resin. This reduces the amount of heat from the ion source chamber 123 that is conducted from the support column 130 to the cover plate 110 and subsequently diffused into the vacuum chamber 200. This confines the majority of the heat from the heating module 122 within the ion source assembly 120, thereby reducing energy consumption and avoiding issues such as rapid battery drain and excessive heat generation. This embodiment provides only one material option for the support column 130, but is not intended to be limiting.

[0050] In one embodiment, see Figure 2 The thermal insulation sleeve 128 is provided with a second through-hole, through which the thermal insulation sleeve 128 is mounted on the support column 130, with a gap formed between the inner wall of the second through-hole and the outer wall of the support column 130. This allows for linear contact between the thermal insulation sleeve 128 and the support column 130, significantly reducing the contact area compared to surface contact. This further reduces heat conduction, enhances thermal insulation, and thus further reduces energy consumption of the heating module 122.

[0051] Furthermore, thermal insulation sleeves 128 (not shown) are provided at opposite ends of the reset member 140. This further reduces heat conduction, thereby trapping most of the heat from the heating module 122 within the ion source assembly 120, thereby reducing energy consumption and avoiding problems such as rapid battery drain and excessive heat generation.

[0052] Optionally, the first matching portion 121 and the second matching portion 221 may be matched in a manner of shaft-hole plug-in fit, concave-convex snap-fit ​​fit, guided fit through an inclined surface structure, mortise and tenon fit, or other matching manners.

[0053] In one embodiment, see Figure 3 and Figure 4The first matching portion 121 is a first guiding bevel, and the second matching portion 221 is a second guiding bevel. The first guiding bevel is parallel to the second guiding bevel and is in guiding cooperation. In this way, a circle of the first guiding bevel forms a chamfer, so that a truncated cone structure with a diameter smaller than that of the positioning ring 125 is provided on the positioning ring 125, and the second guiding bevel on the inner wall of the fixed cylinder 220 outside the mass analyzer 210 is parallel to the first guiding bevel, so that the cross-sectional area of ​​the barrel mouth of the fixed cylinder 220 is larger than the cross-sectional area inside the cylinder. The diameter of the barrel mouth is the same as the outer diameter of the positioning ring 125, and the inner diameter of the cylinder is the same as the diameter of the end face of the truncated cone structure. Therefore, the truncated cone structure and the fixed cylinder 220 form a guiding cooperation through the guiding bevel, which is conducive to improving the positioning accuracy and cooperation efficiency.

[0054] In one embodiment, see Figure 3 and Figure 4 , a mass spectrometer, the mass spectrometer includes a vacuum chamber 200 and an ion source device 100 of any one of the above items.

[0055] During installation of the mass spectrometer, the support column 130 is mounted on the cover plate 110, the ion source assembly 120 is slidably connected to the support column 130, and the reset member 140 is disposed between the cover plate 110 and the ion source assembly 120. When the cover plate 110 is placed on one end of the vacuum chamber, the first mating portion 121 on the ion source assembly 120 is positioned and matched with the second mating portion 221 in the mass analyzer 210, and the reset member 140 is compressed and stored, thereby stably connecting the first mating portion 121 and the second mating portion 221. During disassembly, the cover plate 110 is removed from the vacuum chamber 200, and the ion source assembly 120 is removed as a whole, which is conducive to improving the convenience of disassembly and assembly. Due to the positioning function of the first mating part 121 and the second mating part 221, the installation is convenient, and the positioning convenience of the ion source assembly 120 and the mass analyzer 210 can be improved, thereby ensuring the centering positioning accuracy of the assembly after maintenance, making the ion transmission channel concentric, thereby ensuring the ion transmission efficiency of the mass spectrometer and improving the working reliability after assembly.

[0056] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0057] The above-described embodiments merely illustrate several implementations of the present invention, and while their descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the patent for this invention shall be determined by the appended claims.

Claims

1. An ion source device, for installation on a vacuum chamber, wherein the vacuum chamber includes a mass analyzer, and the mass analyzer is provided with a second matching portion, characterized in that: The ion source device comprises: A cover plate, the cover plate being used to cover one end of the vacuum chamber; An ion source assembly, wherein one end of the ion source assembly is provided with a first matching portion, the first matching portion is used to position and match with the second matching portion, the first matching portion is a first guiding inclined surface, the second matching portion is a second guiding inclined surface, the first guiding inclined surface is parallel to the second guiding inclined surface and is in guiding matching; a support column, one end of which is connected to the cover plate, and the ion source assembly is slidably connected to the support column; A reset member is provided between the cover plate and the ion source assembly, and the ion source assembly is reset and matched with the cover plate through the reset member.

2. The ion source device according to claim 1, characterized in that There are more than two support columns, which are spaced apart along the circumference of the ion source assembly, and the ion source assembly is slidably connected to the more than two support columns.

3. The ion source device according to claim 2, characterized in that The ion source assembly includes a heating module, an ion source chamber, a lens and a positioning ring. The heating module and the lens are respectively arranged on two opposite side surfaces of the ion source chamber. The heating module is arranged close to the cover plate. The positioning ring is connected to the lens. The first matching part is arranged on the positioning ring. The support column is slidably connected to the outer wall of the ion source chamber.

4. The ion source device according to claim 3, characterized in that The outer wall of the ion source chamber is provided with more than two mounting feet, each of which is provided with a first through-hole. The mounting feet are sleeved on the support column through the first through-hole, and the number of the mounting feet and the number of the support columns are arranged in a one-to-one correspondence.

5. The ion source device according to claim 4, characterized in that The ion source device further includes a limiting member connected to the support column, and the side of the mounting foot facing the cover plate is in position-limiting cooperation with the limiting member.

6. The ion source device according to claim 4, characterized in that: The ion source assembly further includes a heat-insulating sleeve, which is arranged on a side surface of the mounting foot close to the cover plate. The reset member is sleeved on the support column, and one end of the reset member contacts the heat-insulating sleeve.

7. The ion source device according to claim 6, characterized in that The heat-insulating sleeve is provided with a second through-hole, and the heat-insulating sleeve is sleeved on the support column through the second through-hole, and a gap is formed between the inner wall of the second through-hole and the outer wall of the support column.

8. The ion source device according to claim 6, characterized in that The thermal insulation sleeve is made of polyetheretherketone resin.

9. The ion source device according to claim 6, characterized in that: The support column is made of polyetheretherketone resin.

10. A mass spectrometer, characterized in that The mass spectrometer comprises a vacuum chamber and the ion source device according to any one of claims 1 to 9.

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