Optical device and method for manufacturing the same

Abstract

The present invention provides an optical device and a manufacturing method thereof. The optical device includes a substrate and a plurality of optical structures. The substrate includes a plurality of photoelectric conversion elements. The plurality of optical structures are arranged on the substrate. Each optical structure corresponds to a photoelectric conversion element. Each optical structure includes a first part and a second part. The first part has a first glass transition temperature. The second part has a second glass transition temperature. The second part guides incident light into the photoelectric conversion element. The first glass transition temperature is greater than the second glass transition temperature.

Description

Technical Field

[0001] The invention relates to an optical device, in particular to an optical device with a double optical microstructure. Background Art

[0002] When light from the camera module lens enters the CMOS image sensor (CIS), there is a wide chief ray angle (CRA) at the edge of the CIS. Since the LEDs at the edge of the CIS cannot effectively receive light, the color performance and image quality will be poor in low light conditions. Summary of the invention

[0003] According to one embodiment of the present invention, an optical device is provided. The optical device includes a substrate and a plurality of optical structures. The substrate includes a plurality of photoelectric conversion elements. The plurality of optical structures are arranged on the substrate. Each optical structure corresponds to a photoelectric conversion element. Each optical structure includes a first part and a second part. The first part has a first glass transition temperature. The second part has a second glass transition temperature. The second part guides incident light into the photoelectric conversion element. The first glass transition temperature is greater than the second glass transition temperature.

[0004] In some embodiments, the first portion and the second portion are disposed on the same plane.

[0005] In some embodiments, the first glass transition temperature of the first portion is less than or equal to 350° C. and greater than or equal to 70° C. In some embodiments, the second glass transition temperature of the second portion is less than or equal to 300° C. and greater than or equal to 50° C. In some embodiments, the refractive index of the first portion is less than or equal to 2.9 and greater than 1. In some embodiments, the refractive index of the second portion is less than or equal to 2.8 and greater than 1.1.

[0006] In some embodiments, the first portion includes a rectangle, a triangle, an isosceles trapezoid or an irregular trapezoid in cross-sectional view. In some embodiments, the second portion has an aspherical surface in cross-sectional view. In some embodiments, the second portion has a plane, a convex surface or a concave surface in cross-sectional view.

[0007] In some embodiments, the first part surrounds the second part. In some embodiments, the first part includes a closed ring when viewed from a top view. In some embodiments, when the first part is a closed ring, the first part includes a circular ring opening, a square ring opening, an elliptical ring opening, or an aspherical ring opening when viewed from a top view. In some embodiments, the second part covers a portion of the first part.

[0008] In some embodiments, the first portion includes a U-shape, an L-shape, an irregular shape with a curved surface, a rectangle, or a triangle in a top view.

[0009] In some embodiments, when the first portion includes a columnar structure, the second portion completely covers the first portion. In some embodiments, the first portion includes a cylinder, a cone, a single square column, or multiple square columns. In some embodiments, the first portion includes a stack of multiple square columns or a stack of multiple circular columns.

[0010] In some embodiments, the substrate includes a first area, a second area, and a third area from the center to the edge. In some embodiments, the first portion of each optical structure disposed in the first area has a first height, the first portion of each optical structure disposed in the second area has a second height, the first portion of each optical structure disposed in the third area has a third height, the third height is greater than the second height, and the second height is greater than the first height. In some embodiments, when the second portion of each optical structure has a spherical surface, the second portion of each optical structure disposed in the first area has a first curvature, the second portion of each optical structure disposed in the second area has a second curvature, the second portion of each optical structure disposed in the third area has a third curvature, the third curvature is greater than the second curvature, and the second curvature is greater than the first curvature. In some embodiments, when the second portion of each optical structure has a slope, the second portion of each optical structure disposed in the first zone has a first slope, the second portion of each optical structure disposed in the second zone has a second slope, and the second portion of each optical structure disposed in the third zone has a third slope, the third slope is greater than the second slope, and the second slope is greater than the first slope.

[0011] In some embodiments, the photoelectric conversion element closest to the center of the chip has a first boundary, the optical structure closest to the center of the chip has a second boundary, and there is a distance between the first boundary and the second boundary.

[0012] In some embodiments, the optical device further comprises a plurality of color filters disposed between the substrate and the plurality of optical structures. In some embodiments, the optical device further comprises a plurality of micro lenses disposed between the plurality of color filters and the plurality of optical structures.

[0013] In some embodiments, the angle ψ is defined as the angle between a connecting line connecting the center of the substrate and the centroid of the optical structure in the pixel and a horizontal line passing through the center of the substrate in a top view. In some embodiments, when the first portion surrounds the second portion and the first portion is a closed loop, as the angle ψ changes, the first portion in each pixel has the same relative position, and the position of the second portion in each pixel changes with the angle ψ. In some embodiments, when the first portion is a columnar structure and the second portion completely covers the first portion, as the angle ψ changes, the first portion and the second portion in each pixel have different relative positions with the angle ψ.

[0014] According to one embodiment of the present invention, a method for manufacturing an optical device is provided. The method for manufacturing an optical device comprises the following steps. A substrate is provided. A first material is formed on the substrate. The first material has a first glass transition temperature. A second material is formed on the substrate. The second material has a second glass transition temperature. The first glass transition temperature is greater than the second glass transition temperature. A thermal process is performed to form a plurality of optical structures.

[0015] In some embodiments, the thermal process includes lamp irradiation, laser irradiation, conduction or liquid dissolution. In some embodiments, the liquid dissolution includes physical etching or chemical etching. In some embodiments, the manufacturing method further includes adjusting the volume or height of the second material before the thermal process. In some embodiments, the thermal process includes applying different levels of thermal energy. In some embodiments, the manufacturing method further includes performing an etching process after the thermal process.

[0016] In the present invention, a specific dual optical microstructure (with adjustable position, contour shape, size and component combination) is configured above the photoelectric conversion element of a CMOS image sensor (CIS). The dual optical microstructure can improve light receiving efficiency and reduce crosstalk in the CIS.

[0017] Embodiments are given in the following examples with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention may be more fully understood by reading the following detailed description and examples and by referring to the accompanying drawings, in which:

[0019] Figure 1 is a cross-sectional schematic diagram of an optical device according to an embodiment of the present invention;

[0020] Figure 2 A schematic cross-sectional view of the outline of a first portion of an optical structure according to an embodiment of the present invention;

[0021] Figure 3A to Figure 3DA schematic cross-sectional view of the outline of a first portion of an optical structure according to different embodiments of the present invention;

[0022] Figure 4A to Figure 4E A schematic cross-sectional view of the outline of the second part of an optical structure according to different embodiments of the present invention;

[0023] Figure 5 A top view of a configuration of an optical structure in a pixel according to an embodiment of the present invention;

[0024] Figure 6A to Figure 6D A top view of a configuration of a first portion and a second portion of an optical structure according to various embodiments of the present invention;

[0025] FIG. 7A to FIG. 7D A top view of a configuration of a first portion and a second portion of an optical structure according to various embodiments of the present invention;

[0026] Fig. 8A A top view of the configuration of a first portion and a second portion of an optical structure according to an embodiment of the present invention;

[0027] Figure 8B A cross-sectional schematic diagram of the configuration of a first portion and a second portion of an optical structure according to an embodiment of the present invention;

[0028] Fig. 9 A top view of the configuration of a first portion and a second portion of an optical structure according to an embodiment of the present invention;

[0029] FIG. 10A to FIG. 10D A top view of a configuration of a first portion and a second portion of an optical structure according to various embodiments of the present invention;

[0030] FIG. 11A to FIG. 11D A top view of a configuration of a first portion and a second portion of an optical structure according to various embodiments of the present invention;

[0031] FIG. 12A to FIG. 12D A top view of a configuration of a first portion and a second portion of an optical structure according to various embodiments of the present invention;

[0032] FIG. 13A to FIG. 13D A top view of a configuration of a first portion and a second portion of an optical structure according to various embodiments of the present invention;

[0033] Fig.13E A cross-sectional schematic diagram of the configuration of a first portion and a second portion of an optical structure according to an embodiment of the present invention;

[0034] FIG. 14A to FIG. 14DA top view of a configuration of a first portion and a second portion of an optical structure according to various embodiments of the present invention;

[0035] Fig.15A A top view of the configuration of a first portion and a second portion of an optical structure according to an embodiment of the present invention;

[0036] Fig. 15B A top view of the configuration of a first portion and a second portion of an optical structure according to an embodiment of the present invention;

[0037] FIG. 16A to FIG. 16D A top view of a configuration of a first portion and a second portion of an optical structure according to various embodiments of the present invention;

[0038] Fig.17A A top view of the configuration of a first portion and a second portion of an optical structure according to an embodiment of the present invention;

[0039] Fig. 17B A top view of the configuration of a first portion and a second portion of an optical structure according to an embodiment of the present invention;

[0040] Fig. 17C A top view of the configuration of a first portion and a second portion of an optical structure according to an embodiment of the present invention;

[0041] Fig.18A A top view of the configuration of a first portion and a second portion of an optical structure according to an embodiment of the present invention;

[0042] Fig.18B A cross-sectional schematic diagram of the configuration of a first portion and a second portion of an optical structure according to an embodiment of the present invention;

[0043] Fig.18C A top view of the configuration of a first portion and a second portion of an optical structure according to an embodiment of the present invention;

[0044] Fig.19A A top view of the configuration of a first portion and a second portion of an optical structure according to an embodiment of the present invention;

[0045] Fig.19B A top view of the configuration of a first portion and a second portion of an optical structure according to an embodiment of the present invention;

[0046] Fig. 20 is a cross-sectional schematic diagram of an optical device according to an embodiment of the present invention;

[0047] Fig.21 is a cross-sectional schematic diagram of an optical device according to an embodiment of the present invention;

[0048] Fig. 22 is a cross-sectional schematic diagram of an optical device according to an embodiment of the present invention;

[0049] Fig.23 is a cross-sectional schematic diagram of an optical device according to an embodiment of the present invention;

[0050] Fig.24 is a cross-sectional schematic diagram of a method for manufacturing an optical device according to an embodiment of the present invention;

[0051] Fig.25 is a cross-sectional schematic diagram of a method for manufacturing an optical device according to an embodiment of the present invention;

[0052] Fig.26 An AFM profile image showing an optical structure after reflow according to an embodiment of the present invention;

[0053] Fig. 27 An AFM profile image showing an optical structure after reflow according to an embodiment of the present invention; and

[0054] Fig.28 FIG. 1 is an AFM profile image showing an optical structure after reflow according to an embodiment of the present invention.

[0055] The reference numerals are as follows:

[0056] 10: Optical device

[0057] 12:Substrate

[0058] 12a: first area of ​​substrate

[0059] 12b: Second region of substrate

[0060] 12c: The third region of the substrate

[0061] 12d: Center of the substrate

[0062] 12e: Edge of substrate

[0063] 14,14a,14b,14c,14d,14e: Optical structure

[0064] 14e1: Boundaries of optical structures

[0065] 16: Photoelectric conversion element

[0066] 16e: Boundary of photoelectric conversion element

[0067] 18: Part I (First Material)

[0068] 18a, 18b, 18c: Square column (cylinder)

[0069] 18d: Square column

[0070] 18': Square ring opening

[0071] 18”: Circular opening

[0072] 19: Second Material

[0073] 20: Part 2

[0074] 21: Incident light

[0075] 22: Color filter

[0076] 24: Microlens

[0077] 26: Flat layer

[0078] 26': upper surface of flat layer

[0079] 28: Thermal Process

[0080] 30: Etching process

[0081] c1,s1: first curvature

[0082] c2,s2: second curvature

[0083] c3,s3: third curvature

[0084] C: The line connecting the center of the substrate and the center of mass of the optical structure

[0085] d: Gap between adjacent optical structures

[0086] D1: The distance between the optical structure boundary and the photoelectric conversion element boundary

[0087] h: height of the first part

[0088] h1: first height

[0089] h2: Second height

[0090] h3: third height

[0091] H: horizontal line through the center of the substrate

[0092] Mc: Center of mass of the optical structure

[0093] N: Normal of the upper surface of the flat layer

[0094] P1, P2, P3, P4, P5: pixels

[0095] S1: Left side wall of the first section

[0096] S2: Right side wall of the first section

[0097] sp1: first slope

[0098] sp2: second slope

[0099] sp3: third slope

[0100] Sa, Sb: Aspheric surface of the second part

[0101] Sc: The second part of the slope

[0102] Sd: concave surface of the second part

[0103] Se: Plane of the second part

[0104] Sa1, Sa2, Sa3: The second part of the sphere

[0105] Sc1,Sc2,Sc3: The second part of the slope

[0106] W1: Top width of the first section

[0107] W2: Bottom width of the first section

[0108] α1: Angle between the right side wall of the first part and the normal to the upper surface of the flat layer

[0109] α2: Angle between the left wall of the first part and the normal to the upper surface of the flat layer

[0110] ψ: Angle between the line connecting the center of the substrate and the center of mass of the optical structure and the horizontal line passing through the center of the substrate DETAILED DESCRIPTION

[0111] The optical device of the present invention is described in detail in the following description. In the following embodiments, for the purpose of explanation, many specific details and embodiments are set forth to provide a thorough understanding of the present disclosure. The specific elements and configurations described in the following embodiments are set forth to clearly describe the present disclosure. However, it will be apparent that the exemplary embodiments set forth herein are for illustrative purposes only, and the inventive concept can be embodied in various forms, without being limited to those exemplary embodiments. In addition, the drawings of different embodiments may use similar and / or corresponding numbers to represent similar and / or corresponding elements in order to clearly describe the present disclosure. However, the use of similar and / or corresponding numbers in the drawings of different embodiments does not imply any correlation between different embodiments. In addition, in this specification, for example, the expression "a first material layer disposed on / above a second material layer" may refer to direct contact between the first material layer and the second material layer, or it may refer to a non-contact state with one or more intermediate layers between the first material layer and the second material layer. In the above case, the first material layer may not be in direct contact with the second material layer.

[0112] In addition, in this specification, relative expressions are used. For example, "lower", "bottom", "upper" or "top" are used to describe the position of an element relative to another element. It should be understood that if the device is turned upside down, the "lower" element will become the "upper" element.

[0113] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as generally understood by one of ordinary skill in the art to which the invention belongs. It should be understood that in various cases, terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with the relative skill of the present disclosure and the background or context of the present disclosure, and should not be interpreted in an idealized or overly formal manner unless so defined.

[0114] In the description, relative terms such as "lower", "upper", "horizontal", "vertical", "below", "above", "top", "bottom", etc. should be understood as the orientation shown in the embodiment and related drawings. This relative terminology is for the convenience of explanation and does not mean that the device described needs to be manufactured or operated in a specific orientation. In addition, terms related to bonding and connection, such as "connection", "interconnection", etc., unless otherwise defined, can indicate that two structures are in direct contact, or can also indicate that two structures are not in direct contact, but there is another structure arranged between the two structures. In addition, terms related to bonding and connection can also include embodiments in which both structures are movable or both structures are fixed.

[0115] It should be understood that, although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, film layers, parts and / or sections, these elements, components, regions, film layers, parts and / or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, film layer, part or section from another element, component, region, film layer, part or section. Therefore, without departing from the teachings of the present disclosure, the first element, component, region, film layer, part or section discussed below may be referred to as the second element, component, region, film layer, part or section.

[0116] In the specification, the terms "about", "approximately" and "generally" generally indicate a range within plus or minus 20%, plus or minus 10%, plus or minus 5%, plus or minus 3%, plus or minus 2%, plus or minus 1%, or plus or minus 0.5% of a given value. The quantity given here is an approximate quantity, that is, in the absence of a specific description of "about", "approximately" and "generally", the meaning of "about", "approximately" and "generally" can still be implied.

[0117] The following description is the best mode of implementing the present invention. The purpose of this description is to illustrate the general principles of the present invention and should not be considered as limiting. The scope of the present invention shall be determined by the appended claims.

[0118] See also Figure 1 According to one embodiment of the present invention, an optical device 10 is provided. Figure 1 is a schematic cross-sectional view of the optical device 10 .

[0119] like Figure 1 As shown, the optical device 10 includes a substrate 12 and a plurality of optical structures 14. The substrate 12 includes a plurality of photoelectric conversion elements 16. The optical structures 14 are disposed on the substrate 12. Each optical structure 14 corresponds to a photoelectric conversion element 16. Each optical structure 14 includes a first portion 18 and a second portion 20. The first portion 18 has a first glass transition temperature. The second portion 20 has a second glass transition temperature. The second portion 20 guides incident light 21 into the photoelectric conversion element 16. The first glass transition temperature is greater than the second glass transition temperature.

[0120] In some embodiments, the optical device 10 selectively includes a plurality of color filters 22 disposed between the substrate 12 and the optical structure 14. In some embodiments, the optical device 10 selectively includes a plurality of micro lenses 24 disposed between the color filters 22 and the optical structure 14. In some embodiments, the optical device 10 selectively includes a planar layer 26 disposed between the micro lenses 24 and the optical structure 14.

[0121] In some embodiments, the first portion 18 and the second portion 20 are disposed on the same plane. For example, the first portion 18 and the second portion 20 are disposed on a flat layer 26 .

[0122] In some embodiments, the first glass transition temperature of the first portion 18 is less than or equal to about 350° C. and greater than or equal to about 70° C. In some embodiments, the second glass transition temperature of the second portion 20 is less than or equal to about 300° C. and greater than or equal to about 50° C. Since the glass transition temperatures between the first portion 18 and the second portion 20 are different, the materials of the first portion 18 and the second portion 20 are different. In some embodiments, the refractive index of the first portion 18 is less than or equal to about 2.9 and greater than about 1. In some embodiments, the refractive index of the second portion 20 is less than or equal to about 2.8 and greater than about 1.1.

[0123] See also Figure 2 According to one embodiment of the present invention, a contour shape of a first portion 18 of an optical structure 14 is provided. Figure 21 is a cross-sectional schematic diagram of the outline of the first portion 18 of the optical structure 14. The relationship between the outline of the first portion 18 of the optical structure 14 and related dimensions (such as top width, bottom width, height, and angle between the side wall and the normal line) is shown in the figure. In other words, the outline of the first portion 18 is determined by the related dimensions.

[0124] like Figure 2 As shown, the first portion 18 disposed on the flat layer 26 is taken as an example for explanation. The top width of the first portion 18 is represented as W1, the bottom width of the first portion 18 is represented as W2, the angle between the right side wall S1 of the first portion 18 and the normal line N of the upper surface 26' of the flat layer 26 is represented as α1, the angle between the left side wall S2 of the first portion 18 and the normal line N of the upper surface 26' of the flat layer 26 is represented as α2, and the height of the first portion 18 is represented as h. In some embodiments, the top width W1 of the first portion 18 is less than or equal to about 500 nm and greater than or equal to about 0. In some embodiments, the bottom width W2 of the first portion 18 is less than or equal to about 500 nm and greater than or equal to about 10 nm. In some embodiments, the angle α1 between the right side wall S1 of the first portion 18 and the normal line N of the upper surface 26' of the flat layer 26 is less than about 90 degrees and greater than or equal to about 0 degrees. In some embodiments, the angle α2 between the left sidewall S2 of the first portion 18 and the normal line N of the upper surface 26' of the planar layer 26 is less than about 90 degrees and greater than or equal to about 0 degrees. In some embodiments, the height h of the first portion 18 is greater than or equal to about 50 nm. The above dimensions (i.e., the top width, the bottom width, the height, and the angle between the sidewall and the normal line) determine the contour of the first portion 18.

[0125] See also Figure 3A to Figure 3D According to different embodiments of the present invention, various contour shapes of the first portion 18 of the optical structure 14 are provided. Figure 3A to Figure 3D It is a schematic cross-sectional view of the outline of the first portion 18 of the optical structure 14 .

[0126] In some embodiments, when W1=W2 and α1=α2=0, the first portion 18 is shown as a rectangular outline in a cross-sectional view, such as Figure 3A shown.

[0127] In some embodiments, when W1=0 and α1=α2, the first portion 18 is shown as a triangular outline in a cross-sectional view, such as Figure 3B shown.

[0128] In some embodiments, when W2>W1>0 and α1=α2, the first portion 18 is shown as an isosceles trapezoidal profile in cross-sectional view, such as Figure 3C shown.

[0129] In some embodiments, when W2>W1>0 and α1≠α2, the first portion 18 is shown as an irregular trapezoidal profile in a cross-sectional view, such as Figure 3D shown.

[0130] See also Figure 4A to Figure 4D According to different embodiments of the present invention, various contour shapes of the second portion 20 of the optical structure 14 are provided. Figure 4A to Figure 4D It is a schematic cross-sectional view of the outline of the second portion 20 of the optical structure 14.

[0131] In some embodiments, Figure 4A As shown, in the cross-sectional view, the second portion 20 has an aspherical surface Sa (convex surface) profile with a relatively large curvature.

[0132] In some embodiments, Figure 4B As shown, in cross-sectional view, the second portion 20 has an aspherical surface Sb (convex surface) profile with a smaller curvature than Sa. That is, the second portion 20 includes aspherical surfaces with different curvatures.

[0133] In some embodiments, Figure 4C As shown, in cross-sectional view, the second portion 20 has a sloped surface Sc profile.

[0134] In some embodiments, Figure 4D As shown, the second portion 20 has a concave profile Sd when viewed in cross-section.

[0135] In some embodiments, Figure 4E As shown, in cross-sectional view, the second portion 20 has a planar Se profile.

[0136] See also Figure 5 According to one embodiment of the present invention, different configurations of optical structures (such as 14a, 14b, 14c, 14d and 14e) in pixels (such as P1, P2, P3, P4 and P5) are provided. Figure 5 A top view of the configuration of the optical structure in a pixel.

[0137] like Figure 5 As shown, the optical structures (14a, 14b, 14c, 14d and 14e) are arranged on the substrate 12. Angle ψ is defined by taking pixel P2 as an example. Angle ψ is defined as the angle between a connecting line C connecting the center 12d of the substrate 12 and the centroid Mc of the optical structure 14b in the pixel P2 and a horizontal line H passing through the center 12d of the substrate 12. Figure 5, the first portion 18 surrounds the second portion 20 and the first portion 18 is a closed loop, and as the angle ψ changes, the first portion 18 of the optical structure (14a, 14b, 14c, 14d, and 14e) in each pixel has the same relative position, and the position of the second portion 20 of the optical structure (14a, 14b, 14c, 14d, and 14e) in each pixel changes as the angle ψ changes. For example, in pixel P1, the angle ψ is 0 degrees, and the optical structure 14a is configured in a manner of ψ=0°. In pixel P2, the angle ψ is 45 degrees, and the optical structure 14b is configured in a manner of ψ=45°. In pixel P3, the angle ψ is 90 degrees, and the optical structure 14c is configured in a manner of ψ=90°. In pixel P4, the angle ψ is 135 degrees, and the optical structure 14d is configured in a manner of ψ=135°. In pixel P5, the angle ψ is 180 degrees, and the optical structure 14e is configured in a manner of ψ=180°.

[0138] In some embodiments, when the first portion is a columnar structure and the second portion completely covers the first portion, as the angle ψ changes, the first portion and the second portion of the optical structure in each pixel have different relative positions (not shown).

[0139] See also Figure 6A to Figure 6D According to different embodiments of the present invention, various configurations of the first portion 18 and the second portion 20 of the optical structure 14 are provided. Figure 6A to Figure 6D FIG. 1 is a top view of the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0140] exist Figure 6A to Figure 6D In the embodiment, the first part 18 surrounds the second part 20, and the first part 18 comprises a closed ring, such as a closed ring having a square ring-shaped opening 18'. The second part 20 covers a portion of the first part 18.

[0141] When the angle ψ is 0 degrees, the configuration of the optical structure 14 is as follows Fig. 6A As the angle ψ increases, the position of the second portion 20 changes.

[0142] When the angle ψ increases to 30 degrees, the configuration of the optical structure 14 is as follows Figure 6B shown.

[0143] When the angle ψ increases to 45 degrees, the configuration of the optical structure 14 is as follows Figure 6C shown.

[0144] When the angle ψ increases to 90 degrees, the configuration of the optical structure 14 is as follows Fig.6D shown.

[0145] See also FIG. 7A to FIG. 7DAccording to different embodiments of the present invention, various configurations of the first portion 18 and the second portion 20 of the optical structure 14 are provided. FIG. 7A to FIG. 7D FIG. 1 is a top view of the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0146] exist FIG. 7A to FIG. 7D In the embodiment, the first part 18 surrounds the second part 20 , and the first part 18 comprises a closed ring, for example, a closed ring having a circular ring-shaped opening 18 ″. The second part 20 covers a portion of the first part 18 .

[0147] When the angle ψ is 0 degrees, the configuration of the optical structure 14 is as follows Fig. 7A As the angle ψ increases, the position of the second portion 20 changes.

[0148] When the angle ψ increases to 30 degrees, the configuration of the optical structure 14 is as follows Figure 7B shown.

[0149] When the angle ψ increases to 45 degrees, the configuration of the optical structure 14 is as follows Figure 7C shown.

[0150] When the angle ψ increases to 90 degrees, the configuration of the optical structure 14 is as follows Fig.7D shown.

[0151] In some embodiments, when the first portion 18 includes a closed ring, other opening shapes formed therein are also applicable to the present invention, such as an elliptical ring-shaped opening or an aspherical ring-shaped opening.

[0152] See also Fig. 8A and Figure 8B According to one embodiment of the present invention, a configuration of a first portion 18 and a second portion 20 of an optical structure 14 is provided. Fig. 8A A top view showing the configuration of the first portion 18 and the second portion 20 of the optical structure 14 is shown, and Figure 8B A cross-sectional schematic diagram showing the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0153] exist Fig. 8A and Figure 8B In the embodiment, the first portion 18 is a pointed structure including side walls S1 and S2. The first portion 18 surrounds the second portion 20, and the first portion 18 includes a closed ring, such as a closed ring with a square ring-shaped opening 18'. The second portion 20 covers a portion of the first portion 18.

[0154] Fig. 8A The configuration of the optical structure 14 is shown, and the angle ψ is 90 degrees.

[0155] See also Fig. 9According to one embodiment of the present invention, a configuration of a first portion 18 and a second portion 20 of an optical structure 14 is provided. Fig. 9 A top view showing the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0156] exist Fig. 9 In the embodiment, the first portion 18 is a pointed structure including side walls S1 and S2. The first portion 18 surrounds the second portion 20, and the first portion 18 includes a closed ring, such as a closed ring having a circular opening 18". The second portion 20 covers a portion of the first portion 18.

[0157] Fig. 9 The configuration of the optical structure 14 is shown, and the angle ψ is 90 degrees.

[0158] See also FIG. 10A to FIG. 10D According to different embodiments of the present invention, various configurations of the first portion 18 and the second portion 20 of the optical structure 14 are provided. FIG. 10A to FIG. 10D FIG. 1 is a top view of the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0159] exist Fig. 10A In the embodiment, the first portion 18 comprises a U-shape, and the angle ψ is 0 degrees. As the angle ψ increases, the shape and position of the first portion 18 change. For example, in Fig. 10B In FIG. 1 , when the angle ψ increases to 30 degrees, the first portion 18 changes to an L-shape. Fig. 10C In FIG. 1 , when the angle ψ increases to 45 degrees, the first portion 18 maintains an L-shape. Fig. 10D In the embodiment, when the angle ψ increases to 90 degrees, the first portion 18 returns to the U-shape.

[0160] See also FIG. 11A to FIG. 11D According to different embodiments of the present invention, various configurations of the first portion 18 and the second portion 20 of the optical structure 14 are provided. FIG. 11A to FIG. 11D FIG. 1 is a top view of the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0161] exist Fig.11A In the embodiment, the first portion 18 includes an irregular shape with a curved surface, and the angle ψ is 0 degrees. As the angle ψ increases (e.g., ψ=30°, 45°, 90°), the shape and position of the first portion 18 change, such as Fig. 11B (ψ=30°), Fig. 11C (ψ=45°) and Fig.11D (ψ=90°).

[0162] See also FIG. 12A to FIG. 12D According to different embodiments of the present invention, various configurations of the first portion 18 and the second portion 20 of the optical structure 14 are provided. FIG. 12A to FIG. 12D FIG. 1 is a top view of the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0163] exist Fig. 12A In the embodiment, the first portion 18 comprises a rectangle, and the angle ψ is 0 degrees. As the angle ψ increases, the shape and position of the first portion 18 change. For example, in Fig. 12B In FIG. 1 , when the angle ψ increases to 330 degrees, the first portion 18 changes into a triangle. Fig. 12C In FIG. 1 , when the angle ψ increases to 315 degrees, the first portion 18 maintains a triangle. Fig.12D In the embodiment of the present invention, when the angle ψ increases to 270 degrees, the first portion 18 returns to a rectangular shape.

[0164] See also Figures 13A to 13E According to different embodiments of the present invention, various configurations of the first portion 18 and the second portion 20 of the optical structure 14 are provided. FIG. 13A to FIG. 13D FIG. 1 is a top view of the configuration of the first portion 18 and the second portion 20 of the optical structure 14 . Fig.13E It is a cross-sectional schematic diagram showing the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0165] exist Figures 13A to 13E In the embodiment, the second portion 20 completely covers the first portion 18, and the first portion 18 includes a cylinder.

[0166] When the angle ψ is 0 degrees, the configuration of the optical structure 14 is as follows Fig.13A As the angle ψ increases, the positions of the first portion 18 and the second portion 20 change.

[0167] When the angle ψ increases to 30 degrees, the configuration of the optical structure 14 is as follows Fig. 13B shown.

[0168] When the angle ψ increases to 45 degrees, the configuration of the optical structure 14 is as follows Fig. 13C shown.

[0169] When the angle ψ increases to 90 degrees, the configuration of the optical structure 14 is as follows Fig.13D shown.

[0170] See also FIG. 14A to FIG. 14D According to different embodiments of the present invention, various configurations of the first portion 18 and the second portion 20 of the optical structure 14 are provided. FIG. 14A to FIG. 14D FIG. 1 is a top view of the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0171] exist FIG. 14A to FIG. 14D In the embodiment, the second portion 20 completely covers the first portion 18, and the first portion 18 includes a single square column.

[0172] When the angle ψ is 0 degrees, the configuration of the optical structure 14 is as follows Fig.14A As the angle ψ increases, the positions of the first portion 18 and the second portion 20 change.

[0173] When the angle ψ increases to 30 degrees, the configuration of the optical structure 14 is as follows Fig. 14B shown.

[0174] When the angle ψ increases to 45 degrees, the configuration of the optical structure 14 is as follows Fig. 14C shown.

[0175] When the angle ψ increases to 90 degrees, the configuration of the optical structure 14 is as follows Fig.14D shown.

[0176] See also Fig.15A According to one embodiment of the present invention, a configuration of a first portion 18 and a second portion 20 of an optical structure 14 is provided. Fig.15A A top view showing the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0177] exist Fig.15A In the embodiment, the second portion 20 completely covers the first portion 18, and the first portion 18 includes a plurality of square pillars. The number of square pillars may be 2, 3 or more. Fig.15A In the embodiment, the first part 18 including three square pillars (18a, 18b and 18c) connected to each other is taken as an example. Before reflow, the second part 20 includes a square pillar structure (not shown). After reflow, the configuration of the optical structure 14 is as follows: Fig.15A As shown, the angle ψ is 0 degrees.

[0178] See also Fig. 15B According to one embodiment of the present invention, a configuration of a first portion 18 and a second portion 20 of an optical structure 14 is provided. Fig. 15B A top view showing the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0179] exist Fig. 15B In the embodiment, the second portion 20 completely covers the first portion 18, and the first portion 18 includes a single square column. Before reflow, the second portion 20 includes a multi-square column structure (not shown). The number of multi-square columns can be 2, 3 or more, such as three square columns connected to each other. After reflow, the configuration of the optical structure 14 is as follows: Fig. 15B As shown, the angle ψ is 0 degrees.

[0180] See also FIG. 16A to FIG. 16D According to different embodiments of the present invention, various configurations of the first portion 18 and the second portion 20 of the optical structure 14 are provided. FIG. 16A to FIG. 16DFIG. 1 is a top view of the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0181] exist FIG. 16A to FIG. 16D In the embodiment, the second portion 20 completely covers the first portion 18, and the first portion 18 includes a single square column. Before reflow, the second portion 20 includes a plurality of separate structures (not shown). After reflow, the configuration of the optical structure 14 is as follows: FIG. 16A to FIG. 16D shown.

[0182] When the angle ψ is 0 degrees, the configuration of the optical structure 14 is as follows Fig.16A As the angle ψ increases, the positions of the first portion 18 and the second portion 20 change.

[0183] When the angle ψ increases to 30 degrees, the configuration of the optical structure 14 is as follows Fig. 16B shown.

[0184] When the angle ψ increases to 45 degrees, the configuration of the optical structure 14 is as follows Fig. 16C shown.

[0185] When the angle ψ increases to 90 degrees, the configuration of the optical structure 14 is as follows Fig.16D shown.

[0186] See also Fig.17A According to one embodiment of the present invention, a configuration of a first portion 18 and a second portion 20 of an optical structure 14 is provided. Fig.17A A top view showing the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0187] exist Fig.17A In the embodiment, the second portion 20 completely covers the first portion 18, and the first portion 18 includes a plurality of square pillars. The number of square pillars may be 2, 3 or more. Fig.17A In the embodiment, the first portion 18 including the separated square pillars (18a, 18b, 18c and 18d) is used as an example. Before reflow, the second portion 20 includes a plurality of separated structures (not shown). After reflow, the configuration of the optical structure 14 is as follows: Fig.17A As shown, the angle ψ is 0 degrees.

[0188] See also Fig. 17B According to one embodiment of the present invention, a configuration of a first portion 18 and a second portion 20 of an optical structure 14 is provided. Fig. 17B A top view showing the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0189] exist Fig. 17B In the embodiment, the second portion 20 completely covers the first portion 18, and the first portion 18 includes a plurality of square pillars. The number of square pillars may be 2, 3 or more. Fig. 17BIn the embodiment, the first portion 18 including the separated square pillars (18a, 18b, 18c and 18d) is used as an example. Before reflow, the second portion 20 includes an L-shaped structure (not shown). After reflow, the configuration of the optical structure 14 is as follows: Fig. 17B As shown, the angle ψ is 30 degrees.

[0190] See also Fig. 17C According to one embodiment of the present invention, a configuration of a first portion 18 and a second portion 20 of an optical structure 14 is provided. Fig. 17C A top view showing the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0191] exist Fig. 17C In the embodiment, the second portion 20 completely covers the first portion 18, and the first portion 18 includes a plurality of square pillars. The number of square pillars may be 2, 3 or more. Fig. 17C In the embodiment, the first portion 18 including the separated square pillars (18a, 18b, 18c and 18d) is used as an example. Before reflow, the second portion 20 includes two separated rectangular structures (not shown). After reflow, the configuration of the optical structure 14 is as follows: Fig. 17C As shown, the angle ψ is 45 degrees.

[0192] See also Fig.18A , Fig.18B According to one embodiment of the present invention, a configuration of a first portion 18 and a second portion 20 of an optical structure 14 is provided. Fig.18A A top view showing the configuration of the first portion 18 and the second portion 20 of the optical structure 14 . Fig.18B A cross-sectional schematic diagram showing the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0193] exist Fig.18A , Fig.18B In the embodiment, the second part 20 completely covers the first part 18, and the first part 18 includes a plurality of square pillars stacked. The number of square pillars may be 2, 3 or more. Fig.18A , Fig.18B In the embodiment, the first portion 18 including three square pillars (18a, 18b and 18c) stacked on each other is used as an example. The three square pillars can have the same or different materials and refractive indices. Before reflow, the second portion 20 includes a square pillar structure (not shown). After reflow, the configuration of the optical structure 14 is as follows: Fig.18A As shown, the angle ψ is 0 degrees.

[0194] See also Fig.18C According to one embodiment of the present invention, a configuration of a first portion 18 and a second portion 20 of an optical structure 14 is provided. Fig.18CA top view showing the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0195] exist Fig.18C In the embodiment, the second part 20 completely covers the first part 18, and the first part 18 includes a plurality of square pillars stacked. The number of square pillars may be 2, 3 or more. Fig.18C In the embodiment, the first portion 18 including the stacked triangular pillars (18a, 18b and 18c) is used as an example. The triangular pillars may have the same or different materials and refractive indices. Before reflow, the second portion 20 includes a cylindrical structure (not shown). After reflow, the configuration of the optical structure 14 is as follows: Fig.18C As shown, the angle ψ is 0 degrees.

[0196] See also Fig.19A According to one embodiment of the present invention, a configuration of a first portion 18 and a second portion 20 of an optical structure 14 is provided. Fig.19A A top view showing the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0197] exist Fig.19A In the embodiment, the second part 20 completely covers the first part 18, and the first part 18 includes a stack of multiple cylinders. The number of cylinders can be 2, 3 or more. Fig.19A In the embodiment, the first part 18 including three columns (18a, 18b and 18c) stacked on each other is used as an example. The three columns can have the same or different materials and refractive indices. Before reflow, the second part 20 includes a square column structure (not shown). After reflow, the configuration of the optical structure 14 is as follows: Fig.19A As shown, the angle ψ is 0 degrees.

[0198] See also Fig.19B According to one embodiment of the present invention, a configuration of a first portion 18 and a second portion 20 of an optical structure 14 is provided. Fig.19B A top view showing the configuration of the first portion 18 and the second portion 20 of the optical structure 14 .

[0199] exist Fig.19B In the embodiment, the second part 20 completely covers the first part 18, and the first part 18 includes a stack of multiple cylinders. The number of cylinders can be 2, 3 or more. Fig.19B In the embodiment, the first part 18 including three cylinders (18a, 18b and 18c) stacked on each other is taken as an example. The three cylinders may have the same or different materials and refractive indices. Before reflow, the second part 20 includes a cylindrical structure (not shown). After reflow, the configuration of the optical structure 14 is as follows: Fig.19B As shown, the angle ψ is 0 degrees.

[0200] See also Fig. 20According to one embodiment of the present invention, an optical device 10 is provided. Fig. 20 is a schematic cross-sectional view of the optical device 10 .

[0201] In some embodiments, when the first portion 18 is a columnar structure, the second portion 20 completely covers the first portion 18. In some embodiments, the columnar structure includes a cylinder, a cone, a single square column, or multiple square columns. In some embodiments, the columnar structure includes multiple square columns stacked or multiple circular columns stacked.

[0202] like Fig. 20 As shown, the substrate 12 includes a first region 12a, a second region 12b, and a third region 12c from the center 12d to the edge 12e. Fig. 20 , the first portion 18 of each optical structure 14 disposed in the first area 12a has a first height h1, the first portion 18 of each optical structure 14 disposed in the second area 12b has a second height h2, and the first portion 18 of each optical structure 14 disposed in the third area 12c has a third height h3. It is worth noting that the third height h3 is greater than the second height h2, and the second height h2 is greater than the first height h1.

[0203] See also Fig.21 According to one embodiment of the present invention, an optical device 10 is provided. Fig.21 is a schematic cross-sectional view of the optical device 10 .

[0204] like Fig.21 As shown, the substrate 12 includes a first region 12a, a second region 12b, and a third region 12c from the center 12d to the edge 12e. Fig.21 In the embodiment, the spherical surface Sa1 of the second portion 20 of each optical structure 14 disposed in the first area 12a has a first curvature c1, the spherical surface Sa2 of the second portion 20 of each optical structure 14 disposed in the second area 12b has a second curvature c2, and the spherical surface Sa3 of the second portion 20 of each optical structure 14 disposed in the third area 12c has a third curvature c3. It is worth noting that the third curvature c3 is greater than the second curvature c2, and the second curvature c2 is greater than the first curvature c1.

[0205] See also Fig. 22 According to one embodiment of the present invention, an optical device 10 is provided. Fig. 22 is a schematic cross-sectional view of the optical device 10 .

[0206] like Fig. 22 As shown, the substrate 12 includes a first region 12a, a second region 12b, and a third region 12c from the center 12d to the edge 12e. Fig. 22In the embodiment, the inclined surface Sc1 of the second portion 20 of each optical structure 14 disposed in the first area 12a has a first slope sp1, the inclined surface Sc2 of the second portion 20 of each optical structure 14 disposed in the second area 12b has a second slope sp2, and the inclined surface Sc3 of the second portion 20 of each optical structure 14 disposed in the third area 12c has a third slope sp3. It is worth noting that the third slope sp3 is greater than the second slope sp2, and the second slope sp2 is greater than the first slope sp1.

[0207] See also Fig.23 According to one embodiment of the present invention, an optical device 10 is provided. Fig.23 is a schematic cross-sectional view of the optical device 10 .

[0208] exist Fig.23 In the embodiment, the photoelectric conversion element 16 closest to the wafer center has a boundary 16e, and the optical structure 14 closest to the wafer center has a boundary 14e1. It should be noted that the boundary 16e of the photoelectric conversion element 16 closest to the wafer center and the boundary 14e1 of the optical structure 14 closest to the wafer center are separated by a distance D1.

[0209] See also Fig.24 According to one embodiment of the present invention, a method for manufacturing an optical device 10 is provided. Fig.24 A cross-sectional schematic diagram of the manufacturing method.

[0210] like Fig.24 As shown, a substrate 12 is provided. Next, a first material 18 is formed on the substrate 12. The first material 18 has a first glass transition temperature. Next, a second material 19 is formed on the substrate 12. The second material 19 has a second glass transition temperature. The first glass transition temperature is greater than the second glass transition temperature. Next, a thermal process 28 is performed to form a plurality of optical structures 14 including a first portion 18 and a second portion 20. At this point, the manufacture of the optical device 10 is completed.

[0211] In some embodiments, the thermal process 28 includes lamp irradiation, laser irradiation, conduction, or liquid dissolution. In some embodiments, the liquid dissolution includes physical etching or chemical etching.

[0212] In some embodiments, the manufacturing method of the present invention further includes adjusting the volume of the second material 19 before the thermal process 28. In some embodiments, when the second material 19 has the same height, by adjusting different volumes, the second portion 20 with different curvatures can be obtained after the thermal process 28. For example, the larger the volume, the smaller the curvature.

[0213] In some embodiments, the manufacturing method of the present invention further includes adjusting the height of the second material 19 before the thermal process 28. In some embodiments, when the second material 19 has the same volume, by adjusting different heights, the second portion 20 with different curvatures can be obtained after the thermal process 28. For example, the lower the height, the smaller the curvature.

[0214] In some embodiments, the thermal process 28 includes applying different levels of heat. In some embodiments, when the second material 19 has the same height and volume, by applying different levels of heat, the second portion 20 with different curvatures can be obtained. For example, the higher the heat, the smaller the curvature.

[0215] See also Fig.25 The manufacturing method of the present invention further includes performing an etching process 30 after the thermal process 28. In some embodiments, after the thermal process 28, there is a gap d between adjacent optical structures 14. The etching process 30 eliminates the gap d, so that the adjacent optical structures 14 can be close to each other and have the best appearance.

[0216] Example 1

[0217] AFM profile of optical structure after reflow (1)

[0218] The process of Example 1 is similar Fig.24 , for example, providing a substrate. Then, forming a first material on the substrate. Then, forming a second material on the substrate. Then, performing a low temperature thermal process (ie, a reflow process) to form a plurality of optical structures 14 including a first portion 18 and a second portion 20, such as Fig.26 shown. Fig.26 An atomic force microscope (AFM) profile of the optical structure 14 after reflow is shown. Fig.26 (comparable Figure 4B ), the surface of the second portion 20 of each optical structure 14 has a first curvature s1.

[0219] Example 2

[0220] AFM profile of optical structure after reflow (2)

[0221] The process of Example 2 is similar Fig.24 , for example, providing a substrate. Then, forming a first material on the substrate. Then, forming a second material on the substrate. Then, performing a medium temperature (that is, a temperature higher than that of Example 1) thermal process (that is, a reflow process) to form a plurality of optical structures 14 including a first portion 18 and a second portion 20, such as Fig. 27 shown. Fig. 27An atomic force microscope (AFM) profile of the optical structure 14 after reflow is shown. Fig. 27 In the embodiment, the surface of the second portion 20 of each optical structure 14 has a second curvature s2.

[0222] Example 3

[0223] AFM profile of optical structure after reflow (3)

[0224] The process of Example 3 is similar Fig.24 , for example, providing a substrate. Then, forming a first material on the substrate. Then, forming a second material on the substrate. Then, performing a high temperature (that is, a temperature higher than that of Example 2) thermal process (that is, a reflow process) to form a plurality of optical structures 14 including a first portion 18 and a second portion 20, such as Fig.28 shown. Fig.28 An atomic force microscope (AFM) profile of the optical structure 14 after reflow is shown. Fig.28 (comparable Figure 4C ), the surface of the second portion 20 of each optical structure 14 has a third curvature s3. As a result, the first curvature s1 (formed during low temperature reflow) is greater than the second curvature s2 (formed during medium temperature reflow), and the second curvature s2 is greater than the third curvature s3 (formed during high temperature reflow).

[0225] In the present invention, a specific dual optical microstructure (with adjustable position, contour shape, size and component combination) is configured above the photoelectric conversion element of a CMOS image sensor (CIS). The dual optical microstructure can improve light receiving efficiency and reduce crosstalk in the CIS.

[0226] Although the embodiments of the present disclosure and their advantages have been disclosed as above, it should be understood that those skilled in the art to which the present disclosure belongs can make changes, substitutions and modifications without departing from the spirit and scope of the present disclosure. In addition, the scope of protection of the present disclosure is not limited to the processes, machines, manufactures, material compositions, devices, methods and steps in the specific embodiments described in the specification. Those skilled in the art to which the present disclosure belongs can understand from the contents of the embodiments of the present disclosure that the processes, machines, manufactures, material compositions, devices, methods and steps currently or developed in the future can be used according to the embodiments of the present disclosure as long as they can achieve substantially the same functions or obtain substantially the same results as in the embodiments described herein. Therefore, the scope of protection of the present disclosure includes the above-mentioned processes, machines, manufactures, material compositions, devices, methods and steps. In addition, the scope of protection of the present disclosure shall be defined as defined by the attached claims.

Claims

1. An optical device, comprising: a substrate including a plurality of photoelectric conversion elements; as well as A plurality of optical structures are disposed on the substrate, each of the optical structures corresponds to a photoelectric conversion element, wherein each of the optical structures includes a first portion having a first glass transition temperature and a second portion having a second glass transition temperature, the second portion guides incident light into the photoelectric conversion element, and the first glass transition temperature is greater than the second glass transition temperature; In the cross-sectional view, the bottom width of the first portion is smaller than the bottom width of the second portion, and the first portion is located between two adjacent second portions. 2 . The optical device as claimed in claim 1 , wherein the first portion and the second portion are disposed on the same plane.

3. The optical device of claim 1, wherein the first glass transition temperature is less than or equal to 350°C and greater than or equal to 70°C, and the second glass transition temperature is less than or equal to 300°C and greater than or equal to 50°C.

4. The optical device of claim 1, wherein the refractive index of the first portion is less than or equal to 2.9 and greater than 1, and the refractive index of the second portion is less than or equal to 2.8 and greater than 1.

1.

5. An optical device as described in claim 1, wherein in a cross-sectional view, the first portion includes a rectangle, a triangle, an isosceles trapezoid or an irregular trapezoid, and the second portion has a plane, a convex surface or a concave surface, and in a top view, the first portion includes a U-shape, an L-shape, an irregular shape with a curved surface, a rectangle or a triangle.

6. An optical device as described in claim 1, wherein the first part surrounds the second part, and when viewed from a top view, when the first part includes a closed ring having a circular ring opening, a square ring opening, an elliptical ring opening or an aspherical ring opening, the second part covers a portion of the first part.

7. An optical device as described in claim 1, wherein the substrate includes a first zone, a second zone and a third zone from the center to the edge, the first portion of each optical structure arranged in the first zone has a first height, the first portion of each optical structure arranged in the second zone has a second height, the first portion of each optical structure arranged in the third zone has a third height, the third height is greater than the second height, and the second height is greater than the first height.

8. An optical device as described in claim 1, wherein the substrate includes a first zone, a second zone and a third zone from the center to the edge, and when the second portion of each optical structure has a spherical surface, the second portion of each optical structure arranged in the first zone has a first curvature, the second portion of each optical structure arranged in the second zone has a second curvature, and the second portion of each optical structure arranged in the third zone has a third curvature, the third curvature is greater than the second curvature, and the second curvature is greater than the first curvature.

9. An optical device as described in claim 1, wherein the substrate includes a first zone, a second zone and a third zone from the center to the edge, and when the second portion of each optical structure has a slope, the second portion of each optical structure arranged in the first zone has a first slope, the second portion of each optical structure arranged in the second zone has a second slope, and the second portion of each optical structure arranged in the third zone has a third slope, the third slope is greater than the second slope, and the second slope is greater than the first slope.

10. The optical device as described in claim 1 further includes a plurality of color filters and micro lenses, wherein the plurality of color filters are disposed between the substrate and the plurality of optical structures, and the plurality of micro lenses are disposed between the plurality of color filters and the plurality of optical structures, wherein the photoelectric conversion element closest to the center of the chip has a first boundary, and the optical structure closest to the center of the chip has a second boundary, and there is a distance between the first boundary and the second boundary.

11. An optical device as described in claim 1, wherein, viewed from a top view, angle ψ is defined as the angle between a connecting line connecting the center of the substrate and the centroid of the optical structure in a pixel and a horizontal line passing through the center of the substrate, and when the first part surrounds the second part and the first part is a closed loop, as the angle ψ changes, the first part in each pixel has the same relative position, and the position of the second part in each pixel changes with the angle ψ.

12. An optical device as described in claim 1, wherein, viewed from a top view, angle ψ is defined as the angle between a connecting line connecting the center of the substrate and the centroid of the optical structure in a pixel and a horizontal line passing through the center of the substrate, and when the first part is a columnar structure and the second part completely covers the first part, as the angle ψ changes, the first part and the second part in each pixel have different relative positions along with the angle ψ.

13. A method for manufacturing an optical device, comprising: providing a substrate; forming a first material on the substrate, wherein the first material has a first glass transition temperature; forming a second material on the substrate, the second material having a second glass transition temperature, wherein the first glass transition temperature is greater than the second glass transition temperature; as well as performing a thermal process to form a plurality of optical structures; Each optical structure includes a first portion, comprising the first material, and a second portion, comprising the second material. In the cross-sectional view, the bottom width of the first portion is smaller than the bottom width of the second portion, and the first portion is located between two adjacent second portions. 14 . The method for manufacturing an optical device as claimed in claim 13 , wherein the thermal process comprises lamp irradiation, laser irradiation, conductive conduction, physical etching or chemical etching, and the thermal process comprises applying thermal energy at different levels. 15 . The method for manufacturing an optical device as claimed in claim 13 , further comprising adjusting the volume or height of the second material before the thermal process, and performing an etching process after the thermal process.

Images