Metal mask and manufacturing method thereof

Abstract

The present invention discloses a metal mask and a manufacturing method thereof, which relates to the field of display technology, and can at least partially solve the problem in the prior art that when the mask uses a tensioning force, the frame area and the mesh area of ​​the mask body require different tensions, causing deformation at the corners of the mesh area, which affects the quality of the finished mask. A metal mask according to a first embodiment of the present invention includes a mask body having a shielding area, wherein a plurality of weight-reducing units arranged at intervals are half-etched on the top of the shielding area, and the distribution density of the weight-reducing units per unit area decreases regularly from the middle position of the top of the shielding area to the corner position.

Description

Technical Field

[0001] The present invention relates to the field of display technology, and in particular to a metal mask and a manufacturing method thereof. Background Art

[0002] The metal mask is one of the main jigs in the evaporation process of AMOLED products. The evaporation area is limited through the openings on the mask. The production of the metal mask requires a stretching process. After the metal mask is stretched with a certain stretching force, the mask is welded to the frame using a laser to resist the drooping of the mesh caused by the gravity of the mesh. However, the stretching force itself will cause the mesh to deform in the plane, affecting the position accuracy of the mesh pattern.

[0003] In the past, in order to solve the above-mentioned problem of mesh deformation, a common approach is to use the same shrinkage rate for the entire edge of the metal mask when setting the deformation allowance. Figure 2 Since the top corners of the metal mask are not prone to tensile deformation, a larger tension force is required at these positions to produce a predetermined deformation reserve. However, excessive tension will cause the metal mask's mesh surface to be more easily deformed at the corners, thereby affecting the quality of the mask product. Summary of the invention

[0004] The purpose of the present invention is to provide a metal mask and a method for manufacturing the same, so as to solve the problem in the prior art that when the mask uses a tensioning force, the frame area and the mesh area of ​​the mask body require different tensions, causing deformation at the corners of the mesh area, thereby affecting the quality of the finished mask product.

[0005] In order to solve the above technical problems, the present invention adopts the following solutions:

[0006] One aspect of the present invention provides a metal mask, comprising a mask body having a shielding area, wherein a plurality of weight-reducing units arranged at intervals are half-etched on the top of the shielding area, and the distribution density of the weight-reducing units per unit area decreases regularly from the middle position of the top of the shielding area to the corner position.

[0007] Optionally, the shielding area includes a frame shielding area, and the distribution density of the weight reduction units decreases from the middle position of the frame shielding area to the corner of the frame shielding area.

[0008] Optionally, the frame shielding area includes a long frame shielding area and a short frame shielding area, and the long frame shielding area and the short frame shielding area constitute a rectangular frame shielding area;

[0009] The length and width of the long frame shielding area are both greater than those of the short frame shielding area, and the distribution density of the weight reduction units in the long frame shielding area decreases along the middle position thereof toward the corner of the long frame shielding area.

[0010] Optionally, the long frame shielding area is provided with two columns of weight loss units arranged in parallel, and the distribution density of the two columns of weight loss units decreases from the middle position of the long frame shielding area to its corner; the short frame shielding area is provided with at least one column of weight loss units.

[0011] Optionally, the shielding area further includes a mesh shielding area disposed within the frame shielding area, and the distribution density of the weight reduction units decreases from the center position of the mesh shielding area toward the frame shielding area;

[0012] The distribution density of the weight-reducing units in the mesh shielding area is less than that in the frame shielding area.

[0013] Optionally, the distribution density of the weight loss units includes but is not limited to the following three types:

[0014] Rule 1: The distribution density decreases evenly from the middle position of the top of the occlusion area to the corner position;

[0015] Rule 2: The distribution density is directly proportional to the distance of the gravity arm to the corner position;

[0016] Rule 3: The distribution density is directly proportional to the amount of static sag in the shielding area at its distribution location.

[0017] Optionally, the distribution density of the weight loss units is distributed according to rule one.

[0018] Optionally, the shape of the weight loss unit includes but is not limited to the following: circular, elliptical, annular or regular polygonal hole.

[0019] Optionally, the weight reduction units all have the same structure and are all circular blind holes.

[0020] Another aspect of the present invention provides a method for manufacturing a metal mask, which is used to manufacture any of the metal mask described above, and specifically comprises the following steps:

[0021] Step S1: while half-etching the evaporation area on the top of the mask main body, half-etching the weight loss unit in the shielding area;

[0022] Step S2: Based on step S1, only the vapor deposition area is etched until the vapor deposition area is etched through.

[0023] The present invention has the beneficial effects:

[0024] A metal mask of the present invention comprises a mask body with a shielding area, wherein a plurality of weight-reducing units arranged at intervals are half-etched on the top of the shielding area, and the distribution density of the weight-reducing units per unit area decreases regularly from the middle position of the shielding area to the corner position.

[0025] Its function is: by setting weight-reducing units in a semi-etched interval manner on the top of the mask body, and the weight-reducing units per unit area are regularly reduced from the middle position of the shielding area to the corner position, the gravity moment at each position of the mask body shielding area can be reduced and balanced, thereby reducing the amount of mesh sagging in the middle position of the mask body, and reducing the tension required for tensioning each position of the mask body shielding area. At the same time, the set weight-reducing units can directly destroy the overall structure of the mask body shielding area, reduce its structural strength, and thus reduce the tension required for pulling it to deform, thereby reducing the tension difference between the mesh area and the shielding area. Therefore, by setting weight-reducing units with a distribution density gradually decreasing from the middle to the edge in the shielding area at the top of the mask body, the deformation amount at the four corners of the mesh area of ​​the mask body can be reduced from two aspects of directly reducing the mesh sagging and balancing the tension, thereby improving the quality of the finished mask product, and solving the problem in the prior art that each corner of the mesh shielding area is prone to deformation, affecting the quality of the finished mask product. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of a top view structure of a metal mask in the prior art;

[0027] Figure 2 It is a schematic diagram of the top view structure of the metal mask when the mesh surface is tensioned in the prior art;

[0028] Figure 3 It is a left-view structural schematic diagram of a metal mask screen in the prior art when it is statically drooping;

[0029] Figure 4 is a schematic diagram of a top view of the metal mask in Example 1;

[0030] Figure 5 is a schematic diagram of a top view of the structure of a metal mask in Embodiment 2;

[0031] Figure 6 It is a left-side schematic diagram after the gravity moment at each position of the shielding area is balanced in the second embodiment;

[0032] Figure 7 It is a schematic diagram of the top view of the structure when the metal mask screen is tensioned in the second embodiment;

[0033] Explanation of the accompanying drawings: 1-mask body, 11-frame shielding area, 111-long frame shielding area, 112-short frame shielding area, 12-grid shielding area, 13-weight reduction unit, 14-evaporation area. DETAILED DESCRIPTION

[0034] The present invention will be further described in detail below in conjunction with embodiments and drawings, but the embodiments of the present invention are not limited thereto.

[0035] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inside", "outside", "front", "back", "top", "bottom" and the like indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are the directions or positional relationships in which the inventive product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0036] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "disposed", "opened", "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] The present invention will be described in detail below with reference to the accompanying drawings and in conjunction with embodiments:

[0038] Embodiment 1:

[0039] like Figure 4 One aspect of the present invention provides a metal mask, comprising a mask body 1 having a shielding area, wherein a plurality of weight-reducing units 13 arranged at intervals are half-etched on the top of the shielding area, and the distribution density of the weight-reducing units 13 per unit area decreases regularly from the middle position of the top of the shielding area to the corner position.

[0040] By semi-etching and spacing weight-reducing units 13 at the top of the mask body 1, and the weight-reducing units 13 per unit area are regularly reduced from the middle position of the shielding area to the corner position, the gravity moment at each position of the shielding area of ​​the mask body 1 can be reduced and balanced, thereby reducing the amount of mesh sagging at the middle position of the mask body 1, and reducing the tension required for tensioning each position of the shielding area of ​​the mask body 1. At the same time, the weight-reducing units 13 can directly destroy the overall structure of the shielding area of ​​the mask body 1, reduce its structural strength, and thus reduce the tension required for pulling it to deform. Therefore, by arranging weight-reducing units 13 with a distribution density gradually decreasing from the middle to the edge in the shielding area at the top of the mask body 1, the difference in tension required for pulling the shielding area and the mesh area can be reduced from two aspects of directly reducing mesh sagging and reducing tension, thereby reducing the deformation amount at the corner of the mesh area of ​​the mask body 1, improving the quality of the finished mask, and solving the problem in the prior art that each corner of the mesh shielding area 12 is easily deformed, affecting the quality of the finished mask.

[0041] In the prior art, such as Figures 1 to 3 Since the shielding width of the mesh area of ​​the mask body 1 is uniform from the middle position to the edge, the gravity moment of the mask body 1 gradually decreases from the middle position to the edge position, resulting in the mesh sagging of the mask body 1 gradually decreasing from the middle position to the edge position. In the prior art, in order to combat the mesh sagging of the mask body 1, the same shrinkage ratio is usually used for the entire edge. However, since the shielding width of the frame area of ​​the shielding area of ​​the mask body 1 is greater than the shielding width of the mesh area, using the same or similar tension F around the mask body 1 will result in the deformation amount at the frame not meeting the standard. Similarly, if Figure 2 As shown, in order to meet the deformation requirements at the frame, using a greater pulling force at the corner of the frame will result in a greater deformation at the corner of the mesh shielding area 12, which will in turn affect the final quality of the mask product.

[0042] Generally speaking, since the method used in the prior art to combat the sagging of the mesh of the mask main body 1 is to use the same shrinkage ratio for the same edge, the problem in the prior art is that the greater tension at the frame causes greater deformation at the corner of the mesh. Therefore, to solve this problem, the usual solution is to use different shrinkage ratios according to the different positions of the mask main body 1, so that the forces at various positions of the mask main body 1 are different, but still have the same or similar deformation amounts.

[0043] The solution of this embodiment is to reduce the tension force of the frame shielding area 11 and the tension force against the sagging of the mesh surface by destroying the structural strength of the shielding area and reconfiguring the gravity distribution of the shielding area, thereby reducing the tension difference between the frame shielding area 11 and the mesh surface area, thereby reducing the deformation at the four corners of the mesh surface area of ​​the mask body 1.

[0044] In this embodiment, the gravity distribution at various positions of the mask body 1 can be reconfigured to directly reduce and balance the sagging amount at various positions of the mesh shielding area 12, reduce the tensioning force to resist the sagging of the mesh, and then reduce the deformation amount at the four corners of the mesh area of ​​the mask body 1; at the same time, since the weight reduction unit 13 in this embodiment is arranged at intervals on the shielding area, the overall structure of the shielding area will be directly destroyed, the overall structural strength of the shielding area is reduced, and the pulling force required to pull the shielding area to deform is reduced, thereby resulting in a reduction in the deformation amount at the corner of the mesh shielding area 12. Therefore, this embodiment is a design concept for reducing and balancing the pulling force by balancing the gravity distribution to reduce the sagging amount of the mesh and destroying the overall structural strength of the shielding area to reduce the deformation. Compared with general solutions, the mask body 1 of the design concept route of the present invention is more in line with actual production. According to tests, in the prior art, the middle position of the frame of the mask body 1 requires a tensioning force of 30N to 40N, and the corners require a tensioning force of 100N to 200N to resist the sagging of the mesh surface; in this embodiment, the tension in the middle position of the frame of the mask body 1 changes little, but the tensioning force at the corners can be reduced by about half, which can resist the sagging of the mesh surface, thereby reducing the difference in tensioning force between the middle position and the corners.

[0045] Specifically, the shielding area includes a frame shielding area 11 , and the distribution density of the weight reduction units 13 decreases from the middle position of the frame shielding area 11 toward the corner of the frame shielding area 11 .

[0046] Specifically, the frame shielding area 11 includes a long frame shielding area 111 and a short frame shielding area 112, and the long frame shielding area 111 and the short frame shielding area 112 constitute a rectangular frame shielding area 11;

[0047] The length and width of the long frame shielding area 111 are greater than those of the short frame shielding area 112 , and the distribution density of the weight reduction units 13 in the long frame shielding area 111 decreases from the middle position thereof toward the corner of the long frame shielding area 111 .

[0048] In this embodiment, the frame shielding area 11 includes two long frame shielding areas 111 and two short frame shielding areas 112. Each long frame shielding area 111 is provided with two rows of weight loss units 13 arranged in parallel, and each short frame shielding area 112 is provided with one row of weight loss units 13.

[0049] Specifically, the long frame shielding area 111 is provided with two rows of weight-reducing units 13 arranged in parallel, and the distribution density of the two rows of weight-reducing units 13 decreases from the middle position of the long frame shielding area 111 to the corner thereof; the short frame shielding area 112 is provided with at least one row of weight-reducing units 13. The two rows of weight-reducing units 13 arranged in parallel evenly decrease from the middle position of the long frame shielding area 111 to the corner thereof.

[0050] Specifically, the shape of the weight loss unit 13 includes but is not limited to the following: a circular, elliptical, annular or regular polygonal hole. When the weight loss unit 13 is an elliptical hole, the line between the two foci of the elliptical hole in the long frame shielding area 111 is perpendicular to the side of the long frame. Similarly, the line between the two foci of the elliptical hole in the short frame shielding area 112 is perpendicular to the side of the short frame. The weight loss unit 13 can also be an annular hole or a regular polygonal hole. When the shape of the weight loss unit 13 is a regular polygon, it can be a regular hexagon.

[0051] Specifically, the weight reduction units 13 have the same structure, which are all circular blind holes. In this embodiment, the circular blind hole design is adopted, and the circular blind holes are arranged in intervals to effectively reduce the warping caused by the stress change of the etching section.

[0052] In this embodiment, the mask body 1 is only provided with a weight reduction unit 13 on one side to avoid the inability to clean the liquid. The weight reduction unit 13 in the form of a circular hole in this embodiment can not only reduce the weight of the mask body 1, but also reduce the friction area between the mask body 1 and the glass.

[0053] Embodiment 2:

[0054] Based on the first embodiment, specifically, Figures 5 to 7 , the shielding area also includes a mesh shielding area 12 disposed in the frame shielding area 11, and the distribution density of the weight reduction units 13 decreases from the center position of the mesh shielding area 12 toward the frame shielding area 11;

[0055] The distribution density of the weight-reducing units 13 in the mesh shielding area 12 is smaller than that in the frame shielding area 11 .

[0056] In this embodiment, Figure 5 The mesh shielding area 12 is in a grid shape, and the grid is the vapor deposition area 14 of the mask plate body 1. Therefore, the mass and weight of the mesh shielding area 12 per unit area are less than the mass and weight of the frame shielding area 11. Therefore, in order to balance the gravitational moment of the mesh shielding area 12 and the frame shielding area 11, the distribution density of the weight reduction units 13 in the mesh shielding area 12 is less than the distribution density of the frame shielding area 11; at the same time, the overall width of the frame shielding area 11 is greater than the width of the mesh shielding area 12. The denser weight reduction units 13 in the frame shielding area 11 can destroy the overall structural strength of the frame shielding area 11, thereby reducing the tensile force required for the frame shielding area 11 to reduce its deformation.

[0057] In this embodiment, Figure 5 The weight-reducing units 13 of the mesh shielding area 12 are distributed in a queue along the direction of the long frame shielding area 111, and the distribution density of the weight-reducing units 13 in the mesh shielding area 12 decreases evenly from the center position toward the long frame direction and the short frame direction.

[0058] Optionally, the distribution density of the weight loss unit 13 includes but is not limited to the following three types:

[0059] Rule 1: The distribution density decreases evenly from the middle position of the top of the occlusion area to the corner position;

[0060] Rule 2: The distribution density is directly proportional to the distance of the gravity arm to the corner position;

[0061] Rule 3: The distribution density is directly proportional to the amount of static sag in the shielding area at its distribution location.

[0062] Preferably, the distribution density of the weight loss units 13 is distributed according to rule one.

[0063] In this embodiment, the distribution rule of the weight loss units 13 may also be distributed using rule two or rule three.

[0064] In rule two, the greater the distance of the gravity arm from the weight-reducing unit 13 to the corner position, the greater the distribution density of the weight-reducing unit 13. Since the thickness of the mask body 1 is consistent, the greater the density of the weight-reducing unit 13 per unit area, the greater the mass and weight reduction per unit area. Therefore, in rule two, the larger the gravity arm, the smaller the mass and weight per unit area. Since the gravity moment is the product of gravity and the gravity arm, the weight-reducing unit 13 adopts the distribution method of rule two to make the gravity moment of each position of the mask body 1 tend to be consistent, thereby reducing and balancing the tension force at each position of the mask body 1 and improving the quality of the mask product.

[0065] In the third rule, when the mask body 1 is suspended and fixed in the air, the static sag at different positions is different. Generally speaking, the closer to the center position, the greater the static sag. Therefore, the distribution density of the weight reduction unit 13 is set in direct proportion to the static sag of the shielding area. By balancing and reducing the gravity moment at each position, the tensioning force can be reduced and the quality of the mask product can be improved.

[0066] In this embodiment, the weight reduction unit 13 may also adopt a distribution pattern in which the distribution density decreases in proportion from the middle position at the top of the shielding area to the corner position. Also, after the mask body 1 is tightened, the distribution density of the weight reduction unit 13 gradually increases with the deformation of the frame shielding area 11 and the mesh shielding area 12.

[0067] Embodiment three:

[0068] On the basis of the above-mentioned embodiment 2, another aspect of the present invention provides a method for manufacturing a metal mask, which is used to manufacture any of the above-mentioned metal mask, and specifically comprises the following steps:

[0069] Step S1: while half-etching the evaporation area 14 on the top of the mask main body 1, half-etching the weight reduction unit 13 in the shielding area;

[0070] Step S2 : Based on step S1 , only the vapor deposition area 14 is etched until the vapor deposition area 14 is etched through.

[0071] In this embodiment, the weight reduction unit 13 is a circular blind hole, and the vapor deposition area 14 is distributed in an array in the grid of the mesh shielding area 12, and the vapor deposition area 14 is a square hole distributed in an array.

[0072] Before step S1, conventional steps such as cleaning, film application, exposure, and development are also included.

[0073] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A metal mask, comprising a mask body (1) having a shielding area, characterized in that: A plurality of weight-reducing units (13) arranged at intervals are half-etched on the top of the shielding area, and the distribution density of the weight-reducing units (13) per unit area decreases regularly from the middle position of the top of the shielding area to the corner position; The shielding area comprises a frame shielding area (11), and the distribution density of the weight reduction units (13) decreases from the middle position of the frame shielding area (11) toward the corner of the frame shielding area (11); The distribution density rules of the weight loss unit (13) include the following three types: Rule 1: The distribution density decreases evenly from the middle position of the top of the occlusion area to the corner position; Rule 2: The distribution density is directly proportional to the distance of the gravity arm to the corner position; Rule 3: The distribution density is directly proportional to the static sag of the shielding area at its distribution location; The shape of the weight loss unit (13) includes the following: circular, elliptical, annular or regular polygonal hole.

2. A metal mask according to claim 1, characterized in that: The frame shielding area (11) comprises a long frame shielding area (111) and a short frame shielding area (112), and the long frame shielding area (111) and the short frame shielding area (112) constitute a rectangular frame shielding area (11); The length and width of the long frame shielding area (111) are both greater than those of the short frame shielding area (112), and the distribution density of the weight-reducing units (13) of the long frame shielding area (111) decreases along the middle position thereof toward the corner of the long frame shielding area (111).

3. A metal mask according to claim 2, characterized in that: The long frame shielding area (111) is provided with two rows of weight-reducing units (13) arranged in parallel, and the distribution density of the two rows of weight-reducing units (13) decreases from the middle position of the long frame shielding area (111) to its corner; the short frame shielding area (112) is provided with at least one row of weight-reducing units (13).

4. The metal mask according to claim 1, characterized in that: The shielding area further comprises a mesh shielding area (12) disposed within the frame shielding area (11), and the distribution density of the weight-reducing units (13) decreases along the center position of the mesh shielding area (12) toward the frame shielding area (11); The distribution density of the weight-reducing units (13) in the mesh shielding area (12) is smaller than the distribution density in the frame shielding area (11).

5. The metal mask according to claim 1, characterized in that: The distribution density of the weight loss units (13) is distributed according to rule one.

6. The metal mask according to claim 1, characterized in that: The weight reduction units (13) all have the same structure and are all circular blind holes.

7. A method for manufacturing a metal mask, used for manufacturing a metal mask according to any one of claims 1 to 6, characterized in that: The specific steps include: Step S1: while half-etching the vapor deposition area (14) on the top of the mask body (1), half-etching the weight reduction unit (13) in the shielding area; Step S2: Based on step S1, only the vapor deposition area (14) is etched until the vapor deposition area (14) is etched through.

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