Apparatus, assembly, system and method for low disturbance measurement of a workpiece surface

Abstract

Provided are a device, assembly, system and method for measuring a workpiece surface with low disturbance. The measuring device (8) comprises a main body (10), a measuring channel (2) having a first opening (22) leading to a first side (14) opposite a detection site (36), and a fluid channel (19) leading from a suction port (13) on the first side to an outside via an outlet (1) in a manner passing through the inside of the main body, the suction port (13) having a closed ring shape surrounding the first opening or a curved segment shape enclosing the first opening for at least one turn. By connecting a negative pressure source to the outlet, the coolant (4) entering the measuring area (34) can be sucked out together with air, and the liquid can continue to flow during the suction process, only the direction is changed, but there is no fierce confrontation as in the conventional way, the speed direction of the air flow is not reversed but deflected, thus causing less vibration and reducing the influence on the measurement, and the structure is simple, the overall volume is small, and the processing difficulty and complexity are low.

Description

TECHNICAL FIELD

[0001] The present application relates to a kind of measuring devices, components, systems and methods that can be low disturbance measure workpiece surface, especially a kind of measuring system and method for realizing liquid discharge light guide function using negative pressure system. BACKGROUND

[0002] In the process of precision grinding, feedback information needs to be provided by measuring the surface of workpiece to improve machining accuracy. Optical measurement is suitable for real-time online measurement due to its high precision, high sampling frequency and no contact damage. However, in the process of precision machining, a large amount of opaque coolant covers the surface of the workpiece, preventing the measurement beam from obtaining the profile information of the workpiece surface.

[0003] In the past, in order to obtain a dry measurement area, the coolant is discharged by directly colliding with or opposing the liquid or gas. This gas-liquid two-phase liquid discharge light guide technology can eliminate the interference of coolant to a certain extent, but it will cause interaction between the two fluids and introduce large measurement error due to vibration. Moreover, it can only be applied to optical sensors for single-point measurement. If a three-dimensional surface profile is required, the sensor needs to be scanned along the surface of the workpiece (two-directional movement). The scanning process is relatively long and the control and structure of the system become more complex. Therefore, the available measurement range is small, most curved workpieces are not suitable, and the measurement efficiency is low. SUMMARY

[0004] To solve the above problems, the purpose of the present application is to provide a technical solution for low-disturbance real-time online measurement of workpiece, which can only use negative pressure system to discharge coolant while reducing the measurement error introduced by fluid vibration.

[0005] According to one aspect of the present application, a measuring device for assisting in measuring the surface of a workpiece is provided, comprising a main body, a measurement channel and a fluid channel passing through the main body. The measurement channel is open to a first opening on the bottom side of the main body on one side of the main body, serving as a channel for fluid to pass through. Only the measurement channel and the fluid channel are formed in the main body. The fluid channel is configured to pass through the inside of the main body from one suction port on the bottom side of the main body to the outside of the main body via an outlet. In the bottom view of the main body, the suction port is formed in a closed ring shape surrounding the first opening or a curved shape surrounding the first opening at least once.

[0006] In this way, a measuring device for a system for assisting in measuring the surface of a workpiece is provided, which has only a fluid channel for guiding gas-liquid two-phase flow using negative pressure discharge in addition to a measurement channel, and does not have a channel for supplying gas.

[0007] Optionally, the fluid passage includes a cylindrical passage that communicates with the suction port and extends into the main body portion in a manner surrounding the measurement passage, the cylindrical passage being formed in the first side in a tapered cylindrical portion whose inner diameter gradually widens toward the suction port.

[0008] Optionally, the fluid passage further includes a manifold portion that is interposed in a communicating manner between the cylindrical passage and the outlet, and a tapered pipe portion that is formed on the inner side of the manifold portion and whose inner diameter gradually narrows toward the outlet.

[0009] Optionally, the measurement passage is configured as a V-shaped passage with the first opening as a bottom, the first opening having a projection relationship with the suction port in terms of a circle center and a circle circumference, particularly an elliptical ring.

[0010] Optionally, the main body portion further includes a fixing portion for fixing or clamping the main body portion, the fixing portion being formed as a recessed portion or a protruding portion provided on the main body portion.

[0011] Optionally, the main body portion includes a recessed portion having a hollow core hole and a core portion that can be inserted into the hollow core hole, the measurement passage being at least partially formed in the core portion, and a groove being formed on a peripheral wall of at least one of the recessed portion and the core portion that faces each other, the groove being configured as a part of the fluid passage.

[0012] Optionally, on the surface of the first side, the suction port and the first opening are located on a surface having a height difference therebetween.

[0013] Optionally, on the surface of the first side, the suction port and the first opening are located on a surface having a height difference therebetween.

[0014] According to another aspect of the present application, there is provided a system for measuring a surface of a workpiece, a sensor for measuring a surface of a workpiece; the system further includes at least one of the above-described measuring devices, and a negative pressure source configured to communicate with the outlet to apply a negative pressure to the suction port to suck fluid from the suction port and discharge it from the outlet, wherein the sensor is any one of an optical sensor, an electromagnetic sensor, an electrical sensor, and an ultrasonic sensor, and measures the surface of the workpiece via the measurement passage.

[0015] Optionally, the surface of the first side of the measuring device matches the surface of the workpiece, so that a uniform and consistent spacing is formed between the two surfaces at least in a region corresponding to the suction port.

[0016] According to another aspect of the present invention, a measuring assembly for assisting in measuring the surface of a workpiece is provided, comprising any of the measuring devices described above and a negative pressure source, wherein a vacuum system serving as the negative pressure source is connected in communication with the outlet of the measuring device via a connecting pipe.

[0017] According to another aspect of the present invention, a precision grinding machine is provided for machining the surface of a workpiece, and is capable of fixing or integrating at least one of the above-mentioned measuring devices or components or systems, wherein the machine further includes an adjustment device for adjusting the gap between the measuring device and the workpiece to 0.1 mm to 2 mm.

[0018] According to the present invention, a measurement method for measuring the surface of a workpiece is also provided, using a sensor and any of the above-mentioned measuring devices, comprising the following steps: connecting a negative pressure source to the outlet and adjusting the gap between the measuring device and the part to be tested on the workpiece surface to a preset range; applying negative pressure from the negative pressure source to the suction port to draw fluid present in the gap; and using the sensor to detect a clean area formed on the part to be tested via the measuring channel.

[0019] In summary, this invention provides a technical solution combining a negative pressure drainage optical guide with optical measurement. Through the designed negative pressure drainage optical guide, real-time online measurement of the workpiece during processing is achieved. This reduces vibration interference caused by the drainage process while ensuring optical measurement. Compared to previous measuring devices, the structure is simplified, the overall size can be reduced, and the processing difficulty and complexity are lowered. In particular, by combining the negative pressure drainage optical guide with optical measurement, a suction pump is used to draw out coolant and air that may enter the measurement area through the self-designed negative pressure drainage optical guide. This ensures a clean measurement area while generating low disturbance, reducing the impact on measurement. Furthermore, a two-dimensional optical sensor can be used to complete real-time online measurement of the workpiece during processing. Attached Figure Description

[0020] Figure 1 A perspective view of the measuring device according to an embodiment of the present invention is shown schematically.

[0021] Figure 2 An internal perspective view of the measuring device is shown schematically.

[0022] Figure 3 A schematic bottom view of the measuring device is shown.

[0023] Figure 4 A cross-sectional view of the measuring device is shown schematically.

[0024] Figure 5 A schematic diagram illustrating the measurement working principle of a system according to an embodiment of the present invention is shown.

[0025] Figures 6 to 9 Other embodiments according to the invention are illustrated schematically.

[0026] Figure 10 An example of the projection distortion of the suction port and the measuring port is shown schematically. Detailed Implementation

[0027] Exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. The exemplary embodiments described below and illustrated in the drawings are intended to teach the principles of the invention, enabling those skilled in the art to implement and use the invention in several different environments and for several different applications. Therefore, the scope of protection of the present invention is defined by the appended claims, and the exemplary embodiments are not intended, and should not be considered, a limiting description of the scope of protection of the present invention.

[0028] To address the traditional vibration problem, the inventors have innovated and, combining the philosophical concept of "prevention is worse than cure," designed a novel measuring device, such as the negative pressure drainage light guide described later. This device is suitable for using negative pressure to simultaneously draw air and coolant into a negative pressure cavity, minimizing the interaction between the gas and liquid, thereby reducing vibration, suppressing the introduced vibration error, and improving measurement accuracy.

[0029] This allows for the displacement of more coolant, making it suitable for two-dimensional optical measurements requiring larger measurement areas, replacing single-point optical sensors with two-dimensional optical sensors. Since two-dimensional optical sensors can obtain a complete two-dimensional profile on the workpiece surface with a single measurement, online measurement efficiency is significantly improved.

[0030] <Example 1>

[0031] like Figures 1 to 5 The negative pressure drainage optical guide 8 shown can be combined with optical measurement to measure the surface of the workpiece 9. By using a suitable suction pump (not shown) as a negative pressure source, the coolant 4 and air 23 that may enter the measurement area 34 are sucked out together. While ensuring the measurement area 34 is clean, any potential disturbances are suppressed to a low level to reduce the impact on the measurement. As shown, a larger clean area 36 suitable for measurement can be created, thereby enabling real-time online measurement of the workpiece 9 with low disturbance using a two-dimensional optical sensor (not shown).

[0032] The light guide 8 has, for example, a block-shaped main body 10, with a measuring channel 2 leading to the bottom side on one side, such as the top side, and outlets 1 of fluid channels 19 and fixing holes 3 for fixing to external devices at different locations. Except for the two channels and holes mentioned above, the main body 10 is preferably formed as a solid component.

[0033] In the substantially central part of the main body 10, the measuring channel 2 can be in a substantially V-shaped structure, two branches of which extend independently from each other obliquely downward from the top side and converge into the measuring port 22 at the bottom side. Avoiding the measuring channel 2, the fluid channel 19 is provided through the inside of the main body 10.

[0034] The fluid channel 19 is structurally composed of at least three parts in communication with each other: the outlet 1 for connecting to the negative pressure source, the suction port 13 opening at the bottom side of the main body 10, and the negative pressure cavity 18 in between and having a shape suitable for guiding and discharging the gas-liquid two-phase flow, for example, each part cannot have a sudden change in diameter and direction to cause violent turbulence of the gas-liquid two-phase flow and thus cause vibration.

[0035] For example, in the negative pressure cavity 18, a passage 12, for example, generally in a cylindrical shape, and a header 11 for connecting the passage 12 and the outlet 1 can be provided, which facilitates the change of the flow direction in the negative pressure cavity 18, for example, from the vertical passage 12 to the horizontal outlet 1. In the inner cavity of the header 11, a tapered hole 17 can also be formed, which gradually reduces in diameter towards the outlet 1, to facilitate the smooth elimination of gas bubbles in the gas-liquid two-phase turbulence when the header 11 collects the gas-liquid two-phase mixture coming from the suction port 13 and the cylindrical passage 12.

[0036] As shown in Figure 3 , Figure 5 , the measuring port 22 is provided inside the suction port 13, preferably at a substantially central position, surrounded by the suction port 13 to form a transition zone 33 therebetween. The transition zone 33 will be arranged opposite the measuring area 34, especially the clean area 36 inside it as the measuring position, during measurement.

[0037] <Working principle>

[0038] When the negative pressure source is connected to the outlet 1 and the light guide 8 is fixed to the external equipment, for example, a machine (not shown), by the fixing hole 3, as shown in Figure 5 , the bottom surface 14 (bottom side) of the light guide 8 is opposite to the surface to be measured of the workpiece 9, forming a gap therebetween for the fluid to pass through, for example, a gap of 0.1mm-3mm, more preferably a gap of 0.5mm-1mm.

[0039] When negative pressure is applied to the outlet 1 by the negative pressure source, the cooling liquid 4 flowing to the measuring area 34 and the gas from the measuring channel 2 can be sucked from the suction port 13 through the negative pressure cavity 18 and discharged to the outside or recycled from the outlet 1, thereby forming a clean area 36 for optical measurement corresponding to the measuring area 34.

[0040] Subsequently, the air 23 flowing into the clean area 36 through the measuring channel 2 will fill the clean area 36, ​​and the excess air 23 and the coolant 4 from the gap area 35 outside the suction port 13 will be sucked away and discharged from the suction port 13.

[0041] In this way, the excess air 23 is passively drawn into the negative pressure cavity 18 due to the negative pressure. The air 23 and the coolant 4 do not directly confront each other not only in the clean area 36 but also outside the clean area 36. Instead, they are simultaneously drawn to the outside through the suction port 13 by the negative pressure. Compared with the traditional gas-liquid collision and confrontation caused by actively supplying gas through the air supply channel, the interaction between the air 23 and the coolant 4 will be greatly weakened, and the vibration and foam introduced by the interaction will also be greatly reduced.

[0042] Since there is no need for an active airflow to counteract the coolant 4, during the application of negative pressure, a negative pressure channel 18 can draw out the coolant 4 and excess air 23 to complete the coolant 4 removal work. Only one measurement channel 2 is needed for the measurement beam to propagate, providing a measurement environment for the measurement beam and preventing it from being interfered with by the coolant 4.

[0043] In this way, only the negative pressure cavity 18 needs to be configured, without the need for complex internal airflow cavities to distribute the positive pressure, high-speed airflow to counteract the coolant 4. Therefore, the implementation of the negative pressure drain light guide scheme is simpler, and it can avoid the introduction of high-pressure counteracting airflow and the necessary complex equipment. Moreover, the negative pressure drain light guide 8 is smaller in size and has a smaller bottom area, making it suitable for workpieces with smaller curvatures.

[0044] In addition, since the suction port 13 surrounds the measuring port 22 with a closed annular (or curved shape that surrounds the measuring port 22 at least once) channel shape, a larger measuring area 34 and a clean area 36 can be formed. Unlike the previous single-point measurement, two-dimensional optical measurement can be applied. A two-dimensional optical sensor (not shown) is used to replace the optical sensor of the single-point measurement. A complete two-dimensional profile can be obtained on the surface of the workpiece 9 with a single measurement, and the efficiency of online measurement is greatly improved.

[0045] <Technical Effects>

[0046] The advantage of using negative pressure according to the present invention is that the previous method of airflow opposing liquid can be changed to a negative pressure suction method.

[0047] In previous intense confrontation methods, according to the law of conservation of momentum, very high-speed airflow is required to stop the liquid and then blow it away, which can easily cause vibration and other phenomena.

[0048] Unlike this, in the negative pressure suction process of the present application, the liquid can continue to flow, only the direction is changed, but there is no fierce confrontation as before, the speed direction of the airflow is not reversed, but deflected, so it causes less vibration.

[0049] <Embodiment 2>

[0050] Figure 6 A structure and manufacturing method of a split type light guide 8 are shown. Instead of the conventional integral type 3D printing or casting, molding method, the measurement channel 2 can be formed in a core portion 102 which is independent of an outer peripheral portion 101, substantially along a cylindrical passage 12, and the core portion 102 and the outer peripheral portion 101 can be integrally fixed as the main body portion 10 by, for example, a screw, a buckle (not shown) or the like formed on the outer peripheral side of the core portion 102 while the core portion 102 is inserted from the upper side into the corresponding hollow core hole of the outer peripheral portion 101 (corresponding to a recessed portion).

[0051] Thus, the cylindrical passage 12 can be split into two and exposed to the inner peripheral side of the corresponding core hole of the outer peripheral portion 101 and the outer peripheral side of the core portion 102, respectively, thereby significantly simplifying the forming process of the fluid channel 19 inside the main body portion 10 and easily forming a certain and stable channel shape.

[0052] The cylindrical passage 12 in this embodiment is split into an inner peripheral wall hole 121 and an outer peripheral wall hole 122, and the suction port 13 is split into an inner peripheral wall hole portion 131 and an outer peripheral wall hole portion 132 in a manner that facilitates the introduction of two-phase flow.

[0053] These holes can be combined in appropriate forms such as a half hole, a bottomed groove or a groove with a bottom hole (corresponding to the tapered hole 17), a chamfer, a dovetail groove, etc. according to the actual size, fitting positional relationship, processing technology.

[0054] <Embodiment 3>

[0055] Figure 7 Another structure and manufacturing method of a split type light guide 8 are shown. Unlike Figure 6 The difference is mainly that a flange portion 103 is formed on the upper side of the core portion, which extends outward from the outer peripheral wall of the core portion 102 to the outer peripheral wall of the main body portion 10, and of course can be terminated in the middle. Correspondingly, a ring seat portion 104 is formed on the lower side for supporting the flange portion 103 and accommodating the core portion 102.

[0056] Thus, in assembly, the core portion with a T-shaped cross section can be directly seated in the ring seat portion 104 (corresponding to a recessed portion), and of course other fastening devices such as screws can also be applied.

[0057] <Embodiment 4>

[0058] Instead of Figure 6cylindrical core 102 and Figure 7 T-shaped core, or in combination therewith, the cylindrical passage 12 can also be formed into a substantially cylindrical or semi-cylindrical shape by matching the recess 123, which is partially recessed around the outer peripheral surface of the core, with the cylindrical inner peripheral surface of the ring seat 104, wherein the axial height of the recess 123 covers at least the tapered hole 17 or the passage formed with the outlet 1.

[0059] At this time, by performing appropriate chamfering processing on the lower side of the inner peripheral wall of the ring seat 104, a slanted or tapered trumpet-shaped suction port 13 can also be preferably formed, which is more conducive to the introduction of two-phase flow. Of course, a vertical linear passage port can also be used without being slanted.

[0060] Similarly, the cylindrical passage 12 can also be formed into a substantially cylindrical or semi-cylindrical shape by matching the recess 123', which is partially recessed around the inner peripheral surface of the ring seat 104 (only shown in dashed lines on the right side in the figure) similar to the recess 123 described above, with the cylindrical inner peripheral surface of the core, and correspondingly performing appropriate chamfering processing on the lower side of the outer peripheral wall of the core, i.e., forming a slanted suction port 13.

[0061] Furthermore, the overall or lower side of each of the above-mentioned peripheral portion and core portion does not necessarily have to be formed into a cylindrical shape, but can also be formed into a prismatic shape.

[0062] In addition, the recessed recess 123 and the like cylindrical passage 12 is not limited to being continuously formed along the peripheral wall portion, but can also be discretely formed along the circumferential direction, and the lower end side is communicated to the suction port 13 whose axial projection is preferably a closed ring shape, and the upper end side is communicated to the header portion 11 so as to be communicated to the outlet 1.

[0063] In addition, in the above-mentioned assembly, as partially shown in Figure 7 a sealing member 106 and other fasteners can be appropriately provided as needed.

[0064] <Embodiment 5>

[0065] Figure 8 The surface shape of the bottom surface 14 where the measurement port 22 is located is mainly described. In addition to being formed into a continuous flush or flat surface as shown in the above-mentioned figures, at least two levels of flat or substantially flat surfaces 141, 142 can also be formed, and the concave-convex relationship of the two can also be reversed, as long as the suction port 13 and the measurement port 22 are each located on a different level surface, i.e., on a step surface at different heights from each other. In the case where the surface 141 is recessed relative to the surface 142, the suction port 13 can be brought closer to the work surface to be measured before the measurement port 22, so that the surface 142 near the suction port 13 is brought into a suction state in advance. In the opposite case, while being conducive to reducing the gap at the surface 141 and strengthening the negative pressure suction effect there, the error can also be reduced by monitoring the gap change on the outer peripheral side with a larger gap.

[0066] <Embodiment 6>

[0067] Figure 9 An embodiment of a three-in-one assembly is shown. The main body 10 is generally composed of three parts: a concave portion 109 on the lower side and a concave portion 105 (equivalent to the concave portion) with a partial measurement channel 20 on the upper side; a ring plate portion 107 that cooperates with the bottom surface of the concave portion 105; and a cylindrical portion 108 (equivalent to the core portion) that can be inserted into the central hole 135 of the ring plate portion 107 and into the concave portion 109 of the concave portion 105.

[0068] A complementary other partial measurement channel 24 can be formed in the central portion of the cylindrical portion 108, and a similar bottomed groove 133 can be formed on the outer peripheral side wall, and a dovetail-shaped inclined surface portion 136 can be formed on the portion opposite the inner wall of the central hole 135 to constitute the suction port 13.

[0069] Here, the maximum outer diameter of the inclined surface portion 136 can also be smaller than the inner diameter of the central hole 135, or a bottomed groove can also be formed on or only on the inner wall surface of the concave portion 109 to form an internal discharge channel, which is connected to the vacuum pipe 111 connected to the outlet 1 to lead to a negative pressure source.

[0070] The thickness of the ring plate portion 107 can be determined in correspondence with the height of the tapered cylindrical portion formed by the dovetail-shaped inclined surface portion 136 and the central hole 135 on the side of the bottom surface 14.

[0071] <Other Modified Examples>

[0072] The above embodiments are exemplified by online measurement that is performed while the workpiece is being processed and does not interrupt the processing, but of course, the present application can also be applied to offline measurement or in-situ measurement.

[0073] The above embodiments exemplify the fixing portion by a fixed hole 3 in the form of a through hole, but in order to stably and reliably fix the light guide 8 to the external equipment, the fixing portion is not limited thereto and can be not only a concave portion in the form of a fixed hole or a fixed through hole, etc. that is at least partially inserted into the main body 10, but also a protruding portion or the like jig member that facilitates clamping and locking.

[0074] The above embodiment exemplifies the gap between the bottom surface 14 of the light guide 8 and the surface of the workpiece 9 to be measured as being less than 1 mm, but is not limited thereto. For example, even if the gap in the measurement area 34 corresponding to the inside of the transition area 33 is greater than 1 mm, the measurement can be effectively performed if the gap in the gap area 35 corresponding to the outside of the transition area 33 is less than 1 mm. Therefore, the surface measurement of a surface having a small curvature is also applicable, and the measurement range can be advantageously expanded. The gap at and near the suction port 13 is preferably 0.8 to 1.5 mm. For this purpose, the precision grinding machine can be provided with a regulating device for regulating the gap.

[0075] The above embodiment exemplifies one measurement channel 2, but is not limited thereto. As long as the clean area 36 is stabilized by the negative pressure, the measurement channel can be appropriately formed without limitation.

[0076] The above embodiment describes the measurement system mainly with the light guide 8 and the workpiece 9, but is not limited thereto. The measurement system can be integrated in a machine such as a machine tool (not shown) to save space.

[0077] The above embodiment exemplifies the light guide 8 having a substantially symmetrical and balanced structure, but is not limited thereto. For example, the opening positions of the outlet 1 and the measurement channel 2 can be appropriately adjusted as needed, and can be located on the same face or even on different faces, as long as the positional relationship between the measurement port 22 and the suction port 13 is ensured, but the size is not particularly limited and can be appropriately designed in accordance with the curvature, roughness, or the like of the portion to be measured.

[0078] Furthermore, the cylindrical passage 12 between the outlet 1 and the suction port 13 is understood to include a plurality of through-holes spaced apart in the circumferential direction of the suction port 13 so as to be connected to the suction port 13, respectively, because the plurality of passages also have a cylindrical shape and collectively form a substantially cylindrical space, and can be connected to the outlet 1 via, for example, a closed ring-shaped header. At this time, the suction port 13 can be a groove formed on the bottom surface of the bottom surface 14, and the holes connected to the through-holes are spaced apart in the groove.

[0079] Similarly, the "suction port 13 is formed in a closed ring shape surrounding the first opening 22" in the present application means a ring shape that is at least one turn in total, such as Figure 3 a whole circle of an ellipse as shown in FIG. 1, Figure 10 a perfect circle as shown in A of FIG. 2, and a ring shape in the form of a square or a polygon, and Figure 10 a planar spiral shape that winds more than one turn as shown in B of FIG. 2, and a curved shape that is complementary or overlapping with each other but at least one turn in total surrounding the first opening 22, and the like. That is, it is not limited to Figure 3The measuring device 22 is shown in the projection relationship of the center of the circle and the circumference of the ellipse or the circle, and can be surrounded by a plurality of arc segments or spiral suction ports 13, as long as at least one complete surrounding circle is formed, and can be formed in a polygonal shape instead of a circular arc.

[0080] In addition, the measuring device in the above embodiment is formed with a measuring channel 2 and a negative pressure cavity 19 in a block in the simplest way, but is not limited thereto, and a plurality of groups can be formed in the block.

[0081] Figure 5 The negative pressure from the negative pressure source is shown as being guided through the outlet 1, the negative pressure cavity 18, and the corner between the negative pressure cavity 18 and the cylindrical passage 12, and finally to the suction port 13, but is not limited thereto. As the negative pressure source, a common vacuum system can be used, and the negative pressure cavity 18 can be directly connected to the suction port 13 in a straight line or a smooth curve without a corner.

[0082] Figure 7 The combination of the fluid channel 19 with the cylindrical passage 12 is shown, and the suction port 13 is not necessarily chamfered or rounded, but can be directly formed as a part of the curved surface of the groove above it. In addition, a combined structure can be formed for other parts of the fluid channel 19, such as the header 11, the tapered hole 17, and the outlet 1, instead or in addition.

[0083] The bottom surface 14 as a whole or Figure 8 The stepped surface with a height difference shown can be replaced by a continuous surface of a generally spherical cap shape, and the suction port 13 and the first opening 22 can be located on curved surfaces with a height difference between them.

[0084] The above light guide 8 is composed of as few modules as possible from the perspective of sealing performance, but is not limited thereto, as long as the tightness of the joints is ensured.

[0085] [TECHNICAL EFFECT] [TECHNICAL EFFECT]

[0086] According to the present application, the negative pressure method is used to change the confrontation between the cooling liquid and the gas into attraction, and to transfer the collision impact of the two on the workpiece surface to the inside of the liquid discharge light guide for mutual fusion, thereby effectively reducing the influence of vibration on measurement.

[0087] In the measuring device according to the present application, only two types of channels need to be formed: 1) a measuring channel; and 2) a discharge channel. Not only is the structure simplified, the overall volume is reduced, the processing difficulty and complexity are reduced, but the vibration can be more effectively reduced. [TECHNICAL EFFECT]

[0088] On the contrary, if a third passage, 3) an air inlet passage, is additionally provided to remove liquid from the suction port 13 having a large cross-sectional area using gas from the air inlet passage, a larger flow rate and a larger amount of gas supply will be required, resulting in strong vibration and a large amount of bubbles at the measurement port 22, which will be a technical obstacle against the original intention of measurement. Therefore, in the conventional air blowing method, it is impossible to imagine the existence of a large measurement window like the suction port 13 of the present application. Because the flow rate of gas for removing liquid has been secured in the past, only a dispersed point-like cylindrical port can be used, and the existence of a large measurement window cannot be secured, so it can only be used for a point light source.

[0089] Since the light beam of the two-dimensional optical sensor is a line, the usable measurement range required is larger than that of a single point measurement light spot. Therefore, if a counter-flow liquid removal light guide method is used to provide a clean area for the two-dimensional optical sensor, more coolant liquid needs to be removed, and more gas flow and more vibration need to be introduced. In addition, the bottom area of the liquid removal light guide will also increase, and the applicable workpiece curvature will also increase. Therefore, the counter-flow liquid removal light guide method is not suitable for the two-dimensional optical sensor.

[0090] According to the present application, the projection of the measurement port 22 can be realized as a rectangle of 3*15 mm, and the suction port 13 can be realized as an elliptical ring with a major axis of about 24-26 mm, a minor axis of about 20-22 mm, and a slot width of 2 mm. The main body 10 can be realized as a rectangle of 50*50 mm. Therefore, according to the present application, without using air blowing and only using a negative pressure discharge passage, not only can the strong vibration and bubble formation at the measurement port 22 be suppressed, but also a larger area can be covered by the large inner diameter of the suction port 13, and it is suitable for point light sources, line measurements, and area measurements.

[0091] Moreover, the negative pressure liquid removal light guide according to the present application has a smaller volume and a smaller bottom area, and can be applied to workpieces with smaller curvatures.

[0092] Furthermore, the shapes and sizes of the various components shown in the figures are for illustrative purposes only and are not intended to limit the scope of the disclosure. Any numerical range recited herein is intended to include all sub-ranges of the same whole number of increments within the range. In the event of a contradiction between the language recited in this specification and the mathematical analysis of the numerical range recited herein, the mathematical analysis is intended to control. When relative terms such as "upper," "lower," "front," "back," "left," "right," "bottom," "top," and the like are used herein, it is understood that these terms are used for convenience and are not intended to indicate or imply direction or position relative to an arbitrarily chosen set of axes or a particular orientation of an object in use or in an otherwise useful position. Terms concerning descriptions of spatial orientations such as "vertical," "horizontal," "vertical," "horizontal," and the like are used for convenience and are not intended to indicate or imply direction or position relative to an arbitrarily chosen set of axes or a particular orientation of an object in use or in an otherwise useful position. In addition, terms such as "first" and "second" are also used for convenience and are not intended to indicate or imply relative importance or a quantity of, or an order of, the indicated features. Thus, terms are used best interpreted in the context to which they are used.

[0093] While the application has been described with reference to various specific embodiments, it should be understood that modifications can be made without departing from the spirit of the inventive concepts described. Accordingly, it is intended that the application not be limited to the described embodiments, but will have the full scope defined by the language of the following claims.

Claims

1. A measuring device (8) for assisting in measuring a workpiece surface, capable of real-time on-line measurement of a workpiece in process using a two-dimensional optical sensor, comprising: A main body (10), and a measurement passage (2) and a fluid passage (19) that pass through the main body (10), the measurement passage (2) opening from one side of the main body (10) to a first opening (22) on the bottom side of the main body (10), the measurement passage (2) being configured as a V-shaped passage with the first opening (22) as the bottom in a side cross-sectional view of the main body (10), characterized in that only the measurement passage (2) and the fluid passage (19) are formed in the main body (10), the fluid passage (19) is configured to pass through the inside of the main body (10) from one suction port (13) on the bottom side of the main body (10) to the outside of the main body (10) via an outlet (1), in a bottom view of the main body (10), the suction port (13) is formed as a closed ring shape that surrounds the first opening (22) or a curved shape that surrounds the first opening (22) by at least one turn, only the suction port (13) and the first opening (22) are provided on the bottom side of the main body (10), the fluid passage (19) includes the outlet (1) connected to a negative pressure source, a header (11), a cylindrical passage (12), and the suction port (13) arranged in sequence and communicating with each other, the fluid passage (19) is configured as a negative pressure cavity (18) having a shape suitable for guiding and discharging a gas-liquid two-phase flow, and sucks air and coolant on the surface of a workpiece (9) from the measurement passage (2) and discharges it from the outlet (1), the header (11) is used to change the flow direction in the negative pressure cavity (18) from the vertical passage (12) to the horizontal outlet (1), and a tapered pipe portion (17) is formed on the inside of the header (11) with the inner diameter gradually tapering toward the outlet (1).

2. The measuring device according to claim 1, characterized in that the fluid passage (19) opens to the main body (10) only via the outlet (1) and the suction port (13).

3. The measuring device according to claim 1, characterized in that in a bottom view of the main body (10), the first opening (22) is formed as a rectangle, and the suction port (13) is formed as an elliptical ring.

4. The measuring device according to claim 1, characterized in that the first opening (22) is provided at a substantially central position of the area surrounded by the suction port (13), wherein the planar projection of the first opening (22) is a rectangle of 3*15 mm, and the suction port (13) is an elliptical ring with a major axis of 24-26 mm, a minor axis of 20-22 mm, and a notch width of 2 mm.

5. The measuring device according to claim 1 or 2, characterized in that a fixing portion (3) for fixing or clamping the main body (10) is further provided on the main body (10), and the fixing portion (3) is a recessed portion or a protruding portion provided on the main body (10).

6. The measuring device according to claim 1 or 2, characterized in that The main body (10) includes a recessed portion (101, 104, 105) having a hollow core hole and a core portion (102, 103, 108) capable of being inserted into the hollow core hole, The measurement passage (2) is formed in the core portion (102), A groove recessed from the peripheral wall is formed in at least one of the peripheral walls of the recessed portion (101, 104, 105) and the core portion (102, 103) opposite to each other, and the groove constitutes a part of the fluid passage (19).

7. The measurement device according to claim 1 or 2, wherein The suction port (13) and the first opening (22) are respectively located on the surface of the bottom side (14) of the main body (10) with a height difference between the surfaces.

8. A system for measuring a surface of a workpiece, comprising: a sensor for measuring a surface of a workpiece (9); at least one measurement device (8) according to any one of claims 1 to 7; and a negative pressure source connected in communication with the outlet (1) to apply negative pressure to the suction port (13), wherein the sensor is any one of an optical sensor, an electromagnetic sensor, an electrical sensor and an ultrasonic sensor, and measures the surface of the workpiece (9) via the measurement passage (2).

9. The system according to claim 8, wherein the measurement passage (2) is formed as a light passage for an optical sensor.

10. A measurement assembly for assisting in measuring a surface of a workpiece, comprising the measurement device (8) according to any one of claims 1 to 7 and a negative pressure source, wherein a vacuum system as the negative pressure source is connected in communication with the outlet (1) of the measurement device (8) via a connecting pipe (111).

11. A precision grinding machine for processing a surface of a workpiece, and fixed or integrated with at least one measurement device (8) according to any one of claims 1 to 7, or the system according to any one of claims 8 to 9, or the measurement assembly according to claim 10, wherein the machine further comprises an adjusting device for adjusting the gap between the measurement device (8) and the workpiece to 0.1 mm to 2 mm.

12. A measurement method for measuring a surface of a workpiece, using the measurement device (8) according to any one of claims 1 to 7 to assist in the measurement of a sensor, comprising the steps of: connecting a negative pressure source in communication with the outlet (1), and adjusting the gap between the measurement device (8) and the to-be-detected portion (36) of the surface of the workpiece to a predetermined range; applying negative pressure to the suction port (13) from the negative pressure source to suck the fluid present in the gap; and detecting the to-be-detected portion (36) via the measurement passage (2) using the sensor.

13. The measurement method according to claim 12, wherein the sensor is a two-dimensional optical sensor for measuring a two-dimensional surface profile of the workpiece. ​

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