Substrate inspection device

Abstract

Disclosed are substrate detection devices. The substrate detection device can include a providing portion, a photographing portion, an illuminating portion, and an optical portion, wherein: the providing portion provides a detection substrate including a glass layer, the glass layer including a flat surface and an inclined surface extending along a first direction; the photographing portion is arranged on the inclined surface of the glass layer and photographs the detection substrate; the illuminating portion is arranged opposite the photographing portion, with the detection substrate located between the photographing portion and the illuminating portion; and the optical portion is arranged on the illuminating portion and includes an optical film. The illuminating portion generates straight light that propagates straight along a thickness direction of the glass layer, and the optical portion can control a diffusion angle of the straight light such that, on a plane, an amount of light passing through the inclined surface of the glass layer is less than an amount of light passing through the flat surface of the glass layer on a same area basis.

Description

Technical Field

[0001] The present invention relates to a substrate inspection apparatus, and more specifically, to an apparatus for detecting defects in a substrate including a window. Background Technology

[0002] Various display devices are being developed for multimedia devices such as televisions, mobile phones, tablets, and game consoles. As display devices are designed to be thinner for lightweighting and user convenience, the thickness of the windows covering the display devices is also decreasing.

[0003] Meanwhile, the manufacturing process of the display device may include a step of detecting defects in the window. Window with a thin thickness may break during inspection, and to prevent this, a protective film can be attached to the window for defect detection. However, windows with a protective film may present the following problem: noise may be generated during defect detection due to the protective film, making accurate detection impossible. Summary of the Invention

[0004] Technical problems to be solved

[0005] The purpose of this invention is to provide a detection device for detecting whether a window tilted at a constant angle has defects.

[0006] The purpose of this invention is to provide a detection device that reduces detection errors and improves reliability in the process of detecting whether a window with a protective film is defective.

[0007] Solution

[0008] One embodiment provides a substrate inspection apparatus, comprising a providing unit, an imaging unit, an illumination unit, and an optical unit, wherein: the providing unit provides an inspection substrate including a glass layer, the glass layer including a flat surface and an inclined surface extending along a first direction; the imaging unit is disposed on the inclined surface of the glass layer and images the inspection substrate; the illumination unit is disposed opposite to the imaging unit, wherein the inspection substrate is located between the imaging unit and the illumination unit; and the optical unit is disposed on the illumination unit and includes an optical film, wherein the illumination unit generates linear light that propagates linearly along the thickness direction of the glass layer, and the optical unit controls the diffusion angle of the linear light such that, based on the same area on a plane, the amount of light passing through the inclined surface is less than the amount of light passing through the flat surface.

[0009] The optical unit can change the path of a straight beam of light along a first direction to a first angle, and along a second direction intersecting the first direction to a second angle, wherein the first angle can be greater than or equal to the second angle.

[0010] The first angle can be above 30 degrees and below 80 degrees, and the second angle can be above 0 degrees and below 30 degrees.

[0011] An optical film may include a base layer and a diffusion pattern, wherein the diffusion pattern protrudes from the base layer and refracts linear light.

[0012] The shape of the diffusion pattern can be a square pyramid including a bottom surface, and the bottom surface of the square pyramid can include two sides with different lengths from each other.

[0013] Of the two sides, the length of the first side extending along the first direction can be less than the length of the second side extending along the second direction.

[0014] The shape of the diffusion pattern can be a hemi-ellipsoid including a bottom surface, and the bottom surface of the hemi-ellipsoid can be an ellipse including a minor axis and a major axis.

[0015] The minor axis can extend along the first direction, and the major axis can extend along the second direction.

[0016] An optical film may include a base layer and a diffuser, wherein the diffuser is dispersed within the base layer and refracts linear light.

[0017] The diffuser can be distributed more densely along the first direction than in the second direction.

[0018] The test substrate may also include a protective film, wherein the protective film is disposed on at least one surface of the glass layer and covers the glass layer.

[0019] The illumination unit may include a telecentric lens.

[0020] The imaging, lighting, and optics units can move along the inclined surface of the glass layer.

[0021] The substrate inspection apparatus may also include an autofocus unit arranged on the inspection substrate.

[0022] One embodiment provides a substrate inspection apparatus, comprising a providing unit, an imaging unit, an illumination unit, and an optical unit, wherein: the providing unit provides an inspection substrate including a glass layer; the imaging unit is disposed on the edge of the glass layer including an inclined surface extending along a first direction, and images the inspection substrate; the illumination unit is disposed opposite to the imaging unit, wherein the inspection substrate is located between the imaging unit and the illumination unit; and the optical unit is disposed on the illumination unit and includes an optical film, wherein the illumination unit generates linear light that propagates linearly along the thickness direction of the glass layer, and the optical unit changes the path of the linear light to a first angle along the first direction and to a second angle along a second direction intersecting the first direction, wherein the first angle is 30 degrees or more and 80 degrees or less, and the second angle is 0 degrees or more and 30 degrees or less.

[0023] An optical film may include a base layer and a diffusion pattern, wherein the diffusion pattern protrudes from the base layer and refracts linear light.

[0024] An optical film may include a base layer and a diffuser, wherein the diffuser is dispersed within the base layer and refracts the linear light.

[0025] The illumination unit may include a telecentric lens.

[0026] The camera, lighting, and optics units can move along the edges of the glass layer.

[0027] The test substrate may also include a protective film, wherein the protective film is disposed on at least one surface of the glass layer and covers the glass layer.

[0028] Beneficial effects

[0029] One embodiment of the substrate inspection apparatus of the present invention can detect whether a window including an inclined surface tilted at a constant angle has defects.

[0030] One embodiment of the substrate inspection device of the present invention can improve the accuracy of detecting whether there are defects in windows with protective films attached. Attached Figure Description

[0031] Figure 1 This is a perspective view of a display device according to an embodiment of the present invention.

[0032] Figure 2a and Figure 2b This is a perspective view of a glass layer according to an embodiment of the present invention.

[0033] Figure 3 This is a perspective view of a detection substrate according to an embodiment of the present invention.

[0034] Figure 4a and Figure 4bThis is a cross-sectional view of a substrate inspection device according to one embodiment of the present invention.

[0035] Figure 5 This is a perspective view of a substrate inspection device according to an embodiment of the present invention.

[0036] Figure 6a This is a cross-sectional view of a substrate inspection device according to one embodiment of the present invention.

[0037] Figure 6b It is shown in magnification Figure 6a An enlarged cross-sectional view of one of the regions shown.

[0038] Figure 7a This is a cross-sectional view of a substrate inspection device according to one embodiment of the present invention.

[0039] Figure 7b It is shown in magnification Figure 7a An enlarged cross-sectional view of one of the regions shown.

[0040] Figure 8 This is a perspective view of a substrate inspection device according to an embodiment of the present invention.

[0041] Figures 9a to 9c This is a perspective view of an optical film according to one embodiment of the present invention.

[0042] Figures 10a to 10c These are images of the substrate being inspected, taken using the substrate inspection apparatus of the comparative example.

[0043] Figures 11a to 11c These are images of the substrate being inspected, captured using the substrate inspection apparatus described in the embodiment.

[0044] Explanation of reference numerals in the attached figures

[0045] GS: Testing substrate; GL: Glass layer

[0046] FS: Flat surface; IN1, IN2, IN3, IN4: Inclined surface

[0047] PF1, PF2: Protective film; TD: Substrate inspection device

[0048] CP: Photography Department; OF: Optics Department

[0049] LP: Lighting Department; MP: Supply Department

[0050] AF: Autofocus unit; F1, F2, F3: Optical coating

[0051] BS: Base layer; P1, P2: Diffusion pattern

[0052] P3a, P3b: Diffusers Detailed Implementation

[0053] This invention can be modified in various ways and can take many forms. Specific embodiments are illustrated in the accompanying drawings and will be described in detail herein. However, this is not intended to limit the invention to the specific disclosed forms, but should be understood to include all modifications, equivalents, and even substitutions encompassed within the spirit and scope of the invention.

[0054] In this specification, when it is mentioned that a component (or region, layer, part, etc.) is "on" or "connected" or "joined" to another component, it means that it can be directly arranged / connected / joined to the other component, or that a third component can be arranged between them.

[0055] The same reference numerals refer to the same constituent elements. Furthermore, in the accompanying drawings, the thickness, proportions, and dimensions of the constituent elements are exaggerated for the purpose of effectively depicting technical aspects.

[0056] "And / or" includes one or more combinations of all relevant components that can be defined.

[0057] While terms such as "first," "second," etc., may be used to describe various constituent elements, these constituent elements should not be limited by such terms. The terms are used only for the purpose of distinguishing one constituent element from another. For example, without departing from the scope of the invention, a first constituent element may be named a second constituent element, and similarly, a second constituent element may be named a first constituent element. Unless the context clearly indicates otherwise, the singular expression also includes the plural expression.

[0058] In addition, terms such as "below," "lower side," "above," and "upper side" are used to describe the relationships between the components shown in the accompanying drawings. These terms are relative concepts and are described based on the directions shown in the accompanying drawings.

[0059] Unless otherwise defined, all terms used in this specification (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. Furthermore, terms, such as those defined in common dictionaries, shall be interpreted as having the same meaning as they have in the context of the relevant art, and shall not be interpreted in an idealized or overly formal sense unless expressly defined herein.

[0060] It should be understood that terms such as "comprising" or "having" are intended to specify the presence of features, figures, steps, operations, constituent elements, components or combinations thereof described in the specification, but do not preclude the possibility of the presence or addition of one or more other features or figures, steps, operations, constituent elements, components or combinations thereof.

[0061] In the following description, a substrate inspection apparatus according to one embodiment of the present invention will be described with reference to the accompanying drawings.

[0062] Figure 1 This is a perspective view of a display device according to an embodiment of the present invention.

[0063] refer to Figure 1 The display device DD can be a device activated by an electrical signal. The display device DD can include various implementations. For example, the display device DD can be used in large electronic devices such as televisions and external advertising boards, as well as in small and medium-sized electronic devices such as mobile phones, tablet computers, personal computers, navigation units, and game consoles. The above example is presented as one implementation of the display device DD, and it can also be used in other electronic devices without departing from the concept of the invention. In this embodiment, the display device DD is exemplarily shown as a mobile phone.

[0064] The display device DD can display an image IM on a display surface IS parallel to each of the first direction DR1 and the second direction DR2, facing a third direction DR3. The display surface IS displaying the image IM can correspond to the front surface of the display device DD. The front surface of the display device DD can correspond to the front surface of the window WM. The image IM can include not only dynamic images but also static images. As an example of the image IM, Figure 1 A clock widget and icon are shown.

[0065] In this embodiment, the front (or upper) surface and rear (or lower) surface of each component are defined based on the direction shown in the image IM. The front and rear surfaces can be opposite each other in the third direction DR3, and the normal directions of the front and rear surfaces can be parallel to the third direction DR3. Furthermore, the directions indicated by the first direction DR1, the second direction DR2, and the third direction DR3 are relative concepts and can be changed to different directions. In the following description, the directions indicated by the first direction DR1, the second direction DR2, and the third direction DR3 will refer to the same reference numerals. In this specification, "on a plane" can refer to the case of viewing the structure from above, and can also refer to the case of viewing the structure from the third direction DR3.

[0066] The display device DD can have a cuboid shape. Figure 1An exemplary display device DD with a cuboid shape and rounded corners is shown. However, the shape of the display device DD is not limited to this and can be defined by the shapes of the window WM and the housing EDC that are combined with each other.

[0067] The display surface IS of the display device DD can be divided into a transmissive region TA and a bezel region BZA. The display surface IS of the display device DD can essentially be the same as the display surface of the window WM.

[0068] The transmission region TA can be the area where the image IM is displayed. The user can see the image IM through the transmission region TA. In this embodiment, the transmission region TA is shown as a quadrilateral shape with rounded corners. However, this is an exemplary illustration, and the transmission region TA can have various shapes and is not limited to any one embodiment.

[0069] The border region BZA may be adjacent to the transmission region TA. The border region BZA may surround the transmission region TA. Therefore, the shape of the transmission region TA can be substantially defined by the border region BZA. However, this is an exemplary illustration, and the border region BZA may also be arranged to be adjacent only to one side of the transmission region TA, or it may be omitted.

[0070] The border area (BZA) can be an area where the image IM is not displayed. The border area (BZA) can have a specified color. For example, the border area (BZA) can be a printed layer area formed on an optically transparent glass layer.

[0071] A window (WM) can define the exterior of a display device (DD). A window (WM) can protect the internal structure of the display device (DD) from external impacts. For example, a window (WM) can protect the display units and input sensing units included in the display device (DD).

[0072] The window WM can be optically transparent. Therefore, the user can see the provided image IM through the window WM. The window WM can be rigid or flexible. The window WM may include at least one of a polymer film and a glass layer, and is not limited to any one embodiment.

[0073] The window WM can be a single-layer structure or a multi-layer structure. For example, the window WM can be a single layer of glass or not, and can be a multi-layer structure including a protective film coated on the glass layer or a polymer film arranged on the glass layer.

[0074] The housing EDC can be combined with the window WM to form the appearance of the display device DD. The housing EDC can be formed from a single body, or is not limited thereto, and can include multiple bodies assembled with each other. The housing EDC can include multiple frames and / or plates, wherein the multiple frames and / or plates include at least one of glass, plastic and metal.

[0075] Figure 2a and Figure 2b This is a perspective view of a glass layer according to an embodiment of the present invention. Figure 3 This is a perspective view of a detection substrate according to an embodiment of the present invention. Figure 2a and Figure 2b The glass layers GL and GL1 in one embodiment shown are essentially the same structure, but differ in some of their shapes.

[0076] refer to Figure 2a The glass layer GL can be a layer included in the window WM of the aforementioned display device DD. The glass layer GL can be a relatively thin UTG (Ultra-thin Glass). For example, the thickness of the glass layer GL can be less than 100 μm, and specifically about 30 μm. However, the thickness of the glass layer GL is not limited to the numerical examples mentioned above.

[0077] The glass layer GL can have a rectangular shape on a plane. For example... Figure 2a As shown, it may include a long side extending along the first direction DR1 and a short side extending along the second direction DR2. However, the shape of the glass layer GL is not limited to the embodiment shown in the figure.

[0078] The glass layer GL may include a flat surface FS and at least one inclined surface IN1, IN2 and IN3. Figure 2a A glass layer GL comprising multiple inclined surfaces IN1, IN2 and IN3 is shown as one embodiment. Figure 2a A subset of the inclined surfaces IN1, IN2, and IN3 are assigned reference numerals and, for ease of description, are referred to as the first inclined surface IN1, the second inclined surface IN2, and the third inclined surface IN3.

[0079] The inclined surfaces IN1, IN2, and IN3 of the glass layer GL refer to surfaces extending from the flat surface FS and inclined at a constant angle relative to the flat surface FS. At least one inclined surface IN1, IN2, and IN3 can form the edge of the glass layer. However, it is not limited to this, and a portion of the edge of the glass layer can be the inclined surfaces IN1, IN2, and IN3, while another portion can be a surface perpendicular to the flat surface FS.

[0080] The flat surface FS of the glass layer GL may be parallel to the surface defined by the first direction DR1 and the second direction DR2. The flat surface FS of the glass layer GL may include a long side extending along the first direction DR1 and a short side extending along the second direction DR2. The flat surface FS of the glass layer GL may include a flat upper surface and a flat lower surface.

[0081] The first inclined surface IN1 and the third inclined surface IN3 can be surfaces inclined from the flat upper surface of the glass layer GL. The first inclined surface IN1 and the third inclined surface IN3 can be surfaces inclined from the flat upper surface of the glass layer GL toward a direction opposite to the third inclined surface DR3.

[0082] The second inclined surface IN2 can be a surface that slopes from the flat lower surface of the glass layer GL. The second inclined surface IN2 can also be a surface that slopes from the flat lower surface of the glass layer GL toward a third direction towards DR3. The second inclined surface IN2 can also be a surface that slopes in the opposite direction to the first inclined surface IN1 and intersects with one end of the first inclined surface IN1.

[0083] The first inclined surface IN1 and the second inclined surface IN2 can be surfaces that are parallel to the long side of the flat surface FS and extend along the first direction DR1. The third inclined surface IN3 can be a surface that is parallel to the short side of the flat surface FS and extends along the second direction DR2.

[0084] like Figure 2a As shown, the inclined surfaces IN1, IN2, and IN3 included in the glass layer GL can be surfaces inclined from the flat upper and lower surfaces of the glass layer GL, and can be surfaces extending along the four sides of the flat surface FS of the glass layer GL. However, it is not limited to this, and as... Figure 2b As shown, the inclined surface IN4 can be a surface that slopes from the flat upper surface of the glass layer GL1 toward the flat lower surface of the glass layer. Although not shown separately, the inclined surface included in the glass layer GL can be a surface that slopes from at least one of the four sides of the flat surface FS, and the number of inclined surfaces included in the glass layer GL is not limited to any one embodiment.

[0085] for Figure 2a and Figure 2b The glass layers GL and GL1 shown can be inspected for defects using the substrate inspection apparatus of the present invention. Specifically, the edges of the glass layers GL and GL1 may develop defects such as partial dents or cracks during the manufacturing process. In order to use the glass layers GL and GL1 as windows in a display device DD, it is necessary to inspect the edges of the glass layers GL and GL1 for defects. The substrate inspection apparatus according to one embodiment of the present invention can be used for defect detection of the edges of glass layers GL and GL1, which include at least one inclined surface IN1, IN2, IN3, and IN4, and will be described in relation to this below.

[0086] Figure 3 A perspective view of the substrate GS to be detected, which is the substrate detection apparatus of the present invention, is shown. Figure 3 An example is shown including Figure 2a The detection substrate GS of the glass layer GL is shown as one embodiment. The detection substrate GS may include the glass layer GL described above and at least one protective film PF1, PF2. (Reference) Figure 3 The detection substrate GS may include a glass layer GL and protective films PF1 and PF2.

[0087] Because it is suitable for display devices DD (reference) Figure 1 The glass layer GL is thin, so it may break during the production and inspection process. To prevent breakage of the glass layer GL, protective films PF1 and PF2 can be attached to one or both surfaces of the glass layer GL, and defects in the glass layer GL can be detected while the protective films PF1 and PF2 are attached.

[0088] Protective films PF1 and PF2 may include polymer films. Protective films PF1 and PF2 may include adhesives for adhesion to the glass layer GL. For example, protective films PF1 and PF2 may be provided as films in which an adhesive is coated on one surface of the polymer film.

[0089] Protective films PF1 and PF2 can be disposed on the upper and lower surfaces of the glass layer GL, respectively. Protective films PF1 and PF2 can have a larger area than the glass layer GL in a planar plane. Therefore, protective films PF1 and PF2 can cover the entire flat surface FS and inclined surfaces IN1, IN2, and IN3 of the glass layer GL.

[0090] Furthermore, although not shown separately, the protective films PF1 and PF2 can be attached to one surface of the glass layer GL. That is, the detection substrate GS can be a substrate with the protective films PF1 and PF2 attached to the upper or lower surface of the glass layer GL.

[0091] The testing substrate GS can be divided into three regions on a plane: a first region R1, a second region R2, and a third region R3. The first region R1 is the area where the flat surface FS of the glass layer GL overlaps with the protective films PF1 and PF2 along the third direction DR3. The second region R2 is the area where the inclined surfaces IN1 and IN2 of the glass layer GL overlap with the protective films PF1 and PF2 along the third direction DR3. The third region R3 is the area that does not overlap with the glass layer GL, but where the protective films PF1 and PF2 are adhered to each other.

[0092] After testing is completed, the protective films PF1 and PF2 can be removed from the glass layer GL. The glass layer GL, with the protective films PF1 and PF2 removed, can then be used as the window WM of the display device DD.

[0093] Figure 4a This is a cross-sectional view of a substrate inspection apparatus according to one embodiment. (Reference) Figure 4aThe substrate inspection device TD may include a supply unit MP, an imaging unit CP, an illumination unit LP, and an optical unit OF.

[0094] The supply unit MP can support a portion of the flat surface FS of the glass layer GL and convey the inspection substrate GS. The supply unit MP can provide the glass layer GL, which is to be inspected for defects, below the imaging unit CP. The supply unit MP can position the inspection substrate GS such that the edge of the glass layer GL is arranged between the imaging unit CP and the illumination unit LP. The supply unit MP can continuously provide multiple inspection substrates GS below the imaging unit CP.

[0095] The imaging unit CP can be arranged above the detection substrate GS, opposite the edge of the glass layer GL. The imaging unit CP may include a camera CM, a tube lens TL, and an objective lens OL.

[0096] The camera CM can capture an image of the inspection substrate GS using light provided by the illumination unit LP. Specifically, the camera CM can capture an image of a region overlapping the edge of the glass layer GL. A tube lens TL and an objective lens OL can be arranged below the camera CM. The magnification of the tube lens TL can be determined based on the focal length of the objective lens OL. The tube lens TL and the objective lens OL can provide a magnified image of the inspection substrate GS as the object of the image capture. The substrate inspection device TD can use the image captured by the imaging unit CP to detect whether there are defects at the edge of the glass layer GL and the degree of those defects.

[0097] The illumination unit LP can be arranged below the detection substrate GS, opposite the edge of the glass layer GL. The illumination unit LP can be opposite the imaging unit CP, with the detection substrate GS located between the imaging unit CP and the illumination unit LP. The illumination unit LP can provide light, enabling the camera CM of the imaging unit CP to capture clear images.

[0098] The illumination unit LP can provide linear light toward the detection substrate GS. Specifically, the illumination unit LP can provide linear light that propagates linearly along the thickness direction of the glass layer GL. The illumination unit LP can include a light source and a telecentric lens arranged on the light source. Light passing through the telecentric lens can have enhanced straightness. Due to light reflection, the boundary portion of the object being photographed may be blurred. However, by providing light with enhanced straightness, the illumination unit LP can clearly photograph the boundary of the detection substrate GS, which is the object being photographed. Therefore, the boundary between the edge of the glass layer GL and the protective films PF1 and PF2 can be clearly photographed by the illumination unit LP.

[0099] The optical element (OF) can be disposed between the illumination element (LP) and the detection substrate (GS). The optical element (OF) can be opposite to the edge of the glass layer (GL). The optical element (OF) can alter the path of the light generated in the illumination element (LP). The optical element (OF) may include an optical film that alters the light path. The optical film may include a diffuser, a prism sheet, or a composite sheet formed by combining them.

[0100] The optical unit OF can alter the path of light, causing the amount of light passing through the inclined surfaces IN1 and IN2 of the glass layer GL to differ from the amount of light passing through the flat surface FS of the glass layer GL. For example, the optical unit OF can control the path of light so that, based on the same area on a plane, the amount of light passing through the inclined surfaces IN1 and IN2 of the glass layer GL is less than the amount of light passing through the flat surface FS of the glass layer GL. That is, through the optical unit OF, based on the same area on a plane, the amount of light passing through the second region R2 can be less than the amount of light passing through the first region R1.

[0101] The less light transmitted to the imaging unit CP, the darker the object can be captured. Therefore, the first region R1, through which a relatively large amount of light passes, can be captured as brighter than the second region R2. The greater the brightness contrast between the first region R1 and the second region R2, the clearer the defects of the tilted surfaces IN1 and IN2 of the glass layer GL can be displayed in the captured image. Therefore, the accuracy of determining whether defects exist at the edge of the glass layer GL can be improved.

[0102] The optical unit OF can change the path of light to adjust the degree of light diffusion according to the direction. The optical unit OF can diffuse light in a relatively wide range along the direction extending from the inclined surfaces IN1 and IN2, and can diffuse light in a relatively narrow range along the direction intersecting with the direction extending from the inclined surfaces IN1 and IN2.

[0103] The images captured of the flat surface FS and the inclined surfaces IN1 and IN2 of the glass layer GL can vary depending on the light diffusion range. For example, depending on the light diffusion range, the captured images of the flat surface FS and the inclined surfaces IN1 and IN2 of the glass layer GL can be entirely bright or entirely dark. Therefore, by adjusting the light diffusion range to a reasonable level, the image brightness contrast between the flat surface FS region and the inclined surfaces IN1 and IN2 of the glass layer GL can be made appropriate, and the accuracy of detecting the presence of defects at the edges of the glass layer GL can be improved.

[0104] Figure 4b This is a side view of a substrate inspection apparatus according to yet another embodiment. Figure 4b The substrate inspection apparatus TD of one embodiment shown includes a... Figure 4a The substrate testing devices shown have essentially the same configuration, but differ in some aspects.

[0105] refer to Figure 4b The substrate inspection device TD may also include an autofocus unit AF. The autofocus unit AF may be arranged between the imaging unit CP and the inspection substrate GS on inclined surfaces IN1 and IN2 facing the glass layer GL.

[0106] The autofocus unit (AF) adjusts the focus to ensure it is aligned with the edge of the glass layer GL. The AF then transmits this focus information to the shooting unit (CP). This focus adjustment assists the shooting unit (CP) in capturing a clearer image of the edge of the glass layer GL.

[0107] Figure 5 This is a perspective view of a substrate inspection device according to an embodiment of the present invention. Figure 5 The illumination section LP and the optical section OF in the structure of the substrate inspection device TD are shown, and the remaining structures are omitted. (About...) Figure 5 The description of the structure shown can be applied in the same way as the description above.

[0108] refer to Figure 5 A cut line is shown on the detection substrate GS, which overlaps with the illumination section LP and the optical section OF. Figure 6a Is with Figure 5 The cross-sectional view corresponding to the cutting line I-I' shown. Figure 7a Is with Figure 5 The cross-sectional view corresponding to the cutting line II-II' shown.

[0109] Figure 6a It is a cross-sectional view cut along a second direction DR2 that intersects the first direction DR1, which extends along the first inclined surface IN1 and the second inclined surface IN2 (both extending along the first direction DR1) of the inclined surfaces IN1, IN2 and IN3 of the glass layer GL. Figure 6b It is shown in magnification Figure 6a The image shows an enlarged cross-sectional view of region AA.

[0110] refer to Figure 6a The first inclined surface IN1 of the glass layer GL can be a surface inclined from the flat upper surface, and the second inclined surface IN2 can be a surface inclined from the flat lower surface. The first inclined surface IN1 and the second inclined surface IN2 can be inclined in opposite directions relative to the flat surface FS, and can intersect each other at one end.

[0111] Figure 6a An example is shown showing the inclination angle Θ1 between a line parallel to the flat surface FS of the glass layer GL and a line extending along the first inclined surface IN1. The inclination angle Θ1 can have various forms depending on the design of the glass layer GL and is not limited to any one embodiment.

[0112] The illumination unit LP can provide linear light L1 toward the optical unit OF. The optical unit OF can change the light path of the linear light L1 and can diffuse the linear light L1 along the second direction DR2 at a predetermined angle. Figure 6a and Figure 6b The light that passes through the optical section OF and changes its path along the second direction DR2 is briefly shown and is referred to below as the first light L2.

[0113] The linear light L1 can be parallel to the normal LL of the surface defined by the first direction DR1 and the second direction DR2. The linear light L1 can be perpendicular to the rear surface of the optical unit OF. The first light L2 can be the light whose path of the linear light L1 changes to a first angle Θ2 along the second direction DR2 and the direction opposite to the second direction DR2, with reference to the normal LL. The first light L2 can be incident on the detection substrate GS.

[0114] The optical unit OF can diffuse light in a relatively narrow range along the direction that intersects with the direction extending from the inclined surfaces IN1 and IN2 of the glass layer GL. If the light diffuses in a wide range along the direction perpendicular to the direction extending from the inclined surfaces IN1 and IN2 of the glass layer GL, the reflection range of the light reflected to the inclined surfaces IN1 and IN2 may increase.

[0115] For example, the first angle Θ2 can be greater than 0 degrees and less than 30 degrees. If the first angle Θ2 is greater than 30 degrees, the light passes through the flat surface FS and the inclined surfaces IN1 and IN2 of the glass layer GL, or is reflected and incident on the imaging part CP (reference). Figure 4a The amount of light may increase.

[0116] If the first angle Θ2 is large, the amount of light passing through the first region R1, the second region R2, and the third region R3, based on the same area, may increase. Therefore, the brightness of the image of the flat surface FS, the tilted surfaces IN1 and IN2, and the protective films PF1 and PF2 of the glass layer GL may all increase, and the boundaries between the first region R1, the second region R2, and the third region R3 may become blurred. Consequently, defects at the edges of the glass layer GL present in the tilted surfaces IN1 and IN2 may be difficult to perceive.

[0117] Figure 7a It is a cross-sectional view of the inclined surfaces IN1 and IN2 of the glass layer GL, which extend along the first direction DR1. The cross-section is cut along a direction parallel to the first direction DR1. Figure 7b It is shown in magnification Figure 7a The image shows an enlarged cross-sectional view of region BB.

[0118] The optical unit OF can change the path of the linear light L1 provided by the illumination unit LP, and can diffuse the linear light L1 along the first direction DR1 at a predetermined angle. Figure 7a and Figure 7b The light that passes through the optical section OF and changes its path along the first direction DR1 is briefly shown and is referred to below as the second light L3.

[0119] The second light L3 can be a path of the straight light L1 that changes to a second angle Θ3 along a first direction DR1 and a direction opposite to the first direction DR1, with the normal LL parallel to the straight light L1 as a reference. The second light L3 can be incident toward the detection substrate GS. In terms of the range of light incident toward the detection substrate GS, the second light L3 can be wider than the first light L2 described above.

[0120] The optical unit OF can diffuse light over a relatively wide range along the direction extending from the inclined surfaces IN1 and IN2 of the glass layer GL. Since the inclined surfaces IN1 and IN2 of the glass layer GL are parallel to the light diffusion direction, even if light diffuses over a wide range along the direction extending from the inclined surfaces IN1 and IN2, it can pass through the inclined surfaces IN1 and IN2 or be reflected before entering the imaging unit CP (see reference). Figure 4a The amount of light will not increase significantly.

[0121] For example, the second angle Θ3 can be greater than 30 degrees and less than 80 degrees, and specifically, it can be greater than 30 degrees and less than 60 degrees. If the second angle Θ3 is less than 30 degrees, it passes through the flat surface FS of the glass layer GL and enters the imaging part CP (reference). Figure 4a The amount of light may decrease.

[0122] If the second angle Θ3 is small, the amount of light passing through the first region R1, the second region R2, and the third region R3, based on the same area, may be reduced. Therefore, the brightness of the images of the flat surface FS, the tilted surfaces IN1 and IN2, and the protective films PF1 and PF2 of the glass layer GL may all be reduced, and the boundaries of the first region R1, the second region R2, and the third region R3 may become unclear. Consequently, defects at the edges of the glass layer GL present in the tilted surfaces IN1 and IN2 may not be easily perceived. Furthermore, the images of the adhesive included in the protective films PF1 and PF2 may appear sharper and darker, potentially leading to errors in detecting the presence of defects at the edges of the glass layer GL.

[0123] When the second angle Θ3 is greater than 30 degrees and less than 60 degrees, the light passing through the protective films PF1 and PF2 is scattered by the adhesive contained in the protective films PF1 and PF2, and the image of the adhesive is displayed brightly. Therefore, the protective films PF1 and PF2 can form a clear contrast with the darkened tilted surfaces IN1 and IN2 of the glass layer GL, and can improve the accuracy of detecting whether there are defects at the edge of the glass layer GL.

[0124] Figure 8 This is a perspective view of a substrate inspection apparatus according to one embodiment of the present invention. The descriptions of each component are equally applicable to the above description.

[0125] refer to Figure 8 The imaging unit CP, the optical unit OF, and the illumination unit LP are positioned opposite each other and can move along the edge of the glass layer GL. For example, while the imaging unit CP, the optical unit OF, and the illumination unit LP move along the inclined surfaces IN1 and IN2 in the first direction DR1, they can detect defects at the edge of the glass layer GL, wherein the inclined surfaces IN1 and IN2 extend along the first direction DR1.

[0126] After detection is completed at the ends of the inclined surfaces IN1 and IN2 extending along the first direction DR1, the movement paths of the imaging unit CP, the optical unit OF, and the illumination unit LP can be changed to face other inclined surfaces. At the ends of the inclined surfaces IN1 and IN2 extending along the first direction DR1, the movement paths of the imaging unit CP, the optical unit OF, and the illumination unit LP can bend by 90 degrees. Then, the imaging unit CP, the optical unit OF, and the illumination unit LP can perform detection while moving along the inclined surface extending along the second direction DR2.

[0127] Figures 9a to 9c This is a perspective view illustrating an exemplary embodiment of the optical film. Figures 9a to 9c The optical films F1, F2 and F3 shown can be included in the optical part OF described above to control the light path passing through the optical part OF.

[0128] refer to Figure 9a The optical film F1 may include a base layer BS and a diffusion pattern P1. The base layer BS may include a surface parallel to a plane defined by a first direction DR1 and a second direction DR2. The diffusion pattern P1 may be a portion protruding from the base layer BS toward a third direction DR3.

[0129] The diffusion pattern P1 can be a square pyramid shape including a bottom surface P1-U and inclined surfaces P1-I1 and P1-I2. The bottom surface P1-U of the diffusion pattern P1 can be the surface in contact with the base layer BS. The bottom surface P1-U of the diffusion pattern P1 can be a quadrilateral shape including sides with different lengths from each other.

[0130] The bottom surface P1-U of the diffusion pattern P1 may include a first side a1 extending along a first direction DR1 and a second side a2 extending along a second direction DR2. The lengths of the first side a1 and the second side a2 may be different from each other. For example, the length of the first side a1 may be shorter than the length of the second side a2.

[0131] Since the bottom surface P1-U includes sides with different lengths, the inclined surfaces P1-I1 and P1-I2 of the pyramid can be inclined surfaces with different inclinations relative to the bottom surface P1-U. Based on the base layer BS, the inclinations of the inclined surfaces P1-I1 and P1-I2 of the pyramid can be different. Based on the bottom surface P1-U, the inclination of the inclined surface P1-I1, which includes the first side a1 (shorter than the second side a2), can be greater than the inclination of the inclined surface P1-I2, which includes the second side a2.

[0132] The degree to which the path of light passing through an inclined surface changes can vary depending on the inclination of the inclined surface. Light passing through the optical film F1 in one embodiment can diffuse over a relatively wide range along a first direction DR1 and over a relatively narrow range along a second direction DR2.

[0133] The shape of the diffusion pattern is not limited to Figure 9a The implementation method shown. Figure 9b An optical film F2 is shown as an example, which includes a diffusion pattern P2 with a different shape.

[0134] In one embodiment, the diffusion pattern P2 can be a hemi-ellipsoid shape including a bottom surface. Here, a hemi-ellipsoid refers to a shape in which a portion of an ellipsoid is cut off. The bottom surface of the diffusion pattern P2 can be an elliptical shape including a minor axis b1 and a major axis b2.

[0135] The minor axis b1 may extend along the first direction DR1, and the major axis b2 may extend along the second direction DR2. The cross-section of the semi-ellipsoid may be a parabolic shape with an upward convex shape. The shape of the cross-section cut along the first direction DR1 with the center of the semi-ellipsoid as a reference may be different from the shape of the cross-section cut along the second direction DR2.

[0136] The degree to which the path of light passing through a curved surface with a tangent inclination changes can vary depending on the inclination of the tangent of the curved surface it passes through. Light passing through the optical film F2 in one embodiment can diffuse over a relatively wide range along the first direction DR1 and over a relatively narrow range along the second direction DR2.

[0137] The base layer BS and the diffusion patterns P1 and P2 may contain the same material and may be formed integrally. However, this is not a limitation, and the base layer BS and the diffusion patterns P1 and P2 may contain different materials from each other.

[0138] Figure 9a and Figure 9b The shape of the optical film shown is exemplary, and is not limited to any particular embodiment, as long as the range of diffused light can be controlled according to the direction.

[0139] refer to Figure 9c In one embodiment, the optical film F3 may include a base layer BS and diffusers P3a and P3b. The base layer BS may include a polymer resin. The diffusers P3a and P3b may be dispersed within the base layer BS.

[0140] Diffusers P3a and P3b can be materials that alter the path of light by utilizing refraction. The optical film F3 may include diffusers P3a and P3b with different dimensions from each other. However, it is not limited to this, and diffusers P3a and P3b may be substantially the same size.

[0141] The distribution of diffusers P3a and P3b can vary depending on the direction. Compared to the second direction DR2, diffusers P3a and P3b can be distributed more densely along the first direction DR1. For example, when comparing a portion of the volume of optical film F3 extending along the first direction DR1 with a portion of the volume of optical film F3 extending along the second direction DR2, based on the same volume, diffusers P3a and P3b can be distributed more densely in the portion of optical film F3 extending along the first direction DR1.

[0142] The diffusion range of light passing through the optical films F3, which have different distributions in the diffusers P3a and P3b, can vary depending on the direction. Light passing through the optical film F3 in one embodiment can diffuse over a relatively wide range along the first direction DR1 and over a relatively narrow range along the second direction DR2.

[0143] Figure 9c The distribution of diffusers P3a and P3b shown is exemplary and can vary depending on the materials of the base layer BS and diffusers P3a and P3b. It is not limited to any particular implementation as long as the range of diffused light can be controlled according to the direction.

[0144] Figures 10a to 10c These are images of the substrate being inspected, taken using the substrate inspection apparatus of the comparative example. Figures 11a to 11c These are images of the substrate being inspected, captured using the substrate inspection apparatus described in the embodiment. Figures 10a to 11c The regions R1, R2, and R3 shown can be described in the same way as the first region R1, the second region R2, and the third region R3 described above.

[0145] The implementation method may correspond to including Figure 4b The substrate inspection apparatus shown has the following structure. The comparative example corresponds to a substrate inspection apparatus in a structure that does not include the optical section of the substrate inspection apparatus described in the embodiment.

[0146] refer to Figures 10a to 11c The image of the tilted surface of the glass layer corresponding to the second region R2 appears relatively darker than the images of the first region R1 and the third region R3. The boundary between the second region R2 and the third region R3 may correspond to the edge of the glass layer. As shown in the captured images, a portion of the edge of the glass layer may be concave or exhibit sharp cracks.

[0147] exist Figures 10a to 10c In the image, dark black circles are captured in the first region R1 and the third region R3. This is caused by light generated by the illumination unit being unable to be projected towards the imaging unit due to the adhesive included in the protective film. Because the adhesive appears as dark black at the boundary between the second region R2 and the third region R3, defect detection at the edge of the glass layer may be erroneous.

[0148] For example, an image of adhesive taken at the boundary of a defect-free glass layer might be identified as defective. Alternatively, an image of adhesive taken through a recessed portion of the glass layer's edge might be identified as having no edge defect.

[0149] exist Figures 11a to 11c In the image, the adhesive of the protective film is filtered out in the first region R1 and the third region R3. The path of the light generated by the illumination unit can be changed via the optical unit, and the light with the changed path can be incident on the detection substrate and scattered onto the adhesive. The light reflected by the adhesive is incident on the imaging unit, and thereby the image of the adhesive can be brightened, thus being filtered out in the captured image.

[0150] With the image of the adhesive in the protective film filtered out, edge defects in the glass layer can be clearly displayed in the captured image. This improves the accuracy of detecting the presence of defects at the edges of the glass layer.

[0151] The substrate inspection apparatus of the present invention includes an optical unit arranged above an illumination unit, thereby improving the detection accuracy of edge defects in windows including inclined surfaces. To prevent damage during inspection, a protective film may be attached to the window, and the substrate inspection apparatus of the present invention can inspect windows with the protective film attached. The substrate inspection apparatus of the present invention can capture clearer images of the window edges and can filter images of the adhesive included in the protective film, thereby improving the detection accuracy of edge defects in the window.

[0152] Although the invention has been described above with reference to preferred embodiments, it will be understood by those skilled in the art or of ordinary skill that various modifications and alterations can be made to the invention without departing from the spirit and technical scope of the invention as set forth in the appended claims.

[0153] Therefore, the scope of the present invention should not be limited to the contents described in the detailed description of the specification, but should be determined solely by the claims.

Claims

1. A substrate inspection apparatus, comprising: A providing unit provides a detection substrate including a glass layer, the glass layer including a flat surface and an inclined surface extending along a first direction; An imaging unit is arranged on the inclined surface of the glass layer and takes pictures of the detection substrate; An illumination unit is arranged opposite to the imaging unit, wherein the detection substrate is located between the imaging unit and the illumination unit; as well as An optical section, disposed on the illumination section, includes an optical film. The illumination unit generates linear light that propagates along the thickness direction of the glass layer. The optical unit controls the diffusion angle of the linear light, such that, on a plane with the same area as the reference, the amount of light passing through the inclined surface is less than the amount of light passing through the flat surface.

2. The substrate inspection apparatus according to claim 1, wherein, The optical unit causes the path of the straight light to change to a first angle along the first direction and to a second angle along a second direction intersecting the first direction, wherein the first angle is greater than or equal to the second angle.

3. The substrate inspection apparatus according to claim 2, wherein, The first angle is greater than 30 degrees and less than 80 degrees, and the second angle is greater than 0 degrees and less than 30 degrees.

4. The substrate inspection apparatus according to claim 2, wherein, The optical film includes: The base layer; and A diffusion pattern protrudes from the base layer and refracts the linear light.

5. The substrate inspection apparatus according to claim 4, wherein, The shape of the diffusion pattern is a square pyramid including a bottom surface, and The base surface of the square pyramid includes two sides with different lengths from each other.

6. The substrate inspection apparatus according to claim 5, wherein, Of the two sides, the length of the first side extending along the first direction is less than the length of the second side extending along the second direction.

7. The substrate inspection apparatus according to claim 4, wherein, The shape of the diffusion pattern is a semi-ellipse including the bottom surface. The bottom surface of the semi-elliptic is an ellipse including a minor axis and a major axis.

8. The substrate inspection apparatus according to claim 7, wherein, The short axis extends along the first direction, and the long axis extends along the second direction.

9. The substrate inspection apparatus according to claim 2, wherein, The optical film includes: The base layer; and The diffuser is dispersed within the base layer and refracts the linear light.

10. The substrate inspection apparatus according to claim 1, wherein, The illumination unit includes a telecentric lens.

Images