A photomask box with a retaining part passing through the wall of the photomask compartment

Abstract

A photomask enclosure includes an outer portion and an inner portion. The outer portion includes a door and a dome, and the inner portion includes a base plate and a cover. One of the base plate or the cover includes a photomask compartment wall extending toward the other of the base plate or the cover. The photomask compartment wall includes one or more retaining features. The door or the dome includes one or more actuating surfaces configured to contact the retaining features. The retaining features are configured to be moved by contact with the actuating surfaces. The retaining features can be in a position configured to secure the photomask within the inner portion of the photomask enclosure when the photomask enclosure is assembled by engaging the base plate with the cover, placing the engaged base plate and the engaged cover within the dome, and securing the door to the dome.

Description

[0001] Cross-referencing related applications

[0002] This application claims the benefit and priority of U.S. Provisional Application No. 62 / 955,619, filed on December 31, 2019, which is incorporated herein by reference in its entirety for all purposes. Technical Field

[0003] This invention generally relates to a photomask case for storing and transporting photomasks. More specifically, the invention is directed to a photomask case including a movable retaining feature that extends through the photomask compartment wall of an inner case for retaining the photomask housed within the inner case. Background Technology

[0004] A photomask case is used for storing, transporting, and handling photomasks, specifically for transporting photomasks to and from processing tools (such as lithography apparatus). For example, a photomask case includes an extreme ultraviolet (EUV) cassette for use with EUV lithography tools. The photomask case reduces or prevents contamination or physical damage to the photomasks contained therein during movement, handling, and processing. A photomask case may include an outer casing and an inner casing located within the outer casing. The inner casing may include a base plate and a cover for housing the photomasks, and the outer casing includes a door and a dome for housing the inner casing. Summary of the Invention

[0005] The present invention relates to a photomask housing comprising a movable retaining feature that extends through the photomask compartment wall of an inner housing for retaining the photomask housed within the inner housing.

[0006] The movable retaining feature allows the photomask to be securely positioned within the photomask housing and is therefore less susceptible to vibration during handling or transport. The retaining feature extending through the inner wall of the photomask compartment of the housing allows the photomask to be properly placed within the housing without interference from security features before the housing is finally closed, and secures the photomask when the housing is closed for transport, storage, or handling.

[0007] In one embodiment, a photomask housing includes an inner portion comprising a cover and a base plate. One of the cover and the base plate includes a photomask compartment wall extending from the cover and the base plate, the photomask compartment wall including one or more retaining features. The photomask housing includes an outer portion comprising a housing dome and a housing door. One of the housing dome and the housing door includes one or more actuating surfaces configured to contact at least one of the one or more retaining features when the cover is engaged with the base plate, the housing dome engaging with the housing door, and the engaged cover and the engaged base plate being within the engaged housing dome and the engaged housing door. When the one or more actuating surfaces contact the one or more retaining features, the retaining features are configured to be positioned such that they contact the photomask when the photomask is located within the engaged cover and the engaged base plate.

[0008] In an embodiment, each of the one or more retaining features may be linearly moved in a direction having a component, the component being an angle ranging from zero degrees to ninety degrees from the plane of the photomask chamber wall.

[0009] In one embodiment, each of the one or more retaining features includes a spring. In another embodiment, when the spring is in a rest position, the retaining feature is located further away from the center of the base plate than when the retaining feature is contacted by one of the one or more actuating surfaces.

[0010] In an embodiment, each of the one or more retaining features may be linearly movable in a direction having an angle ranging from zero degrees to ninety degrees from the plane of the photomask chamber wall.

[0011] In an embodiment, each of the one or more retaining features includes a contact surface configured to engage a curved or inclined edge.

[0012] In an embodiment, each of the one or more actuating surfaces is a surface configured to slide against the end of at least one of the one or more retaining features.

[0013] In one embodiment, each of the one or more actuating surfaces extends from the box dome.

[0014] In an embodiment, each of the one or more retaining features includes a first end located on a first side of the photomask chamber wall and a second end located on a second side of the photomask chamber wall, the second side of the photomask chamber wall being opposite to the first side of the photomask chamber wall, and each of the one or more retaining features being rotatable about an axis coplanar with the plane of the photomask chamber wall.

[0015] In one embodiment, each of the one or more actuating surfaces is a protrusion extending from the door.

[0016] In one embodiment, each of the one or more actuating surfaces contacts at least one of the one or more retaining features at its second end, and the first end of each of the one or more retaining features contacts the photomask.

[0017] In an embodiment, each of the one or more retaining features comprises a thermoplastic material.

[0018] In one embodiment, the photomask chamber wall extends from the base plate.

[0019] In one embodiment, the photomask compartment wall extends from the cover.

[0020] In one embodiment, a method of manipulating one or more retaining features includes: engaging a cover to the base plate, wherein one of the cover and the base plate includes a photomask compartment wall extending from the one of the cover and the base plate; and placing the engaged cover and the engaged base plate within a dome. The method further includes engaging a door to the dome. Engaging the door to the dome includes contacting one or more actuating surfaces with one or more retaining features located on the photomask compartment wall. The method further includes moving the one or more retaining features via the contact with the one or more actuating surfaces.

[0021] In an embodiment, moving the one or more retaining features includes linearly moving the one or more retaining features inward into the space defined by the light cover chamber wall.

[0022] In one embodiment, the one or more actuating surfaces are located on the cover and configured to slide against the end of at least one of the one or more retaining features.

[0023] In an embodiment, moving the one or more retaining features includes rotating the one or more retaining features about an axis that is in the same plane as the plane of the photomask chamber wall.

[0024] In one embodiment, the one or more actuating surfaces are protrusions extending from the door.

[0025] In one embodiment, the photomask compartment wall extends from the cover. Attached Figure Description

[0026] This disclosure will be more fully understood by taking into account the following description of various illustrative embodiments in conjunction with the accompanying drawings.

[0027] Figure 1 A cross-sectional view of the photomask box according to an embodiment is shown.

[0028] Figure 2 A cross-sectional view of the photomask box according to an embodiment is shown.

[0029] Figure 3 A flowchart illustrating a method for manipulating one or more retaining features according to an embodiment.

[0030] While this disclosure is readily adaptable to various modifications and alternatives, its specific details have been shown by way of example in the drawings and will be described in detail. However, it should be understood that the invention is not intended to limit the aspects of this disclosure to the specific illustrative embodiments described. Rather, the invention is intended to encompass all modifications, equivalents, and alternatives that fall within the spirit and scope of this disclosure. Detailed Implementation

[0031] The following detailed description should be understood with reference to the accompanying drawings, in which similar elements are numbered the same in different drawings. The detailed description and drawings, which are not necessarily to scale, depict illustrative embodiments and are not intended to limit the scope of this disclosure. The depicted illustrative embodiments are intended to be exemplary only. Unless expressly stated otherwise, selected features of any illustrative embodiment may be incorporated into additional embodiments.

[0032] Unless the context clearly indicates otherwise, as used in this specification and the appended claims, the singular forms “a” and “the” include a plural of indicators. Unless the context clearly indicates otherwise, as used in this specification and the appended claims, the term “or” is generally used in the sense that it includes “and / or”.

[0033] The term "about" generally refers to a range of numerical values ​​that are considered equivalent to the stated value (e.g., having the same function or result). In many instances, the term "about" may include numerical values ​​rounded to the nearest significant digit.

[0034] This disclosure generally relates to a photomask cassette for storing and transporting photomasks used in photolithography steps. More specifically, this disclosure is directed to a photomask cassette including a movable holding feature that extends through the photomask compartment wall of an inner cassette for holding the photomask housed within the inner cassette.

[0035] Figure 1 A cross-sectional view of a photomask housing 100 according to an embodiment is shown. The photomask housing 100 includes an inner portion 102, which includes a base plate 104 and a cover 106. Figure 1 In the embodiment shown, cover 106 includes a photomask compartment wall 108. Photomask compartment wall 108 includes a photomask holder 110. Photomask housing 100 also includes an outer portion 112, which includes a housing dome 114 and a housing door 116. Figure 1In the embodiment shown, the box dome 114 includes an actuating surface 118.

[0036] The photomask holder 100 is a holder configured to store and transport photomasks between different photolithography processing steps. For example, a photomask is a photolithography mask used for semiconductor wafers.

[0037] The inner portion 102 is part of the photomask housing 100, in which the photomask can be placed. The inner portion 102 includes an internal space 132 defined by a base plate 104 and a cover 106. The internal space 132 may be sized to accommodate the photomask. One or both of the components of the inner portion 102—the cover 106 and the base plate 104—may contain metal or alloy, such as aluminum or other suitable material.

[0038] The base plate 104 is part of the internal portion 102 of the photomask housing 100. When the photomask housing 100 is assembled, the base plate 104 can be supported by the housing door 116. The base plate 104 can form the lower portion of the internal portion 102 of the photomask housing 100. The base plate 104 can be configured such that the photomask can rest on the base plate 104.

[0039] The base plate 104 may include one or more photomask contacts 120. In one embodiment, the photomask contacts 120 are fixed to the inside of the base plate 104 such that when the internal portion 102 of the photomask housing 100 is assembled, the photomask contacts face the cover 106. In one embodiment, the photomask contacts 120 are secured in place via a mechanical connection (e.g., inserting a portion of the photomask contacts 120 into the base plate 104). In one embodiment, the photomask contacts 120 are integrally formed in the base plate 104. In one embodiment, at least three photomask contacts 120 are formed in or attached to the base plate 104. In one embodiment, four photomask contacts 120 are formed in or attached to the base plate 104. In one embodiment, the photomask contacts 120 are located on the base plate at positions corresponding to the corners of the internal spaces 132 of the internal portion 102. The photomask contacts 120 contain a material compatible with the photomask material. The compatible material comprises a material that provides minimal or no particle generation upon contact with the photomask material and is resistant to scratching or otherwise damaging the photomask. In an embodiment, the compatible material is a polymeric material. The photomask contact 120 may contain the compatible material at least at the contact point, which is configured to contact the photomask when the photomask housing 100 is assembled. In an embodiment, the photomask contact 120 is made entirely of a polymeric material suitable for contacting the photomask. For example, suitable polymeric materials include polyetheretherketone (PEEK), polyaryletherketone (PAEK), polyethyleneimine (PEI), polyamide-imide (PAI), or conductive polymers.

[0040] Cover 106 is another part of inner portion 102, configured to engage with base plate 104. Cover 106 may form the upper portion of inner portion 102. Cover 106 may include features that mate with or are mechanically compatible with base plate 104. Figure 1 In the embodiment shown, cover 106 includes a photomask compartment wall 108 extending from the surface of cover 106.

[0041] exist Figure 1 In the embodiment shown, a photomask compartment wall 108 extends from a cover 106. When the cover 106 and base plate 104 are assembled to form an interior portion 102, the photomask compartment wall 108 extends from the surface of the cover 106 facing the base plate 104. The photomask compartment wall 108 may define the perimeter of the interior space 132 configured to accommodate the interior portion 102 of the photomask. In an embodiment, the photomask compartment wall 108 includes one or more through holes 122. A photomask holder 110 may extend through the through holes 122. The photomask holder 110 may be further connected to the photomask compartment wall 108 via a spring (e.g., a metal spring, an elastic material (e.g., an elastic polymer), or other suitable elastic connection between the photomask compartment wall 108 and the photomask holder 110). In an embodiment, the connection between the photomask holder 110 and the photomask compartment wall 108 may be a metal spring extending into the through hole 122.

[0042] A photomask holder 110 extends through the photomask compartment wall 108 at the through-hole 122. The photomask holder 110 is linearly movable. When the photomask is placed within the inner portion 102 of the photomask housing 100, the photomask holder 110 can contact the photomask within a portion of its linear range of movement. A plurality of photomask holders 110 may be distributed along the photomask compartment wall 108. In one embodiment, the photomask compartment wall 108 forms a square, and at least one photomask holder 110 is disposed on each side of the square. In another embodiment, the photomask compartment wall 108 forms a square, and at least two photomask holders 110 are disposed on each side of the square. In another embodiment, the photomask holders 110 located on each side of the shape defined by the photomask compartment wall 108 are opposing photomask holders 110 located on opposite sides of the shape, such that the photomask will be clamped between opposing photomask holders 110. The photomask holder 110 is configured to restrict or prevent the movement of the photomask within the interior of the photomask 100 when it comes into contact with the photomask during movement of the photomask 100 (e.g., during movement and disposal of the photomask 100, or during a vibration event such as dropping or impacting the photomask 100).

[0043] The photomask holder 110 includes a contact surface 124 located on the side of the photomask holder 110 outside the photomask chamber wall 108. The contact surface 124 is configured to contact an actuating surface 118. The contact surface 124 is configured such that contact with the actuating surface 118 applies a force to the photomask holder 110, the force including an inward component toward the internal space 132 defined by the base plate 104 and the cover 106. The contact surface 124 may have a shape complementary to the actuating surface 118; for example, both the contact surface 124 and the actuating surface 118 may be flat surfaces, or the contact surface 124 may have a curved surface configured to match a curved actuating surface 118. For example, the contact surface 124 may be a flat surface having a plane forming an acute angle A with respect to the direction of movement of the photomask holder 110 through the photomask chamber wall 108.

[0044] In one embodiment, the photomask holder 110 includes an engagement surface 126 shaped to interface with the photomask. In another embodiment, the engagement surface 126 includes a flat protrusion configured to contact an upper surface of the photomask. In another embodiment, this upper surface is a surface opposite to the surface of the photomask contact point 120 contained in the base plate 104. In another embodiment, the engagement surface 126 includes a curved surface corresponding to a bevel or other shape at an edge of the photomask. In another embodiment, the engagement surface 126 is disposed on a segment 128 having a cross-sectional area larger than the cross-sectional area of ​​the portion extending through the through-hole 122.

[0045] In an embodiment, the segment 130 of the photomask holder 110 extending through the through-hole 122 may include at least a portion having a shape such as an ellipse or one or more features such as tabs or corner sections, such as maintaining the orientation of the photomask holder 110 relative to the photomask compartment wall 108.

[0046] In an embodiment, the photomask holder 110 may include one or more features on its surface for connecting the photomask holder 110 to a spring or elastic material, such as a flange that will be contacted by the spring or a groove configured to receive the elastic material.

[0047] The outer portion 112 of the photomask housing 100 is configured to enclose the inner portion 102. The outer portion 112 may comprise a polymer material or be made entirely of a polymer material. The outer portion includes a housing dome 114 and a housing door 116. In an embodiment, the housing dome 114 and the housing door 116 are fastened together by latching to form the outer portion 112. In an embodiment, the outer portion 112 includes an internal space 134 sized to accommodate the inner portion 102, and the outer portion 112 contacts the inner portion 102 while the housing door 116 and the housing dome 114 are fastened together. When the outer portion 112 is assembled, the contact between the outer portion 112 and the inner portion 102 secures the inner portion 102 within the outer portion 112. This contact may be provided by one or more protrusions, recesses, or other features on the surfaces of the housing dome 114 and the housing door 116 facing the internal space 134 of the outer portion 112. In an embodiment, at least one of the components of the outer portion 112 includes a protrusion that includes an actuating surface 118.

[0048] The dome 114 is part of the outer portion 112 of the photomask housing 100. The dome 114 may include one or more features configured to contact the cover 106 when the photomask housing 100 is assembled. The dome 114 may further include one or more protrusions, each including one or more actuating surfaces 118. The dome 114 includes an internal space. The internal space may include a first internal space 134 sized to accommodate the inner portion 102 of the photomask housing 100 and a second space (not shown) configured at an end of the dome 114 to accommodate a door 116. The second space may be defined by a lip (not shown). The portion of the dome 114 surrounding the second space may include one or more slots or other openings configured to receive a portion of a latch to secure the dome 114 to the door 116 to form the outer portion 112 of the photomask housing 100.

[0049] The door 116 is another part of the outer portion 112 of the photomask housing 100. The door 116 is configured to combine with the dome 114 to form the outer portion 112 of the photomask housing 100. The door 116 may be sized to fit within the space of the dome 114, such that the door closes one end of the dome 114. The door 116 may be engaged to the dome 114 by one or more latches. When the latches are not engaged with the dome 114, the door 116 may be removed from the dome 114.

[0050] exist Figure 1In the embodiment shown, an actuating surface 118 is disposed on a protrusion from the dome 114. For example, the actuating surface 118 may be a sliding surface configured to contact the photomask holder 110 at a contact surface 124. When the actuating surface 118 contacts the photomask holder at the contact surface 124, the photomask holder 110 can be driven inward relative to the internal space formed by the base plate 104 and the cover 106. In this embodiment, the actuating surface 118 and the contact surface 124 are surfaces of a wedge, such that sliding of the actuating surface 118 against the contact surface 124 causes inward movement of the photomask holder 110.

[0051] Figure 2 A cross-sectional view of a photomask housing 200 according to an embodiment is shown. The photomask housing 200 includes an inner portion 202, which includes a base plate 204 and a cover 206. Figure 2 In the embodiment shown, the base plate 204 includes a photomask compartment wall 208. The photomask compartment wall 208 includes a photomask holder 210. The photomask housing 200 also includes an outer portion 212, which includes a housing dome 214 and a housing door 216. Figure 2 In the embodiment shown, the door 216 includes an actuating surface 218.

[0052] As described above, the photomask cassette 100 and photomask cassette 200 are cassettes configured to store photomasks during transport, handling, and processing, particularly for processes such as photolithography (e.g., extreme ultraviolet (EUV)). For example, a photomask is a photolithographic mask used on a semiconductor wafer.

[0053] The inner portion 202 is part of the photomask housing 200, in which the photomask can be placed. The inner portion 202 includes an internal space 230 defined by a base plate 204 and a cover 206. The internal space 230 may be sized to accommodate the photomask. One or both of the components of the inner portion 202—the cover 206 and the base plate 204—may contain metal or alloy, such as aluminum or another suitable material.

[0054] The base plate 204 may include one or more photomask contacts 220. In one embodiment, the photomask contacts 220 are fixed to the inside of the base plate 204 such that when the internal portion 202 of the photomask housing 200 is assembled, the photomask contacts face the cover 206. In one embodiment, the photomask contacts 220 are fixed in place by, for example, mechanical connection (e.g., a portion of the photomask contact 220 is pressed through a hole formed in the base plate 204). In one embodiment, the photomask contacts 220 are integrally formed in the base plate 204. In one embodiment, there are at least three photomask contacts 220 formed in or attached to the base plate 204. In one embodiment, there are four photomask contacts 220 formed in or attached to the base plate 204. In one embodiment, the photomask contacts 220 are located on the base plate at positions corresponding to corners of the internal space 230 of the internal portion 202. The photomask contacts 220 contain a material compatible with the photomask material. The compatible material comprises a material that provides minimal or no particle generation upon contact with the photomask material and is resistant to scratching or otherwise damaging the photomask material. In an embodiment, the compatible material is a polymeric material. The photomask contact 220 may contain the compatible material at least at the contact point, which is configured to contact the photomask when the photomask housing 200 is assembled. In an embodiment, the photomask contact 220 is made entirely of a polymeric material suitable for contacting the photomask. For example, suitable polymeric materials include polyetheretherketone (PEEK), polyaryletherketone (PAEK), polyethyleneimine (PEI), polyamide-imide (PAI), or conductive polymers.

[0055] Cover 206 is another part of inner portion 202, configured to engage with base plate 204. Cover 206 may form the upper portion of inner portion 202. Cover 206 may include features that mate with or are mechanically compatible with base plate 204. Figure 2 In the embodiment shown, cover 206 includes a photomask compartment wall 208 extending from the surface of cover 206.

[0056] exist Figure 2 In the embodiment shown, the photomask compartment wall 208 extends from the cover 206. When the cover 206 and the base plate 204 are assembled to form the inner portion 202, the photomask compartment wall 208 extends from the surface 234 of the cover 206 facing the base plate 204. In an alternative embodiment, the photomask compartment wall 208 may extend from the base plate 204 toward the cover 206. The photomask compartment wall 208 may define the perimeter of the inner space 230 configured to accommodate the inner portion 202 of the photomask. In an embodiment, the photomask compartment wall 208 includes one or more through holes 222. The photomask holder 210 may extend through the through hole 222. The cross-section of the through hole 222 may be (for example) circular, square, or rectangular.

[0057] exist Figure 2In the embodiment shown, the photomask holder 210 includes a first end 224 located on a first side of the photomask chamber wall 208 and a second end 226 located on a second side of the photomask chamber wall 208 opposite to the first side. The photomask holder 210 is attached to the photomask chamber wall 208 via a hinge 228 located within a through-hole 222. The photomask holder 210 is sufficiently rigid such that when a force is applied to the first end 224, the photomask holder rotates about the hinge 228, thereby causing the second end 226 to move. In another embodiment, the photomask holder 210 is flexible such that it can flex when the second end 226 contacts the photomask.

[0058] The first end 224 is located on the side of the photomask compartment wall 208, outside the interior space 230 defined by the base plate 204 and the cover 206. The first end 224 extends away from the photomask compartment wall 208 such that when the inner portion 202 is located within the outer portion 212, the first end can be contacted by a feature (e.g., a box dome 214 or a box door 216) included on a portion of the outer portion 212.

[0059] The second end 226 is located on the side of the photomask compartment wall 208, within the internal space 230 defined by the base plate 204 and the cover 206. The photomask holder 210 is configured such that the second end 226 is rotatable to a position in which it contacts the photomask located within the internal space 230 defined by the base plate 204 and the cover 206. The second end 226 can be configured to contact the photomask on a surface opposite to the surface of the photomask contact point 220 in the contact base plate 204.

[0060] Hinge 228 is a hinge that engages photomask holder 210 to photomask chamber wall 208. Hinge 228 is located within through-hole 222. In an embodiment, 228 includes opposing protrusions from photomask holder 210 and corresponding holes formed in through-hole 222 configured to receive the protrusions. In an embodiment, hinge 228 includes protrusions extending from the surface of through-hole 222 into photomask holder 210. Hinge 228 can be oriented such that the axis of rotation about hinge 228 is in the same plane as photomask chamber wall 208.

[0061] The outer portion 212 of the photomask housing 200 is configured to enclose the inner portion 202. The outer portion 212 may comprise a polymer material or be made entirely of a polymer material. The outer portion 212 includes a housing dome 214 and a housing door 216. In an embodiment, the housing dome 214 and the housing door 216 are fastened together by latching to form the outer portion 212. In an embodiment, the outer portion 212 includes an internal space 232 sized to accommodate the inner portion 202, and the outer portion 212 contacts the inner portion 202 while the housing door 216 and the housing dome 214 are fastened together. When the outer portion 212 is assembled, the contact between the outer portion 212 and the inner portion 202 secures the inner portion 202 within the outer portion 212. This contact may be provided by one or more protrusions, recesses, or other features on the surfaces of the housing dome 214 and the housing door 216 facing the internal space 232 of the outer portion 212. In an embodiment, at least one of the components of the outer portion 212 includes a protrusion that includes an actuating surface 218.

[0062] The dome 214 is part of the outer portion 212 of the photomask housing 200. The dome 214 may include one or more features configured to contact the cover 206 when the photomask housing 200 is assembled. The dome 214 may include an internal space 232 sized to accommodate the internal portion 202 of the photomask housing 200 and an opening (not shown) configured at an end of the dome 214 to accommodate a door 216. The opening may be defined by a lip (not shown). The portion of the dome 214 surrounding the second space may include one or more slots or other openings configured to receive a portion of a latch to secure the dome 214 to the door 216 to form the outer portion 212 of the photomask housing 200.

[0063] The door 216 is another part of the outer portion 212 of the photomask box 200. The door 216 is configured to combine with the dome 214 to form the outer portion 212 of the photomask box 200. The door 216 may be sized to fit within the space of the dome 214, such that the door closes one end of the dome 214. The door 216 may be engaged to the dome 214 by one or more latches. When the latches are not engaged with the dome 214, the door 216 may be removed from the dome 214. The door 216 may further include one or more protrusions, which include one or more actuating surfaces 218.

[0064] exist Figure 2In the embodiment shown, one or more actuating surfaces 218 are disposed on one or more protrusions from the housing door 216. The actuating surfaces 218 are configured to contact a first end 224 when the housing door 216 engages with or is secured to the housing dome 214. The contact between the actuating surfaces 218 and the first end 224 of the photomask holder 210 pushes the first end 224, thereby causing the photomask holder to rotate about a hinge 228. This rotation moves a second end 226 to a position in which the second end can contact a photomask located within an inner section 202 of the photomask housing 200. The contact between the second end 226 and the photomask can secure the photomask, for example, by clamping the photomask between at least a portion of the second end 226 and photomask contacts 220 contained in the base plate 204. In an embodiment, the actuating surface 218 itself can be actuated, for example by being moved by an action (e.g., by an assembly of a latching mechanism contained in the door 216) to protrude outward from the door 216.

[0065] Figure 3 A flowchart illustrating a method for moving one or more photomask contacts according to an embodiment is provided. Method 300 includes engaging a cover to a base plate 302, engaging a door to a dome 304, contacting one or more actuating surfaces with one or more retaining features located on the wall of the photomask compartment 306, and moving one or more retaining features 308 via contact with the one or more actuating surfaces.

[0066] The cover is engaged with the base plate 302. For example, the cover may be cover 106 or cover 206 as described above. For example, the base plate may be base plate 104 or 204 as described above. In an embodiment, the photomask is placed on the base plate before the cover is engaged with the base plate at 302. In an embodiment, engaging the cover with the base plate includes placing the cover on the base plate such that a photomask compartment wall (e.g., photomask compartment wall 108) rests on the base plate. In an embodiment, engaging the cover with the base plate includes placing the cover on a photomask compartment wall (e.g., photomask compartment wall 208) extending from the base plate. Engaging the cover with the base plate 302 may include aligning the cover and the base plate so that they are in the same orientation. This orientation may be an alignment of interfacing features on one or both of the cover and the base plate.

[0067] The box door is joined to the box dome 304. For example, the box door may be box door 116 or 216 as described above. For example, the box dome may be box dome 114 or 214 as described above. The box door and box dome 304 can be joined such that the cover and base plate joined at 302 are received within the box dome and box door. After the box door is joined to the box dome 304, the box door and box dome can be secured to each other by one or more latches. The box door and box dome 304 can be joined by placing the box dome above the box door so that the box door is located within the space defined by the box dome.

[0068] One or more actuating surfaces are brought into contact 306 with one or more retaining features located on the wall of the photomask compartment. The one or more actuating surfaces may be present on the dome or door of the housing. The one or more actuating surfaces may be configured to contact the retaining feature 306 when the door is engaged with the dome at 304. The one or more actuating surfaces may be configured to contact the retaining feature 306 when the dome is secured to the door via a latch. For example, the actuating surface may be a sliding surface configured to contact a sliding surface on the retaining feature. In an embodiment, the sliding surface is included on a protrusion from the dome. For example, the actuating surface may be a contact point configured to contact an end of the retaining feature that extends outside the photomask compartment wall at that end. In an embodiment, the contact point is located on a protrusion from the door.

[0069] One or more retaining features 308 are moved by contact with one or more actuating surfaces. In an embodiment, the actuating surface drives the retaining feature (e.g., photomask retainer 110) to move linearly inward into the space defined by the photomask chamber wall. In an embodiment, the actuating surface is a sliding surface that contacts a corresponding sliding surface on the retaining feature, causing the retaining feature to move inward into the space defined by the photomask chamber wall. In an embodiment, the actuating surface drives rotational movement of one or more retaining features. Rotational movement may be about an axis coplanar with the plane of the photomask chamber wall. Rotational movement may cause a photomask contact on the retaining feature to rotate, such that the photomask contact moves in a direction having a component toward the base plate. In an embodiment, the retaining feature includes one end located on a first side of the photomask chamber wall, a second end located on an opposite side of the photomask chamber wall, and a hinge engaging the retaining feature to the photomask chamber wall. The actuating surface presses against one end of the retaining feature, thereby driving rotation about the hinge. Rotation about the hinge causes the second end (for example) to move toward the base plate. When the retaining feature is moved at 308 by contact with the actuating surface, the retaining feature may be positioned to contact the photomask within the internal space defined by the cover and the base plate. Contact between one or more retaining features and the photomask secures the photomask within the photomask housing. Securement of the photomask may further include contact with photomask contacts formed in or attached to the base plate.

[0070] aspect:

[0071] It should be understood that any of aspects 1 to 14 can be combined with any of aspects 15 to 20.

[0072] Aspect 1. A photomask box, comprising:

[0073] The internal portion includes a cover and a base plate, one of the cover and the base plate including a photomask compartment wall extending from the one of the cover and the base plate, the photomask compartment wall including one or more retaining features; and

[0074] The outer portion includes a box dome and a box door, one of the box dome and the box door including one or more actuating surfaces configured to contact at least one of the one or more retaining features when the cover is engaged with the base plate, the box dome engaging with the box door, and the engaged cover and the engaged base plate within the engaged box dome and the engaged box door.

[0075] When the one or more actuating surfaces contact the one or more retaining features, the retaining features are configured to be positioned such that they can contact the photomask when the photomask is located within the joined cover and the joined base plate.

[0076] Aspect 2. According to the photomask box of aspect 1, each of the one or more retaining features is linearly movable in a direction having a component having an angle ranging from zero degrees to ninety degrees from the plane of the photomask compartment wall.

[0077] Aspect 3. According to the photomask box of aspect 2, each of the one or more retaining features comprises a spring.

[0078] Aspect 4. According to the photomask box of aspect 3, when the spring is in the rest position, the retaining feature is in a position further away from the center of the base plate than when the retaining feature is contacted by one of the one or more actuating surfaces.

[0079] Aspect 5. A photomask box according to any of Aspects 2 to 4, wherein each of the one or more retaining features is linearly movable in a direction having an angle between zero and ninety degrees from the plane of the photomask compartment wall.

[0080] Aspect 6. A photomask box according to any one of Aspects 2 to 5, wherein each of the one or more retaining features includes a contact surface configured to engage a curved or inclined edge.

[0081] Aspect 7. A photomask box according to any of Aspects 2 to 6, wherein each of the one or more actuating surfaces is a surface configured to slide against one end of at least one of the one or more retaining features.

[0082] Aspect 8. According to the photomask box of aspect 7, each of the one or more actuating surfaces extends from the dome of the box.

[0083] Aspect 9. According to the photomask box of aspect 1, wherein:

[0084] Each of the one or more retaining features includes a first end located on a first side of the photomask chamber wall and a second end located on a second side of the photomask chamber wall, the second side of the photomask chamber wall being opposite to the first side of the photomask chamber wall, and each of the one or more retaining features being rotatable about an axis coplanar with the plane of the photomask chamber wall.

[0085] Aspect 10. According to aspect 9, the photomask box, each of the one or more actuating surfaces is a protrusion extending from the box door.

[0086] Aspect 11. According to aspect 10, the photomask box, wherein when each of the one or more actuating surfaces contacts at least one of the one or more retaining features at the second end, the first end of each of the one or more retaining features contacts the photomask.

[0087] Aspect 12. A photomask box according to any one of aspects 1 to 11, wherein each of the one or more retaining features comprises a thermoplastic material.

[0088] Aspect 13. A photomask box according to any one of aspects 1 to 12, wherein the photomask compartment wall extends from the base plate.

[0089] Aspect 14. A photomask box according to any one of aspects 1 to 12, wherein the photomask compartment wall extends from the cover.

[0090] Aspect 15. A method for manipulating one or more retaining features, comprising:

[0091] The cover is joined to the base plate, wherein one of the cover and the base plate includes a light shield chamber wall extending from the one of the cover and the base plate.

[0092] Place the joined cover and the joined base plate inside the box dome;

[0093] Engaging the box door to the box dome, wherein engaging the box door to the box dome includes contacting one or more actuating surfaces with one or more retaining features located on the wall of the photomask compartment and moving the one or more retaining features via the contact with the one or more actuating surfaces.

[0094] Aspect 16. According to the method of aspect 15, moving the one or more retaining features includes linearly moving the one or more retaining features inward into the space defined by the light cover chamber wall.

[0095] Aspect 17. According to the method of aspect 16, wherein the one or more actuating surfaces are located on the cover and configured to slide against one end of at least one of the one or more retaining features.

[0096] Aspect 18. The method of any of Aspects 15 to 17, wherein moving the one or more retaining features comprises rotating the one or more retaining features about an axis in the same plane as the plane of the photomask compartment wall.

[0097] Aspect 19. According to the method of aspect 18, wherein the one or more actuating surfaces are protrusions extending from the box door.

[0098] Aspect 20. According to the method of any of aspects 15 to 19, wherein the light cover chamber wall extends from the cover.

[0099] The examples disclosed in this application are to be regarded as illustrative rather than restrictive in all respects. The scope of the invention is indicated by the appended claims rather than by the foregoing description; and all changes that fall within the meaning and scope of the equivalents of the claims are intended to be included therein.

Claims

1. A reticle pod comprising: an inner portion including a lid and a base, one of the lid and the base including a reticle compartment wall extending from the one of the lid and the base, the reticle compartment wall including one or more retention features; and an outer portion including a pod dome and a pod door, one of the pod dome and the pod door including one or more actuation surfaces configured to contact at least one of the one or more retention features when the lid is joined to the base, the pod dome joined to the pod door, and the joined lid and the joined base within the joined pod dome and the joined pod door, wherein when the one or more actuation surfaces contact the one or more retention features, the retention features are configured to be positioned such that they can contact a reticle when the reticle is located within the joined lid and the joined base to restrict or prevent movement of the reticle, and wherein each of the one or more retention features is capable of linear movement in a direction having a component having an angle ranging from zero to ninety degrees from a plane of the reticle compartment wall.

2. The reticle pod of claim 1, wherein each of the one or more retention features includes a spring.

3. The reticle pod of claim 2, wherein when the spring is in a rest position, the retention feature is in a position further from a center of the base than when the retention feature is contacted by one of the one or more actuation surfaces.

4. The reticle pod of claim 1, wherein each of the one or more retention features is capable of linear movement in a direction having an angle ranging from zero to ninety degrees from a plane of the reticle compartment wall.

5. The reticle pod of claim 1, wherein each of the one or more retention features includes a contact surface configured to engage a curved or beveled edge.

6. The reticle pod of claim 1, wherein each of the one or more actuation surfaces is a surface configured to slide against an end of at least one of the one or more retention features.

7. The reticle pod of claim 6, wherein each of the one or more actuation surfaces extends from the pod dome.

8. The reticle pod of claim 1, wherein each of the one or more retention features includes a thermoplastic material.

9. The reticle pod of claim 1, wherein the reticle compartment wall extends from the base.

10. The reticle pod of claim 1, wherein the reticle compartment wall extends from the lid.

11. A method of manipulating one or more retention features comprising: joining a lid to a base, wherein one of the lid and the base includes a reticle compartment wall extending from the one of the lid and the base, placing the joined lid and the joined base in a pod dome; engaging the pod door to the pod dome includes contacting one or more actuation surfaces with one or more retention features located on the mask compartment wall to limit or prevent movement of a mask, and moving the one or more retention features via the contact with the one or more actuation surfaces, wherein moving the one or more retention features includes moving the one or more retention features linearly inward into a space bounded by the mask compartment wall.

12. The method of claim 11, wherein the one or more actuation surfaces are located on the cover and are configured to slide against an end of at least one of the one or more retention features.

13. The method of claim 11, wherein the mask compartment wall extends from the cover.

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