Pulse laser output control device and control method

Abstract

The embodiment of the application discloses a kind of pulse laser output control device and control method.The control device includes pulse laser generation module and control module;Pulse laser generation module includes seed source, frequency modulation unit and amplification unit, amplification unit includes pump source and gain medium;Control module includes trigger unit and control unit, trigger unit is connected with control unit, frequency modulation unit and pump source are connected with control unit;Control unit is used under the trigger signal output by trigger unit, to control pump source and frequency modulation unit open and close, so that pulse laser generation module exports pulse laser according to preset order.The technical scheme of the embodiment of the application can control pump source and frequency modulation unit open and close according to trigger signal, realize the pulse output of different modes, save external space frequency modulation unit, simplify the structure of laser, reduce the cost of laser, also prolong the service life of laser.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of optical technology, in particular to a pulse laser output control device and control method. BACKGROUND

[0002] Femtosecond laser has been widely used in the field of material fine micro-machining, semiconductor industry, solar photovoltaic, scientific research, etc. due to its extremely high peak power and narrow pulse width. The femtosecond pulse has very high peak power, and direct amplification can easily cause damage to the amplifier device. Therefore, the femtosecond laser usually adopts pulse chirp amplification technology (CPA), that is, the seed light pulse is first expanded to hundreds of picoseconds or even nanoseconds by a stretcher, and then input into an amplifier for pulse amplification. The output pulse of the amplifier is compressed to femtosecond level by a pulse compression device.

[0003] The pulse repetition frequency of the femtosecond seed oscillation cavity is usually tens of MHz, while the pulse repetition frequency of the industrial processing application is usually hundreds of kHz. Therefore, an acousto-optic modulator (AOM) is usually used for frequency reduction during pulse chirp amplification, and a spatial AOM is usually used for output control at the output end. Therefore, the laser usually has two AOMs, the first one is used to reduce the frequency of the seed source to a fixed output frequency, and the second one is used to control the output power and the pulse.

[0004] When the laser performs complex pattern processing, the switching of straight lines and curved lines in the pattern will inevitably cause a change in speed. If a fixed pulse repetition frequency is used, the laser will stay in the curved line part for too long, causing the heat affected zone to expand, which directly affects the processing effect. However, directly changing the output frequency of the laser will not only cause fluctuations in the laser power due to changes in the output frequency of the laser, but also slow switching speed, which will also affect the processing effect.

[0005] Currently, there are several control modes for using femtosecond lasers for industrial processing. There are usually constant light output mode, gate mode and position synchronous output (PSO) mode. The constant light output mode is to make the laser always output light for processing, and the pulse is output at equal intervals. In the Gate mode, when the external trigger signal is high, the output control spatial AOM outputs the pulse light at the fixed repetition frequency set by the frequency reduction AOM, and the pulse interval is fixed. When the external trigger signal is low, the output control spatial AOM is turned off and the pulse signal is stopped. In the PSO mode, the output control spatial AOM outputs a pulse each time the external trigger signal is high, and the pulse output frequency is determined by the frequency of the external trigger signal.

[0006] In order to realize the Gate mode and the PSO mode, a spatial AOM is usually installed at the output of the laser for controlling the output power and selecting a single pulse. The spatial AOM has a certain loss, and the actual output power of the laser is higher, and the rated output power can be reached after the AOM. Moreover, the laser usually operates at full power and emits light, which causes energy loss and reduces the service life of the internal devices of the laser. SUMMARY

[0007] The embodiment of the present application provides a pulse laser output control device and a control method. The control device can control the opening and closing of a pump source and a frequency modulation unit according to a trigger signal, realize different modes of pulse output, save an external spatial frequency modulation unit, simplify the structure of the laser, reduce the cost of the laser, and prolong the service life of the laser.

[0008] According to an aspect of the present application, a pulse laser output control device is provided, comprising a pulse laser generation module and a control module.

[0009] The pulse laser generation module comprises a seed source, a frequency modulation unit and an amplification unit, and the amplification unit comprises a pump source and a gain medium.

[0010] The control module comprises a trigger unit and a control unit, the trigger unit is connected with the control unit, and the frequency modulation unit and the pump source are connected with the control unit.

[0011] The control unit is used for controlling the opening and closing of the pump source and the frequency modulation unit under the trigger signal output by the trigger unit, so that the pulse laser generation module outputs pulse laser according to a preset sequence.

[0012] Optionally, the control unit is also connected with the seed source, and the control unit is also used for acquiring a seed clock signal of seed pulse laser emitted by the seed source.

[0013] The trigger signal output by the trigger unit comprises a gate signal and a position synchronization output signal.

[0014] When the trigger signal is the gate signal, the control unit controls the pump source to be turned on for a first preset time according to the gate signal and the seed clock signal, and drives the frequency modulation unit to reduce the repetition frequency of the seed pulse laser according to a preset repetition frequency, and controls the pump source to be turned off after outputting at least one pulse; during the duration of the first level signal of the gate signal, the pump source and the frequency modulation unit are repeatedly turned on and turned off according to the preset repetition frequency; when the gate signal is a second level signal, the pump source and the frequency modulation unit are simultaneously controlled to be repeatedly turned on and turned off.

[0015] When the trigger signal is the position synchronization output signal, the control unit controls the pump source to be turned on for a second preset time according to the position synchronization output signal and the seed clock signal, and controls the frequency modulation unit to be turned on, and synchronously controls the pump source and the frequency modulation unit to be turned off after outputting at least one pulse.

[0016] Optionally, the trigger signal output by the trigger unit further includes a normal light output signal, and when the trigger signal is the normal light output signal, the control unit controls the pump source to be always turned on, and generates a modulation pulse signal to drive the frequency modulation unit according to the seed clock signal and a repetition frequency setting, so that the pulse laser generating module outputs pulse laser with a preset repetition frequency.

[0017] Optionally, the first preset time is greater than or equal to 1 μs and less than or equal to 1 ms, and the second preset time is greater than or equal to 1 μs and less than or equal to 1 ms.

[0018] Optionally, the pulse laser generating module further includes a pulse stretching unit and a pulse compression unit, and the amplification unit includes a pre-amplification unit and a main amplification unit.

[0019] The seed source, the pulse stretching unit, the pre-amplification unit, the frequency modulation unit, the main amplification unit and the pulse compression unit are sequentially arranged along an optical path.

[0020] The pump source of the main amplification unit is connected with the control unit.

[0021] Optionally, the seed source includes a femtosecond fiber pulse laser with a repetition frequency of 20 MHz to 80 MHz.

[0022] Optionally, the pulse stretching unit includes a circulator and a chirped grating, a first end of the circulator is connected with an output end of the seed source, a second end of the circulator is connected with the chirped grating, and a third end of the circulator is connected with the pre-amplification unit.

[0023] Optionally, the pre-amplification unit and the main amplification unit each comprise a fiber amplifier.

[0024] Optionally, the pulse compression unit comprises a transmission grating-based pulse compressor, a reflection grating-based pulse compressor or a volume grating-based pulse compressor.

[0025] According to another aspect of the present application, there is provided a pulse laser output control method, which is performed by using the pulse laser output device described above, and comprises:

[0026] The seed source outputs a seed pulse laser;

[0027] The trigger unit outputs a trigger signal, and the control unit controls the pump source and the frequency modulation unit to turn on and off according to the trigger signal, so that the pulse laser generation module outputs pulse lasers in a preset order.

[0028] The pulse laser output control device provided by the embodiment of the present application comprises a pulse laser generation module and a control module; the pulse laser generation module comprises a seed source, a frequency modulation unit and an amplification unit, and the amplification unit comprises a pump source and a gain medium; the control module comprises a trigger unit and a control unit. The seed source generates a seed pulse laser, and the amplification unit amplifies the seed pulse laser; the control unit controls the pump source and the frequency modulation unit to turn on and off under the trigger signal output by the trigger unit, so that the pulse laser generation module outputs pulse lasers in a preset order. The control device can dispense with a spatial laser frequency modulation unit (for example, a spatial AOM), and realizes pulse laser output by controlling the pump source and the frequency modulation unit to turn on and off, thereby reducing the cost of the laser, dispensing with the loss caused by the spatial laser frequency modulation unit, and realizing higher power output. Moreover, the laser does not need to operate at full power and all the time, thereby prolonging the service life of the laser and internal devices.

[0029] It should be understood that the description in this section is not intended to identify key or critical features of the embodiments of the present application or to limit the scope of the present application. Other features of the present application will become apparent from the following description. BRIEF DESCRIPTION OF DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative effort.

[0031] Figure 1 It is a structural schematic diagram of a pulse laser in the prior art.

[0032] Figure 2 is a timing diagram of a pulse laser in the prior art;

[0033] Figure 3 is a structural diagram of a pulse laser output control device provided by an embodiment of the present application;

[0034] Figure 4 is a timing diagram corresponding to a Gate mode provided by an embodiment of the present application;

[0035] Figure 5 is a timing diagram corresponding to a PSO mode provided by an embodiment of the present application;

[0036] Figure 6 is a structural diagram of another pulse laser output control device provided by an embodiment of the present application;

[0037] Figure 7 is a flow diagram of a pulse laser output control method provided by an embodiment of the present application. DETAILED DESCRIPTION

[0038] In order to make the personnel in the technical field better understand the present application, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by the personnel in the technical field without creative labor should belong to the protection scope of the present application.

[0039] It should be noted that the terms "first", "second", and the like in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and do not have to be used to describe a specific order or sequence. It should be understood that the data used in this way can be exchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device including a series of steps or units does not have to be limited to those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0040] Figure 1 is a structural diagram of a pulse laser in the prior art, Figure 2 is a timing diagram of a pulse laser in the prior art. Reference Figure 1 and Figure 2The pulse laser comprises a seed source 1, an acousto-optic modulator AOM 2, an amplifier 3, a spatial AOM 4 and a controller 5, wherein the seed source 1 outputs femtosecond seed pulse laser with high repetition frequency (as shown in curve a), the controller 5 is used for controlling the AOM 2 to reduce the repetition frequency of the pulse laser according to a predetermined setting, and is also used for controlling the spatial AOM 4 to work according to an external trigger signal, so as to realize different working modes. Figure 2 The curves b-d in the figure show timing diagrams corresponding to the Gate mode, wherein curve b is a waveform diagram of the external trigger signal in the Gate mode, curve c is a waveform diagram of the modulation signal of the spatial AOM 4 in the Gate mode, and curve d is an output laser pulse in the Gate mode. Figure 2 The curves e-f in the figure show timing diagrams corresponding to the PSO mode, Figure 2 The curves e-f in the figure show timing diagrams corresponding to the PSO mode, Figure 2 The Gate mode and the PSO mode shown in the figure adopt the same external trigger signal, wherein curve e is a waveform diagram of the modulation signal of the spatial AOM 4 in the PSO mode, and curve f is an output laser pulse in the PSO mode.

[0041] In order to solve the above problems, an embodiment of the present application provides a pulse laser output control device. Figure 3 A structure diagram of a pulse laser output control device provided by an embodiment of the present application is shown in the figure. Figure 3 The pulse laser output control device comprises a pulse laser generation module 10 and a control module 20; the pulse laser generation module 10 comprises a seed source 11, a frequency modulation unit 12 and an amplification unit 13, the amplification unit 13 comprises a pump source 131 and a gain medium 132; the control module 20 comprises a trigger unit 21 and a control unit 22, the trigger unit 21 is connected with the control unit 22, and the frequency modulation unit 12 and the pump source 131 are both connected with the control unit 22; the control unit 22 is used for controlling the pump source 131 and the frequency modulation unit 12 to be turned on and turned off under a trigger signal output by the trigger unit 21, so as to make the pulse laser generation module 10 output pulse laser in a preset order.

[0042] The seed source 11 is used to output a high repetition frequency seed pulse light beam, for example, in an embodiment, the seed source 11 can optionally include a femtosecond fiber pulse laser with a repetition frequency of 20 MHz to 80 MHz, and the type and parameters of the seed source 11 can be selected according to actual conditions in specific implementation. The frequency modulation unit 12 is used to modulate the repetition frequency of the pulse laser, specifically to reduce the repetition frequency of the pulse laser, and the frequency modulation unit 12 can be selected from an AOM, an electro-optic modulation unit EOM, and the like, and the embodiment of the present application is not limited. The amplification unit 13 is used to amplify the power of the seed pulse light beam, and in specific implementation, it can be single-stage or multi-stage amplification. The pump source 131 can be a pump laser, for example, a laser diode LD. The gain medium 132 can be a laser crystal, an active optical fiber, or the like. The trigger unit 21 is used to output a trigger signal, for example, a Gate mode trigger signal or a PSO mode trigger signal. The control unit 21 controls the pump source 131 and the frequency modulation unit 12, and when laser output is not required, the pump source 131 is turned off, so that there is no amplified pulse laser output, that is, the pulse laser output is controlled in a non-continuous pumping mode.

[0043] The technical scheme of the embodiment of the present application generates seed pulse laser through a seed source, amplifies the seed pulse laser through an amplification unit, controls the pump source and the frequency modulation unit to be turned on and off under the trigger signal output by the trigger unit through the control unit, so that the pulse laser generation module outputs pulse laser in a preset order. The control device can eliminate the spatial laser frequency modulation unit (for example, a spatial AOM), and realizes pulse laser output by controlling the pump source and the frequency modulation unit to be turned on and off, reduces the cost of the laser, eliminates the loss caused by the spatial laser frequency modulation unit, and can realize higher power output. Moreover, the laser does not need to operate at full power and constant light output, thereby prolonging the service life of the laser and internal devices.

[0044] On the basis of the above-mentioned embodiment, the control unit 22 is further connected with the seed source 11, and the control unit 22 is further used to acquire a seed clock signal of the seed pulse laser emitted by the seed source 11. Figure 3

[0045] The trigger signal output by the trigger unit 21 includes a gate signal and a position synchronization output signal, wherein the gate signal is a Gate mode trigger signal, and the position synchronization output signal is a PSO mode trigger signal.

[0046] ​When the trigger signal is a gate signal, the control unit controls the pump source to be turned on for a first preset time according to the gate signal and the seed clock signal, controls the frequency modulation unit to reduce the repetition frequency of the seed pulse laser according to the preset repetition frequency, and controls the pump source to be turned off after at least one pulse is output.

[0047] The first level signal can be a high level signal, the second level signal can be a low level signal, and the first preset time can be greater than or equal to 1 μs and less than or equal to 1 ms, which can be set according to actual conditions in specific implementation.

[0048] The frequency modulation unit is taken as an example, and the frequency modulation unit is an AOM, which outputs one pulse each time. Figure 4 A timing diagram corresponding to a Gate mode provided by an embodiment of the present application is shown in FIG. 2. Figure 4 The curve g is a trigger signal (Gate signal), the curve h is a switching signal of the pump source, the curve i is a switching signal of the AOM, the dashed line is an equivalent trigger signal, and the curve j is a seed pulse beam sequence, in which the pulse in the dashed box corresponds to the pulse laser output by the pulse laser output control device. Figure 4 In the Gate control mode, when the Gate signal is input into the control unit 22, the timing circuit of the control unit 22 synchronizes the Gate signal with the seed clock signal, the pump source 131 of the amplification unit 13 is first turned on, and the pump current is set according to the current-power corresponding value fitted in advance; after a fixed pump time (the first preset time, usually in the order of μs to hundreds of μs), the AOM is driven to reduce the frequency according to the set frequency according to the seed clock signal and the repetition frequency setting, and the pump source 131 of the amplification unit 13 is turned off after one pulse is output; during the duration of the high level signal of the Gate signal, the pump source 131 and the AOM are repeatedly turned on and off according to the set repetition frequency. When the Gate signal is off (low level), the AOM and the pump source 131 are simultaneously turned off to realize the shutdown of the power.

[0049] When the trigger signal is a position synchronization output signal, the control unit controls the pump source to be turned on for a second preset time according to the position synchronization output signal and the seed clock signal, controls the frequency modulation unit to be turned on every time the trigger appears in the position synchronization output signal, and controls the pump source and the frequency modulation unit to be turned off after at least one pulse is output. The second preset time is greater than or equal to 1 μs and less than or equal to 1 ms.

[0050] The frequency modulation unit is taken as an example, and the frequency modulation unit is an AOM, which outputs one pulse each time. Figure 5A timing diagram corresponding to the PSO mode provided by the embodiment of the present application is shown in FIG. 2. Figure 5 wherein Figure 5 In the curve k, the trigger signal (PSO signal) is shown, the curve l is the switch signal of the pump source, the curve m is the switch signal of the AOM, and the curve n is the seed pulse beam sequence, wherein the pulses in the dashed box correspond to the pulsed laser output by the pulsed laser output control device. In the PSO control mode, when the PSO signal is input into the control unit 22, the timing circuit of the control unit 22 synchronizes the PSO signal with the seed clock signal. According to the seed clock signal, every time a PSO signal is input, the pump source 131 of the amplification unit 13 is first turned on, and the pump current is set according to the pre-fitted current-power corresponding value; after a fixed pump time (second preset time, usually in the order of μs to hundreds of μs), the AOM is turned on to release one pulse, and then the pump source 131 and the AOM are synchronously turned off. In this way, the energy of each pulse is kept consistent according to the trigger signal, and the AOM releases the pulse according to the trigger signal, thereby realizing the PSO working mode. If a continuous pumping mode is used, different intervals of output pulses will be caused, the upper energy level particle number accumulated by the pump will be different, and thus the amplification amplitude of the pulses will be different. If the pulse interval is too long, the upper energy level particle number will spontaneously transition to form spontaneous radiation and then be amplified, which may cause damage to the amplifier. Therefore, the pulsed pumping mode can avoid the above two situations.

[0051] In another embodiment, the trigger signal output by the trigger unit further includes a normal light output signal. When the trigger signal is the normal light output signal, the control unit controls the pump source to be always on, and generates a modulated pulse signal to drive the frequency modulation unit according to the seed clock signal and the repetition frequency setting, so that the pulsed laser generation module outputs pulsed laser with a preset repetition frequency.

[0052] When the trigger signal is in the normal light output mode, the control unit controls the pump source to be always on, and then continuously outputs pulsed laser according to the repetition frequency setting. The specific implementation process is similar to the prior art, and thus will not be described in detail here.

[0053] In another embodiment, in order to improve the output power of the pulsed laser, a step-by-step amplification mode can be used. Figure 6 Another structure diagram of a pulsed laser output control device provided by the embodiment of the present application is shown in FIG. 3. Figure 6Optionally, the pulse laser generation module 10 further comprises a pulse stretching unit 14 and a pulse compression unit 15, and the amplification unit 13 comprises a pre-amplification unit 13a and a main amplification unit 13b; the seed source 11, the pulse stretching unit 14, the pre-amplification unit 13a, the frequency modulation unit 12, the main amplification unit 13b and the pulse compression unit 15 are sequentially arranged along an optical path; the main amplification unit 13b comprises a pump source 131b and a gain medium 132b, and the pump source 131b of the main amplification unit 13b is connected with the control unit 22.

[0054] In the embodiment, the output laser pulse is a femtosecond pulse, and the stretching-amplifying-compressing mode is adopted to avoid damage to the device caused by direct amplification. The specific optical path and device can be designed according to the actual situation, and the embodiment of the present application does not limit this.

[0055] In the embodiment, the pulse stretching unit 14 is used to stretch the femtosecond seed pulse laser to hundreds of picoseconds or even nanoseconds, so as to reduce the peak power. After being amplified by the pre-amplification unit 13a and the main amplification unit 13b, the pulse is compressed to femtosecond by the pulse compression unit 15, so as to realize femtosecond pulse output. In the specific implementation, the pre-amplification unit 13a and the main amplification unit 13b each comprise a fiber amplifier, and the pulse compression unit 15 comprises a pulse compressor based on a transmission grating, a pulse compressor based on a reflection grating or a pulse compressor based on a volume grating, and the present application does not limit this.

[0056] Continuing to refer to Figure 6 Optionally, the pulse stretching unit 14 comprises a circulator 141 and a chirped grating 142, the first end of the circulator 141 is connected with the output end of the seed source 11, the second end of the circulator 141 is connected with the chirped grating 142, and the third end of the circulator 141 is connected with the pre-amplification unit 13a.

[0057] The circulator is a multi-port optical device with non-reciprocal characteristics. When the optical signal is input from one port, it will be output from the next port with very small loss, and the loss of the port leading to all other ports will be very large, becoming a non-communicating port. The principle of pulse stretching is that after the pulse enters the chirped grating and is diffracted, the light of different frequencies in the pulse is dispersed due to different diffraction angles, and the placement of the diffraction element makes the optical path of the blue part of the pulse longer than that of the red part, so the red light will leave the chirped grating before the blue light, realizing pulse stretching.

[0058] Figure 7 A flowchart of a pulse laser output control method provided by the embodiment of the present application is provided, and the pulse laser output control method is executed by using any one of the pulse laser output devices provided by the above embodiments, with reference to Figure 7 The pulse laser output control method comprises the following steps:

[0059] Step S110, the seed source outputs a seed pulse laser.

[0060] The seed source can be a fiber laser, and the output seed pulse laser can be a femtosecond pulse with a repetition frequency of 20MHz-80MHz.

[0061] Step S120, the trigger unit outputs a trigger signal, and the control unit controls the pump source and the frequency modulation unit to open and close according to the trigger signal, so that the pulse laser generation module outputs pulse laser according to a preset order.

[0062] The control of the pump source and the frequency modulation unit to open and close can control the pulse laser generation module to enter the Gate mode or the PSO mode according to the needs.

[0063] The technical scheme of the embodiment of the present application generates seed pulse laser through the seed source, amplifies the seed pulse laser through the amplification unit, controls the pump source and the frequency modulation unit to open and close under the trigger signal output by the trigger unit through the control unit, so that the pulse laser generation module outputs pulse laser according to a preset order. The pulse laser output is realized by controlling the pump source and the frequency modulation unit to open and close, which reduces the cost of the laser, saves the loss caused by the spatial laser frequency modulation unit, and can realize higher power output. Moreover, the laser does not need to operate at full power and constant light output, which prolongs the service life of the laser and the internal devices.

[0064] The above specific embodiments do not constitute a limitation on the protection scope of the present application. Those skilled in the art should understand that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A pulse laser output control device characterized by comprising: The pulse laser generation module comprises a seed source, a frequency modulation unit and an amplification unit, and the amplification unit comprises a pump source and a gain medium. The control module comprises a trigger unit and a control unit, the trigger unit is connected with the control unit, and the frequency modulation unit and the pump source are both connected with the control unit. The control unit is used for controlling the pump source and the frequency modulation unit to be turned on and turned off under the trigger signal output by the trigger unit, so that the pulse laser generation module outputs pulse laser in a preset order. The control unit is also connected with the seed source, and the control unit is also used for acquiring a seed clock signal of seed pulse laser emitted by the seed source. The trigger signal output by the trigger unit comprises a gate signal. When the trigger signal is the gate signal, the control unit controls the pump source to be turned on for a first preset time according to the gate signal and the seed clock signal, drives the frequency modulation unit to reduce the repetition frequency of the seed pulse laser according to a preset repetition frequency, and controls the pump source to be turned off after at least one pulse is output.

2. The pulse laser output control device according to claim 1, wherein the trigger signal output by the trigger unit further comprises a position synchronization output signal. When the trigger signal is the position synchronization output signal, the control unit controls the pump source to be turned on for a second preset time according to the position synchronization output signal and the seed clock signal, controls the frequency modulation unit to be turned on every time the trigger appears in the position synchronization output signal, and synchronously controls the pump source and the frequency modulation unit to be turned off after at least one pulse is output. The trigger signal output by the trigger unit further comprises a constant light output signal, and when the trigger signal is the constant light output signal, the control unit controls the pump source to be constantly turned on, generates a modulation pulse signal to drive the frequency modulation unit according to the seed clock signal and a repetition frequency setting, so that the pulse laser generation module outputs pulse laser with a preset repetition frequency. The first preset time is greater than or equal to 1 μs and less than or equal to 1 ms, and the second preset time is greater than or equal to 1 μs and less than or equal to 1 ms.

3. The pulse laser output control device according to claim 2, characterized by, The pulse laser generation module further comprises a pulse stretching unit and a pulse compression unit, and the amplification unit comprises a pre-amplification unit and a main amplification unit.

4. The pulse laser output control device according to claim 2, characterized by The seed source, the pulse stretching unit, the pre-amplification unit, the frequency modulation unit, the main amplification unit and the pulse compression unit are arranged along an optical path in sequence.

5. The pulse laser output control device according to claim 1, characterized by, ​ ​ The pump source of the main amplification unit is connected with the control unit.

6. The pulse laser output control device according to claim 5, wherein The seed source comprises a femtosecond fiber pulse laser with an output repetition frequency of 20-80 MHz.

7. The pulse laser output control device according to claim 5, wherein The pulse stretching unit comprises a circulator and a chirped grating, the first end of the circulator is connected with the output end of the seed source, the second end of the circulator is connected with the chirped grating, and the third end of the circulator is connected with the pre-amplification unit.

8. The pulse laser output control device according to claim 5, wherein The pre-amplification unit and the main amplification unit each comprise a fiber amplifier.

9. The pulse laser output control device according to claim 5, wherein The pulse compression unit comprises a transmission grating-based pulse compressor, a reflection grating-based pulse compressor or a bulk grating-based pulse compressor.

10. A method of controlling the output of a pulsed laser, characterized by, The pulse laser output control method comprises the following steps: The seed source outputs seed pulse laser; The trigger unit outputs a trigger signal, and the control unit controls the pump source and the frequency modulation unit to be turned on and off according to the trigger signal, so that the pulse laser generation module outputs pulse laser in a preset order.

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