Hot plate cooling system

Abstract

The present invention provides a hot plate cooling system for cooling a hot plate, comprising: a chamber and a cooling module. The hot plate is placed in the chamber. The cooling module is extended in the chamber and faces the hot plate for cooling the hot plate, and comprises a nozzle member, a shell member and an exhaust channel. The nozzle member faces the hot plate and is used to spray a working fluid onto the hot plate. The shell member surrounds the nozzle member, and the nozzle member is arranged in the shell member. The shell member has a receiving groove surrounding the nozzle member. The exhaust channel is connected to the shell member and is connected to the receiving groove. When the nozzle member sprays the working fluid to cool the hot plate, the working fluid is transported through the nozzle member toward a surface of the hot plate, and the working fluid is discharged from the hot plate cooling system in sequence through the receiving groove to the exhaust channel.

Description

Technical Field

[0001] Embodiments of the present invention relate to a hot plate cooling system, and more particularly to a hot plate cooling system having a cooling module. Background Art

[0002] In semiconductor manufacturing, such as wafer fabrication, certain processes, such as baking, require a platform capable of maintaining a predetermined temperature for the wafer product. This platform typically utilizes a heated hotplate. Different wafer processes may require different processing temperatures, and relying on natural cooling to cool the wafer from a high temperature to a low temperature environment can result in low process efficiency. Therefore, providing an efficient and intelligent temperature control system is a critical issue. Summary of the Invention

[0003] According to some embodiments, a hot plate cooling system is provided for cooling a hot plate, comprising: a chamber and a cooling module. The hot plate is placed in the chamber. The cooling module is extended in the chamber and faces the hot plate for cooling the hot plate, and comprises a nozzle member, a shell member and an exhaust channel. The nozzle member faces the hot plate for spraying a working fluid onto the hot plate. The shell member surrounds the nozzle member, and the nozzle member is disposed in the shell member. The shell member has a receiving groove surrounding the nozzle member. The exhaust channel is connected to the shell member and is connected to the receiving groove. When the nozzle member sprays the working fluid to cool the hot plate, the working fluid is transported through the nozzle member toward a surface of the hot plate, and the working fluid is discharged from the hot plate cooling system in sequence through the receiving groove to the exhaust channel.

[0004] In some embodiments, the nozzle member has a main flow channel and a nozzle, the nozzle is connected to the main flow channel, and the nozzle protrudes from the housing member.

[0005] In some embodiments, the nozzle member has a plurality of nozzles, which are accommodated in the housing member and surrounded by the receiving groove.

[0006] In some embodiments, each nozzle has an elongated structure, and the nozzles extend in different directions.

[0007] In some embodiments, the cooling module further includes an exhaust device disposed in the exhaust channel for extracting the working fluid flowing into the exhaust channel through the receiving tank.

[0008] In some embodiments, the cooling module further includes a pneumatic device disposed in a main flow channel of the nozzle member, for spraying the working fluid from the nozzle member through the main flow channel.

[0009] In some embodiments, in some embodiments, the hot plate cooling system includes a receiving unit, a classification unit, and a servo unit. The receiving unit is used to receive a preset information and sense the temperature information of the hot plate to obtain status information. The classification unit is electrically connected to the receiving unit and the classification unit, and the servo unit is electrically connected to the pneumatic device. When the receiving unit compares the preset information and the status information and finds a difference in the temperature of the hot plate, the receiving unit transmits an alarm record to the classification unit, and the receiving unit transmits the preset information and the status information to the classification unit. The classification unit classifies a preset temperature information based on the preset information, and classifies a status temperature information based on the status information, and transmits the alarm record, the preset temperature information, and the status temperature information to the servo unit. The servo unit transmits a control signal to the pneumatic device based on the alarm record, the preset temperature information, and the status temperature information.

[0010] In some embodiments, the receiving unit receives status information at multiple different time points and transmits it to the classification unit. The classification unit classifies the status information into multiple temperature information and transmits it to the servo unit. When the servo unit compares the temperature information and finds a difference and receives an alarm record, the servo unit transmits a control signal to the pneumatic device to activate it.

[0011] In some embodiments, the plurality of state temperature information includes a first state temperature information and a second state temperature information, and the first state temperature information is received by the servo unit earlier than the second state temperature information. When a trend of the first state temperature information toward the preset temperature information differs from a trend of the second state temperature information toward the first state preset temperature information, the servo unit transmits an alarm signal to an external control unit.

[0012] In some embodiments, the hot plate cooling system further includes a fluid detection component disposed in the main flow channel of the nozzle component and the discharge channel communicating with the housing component. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0014] Figure 1 A schematic diagram illustrating a hot plate cooling system according to an embodiment of the present invention.

[0015] Figure 2 A schematic diagram showing a partial enlargement of the nozzle member and the flow of the working fluid.

[0016] Figure 3 Schematic diagram showing the cooling module's sensing and temperature control of the hot plate.

[0017] Figure 4 A schematic diagram illustrating a hot plate cooling system according to another embodiment of the present invention.

[0018] Explanation of symbols

[0019] 100. Hot plate cooling system;

[0020] 10. Chamber;

[0021] 20. Hot plate;

[0022] 21. The surface of the hot plate;

[0023] E1, first end;

[0024] E2, second end;

[0025] 30. Cooling module;

[0026] 301, receiving unit;

[0027] 302, taxonomic unit;

[0028] 303, servo unit;

[0029] 31. Nozzle parts;

[0030] 311, mainstream channel;

[0031] 32. Outer shell parts;

[0032] 321, receiving trough;

[0033] 33. Exhaust channel;

[0034] 34. Pneumatic device;

[0035] 35. Air extraction device;

[0036] C1, control signal;

[0037] F. Working fluid;

[0038] F', the collected working fluid after ejection;

[0039] GS, fluid detection components;

[0040] GS1, GS2, fluid detector;

[0041] MA, alarm signal;

[0042] P, control unit;

[0043] SA, alarm record;

[0044] SP, accommodation space;

[0045] S0, preset information;

[0046] S0', preset temperature information;

[0047] S1, status information;

[0048] S1', status temperature information. DETAILED DESCRIPTION

[0049] See also Figure 1 , which is a schematic diagram of a hot plate cooling system 100 according to an embodiment of the present invention. The hot plate cooling system 100 can be applied to a tool system in a semiconductor manufacturing process, such as a system for processing one or more wafers.

[0050] The hot plate cooling system 100 includes a chamber 10, a hot plate 20, and a cooling module 30. The chamber 10 has a receiving space SP, within which the hot plate 20 is located and used to heat the wafer. The cooling module 30 is disposed within the receiving space SP of the chamber 10, or rather, extends from outside the chamber 10 into the receiving space SP of the chamber 10. It is used to control and adjust the temperature of the hot plate 20, such as cooling it, to ensure that the process is carried out at a predetermined temperature.

[0051] In this embodiment, the cooling module 30 includes multiple (two) nozzle members 31, one disposed at opposite ends of the heat plate 20. Specifically, the nozzle members 31 are disposed adjacent to the first end E1 and the second end E2 of the nozzle member 31, with the first end E1 and the second end E2 facing each other. In some embodiments, the nozzle members 31 are configured to eject the working fluid F to cool the heat plate 20. A housing member 32 is disposed around each nozzle member 31, surrounding the nozzle member 31. In other words, the nozzle member 31 is disposed within the housing member 32.

[0052] See also Figure 1 and Figure 2 The housing 32 has a receiving groove 321 surrounding the nozzle member 31. The cooling module 30 also includes a discharge channel 33 connected to the receiving groove 321 of the housing 32. The receiving groove 321 is used to receive the working fluid F ejected or output from the nozzle member 31, thereby recovering and discharging the working fluid F for temperature control (e.g., heat dissipation) of the hot plate 20. The receiving groove 321 is connected to the discharge channel 33, thereby smoothly discharging the ejected working fluid F' out of the hot plate cooling system 100.

[0053] In detail, when the nozzle member 31 sprays the working fluid F to cool the hot plate, the working fluid F is transported through the nozzle member 31 toward a surface 21 of the hot plate 20. Subsequently, the sprayed working fluid F is received by the receiving groove 321, that is, the working fluid F' is sequentially discharged from the hot plate cooling system 100 through the receiving groove 321 to the discharge channel 33.

[0054] See Figure 2It is worth noting that, in this embodiment, the nozzle member 31 has a main flow channel 311 and a plurality of nozzles 312. The nozzles 312 are accommodated in the housing member 32 and protrude from the housing member 32. In other words, the height of the nozzles 312 is higher than the height of the housing member 32 (in the Z-axis direction) and is closer to the hot plate 20 ( Figure 1 ), so that the working fluid F cools the hot plate 20, accelerating the cooling of the hot plate 20 and improving process efficiency. In some embodiments, each nozzle 312 has an elongated structure, and each nozzle 312 extends in a different direction. In some embodiments, the nozzle member 31 may include a single nozzle 312 to spray the working fluid F to cool the hot plate.

[0055] In some embodiments, a pneumatic device 34 is provided in the main flow channel 311 of the nozzle member 31 to quickly and smoothly eject the working fluid F from the nozzle 312 through the main flow channel 311. The pneumatic device 34 can also serve as an air supply unit to provide the working fluid F. In some embodiments, the exhaust channel 33 is provided with an exhaust device 35, such as a blower, to extract the working fluid F' flowing through the receiving tank 321 to the exhaust channel 33. In addition to accelerating the exhaust of the working fluid F', it can also collect particles that may be generated when the working fluid F cools the hot plate 20, thereby improving process cleanliness.

[0056] Figure 3 The schematic diagram shows how the cooling module 30 senses and controls the temperature of the hot plate 20 in some embodiments of the present invention. The cooling module 30 further includes a receiving unit 301 , a classification unit 302 , and a servo unit 303 .

[0057] The receiving unit 301 is, for example, a device that can receive one or more predetermined recipes and can be used to sense the current state of the chamber 10 and / or the hot plate 20, such as temperature, humidity, and pressure information of the chamber 10 and / or the hot plate 20. In some embodiments, the receiving unit 301 is electrically connected to the aforementioned classification unit 302. The classification unit 302 can be a Fault Detection and Classification (FDC) unit that collects data from the receiving unit 301. In some embodiments, the FDC unit can provide univariate and multivariate analysis depending on process status and requirements.

[0058] The servo unit 303 is electrically connected to the classification unit 302 and the pneumatic device 34 , and can receive information from the classification unit 302 and calculate an appropriate control signal based on the information to control the pneumatic device 34 .

[0059] Regarding the temperature control of the hot plate 20 by the cooling module 30, specifically, first, the receiving unit 301 receives a preset information S0, such as a preset recipe, to understand the process requirements for the temperature of the hot plate 20, and then performs a sensing operation on the hot plate 20 to measure a state information S1 including at least temperature state data of the hot plate 20. In some embodiments, the preset information S0 includes temperature state information, humidity information, and pressure information of the chamber 10 and / or the hot plate 20.

[0060] Next, the preset information S0 and the state information S1 are compared. If there is a difference in the temperature data of the hot plate 20 between the two information S0 and S1, an alarm log SA is issued. This alarm log SA is transmitted along with the preset information S0 and the state information S1 to the classification unit 302. The classification unit 302 obtains or classifies the preset temperature information S0' and the state temperature information S1' of the hot plate 20 based on the contents of the preset information S0 and the state information S1, and transmits the information along with the alarm log SA to the servo unit 303. In some embodiments, the classification unit 302 transmits the complete preset information S0 and the state information S1 together with the alarm log SA to an external control unit P (e.g., a user computer) so that the operator can obtain and monitor the information in real time.

[0061] Subsequently, the servo unit 303 receives the alarm record SA and the temperature information S0 ′ (preset temperature) and S1 ′ (current temperature of the hot plate 20 ) from the classification unit 302 , and calculates a control signal C1 based on these information to control the activation / deactivation of the braking device 34 .

[0062] In some embodiments, the receiving unit 301 can periodically detect the temperature of the hot plate 20 and transmit the temperature information to the classification unit 302 in real time. The classification unit 302 receives the status information S1 at different time points at predetermined intervals. The classification unit 302 then classifies the status information S1 into the portion containing temperature information and transmits the status temperature information S1′ to the servo unit 303 in real time.

[0063] In some embodiments, the servo unit 303 controls the activation / deactivation of the pneumatic device 34 based on a comparison of state temperature information S1' received at different times. For example, the servo unit 303 receives state temperature information S1' of the current state every second (i.e., the receiving unit 301 is configured to transmit state information S1 every second). The servo unit 303 compares the previously received state temperature information S1' with the subsequently received state temperature information S1'. If the latter received temperature is lower than the former temperature, it indicates that the process will require a temperature reduction operation. The servo unit 303 then compares the preset temperature information S0' with the subsequently received state temperature information S1' and generates a control signal C1 to activate the pneumatic device 34.

[0064] In this way, since the signal control comes from the servo unit 303, and the servo unit 303 generates a control signal based on the information from the aforementioned receiving unit 301 and the classification unit 302, compared to the traditional method of using a temperature controller to adjust the temperature, the embodiment of the present invention uses the original sensing status information to adjust the temperature of the hot plate 20 without using an additional temperature control signal, which can make the overall cooling module more stable and avoid the phenomenon of signal attenuation.

[0065] In some embodiments, when the difference between the preset temperature information S0' and the state temperature information S1' received by the servo unit 303, as well as the difference between the previous and next state temperature information S1', does not correspond, an alarm signal MA is issued to the control unit P. For example, the temperature value of the preset temperature information S0' is 90°C, and the previous (first) state temperature information S1' is 95°C, indicating that the process is currently in a cooling state (from 95°C to 90°C). However, the next (second) state temperature information S1' is 96°C, indicating that the temperature of the hot plate 20 is currently rising (from 95°C to 96°C). This is an abnormal state, and the servo unit 303 sends the alarm signal MA to the control unit P to facilitate operator processing. In other words, the multiple state temperature information S1' includes at least an earlier first state temperature information and a later second state temperature information, and the first state temperature information is received by the servo unit 303 before the second state temperature information. When the trend from the first-state temperature information to the preset temperature information S0′ is different from the trend from the second-state temperature information to the first-state preset temperature information, the servo unit 303 transmits an alarm signal MA to an external control unit P. In some embodiments, when the servo unit 303 transmits the alarm signal MA, it also sends a control signal C1 to the pneumatic device 34 to shut it down.

[0066] In some embodiments, the pneumatic device 34 uses a normally closed valve, which can automatically close when a power outage or other abnormality occurs to avoid unexpected situations.

[0067] See Figure 4 In other embodiments, fluid detectors GS1 and GS2 are provided in the main flow channel 311 and the outlet channel 33 of the nozzle member 31 to detect the flow or presence of fluid and thereby indicate whether an abnormality has occurred. For example, when the valve of the pneumatic device 34 is closed, fluid flow in the main flow channel is detected, or when the pneumatic device 34 is in the start-up mode and its valve is open, but no fluid flow is detected. In some embodiments, the fluid detector GS is electrically connected to the aforementioned control unit P and can transmit an alarm signal to the control unit P when such an abnormality occurs. In some embodiments, the fluid detectors GS1 and GS2 can form a fluid detection assembly GS.

[0068] One embodiment of the present invention provides a hot plate cooling system for cooling a hot plate, comprising: a chamber and a cooling module. The hot plate is placed in the chamber. The cooling module is extended in the chamber and faces the hot plate for cooling the hot plate, and comprises a nozzle member, a shell member and an exhaust channel. The nozzle member faces the hot plate and is used to spray a working fluid onto the hot plate. The shell member surrounds the nozzle member, and the nozzle member is arranged in the shell member. The shell member has a receiving groove surrounding the nozzle member. The exhaust channel is connected to the shell member and is connected to the receiving groove. When the nozzle member sprays the working fluid to cool the hot plate, the working fluid is transported through the nozzle member toward a surface of the hot plate, and the working fluid is discharged from the hot plate cooling system in sequence through the receiving groove to the exhaust channel.

[0069] In some embodiments, the hot plate cooling system includes a receiving unit, a classification unit, and a servo unit. The receiving unit is used to receive a preset information and sense the temperature information of the hot plate to obtain status information. The classification unit is electrically connected to the receiving unit and the classification unit, and the servo unit is electrically connected to the pneumatic device. When the receiving unit compares the preset information and the status information and finds a difference in the temperature of the hot plate, the receiving unit transmits an alarm record to the classification unit, and the receiving unit transmits the preset information and the status information to the classification unit. The classification unit classifies a preset temperature information based on the preset information, and classifies a status temperature information based on the status information, and transmits the alarm record, the preset temperature information, and the status temperature information to the servo unit. The servo unit transmits a control signal to the pneumatic device based on the alarm record, the preset temperature information, and the status temperature information.

[0070] Embodiments of the present invention have at least one of the following advantages or effects: The aforementioned nozzle and housing components of the cooling module allow the working fluid to cool the hot plate smoothly and are capable of immediate and effective recovery of the working fluid, achieving a rapid and safe cooling effect. Furthermore, in some embodiments, the pneumatic device that delivers the working fluid within the cooling module is controlled by a servo unit, which generates control signals based on information from a receiving unit and a classification unit. Compared to conventional temperature control methods using a temperature controller, embodiments of the present invention utilize existing sensor status information to adjust the hot plate temperature, reducing the need for additional temperature control signals. This makes the overall cooling module more stable and avoids signal attenuation, thereby improving overall process efficiency and quality.

Claims

1. A hot plate cooling system for cooling a hot plate, characterized in that: include: a chamber in which the hot plate is placed; as well as a cooling module extending within the chamber and facing the hot plate for cooling the hot plate, comprising: a nozzle member facing the heat plate and configured to spray a working fluid onto the heat plate; a housing member surrounding the nozzle member, wherein the nozzle member is disposed in the housing member, wherein the housing member has a receiving groove surrounding the nozzle member; as well as a discharge channel connected to the housing and communicating with the receiving tank; When the nozzle member sprays the working fluid to cool the hot plate, the working fluid is transported through the nozzle member toward a surface of the hot plate, and the working fluid sequentially passes through the receiving groove to the discharge channel and is discharged from the hot plate cooling system. The cooling module further includes a pneumatic device disposed in a main flow channel of the nozzle member, for ejecting the working fluid from the nozzle member through the main flow channel. The hot plate cooling system also includes: a receiving unit for receiving a preset message and sensing the temperature information of the hot plate to obtain a status information; a taxon; and a servo unit, wherein the classification unit is electrically connected to the receiving unit and the classification unit, and the servo unit is electrically connected to the pneumatic device; When the receiving unit compares the preset information with the temperature of the hot plate in the status information and finds a difference, the receiving unit transmits an alarm record to the classification unit, and the receiving unit transmits the preset information and the status information to the classification unit; wherein the classification unit classifies a preset temperature information according to the preset information and classifies a state temperature information according to the state information, and transmits the alarm record, the preset temperature information and the state temperature information to the servo unit; The servo unit transmits a control signal to the pneumatic device according to the alarm record, the preset temperature information and the state temperature information. The receiving unit receives status information at multiple different time points and transmits the status information to the classification unit: The classification unit classifies a plurality of state temperature information according to the state information and transmits the plurality of state temperature information to the servo unit; When the servo unit compares the state temperature information and finds a difference and receives the alarm record, the servo unit transmits the control signal to the pneumatic device to open it.

2. The hot plate cooling system according to claim 1, characterized in that The nozzle component has a main flow channel and a nozzle. The nozzle is communicated with the main flow channel and protrudes from the housing component.

3. The hot plate cooling system according to claim 1, characterized in that The nozzle component has a plurality of nozzles, which are accommodated in the outer shell component and surrounded by the receiving groove.

4. The hot plate cooling system according to claim 3, characterized in that Each nozzle has an elongated structure, and the extending directions of the nozzles are different.

5. The hot plate cooling system according to claim 1, characterized in that The cooling module further includes an air extraction device disposed in the exhaust channel for extracting the working fluid flowing into the exhaust channel through the receiving tank.

6. The hot plate cooling system according to claim 1, characterized in that The state temperature information includes a first state temperature information and a second state temperature information, and the first state temperature information is received by the servo unit earlier than the second state temperature information; When a trend from the first-state temperature information to the preset temperature information is different from a trend from the second-state temperature information to the first-state preset temperature information, the servo unit transmits an alarm signal to an external control unit.

7. The hot plate cooling system according to claim 1, characterized in that The invention also includes a fluid detection component, which is arranged in a main flow channel and the discharge channel of the nozzle member.

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