A vertical high temperature furnace water cooling jacket

Abstract

The present invention discloses a vertical high-temperature furnace water-cooling jacket, comprising: a cylindrical jacket body, an upper flange and a lower flange; the side wall of the jacket body is a hollow double-layer structure, and is divided into a plurality of annular flow channels connected end to end by at least one annular flow guide baffle, and a plurality of flow guide columns are evenly distributed in the annular flow channels; a first water inlet is provided at the lower part of the side wall of the jacket body, and a first water return port is provided at the upper part of the side wall of the jacket body, and cooling water enters the annular flow channel of the jacket body through the first water inlet, and after S-shaped flow between the plurality of annular flow channels, the cooling water is discharged from the jacket body through the first water return port; the upper flange is detachably connected to the top of the jacket body, and a spiral water-cooling flow channel is provided inside the upper flange; the lower flange is fixedly connected to the bottom of the jacket body, and an annular water-cooling flow channel is provided inside the lower flange. The present invention has the advantages of large heat dissipation area, small flow resistance, good high temperature resistance and low vacuum leakage rate.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor furnace equipment, and in particular relates to a vertical high-temperature furnace water-cooling jacket. Background Art

[0002] High-temperature oxidation and annealing are important processes in the production of modern semiconductor chips. They are used for activation treatment and lattice damage repair after wafer doping, to improve trench mobility and field intensity peak effects at sharp corners in trench MOSFET manufacturing, and to generate oxide film on the wafer surface. Its maximum temperature, heating rate, temperature uniformity, particle size and other indicators have a direct impact on the injection activation rate and device electrical performance.

[0003] Due to the high process temperature of oxidation and annealing, different materials have different temperature requirements. Among them, the oxidation process of SiC material is as high as 1500℃, and the highest temperature of annealing process is 2000℃. In a conventional atmosphere, heaters, thermal insulation refractory materials, and device products will be severely oxidized, so the general SiC high-temperature oxidation and annealing process needs to be carried out in an inert protective gas environment. Generally, a water-cooled jacket with high temperature resistance, high pressure resistance, and good vacuum sealing is wrapped on the outside of the furnace body to provide a stable and reliable process environment for the high-temperature oxidation and annealing process, and at the same time, it can prevent the external structure of the furnace from being affected by high temperature when heating.

[0004] At present, some equipment on the market has a small water-cooled heat dissipation area for the high-temperature furnace jacket, unreasonable internal flow channel layout, large flow resistance, and stagnant water flow in some corners, that is, there are dead zones, which can easily lead to excessive local temperature of the equipment, poor temperature uniformity inside the furnace, and poor heat dissipation effect, affecting the equipment's process performance. Summary of the invention

[0005] The technical problem to be solved by the present invention is to overcome the shortcomings of the existing vertical high-temperature furnace body jacket, such as small water-cooling heat dissipation area, unreasonable internal flow channel arrangement, large flow resistance, easy to cause water flow stagnation in certain corner areas, and poor heat dissipation effect, and to provide a vertical high-temperature furnace body water-cooling jacket with a large heat dissipation area, small flow resistance, good high temperature resistance and low vacuum leakage rate.

[0006] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0007] A vertical high-temperature furnace water-cooling jacket comprises: a cylindrical jacket body, an upper flange and a lower flange; the side wall of the jacket body is a hollow double-layer structure, and is divided into a plurality of annular flow channels connected end to end by at least one annular flow guide baffle, and a plurality of flow guide columns are evenly distributed in the annular flow channels; a first water inlet is provided at the lower part of the side wall of the jacket body, and a first water return port is provided at the upper part of the side wall of the jacket body, cooling water enters the annular flow channel of the jacket body through the first water inlet, and after S-shaped flow between the plurality of annular flow channels, is discharged from the jacket body through the first water return port;

[0008] The upper flange is detachably connected to the top of the jacket body, and a spiral water cooling channel is provided inside the upper flange;

[0009] The lower flange is fixedly connected to the bottom of the jacket body, and an annular water cooling channel is arranged inside the lower flange.

[0010] As a further improvement of the present invention, an air inlet is provided at the lower part of the side wall of the jacket body, and the air inlet is used to fill or extract inert gas into or out of the water-cooling jacket to achieve gas cleaning inside the water-cooling jacket.

[0011] As a further improvement of the present invention, a vacuum exhaust port is provided on the upper portion of the side wall of the jacket body, and the vacuum exhaust port is used to achieve vacuuming inside the water-cooling jacket.

[0012] As a further improvement of the present invention, a plurality of thermocouple mounting ports are provided on the side wall of the jacket body, and a cooling channel is provided around the outside of the thermocouple mounting ports. The cooling channel includes a second water inlet and a second water return port. Cooling water flows in from the second water inlet, flows around the outside of the thermocouple mounting ports for one circle, and then flows out from the second water return port to take away the heat conducted by the vertical high-temperature furnace body at the thermocouple mounting ports.

[0013] As a further improvement of the present invention, the cooling channels of the plurality of thermocouple mounting ports are connected in series to form an S-shaped cooling channel.

[0014] As a further improvement of the present invention, the upper flange includes an upper flange body, an upper flange cover plate, a third water inlet, a third water return port, a guide spacer and a return water cover plate; the bottom of the upper flange body is threadedly connected to the top of the jacket body, an upper flange cover plate is provided on the top of the upper flange body, and a closed hollow cavity is formed between the upper flange body and the upper flange cover plate, and a guide spacer and a return water cover plate are provided in the hollow cavity, and the guide spacer and the return water cover plate divide the hollow cavity into a spiral water-cooling channel; a third water inlet and a third water return port are provided on the upper flange cover plate, and cooling water enters the spiral water-cooling channel from the third water inlet, and flows out of the upper flange from the third water return port to take away the heat conducted by the vertical high-temperature furnace body at the upper flange.

[0015] As a further improvement of the present invention, an electrode mounting seat and a temperature measuring tube mounting opening are also provided on the upper flange.

[0016] As a further improvement of the present invention, the lower flange includes a lower flange body, a lower flange cover plate, a fourth water inlet and a fourth water return port; the top of the lower flange body is welded and fixed to the bottom of the jacket body, the bottom of the lower flange body is provided with a lower flange cover plate and a plurality of annular flow channels, the lower flange cover plate is respectively provided with a fourth water inlet and a fourth water return port, the cooling water flows into the annular flow channel from the fourth water inlet, circling in the annular flow channel, and flows out of the lower flange from the fourth water return port to take away the heat conducted by the vertical high-temperature furnace body at the lower flange.

[0017] As a further improvement of the present invention, the maximum operating temperature of the water-cooling jacket of the vertical high-temperature furnace is 2000°C.

[0018] Compared with the prior art, the advantages of the present invention are:

[0019] 1. The vertical high-temperature furnace water-cooling jacket of the present invention is formed by connecting an upper flange and a lower flange at both ends of a cylindrical jacket body with a hollow double-layer side wall, thereby forming a vertical high-temperature furnace water-cooling jacket with a compact structure, convenient installation, and significant heat dissipation effect; further, the jacket body side is divided into a plurality of annular flow channels connected end to end by an annular guide baffle, and a plurality of guide columns are evenly distributed in the annular flow channel, so that a local mesh flow basin is formed in the annular flow channel, and adjacent flow basins are connected end to end. The annular flow channel on the side of the jacket body forms an S-shaped flow channel as a whole. When the cooling water flows from the side wall of the jacket along the S shape from bottom to top, the guide column can not only increase the turbulence intensity inside the flow channel, reduce the flow resistance, and increase the heat dissipation contact area between the flow channel inside the jacket and the cooling water, but also control the temperature inside and outside the furnace jacket within a safe temperature at high temperature, and the cooling water does not vaporize. At the same time, it also improves the structural compressive strength between the inner and outer shells of the furnace jacket, avoids deformation of the furnace body when pressurized, and significantly improves the safety of the furnace body.

[0020] 2. The vertical high-temperature furnace water-cooling jacket of the present invention realizes quick disassembly and assembly between the jacket body and the upper flange by threadedly connecting the upper flange body and the jacket body, and also improves the efficiency of disassembling and assembling components such as thermal insulation carbon felt, heater, and temperature sensor inside the jacket body; by arranging a spiral water-cooling flow channel in the closed hollow cavity formed between the upper flange body and the upper flange cover plate, the cooling area of ​​the upper flange is increased, and the upward flow of heat due to the vertical structure of the furnace body, which causes the temperature at the top of the furnace body to be too high, thereby causing adverse effects on temperature-sensitive components, and effectively improving the service life of related temperature-sensitive components.

[0021] 3. The water-cooling jacket of the vertical high-temperature furnace body of the present invention realizes a reliable sealing connection between the jacket body and the lower flange by welding and fixing the lower flange body and the jacket body, thereby effectively reducing the vacuum leakage rate of the water-cooling jacket; by arranging a plurality of annular flow channels on the lower flange body, cooling water flows into the annular flow channel from the fourth water inlet, swirls in the annular flow channel, and flows out of the lower flange from the fourth water return port, taking away the heat conducted by the vertical high-temperature furnace body at the lower flange, thereby effectively extending the service life of the lower flange. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the main structural principle of the water-cooling jacket of the vertical high-temperature furnace body of the present invention.

[0023] Figure 2 for Figure 1 Schematic diagram of the cross-sectional structure principle in the AA direction.

[0024] Figure 3 for Figure 1 Schematic diagram of the cross-sectional structure principle along the BB direction.

[0025] Figure 4 It is a schematic diagram of the top structural principle of the water-cooling jacket of the vertical high-temperature furnace body of the present invention.

[0026] Figure 5 for Figure 2 Schematic diagram of the structural principle at I in the figure.

[0027] Figure 6 It is a schematic diagram of the axial cross-sectional structure principle of the water-cooling jacket of the vertical high-temperature furnace body of the present invention.

[0028] Figure 7 It is a schematic diagram of the axial sectional structure principle of the upper flange in the present invention.

[0029] Figure 8 It is a schematic diagram of the main structural principle of the upper flange in the present invention.

[0030] Fig. 9 It is a schematic diagram of the main structural principle of the lower flange in the present invention.

[0031] Fig.10 for Fig. 9 Schematic diagram of the structural principle of the rotational section in the CC direction.

[0032] Fig.11 It is a schematic diagram of the axial sectional structure principle of the lower flange in the present invention.

[0033] Legend: 1. First annular shell; 2. Second annular shell; 3. Third annular shell; 4. Fourth annular shell; 5. Fifth annular shell; 6. First water inlet; 7. First water return port; 8. Guide column; 9. Second water inlet; 10. Second water return port; 11. Upper flange; 12. Air inlet; 13. First thermocouple installation port; 14. Second thermocouple installation port; 15. Third thermocouple installation port; 16. Fourth thermocouple installation port; 17. Vacuum exhaust port; 18- Jacket inner shell; 19. Lower flange; 20. Lower end plate; 2 1. First guide baffle; 22. Second guide baffle; 23. Third guide baffle; 24. Fourth guide baffle; 25. Upper end plate; 26. Upper flange body; 27. Upper flange cover; 28. Electrode mounting seat; 29. ​​Temperature measuring tube mounting port; 30. Third water inlet; 31. Third water return port; 32. Guide baffle; 33. Water return cover; 34. Lower flange body; 35. Lower flange cover; 36. Water inlet cover; 37. Water return cover; 38. Fourth water inlet; 39. Fourth water return port; 100. Jacket body. DETAILED DESCRIPTION

[0034] The present invention is further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0035] Example

[0036] like Figures 1 to 11 As shown, the vertical high-temperature furnace water-cooling jacket of the present invention comprises: a cylindrical jacket body 100, an upper flange 11 and a lower flange 19. The side wall of the jacket body 100 is a hollow double-layer structure, and is divided into a plurality of annular flow channels connected end to end by at least one annular flow guide baffle, and a plurality of flow guide columns 8 are evenly distributed in the annular flow channels. A first water inlet 6 is provided at the lower part of the side wall of the jacket body 100, and a first water return port 7 is provided at the upper part of the side wall of the jacket body 100. The cooling water enters the annular flow channel of the jacket body 100 from the first water inlet 6, and after S-shaped flow between the plurality of annular flow channels, it is discharged from the jacket body 100 from the first water return port 7.

[0037] The upper flange 11 is detachably connected to the top of the jacket body 100, and a spiral water cooling channel is provided inside the upper flange 11. The lower flange 19 is fixedly connected to the bottom of the jacket body 100, and an annular water cooling channel is provided inside the lower flange 19.

[0038] Specifically, in this embodiment, the jacket inner shell 18 of the inner layer of the jacket body 100, the outer layer of the jacket body 100 is the first annular shell 1, the second annular shell 2, the third annular shell 3, the fourth annular shell 4 and the fifth annular shell 5 from bottom to top, and the first guide baffle 21, the second guide baffle 22, the third guide baffle 23 and the fourth guide baffle 24 are arranged from bottom to top between the two adjacent annular shells, the lower end plate 20 is arranged at the bottom of the first annular shell 1, and the upper end plate 25 is arranged at the top of the fifth annular shell 5. The side wall of the jacket body 100 is divided into five annular flow channels connected end to end by the cooperation of the guide baffle and the end plate. The first water inlet 6 is arranged at the lower part of the first annular shell 1, and the first water return port 7 is arranged at the upper part of the fifth annular shell 5. The cooling water enters the first annular housing 1 from the first water inlet 6, flows through the first annular housing 1, the second annular housing 2, the third annular housing 3, the fourth annular housing 4 and the fifth annular housing 5 from bottom to top, and finally flows out from the first water return port 7 on the fifth annular housing 5. Specifically, Figure 6 As shown, the cooling water flows upward from the bottom of the jacket in the direction of the arrow. When the water flows through the guide column 8, the flow velocity is accelerated, and the turbulence intensity of the water flow is enhanced, so that it fully contacts the inner wall of the furnace body, takes away the heat conducted inside the furnace body, and realizes the side cooling effect.

[0039] It can be understood that the number of annular flow channels separated by the side wall of the jacket body 100 can be set according to actual application requirements; the shape of the guide column 8 is not limited to columnar, but can also be other shapes such as sheet. The density of the arrangement of the guide column 8 in the annular flow channel can also be flexibly adjusted according to actual simulation and test conditions.

[0040] In this embodiment, by connecting the upper flange 11 and the lower flange 19 at both ends of the cylindrical jacket body 100 with a hollow double-layer side wall, a vertical high-temperature furnace water-cooling jacket with a compact structure, convenient installation and significant heat dissipation effect is formed. Furthermore, the side of the jacket body 100 is divided into a plurality of annular flow channels connected end to end by an annular guide baffle, and a plurality of guide columns 8 are evenly distributed in the annular flow channel, so that a local mesh flow domain is formed in the annular flow channel, and adjacent flow domains are connected end to end. The annular flow channel on the side of the jacket body 100 forms an S-shaped flow channel as a whole. When the cooling water flows from the bottom to the top along the S shape from the side wall of the jacket, the guide column 8 can not only increase the turbulence intensity inside the flow channel, reduce the flow resistance, and increase the heat dissipation contact area between the flow channel inside the jacket and the cooling water, but also control the temperature inside and outside the furnace jacket within a safe temperature at high temperature, and the cooling water does not vaporize. At the same time, the structural compressive strength between the inner and outer shells of the furnace jacket is also improved, deformation of the furnace body when pressurized is avoided, and the safety of the furnace body is significantly improved.

[0041] like Figure 2As shown, in this embodiment, an air inlet 12 is provided at the lower part of the side wall of the jacket body 100, and the air inlet 12 is used to fill or extract inert gas into the water-cooling jacket to achieve gas cleaning inside the water-cooling jacket. A vacuum exhaust port 17 is provided at the upper part of the side wall of the jacket body 100, and the vacuum exhaust port 17 is used to achieve vacuum inside the water-cooling jacket. In this embodiment, a furnace air intake VCR interface, an infrared sensor installation port and a KF25 exhaust interface are provided on the side wall of the jacket body 100, and the interface type can be adjusted according to actual conditions and is not limited to VCR or KF types.

[0042] In order to prevent the oxidation of the heat insulation material, process pipe and graphite heating material inside the furnace body at high temperature, it is necessary to fill the jacket with protective gas, such as nitrogen or argon, when the furnace body is heated. The specific process is to use a vacuum device to evacuate the jacket through the vacuum exhaust port 17 to extract the air inside the jacket, and then add nitrogen or argon to the jacket through the air inlet 12. Repeat the pumping and filling three times to basically complete the gas cleaning inside the jacket.

[0043] like Figure 2 As shown, in this embodiment, a plurality of thermocouple mounting ports are provided on the side wall of the jacket body 100, and a cooling channel is provided around the outside of the thermocouple mounting port. The cooling channel includes a second water inlet 9 and a second water return port 10. Cooling water flows in from the second water inlet 9, flows around the outside of the thermocouple mounting port for one circle, and then flows out from the second water return port 10 to take away the heat conducted by the vertical high-temperature furnace body at the thermocouple mounting port. Furthermore, the cooling channels of the plurality of thermocouple mounting ports are connected in series to form an S-shaped cooling channel.

[0044] Specifically, in this embodiment, an air inlet 12, a first thermocouple installation port 13, a second thermocouple installation port 14, a third thermocouple installation port 15, a fourth thermocouple installation port 16 and a vacuum exhaust port 17 are sequentially arranged on the side of the jacket body 100 from bottom to top, and a second water inlet 9 and a second water return port 10 are arranged on the outside of each thermocouple installation port and the vacuum exhaust port 17. The joint arranged at the flange of the jacket body 100 is directly connected to the furnace body inside. When the furnace body is at a high temperature, the heat is easily transferred to the thermocouple terminal along the interface. Therefore, a water cooling channel is arranged on the outside of each installation interface, such as Figure 1 and Figure 2 As shown, water flows in from the second water inlet 9 on the side of the first thermocouple installation port 13, flows out from the second water return port 10 opposite along the side wall, and sequentially passes through the second thermocouple installation port 14, the third thermocouple installation port 15, the fourth thermocouple installation port 16 and the vacuum exhaust port 17, taking away the heat conducted from the furnace body to each installation interface. It can be understood that the number of thermocouple installation ports can be set according to actual application requirements.

[0045] like Figure 4 , Figure 7and Figure 8 As shown, in this embodiment, the upper flange 11 includes an upper flange body 26, an upper flange cover plate 27, a third water inlet 30, a third water return port 31, a guide spacer 32 and a water return cover plate 33. The bottom of the upper flange body 26 is threadedly connected to the top of the jacket body 100, specifically, the bottom of the upper flange body 26 is threadedly connected to the top of the jacket inner shell 18, and an upper flange cover plate 27 is provided on the top of the upper flange body 26, and a closed hollow cavity is formed between the upper flange body 26 and the upper flange cover plate 27, and a guide spacer 32 and a water return cover plate 33 are provided in the hollow cavity, and the guide spacer 32 and the water return cover plate 33 divide the hollow cavity into a spiral water cooling channel. A third water inlet 30 and a third water return port 31 are provided on the upper flange cover plate 27. Cooling water enters the spiral water cooling channel through the third water inlet 30, flows from outside to inside, and finally flows out of the upper flange 11 through the third water return port 31 to take away the heat conducted at the upper flange 11 by the vertical high-temperature furnace body.

[0046] Furthermore, an electrode mounting seat 28 and a temperature measuring tube mounting opening 29 are also provided on the upper flange 11 to facilitate installation of heat insulating carbon felt, heater, temperature sensor and other devices inside the furnace jacket.

[0047] In this embodiment, by threading the upper flange body 26 and the jacket body 100, quick disassembly and assembly between the jacket body 100 and the upper flange 11 is achieved, and the efficiency of disassembly and assembly of components such as heat-insulating carbon felt, heater, and temperature sensor inside the jacket body 100 is also improved. By arranging a spiral water-cooling flow channel in the closed hollow cavity formed between the upper flange body 26 and the upper flange cover plate 27, the cooling area of ​​the upper flange 11 is increased, and the upward flow of heat due to the vertical structure of the furnace body is avoided, resulting in excessively high temperature at the top of the furnace body, which in turn causes adverse effects on temperature-sensitive components, and effectively improves the service life of related temperature-sensitive components.

[0048] like Figures 9 to 11 As shown, in this embodiment, the lower flange 19 includes a lower flange body 34, a lower flange cover plate 35, a fourth water inlet 38 and a fourth water return port 39. The top of the lower flange body 34 is welded and fixed to the bottom of the jacket body 100, specifically, the top of the lower flange body 34 is connected to the bottom of the jacket inner shell 18 by argon arc welding, and the bottom of the lower flange body 34 is provided with a lower flange cover plate 35 and a plurality of annular flow channels, and the lower flange cover plate 35 is respectively provided with a fourth water inlet 38 and a fourth water return port 39, and cooling water flows into the annular flow channel from the fourth water inlet 38, and swirls in the annular flow channel, and flows out of the lower flange 19 from the fourth water return port 39 to take away the heat conducted by the vertical high-temperature furnace body at the lower flange 19. Further, a water inlet cover plate 36 and a water return port cover plate 37 are respectively provided on the outside of the fourth water inlet 38 and the fourth water return port 39.

[0049] In this embodiment, by welding and fixing the lower flange body 34 and the jacket body 100, a reliable sealing connection between the jacket body 100 and the lower flange 19 is achieved, and the vacuum leakage rate of the water-cooled jacket is effectively reduced. By providing a plurality of annular flow channels on the lower flange body 34, cooling water flows into the annular flow channels from the fourth water inlet 38, swirls in the annular flow channels, and flows out of the lower flange 19 from the fourth water return port 39, taking away the heat conducted at the lower flange by the vertical high-temperature furnace body, and effectively extending the service life of the lower flange.

[0050] In this embodiment, corresponding cooling channels are provided on the jacket body 100, the upper flange 11 and the lower flange 19, and the inlet and outlet flow rates of each cooling channel can be controlled to achieve rapid cooling of the furnace body, so that the maximum operating temperature of the vertical high-temperature furnace water-cooling jacket reaches 2000°C, which well meets the process requirements of semiconductor chip production and improves the efficiency of semiconductor chip production.

[0051] Although the present invention is disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any technician familiar with the art can use the above disclosed methods and technical contents to make many possible changes and modifications to the technical solutions of the present invention without departing from the spirit and technical solutions of the present invention, or modify them into equivalent embodiments of equivalent changes. Therefore, any simple modification, equivalent replacement, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solutions of the present invention still fall within the scope of protection of the technical solutions of the present invention.

Claims

1. A vertical high temperature furnace water cooling jacket, characterized in that: include: A cylindrical jacket body (100), an upper flange (11) and a lower flange (19); the side wall of the jacket body (100) is a hollow double-layer structure and is divided into a plurality of annular flow channels connected end to end by at least one annular flow guide baffle, and a plurality of flow guide columns (8) are evenly distributed in the annular flow channels; a first water inlet (6) is provided at the lower part of the side wall of the jacket body (100), and a first water return port (7) is provided at the upper part of the side wall of the jacket body (100); cooling water enters the annular flow channel of the jacket body (100) through the first water inlet (6), flows in an S-shape between the plurality of annular flow channels, and then is discharged from the jacket body (100) through the first water return port (7); The upper flange (11) is detachably connected to the top of the jacket body (100), and a spiral water cooling channel is provided inside the upper flange (11); The lower flange (19) is fixedly connected to the bottom of the jacket body (100), and an annular water cooling channel is provided inside the lower flange (19); An air inlet (12) is provided at the lower part of the side wall of the jacket body (100), and the air inlet (12) is used to fill or extract inert gas into or from the inside of the water-cooling jacket to achieve gas cleaning inside the water-cooling jacket; A vacuum exhaust port (17) is provided on the upper portion of the side wall of the jacket body (100), and the vacuum exhaust port (17) is used to realize vacuum extraction inside the water-cooling jacket; The upper flange (11) comprises an upper flange body (26), an upper flange cover plate (27), a third water inlet (30), a third water return port (31), a guide spacer (32) and a water return cover plate (33); the bottom of the upper flange body (26) is threadedly connected to the top of the jacket body (100); the top of the upper flange body (26) is provided with an upper flange cover plate (27); and a closed hollow cavity is formed between the upper flange body (26) and the upper flange cover plate (27); A flow guide strip (32) and a water return cover plate (33) are provided in the hollow cavity, and the flow guide strip (32) and the water return cover plate (33) divide the hollow cavity into a spiral water cooling flow channel; a third water inlet (30) and a third water return port (31) are provided on the upper flange cover plate (27), and cooling water enters the spiral water cooling flow channel through the third water inlet (30) and flows out of the upper flange (11) through the third water return port (31) to remove heat conducted from the vertical high-temperature furnace body at the upper flange (11); The lower flange (19) comprises a lower flange body (34), a lower flange cover plate (35), a fourth water inlet (38) and a fourth water return port (39); the top of the lower flange body (34) is welded and fixed to the bottom of the jacket body (100); the bottom of the lower flange body (34) is provided with a lower flange cover plate (35) and a plurality of annular flow channels; the lower flange cover plate (35) is provided with a fourth water inlet (38) and a fourth water return port (39), respectively; cooling water flows into the annular flow channel from the fourth water inlet (38), swirls in the annular flow channel, and flows out of the lower flange (19) from the fourth water return port (39) to remove heat conducted at the lower flange (19) by the vertical high-temperature furnace body.

2. The vertical high-temperature furnace water-cooling jacket according to claim 1 is characterized in that: A plurality of thermocouple mounting openings are provided on the side wall of the jacket body (100), and a cooling channel is provided around the outside of the thermocouple mounting openings. The cooling channel comprises a second water inlet (9) and a second water return opening (10). Cooling water flows in from the second water inlet (9), flows around the outside of the thermocouple mounting openings for one circle, and then flows out from the second water return opening (10) to remove heat conducted from the vertical high-temperature furnace body at the thermocouple mounting openings.

3. The vertical high temperature furnace water cooling jacket according to claim 2, characterized in that: The cooling channels of the plurality of thermocouple mounting ports are connected in series to form an S-shaped cooling channel.

4. The vertical high-temperature furnace water-cooling jacket according to claim 1 is characterized in that: The upper flange (11) is also provided with an electrode mounting seat (28) and a temperature measuring tube mounting opening (29).

5. The vertical high-temperature furnace water-cooling jacket according to any one of claims 1 to 4, characterized in that: The maximum operating temperature of the water-cooling jacket of the vertical high-temperature furnace is 2000°C.

Images