Susceptor of semiconductor manufacturing apparatus

USD1079661SActive Publication Date: 2025-06-17KOKUSAI DENKI KK
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Patent Information

Application Number
US29/927474
Authority / Receiving Office
US · United States
Patent Type
Designs(United States)
Current Assignee / Owner
Priority Date
2023-08-31
Filing Date
2024-02-05
Publication Date
2025-06-17
Estimated Expiration
2040-06-17

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Description

[0001] FIG. 1 is a front, top and left side perspective view of a susceptor of semiconductor manufacturing apparatus showing my new design;

[0002] FIG. 2 is a front elevational view thereof;

[0003] FIG. 3 is a left side elevational view thereof;

[0004] FIG. 4 is a right side elevational view thereof;

[0005] FIG. 5 is a top plan view thereof;

[0006] FIG. 6 is a bottom plan view thereof;

[0007] FIG. 7 is a rear elevational view thereof; and,

[0008] FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 2.

Claims

The ornamental design for a susceptor of semiconductor manufacturing apparatus, as shown and described.

Citation Information

Patent Citations

  • Ring spacer

    JP1740585S

  • Substrate processing apparatus, substrate processing method and semiconductor device manufacturing method

    JP2014063820A

  • Exhaust Flow Control Loops for Semiconductor Deposition Equipment

    CN304326143S

  • Wafer support ring

    CN305875373S

  • Substrate processing apparatus

    US12087598B2

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