Three-way valve, conveying system and conveying method

Abstract

This invention provides a three-way valve, a conveying system, and a conveying method. The three-way valve includes: a housing, at least two sealing plates, and at least two driving components. The housing has a channel comprising: a main channel section and two sub-channel sections. One end of the main channel section and one end of each of the two sub-channel sections are connected within the housing. The housing has at least two first sealing openings, each communicating with one of the sub-channel sections. The at least two sealing plates slide and seal against the housing through corresponding first sealing openings. Each of the at least two driving components is fixedly connected to a sealing plate, and both driving components drive the corresponding sealing plate to move horizontally, thereby opening and closing the corresponding sub-channel sections. This invention extends the service life of the three-way valve.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a three-way valve, a conveying system, and a conveying method. Background Technology

[0002] In semiconductor manufacturing, multiple types of waste gases are typically emitted from a single reaction chamber, and these gases need to be collected separately. Currently, rotary three-way valves are commonly used to switch between exhaust channels. Alternatively, if a gas or liquid supply device needs to simultaneously deliver the same material to multiple reaction chambers, a rotary three-way valve is also required for material transport, ensuring that stopping material delivery in one reaction chamber does not affect the receiving of materials in other reaction chambers.

[0003] Specifically, a stainless steel ball containing one channel is installed at the intersection of one feed channel and two discharge channels in a rotary three-way valve. By rotating the stainless steel ball, the feed channel can be connected to either of the two discharge channels, or not connected to either of them.

[0004] However, the stainless steel ball experiences significant friction with the inner wall of the housing at the opening, which can easily cause cracks at the contact point between the ball and the housing, leading to air leakage and reducing the lifespan of the rotary three-way valve. Summary of the Invention

[0005] To solve the above problems, the three-way valve, conveying system and conveying method provided by the present invention can drive the sealing plate to move horizontally in the housing by a drive component, thereby realizing the opening and closing of the corresponding channel in the three-way valve, thereby improving the resistance to damage at the sealing position inside the three-way valve and extending the service life of the three-way valve.

[0006] In a first aspect, the present invention provides a three-way valve, comprising: a housing, at least two sealing plates, and at least two driving components;

[0007] The housing is provided with a channel, which includes: a main channel section and two sub-channel sections;

[0008] One end of the main channel section and one end of each of the two sub-channel sections are connected inside the housing;

[0009] The housing has at least two first sealing openings, which are respectively connected to two sub-channel sections. The at least two sealing plates slide and seal with the housing through the corresponding at least two first sealing openings.

[0010] The at least two driving components are respectively fixedly connected to a sealing plate, and the at least two driving components are used to drive the corresponding sealing plate to translate, so as to realize the opening and closing of the corresponding channel segment.

[0011] Optionally, the surface of the sealing plate is coated with a wear-resistant layer.

[0012] Optionally, the material of the wear-resistant layer includes polytetrafluoroethylene (PTFE).

[0013] Optionally, the material of the sealing plate includes stainless steel.

[0014] Optionally, the housing is further provided with a second sealing opening, and the main channel section is in communication with the second sealing opening;

[0015] The housing is further provided with the sealing plate at the second sealing opening, and the sealing plate slides and seals with the housing through the second sealing opening;

[0016] A driving component is fixedly connected to the sealing plate at the second sealing opening;

[0017] The driving component is also used to drive the sealing plate at the second sealing opening to translate, so as to realize the opening and closing of the total channel section.

[0018] Optionally, the housing material includes at least one of polytetrafluoroethylene and polyetheretherketone.

[0019] In a second aspect, the present invention provides a conveying system, comprising: at least one supply end, at least two receiving ends, and at least one three-way valve as described in any of the preceding claims;

[0020] The at least one supply end is connected to the main channel segment, and the at least two receiving ends are respectively connected to two sub-channel segments.

[0021] Thirdly, the present invention provides a conveying system, comprising: at least one supply end, at least two receiving ends, and at least two three-way valves as described in any of the preceding claims;

[0022] Each of the three-way valves has two sub-channel sections, namely the first channel section and the second channel section;

[0023] The at least one supply end is respectively connected to the first channel segment of at least two three-way valves, and the second channel segments of at least two three-way valves are interconnected;

[0024] The main channel section of each of the at least two three-way valves is connected to a receiving end.

[0025] Optionally, the at least one supply end is connected to the first channel segment of at least two three-way valves via a connecting pipe;

[0026] A delivery pump is fixedly installed in the connecting pipe.

[0027] Fourthly, the present invention provides a conveying method, comprising:

[0028] The system provides at least one supply end, at least two receiving ends, and at least two three-way valves. Each three-way valve includes a main channel section and two sub-channel sections. The two sub-channel sections in each three-way valve are a first channel section and a second channel section, respectively. The at least one supply end is connected to the first channel section of the at least two three-way valves, and the second channel sections of the at least two three-way valves are interconnected. The main channel section of the at least two three-way valves is connected to a receiving end. Each main channel section and each of the two sub-channel sections is connected to a sealing plate and a driving component. The driving component is fixedly connected to the corresponding sealing plate and is used to drive the corresponding sealing plate to translate, so as to realize the opening and closing of the corresponding sub-channel section or the main channel section.

[0029] When conveying material from at least one supply end to at least two receiving ends, the sealing plate corresponding to the second channel section of at least two three-way valves is controlled to translate so that the second channel section is closed, and the sealing plates corresponding to the first channel section and the total channel section are controlled to translate so that the first channel section and the total channel section are open.

[0030] When it is necessary for at least one supply end to stop supplying material to any one of at least two receiving ends, the sealing plate in the main channel segment corresponding to the receiving end that needs to stop supplying material is controlled to translate, so as to close the main channel segment corresponding to the receiving end that needs to stop supplying material. At the same time, the sealing plates in the sub-channel segment corresponding to the receiving end that needs to stop supplying material and the sealing plates corresponding to other receiving ends are controlled to translate, so as to open the sub-channel segment corresponding to the receiving end that needs to stop supplying material and the sub-channel segment corresponding to other receiving ends.

[0031] The three-way valve, conveying system, and conveying method provided in this invention can drive the sealing plate to move horizontally within the housing by a drive component, thereby achieving the opening and closing of the corresponding channels within the three-way valve. This improves the resistance to damage at the sealing positions inside the three-way valve and extends its service life. Attached Figure Description

[0032] Figure 1 This is a schematic cross-sectional view of a three-way valve according to an embodiment of this application;

[0033] Figure 2 This is a schematic structural diagram of a conveying system according to an embodiment of this application;

[0034] Figure 3 This is a schematic structural diagram of a conveying system according to an embodiment of this application.

[0035] Figure Labels

[0036] 1. Three-way valve; 2. Housing; 21. Channel; 211. Main channel section; 212. Sub-channel section; 22. First sealing opening; 23. Second sealing opening; 3. Sealing plate; 4. Drive unit; 51. Supply end; 52. Receiver end; 61. Wafer reaction chamber; 62. Collection device; 71. Liquid supply device; 72. Cleaning chamber; 81. Connecting pipe; 82. Transfer pump; 83. Transfer pipe. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0038] In a first aspect, the present invention provides a three-way valve 1, combined with Figure 1 The three-way valve 1 includes: housing 2, three sealing plates 3 and three drive components 4.

[0039] The housing 2 contains a Y-shaped channel 21. The channel 21 includes a main channel 21 and two sub-channels 21. One end of the main channel 21 and one end of each of the two sub-channels 21 are connected inside the housing 2; the other ends of the main channel 21 and the two sub-channels 21 are exposed on the surface of the housing 2.

[0040] Two first sealing openings 22 are formed on the surface of the housing 2, and the two first sealing openings 22 are respectively connected to two sub-channels 21. Two sealing plates 3 slide against the housing 2 through their respective first sealing openings 22, and are sealed to the housing 2 at the positions of the first sealing openings 22. A second sealing opening 23 is also formed on the surface of the housing 2, and the main channel 21 is connected to the second sealing opening 23. A third sealing plate 3 slides against the housing 2 through the second sealing opening 23, and is sealed to the housing 2 at the second sealing opening 23. Three driving components 4 are fixedly connected to one sealing plate 3, and by translating the corresponding sealing plate 3, the opening and closing of the main channel 21 and the sub-channels 21 are achieved.

[0041] Furthermore, the surface of the sealing plate 3 is coated with a wear-resistant layer. The material of the sealing plate 3 includes stainless steel. The housing is designed to not react with gases such as SiH4, O2, N2O, B2H6, NH3, WF6, TiCl4, and H2, thereby enabling the three-way valve to transport these gases, while also remaining undeformed within a temperature range of 0–280 degrees Celsius. Specifically, the material of the housing 2 includes at least one of polytetrafluoroethylene (PTFE) and polyetheretherketone (PEEK). In this embodiment, the wear-resistant layer is made of PTFE, and the housing 2 is made of PEEK resin. By limiting the material of the three-way valve 1, the resistance to breakage of the three-way valve 1 can be further improved, thereby extending the service life of the three-way valve 1.

[0042] The three-way valve 1 is driven by the driving component 4 to move the sealing plate 3 in the housing 2 in a sliding manner, thereby realizing the opening and closing of the corresponding channel 21 inside the three-way valve 1, which can improve the resistance to damage at the sealing position inside the three-way valve 1, and thus extend the service life of the three-way valve 1.

[0043] Secondly, the present invention provides a conveying system, combined with Figure 2 The conveying system includes: a supply end 51, two receiving ends 52, and a three-way valve 1 as described in the first aspect.

[0044] Furthermore, the supply end 51 is connected to a wafer reaction chamber 61, which is used for processing wafers such as etching or cleaning; the two receiving ends 52 are each connected to a collection device 62, and the two collection devices 62 are used to collect different types of waste gas in the wafer reaction chamber 61. Connecting pipes 81 are fixedly installed between the supply end 51 and the three-way valve 1, and between the receiving end 52 and the three-way valve 1. The supply end 51 is connected to the main channel 21 section through the connecting pipes 81, and the two receiving ends 52 are respectively connected to their corresponding sub-channels 21 sections through the connecting pipes 81.

[0045] In this embodiment, the driving component 4 is a vacuum pump, and the sealing plate 3 is fixedly connected to the piston of the vacuum pump.

[0046] Furthermore, according to this conveying system, this embodiment provides a conveying method, which includes: when it is necessary to convey waste gas to one of the collection devices 62, controlling the sealing plate 3 at the second sealing opening 23 to keep the main channel 21 section open; controlling the sealing plate 3 in the sub-channel 21 section that needs to convey waste gas to keep the sub-channel 21 section that needs to convey waste gas open; controlling the sealing plate 3 in the sub-channel 21 section that does not need to convey waste gas to keep the sub-channel 21 section that does not need to convey waste gas closed, thereby allowing the waste gas generated by the wafer reaction chamber 61 to be conveyed to the corresponding collection device 62 through the connecting pipe 81, the main channel 21 section, and the open sub-channel 21 section. When it is not necessary to convey waste gas to any of the collection devices 62, controlling the sealing plate 3 of the main channel 21 section to close the main channel 21 section is sufficient.

[0047] The system can flexibly control the direction of exhaust gas delivery, thus facilitating exhaust gas collection.

[0048] Thirdly, the present invention provides a conveying system, combined with Figure 3 The conveying system includes: a supply end 51, two receiving ends 52, and two three-way valves 1 as described in the first aspect.

[0049] Furthermore, the supply end 51 is connected to a liquid supply device 71, which is used to supply cleaning fluid; the two receiving ends 52 are respectively connected to a cleaning chamber 72, and the two cleaning chambers 72 are used to clean the wafers inside the cleaning chambers 72 using the cleaning fluid supplied by the liquid supply device 71. Connecting pipes 81 are fixedly installed between the supply end 51 and the three-way valve 1, and between the receiving end 52 and the three-way valve 1.

[0050] Specifically, each three-way valve 1 has two sub-channels 21, namely the first channel 21 and the second channel 21. The supply end 51 is connected to the first channel 21 of each of the two three-way valves 1 via a connecting pipe 81. A pivot pipe 83 is fixedly installed between the two three-way valves 1, and the second channel 21 of the two three-way valves 1 is connected to each other through this pivot pipe 83. The main channel 21 of the two three-way valves 1 is connected to a receiving end 52 via a connecting pipe 81.

[0051] A delivery pump 82 is fixedly installed on the connecting pipe 81 between the supply end 51 and the two three-way valves 1. In this embodiment, the delivery pump 82 is used to increase the flow rate of the cleaning fluid in the delivery system.

[0052] The conveying system can flexibly change the conveying direction of the cleaning fluid when one of the receiving ends 52 needs to stop receiving the cleaning fluid, thereby facilitating other processes or maintenance in the cleaning chamber 72 that does not require cleaning fluid.

[0053] Fourthly, the present invention provides a conveying method applied to the transport system of the third aspect, the method comprising:

[0054] Provide the transportation system in the third aspect;

[0055] When the supply end 51 conveys materials to the two receiving ends 52, the sealing plate 3 corresponding to the second channel 21 section of the two three-way valves 1 is controlled to move horizontally so that the second channel 21 section is closed, and the sealing plate 3 corresponding to the first channel 21 section and the total channel 21 section is controlled to move horizontally so that the first channel 21 section and the total channel 21 section are connected.

[0056] When the supply end 51 needs to stop supplying material to either of the two receiving ends 52, the sealing plate 3 in the main channel 21 section corresponding to the receiving end 52 that needs to stop supplying material is controlled to translate, so as to close the main channel 21 section corresponding to the receiving end 52 that needs to stop supplying material. At the same time, the sealing plate 3 in the sub-channel 21 section corresponding to the receiving end 52 that needs to stop supplying material and the sealing plate 3 corresponding to other receiving ends 52 are controlled to translate, so as to open the sub-channel 21 section corresponding to the receiving end 52 that needs to stop supplying material and the sub-channel 21 section corresponding to other receiving ends 52.

[0057] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A conveying system, characterized in that, include: At least one supply end, at least two receiving ends, and at least two three-way valves; Each of the three-way valves has two sub-channel sections, namely the first channel section and the second channel section; The at least one supply end is respectively connected to the first channel segment of at least two three-way valves, and the second channel segments of at least two three-way valves are interconnected; The main channel section of each of the at least two three-way valves is connected to a receiving end; The three-way valve includes: a housing, at least two sealing plates, and at least two actuators; The housing is provided with a channel, which includes: a main channel section and two sub-channel sections; One end of the main channel section and one end of each of the two sub-channel sections are connected inside the housing; The housing has at least two first sealing openings, which are respectively connected to two sub-channel sections. The at least two sealing plates slide and seal with the housing through the corresponding at least two first sealing openings. The at least two driving components are respectively fixedly connected to a sealing plate, and the at least two driving components are used to drive the corresponding sealing plate to translate, so as to realize the opening and closing of the corresponding channel segment; The housing is also provided with a second sealing opening, and the main channel section is connected to the second sealing opening; The housing is further provided with the sealing plate at the second sealing opening, and the sealing plate slides and seals with the housing through the second sealing opening; A driving component is fixedly connected to the sealing plate at the second sealing opening; The driving component is also used to drive the sealing plate at the second sealing opening to translate, so as to realize the opening and closing of the total channel section; The surface of the sealing plate is coated with a wear-resistant layer.

2. The conveying system according to claim 1, characterized in that, The material of the wear-resistant layer includes: polytetrafluoroethylene.

3. The conveying system according to claim 1, characterized in that, The material of the sealing plate includes stainless steel.

4. The conveying system according to claim 1, characterized in that, The housing is made of at least one of polytetrafluoroethylene and polyetheretherketone.

5. The conveying system according to claim 1, characterized in that, The at least one supply end is connected to the first channel segment of at least two three-way valves via a connecting pipe; A delivery pump is fixedly installed in the connecting pipe.

6. A conveying method, characterized in that, include: The system provides at least one supply end, at least two receiving ends, and at least two three-way valves. Each three-way valve includes a housing, at least two sealing plates, and at least two driving components. The housing contains a channel comprising a main channel section and two sub-channel sections, one end of the main channel section and one end of each sub-channel section communicating within the housing. The housing has at least two first sealing openings, each communicating with one of the sub-channel sections. The at least two sealing plates slide and seal against the housing through the corresponding first sealing openings. The housing also has a second sealing opening, communicating with the main channel section. A sealing plate is also provided in the second sealing opening, sliding and sealing against the housing through the second sealing opening. The surface of the sealing plate is coated with a wear-resistant layer. Each of the three-way valves has two sub-channel sections, namely a first channel section and a second channel section. The at least one supply end is connected to the first channel section of at least two three-way valves, and the second channel sections of at least two three-way valves are interconnected. The total channel section of at least two three-way valves is connected to a receiving end. A driving component is connected to a total channel section and two sub-channel sections. The driving component is fixedly connected to the corresponding sealing plate. The driving component is used to drive the corresponding sealing plate to translate, so as to realize the opening and closing of the corresponding sub-channel section or the total channel section. When conveying material from at least one supply end to at least two receiving ends, the sealing plate corresponding to the second channel segment of at least two three-way valves is controlled to translate so that the second channel segment is closed, and the sealing plates corresponding to the first channel segment and the total channel segment are controlled to translate so that the first channel segment and the total channel segment are open. When it is necessary for at least one supply end to stop supplying material to any one of at least two receiving ends, the sealing plate in the main channel segment corresponding to the receiving end that needs to stop supplying material is controlled to translate, so as to close the main channel segment corresponding to the receiving end that needs to stop supplying material. At the same time, the sealing plates in the sub-channel segment corresponding to the receiving end that needs to stop supplying material and the sealing plates corresponding to other receiving ends are controlled to translate, so as to open the sub-channel segment corresponding to the receiving end that needs to stop supplying material and the sub-channel segment corresponding to other receiving ends.

Images