Spectroscopic confocal imaging lens, apparatus, system, and detection method

Abstract

The application relates to the technical field of industrial vision, in particular to a spectral confocal imaging lens, device, system and detection method, which can solve the problem of low depth direction detection sensitivity of a spectral confocal imaging device in three-dimensional detection application in a coaxial illumination mode to a certain extent. The focusing module and the dispersion module are arranged on the same side of the front shared module, the front shared module comprises a first light path submodule and a second light path submodule, the center positions of the first light path submodule and the dispersion module are on a first straight line; the center positions of the second light path submodule and the focusing module are on a second straight line; the first light path submodule receives a first light beam passing through the dispersion module, and converges the first light beam into a second light beam to irradiate on a to-be-detected object; the second light path submodule converts a third light beam into a fourth light beam, and transmits the fourth light beam to the focusing module; three-dimensional imaging detection is realized, and the detection sensitivity is improved.

Description

Technical Field

[0001] This application relates to the field of industrial vision technology, and more specifically, to a spectral confocal imaging lens, device, system, and detection method. Background Technology

[0002] With the development of machine vision technology, 3D product inspection can be achieved through machine equipment. Spectral confocal imaging devices can achieve high-resolution imaging of two-dimensional light fields while simultaneously completing axial range measurements through chromatic aberration compensation between different detection wavelengths, thus enabling the inspection of 3D products in the radial and depth directions.

[0003] like Figure 1 As shown, in the related technology, the spectral confocal imaging device consists of a white light source 101, two pinholes, a semi-transparent mirror 104, a point dispersive objective lens 105, and a point spectrometer 106. The wide-bandwidth white light beam emitted by the white light source 101 passes through the first pinhole 102 and becomes a point light source with a certain aperture angle. After the point light source passes through the semi-transparent mirror, it undergoes dispersion through the point dispersive objective lens 105. Light of different wavelengths is focused at different axial depths of the object to be detected in the space to be detected 107. Then, the light beams of different wavelengths carrying the axial depth information of the object are reflected by the object surface and pass sequentially through the point dispersive objective lens 105 and the semi-transparent mirror to reach the second pinhole 103. The information carried by wavelength λ2 and part of the information carried by wavelengths λ1 and λ3 are imaged onto the point spectrometer 106 through the second pinhole 103, realizing the detection of information in the depth direction.

[0004] However, spectral confocal imaging devices cannot achieve imaging functionality in three-dimensional detection applications. Summary of the Invention

[0005] To address the issue that spectral confocal imaging devices cannot perform imaging functions in three-dimensional detection applications, this application provides a spectral confocal imaging lens, device, system, and detection method.

[0006] The embodiments of this application are implemented as follows:

[0007] A first aspect of this application provides a spectral confocal imaging lens, including a focusing module, a dispersive module, and a front-mounted shared module;

[0008] The focusing module and the dispersive module are located on the same side of the front shared module, which includes:

[0009] The first optical path submodule is used to receive the first beam of light after passing through the dispersive module, and to converge the first beam of light into a second beam of light to illuminate the object to be detected.

[0010] The second optical path sub-module is configured to convert the third light beam into a fourth light beam and transmit the fourth light beam to the focusing module, wherein the third light beam is a light beam reflected by the object to be detected.

[0011] The first optical path sub-module and the dispersion module are arranged on an incident light path, and the second optical path sub-module and the focusing module are arranged on a reflected light path.

[0012] With reference to the first aspect, in a possible implementation, the pre-common module includes at least one positive meniscus lens.

[0013] With reference to the first aspect, in a possible implementation, the dispersion module includes at least one doublet lens.

[0014] With reference to the first aspect, in a possible implementation, the focusing module includes at least one lenticular lens.

[0015] With reference to the first aspect, in a possible implementation, the spectral confocal imaging lens further includes a first beam splitter.

[0016] The first beam splitter is arranged between the second optical path sub-module and the focusing module, and is configured to deflect the optical path of the fourth light beam.

[0017] Alternatively, the first beam splitter is arranged between the first optical path sub-module and the dispersion module, and is configured to deflect the optical path of the first light beam.

[0018] A second aspect of the embodiments of the present application provides a spectral confocal imaging device, including any one of the spectral confocal imaging lenses, the light source, the beam collimator and the spectrometer described in the summary.

[0019] The light source, the beam collimator and the dispersion module of the spectral confocal imaging lens are arranged on an incident light path, so that the light source light beam emitted by the light source is irradiated to the dispersion module through the beam collimator.

[0020] The spectrometer and the focusing module of the spectral confocal imaging lens are arranged on a reflected light path, so that the detection light beam converged by the focusing module is irradiated to the spectrometer.

[0021] With reference to the second aspect, in a possible implementation, the spectral confocal imaging device further includes a second beam splitter.

[0022] The second beam splitter is arranged between the dispersion module of the spectral confocal imaging lens and the beam collimator, and is configured to deflect the optical path between the dispersion module and the beam collimator.

[0023] With reference to the second aspect, in a possible implementation, the light source is a fiber-coupled LED light source.

[0024] A third aspect of the embodiments of the present application provides a spectral confocal imaging system, comprising any one of the spectral confocal imaging devices, the photodetector, and the control analysis device in the summary of the application;

[0025] The photodetector is configured to acquire a detection light beam passing through the spectrometer of the spectral confocal imaging device;

[0026] The control analysis device is electrically connected with the light source and the photodetector of the spectral confocal imaging device, and is configured to:

[0027] Control the light source to be turned on, and control the photodetector to acquire detection data of the object to be detected;

[0028] Determine the position depth of the object to be detected based on a wavelength corresponding to a high-power peak in the detection data;

[0029] Determine three-dimensional data of the object to be detected based on the position depth.

[0030] A fourth aspect of the embodiments of the present application provides a detection method applied to the spectral confocal imaging system in the summary of the application, and the detection method comprises:

[0031] Control the light source to be turned on, and control the photodetector to acquire detection data of the object to be detected, wherein the detection data is obtained by sequentially irradiating the object to be detected with a light source light beam of the light source through a beam collimating mirror, a dispersion module of a spectral confocal imaging lens, and a front confocal module of the spectral confocal imaging lens, and reflecting the light beam to the front confocal module of the spectral confocal imaging lens, a focusing module of the spectral confocal imaging lens, and a spectrometer;

[0032] Determine the position depth of the object to be detected based on a wavelength corresponding to a high-power peak in the detection data;

[0033] Determine three-dimensional data of the object to be detected based on the position depth.

[0034] The beneficial effects of the present application are that the focusing module and the dispersion module are arranged on the same side of the front common module, the front common module comprises a first light path sub-module and a second light path sub-module, the first light path sub-module can realize receiving a first light beam passing through the dispersion module, and converging the first light beam into a second light beam to irradiate the object to be detected; the second light path sub-module can realize converting a third light beam into a fourth light beam, and transmitting the fourth light beam to the focusing module, wherein the third light beam is a light beam reflected by the object to be detected; three-dimensional imaging detection is realized, and the detection sensitivity can be improved. BRIEF DESCRIPTION OF DRAWINGS

[0035] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor under the premise of the drawings.

[0036] Figure 1 A structural schematic diagram of a prior art spectral confocal imaging device is shown;

[0037] Figure 2 A structural schematic diagram of a spectral confocal imaging lens provided by an embodiment of the present application is shown;

[0038] Figure 3a A first view angle optical path schematic diagram of a spectral confocal imaging lens provided by an embodiment of the present application is shown;

[0039] Figure 3b A second view angle optical path schematic diagram of a spectral confocal imaging lens provided by an embodiment of the present application is shown;

[0040] Figure 4 A structural schematic diagram of a spectral confocal imaging device provided by an embodiment of the present application is shown;

[0041] Figure 5a A detection schematic diagram of a coaxial illumination mode is shown;

[0042] Figure 5b A detection schematic diagram of an off-axis illumination mode is shown;

[0043] Figure 5c A detection schematic diagram of a V-shaped off-axis illumination mode of a spectral confocal imaging lens provided by an embodiment of the present application is shown;

[0044] Figure 6a A relationship schematic diagram between a first defocusing distance and an imaging point array diagram under a coaxial illumination mode is shown;

[0045] Figure 6b A relationship schematic diagram between a second defocusing distance and an imaging point array diagram under a coaxial illumination mode is shown;

[0046] Figure 6c A relationship schematic diagram between a third defocusing distance and an imaging point array diagram under a coaxial illumination mode is shown;

[0047] Figure 7a A relationship schematic diagram between a first defocusing distance and an imaging point array diagram under an off-axis illumination mode is shown;

[0048] Figure 7b A relationship schematic diagram between a second defocusing distance and an imaging point array diagram under an off-axis illumination mode is shown;

[0049] Figure 7c A schematic diagram showing the relationship between the third defocus distance and the imaging point column diagram under off-axis illumination mode is shown.

[0050] Figure 8 A schematic diagram showing the structure of a spectral confocal imaging system provided by an embodiment of the present application is shown.

[0051] Figure 9 A flowchart showing a detection method provided by an embodiment of the present application is shown.

[0052] In the above, 101 is a white light source; 102 is a first point pinhole; 103 is a second point pinhole; 104 is a half-transmission half-reflection mirror; 105 is a point dispersion objective; 106 is a point spectrometer; and 107 is a space to be detected.

[0053] 210 is a pre-shared module; 211 is a first light path sub-module; 212 is a second light path sub-module; 220 is a dispersion module; 230 is a focusing module; 241 is a first light beam; 242 is a second light beam; 243 is a third light beam; 244 is a fourth light beam; 245 is an incident light path; 246 is a reflected light path; and 250 is a space to be detected.

[0054] 200 is a spectral confocal imaging lens; 310 is a light source; 320 is a light beam collimating mirror; and 330 is a spectrometer.

[0055] 10 is a light beam dispersion mirror; 20 is a light beam focusing mirror; and 30 is a pre-shared mirror.

[0056] 300 is a spectral confocal imaging device; 410 is a photoelectric detector; and 420 is a control analysis device. DETAILED DESCRIPTION

[0057] In order to make the purpose, implementation and advantages of the present application more clear, the following will combine the drawings in the exemplary embodiments of the present application to clearly and completely describe the exemplary embodiments of the present application. Obviously, the described exemplary embodiments are only a part of the embodiments of the present application, but not all the embodiments.

[0058] It should be noted that the brief description of the terms in the present application is only for the convenience of understanding the following described embodiments, and is not intended to limit the embodiments of the present application. Unless otherwise specified, these terms should be understood according to their ordinary and general meanings.

[0059] The terms "first", "second", "third", etc. in the specification and claims and the above drawings in the present application are used to distinguish similar or similar objects or entities, and do not necessarily mean to limit the specific order or sequence, unless otherwise specified. It should be understood that the terms used in this way can be interchanged under appropriate circumstances.

[0060] The terms "comprises", "comprising", "includes", "including", "has", "having" and their conjugates, mean that the products or devices include but are not limited to, the listed material or steps.

[0061] The spectral confocal imaging device can complete the measurement of the axial range through the chromatic aberration compensation between the detection wavelengths while imaging the frame high resolution, and realize the detection in the radial and depth directions.

[0062] In the related art spectral confocal imaging device, after the high-bandwidth parallel light passes through the point dispersion objective lens, due to the dispersion principle of the lens, the light beams of different wavelengths are converged at different depths on the detection object side. Most of the energy of the light beam converged on the surface of the detection object will be reflected and finally transmitted to the entrance surface of the spectrometer; the light beam not converged on the surface of the detection object will be incident on the surface of the detection object in a defocused manner, and finally only a small part of the energy will be reflected and finally transmitted to the entrance surface of the spectrometer.

[0063] Through the coaxial illumination mode, the light beam needs to pass through the half-transmission half-reflection beam splitter twice, so that the power efficiency of the light beam reaching the spectrometer is reduced; and the depth detection sensitivity is low.

[0064] To solve the technical problem of low depth detection sensitivity in the above-mentioned coaxial illumination mode, the embodiments of the present application provide a spectral confocal imaging lens, device, system and detection method; wherein the spectral confocal imaging system comprises a spectral confocal imaging device, the spectral confocal imaging device comprises a spectral confocal imaging lens, and the detection method is applied to the spectral confocal imaging system. Wherein the spectral confocal imaging lens comprises a focusing module, a dispersion module and a pre-shared module; the pre-shared module comprises a first light path sub-module and a second light path sub-module; the first light path sub-module is used for receiving a first light beam passing through the dispersion module, and converging the first light beam into a second light beam to irradiate on a detection object; the second light path sub-module is used for converting a third light beam into a fourth light beam, and transmitting the fourth light beam to the focusing module, through a small inclination angle off-axis illumination mode, to improve the depth detection sensitivity.

[0065] The spectral confocal imaging lens, device, system and detection method of the embodiments of the present application will be described in detail below in conjunction with the drawings.

[0066] Figure 2 is a structural schematic diagram of a spectral confocal imaging lens provided by the embodiments of the present application, as Figure 2 shown, the present embodiment provides a spectral confocal imaging lens, comprising a focusing module 230, a dispersion module 220 and a pre-shared module 210.

[0067] The focusing module 230 and the dispersion module 220 are located on one side of the front common module 210, and the detection area where the to-be-detected object is located is located on the other side of the front common module 210.

[0068] As shown in Figure 2 The front common module 210 includes a first optical path sub-module 211 and a second optical path sub-module 212.

[0069] It should be understood that the first optical path sub-module 211 and the second optical path sub-module 212 represent two different parts of the front common module 210, and can realize double optical paths; the first optical path sub-module 211 and the second optical path sub-module 212 are not two independent individuals, but their functions are realized through the front common module 210.

[0070] The first optical path sub-module 211 and the dispersion module 220 are arranged on the incident light path; the second optical path sub-module 212 and the focusing module 230 are arranged on the reflected light path. By separating the incident light path and the reflected light path, the reduction of light energy utilization is reduced, and the energy utilization is improved.

[0071] The first optical path sub-module 211 receives the first light beam 241 passing through the dispersion module 220, and converges the first light beam 241 into the second light beam 242 to irradiate the to-be-detected object in the to-be-detected space 250.

[0072] The second optical path sub-module 212 converts the third light beam 243 into the fourth light beam 244, and transmits the fourth light beam 244 to the focusing module 230, wherein the third light beam 243 is a light beam reflected by the to-be-detected object through the second light beam 242.

[0073] It should be noted that the modules are used to describe the different optical lenses in the embodiment.

[0074] Figure 3a The first view angle optical path of the spectral confocal imaging lens is shown in Figure 3a The meridian plane of the spectral confocal imaging lens is shown in The spectral confocal imaging lens can be understood as a defocusing lens of dispersion focusing common V type, that is, the optical axis of the front common module 210 is deflected relative to the focusing module 230 and the dispersion module 220.

[0075] The incident light path 245 passes through the dispersion module 220 and the front common lens first optical path sub-module 211 in sequence; the reflected light path 246 passes through the front common lens second optical path sub-module 212 and the focusing module 230 in sequence, and the incident light path 245 and the reflected light path 246 are V-shaped through the front common module 210, realizing a small inclination angle off-axis illumination mode, and improving the depth detection sensitivity.

[0076] It should be understood that, from Figure 3a The optical axis is deflected after the first optical path sub-module 211 in the incident light path 245, and the optical axis is also deflected after the second optical path sub-module 212 in the reflected light path 246. The present embodiment corrects the aberration caused by the optical axis eccentricity of the pre-common module 210 through the focusing module 230 and the dispersion module 220.

[0077] Figure 3b The second view angle optical path schematic diagram of the spectral confocal imaging lens is shown in FIG. 6. Figure 3b The spectral confocal imaging lens is shown in FIG. 7.

[0078] The incident light path 245 passes through the dispersion module 220 and the first optical path sub-module 211 of the pre-common lens, irradiates the object to be detected, and the reflected light path 246 of the object to be detected passes through the second optical path sub-module 212 of the pre-common lens and the focusing module 230, so as to realize the off-axis illumination mode with small inclination angle and improve the depth detection sensitivity.

[0079] The pre-common module 210 in the present embodiment includes at least one positive meniscus lens.

[0080] In some embodiments, the pre-common module 210 can include a positive meniscus lens and a convex lens, and the pre-common module 210 can also include a positive meniscus short-focus lens, etc. For the lens combination that the pre-common module 210 can include, it can be determined according to the object to be detected and / or other factors that the spectral confocal imaging lens is applied to. The pre-common module 210 is a positive focal optical system through one or more lenses and includes a positive meniscus lens.

[0081] The dispersion module 220 in the present embodiment includes at least one doublet lens.

[0082] The two surfaces of the doublet lens can be both curved surfaces or one flat surface. In some embodiments, the dispersion module 220 can include a doublet lens, and the dispersion module 220 can also include two doublet lenses, etc. The dispersion module 220 is a positive focal optical system with at least one doublet lens.

[0083] The focusing module 230 in the present embodiment includes at least one double convex lens.

[0084] In some embodiments, the focusing module 230 can include a double convex lens, and can also include a double convex lens and a positive lens, and can also include a double convex lens and an aspherical lens, etc. The dispersion module 220 is a positive focal optical system with at least one double convex lens.

[0085] In some embodiments, the magnification of the focusing module 230 and the dispersion module 220 can be the same or different.

[0086] For example, in a spectral confocal imaging lens, the magnification of the focusing module 230 is 1.5X, and the magnification of the dispersion module 220 is 3X.

[0087] In some embodiments, the spectral confocal imaging lens can further include a first beamsplitter; the first beamsplitter is arranged between the second light path submodule 212 and the focusing module 230, and the first beamsplitter is configured to deflect the optical path of the fourth light beam 244.

[0088] Alternatively, the first beamsplitter is arranged between the first light path submodule 211 and the dispersion module 220, and the first beamsplitter is configured to deflect the optical path of the first light beam 241.

[0089] By arranging the first beamsplitter, mechanical interference of the optical devices in the spectral confocal imaging lens can be reduced, or the arrangement problem of the optical devices can be solved.

[0090] It should be understood that if there is no mechanical interference or arrangement problem of the optical devices in the spectral confocal imaging lens, the first beamsplitter is not required.

[0091] In the embodiments of the present application, the dispersion module 220 and the focusing module 230 are integrated in one spectral confocal imaging lens, which improves the integration of the lens and realizes the miniaturization and light weight of the spectral confocal imaging lens.

[0092] In the embodiments of the present application, the focusing module and the dispersion module are arranged on the same side of the front common module, the front common module includes the first light path submodule and the second light path submodule, the first light path submodule can realize receiving the first light beam passing through the dispersion module and converging the first light beam into the second light beam to irradiate on the object to be detected; the second light path submodule can realize converting the third light beam into the fourth light beam and transmitting the fourth light beam to the focusing module, wherein the third light beam is the light beam reflected by the object to be detected; three-dimensional imaging detection is realized, and the detection sensitivity is improved.

[0093] Figure 4 is a structural schematic diagram of a spectral confocal imaging device provided by the embodiments of the present application, as Figure 4 shown, the embodiments of the present application provide a spectral confocal imaging device, which includes a spectral confocal imaging lens 200, a light source 310, a light beam collimating mirror 320, and a spectrometer 330. The spectral confocal imaging lens 200 is the spectral confocal imaging lens 200 in the above embodiments.

[0094] The light source 310, the light beam collimating mirror 320, and the dispersion module of the spectral confocal imaging lens 200 are arranged on the incident light path to irradiate the light source light beam emitted by the light source 310 to the dispersion module through the light beam collimating mirror 320.

[0095] The focusing module of the spectrometer 330 and the spectrometer confocal imaging lens 200 is arranged on the reflected light path to irradiate the probe light beam converged by the focusing module to the spectrometer 330.

[0096] In some embodiments, the light source 310 is a fiber-coupled LED light source.

[0097] The light source light beam emitted by the fiber-coupled LED light source passes through the beam collimation mirror 320 and becomes a uniform light beam, and the light beam is irradiated to the object to be detected through the dispersion module of the spectrometer confocal imaging lens 200 and the first light path sub-module of the front common module of the spectrometer confocal imaging lens 200, and the probe light beam reflected from the object to be detected passes through the second light path sub-module of the front common module of the spectrometer confocal imaging lens 200 and the focusing module of the spectrometer confocal imaging lens 200 and is focused on the front working surface of the spectrometer 330, and is demodulated by the spectrometer 330.

[0098] The spectrometer confocal imaging device is designed to use glass material to increase the chromatic aberration between different wavelengths, so that the wavelength is one-to-one corresponding to the axial depth.

[0099] In some embodiments, a slit can also be arranged between the beam collimation mirror 320 and the dispersion module of the spectrometer confocal imaging lens 200, so that the light source light beam becomes a uniform linear light beam.

[0100] It should be understood that the spectrometer confocal imaging lens 200 is applied to the spectrometer confocal imaging device, Figure 4 The spectrometer confocal imaging lens 200 shown has a first beam splitter, but in specific applications, the first beam splitter can not be arranged.

[0101] For example, the spectrometer confocal imaging lens 200 is applied to the spectrometer confocal imaging sensor to form a new type of spectrometer confocal imaging sensor.

[0102] For example, the spectrometer confocal imaging lens 200 is applied to the spectrometer confocal imaging sensor to form a new type of spectrometer confocal imaging sensor. Figure 5a For the detection schematic diagram of the coaxial illumination mode, for example, Figure 5b For the detection schematic diagram of the off-axis illumination mode, for example, Figure 5c For the detection schematic diagram of the V-shaped off-axis illumination mode of the spectrometer confocal imaging lens proposed in the present application; the analysis of the three illumination modes is as follows:

[0103] Figure 5a The light beam of the coaxial illumination mode needs to pass through the beam dispersion mirror 10 to irradiate on the object to be detected, and the depth detection sensitivity is low. For example, Figure 6a-6cAs shown, the first defocus distance is -10 μm, the second defocus distance is 0 μm, and the third defocus distance is 10 μm. When the position of the object to be detected is defocused, the imaging point column diagram becomes diffuse with virtual focus, energy is lost, but the trend of the virtual focus is to diffuse around the optical axis. Most of the energy carried by the chief ray of the spot center can still be detected, which affects the speed of the detection power decrease with the increase of the defocus distance, and the detection accuracy is low.

[0104] Figure 5b The off-axis illumination mode has high energy utilization rate and high axial detection accuracy, but the large inclination angle light beam irradiated on the object to be detected by the beam dispersing mirror 10 will be partially blocked by the object details with narrow slit depth, resulting in loss of part of the detection information. As shown, Figure 7a-7c As shown, the first defocus distance is -10 μm, the second defocus distance is 0 μm, and the third defocus distance is 10 μm. When the position of the object to be detected is defocused, the imaging point column diagram becomes diffuse with virtual focus, energy is lost, but the trend of the virtual focus is to diffuse around the optical axis. Most of the energy carried by the chief ray of the spot center can still be detected, which affects the speed of the detection power decrease with the increase of the defocus distance, and the detection accuracy is low.

[0105] Figure 5c The V-shaped off-axis illumination mode combines the advantages of the on-axis illumination mode and the off-axis illumination mode, realizes small inclination angle off-axis illumination, improves energy utilization rate and system detection sensitivity, and retains the advantages of on-axis illumination detection information.

[0106] The V-shaped off-axis illumination mode retains the high energy utilization rate and high axial detection accuracy of the off-axis illumination mode, and also inherits the high detection information integrity of the on-axis illumination mode. Since the beam dispersing mirror 10 and the beam focusing mirror 20 share a front common mirror 30 at the front end of the object to be detected, the problem of high incident detection angle caused by mechanical interference of the beam dispersing mirror 10 and the beam focusing mirror 20 in the traditional off-axis illumination mode can be solved.

[0107] In some embodiments, the spectral confocal imaging device further comprises a second beam splitter;

[0108] The second beam splitter is arranged between the dispersion module of the spectral confocal imaging lens and the beam collimating mirror, and the second beam splitter is used to deflect the light path between the dispersion module and the beam collimating mirror.

[0109] By arranging the second beam splitter, mechanical interference of the optical devices in the spectral confocal imaging device can be reduced, or the problem of not being able to arrange can be solved in the arrangement of the optical devices.

[0110] It should be understood that if there is no mechanical interference or arrangement problem in the optical device of the spectral confocal imaging device, the second beam splitter does not need to be arranged.

[0111] In some embodiments, the spectral confocal imaging device can be a spectral confocal imaging sensor or a device configured by using the spectral confocal imaging technology.

[0112] The embodiment of the present application fuses the dispersion module and the focusing module by the spectral confocal imaging lens, realizes the miniaturization and lightness of the spectral confocal imaging device, compresses the space volume of the device, and improves the integration of the whole device.

[0113] The embodiment of the present application provides a spectral confocal imaging device, which comprises a spectral confocal imaging lens, a light source, a light beam collimating mirror and a spectrometer; the light source, the light beam collimating mirror and a dispersion module of the spectral confocal imaging lens are arranged on an incident light path to irradiate a light source light beam emitted by the light source to the dispersion module through the light beam collimating mirror; the spectrometer and a focusing module of the spectral confocal imaging lens are arranged on a reflected light path to irradiate a detection light beam converged by the focusing module to the spectrometer. In the spectral confocal imaging lens, the focusing module and the dispersion module are arranged on the same side of a front common module, the front common module comprises a first light path sub-module and a second light path sub-module, the first light path sub-module can realize receiving a first light beam passing through the dispersion module and converging the first light beam into a second light beam to irradiate the second light beam to a to-be-detected object; the second light path sub-module can realize converting a third light beam into a fourth light beam and transmitting the fourth light beam to the focusing module, wherein the third light beam is a light beam reflected by the to-be-detected object from the second light beam; three-dimensional imaging detection is realized, and the detection sensitivity can be improved.

[0114] Figure 8 is a structural schematic diagram of a spectral confocal imaging system provided by the embodiment of the present application, as Figure 8 shown, the embodiment provides a spectral confocal imaging system, which comprises a spectral confocal imaging device 300, a photoelectric detector 410 and a control analysis device 420; the spectral confocal imaging device 300 comprises a spectral confocal imaging lens, a light source, a light beam collimating mirror and a spectrometer; the spectral confocal imaging lens comprises a focusing module, a dispersion module and a front common module.

[0115] The photoelectric detector 410 is used to acquire a detection light beam passing through the spectrometer of the spectral confocal imaging device 300.

[0116] In some embodiments, the photoelectric detector 410 can be a CCD detector, or can be other photoelectric detectors used in the spectral confocal imaging system in the art.

[0117] The control analysis device 420 is electrically connected with the light source and the photodetector 410 of the spectral confocal imaging device 300, and is configured to control the light source to turn on and control the photodetector 410 to acquire detection data of the to-be-detected object; determine the position depth of the to-be-detected object based on a wavelength corresponding to a high-power peak in the detection data; and determine three-dimensional data of the to-be-detected object based on the position depth.

[0118] It should be understood that Figure 8 The spectral confocal imaging system shown is a specific one, and the first beam splitter and the second beam splitter can be set as required.

[0119] The embodiment of the present application provides a spectral confocal imaging system, which comprises a spectral confocal imaging device, a photodetector and a control analysis device. The photodetector is used to acquire a detection light beam of a spectrometer of the spectral confocal imaging device. The control analysis device is electrically connected with a light source and the photodetector of the spectral confocal imaging device, and is configured to control the light source to turn on and control the photodetector to acquire detection data of a to-be-detected object; determine the position depth of the to-be-detected object based on a wavelength corresponding to a high-power peak in the detection data; and determine three-dimensional data of the to-be-detected object based on the position depth. The spectral confocal imaging device comprises a spectral confocal imaging lens, a light source, a light beam collimating mirror and a spectrometer. The light source, the light beam collimating mirror and a dispersion module of the spectral confocal imaging lens are arranged on an incident light path, so that a light source light beam emitted by the light source is irradiated to the dispersion module through the light beam collimating mirror. The spectrometer and a focusing module of the spectral confocal imaging lens are arranged on a reflected light path, so that a detection light beam converging through the focusing module is irradiated to the spectrometer. In the spectral confocal imaging lens, the focusing module and the dispersion module are arranged on the same side of a front common module. The front common module comprises a first light path submodule and a second light path submodule. The first light path submodule can realize receiving a first light beam passing through the dispersion module and converging the first light beam into a second light beam to irradiate the to-be-detected object. The second light path submodule can realize converting a third light beam into a fourth light beam and transmitting the fourth light beam to the focusing module. The third light beam is a light beam reflected by the to-be-detected object. The three-dimensional imaging detection can realize improving energy utilization and improving detection sensitivity.

[0120] Figure 9 A flowchart of a detection method provided by the embodiment of the present application is shown in FIG. 1. Figure 9 As shown in the figure, the embodiment provides a detection method applied to the above spectral confocal imaging system. The detection method comprises the following steps:

[0121] S110, control the light source to turn on and control the photodetector to acquire detection data of the to-be-detected object.

[0122] The detection data is obtained by the light source light beam of the light source irradiating to the object to be detected through the beam collimator, the dispersion module of the spectral confocal imaging lens and the front confocal module of the spectral confocal imaging lens, and then being reflected to the front confocal module of the spectral confocal imaging lens, the focusing module of the spectral confocal imaging lens and the spectrometer.

[0123] In S120, the position depth of the object to be detected is determined based on the wavelength corresponding to the high-power peak in the detection data.

[0124] In S130, the three-dimensional data of the object to be detected is determined based on the position depth.

[0125] Based on the linear correspondence between the object-side depth range and the wavelength bandwidth of the detection light, a set of two-dimensional data with wavelength as independent variable and received power as dependent variable is output after the spectrometer analysis. By analyzing the wavelength corresponding to the high-power peak in the two-dimensional data, the position depth of the object to be detected can be calculated. The object-side axial three-dimensional reconstruction can be performed based on the information.

[0126] The embodiment of the present application provides a detection method, which comprises the following steps: controlling a light source to be turned on, and controlling a photodetector to obtain detection data of an object to be detected, wherein the detection data is obtained by a light source light beam of the light source irradiating to the object to be detected through a beam collimator, a dispersion module of a spectral confocal imaging lens and a front confocal module of the spectral confocal imaging lens, and then being reflected to the front confocal module of the spectral confocal imaging lens, a focusing module of the spectral confocal imaging lens and a spectrometer; determining a position depth of the object to be detected based on a wavelength corresponding to a high-power peak in the detection data; and determining three-dimensional data of the object to be detected based on the position depth. The three-dimensional imaging detection is realized, and the energy utilization rate and the detection sensitivity can be improved.

[0127] The following paragraphs will compare the Chinese terms involved in the specification of the present application with their corresponding English terms, so as to facilitate reading and understanding.

[0128] The above description has been made in combination with specific embodiments for the convenience of explanation. However, the above description discussed in some embodiments is not intended to be exhaustive or to limit the embodiments to the specific forms disclosed. Various modifications and variations can be derived from the above teachings. The selection and description of the above embodiments are for better explanation of the principles and practical applications, so that those skilled in the art can better use the embodiments and various different modified embodiments suitable for specific use considerations.

Claims

1. A spectral confocal imaging lens, characterized in that, The focusing module, the dispersion module and the pre-shared module are included. The focusing module and the dispersion module are located on the same side of the pre-shared module, wherein the pre-shared module includes: A first optical path sub-module is configured to receive a first light beam passing through the dispersion module and to converge the first light beam into a second light beam to irradiate on a to-be-detected object; A second optical path sub-module is configured to convert a third light beam into a fourth light beam and to transmit the fourth light beam to the focusing module, wherein the third light beam is a light beam reflected by the to-be-detected object from the second light beam; The first optical path sub-module and the dispersion module are arranged on an incident light path; and the second optical path sub-module and the focusing module are arranged on a reflected light path. A first beam splitter is further included. The first beam splitter is arranged between the second optical path sub-module and the focusing module, and is configured to deflect the optical path of the fourth light beam. Alternatively, the first beam splitter is arranged between the first optical path sub-module and the dispersion module, and is configured to deflect the optical path of the first light beam. The pre-shared module includes at least one positive meniscus lens. The dispersion module includes at least one doublet lens.

2. The optical spectral confocal imaging lens according to claim 1, characterized in that, The focusing module includes at least one lenticular lens.

3. A spectral confocal imaging device, characterized in that The optical spectral confocal imaging lens, a light source, a beam collimator and a spectrometer are included. The light source, the beam collimator and the dispersion module of the optical spectral confocal imaging lens are arranged on an incident light path to irradiate a light source light beam emitted by the light source to the dispersion module through the beam collimator. The spectrometer and the focusing module of the optical spectral confocal imaging lens are arranged on a reflected light path to irradiate a detection light beam converged by the focusing module to the spectrometer.

4. The spectral confocal imaging device of claim 3, wherein, A second beam splitter is further included. The second beam splitter is arranged between the dispersion module of the optical spectral confocal imaging lens and the beam collimator, and is configured to deflect the optical path between the dispersion module and the beam collimator.

5. The spectral confocal imaging device of claim 3, wherein, The light source is a fiber-coupled LED light source.

6. A spectral confocal imaging system, characterized by, The optical spectral confocal imaging device, a photodetector and a control analysis device are included. The photodetector is configured to acquire a detection light beam passing through the spectrometer of the optical spectral confocal imaging device. The control analysis device is electrically connected with the light source of the optical spectral confocal imaging device and the photodetector, and is configured to: control the light source to be turned on, and control the photodetector to acquire detection data of a to-be-detected object; determine a position depth of the to-be-detected object based on a wavelength corresponding to a high-power peak in the detection data; and determine three-dimensional data of the to-be-detected object based on the position depth.

7. A method of detection, characterized in that The detection method is applied to the optical spectral confocal imaging system. The light source is controlled to be turned on, and the photodetector is controlled to acquire detection data of the object to be detected, wherein the detection data is obtained by sequentially irradiating a light beam of the light source to the object to be detected through a beam collimator, a dispersion module of a spectral confocal imaging lens, and a front confocal module of the spectral confocal imaging lens, and reflecting to the front confocal module of the spectral confocal imaging lens, a focusing module of the spectral confocal imaging lens, and a spectrometer; Based on the wavelength corresponding to the high-power peak in the detection data, the position depth of the object to be detected is determined; Based on the position depth, the three-dimensional data of the object to be detected is determined.

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