Blower Special for Semiconductor Epitaxial Equipment

Abstract

The present invention discloses a special blower for semiconductor epitaxial equipment, which includes a housing body, a stator assembly, a rotor assembly and a wiring assembly; a plurality of convex keys are provided on the inner circumference of the housing body, the stator assembly includes an outer sleeve body, an inner sleeve body and a stator coil, the outer sleeve body is adapted to be inside the housing body, a ring-shaped cover plate is detachably installed at the rear end of the housing body, a plurality of key grooves are provided on the outer circumference of the outer sleeve body, and each convex key is inserted into each key groove one by one. A plurality of flow guiding pieces are connected between the inner sleeve body and the outer sleeve body, the stator coil is arranged inside the inner sleeve body, an impeller is installed on the rotating shaft at the front end of the rotor assembly, the wiring assembly includes an electrical connector and a wire, the electrical connector is arranged outside the housing body, one end of the wire is connected to the electrical connector, and the other end of the wire passes through the first through hole and the key groove on the housing body, the notch on the outer sleeve body and the second through hole on the inner sleeve body in sequence and then is connected to the stator coil. The present invention solves the problems that the existing blower is not convenient for installation and disassembly and not convenient for maintenance.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor production, and particularly relates to a special blower for semiconductor epitaxial equipment. Background Art

[0002] During semiconductor production, hot air is generated inside the epitaxial (EPI) equipment. If the hot air is not discharged in time, the temperature of the machines inside will be too high, which will cause many electrical components to fail to work. The hot air generated inside the epitaxial (EPI) equipment needs to be blown into the exhaust duct by a blower and discharged through the exhaust duct.

[0003] After long-term use, the EPI blower will produce abnormal noises and vibrations and other undesirable phenomena, and needs to be replaced or repaired. At present, the original delivery period of the EPI blower is about 6 months, and maintenance can significantly reduce the operating cost. The existing EPI blowers have problems of being inconvenient for installation and disassembly and inconvenient for maintenance. Summary of the Invention

[0004] Aiming at the defects in the prior art, the present invention provides a special blower for semiconductor epitaxial equipment to solve the problems that the existing blowers are inconvenient for installation and disassembly and inconvenient for maintenance.

[0005] The present invention provides a special blower for semiconductor epitaxial equipment,

[0006] including a housing, a stator assembly, a rotor assembly and a wiring assembly;

[0007] The housing is in a cylindrical shape. An annular boss is provided near the front end of the inner circumference of the housing. A plurality of convex keys extending axially along the inner circumference of the housing from the annular boss to near the rear end of the housing are provided. A first through hole is opened on the side wall of the housing behind the convex keys;

[0008] The stator assembly includes an outer sleeve, an inner sleeve and a stator coil. The outer sleeve is adapted to be inside the housing. A circular cover plate is detachably installed at the rear end of the housing. Both ends of the outer sleeve abut between the annular boss and the circular cover plate. A plurality of key grooves penetrating through the front and rear ends are provided axially on the outer circumference of the outer sleeve, and each of the convex keys is inserted into each of the key grooves correspondingly. A notch is provided at the rear end of the outer sleeve, and the notch is connected to the first through hole through one of the key grooves. The inner sleeve is coaxially arranged inside the outer sleeve. The inner sleeve and the outer sleeve are connected by a plurality of flow guiding pieces. An air flow channel is formed between two adjacent flow guiding pieces. A second through hole is further provided on the side wall of the inner sleeve near its rear end. The stator coil is arranged inside the inner sleeve;

[0009] The rotor assembly rotates and fits inside the stator coil. A rear cover is detachably installed at the rear end of the inner sleeve body. A first rotating shaft is provided at the rear end of the rotor assembly. The first rotating shaft is installed on the rear cover through a first bearing. A second rotating shaft is provided at the front end of the rotor assembly. The second rotating shaft is installed on the front end of the inner sleeve body through a second bearing. An impeller adapted to the inside of the housing body is further installed at the front end of the second rotating shaft.

[0010] The wiring assembly includes an electrical connector and a wire. The electrical connector is provided outside the housing body. One end of the wire is connected to the electrical connector, and the other end of the wire passes through the first through hole, the keyway, the notch, and the second through hole in sequence and then is connected to the stator coil.

[0011] Further, a first connecting ring is provided at the rear end of the housing body. The annular cover plate is fixed to the first connecting ring by bolts.

[0012] Further, a protruding annular interface is provided at the rear side of the annular cover plate.

[0013] Further, a second connecting ring is provided at the rear end of the inner sleeve body. The rear cover is fixed to the second connecting ring by bolts. A positioning ring is provided at the front side of the rear cover. The positioning ring fits inside the inner sleeve body.

[0014] Further, a first bearing installation groove is provided at the rear side of the rear cover. The first bearing is installed in the first bearing installation groove. A first bearing gland for fixing the first bearing in the first bearing installation groove is installed at the rear side of the rear cover by screws.

[0015] Further, a sealing plate is provided at the front end of the inner sleeve body. A bearing installation frame and a second bearing gland are provided at the front side of the sealing plate. A second bearing installation groove is provided at the front side of the bearing installation frame. The second bearing is installed in the second bearing installation groove. The second bearing gland is provided at the front side of the bearing installation frame and fixes the second bearing in the second bearing installation groove. The bearing installation frame and the second bearing gland are fixed to the sealing plate by screws.

[0016] Further, the impeller includes a wheel disc covering the bearing installation frame and the second bearing gland at the front end of the inner sleeve body, and a plurality of blades arranged at intervals along the circumference outside the wheel disc. The center of the wheel disc is fixed to the second rotating shaft.

[0017] Further, a conical air outlet is provided at the front end of the housing body.

[0018] Further, a third connecting ring is provided at the front end of the housing body. A fourth connecting ring is provided at the rear end of the conical air outlet. The third connecting ring and the fourth connecting ring are fixed by bolts.

[0019] Furthermore, a mesh plate is provided between the outer casing and the conical air outlet, and the periphery of the mesh plate is fixed between the third connecting ring and the fourth connecting ring.

[0020] The beneficial effects of the present invention are embodied in:

[0021] When the hot air inside the semiconductor epitaxial equipment machine is pumped and discharged by this blower, the rear end of the outer casing is downward and connected to the machine, the front end of the outer casing is upward and aligned with the exhaust pipe. The stator coil of the rotor assembly is energized to drive the rotor assembly to rotate, and then drive the impeller to rotate. When the impeller rotates, it drives the air flow to flow from bottom to top, so that the hot air inside the machine is sucked from the rear end of the outer casing, and then passes through the air flow channel between the outer sleeve and the inner sleeve, and then is blown into the exhaust pipe from the front end of the outer casing, and finally discharged through the exhaust pipe.

[0022] In this application, the outer sleeve and the inner sleeve of the stator assembly are connected into an integral structure through the guide vanes. During assembly, first assemble the rotor assembly and the stator assembly together, and do not install the rear cover at the rear end of the inner sleeve first. Then insert the assembled rotor assembly and stator assembly from the rear end of the outer casing. When inserting, the keyway on the outside of the outer sleeve is aligned with the convex key on the inside of the outer casing. In order to prevent the wire from being stuck between the outer sleeve and the outer casing, the wire needs to extend backward along the keyway on the outside of the outer sleeve. After the rotor assembly and the stator assembly are inserted in place, then snap the wire into the notch at the rear end of the outer sleeve and pass through the second through hole into the inner sleeve, and then connect the wire to the stator coil. After the wire is connected, then install the rear cover and the bearing at the rear end of the inner sleeve, and finally install the annular cover plate at the rear end of the outer casing, so that the outer sleeve of the stator assembly is tightly pressed between the annular boss and the annular cover plate, and the assembly can be completed. The disassembly of this blower is the reverse process of the assembly, which will not be elaborated here.

[0023] Therefore, this application is not only easy to install and disassemble. When disassembling, the stator assembly and the rotor assembly can be removed from the outer casing as a whole, which is convenient for repairing the stator assembly and the rotor assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required to be used in the description of the specific embodiments or the prior art. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.

[0025] Figure 1 is the external three-dimensional view of the embodiment of the present invention;

[0026] Figure 2 is the internal cross-sectional view of the embodiment of the present invention;

[0027] Figure 3 is Figure 2A-A sectional view.

[0028] In the drawings, 100 - outer housing; 110 - annular boss; 120 - convex key; 130 - first through hole; 140 - annular cover plate; 141 - annular interface; 150 - first connecting ring; 160 - third connecting ring; 200 - stator assembly; 210 - outer sleeve; 211 - keyway; 212 - notch; 220 - inner sleeve; 221 - second through hole; 222 - second connecting ring; 223 - positioning ring; 224 - sealing plate; 230 - stator coil; 240 - current - guiding piece; 250 - rear cover; 251 - first bearing mounting groove; 252 - first bearing gland; 260 - bearing mounting bracket; 261 - second bearing gland; 262 - second bearing mounting groove; 300 - rotor assembly; 310 - first rotating shaft; 320 - first bearing; 330 - second rotating shaft; 340 - second bearing; 350 - impeller; 351 - wheel disc; 352 - blade; 400 - wiring assembly; 410 - electrical connector; 420 - wire; 500 - conical air outlet; 510 - fourth connecting ring; 600 - perforated plate. Detailed implementation manners

[0029] Hereinafter, embodiments of the technical solutions of the present invention will be described in detail with reference to the drawings. The following embodiments are only used to more clearly illustrate the technical solutions of the present invention, so they are only examples and cannot be used to limit the protection scope of the present invention.

[0030] It should be noted that unless otherwise specified, the technical terms or scientific terms used in this application should have the ordinary meanings understood by those skilled in the art to which the present invention belongs.

[0031] As Figures 1-3 shown, an embodiment of the present invention provides a special blower for semiconductor epitaxial equipment, including an outer housing 100, a stator assembly 200, a rotor assembly 300, and a wiring assembly 400.

[0032] The outer housing 100 is cylindrical. An annular boss 110 is provided near the front end of the inner circumference of the outer housing 100. A plurality of convex keys 120 extending axially along the inner circumference of the outer housing 100 from the annular boss 110 to near the rear end of the outer housing 100 are provided. A first through hole 130 is opened in the side wall of the outer housing 100 behind the convex keys 120.

[0033] The stator assembly 200 includes an outer sleeve 210, an inner sleeve 220, and a stator coil 230. The outer sleeve 210 is adapted to be within the outer housing 100. A circular cover plate 140 is detachably mounted at the rear end of the outer housing 100. The two ends of the outer sleeve 210 abut between the annular boss 110 and the circular cover plate 140. Specifically, to facilitate the installation of the circular cover plate 140, a first connecting ring 150 is provided at the rear end of the outer housing 100, and the circular cover plate 140 is fixed to the first connecting ring 150 by bolts. To facilitate connecting the outer sleeve 210 to the machine platform of the semiconductor epitaxial equipment, a protruding circular interface 141 is provided at the rear side of the circular cover plate 140. A plurality of key grooves 211 penetrating through the front and rear ends are axially provided along the outer periphery of the outer sleeve 210, and each convex key 120 is inserted into each key groove 211 one by one. A notch 212 is provided at the rear end of the outer sleeve 210, and the notch 212 is connected to the first through hole 130 through a key groove 211. The inner sleeve 220 is coaxially arranged within the outer sleeve 210, and the inner sleeve 220 and the outer sleeve 210 are connected by a plurality of flow guiding pieces 240. An air flow channel is formed between two adjacent flow guiding pieces 240. A second through hole 221 is further provided on the side wall of the inner sleeve 220 near its rear end, and the stator coil 230 is arranged within the inner sleeve 220.

[0034] The rotor assembly 300 is rotatably adapted to be within the stator coil 230. A rear cover 250 is detachably mounted at the rear end of the inner sleeve 220. Specifically, to facilitate the installation of the rear cover 250, a second connecting ring 222 is provided at the rear end of the inner sleeve 220, and the rear cover 250 is fixed to the second connecting ring 222 by bolts. A positioning ring 223 is provided on the front side of the rear cover 250, and the positioning ring 223 is adapted to be within the inner sleeve 220.

[0035] A first rotating shaft 310 is provided at the rear end of the rotor assembly 300, and the first rotating shaft 310 is mounted on the rear cover 250 through a first bearing 320. Specifically, a first bearing mounting groove 251 is provided on the rear side of the rear cover 250, the first bearing 320 is mounted within the first bearing mounting groove 251, and a first bearing retainer 252 for fixing the first bearing 320 within the first bearing mounting groove 251 is mounted on the rear side of the rear cover 250 by screws. When installing the first bearing 320, first put the first bearing 320 on the first rotating shaft 310 and embed it within the first bearing mounting groove 251, and then fix the first bearing retainer 252 to the rear side of the rear cover 250 by screws, so that the first bearing retainer 252 presses and fixes the first bearing 320.

[0036] The front end of the rotor assembly 300 is provided with a second rotating shaft 330, and the second rotating shaft 330 is installed at the front end of the inner sleeve body 220 through a second bearing 340. Specifically, the front end of the inner sleeve body 220 has a sealing plate 224. A bearing mounting bracket 260 and a second bearing gland 261 are provided on the front side of the sealing plate 224. A second bearing mounting groove 262 is provided on the front side of the bearing mounting bracket 260. The second bearing 340 is installed in the second bearing mounting groove 262. The second bearing gland 261 is provided on the front side of the bearing mounting bracket 260 and fixes the second bearing 340 in the second bearing mounting groove 262. The bearing mounting bracket 260 and the second bearing gland 261 are fixed to the sealing plate 224 by screws. When installing the second bearing 340, first pass the second rotating shaft 330 through the sealing plate 224 at the front end of the inner sleeve body 220, then put on the bearing mounting bracket 260, then put the second bearing 340 on the second rotating shaft 330 and embed it in the second bearing mounting groove 262, then cover the second bearing gland 261, and finally fix the bearing mounting bracket 260 and the second bearing gland 261 to the sealing plate 224 together by screws, so that the bearing mounting bracket 260 and the second bearing gland 261 clamp the second bearing 340.

[0037] The front end of the second rotating shaft 330 is also installed with an impeller 350 adapted to the inside of the outer shell 100. Specifically, the impeller 350 includes a disk 351 covering the bearing mounting bracket 260 and the second bearing gland 261 at the front end of the inner sleeve body 220, and a plurality of blades 352 arranged at intervals along the circumference outside the disk 351. The center of the disk 351 is fixed on the second rotating shaft 330. The disk 351 of the impeller 350 covers the front end of the inner sleeve body 220. The blades 352 of the impeller 350 face the air flow channel between the outer sleeve 210 and the inner sleeve body 220. When the impeller 350 rotates, the air flow can flow along the outer surface of the disk 351 cover to the front end of the outer shell 100, and the air flow is smoother.

[0038] The front end of the outer shell 100 is provided with a conical air outlet 500. By providing the conical air outlet 500, the air flow blown out from the annular air flow channel converges towards the middle through the conical air outlet 500, so that the blown air can be concentrated together and poured into the exhaust channel. Specifically, in order to facilitate the installation of the conical air outlet 500, a third connecting ring 160 is provided at the front end of the outer shell 100, and a fourth connecting ring 510 is provided at the rear end of the conical air outlet 500. The third connecting ring 160 and the fourth connecting ring 510 are fixed by bolts.

[0039] The blower in the semiconductor epitaxial equipment is generally installed vertically with the front end facing up and the rear end facing down. In order to prevent sundries from falling into the blower and damaging the impeller 350, a mesh plate 600 is also provided between the outer shell 100 and the conical air outlet 500. The periphery of the mesh plate 600 is fixed between the third connecting ring 160 and the fourth connecting ring 510.

[0040] The wiring assembly 400 includes an electrical connector 410 and a wire 420. The electrical connector 410 is disposed outside the outer housing 100. One end of the wire 420 is connected to the electrical connector 410, and the other end of the wire 420 sequentially passes through the first through hole 130, the keyway 211, the notch 212, and the second through hole 221 and then is connected to the stator coil 230.

[0041] When using this blower to exhaust the hot air inside the semiconductor epitaxial equipment machine, the rear end of the outer housing 100 faces downward and is connected to the machine. The front end of the outer housing 100 faces upward and is aligned with the exhaust duct. The stator coil 230 of the rotor assembly 300 is energized to drive the rotor assembly 300 to rotate, thereby driving the impeller 350 to rotate. When the impeller 350 rotates, it drives the air flow to flow from bottom to top, so that the hot air inside the machine is sucked from the rear end of the outer housing 100, then passes through the air flow channel between the outer sleeve 210 and the inner sleeve 220, and then is blown into the exhaust duct from the front end of the outer housing 100, and finally is discharged through the exhaust duct.

[0042] In this application, the outer sleeve 210 and the inner sleeve 220 of the stator assembly 200 are connected into an integral structure through the guide vanes 240. During assembly, first assemble the rotor assembly 300 and the stator assembly 200 together, and do not install the rear cover 250 at the rear end of the inner sleeve 220 for the time being. Then insert the assembled rotor assembly 300 and stator assembly 200 from the rear end of the outer housing 100. When inserting, the keyway 211 on the outer side of the outer sleeve 210 is aligned with the convex key 120 on the inner side of the outer housing 100. In order to prevent the wire 420 from getting stuck between the outer sleeve 210 and the outer housing 100, the wire 420 needs to extend backward along the keyway 211 on the outer side of the outer sleeve 210. After the rotor assembly 300 and the stator assembly 200 are inserted in place, then snap the wire 420 into the notch 212 at the rear end of the outer sleeve 210, pass through the second through hole 221 and into the inner sleeve 220, and then connect the wire 420 to the stator coil 230. After the wire 420 is connected, then install the rear cover 250 and the bearing at the rear end of the inner sleeve 220, and finally install the annular cover plate 140 at the rear end of the outer housing 100, so that the outer sleeve 210 of the stator assembly 200 is tightly pressed between the annular boss 110 and the annular cover plate 140, and the assembly can be completed. The disassembly of this blower is the reverse process of the assembly, which will not be elaborated here.

[0043] Therefore, this application is not only easy to install and disassemble. When disassembling, the stator assembly 200 and the rotor assembly 300 can be removed from the outer housing 100 as a whole, which is convenient for repairing the stator assembly 200 and the rotor assembly 300.

[0044] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than limiting them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some or all of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention, and they should all be covered within the scope of the claims and the description of the present invention.

Claims

1. A blower dedicated to a semiconductor epitaxial device, characterized in that: It includes a housing, a stator assembly, a rotor assembly and a wiring assembly; The housing is cylindrical. An annular boss is provided near the front end of the inner circumference of the housing. A plurality of convex keys extending axially along the inner circumference of the housing from the annular boss to near the rear end of the housing are provided. A first through hole is opened on the side wall of the housing behind the convex keys; The stator assembly includes an outer sleeve, an inner sleeve and a stator coil. The outer sleeve is adapted to be inside the housing. A circular cover plate is detachably installed at the rear end of the housing. Both ends of the outer sleeve abut between the annular boss and the circular cover plate. A plurality of key grooves penetrating through the front and rear ends are provided axially on the outer circumference of the outer sleeve, and each of the convex keys is inserted into each of the key grooves one by one. A notch is provided at the rear end of the outer sleeve, and the notch is connected to the first through hole through one of the key grooves. The inner sleeve is coaxially arranged inside the outer sleeve. The inner sleeve and the outer sleeve are connected by a plurality of flow guiding pieces, and an air flow channel is formed between two adjacent flow guiding pieces. A second through hole is also provided near the rear end of the side wall of the inner sleeve. The stator coil is arranged inside the inner sleeve; The rotor assembly is rotatably adapted to be inside the stator coil. A rear cover is detachably installed at the rear end of the inner sleeve. A first rotating shaft is provided at the rear end of the rotor assembly. The first rotating shaft is installed on the rear cover through a first bearing. A second rotating shaft is provided at the front end of the rotor assembly. The second rotating shaft is installed at the front end of the inner sleeve through a second bearing. An impeller adapted to be inside the housing is also installed at the front end of the second rotating shaft; The wiring assembly includes an electrical connector and a wire. The electrical connector is arranged outside the housing. One end of the wire is connected to the electrical connector, and the other end of the wire sequentially passes through the first through hole, the key groove, the notch and the second through hole and then is connected to the stator coil.

2. The dedicated blower for semiconductor epitaxial equipment according to claim 1, characterized in that: A first connecting ring is provided at the rear end of the housing. The circular cover plate is fixed to the first connecting ring by bolts.

3. The dedicated blower for semiconductor epitaxial equipment according to claim 2, characterized in that: A protruding circular interface is provided at the rear side of the circular cover plate.

4. The dedicated blower for semiconductor epitaxial equipment according to claim 1, wherein: A second connecting ring is provided at the rear end of the inner sleeve. The rear cover is fixed to the second connecting ring by bolts. A positioning ring is provided at the front side of the rear cover, and the positioning ring is adapted to be inside the inner sleeve.

5. The dedicated blower for semiconductor epitaxial equipment according to claim 1, wherein: A first bearing mounting groove is provided at the rear side of the rear cover. The first bearing is installed in the first bearing mounting groove. A first bearing gland for fixing the first bearing in the first bearing mounting groove is installed on the rear side of the rear cover by screws.

6. The special blower for semiconductor epitaxial equipment according to claim 1, wherein: A sealing plate is provided at the front end of the inner sleeve. A bearing mounting frame and a second bearing gland are provided on the front side of the sealing plate. A second bearing mounting groove is provided on the front side of the bearing mounting frame. The second bearing is installed in the second bearing mounting groove. The second bearing gland is arranged on the front side of the bearing mounting frame and fixes the second bearing in the second bearing mounting groove. The bearing mounting frame and the second bearing gland are fixed to the sealing plate by screws.

7. The dedicated blower for semiconductor epitaxial equipment according to claim 6, characterized in that: The impeller includes a bearing mounting frame covering the front end of the inner sleeve body and a disk outside the second bearing gland, and a plurality of blades arranged at intervals in the circumferential direction outside the disk. The center of the disk is fixed on the second rotating shaft.

8. The dedicated blower for semiconductor epitaxial equipment according to claim 1, wherein: The front end of the outer shell body is provided with a conical air outlet.

9. The dedicated blower for semiconductor epitaxial equipment according to claim 8, characterized in that: The front end of the outer shell body is provided with a third connection ring, and the rear end of the conical air outlet is provided with a fourth connection ring. The third connection ring and the fourth connection ring are fixed by bolts.

10. The special blower for semiconductor epitaxial equipment according to claim 9, wherein: A perforated plate is further provided between the outer shell body and the conical air outlet, and the periphery of the perforated plate is fixed between the third connection ring and the fourth connection ring.

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