A hall sensor and a preparation method and a test method thereof

By introducing a polarity conversion layer and voltage control of the bottom electrode into the Hall sensor, the type and concentration of charge carriers in the carrier sensing layer can be adjusted, thus solving the problem of low sensitivity in existing Hall sensors and achieving adjustable and improved sensitivity.

CN115148894BActive Publication Date: 2026-06-23INST OF MICROELECTRONICS CHINESE ACAD OF SCI LTD
View PDF 2 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
INST OF MICROELECTRONICS CHINESE ACAD OF SCI LTD
Filing Date
2021-03-30
Publication Date
2026-06-23

AI Technical Summary

Technical Problem

Existing Hall sensors lack gate modulation capabilities, resulting in low sensitivity.

Method used

Design a Hall sensor comprising a substrate, a bottom electrode, a polarity conversion layer, a carrier sensing layer, and a top electrode. By applying different voltage values ​​to the bottom electrode, the polarity conversion of the polarity conversion layer can be controlled, affecting the type and concentration of carriers in the carrier sensing layer, thereby regulating the sensitivity.

Benefits of technology

This enables adjustable and improved sensitivity of the Hall sensor, thereby enhancing its detection performance.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN115148894B_ABST
    Figure CN115148894B_ABST
Patent Text Reader

Abstract

The application discloses a Hall sensor and a preparation method and a testing method thereof. The Hall sensor comprises a substrate layer, a bottom electrode, a polarity conversion layer, a carrier sensing layer and a top electrode. The bottom electrode, the polarity conversion layer, the carrier sensing layer and the top electrode are sequentially arranged on one side of the substrate layer. The polarity conversion layer is used for converting the polarity according to the voltage applied on the bottom electrode. The carrier sensing layer is used for sensing the polarity of the polarity conversion layer to generate corresponding carriers. The top electrode is used for outputting a sensing signal according to an input bias signal. The sensitivity of the existing Hall sensor can be improved.
Need to check novelty before this filing date? Find Prior Art