Holding system for holding substrates during surface processing
By designing a holding system for surface processing equipment, using force-transfer fit and adjustable fixing parts, the problems of high cost and high damage risk during substrate transportation and maintenance are solved, and stable fixation and precise processing of substrates are achieved. Reduces handling costs and risk of damage.
Patent Information
- Application Number
- CN202080095993.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Priority Date
- 2019-12-19
- Filing Date
- 2020-12-16
- Publication Date
- 2025-01-10
- Estimated Expiration
- 2040-12-16
AI Technical Summary
In surface processing equipment, there are high costs and high damage risks during the transportation and maintenance of substrates, especially when processing precision substrates, the handling costs and damage risks are high.
A system for retaining the substrate is designed, including cover areas, fixtures, positioners and connectors, through a force-transfer and adjustable design, allowing the substrate to rotate and invert during processing and to be connected to the moving unit. To achieve simple transportation and processing.
It reduces the handling cost of substrate during processing, ensures safe fixation and precise processing of substrates, reduces the risk of damage, and improves the efficiency and safety of the entire processing process.
Smart Images

Figure CN115053010B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to a holding system for holding a substrate, such as a workpiece or a tool, in particular for machining a surface of the substrate in a surface machining device, and to a method for using the holding system. Background Art
[0002] Especially in the processing of long substrates (such as tools of the shank tool type or workpieces with a shape similar to that of a shank tool), the transportation and holding processes become the main components of the total cost of the relevant processing method. In this processing method, the substrate to be processed is transported and fed into the holding system in a common way by a specially designed transportation system before processing. Before surface treatment, the substrates to be processed are generally first reloaded manually, and then they are placed in the surface processing equipment in a dispersed manner in the support. For a certain processing process, these substrates must be turned upside down or kept horizontally at this time. After processing, the substrates are generally reloaded manually before transportation. The entire process chain not only means high handling costs, but also the risk of damage to the substrate to be processed, which in turn causes higher production costs. Especially when processing delicate substrates, the handling costs and the associated risk of damage are very high. Summary of the invention
[0003] The object of the present invention is to at least partially eliminate the above-mentioned disadvantages of known devices and systems for fixing and holding substrates, in particular workpieces and / or elongated tools. In particular, the object of the present invention is to provide a device and a system for holding substrates which, in a simple and cost-effective manner, allow stable fixing of the substrates before, during and after processing and safe and simple transportation of the substrates, thus minimizing the handling costs in the entire processing chain.
[0004] The aforementioned object is achieved by a holding system having the features of the independent system claim and a method having the features of the independent method claim. Further features and details of the invention are derived from the respective dependent claims, the description and the figures. Here, the features and details described with respect to the holding system according to the invention are obviously also applicable in connection with the method according to the invention and vice versa, so that reference is always made to each other or can be made to each other with respect to the disclosure of these aspects of the invention.
[0005] According to the invention, a holding system for holding a substrate for use in a surface processing device is provided. In this case, the holding system has a cover area and also includes a plurality of fixing elements, a housing arranged in the cover area for accommodating the fixing elements, and a positioning element for adjusting the cover area and the processing area, wherein a plurality of substrates can be fixed by the fixing elements and can be processed in the processing area.
[0006] The holding system according to the invention is therefore designed to fix the substrate to be processed during processing and to cover a part of the substrate so that a part of the substrate is not available for processing and the remaining part of the substrate is available for processing. According to the invention, the positioning element is preferably used to adjust or open the processing area. The positioning element can in this case be mounted in the holding system in particular rotatably and preferably allows a change in the positioning transversely to the longitudinal orientation of the holding system in addition to a change in the positioning in the longitudinal orientation of the holding system.
[0007] In the processing area of the present invention that does not protrude into the covering area, processing of the substrate occurs. The housing of the holding system of the present invention preferably has a plurality of side-by-side recesses for inserting fixings, which can advantageously be formed in the form of holes or the like and can be arranged in a circular manner in the housing in particular. With the aid of the fixings of the present invention, the holding system is preferably designed in this case to fix by force-fitting, that is, the substrate can be rotated by at least 90°, in particular by at least 180° during processing. Obviously, the substrate can also be rotated by an angle less than 90° or by an angle greater than 180°. It is also obvious that the substrate can preferably be rotated around more than one axis, in particular around three axes x, y, z, during processing.
[0008] In order to fix the substrate to be processed, the fixing part may preferably have a fixing area. With the help of the fixing area, the substrate can be fixed in a force-fitting manner during processing. The fixing area can be limited locally relative to the entire surface or the entire volume of the fixing part. The fixing area can be advantageously arranged between a first recess for the substrate to pass through and a second recess for the substrate to pass through. The fixing part can advantageously be designed in this case so that they have a variable diameter in the longitudinal orientation. Along the longitudinal orientation of the fixing part, the diameter can, for example, be reduced from the outside toward the center, where the diameter can preferably be designed to be the smallest in the fixing area. In order to ensure the highest possible flexibility related to the diameter of the substrate to be accommodated and fixed, the fixing part can also advantageously have a circular arc cross-section at least partially.
[0009] It has been found within the scope of the present invention that by means of a fixing element designed according to the invention, a substrate, in particular a workpiece, can be fixed in a simple manner, wherein the fixing allows very simple transport of the substrate, in particular handling of the substrate, before, during and after processing, and the substrate can be handled during processing, for example, rotated or in an inverted position.
[0010] With regard to secure fixing and simultaneously as accurate as possible processing of the substrate and in particular the tool to be processed, such as a shank tool, it may be advantageous if the covering area has a larger longitudinal extension in the longitudinal direction than the processing area, preferably at least twice the longitudinal extension, in particular at least three times the longitudinal extension.
[0011] About the embodiment that is as compact as possible and the holding force that can be precisely defined as much as possible at the same time, it is also conceivable that the housing is designed to be cylindrical, wherein the height of the cylindrical body is preferably at least as long as the fixing piece that is placed in the housing. In this way, the fixing piece can be placed completely in the housing.
[0012] In order to ensure a simple construction of the adjustable processing area, the invention can advantageously provide that the positioning element has a disk-shaped first part for separating the cover area from the processing area and a pin-shaped second part for positioning the first part. The second part can in this case preferably be fixed to the housing and be designed, for example, spherical, so that the positioning of the first part can be achieved in a simple manner, for example, by means of a screw or the like. In order to ensure a stable and durable embodiment of the holding system as the subject, it can also be provided that the positioning element is designed in one piece, wherein the first and second parts can be formed in one piece from a component made of a uniform material.
[0013] With regard to a structurally simple possible way of separating the processing area from the covering area while ensuring that the substrate is available for the processing area, it can also be provided according to the invention that the positioning element has a plurality of recesses for respectively passing a substrate through, wherein the recesses are preferably arranged in the first part. In this case, the recesses can preferably be designed as holes and are advantageously arranged in a circular shape in the first part of the positioning element, in particular corresponding to the arrangement of the recesses in the housing.
[0014] In order not to change the positioning of the processing area during substrate processing, it is particularly conceivable to provide an anti-rotation mechanism for preventing an unwanted rotation about the rotation axis, wherein the anti-rotation mechanism can be fixedly connected to the housing and the positioning element to prevent an unwanted rotation of the positioning element.
[0015] In this case, in a structurally simple embodiment, it is provided that the anti-rotation mechanism is formed in the form of a locking pin, which can be fixed in the housing at its first end, preferably by a fixing element, and can be fixedly connected to the positioning element, in particular to the first part of the positioning element, by its other end, to prevent an undesired rotation of the positioning element. The connection between the locking pin and the first part of the positioning element can also be achieved in a force-fitting manner, preferably by plug-in, latching or threaded connection, etc.
[0016] With regard to safe and stable guidance of the substrate during processing, it is also conceivable to provide at least one guide element for guiding the substrate, wherein the guide element is preferably arranged between the housing and the first part of the positioning element.
[0017] In a structurally simple embodiment for safely and stably guiding a substrate during processing, the invention can provide that the guide element has a plurality of recesses for passing through each substrate, wherein the recesses are preferably arranged to correspond to the arrangement of the recesses in the housing and / or the arrangement of the recesses in the first part of the positioning element. In this case, the guide element can be designed in particular in the form of a disk or cylinder, etc.
[0018] With regard to the simple transport or simple positioning of the substrate during processing, it can also be advantageously provided according to the invention that at least one connecting member for connecting the holding system to the moving unit is provided, wherein the connecting member is preferably designed to be cylindrical and in particular arranged directly on the housing. The connecting member in this case can preferably be designed in the form of a flange or the like, which is connected to the housing of the holding system in a material-joined, force-fitted or form-fitted manner. Here, the connecting member can advantageously be arranged in the action zone, where the holding system can be engaged with the moving unit and subjected to a translational and rotational movement. In order to ensure a simple connection to the moving unit, it can also be advantageously provided that the connecting member has a connecting mechanism such as a sleeve, a hook, a thread, a holding magnet, etc., for connecting to the moving unit. In addition to the first connecting member, other connecting members, preferably in the form of flanges, for arrangement in the action zone can also be provided.
[0019] In order to allow for a damage-free and contamination-free transport of the substrate to be processed, it may also be advantageous if at least one covering means is provided for covering the processing zone, wherein the covering means is preferably designed in the form of a hood or the like.
[0020] With regard to a structurally simple embodiment and with regard to the reliable fixing of the substrate by means of the holding system as the subject, the fixing element arranged in the holding system can advantageously have an arc-segment-shaped upper part for the substrate to pass through and / or an arc-segment-shaped lower part for the substrate to pass through, which is opposite to the upper part and / or a fixing area arranged between the upper part and the lower part for non-positive fixing of the substrate, wherein the fixing area is preferably designed in the form of an hourglass and has a narrowing portion, the narrowing portion is especially arranged between the upper part and the lower part, so that the diameter of the fixing area decreases from the upper part to the narrowing portion, and the diameter of the fixing area decreases from the lower part to the narrowing portion. The fixing element of the present invention can preferably be provided for fixing, especially preferably non-positive fixing of the substrate to be processed and especially of an elongated substrate, such as a tool to be finished, such as a shank tool or a milling cutter, a drill, etc. The term "arc-shaped" should be understood in a broad sense within the scope of the present invention, so that the term refers not only to a part of an ideal circle, but also to a non-ideal part of a circle, such as a flattened or elongated circle. "Non-positive fixing" within the scope of the present invention also preferably refers to clamping. The term "non-positive fastening" is also to be understood in a broad sense within the scope of the invention, so that the term can at least sometimes also be understood as a form-fitting connection. By designing the fastening element according to the invention in this way, a high degree of flexibility can be achieved in particular with respect to the diameter of the substrate to be accommodated. In this context, the fastening element can also be designed in particular to be exchangeable, so that it can be adjusted in a targeted manner with respect to the diameter or shape of the substrate to be processed.
[0021] With regard to the most compact design and the best possible use of the fixing forces, it can be advantageously provided according to the invention that the narrowing of the fixing is arranged centrally between the upper part and the lower part. In this case, "centrally arranged" means in particular within the scope of the invention that the narrowing has the same distance from the upper area and the lower area. The narrowing or the narrowing region preferably has the same diameter along its longitudinal extension in this case. In this case, the narrowing or the narrowing region can preferably be the center of the fixing area for fixing the substrate. It is conceivable that the narrowing region covers a small or narrow part of the fixing, but also a larger part.
[0022] In order to achieve a flexible force-fitting fixation of a variety of substrates with different diameters, the invention can in particular provide for a recess arranged along the fixing element on the longitudinal side, wherein the recess preferably completely separates the fixing element in the longitudinal direction, so that the recess not only completely separates the upper part and the lower part, but also completely separates the fixing area, wherein the width of the recess, in particular along the constriction, is minimal and increases toward the upper part and the lower part. Preferably, the recess is in this case large enough that the two end parts separated by the recess do not touch each other when no force acts on the fixing element. It is also conceivable that the recess only partially separates the fixing element in the longitudinal direction.
[0023] With regard to the precisely adjustable and adjustable force for force-fitting fixing of the substrate, it can also be provided that the fixing region of the fixing element has a plurality of lamellae, wherein preferably an inner recess is provided between each of two lamellae. The length and width of the lamellae can in this case preferably be designed similarly to the length and width of the recess provided between the two lamellae. Advantageously, the lamella width can be slightly greater than the width of the recess, in particular at least 15% greater than the width of the recess.
[0024] In this case, it is also conceivable that the number of lamellae is linked to the diameter along the constriction, wherein preferably at least two lamellae, in particular at least three lamellae, are provided per millimeter of diameter along the constriction.
[0025] With regard to compact arrangement and simultaneously effective force transmission and fixing of the substrate, it can also be provided according to the present invention that the diameter along the narrowed portion is at least less than 80% of the diameter along the upper part and / or the lower part, preferably at least less than 75% of the diameter along the upper part and / or the lower part, and in particular at least less than 70% of the diameter along the upper part and / or the lower part.
[0026] In this case, the diameter along the constriction is between 2 cm and 0.2 mm, preferably between 1 cm and 0.5 mm, in particular between 0.5 cm and 1 mm. In the case of an exact adaptation to a substrate, the diameter along the constriction can also be, for example, 2.34 mm, 2.5 mm, 3 mm, 4 mm, 5 mm or 6 mm.
[0027] With regard to ensuring constant fixing properties even under different processing conditions, it can be advantageously provided that the fixing element is at least partially made of a heat-resistant and corrosion-resistant material, preferably at least partially of a nickel-chromium alloy such as (like )or (like ) is formed. In this case, heat-resistant materials within the scope of the present invention are in particular materials with a melting point above 1200° C. In addition, the material can preferably also be used at very low pressures and at the same time always be temperature-stable, so that the material can preferably be used at temperatures below 10 -6 The corrosion-resistant material is particularly a material whose corrosion rate under standard conditions is less than 0.001 mm / year. As for the heat-resistant and corrosion-resistant material, in addition to nickel and chromium, aluminum and / or titanium and / or iron and / or molybdenum and / or niobium and / or cobalt and / or manganese and / or copper and / or aluminum and / or silicon and / or carbon and / or sulfur and / or phosphorus and / or boron may also be contained as secondary components. In this case, the fixing part may be completely composed of the heat-resistant and corrosion-resistant material or only be provided with a heat-resistant and corrosion-resistant coating.
[0028] With regard to a safe, stable and at the same time non-destructive force-locking fixation, the invention can in particular provide that the fixing element is designed in such a way that the substrate can be fixed with a pull-out force of 2 to 6.1 N, preferably with a pull-out force of 2.5 to 3.5 N.
[0029] With regard to the structurally simple and surface-friendly substrate fixing, the invention can also provide that the fixing element is formed in the form of a spring element. In this case, a spring element within the scope of the invention is in particular an element with at least partial elastic action. The elastic action can preferably be applied to the constriction area in this case.
[0030] The subject of the invention is also a method for processing substrates, preferably using the aforementioned holding system. In this case, the method of the invention comprises the steps of introducing a plurality of substrates into the holding system and positioning the substrates in the footprint and processing region of the holding system by means of positioning elements. The method of the invention thus has the same advantages as have been explicitly described with respect to the holding system of the invention. The processing of the substrates of the invention can preferably be achieved in the form of surface processing, for example in the form of coating or the like.
[0031] With regard to efficient processing, it can also be provided according to the invention that the substrate is rotated by at least 90°, preferably at least 180° during processing. This allows, for example, the substrate to be “upside down” during processing by ensuring fixation by means of the fixing element. BRIEF DESCRIPTION OF THE DRAWINGS
[0032] Further advantages, features and details of the invention are derived from the following detailed description of embodiments of the invention with reference to the drawings. In this case, the features explained in the claims and the description may be essential to the invention individually or in any combination, the drawings showing:
[0033] Figure 1 1a and 1b are schematic diagrams showing a fixing member for fixing a substrate for use in a holding system of a surface processing device according to the present invention, (a) is a front view, (b) is a rear view,
[0034] Figure 2 A schematic top view showing a fixing member for fixing a substrate for use in a holding system for a surface processing device according to the present invention,
[0035] Figure 3 A schematic cross-sectional view showing a holding system for holding a substrate according to the present invention,
[0036] Figure 4 A schematic perspective view showing a holding system for holding a substrate according to the present invention,
[0037] Figure 5 A schematic diagram showing the individual steps of the method for processing a substrate according to the present invention. DETAILED DESCRIPTION
[0038] Figure 1 1a and 1b are schematic diagrams showing a fixing member 2 for fixing a substrate 12 for use in a holding system 1 according to the present invention, (a) being a front view and (b) being a rear view.
[0039] In this case, the fixing part 2 of the present invention comprises an arc-shaped upper part 4 for allowing the substrate 12 to pass through, an arc-shaped lower part 6 for allowing the substrate 12 to pass through and arranged between the upper part and the lower part 4, 6, and a fixing area 8 for fixing the substrate 12 in a force-fitting manner. The fixing area 8 is configured in an hourglass shape in this case and has a narrowing portion 10, and the narrowing portion 10 is arranged between the upper part and the lower part 4, 6, so that the diameter D of the fixing area 8 decreases from the upper part 4 toward the narrowing portion 10, and the lower diameter D of the fixing area 8 decreases from the lower part 6 toward the narrowing portion 10.
[0040] As can be seen here, the constriction 10 of the fixing element 2 is arranged centrally between the upper and lower parts 4 , 6 .
[0041] It can also be seen that the fixing element 2 has a recess 14 arranged on the longitudinal side, which completely separates the fixing element 2 in the longitudinal direction L, so that the recess 14 completely separates not only the upper and lower parts 4, 6, but also the fixing area 8. In this case, the width of the recess 14 is smallest along the narrowing 10 and increases towards the upper and lower parts 4, 6.
[0042] It can also be seen that the fixing region 8 has a plurality of lamellae 16, wherein a recess 18 is arranged between each of two lamellae 16. This structure provides in particular a precisely adjustable and adjustable force for non-positively fixing the substrate 12. The number of lamellae 16 can in this case be correlated in particular to the diameter D along the constriction 10.
[0043] Figure 2 A schematic top view of a fixing element 2 according to the invention for fixing a substrate 12 for use in a holding system 1 is shown.
[0044] According to the top view of the circular arc-shaped upper part 4 for the substrate 12 to pass through, the recesses 14 and the lamellae 16 together with the inner recesses 18 arranged between the lamellae 16 can be clearly seen again. It can also be seen that the inner diameter D along the narrowing 10 is significantly smaller than the diameter D of the opening along the circular arc-shaped part 4.
[0045] Figure 3 A schematic cross-sectional view of a holding system 1 for holding a substrate 12 according to the present invention is shown.
[0046] In this case, the holding system 1 according to the invention has a working area 20 and comprises a plurality of the aforementioned fixing elements 2, a housing 24 arranged in the cover area 20 for accommodating the fixing elements 2, and a positioning element 26 for adjusting the cover area and the processing area 20, 22. In this case, a plurality of substrates 12 are fixed by the fixing elements 2 and can be processed in the processing area 22.
[0047] As can be seen here, the cover region 20 has a greater longitudinal extension in the longitudinal direction than the processing region 22. Of course, the cover region 20 can also have a smaller longitudinal extension in the longitudinal direction than the processing region 22. Furthermore, the housing 24 has a cylindrical shape, which here has almost the same length as the fixing element 2 accommodated in the housing 24.
[0048] The positioning member 26 also includes a disk-shaped first portion 26a for separating the cover area 20 from the processing area 22 and a pin-shaped second portion 26b for positioning the first portion 26a. In addition, the positioning member 26 includes a plurality of recesses 28 for respectively allowing the substrate 12 to pass therethrough, wherein the recesses 28 are arranged in the first portion 26a.
[0049] Furthermore, the holding system 1 , as can be seen here, comprises an anti-rotation mechanism 30 for preventing rotation about the axis of rotation D X In order to prevent the unwanted rotation of the substrate 12, the anti-rotation mechanism 30 is fixedly connected to the housing 24 and the positioning member 26 to prevent the positioning member 26 from being rotated undesirably during the processing of the substrate 12.
[0050] Furthermore, the holding system 1 comprises a guide element 32 for guiding the substrate 12, which is arranged here between the housing 24 and the first part 26a of the positioning element 26 and also has a plurality of recesses 28 for passing through each substrate 12. The recesses 28 are arranged in this case corresponding to the arrangement of the recesses 28 in the housing 24 and the arrangement of the recesses 28 in the first part 26a of the positioning element 26.
[0051] Figure 4 A schematic spatial view of a holding system 1 for holding a substrate 12 according to the present invention is shown. In this perspective view, the arrangement of a connection element 34 for connecting the holding system 1 to a movement unit 36 can also be seen. The connection element 34 is also designed in a cylindrical shape and is directly arranged on the housing 24 of the holding system 1. Through the connection element 34, the holding system 1 can advantageously be coupled with the movement unit 36 to impart a translational and rotational movement, thereby allowing simple transportation or simple processing of the substrate 12 arranged in the holding system 1.
[0052] Figure 5 A schematic diagram showing the individual steps of the method for processing a substrate 12 according to the present invention.
[0053] In this case, the method for processing the substrate 12 comprises the steps of “introducing 40 a plurality of substrates 12 into the holding system 1” and “positioning 42 the substrates 12 within the cover and processing regions 20, 22 of the holding system 1 by means of the positioning elements 24” and the additional optional steps of “processing 44 the substrate 12 within the processing region 22” and “reprocessing 46 the substrate 12”. In this case, surface processing methods, for example surface processing methods by abrasion, chemical, thermal, electrolytic or similar methods, can preferably be provided as possible processing methods.
[0054] According to the method according to the invention, in this case it can be provided in particular that the substrate 12 is rotated by at least 90°, preferably by at least 180° during processing.
[0055] With the aid of the holding system 1 according to the present invention and the method for using the holding system 1 according to the present invention, it is possible in particular to achieve in a simple manner the fixation of a substrate 12, in particular a workpiece such as a tool to be processed, wherein the fixation allows very simple transport, in particular simple handling of the substrate 12 before, during and after processing, and the substrate 12 can be rotated or handled in an inverted position during processing, for example, with the aid of the fixation according to the present invention.
[0056] Reference numerals list
[0057] 1. Maintain the system
[0058] 2 Fixing parts
[0059] 4 Arc-shaped upper part
[0060] 6 Arc-shaped lower part
[0061] 8 Fixed area
[0062] 10 Narrowing
[0063] 12. Substrate
[0064] 14 concavity
[0065] 16 Slices
[0066] 18 Concave part
[0067] 20 Coverage Area
[0068] 22 Processing Area
[0069] 24 Shell
[0070] 26 Positioning piece
[0071] 26a Disc-shaped first part
[0072] 26b Pin-shaped second part
[0073] 28 Recess for substrate to pass through
[0074] 30 Anti-rotation mechanism
[0075] 32 Guide
[0076] 34 Connectors
[0077] 36 motion units
[0078] 40 Introducing multiple substrates
[0079] 42 Positioning of substrate
[0080] 44 Processing of substrate
[0081] 46 Reprocessing of substrate
[0082] D Diameter
[0083] L Vertical orientation
[0084] H Height
[0085] D X Rotation axis
Claims
1. A holding system (1) for holding a substrate (12) for use in a surface processing device, the holding system (1) having a footprint (20) and comprising: - a plurality of fixing elements (2), a housing (24) arranged within the cover region (20) for accommodating the fixing elements (2), - positioning elements (26) for adjusting the covering area (20) and the processing area (22), wherein a plurality of substrates (12) can be fixed by means of the fixing elements (2) and can be processed within the processing area (22); - wherein the positioning member (26) has a disc-shaped first part (26a) for separating the covering area (20) from the processing area (22) and a pin-shaped second part (26b) for positioning the first part (26a); wherein the positioning member (26) is designed to be integral.
2. The holding system (1) according to claim 1, characterized in that: The cover region (20) has a greater longitudinal extension in the longitudinal direction than the processing region (22).
3. The holding system (1) according to claim 1, characterized in that The cover region (20) has a longitudinal extension in the longitudinal direction which is at least twice as large as that of the processing region (22).
4. The holding system (1) according to claim 1, characterized in that The cover region (20) has a longitudinal extension in the longitudinal direction which is at least three times greater than that of the processing region (22).
5. The holding system (1) according to claim 1, characterized in that: The housing (24) is designed to be cylindrical, wherein the height (H) of the cylinder is at least the same as the length of the fixing element (2) arranged in the housing (24).
6. The holding system (1) according to claim 1, characterized in that: The positioning element (26) has a plurality of recesses (28) for respectively allowing the substrate (12) to pass through, wherein the recesses (28) are arranged in the first portion (26a).
7. The holding system (1) according to claim 1, characterized in that: An anti-rotation mechanism (30) is provided for preventing an unwanted rotation about a rotation axis (DX), wherein the anti-rotation mechanism (30) can be fixedly connected to the housing (24) and the positioning member (26) to prevent an unwanted rotation of the positioning member (26).
8. The holding system (1) according to claim 7, characterized in that The anti-rotation mechanism (30) is formed in the form of a locking pin, which can be fixed within the housing (24) by a fixing member (2) at its first end and can be fixedly connected to the positioning member (26) at its other end to prevent unwanted rotation of the positioning member (26).
9. The holding system (1) according to claim 8, characterized in that The anti-rotation mechanism can be fixed at its first end within the housing (24) by a fixing member (2) and can be fixedly connected to the first portion (26a) of the positioning member (26) by its other end to prevent unwanted rotation of the positioning member (26).
10. The holding system (1) according to claim 1, characterized in that At least one guide member (32) for guiding a substrate is provided, wherein the guide member (32) is arranged between the housing (24) and the first portion (26a) of the positioning member (26).
11. The holding system (1) according to claim 10, characterized in that The guide member (32) has a plurality of recesses (28) for respectively allowing the substrate (12) to pass through, wherein the recesses (28) are arranged to correspond to the arrangement of the recesses (28) within the housing (24) and / or to the arrangement of the recesses (28) within the first part (26a) of the positioning member (26).
12. The holding system (1) according to claim 1, characterized in that At least one connecting piece (34) for connecting to a moving unit (36) is provided, wherein the connecting piece (34) is designed to be cylindrical, wherein the connecting piece (34) is directly arranged on the housing (24).
13. The holding system (1) according to claim 1, characterized in that At least one covering device is provided for covering the processing area (22), wherein the covering device is designed as a cover.
14. The holding system (1) according to claim 1, characterized in that The fixing element (2) has a fixing region (8) for fixing the substrate (12) in a force-fitting manner, wherein the fixing region (8) is designed as a locally limited partial area.
15. The holding system (1) according to claim 1, characterized in that The fixing element (2) is designed in such a way that, by being fixed in a force-fitting manner by means of the fixing element (2), the substrate (12) can be rotated by at least 90° about one or more axes x, y, z during processing.
16. The holding system (1) according to claim 1, characterized in that The substrate (12) can be rotated by at least 180° about one or more axes x, y, z during processing.
17. The holding system (1) according to claim 1, characterized in that The fixing element (2) has a varying diameter (D) in the longitudinal direction, wherein: The varying diameter (D) decreases in each case from the outside toward the center along the longitudinal orientation (L) of the fixing element (2), wherein the diameter (D) reaches a minimum in the fixing region (8) of the fixing element (2).
18. The holding system (1) according to claim 1, characterized in that The fixing member (2) comprises an arc-shaped upper portion (4) for allowing a substrate (12) to pass through and / or an arc-shaped lower portion (6) for allowing the substrate (12) to pass through and / or a fixing area (8) arranged between the upper portion (4) and the lower portion (6) for fixing the substrate (12) in a force-fitting manner, wherein the fixing area (8) is formed in an hourglass shape and has a narrowing portion (10), and the narrowing portion (10) is arranged between the upper portion (4) and the lower portion (6), so that the diameter (D) of the fixing area (8) decreases from the upper portion (4) toward the narrowing portion (10), and the diameter (D) of the fixing area (8) decreases from the lower portion (6) toward the narrowing portion (10).
19. The holding system (1) according to claim 18, characterized in that The narrowing portion (10) of the fixing element is arranged centrally between the upper part (4) and the lower part (6).
20. The holding system (1) according to claim 18, characterized in that A recess (14) is provided along the longitudinal side of the fixing element (2), wherein the recess (14) completely separates the fixing element (2) in the longitudinal direction (L), so that the recess (14) not only completely separates the upper part (4) and the lower part (6), but also completely separates the fixing area (8), wherein the width of the recess (14) along the narrowing (10) is the smallest and increases toward the upper part (4) and the lower part (6).
21. The holding system (1) according to claim 18, characterized in that The fixing region (8) of the fixing element (2) has a plurality of lamellae (16), wherein an indentation (18) is arranged between every two lamellae (16).
22. The holding system (1) according to claim 21, characterized in that The number of lamellae (16) is correlated to the diameter (D) along the constriction (10), wherein at least two lamellae (16) are provided for every millimeter of the diameter (D) along the constriction (10).
23. The holding system (1) according to claim 22, characterized in that At least three lamellae (16) are provided for every millimeter of diameter (D) along the narrowing (10).
24. The holding system (1) according to claim 18, characterized in that The diameter (D) along the narrowing (10) is at least less than 80% of the diameter (D) along the upper portion (4) and / or the lower portion (6).
25. The holding system (1) according to claim 18, characterized in that The diameter (D) along the narrowed portion (10) is at least less than 75% of the diameter (D) along the upper portion (4) and / or the lower portion (6).
26. The holding system (1) according to claim 18, characterized in that The diameter (D) along the narrowed portion (10) is at least less than 70% of the diameter (D) along the upper portion (4) and / or the lower portion (6).
27. The holding system (1) according to claim 18, characterized in that The diameter (D) along the narrowed portion (10) is between 2 cm and 0.2 mm.
28. The holding system (1) according to claim 18, characterized in that The diameter (D) along the narrowed portion (10) is between 1 cm and 0.5 mm.
29. The holding system (1) according to claim 18, characterized in that The diameter (D) along the narrowed portion (10) is between 0.5 cm and 1 mm.
30. The holding system (1) according to claim 18, characterized in that The fixing element (2) is at least partially made of heat-resistant and corrosion-resistant material.
31. The holding system (1) according to claim 18, characterized in that The fixing element (2) is at least partially made of a nickel-chromium alloy.
32. The holding system (1) according to claim 18, characterized in that The fixing elements (2) are designed in such a way that the substrate (12) can be fixed with a pull-out force of 2 to 6.1N.
33. The holding system (1) according to claim 18, characterized in that The fixing elements (2) are designed in such a way that the base material (12) can be fixed with a pull-out force of 2.5 to 3.5N.
34. The holding system (1) according to claim 18, characterized in that The fixing element (2) is formed in the form of a spring element.
35. A method for processing a substrate (12) using a holding system (1) according to any one of claims 1 to 34, comprising the following steps: - introducing (40) a plurality of substrates (12) into the holding system (1), - Positioning (42) the substrates (12) within the cover region (20) and the processing region (22) of the holding system (1) by means of positioning elements (26).
36. The method according to claim 35, characterized in that: The substrate (12) is rotated at least 90° during processing.
37. The method according to claim 35, characterized in that: The substrate (12) is rotated at least 180° during processing.
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