Optical active alignment and bonding method and optical detection system

By using biased light source to send light during the optical component alignment bonding process, the problem of interference in the reflected optical path of the mirror group system is solved, the accuracy and effectiveness of the optical component alignment are achieved, and the abnormal optical alignment bonding is avoided.

CN115165323BActive Publication Date: 2025-08-15INTERFACE OPTOELECTRONICS (SHENZHEN) CO LTD +2
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Patent Information

Application Number
CN202210922336.8
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-08-02
Publication Date
2025-08-15
Estimated Expiration
2042-08-02

AI Technical Summary

Technical Problem

During the alignment and bonding of optical components, the reflected light path interference of the mirror group system causes aliasing of light received by the optical sensor, causing alignment errors and stray light artifacts, affecting contrast and accuracy.

Method used

The light source is used to send out light to the mirror group system in a biased manner, so that the reflected light is deviated from the incident range or there is a distance from the incident range in the optical sensor. By controlling the light path to avoid interference, the optical sensor ensures that the optical sensor provides accurate detection results.

Benefits of technology

It effectively avoids abnormal optical alignment fitting, improves the accuracy and effectiveness of optical component alignment, and ensures the correctness of the mirror group system alignment.

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Abstract

The present application relates to an optical active alignment and bonding method and an optical detection system. The optical active alignment and bonding method includes the following steps: when an optical component is aligned and bonded, a light source is used to send an outgoing light beam to a lens system in a deflected manner; the outgoing light beam passes through the lens system and is incident on an optical sensor, and has an incident range in the optical sensor; the outgoing light beam generates a reflected light beam through the lens system, and the reflected light beam deviates from the incident range. The above-mentioned optical active alignment and bonding method cleverly separates the outgoing light beam and its reflected light beam at the detection position in the optical sensor, so that the detection of the outgoing light beam is not interfered with by the reflected light beam caused by the lens system, so that the optical sensor can provide accurate detection results, ensure the correct alignment of the lens system, and thus ensure the accuracy and effectiveness of the alignment and bonding of the optical component, thereby effectively avoiding optical alignment and bonding anomalies.
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Description

Technical Field

[0001] The present application relates to the field of optical detection, and in particular to an optical active alignment and bonding method and an optical detection system. Background Art

[0002] Generally, when aligning and bonding optical components, the lens system has one or more lens components and a catadioptric optical system with a reflective structure. Therefore, when aligning and bonding, the system will generate multiple reflected light paths. The multiple light path signals incident on the sensor through the transmission axis of the reflective polarizer will interfere with the accuracy of the polarization axis alignment of the quarter-wave plate and the reflective polarization component, thereby causing the image light to form ghost images or unexpected paths, which will reduce the contrast and present stray light artifacts, resulting in optical alignment abnormalities. Specifically, a traditional optical alignment architecture design is far away from such Figure 1 As shown, theoretically, the light 500 emitted by the light source 100 should pass through the lens system 200 and enter the optical sensor 300. However, due to multiple reflections between the partially transparent and partially reflective components of the lens system 200 and the reflective polarization component, the actual detection is as follows: Figure 2 As shown, the outgoing light 500 generates a plurality of penetrating lights 400, which are shown as a first penetrating light 410, a second penetrating light 420, a third penetrating light 430, ... and an nth penetrating light 440, etc. Each penetrating light is actually a combination of light beams, which appear as a light spot. Since these multiple penetrating lights are all received by an optical sensor 300, such as an optical sensor, the light actually received by the optical sensor 300 is as shown in FIG. Figure 3 As shown in the figure, the length unit is millimeter, that is, the length of the vertical and horizontal axes is 50 mm. The outgoing light 500 appears as a small light spot formed by the first transmitted light 410, and the remaining transmitted light including the second transmitted light 420, the third transmitted light 430... and the nth transmitted light 440 appear as large light spots outside the small light spot. The existence of these large light spots causes the value to be misinterpreted, resulting in a phase retarder and a reflective polarizer to produce misalignment results. It should be noted that, for the sake of example, Figure 3 It is a schematic diagram. In actual application, the sensing area of the optical sensor 300 , ie, the receiving area, can be smaller. Summary of the Invention

[0003] Based on this, it is necessary to provide an optical active alignment and bonding method and an optical detection system.

[0004] An optical active alignment method comprises the following steps:

[0005] When the optical components are aligned and bonded, a light source is used to send outgoing light to the lens system in a deflected manner;

[0006] The outgoing light passes through the lens system and is incident on the optical sensor, and has an incident range in the optical sensor;

[0007] The outgoing light generates reflected light through the lens system, and the reflected light deviates from the incident range.

[0008] The above-mentioned active optical alignment and bonding method cleverly separates the outgoing light and its reflected light at the detection position in the optical sensor. This ensures that the detection of the outgoing light is not interfered with by the reflected light caused by the lens system. This allows the optical sensor to provide accurate detection results, ensuring the correct alignment of the lens system, thereby ensuring the accuracy and effectiveness of the optical component alignment and bonding, and effectively avoiding optical alignment and bonding anomalies.

[0009] In one embodiment, the reflected light deviates from the optical sensor; or, there is a distance between the light range of the reflected light in the optical sensor and the incident range, and the distance is a machine-recognizable distance to distinguish the incident range from the light range.

[0010] In one embodiment, the optical sensor is prevented from receiving the reflected light by shielding the light range of the reflected light in the optical sensor.

[0011] Furthermore, in one embodiment, by controlling the deflection mode, the outgoing light passes through the lens system and generates only one beam of reflected light on a side of the lens system adjacent to the optical sensor.

[0012] In one embodiment, the lens system includes a transflective lens, a phase delay element, and a reflective polarizer that are sequentially arranged, wherein the transflective lens is arranged adjacent to the light source.

[0013] In one embodiment, the lens system is a coaxial lens system, and the light source is used to send outgoing light to the lens system in an off-axis manner.

[0014] In one embodiment, the emitted light forms a preset angle with the axis of the lens system, and the preset angle is set according to the emission position of the light source, the position of the lens system, and the optical sensor.

[0015] In one embodiment, the preset angle is greater than or equal to N degrees, where N is any value from 3 to 8.

[0016] In one embodiment, before using the light source to send outgoing light in a deflected manner toward the lens system, the optical active alignment bonding method further includes the step of determining whether reflected light is incident on the optical sensor when the light source is sending outgoing light in an axial manner toward the lens system, and if so, using the light source to send outgoing light in a deflected manner toward the lens system.

[0017] In one embodiment, an optical detection system includes:

[0018] Mirror system;

[0019] an optical sensor for detecting light passing through the lens system;

[0020] a light source for sending outgoing light to the lens system in a deflected manner when the optical components are aligned and bonded;

[0021] The outgoing light passes through the lens system and is incident on the optical sensor, and has an incident range in the optical sensor; the outgoing light generates reflected light through the lens system, and the reflected light deviates from the incident range.

[0022] In one embodiment, the lens system is a coaxial lens system comprising a transflective lens, a phase delay element, and a reflective polarizer that are coaxially arranged in sequence, wherein the transflective lens is arranged adjacent to the light source;

[0023] The emitted light forms a preset angle with the axis of the lens system, and the preset angle is set according to the emission position of the light source, the position of the lens system, and the optical sensor; and / or the preset angle is greater than or equal to N degrees, where N is any value between 3 and 8.

[0024] In one embodiment, the reflected light deviates from the optical sensor; or, there is a distance between the light range of the reflected light in the optical sensor and the incident range, and the distance is a machine-recognizable distance to distinguish the incident range from the light range. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the conventional technology, the following briefly introduces the drawings required for use in the embodiments or the conventional technology descriptions. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 This is a schematic diagram of the principle of the traditional implementation method.

[0027] Figure 2 for Figure 1 Schematic diagram of the actual situation of the structure shown.

[0028] Figure 3 for Figure 2 Schematic diagram of light received by the optical sensor of the shown structure.

[0029] Figure 4 1 is a flow chart of an embodiment of the optical active alignment bonding method described in this application.

[0030] Figure 5 This is a flow chart of another embodiment of the optical active alignment bonding method described in this application.

[0031] Figure 6 This is a flow chart of another embodiment of the optical active alignment bonding method described in this application.

[0032] Figure 7 This is a flow chart of another embodiment of the optical active alignment bonding method described in this application.

[0033] Figure 8 This is a structural diagram of an embodiment of the optical detection system described in this application.

[0034] Figure 9 This is a structural diagram of another embodiment of the optical detection system described in this application.

[0035] Figure 10 for Figure 9 A partially enlarged schematic diagram of the illustrated embodiment.

[0036] Figure 11 for Figure 10 Schematic diagram of the application of the embodiment shown.

[0037] Figure 12 for Figure 11 Schematic diagram of the practical application of the embodiment shown.

[0038] Figure 13 This is a schematic diagram of simulation test results of another embodiment of the optical detection system described in this application with a preset angle of 1 degree.

[0039] Figure 14 This is a schematic diagram of simulation test results of another embodiment of the optical detection system described in this application with a preset angle of 2 degrees.

[0040] Figure 15 This is a schematic diagram of simulation test results of another embodiment of the optical detection system described in this application with a preset angle of 3 degrees.

[0041] Figure 16This is a schematic diagram of simulation test results of another embodiment of the optical detection system described in this application with a preset angle of 4 degrees.

[0042] Figure 17 This is a schematic diagram of simulation test results of another embodiment of the optical detection system described in this application with a preset angle of 5 degrees.

[0043] Figure 18 This is a schematic diagram of simulation test results of another embodiment of the optical detection system described in this application with a preset angle of 6 degrees.

[0044] Reference numerals:

[0045] 100: light source;

[0046] 200: lens system;

[0047] 210: transflective lens;

[0048] 220: Phase delay element;

[0049] 230: reflective polarizer;

[0050] 231: focusing lens;

[0051] 300: optical sensor;

[0052] 400: penetrating light;

[0053] 410: first penetrating light;

[0054] 420: second penetrating light;

[0055] 430: third penetrating light;

[0056] 440: nth penetrating light;

[0057] 500: Outgoing light

[0058] 600: optical axis;

[0059] ɑ: preset angle. DETAILED DESCRIPTION

[0060] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0061] It should be noted that when a component is referred to as being "fixed to" or "disposed on" another component, it may be directly on the other component or there may be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of this application are for illustrative purposes only and do not represent the only implementation method.

[0062] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0063] In this application, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it can mean that the first feature is directly in contact with the second feature, or the first feature and the second feature are indirectly in contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it can mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is higher in level than the second feature. When a first feature is "below," "below," or "below" a second feature, it can mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is lower in level than the second feature.

[0064] Unless otherwise defined, all technical and scientific terms used in the specification of this application have the same meaning as commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in the specification of this application includes any and all combinations of one or more of the relevant listed items.

[0065] In one embodiment of the present application, a method for optical active alignment bonding includes some or all of the steps of the following embodiments; that is, the method for optical active alignment bonding and the corresponding optical detection system include some or all of the following technical features. In one embodiment, a method for optical active alignment bonding includes: Figure 4As shown, it includes the following steps: when the optical component is aligned and bonded, a light source is used to send an outgoing light to the lens system in a deflected manner; the outgoing light passes through the lens system and is incident on the optical sensor, and has an incident range in the optical sensor; the outgoing light generates a reflected light through the lens system, and the reflected light deviates from the incident range. The above-mentioned optical active alignment and bonding method cleverly separates the outgoing light and its reflected light at the detection position in the optical sensor, so that the detection of the outgoing light is not interfered with by the reflected light caused by the lens system, so that the optical sensor can provide accurate detection results, ensure the correctness of the alignment of the lens system, thereby ensuring the accuracy and effectiveness of the alignment and bonding of the optical component, and thus effectively avoiding optical alignment and bonding anomalies. It is understandable that the optical active alignment and bonding method may also include a bonding step. The embodiments of the present application do not have other process innovations for this, so they are omitted.

[0066] In one embodiment, the reflected light deviates from the optical sensor. This design allows the optical sensor to be completely unaffected by the reflected light. Specifically, the optical sensor receives only the portion of the outgoing light that passes through the lens system, namely, the first transmitted light 410, and is completely unaffected by the reflected light, namely, the second transmitted light 420, the third transmitted light 430, ..., and the nth transmitted light 440. This facilitates accurate detection of optical alignment abnormalities. In this case, the deflection method of the light source, i.e., the deflected output method, requires a greater deflection, i.e., a greater deviation. It is understood that the deflection method is relative to the traditional forward method, deviating from the traditional forward direction in order to deflect the reflected light from the incident range.

[0067] Alternatively, in one embodiment, a distance exists between the range of the reflected light in the optical sensor and the incident range, and this distance is machine-readable, thereby distinguishing the incident range from the light range. Furthermore, the range of the reflected light can be blocked in the optical sensor, for example, by using an aperture to block the range of the reflected light, thereby preventing the optical sensor from receiving the reflected light. In other words, if, after the light spot is separated, some reflected light passes through the lens system and remains in the sensor, an aperture can be added to the optical sensor to block the reflected light, allowing only the first transmitted light to be received. Compared with the design of the previous embodiment in which the reflected light cannot illuminate the optical sensor, this embodiment relaxes the position requirement for the light range of the reflected light in the optical sensor, and is suitable for the alignment and bonding of smaller optical component structures. In this embodiment, the reflected light can illuminate the optical sensor, but cannot interfere with the outgoing light, that is, the outgoing light of the light source. Since the spacing is a spacing that can be recognized by the machine, it is easy for the machine, such as the computer program therein, to distinguish between the first penetrating light of the outgoing light and the remaining penetrating light of the reflected light, thereby avoiding the influence of the existence of small light spots causing misinterpretation of the logarithmic value, thereby ensuring the accuracy of the optical active alignment and bonding.

[0068] Furthermore, in one embodiment, by controlling the deflection method, the outgoing light passes through the lens system, generating only one beam of reflected light on the side of the lens system adjacent to the optical sensor, that is, generating only two beams of transmitted light, one of which is the first transmitted light of the outgoing light, and the other is the reflected light. In each embodiment, the transmitted light is the light that passes through the lens system and reaches the side of the lens system adjacent to the optical sensor, and can also be referred to as a light beam. In one embodiment, by controlling the deflection method, the outgoing light passes through the lens system, generating only one beam of reflected light on the side of the lens system adjacent to the optical sensor, and the reflected light deviates from the optical sensor, or the light range of the reflected light in the optical sensor is spaced apart from the incident range, and the space is machine-readable, thereby distinguishing the incident range from the light range. The remaining embodiments are similar and are not further described. Furthermore, in one embodiment, by controlling the deflection, the outgoing light passes through the lens system, generating only one beam of reflected light at the target location on the side of the lens system adjacent to the optical sensor. For the optical active alignment method, the reflected light only needs to deviate from the incident range; the number of reflected rays is not critical. However, given that the light source sends outgoing light to the lens system in a deflected manner, to avoid interference with other components and affecting their service life, while reflected light is unavoidable, it is best to minimize its adverse effects on other components from uncontrollable locations. Therefore, controlling the number and location of reflected light helps protect other components, preventing excessive exposure and ensuring their proper service life.

[0069] In one embodiment, the lens system is a coaxial lens system, that is, the optical components therein have the same axis, which can also be called a coaxial setting, and the light source is used to send outgoing light to the lens system in an off-axis manner. In one embodiment, the outgoing light forms a preset angle with the axis of the lens system, and the preset angle is set according to the exit position of the light source, the position of the lens system and the optical sensor. In one embodiment, the preset angle is greater than or equal to N degrees, where N is any value from 3 to 8. Further, in one embodiment, N is any natural number from 4 to 8. In one embodiment, N is 4, then the preset angle is greater than or equal to 4 degrees, and the remaining embodiments are similar and will not be described in detail. In one embodiment, a method for optical active alignment and bonding is as follows: Figure 5As shown, the process includes the following steps: During alignment and bonding of optical components, a light source is used to send an outgoing light beam to a coaxial lens system in an off-axis manner. The outgoing light beam forms a preset angle with the axis of the lens system, and the preset angle is greater than or equal to 4 degrees. The outgoing light beam passes through the lens system and is incident on an optical sensor, and has an incident range in the optical sensor. The outgoing light beam generates a reflected light beam through the lens system, and the reflected light beam deviates from the incident range. The specific setting of the preset angle can be understood in conjunction with the following embodiments and their descriptions.

[0070] Furthermore, in one embodiment, the optical active alignment bonding method further includes the step of aligning and bonding the optical component when the optical sensor detects the outgoing light. Furthermore, in one embodiment, the optical component and / or the lens system has an irregular lens. This embodiment can also be referred to as an optical active alignment method for irregular lens bonding, which can be applied to an optical alignment bonding process. In one embodiment, an optical active alignment bonding method is as follows: Figure 6 As shown, the system includes the following steps: when aligning and bonding optical components, a light source is used to transmit outgoing light in a deflected manner to the lens system; the outgoing light passes through the lens system and is incident on an optical sensor, with an incident range in the optical sensor; the outgoing light generates reflected light through the lens system, and the reflected light deviates from the incident range; when the optical sensor detects that the outgoing light has passed, the optical component is aligned and bonded. This design facilitates the optical sensor to provide accurate detection results, thereby ensuring the correct alignment of the lens system, effectively avoiding optical alignment and bonding anomalies, and thereby improving the accuracy and effectiveness of optical component alignment and bonding.

[0071] In order to adapt to various different lens systems, in one embodiment, before using the light source to send the outgoing light to the lens system in a deflected manner, the optical active alignment bonding method further includes the step of determining whether there is reflected light incident on the optical sensor when the light source sends the outgoing light to the lens system in an axial manner, and if so, using the light source to send the outgoing light to the lens system in a deflected manner. In one embodiment, an optical active alignment bonding method is as follows: Figure 7As shown, the method includes the following steps: when the optical components are aligned and bonded, the light source sends an outgoing light ray to the lens system in an axial manner; it is determined whether there is reflected light incident on the optical sensor, and if so, the light source is used to send the outgoing light ray to the lens system in a deflected manner; the outgoing light ray passes through the lens system and is incident on the optical sensor, and has an incident range in the optical sensor; the outgoing light ray generates a reflected light ray through the lens system, and the reflected light ray deviates from the incident range.

[0072] In one embodiment, the lens system includes a transflective lens, a phase retarder, and a reflective polarizer arranged in sequence, wherein the transflective lens is positioned adjacent to the light source so that the light emitted by the light source is sequentially incident on the transflective lens, the phase retarder, and the reflective polarizer before finally entering the optical sensor. In one embodiment, the lens system is a coaxial lens system, comprising a transflective lens, a phase retarder, and a reflective polarizer arranged coaxially in sequence, wherein the transflective lens is positioned adjacent to the light source.

[0073] In one embodiment, an optical detection system is implemented using the optical active alignment and bonding method described in any embodiment, or the optical detection system has a functional module for implementing the optical active alignment and bonding method described in any embodiment.

[0074] In one embodiment, an optical detection system such as Figure 8 As shown, it includes: a light source 100, a lens system 200, and an optical sensor 300; wherein the optical sensor 300 is used to detect light passing through the lens system; when the optical components are aligned and bonded, the light source 100 sends an outgoing light 500 to the lens system 200 in a deflected manner; the outgoing light 500 passes through the lens system 200, for example, forming the first transmitted light 410, which is incident on the optical sensor 300, and the outgoing light 500 or the first transmitted light 410 has an incident range in the optical sensor 500; the outgoing light 500 also passes through the lens system 200 to generate reflected light, such as the second transmitted light 420, which deviates from the incident range. The remaining embodiments are similar and are not described in detail here.

[0075] In this embodiment, the outgoing light 500 passes through the lens system 200 to form the first penetrating light 410 that is incident on the optical sensor 300. The second penetrating light 420 deviates from the incident range but also enters the optical sensor 300. In one embodiment, the optical sensor is shielded from receiving the reflected light by blocking the light range of the reflected light. For example, a light shielding ring is used to block the light range of the reflected light so that the reflected light cannot enter the optical sensor. In another embodiment, Figure 9 As shown, Figure 8 The embodiment shown is different in that only the outgoing light 500 passes through the lens system 200 to form the first penetrating light 410 incident on the optical sensor 300 , while the second penetrating light 420 deviates from the incident range and does not enter the optical sensor 300 .

[0076] In this embodiment, the lens system is a coaxial lens system, which includes a transflective lens 210, a phase retarder 220, and a reflective polarizer 230 arranged coaxially in sequence. That is, the transflective lens 210, the phase retarder 220, and the reflective polarizer 230 have the same optical axis 600. The transflective lens 210 is disposed adjacent to the light source 100, and the reflective polarizer 230 is disposed adjacent to the optical sensor 300. Figure 10 The outgoing light 500 forms a predetermined angle ɑ with the axis of the lens system 200, such as the optical axis 600. The predetermined angle ɑ is set based on the emission position of the light source 100, the position of the lens system 200, and the optical sensor 300; and / or the predetermined angle is greater than or equal to N degrees, where N is any value between 3 and 8. In one embodiment, the reflected light deviates from the optical sensor; or, there is a distance between the light range of the reflected light in the optical sensor and the incident range, and the distance is machine-readable to distinguish the incident range from the light range. In one embodiment, the outgoing light 500 passes through the lens system, generating only one beam of reflected light, namely, the second transmitted light 420, on the side of the lens system adjacent to the optical sensor.

[0077] like Figure 11As shown, further, in one embodiment, the phase retarder 220 is a quarter-wave plate (QWP) or the phase retarder 220 includes a quarter-wave plate. In one embodiment, a quarter-wave plate is provided on the side of the transmissive and reflective lens 210 adjacent to the optical sensor. The quarter-wave plate can be used as the phase retarder 220 or a part of the phase retarder. The reflective polarizer 230 is a multilayer film reflective polarizer (Advanced Polarizer Film, APF). A focusing lens 231 is further provided between the reflective polarizer 230 and the optical sensor in the lens group system to adjust the optical path. The distance between the light source 100 and the lens group system 200, that is, the distance between the light source 100 and the transmissive and reflective lens 210 is L1. The contour length between the transmissive and reflective lens 210 and the reflective polarizer 230 is L2. The distance between the outer contour of the reflective polarizer 230 and the focusing lens 231 is L3. The distance between the focusing lens 231 and the optical sensor 300 is L4. The distance between the phase retarder 220 and the optical sensor 300 is L5. Among them, L1 > L2 + L5. In one embodiment, L2 < L3. In one embodiment, L3 < L4. Further, in one embodiment, L1 is twice that of L5. In a specific application embodiment, L1 is 570.0 mm, L2 is 20.0 mm, L3 is 46.0 mm, L4 is 240.0 mm, and L5 is 286.0 mm. In view of the limitations of the current technology, this embodiment proposes an optical active alignment and bonding method to improve the optical path structure of the optical system, separate the light spots generated by multiple reflected lights from the sensor side, and leave the optical path directly passing through the penetration axis of the reflective polarizer for alignment analysis. A laser is obliquely incident on the object to be measured, that is, the lens group system, which includes a partially transmissive and partially reflective component, a phase retardation plate, and a reflective polarization component, to separate the light spots, so that only the first transmitted light enters the optical sensor. Such an alignment method can eliminate the interference of stray light and its imaging and improve the accuracy of the optical bonding process.

[0078] Combined with Figure 12 , the transmissive and reflective lens 210, the phase retarder 220, the reflective polarizer 230, and the focusing lens 231 are arranged coaxially with the optical axis 600. The outgoing light ray 500 emitted by the light source 100 in a deflected manner has the preset included angle with the optical axis 600. The outgoing light ray 500 sequentially passes through the transmissive and reflective lens 210, the phase retarder 220, the reflective polarizer 230, and the focusing lens 231 and is incident on the optical sensor 300.

[0079] To verify the effects of the optical active alignment and bonding method and the optical detection system described in this application, and to select a suitable preset included angle, the following gives an embodiment of simulation using an optical simulation software. Using Figure 11 Combine Figure 12 In the embodiment shown, a laser light source is used as the light source 100. When the preset angle is 1 degree, the simulation test results are as follows: Figure 13 As shown, the imaging spot of the visible stray light is still within the incident range of the first penetrating light of the outgoing light, that is, the primary spot. As mentioned above, the length unit in the figure is millimeter, that is, the total length of the X-axis coordinate and the total length of the Y-axis coordinate are both 50 mm. This is appropriately exaggerated for the convenience of illustration. In actual applications, the diameter of the optical sensor is 10 mm or smaller, for example, 9.8 mm. Further, combined with Figure 11 and Figure 12 As can be seen from the illustrated embodiment, the sensing area of the optical sensor is related to the distance from the light source via the lens system to the optical sensor. This distance and the predetermined angle determine the distance between the reflected light at the optical sensor and the incident range, also known as the spacing. This spacing causes the reflected light to deviate from the optical sensor. Therefore, the larger the spacing, the larger the sensing area of the optical sensor. With this design, after light spot separation, the optical sensor only receives the energy of the first penetrating light spot for analysis, while the remaining reflected penetrating light spots are separated from the optical sensor.

[0080] Similarly, when the simulation test results with the preset angle of 2 degrees are as follows Figure 14 As shown, the imaging spot of the visible stray light is still within the primary spot, which can also be called the first spot.

[0081] When the preset angle is 3 degrees, the simulation test results are as follows Figure 15 As shown, the stray light imaging spot is already slightly separated from the primary spot, also known as a gap. This means that when the laser is tilted greater than 3 degrees, the stray light imaging spot can be separated from the primary spot. If necessary, a value greater than or equal to 3 degrees can be selected as the preset angle.

[0082] When the preset angle is 4 degrees, the simulation test results are as follows Figure 16 As shown, the imaging spot of the visible stray light is already significantly spaced from the primary light spot, so 4 degrees can be selected as the angle value of the preset angle.

[0083] Similarly, when the simulation test results with the preset angle of 5 degrees are as follows Figure 17 As shown in the figure, when the preset angle is 6 degrees, the simulation test results are as follows: Figure 18 As shown, the imaging spots of the stray light are significantly spaced apart from the primary light spots.

[0084] Therefore, by separating the outgoing light and its reflected light at the detection position in the optical sensor, the detection of the outgoing light is not interfered with by the reflected light caused by the lens system, so that the optical sensor can provide accurate detection results, ensuring the correct alignment of the lens system, thereby ensuring the accuracy and effectiveness of the optical component alignment and bonding, and effectively avoiding optical alignment and bonding anomalies.

[0085] It should be noted that other embodiments of the present application also include an optical active alignment and bonding method and an optical detection system that can be implemented by combining the technical features in the above embodiments; wherein the optical active alignment and bonding method includes an optical detection method, and the optical active alignment and bonding method described in each embodiment can also be called an optical detection method.

[0086] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0087] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of patent protection for the present application shall be determined by the appended claims.

Claims

1. An optical active alignment bonding method, characterized in that: The following steps are involved: A coaxial lens group is used as the lens group system. When the optical components are aligned and bonded, a light source is used to send outgoing light to the lens group system in an off-axis manner. The outgoing light passes through the lens system and is incident on the optical sensor, and has an incident range in the optical sensor; The outgoing light generates a reflected light through the lens system, and the reflected light deviates from the incident range, wherein the reflected light deviates outside the optical sensor; Alternatively, there is a distance between the light range of the reflected light in the optical sensor and the incident range, and the distance is a machine-recognizable distance to distinguish the incident range from the light range.

2. The optical active alignment bonding method according to claim 1, characterized in that: The optical sensor is prevented from receiving the reflected light by shielding the light range of the reflected light in the optical sensor.

3. The optical active alignment bonding method according to claim 1, wherein: The lens system includes a transflective lens, a phase delay element, and a reflective polarizer that are sequentially arranged, wherein the transflective lens is arranged adjacent to the light source.

4. The optical active alignment bonding method according to claim 3, characterized in that: The emitted light forms a preset angle with the axis of the lens system, and the preset angle is set according to the emission position of the light source, the position of the lens system and the optical sensor.

5. The optical active alignment bonding method according to claim 4, characterized in that: The preset angle is greater than or equal to N degrees, where N is any value from 3 to 8.

6. The optical active alignment bonding method according to any one of claims 1 to 5, characterized in that: Before the light source is used to send outgoing light to the lens system in an off-axis manner, the optical active alignment bonding method further includes the step of determining whether reflected light is incident on the optical sensor when the light source is sending outgoing light to the lens system in an axial manner, and if so, sending the outgoing light to the lens system in an off-axis manner using the light source.

7. An optical detection system, characterized in that: include: Mirror system; The mirror system is a coaxial mirror system; an optical sensor for detecting light passing through the lens system; a light source for sending outgoing light to the lens system in an off-axis manner when the optical components are aligned and bonded; The outgoing light passes through the lens system and is incident on the optical sensor, and has an incident range in the optical sensor; the outgoing light generates reflected light through the lens system, and the reflected light deviates from the incident range, wherein the reflected light deviates outside the optical sensor, or a light range of the reflected light in the optical sensor is spaced apart from the incident range, and the space is machine-recognizable to distinguish between the incident range and the light range.

8. The optical detection system according to claim 7, characterized in that: The lens system is a coaxial lens system, which includes a transflective lens, a phase delay element, and a reflective polarizer that are coaxially arranged in sequence, wherein the transflective lens is arranged adjacent to the light source; The emitted light forms a preset angle with the axis of the lens system, and the preset angle is set according to the emission position of the light source, the position of the lens system and the optical sensor.

9. The optical detection system according to claim 8, characterized in that: The preset angle is greater than or equal to N degrees, where N is any value from 3 to 8.

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