A high-precision inductive distance measuring sensor

Abstract

The application relates to the technical field of distance measuring sensors, in particular to a high-precision inductive distance measuring sensor, which comprises an aluminum alloy shell, a circuit board fixedly installed in the aluminum alloy shell through a plurality of first screws, an inductive metal head distributedly installed on the circuit board, a sensing target body matched with the inductive metal head to form a capacitor, and a distance measuring assembly connected with the aluminum alloy shell and the circuit board. The high-precision inductive distance measuring sensor has a novel structure, can be copied and arranged in an array mode, can form a multi-point array measurement capacity, and improves the practicability and flexibility of the equipment and the accuracy of equipment inspection.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of distance measuring sensor, and particularly relates to a high-precision inductive distance measuring sensor. BACKGROUND

[0002] The distance measuring sensor is a kind of sensor for measuring the distance from the sensor to the target, and for the near distance high-precision distance measuring scene such as high-precision workpiece surface flatness and defect measurement, the laser distance measuring sensor in the optical distance measuring sensor is mostly used.

[0003] At present, the laser distance measuring sensor calculates the distance according to the transmission speed by measuring the time difference between the laser emission and reception, and has the advantages of high precision and working in dark field environment, but the cost is high, and only single-point distance measuring can be performed, and the measuring environment is easily affected, so the use is very inconvenient, therefore, in view of the above status, it is urgent to develop a high-precision inductive distance measuring sensor to overcome the deficiencies in the current actual application. SUMMARY

[0004] The present application aims to provide a high-precision inductive distance measuring sensor to solve the problems in the background art.

[0005] To achieve the above object, the present application provides the following technical scheme.

[0006] A high-precision inductive distance measuring sensor comprises:

[0007] An aluminum alloy shell;

[0008] A circuit board is fixedly installed in the aluminum alloy shell by a plurality of first screws;

[0009] An inductive metal head is distributed and installed on the circuit board;

[0010] A sensing target body cooperates with the inductive metal head to form a capacitor; and

[0011] A distance measuring assembly is connected with the aluminum alloy shell and the circuit board respectively.

[0012] Compared with the prior art, the present application has the following advantages:

[0013] (1) The fixed electrode substrate of the capacitor in the precise inductive measuring system, i.e. the capacitor output electrode, can be copied and arranged in an array manner to form a multi-point array measuring capability, thereby improving the practicability and flexibility of the equipment and the accuracy of the equipment inspection.

[0014] (2) through the setting of the inductive metal head and sensing target body between the capacitor, design capacitance ranging from millimeter and ten millimeter level, the center frequency of the external circuit resonance MHz and ten MHz, thereby realizing the ultra-high precision measurement of capacitive sensor, can be applied to close-range high-precision ranging application scenarios, such as high-precision workpiece surface flatness and defect measurement. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a high-precision inductive ranging sensor of the present application.

[0016] Figure 2 It is a high-precision inductive ranging sensor of the present application.

[0017] Figure 3 It is a high-precision inductive ranging sensor of the present application.

[0018] Figure 4 It is a high-precision inductive ranging sensor of the present application.

[0019] In the figure: 1 - inductive metal head, 2 - insulation sealing ring, 3 - aluminum alloy shell, 4 - first screw, 5 - circuit board, 6 - cable, 7 - second screw, 8 - aluminum alloy cover plate, 9 - anti-breaking joint, 10 - sensing target body. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0021] The specific implementation of the present application will be described in detail below in conjunction with specific embodiments.

[0022] Please refer to Figures 1-3 The high-precision inductive ranging sensor provided by the embodiments of the present application comprises:

[0023] aluminum alloy shell 3;

[0024] circuit board 5, the circuit board 5 is fixedly installed in the aluminum alloy shell 3 by a plurality of first screws 4;

[0025] inductive metal head 1, the inductive metal head 1 is distributed and installed on the circuit board 5;

[0026] Sensing target body 10, which cooperates with the inductive metal head 1 to form a capacitor; and

[0027] A distance measuring component, which is connected to the aluminum alloy shell 3 and the circuit board 5 respectively.

[0028] In an embodiment of the present application, referring to Figure 3 and Figure 4 , the distance measuring component comprises:

[0029] A break-proof joint 9 on one side of the aluminum alloy shell 3; and

[0030] A cable 6, one end of which penetrates the break-proof joint 9 and is connected to the circuit board 5.

[0031] Referring to Figures 1-4 , the inductive metal head 1 is a set of independent sensing elements, which are fixed pole substrates of capacitors in a precision inductive measurement system, i.e. the capacitor output pole, and the sensing target body 10 is a variable pole of the capacitors in the precision inductive measurement system.

[0032] The sensing elements are made of a material with high insulation coefficient, strength and temperature coefficient, and a high flatness inductive measurement metal substrate is arranged on the basis of the fixed substrate.

[0033] The sensing elements are made of glass or ceramic material, and the inductive measurement metal substrate is made of copper, copper alloy, silver, silver-plated or zirconium oxide material.

[0034] Referring to Figure 3 , an insulating sealing ring 2 is arranged between the inductive metal head 1 and the circuit board 5.

[0035] When the distance measurement is performed, the inductive metal head 1 and the sensing target 10 form a precise inductive measurement system, the inductive metal head 1 is composed of a group of independent metal sensing elements, as the fixed electrode substrate of the capacitor in the precise inductive measurement system, the sensing target 10 is as the variable electrode of the capacitor in the precise inductive measurement system, a standard sensing target is used as a calibration piece to obtain the distance measurement reference, when the surface of the sensing target 10 is measured, according to the capacitance determination formula: C = εS / (4πkd), compared with the calibration piece, the surface defects will cause the distance change, that is, the distance between the variable electrode and the fixed electrode substrate of the capacitor changes, the capacitance of the capacitor changes, by measuring the capacitance change, the distance change can be finally converted, that is, the measurement of the surface distance change of the sensing target 10 is completed, which shows the surface flatness and defects of the target body, and the fixed electrode substrate of the capacitor in the precise inductive measurement system, that is, the capacitor output electrode, can be copied and arranged in an array manner, thereby forming a multi-point array measurement capability, improving the practicability and flexibility of the equipment, and the accuracy of the equipment inspection, and is worth popularizing.

[0036] In an embodiment of the present application, please refer to Figures 1-3 Further comprising: an aluminum alloy cover plate 8, the aluminum alloy cover plate 8 is fixedly connected with the aluminum alloy shell 3 through a plurality of second screws 7, and the aluminum alloy cover plate 8 is also installed in cooperation with the circuit board 5.

[0037] The top surface of the aluminum alloy cover plate 8 is provided with a corresponding mounting hole position in cooperation with the inductive metal head 1, and the top end of the inductive metal head 1 penetrates the mounting hole position and is higher than the top surface of the aluminum alloy cover plate 8.

[0038] In use, the circuit board 5 is installed on the column in the aluminum alloy shell 3 through the first screw 4, at the same time, one side of the aluminum alloy cover plate 8 has a corresponding mounting hole position, so that the inductive metal head 1 can be exposed to a certain height on the aluminum alloy cover plate 8, finally, the aluminum alloy cover plate 8 is installed on the aluminum alloy shell 3 by the second screw 7, so as to realize the protection of each part, when the distance is tested, the inductive metal head 1 is installed on the parallel surface of the measured surface, so that the inductive metal head 1 will generate a capacitance signal corresponding to the distance between the measured surface, the capacitance signal is processed and amplified through the circuit board 5, and then an analog or digital signal is output through the cable 6.

[0039] In an embodiment of the present application, please refer to Figures 1-4 The distance measurement range of the capacitor is millimeter and ten millimeter level.

[0040] The distance measuring capacitor is connected in series to the resonant circuit, and the different distances change the distance d between the two plates of the capacitor, thereby causing the change of the capacitance value, and the change of the capacitance value causes the change of the frequency of the resonant circuit, through the digital processor, the frequency value is captured with high precision, the quantitative relationship between the distance between the two plates of the distance measuring capacitor sensor and the capacitance value and the change of the measured frequency is deduced, and the quantitative relationship between the distance and the frequency is realized, and the capacitor composed of the sensing metal head 1 and the sensing target body 10 has a millimeter and ten millimeter level distance measuring range, and the center resonant frequency of the external circuit is MHz and ten MHz, taking 10mm and a center frequency of 3MHz as an example, the frequency changes from 10mm to just touching, and the corresponding frequency change is 10pf, and the corresponding frequency change amount is 2MHz, so the quantitative relationship is 10mm->2MHz, that is, the resolution of the distance change corresponding to each change of 1Hz is: 10mm / 2MHz=5nm level accuracy, so that the ultra-high precision measurement of the capacitive sensor is realized, and the capacitive sensor can be applied to the near distance high precision distance measuring application scene, such as high precision workpiece surface flatness and defect measurement.

[0041] It should be noted that in the present application, unless otherwise specified and limited, the terms "sliding", "rotating", "fixed", "provided with" and the like should be understood in a broad sense, for example, they can be welded connection, or bolted connection, or integrated; can be mechanical connection, or electrical connection; can be directly connected, or indirectly connected through an intermediate medium; can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0042] In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description manner of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand.

Claims

1. A high-precision inductive distance measuring sensor, characterized in that The high-precision inductive distance measuring sensor comprises: an aluminum alloy shell; a circuit board fixedly installed in the aluminum alloy shell by a plurality of first screws; an inductive metal head distributedly installed on the circuit board; a sensing target body cooperating with the inductive metal head to form a capacitor, the distance measuring range of the capacitor being millimeter and ten millimeter levels; and a distance measuring assembly connected with the aluminum alloy shell and the circuit board respectively; the distance measuring assembly comprises: a break-proof joint located on one side of the aluminum alloy shell; and a cable line, one end of which penetrates through the break-proof joint and is connected with the circuit board; the inductive metal head is a fixed electrode substrate of a capacitor in a precision inductive measuring system, i.e. a capacitor output electrode, and the sensing target body is a variable electrode of the capacitor in the precision inductive measuring system; the sensing element is made of a material with high insulation coefficient, good strength and temperature coefficient as a base material, and a high flatness inductive measuring metal substrate is arranged on the base material; further comprising: an aluminum alloy cover plate fixedly connected with the aluminum alloy shell by a plurality of second screws, and the aluminum alloy cover plate is further installed in cooperation with the circuit board; a corresponding mounting hole is provided on the top surface of the aluminum alloy cover plate in cooperation with the inductive metal head, and the top end of the inductive metal head penetrates through the mounting hole and is higher than the top surface of the aluminum alloy cover plate.

2. The high precision inductive distance measuring sensor according to claim 1, characterized in that The sensing element is made of glass or ceramic material, and the inductive measuring metal substrate is made of copper, copper alloy, silver, silver plating or zirconium oxide material.

3. The high precision inductive distance measuring sensor according to claim 2, characterized in that An insulating sealing ring is arranged between the inductive metal head and the circuit board.

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