A multi-layer waveguide grating antenna based on staggered etching for optical phased array and its preparation method

By adopting a multi-layer structure design with interleaved etching in the waveguide grating antenna, the problems of low emission efficiency and low direction in the prior art are solved, high directionality and long effective emission length are achieved, and the detection distance and emission efficiency of the optical phased array are improved.

CN115220150BActive Publication Date: 2025-03-18SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Patent Information

Application Number
CN202210680007.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-06-16
Publication Date
2025-03-18
Estimated Expiration
2042-06-16

AI Technical Summary

Technical Problem

The existing waveguide grating antennas have low emission efficiency in optical phased arrays, resulting in limited detection distance and insufficient directionality, which affects the emission efficiency of the emission grating.

Method used

Using a multi-layer structure waveguide grating antenna based on interleaving etching, the depth and waveguide layer thickness are optimized by interleaving the depth and shallow trenches in the second waveguide layer, combining the multi-layer structure and asymmetric design to improve the directionality and effective emission length.

Benefits of technology

It achieves high directionality and centimeter-level effective emission length, improves the emission efficiency of the grating, extends the detection distance, and supports the implementation of high-power output devices.

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Abstract

The present invention relates to a multi-layer structure waveguide grating antenna based on staggered etching for use in an optical phased array and a preparation method thereof, comprising, from bottom to top, a substrate (1), a waveguide region and a top oxide layer (5); the waveguide region comprises, from bottom to top, a first waveguide layer (2), an isolation layer (3) and a second waveguide layer (4); wherein the second waveguide layer (4) has staggered deep and shallow grooves. The present invention reduces the leakage of light to the substrate, increases the proportion of light emitted upward, thereby improving the emission efficiency of the grating, and has the advantage of a long effective emission length, which is helpful to improve the detection distance of the phased array and realize high-power output devices.
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