Separation device and separation method

Abstract

The present invention provides a separation device that peels off the concave-convex joint of a first plate-shaped member and a second plate-shaped member without deforming the shape of the concave-convex joint. The separation device of the present invention peels off the concave-convex joint of a first plate-shaped member and a second plate-shaped member that are concavely joined to each other. In the separation device, a separation absorption part provided between the back side of the concave-convex joint of either the first plate-shaped member or the second plate-shaped member housed in a pressurized chamber formed inside a chamber and the first indoor surface of the chamber has a displacement portion, and the displacement portion abuts against the back side of either the first plate-shaped member or the second plate-shaped member relative to the first indoor surface of the chamber in a manner that allows it to deform or move freely in the thickness direction thereof, and the concave-convex joint of the other of the first plate-shaped member or the second plate-shaped member housed in the pressurized chamber is deformed or moved freely in the thickness direction thereof. The retaining portion provided between the back side of the convex joint and the second indoor surface of the chamber has a fixed portion, and the fixed portion abuts against the back side of the other of the first plate-shaped member or the second plate-shaped member relative to the second indoor surface of the chamber in a manner that cannot move in the thickness direction. The control portion generates a pressure difference between the airtight first decompression space portion provided between the first indoor surface of the chamber and the separation and absorption portion by increasing the internal pressure of the pressurization chamber based on the action of the positive pressure adjustment portion that supplies positive pressure fluid to the pressurization chamber, thereby causing either the first plate-shaped member or the second plate-shaped member to move toward the first decompression space portion together with the displacement portion of the separation and absorption portion.

Description

Technical Field

[0001] The present invention relates to a separation device and a separation method using the separation device, wherein the separation device is used for peeling off a forming mold and a forming substrate formed by an imprinting technology including nanoimprinting, and peeling off micro components such as multiple micro light-emitting diodes (LEDs) arranged in parallel from an adhesive chuck. Background Art

[0002] In the past, as such a separation device, there was a demolding device comprising: a peeling prevention mechanism that applies pressure to prevent at least one of the film-shaped molds and the formed object from peeling to a predetermined peeling position; a holding portion that holds either the mold or the formed object; a tension-applying mechanism that applies tension to the mold or the formed object; and a moving mechanism that moves the peeling prevention mechanism relative to the mold and the formed object (for example, refer to Patent Document 1).

[0003] Nanoimprint technology uses a mold's molding pattern to pressurize an object to be molded, such as a resin, and transfers the molding pattern to the object using heat or light. The mold is then removed from the object.

[0004] The illustrated example of Patent Document 1 includes an angle adjustment mechanism that peels a mold, formed into a flexible film, from a peeling position relative to a molded object held by a holding portion, and adjusts the angle between the mold and the molded object after peeling to a constant level. Specifically, the angle adjustment mechanism allows the mold's molding pattern to be removed from the molded object at an angle at a constant release angle.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: International Publication No. 2015 / 072572 Summary of the Invention

[0008] Technical issues to be solved by the invention

[0009] However, in Patent Document 1, the molded pattern is pulled off in an inclined direction at a predetermined angle with respect to the concavo-convex pattern transferred to the molded object. Therefore, the concavo-convex pattern of the molded object is deformed and damaged during the peeling process.

[0010] In detail, including Figure 7 (a)~ Figure 7 The case of imprinting by nanoimprinting shown in (c) will be described.

[0011] exist Figure 7In the state before peeling shown in (a), the concavo-convex pattern 210 transferred to the molded object 200 stands vertically with respect to the bottom surface 220 of the molded object 200 due to the concavo-convex bonding with the molding pattern 110 of the mold 100 .

[0012] However, in Figure 7 In the peeling state shown in (b), as the molding pattern 110 of the mold 100 is pulled off in the oblique direction, the convex portions 211 in the concavo-convex pattern 210 of the molded object 200 collapse.

[0013] Therefore, in Figure 7 In the state after peeling shown in (c), once the convex portions 211 of the concavo-convex pattern 210 collapse, they remain collapsed and cannot be restored to the state before peeling.

[0014] In this way, there is a problem that when the direction (peeling direction) of the forming pattern 110 of the mold 100 is tilted when pulling it off from the concave-convex pattern 210 of the formed object 200, the longer the concave-convex pattern 210 is, the easier it is for the shape to deform (collapse), and high-precision imprint forming cannot be achieved.

[0015] In particular, in the case of nanoimprinting, the concave-convex pattern is extremely fine, so there is a problem that slight shape deformation (collapse) during peeling may also cause damage to the concave-convex pattern, making it impossible to produce a high-precision concave-convex pattern.

[0016] Means for solving technical problems

[0017] In order to solve this problem, the separation device of the present invention, which peels off the concave-convex joint of the first plate-shaped member and the second plate-shaped member that are concavely joined to each other, is characterized in that it comprises: a pressurized chamber formed inside a cavity and accommodating the first plate-shaped member and the second plate-shaped member that are concavely joined to each other so as to be able to move in and out freely; a separation and absorption portion is arranged between the back side of the concave-convex joint of any one of the first plate-shaped member or the second plate-shaped member accommodated in the pressurized chamber and the first indoor surface of the cavity; a holding portion is arranged between the back side of the concave-convex joint of the other of the first plate-shaped member or the second plate-shaped member accommodated in the pressurized chamber and the second indoor surface of the cavity; a first decompression space portion is separated from the pressurized chamber and is arranged in an airtight state between the first indoor surface of the cavity and the separation and absorption portion; a positive pressure adjustment portion supplies positive pressure fluid to the pressurized chamber so that the inner The pressure rises; and the control unit controls the action of the positive pressure adjustment unit, the separation and absorption unit having a displacement portion, the displacement portion abutting against the back side of either the first plate-shaped member or the second plate-shaped member relative to the first indoor surface of the chamber in a manner that is deformable or movable in the thickness direction thereof, the holding unit having a fixed portion, the fixed portion abutting against the back side of the other of the first plate-shaped member or the second plate-shaped member relative to the second indoor surface of the chamber in a manner that is unable to move in the thickness direction, the control unit controls in the following manner: by increasing the internal pressure of the pressurized chamber based on the action of the positive pressure adjustment unit, a pressure difference is generated between the first plate-shaped member or the second plate-shaped member and the first decompression space portion, so that either the first plate-shaped member or the second plate-shaped member moves toward the first decompression space portion together with the displacement portion of the separation and absorption unit.

[0018] and a second pressurized container, wherein the first and second pressurized containers are moved relative to each other so that the container is pressed against a pressure drop that pushes the container back into position and releases the pressure. The displacement part of the separation and absorption part between the side and the first indoor surface of the chamber makes the back side of either the first plate-shaped part or the second plate-shaped part abut in the thickness direction thereof, and relative to the fixed part of the retaining part between the back side of the concave-convex joint of the other of the first plate-shaped part or the second plate-shaped part and the second indoor surface of the chamber, makes the back side of the other of the first plate-shaped part or the second plate-shaped part abut in the thickness direction. In the stripping process, a pressure difference is generated between the pressurized chamber whose internal pressure is increased by the supply of the positive pressure fluid and the first decompression space part, so that either the first plate-shaped part or the second plate-shaped part moves toward the first decompression space part together with the displacement part of the separation and absorption part. The first decompression space part is separated from the pressurized chamber and arranged to be airtight between the first indoor surface of the chamber and the separation and absorption part. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 1 is an explanatory diagram showing the overall structure of a separation device and a separation method according to an embodiment (first embodiment) of the present invention. Figure 1 (a) is a longitudinal sectional view of the loading process. Figure 1 (b) Yes Figure 1 (a) a cross-sectional plan view, Figure 1 (c) is a longitudinal sectional view of a partially enlarged portion.

[0020] Figure 2 is an explanatory diagram showing the stripping process of the separation method, Figure 2 (a) is a longitudinal sectional view of the holding process, Figure 2 (b) is a longitudinal sectional front view of the pressurizing process, Figure 2 (c) is a longitudinal sectional front view of the peeling process.

[0021] Figure 3 This is an illustration of the removal process of the separation method. Figure 3 (a) is a longitudinal sectional front view of the decompression process, Figure 3 (b) is a longitudinal sectional view of a primary unloading process. Figure 3 (c) is a longitudinal sectional front view of the secondary unloading process.

[0022] Figure 4 is an explanatory diagram showing a separation device and a separation method according to a second embodiment of the present invention. Figure 4 (a) is a longitudinal sectional view of the loading process. Figure 4 (b) is a longitudinal sectional front view of the pressurizing process, Figure 4 (c) is a longitudinal sectional front view of the peeling process.

[0023] Figure 5 is an explanatory diagram showing a separation device and a separation method according to a third embodiment of the present invention. Figure 5 (a) is a longitudinal sectional view of the loading process. Figure 5 (b) is a longitudinal sectional front view of the pressurizing process, Figure 5 (c) is a longitudinal sectional front view of the peeling process.

[0024] Figure 6 1 is an explanatory diagram showing a separation device and a separation method according to a fourth embodiment of the present invention. Figure 6 (a) is a longitudinal sectional view of the loading process. Figure 6 (b) is a longitudinal sectional front view of the pressurizing process, Figure 6 (c) is a longitudinal sectional front view of the peeling process.

[0025] Figure 7 is an explanatory diagram showing an example of a conventional separation method. Figure 7 (a) is a partially enlarged longitudinal section view before peeling. Figure 7 (b) is a partially enlarged longitudinal section view during peeling. Figure 7 (c) is a partially enlarged longitudinal sectional front view after peeling. DETAILED DESCRIPTION

[0026] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0027] The separation device A and the separation method according to the embodiment of the present invention are as follows Figures 1 to 6 As shown, a peeling device and a peeling method are provided for separating a first plate-like component B and a second plate-like component C which are joined to each other in a concave-convex manner, such as peeling off a forming mold and a forming substrate formed by an imprinting technology including nanoimprinting, peeling off a plurality of micro components such as micro light-emitting diodes (LEDs) arranged in parallel and an adhesive chuck, etc.

[0028] The first plate-shaped member B is formed into a thin plate shape from a hard material such as glass or synthetic resin, and has a first concavo-convex portion B1 as a concavo-convex joint portion on the front side facing the second plate-shaped member C.

[0029] The second plate member C is formed into a thin plate shape from a hard material such as glass or synthetic resin, and has a second concave-convex portion C1 as a concave-convex joint portion on the front side facing the first plate member B, which is formed by concave-convex jointing the first concave-convex portion B1.

[0030] Furthermore, the first plate member B and the second plate member C are typically arranged so as to be joined in the vertical direction. Hereinafter, the thickness direction of the first plate member B and the second plate member C will be referred to as the "Z direction." Hereinafter, the direction along the first plate member B and the second plate member C that intersects the Z direction will be referred to as the "XY direction."

[0031] When the first plate-shaped part B and the second plate-shaped part C that are joined to each other in a concave-convex manner are used for imprinting including nanoimprinting, either the first plate-shaped part B or the second plate-shaped part C is equivalent to a forming mold, and the other of the first plate-shaped part B or the second plate-shaped part C is equivalent to a forming substrate.

[0032] When the concavo-convex pattern of the molding die is transferred to the molding substrate by imprint molding, the concavo-convex bonding portions (first concavo-convex portion B1 and second concavo-convex portion C1 ) are concavo-convex bonded to each other, forming an integrated stacked state that can be transported.

[0033] Furthermore, when the first plate-like member B and the second plate-like member C, which are joined by concave and convex portions, are used to transport a plurality of micro components, such as micro light-emitting diodes (LEDs), while maintaining their positions, and then transfer them to a conveying device or the like at a destination, either the first plate-like member B or the second plate-like member C corresponds to the micro components arranged in parallel, and the other corresponds to the adhesive chuck. When the adhesive chuck is adhered to the surface of the micro components arranged in parallel to receive the micro components, the concave and convex portions (first concave and convex portion B1 and second concave and convex portion C1) are joined by concave and convex portions, thereby forming a stacked state that is integrated and can be transported.

[0034] As a specific example of the first plate member B and the second plate member C, Figures 1 to 6 In the illustrated case, the first plate-shaped member B is a forming die for imprinting including nanoimprinting, and the second plate-shaped member C is a forming substrate.

[0035] Furthermore, a first retaining plate B3 made of a hard material is detachably attached to the back side (opposite side) of the first concave-convex portion B1, which serves as the front concave-convex joint portion of the first plate-shaped member B. The first plate-shaped member B is arranged to protrude from the surface of the first retaining plate B3.

[0036] Similarly, a second retaining plate C3 made of a hard material is detachably attached to the second back surface C2, which is the back side (opposite side) of the second concave-convex portion C1, which serves as the front concave-convex joint portion of the second plate-shaped member C. The second plate-shaped member C is arranged to protrude from the surface of the second retaining plate C3.

[0037] The first holding plate B3 and the second holding plate C3 are formed into rectangular plate shapes (including rectangular and square quadrilaterals with right angles) or circular wafer shapes, and by clamping the concave-convex joined first plate-shaped component B and the second plate-shaped component C, a stacked body D that can be transported and integrated is formed.

[0038] As the laminate D, it is preferable to arrange a plurality of first plate-shaped members B and second plate-shaped members C in parallel so as to simultaneously peel off a plurality of concavo-convex joint portions (first concavo-convex portion B1 and second concavo-convex portion C1).

[0039] Preferably, a gap E is provided between the first retaining plate B3 and the second retaining plate C3 in the stacked body D, in addition to the first plate-shaped member B and the second plate-shaped member C. Specific examples of the gap E include an outer gap E1 having a rectangular or annular shape formed outside the plurality of first plate-shaped members B and the second plate-shaped members C, a through gap E2 extending between the plurality of first plate-shaped members B and the second plate-shaped members C, and an inner gap E3 communicating with a through hole D1 formed in the first retaining plate B3 or the second retaining plate C3.

[0040] In the illustrated example, the second plate-shaped member C serving as the molded substrate is formed by laminating a resin layer C5 , to which a pattern is transferred by light, heat, or the like serving as the second concave-convex portion C1 , on the surface of a substrate C4 made of a hard material.

[0041] Furthermore, as another example, although not shown in the drawings, it is also possible to make a change in which the first plate-shaped member B and the second plate-shaped member C are directly separated without attaching the first holding plate B3 or the second holding plate C3.

[0042] In detail, the separation device A of the embodiment of the present invention has, as main components: a pressurized chamber 1, which accommodates a first plate-shaped member B and a second plate-shaped member C that are joined concavely and convexly to each other; a separation and absorption portion 2, which is arranged on the back side of either the first plate-shaped member B or the second plate-shaped member C accommodated in the pressurized chamber 1; a retaining portion 3, which is arranged on the back side of the other of the first plate-shaped member B or the second plate-shaped member C accommodated in the pressurized chamber 1; a first decompression space portion 4, which is arranged to be separated from the pressurized chamber 1; and a positive pressure adjustment portion 5, which is arranged to increase the internal pressure of the pressurized chamber 1.

[0043] In addition, it is preferred to have the following components: a first negative pressure regulating part 6, which reduces the internal pressure of the first decompression space part 4; a second decompression space part 7, which is separated from the pressurization chamber 1 and arranged; a second negative pressure regulating part 8, which reduces the internal pressure of the second decompression space part 7; and a control part 9, which controls the operation of the positive pressure regulating part 5, the first negative pressure regulating part 6 and the second negative pressure regulating part 8, etc.

[0044] The pressurized chamber 1 is formed to be sealable inside the chamber 10 , and accommodates the first plate-shaped member B and the second plate-shaped member C so as to be freely accessible throughout the pressurized chamber 1 inside the chamber 10 and the space outside the chamber 10 .

[0045] The chamber 10 has a first interior surface 10a and a second interior surface 10b arranged to face the first plate-shaped member B and the second plate-shaped member C carried in in the thickness direction (Z direction).

[0046] The first indoor surface 10a is formed on a plane in the XY directions so as to be directly or indirectly opposed in the Z direction to the back side of the concavo-convex joint portion (first concavo-convex portion B1 or second concavo-convex portion C1) of either the first plate-shaped member B or the second plate-shaped member C. The second indoor surface 10b is formed on a plane in the XY directions so as to be directly or indirectly opposed in the Z direction to the back side of the concavo-convex joint portion (first concavo-convex portion B1 or second concavo-convex portion C1) of the other of the first plate-shaped member B or the second plate-shaped member C.

[0047] The chamber 10 has an entrance 10c for allowing the first plate member B and the second plate member C to enter and exit the sealable pressurized chamber 1. The entrance 10c of the chamber 10 is openable and closable and is opened and closed by a drive mechanism 10d such as an actuator.

[0048] When the first plate member B and the second plate member C are loaded into the pressurized chamber 1, the concave-convex joint portions (first concave-convex portion B1 and second concave-convex portion C1) are in a concave-convex joined state, and a conveying mechanism (not shown) such as a conveying robot is used for this operation. When the first plate member B and the second plate member C are unloaded from the pressurized chamber 1, the concave-convex joint portions (first concave-convex portion B1 and second concave-convex portion C1) are in a separated state, and the operation is performed sequentially or simultaneously using a conveying mechanism such as a conveying mechanism.

[0049] As a specific example of the pressurized chamber 1, Figures 1 to 6 In the illustrated embodiment, the first retaining plate B3, which is attached to the back side of the first concave-convex portion B1 on the front side of the first plate-shaped member B, or the first back side B2, is arranged to face the upper first indoor surface 10a. The second retaining plate C3, which is attached to the back side of the second concave-convex portion C1 on the front side of the second plate-shaped member C, or the second back side C2, is arranged to face the lower second indoor surface 10b.

[0050] A third indoor surface 10e is formed on a plane in the Z direction between the first indoor surface 10a and the second indoor surface 10b.

[0051] As another example, although not shown, the second holding plate C3 of the second plate member C may be arranged opposite the upper first indoor surface 10a, and the first holding plate B3 of the first plate member B may be arranged opposite the lower second indoor surface 10b.

[0052] Furthermore, it is preferable to arrange a gap detection sensor (not shown) on the first interior surface 10 a of the chamber 10 in order to detect the position of the back side of either the first plate-shaped member B or the second plate-shaped member C.

[0053] The separation and absorption part 2 contacts the back side of the concave-convex joint part (first concave-convex part B1 or second concave-convex part C1) of either the first plate-shaped part B or the second plate-shaped part C in the thickness direction (Z direction) thereof, and is arranged to be separated from the first indoor surface 10a of the chamber 10.

[0054] The separation and absorption section 2 has a displacement portion 2 a that contacts the back side of either the first plate member B or the second plate member C carried in relative to the first interior surface 10 a of the chamber 10 in the thickness direction (Z direction).

[0055] The displacement portion 2a is configured to be deformable or movable in the thickness direction (Z direction), and abuts against the back side of either the first plate-shaped component B or the second plate-shaped component C being moved in, thereby being positioned and integrated in a direction (XY direction) intersecting the thickness direction (Z direction) without being misaligned.

[0056] That is, the separation and absorption section 2 is constructed relative to the first interior surface 10a of the chamber 10, and the displacement portion 2a is configured to be freely deformable or movable in the Z direction. As the displacement portion 2a deforms or moves, either the first plate-shaped component B or the second plate-shaped component C moves in the Z direction.

[0057] A first decompression space 4 is formed between the separation-absorption section 2 and the first interior surface 10a of the chamber 10, separated from the pressurized chamber 1. The first decompression space 4 abuts against the back side of either the first plate member B or the second plate member C relative to the displacement portion 2a of the separation-absorption section 2, thereby forming an airtight structure.

[0058] Furthermore, it is preferable that the separation and absorption section 2 has a first vent 2 b that connects the back side of either the first plate-shaped member B or the second plate-shaped member C with the first decompression space 4 .

[0059] As a specific example of the separation and absorption section 2, Figures 1 to 6In the illustrated embodiment, the first decompression space 4 is constantly connected to the back side of either the first plate member B or the second plate member C via the first vent 2b formed in the separation-absorption section 2. Therefore, utilizing the pressure difference between the internal pressure of the first decompression space 4, which is lowered by the first negative pressure adjustment section 6 described later, and the internal pressure of the pressurized chamber 1, either the first plate member B or the second plate member C can be vacuum-adsorbed onto the displaced portion 2a of the separation-absorption section 2.

[0060] As a result, the internal pressure of the pressurized chamber 1 increases, so that either the first plate-shaped member B or the second plate-shaped member C is detachably adsorbed and held at the displacement portion 2 a and temporarily fixed.

[0061] Furthermore, although not shown in the drawings, another example of the separation and absorption unit 2 may be changed to use a temporary fixation method such as an adhesive member or electrostatic adsorption instead of vacuum adsorption.

[0062] The holding portion 3 is arranged so as to be in contact with the back side of the carried-in first plate-shaped member B or second plate-shaped member C in the thickness direction (Z direction).

[0063] The holding portion 3 has a fixing portion 3a that abuts against the back side of the other of the first plate-shaped member B or the second plate-shaped member C carried in relative to the second interior surface 10b of the chamber 10 so as to be immovable in the thickness direction (Z direction).

[0064] That is, the holding portion 3 is configured to hold the other of the first plate member B and the second plate member C so as to be unable to move in the Z direction by bringing the other of the first plate member B and the second plate member C into contact with the fixing portion 3 a .

[0065] A second reduced-pressure space 7 is preferably formed between the retaining portion 3 and the second interior surface 10b of the chamber 10, separated from the pressurized chamber 1. The second reduced-pressure space 7 is formed airtight by contacting the other of the first plate-shaped member B and the second plate-shaped member C with the fixed portion 3a of the retaining portion 3.

[0066] Furthermore, it is preferable that the holding portion 3 has a second vent 3 b that connects the back side of the other of the first plate-shaped member B and the second plate-shaped member C with the second decompression space 7 .

[0067] As a specific example of the holding portion 3, Figures 1 to 6 In the illustrated case, the holding annular body 31 is fixed to the second interior surface 10 b of the chamber 10 , and the inner space of the holding annular body 31 serves as the second vent 3 b to form the second decompression space 7 .

[0068] The retaining annular body 31 is formed into a rectangular or circular shape, for example, from an elastically deformable material such as a soft synthetic resin or rubber, or an undeformable material such as a hard synthetic resin or metal. At one end in the thickness direction (Z direction) of the retaining annular body 31, a retaining fixing portion 31a is provided, which is retained by the second interior surface 10b of the chamber 10. The other end in the thickness direction (Z direction) of the retaining annular body 31, which serves as the fixing portion 3a, abuts against the back side of the other of the first plate-shaped member B or the second plate-shaped member C being loaded (in the illustrated example, the second retaining plate C3 attached to the second rear surface C2 of the second plate-shaped member C).

[0069] In addition, the second decompression space portion 7, which becomes the second vent 3b of the retaining portion 3, is always connected to the back side of the other of the first plate-shaped part B or the second plate-shaped part C. Therefore, by utilizing the pressure difference between the internal pressure of the second decompression space portion 7 dropped by the second negative pressure adjustment portion 8 described later and the internal pressure of the pressurized chamber 1, the other of the first plate-shaped part B or the second plate-shaped part C can be vacuum-adsorbed to the fixed part 3a of the retaining portion 3.

[0070] As a result, the internal pressure of the pressurized chamber 1 increases, so that the other of the first plate-shaped member B and the second plate-shaped member C is detachably sucked and held at the fixing portion 3 a and temporarily fixed.

[0071] Furthermore, although not shown in the drawings, other examples of the holding portion 3 may be changed to temporary fixation using an adhesive member or electrostatic adsorption instead of vacuum adsorption.

[0072] The positive pressure regulating unit 5 is configured to increase the internal pressure by supplying a positive pressure fluid 5F such as compressed air, gas, or water from a supply source (not shown) to the pressurization chamber 1 .

[0073] As a specific example of the positive pressure regulating unit 5, Figure 1 In the case shown in (a), for example, there is a positive pressure passage 5a extending from an air supply drive source (not shown) such as a compressor through the chamber 10 and through the pressurized chamber 1, and a positive pressure control valve 5b provided in the middle of the positive pressure passage 5a.

[0074] The internal pressure of the pressurized chamber 1 can be set to a range from the atmospheric atmosphere to a predetermined high-pressure atmosphere by the operation of the positive pressure regulating unit 5 (the air supply driving source or the positive pressure control valve 5 b ).

[0075] Specifically, the internal pressure of the pressurizing chamber 1 is preferably adjusted stepwise by controlling the total amount of the positive pressure fluid 5F supplied to the positive pressure passage 5a through operation control of the air supply drive source or the positive pressure control valve 5b.

[0076] The first negative pressure regulating portion 6 is configured such that the internal pressure of the first negative pressure regulating portion 6 is lowered than the internal pressure of the pressurized chamber 1 by discharging a first negative pressure fluid 6F such as air from the first decompression space 4 .

[0077] As a specific example of the first negative pressure adjustment unit 6, Figure 1 In the case shown in (a), for example, there is a first negative pressure channel 6a extending from a first exhaust drive source such as a vacuum pump (not shown) through the chamber 10 and passing through the first decompression space portion 4, and a first negative pressure control valve 6b provided in the middle of the first negative pressure channel 6a.

[0078] The internal pressure of the first decompression space 4 can be set to a low pressure atmosphere ranging from atmospheric atmosphere to vacuum or close to vacuum by the operation of the first negative pressure regulating unit 6 (the first exhaust drive source or the first negative pressure control valve 6 b ).

[0079] Specifically, the internal pressure of the first decompression space 4 is preferably adjusted stepwise by controlling the total amount of the first negative pressure fluid 6F discharged from the first negative pressure passage 6a through operation control of the first exhaust drive source or the first negative pressure control valve 6b.

[0080] The second negative pressure regulating portion 8 is configured such that the internal pressure of the second negative pressure regulating portion 8 is lowered than the internal pressure of the pressurizing chamber 1 by discharging a second negative pressure fluid 8F such as air from the second decompression space 7 .

[0081] As a specific example of the second negative pressure adjustment unit 8, Figure 1 In the case shown in (a), for example, there is a second negative pressure channel 8a extending from a second exhaust drive source such as a vacuum pump (not shown) through the chamber 10 and passing through the second decompression space portion 7, and a second negative pressure control valve 8b provided in the middle of the second negative pressure channel 8a.

[0082] The internal pressure of the second decompression space 7 can be set to a low pressure atmosphere ranging from atmospheric atmosphere to vacuum or close to vacuum by the operation of the second negative pressure adjustment unit 8 (second exhaust drive source or second negative pressure control valve 8 b ).

[0083] Specifically, the internal pressure of the second decompression space 7 is preferably adjusted in stages by controlling the total amount of the second negative pressure fluid 8F discharged from the second negative pressure passage 8a by controlling the operation of the second exhaust drive source or the second negative pressure control valve 8b.

[0084] The control unit 9 is a controller including a control circuit (not shown) electrically connected to the positive pressure adjustment unit 5 , the first negative pressure adjustment unit 6 , the second negative pressure adjustment unit 8 , and the like.

[0085] Furthermore, it is electrically connected to a drive mechanism 10d for opening and closing the entrance and exit 10c of the chamber 10. In addition, it is electrically connected to a conveying mechanism for moving the first plate-shaped member B and the second plate-shaped member C in and out of the pressurized chamber 1.

[0086] The controller serving as the control unit 9 sequentially controls the operations at preset timings according to a program preset in its control circuit (not shown).

[0087] Next, a separation method using the separation device A will be described using a program set in the control circuit of the control unit.

[0088] The separation method using the separation device A according to the embodiment of the present invention is divided into a peeling process and a removal process.

[0089] The peeling process, as a main process, includes: a carrying process, in which the first plate-shaped component B and the second plate-shaped component C are brought into the pressurized chamber 1; a holding process, in which the first plate-shaped component B and the second plate-shaped component C are kept airtight in the pressurized chamber 1; a pressurizing process, in which the internal pressure of the pressurized chamber 1 is increased; and a peeling process, in which the first plate-shaped component B and the second plate-shaped component C are peeled off in the pressurized chamber 1.

[0090] During the moving-in process, Figure 1 As shown in (a) and the like, the first plate member B and the second plate member C, whose concave-convex joint portions (first concave-convex portion B1 and second concave-convex portion C1) are joined together to form an integrated structure, are fed into the pressurized chamber 1 and housed therein by the operation of the conveying mechanism.

[0091] In the maintenance process, Figure 2 As shown in FIG. (a) and the like, the back side of the concave-convex joint portion (first concave-convex portion B1, second concave-convex portion C1) of either the first plate-shaped member B or the second plate-shaped member C is brought into contact with the displaced portion 2a of the separation-absorbing member 2 in the thickness direction (Z direction). Consequently, the back side of either the first plate-shaped member B or the second plate-shaped member C is positioned and integrated with the displaced portion 2a of the separation-absorbing member 2 in a direction (XY direction) intersecting the thickness direction (Z direction), preventing displacement. Consequently, as the displaced portion 2a deforms or moves in the thickness direction (Z direction), the back side of either the first plate-shaped member B or the second plate-shaped member C can move relative to the first interior surface 10a of the chamber 10.

[0092] At the same time, the back side of the concave-convex joint portion (first concave-convex portion B1, second concave-convex portion C1) of the other of the first plate-shaped member B and the second plate-shaped member C is brought into contact with the fixing portion 3a of the holding portion 3 in the thickness direction (Z direction). This prevents movement in the thickness direction (Z direction) relative to the second interior surface 10b of the chamber 10.

[0093] In the pressurization process, Figure 2 As shown in (b) and the like, by the operation of the positive pressure regulating portion 5, the positive pressure fluid 5F is supplied to the pressurizing chamber 1 holding the first plate-shaped member B and the second plate-shaped member C, thereby increasing the internal pressure.

[0094] In the stripping process, Figure 2 As shown in FIG. 3 , as the internal pressure of the pressurized chamber 1 rises, the pressure becomes higher than the internal pressure of the first reduced-pressure space 4 formed between the first interior surface 10a of the chamber 10 and the separation-absorption section 2. Consequently, a pressure difference is generated between the internal pressure of the pressurized chamber 1 and the internal pressure of the first reduced-pressure space 4, generating an attractive force that pulls the separation-absorption section 2 toward the first reduced-pressure space 4.

[0095] Due to this attractive force, either the first plate member B or the second plate member C, which is in contact with the separation and absorption portion 2 via the displacement portion 2a, is pulled toward the first decompression space 4 by the positive pressure fluid 5F. As a result, either the first plate member B or the second plate member C is peeled off in the thickness direction (Z direction) relative to the other, which is unable to move in the thickness direction (Z direction) due to the fixing portion 3a, thereby peeling off the concave-convex joint portion (first concave-convex portion B1, second concave-convex portion C1).

[0096] At this time, a gap detection sensor is arranged on the first indoor surface 10a of the chamber 10 to detect the position of the back side of either the first plate-shaped part B or the second plate-shaped part C to monitor its detection value, thereby detecting the progress or completion of the peeling of the concave-convex joint (first concave-convex part B1, second concave-convex part C1).

[0097] In addition, in the pressurizing step, it is preferable that the internal pressure of the first decompression space 4 be reduced by the operation of the first negative pressure regulating unit 6 .

[0098] like Figure 2 As shown in Figures (b) and the like, the supply of positive pressure fluid 5F due to the operation of the positive pressure regulating unit 5 simultaneously increases the internal pressure of the pressurized chamber 1. Simultaneously, the exhaust from the first decompression space 4 further increases the pressure difference between the internal pressure of the first decompression space 4 and the internal pressure of the pressurized chamber 1. In the illustrated example, the separation and absorption unit 2 has a first vent 2b, so that the back side of either the first plate-shaped member B or the second plate-shaped member C is vacuum-adsorbed to the displacement portion 2a of the separation and absorption unit 2.

[0099] Furthermore, in the pressurizing step, it is preferable that the internal pressure of the second decompression space 7 formed between the second interior surface 10 b of the chamber 10 and the holding unit 3 is reduced by the operation of the second negative pressure regulating unit 8 .

[0100] In the illustrated example, the retaining portion 3 has a second vent 3b, so that while the internal pressure of the pressurized chamber 1 rises or before the internal pressure of the pressurized chamber 1 begins to rise, the back side of the other of the first plate-shaped part B or the second plate-shaped part C is vacuum-adsorbed to the fixed portion 3a of the retaining portion 3 by exhausting gas from the second decompression space portion 7.

[0101] Furthermore, as shown in the example shown in the figure, when there is a gap E between the first retaining plate B3 installed on the first back side B2 of the first plate-shaped part B and the second retaining plate C3 installed on the second back side C2 of the second plate-shaped part C, into which the positive pressure fluid 5F can penetrate, the positive pressure fluid 5F penetrates the gap E between the first retaining plate B3 and the second retaining plate C3, thereby generating a repulsive force that pushes the first plate-shaped part B and the second plate-shaped part C relative to each other.

[0102] The removal process mainly includes: a decompression process to reduce the internal pressure of the pressurized chamber 1; a primary removal process to remove any one of the first plate-shaped component B and the second plate-shaped component C from the pressurized chamber 1; and a secondary removal process to remove the other one of the first plate-shaped component B and the second plate-shaped component C from the pressurized chamber 1.

[0103] In the decompression process, Figure 3 As shown in (a), the positive pressure regulating unit 5 is stopped and the positive pressure fluid 5F filling the pressurizing chamber 1 is released to the outside of the pressurizing chamber 1 to release the positive pressure fluid 5F to the atmosphere, thereby reducing the internal pressure of the pressurizing chamber 1.

[0104] In a moving out process, if Figure 3 As shown in (b), by stopping the operation of the second negative pressure adjustment unit 8 and the operation of the conveying mechanism, either the first plate member B or the second plate member C (in the illustrated example, the second plate member C) is removed from the holding unit 3 and carried out to the outside of the pressurized chamber 1.

[0105] In the secondary removal process, such as Figure 3 As shown in (c), by stopping the action of the first negative pressure adjustment part 6 and the action of the conveying mechanism, the other one of the first plate-shaped part B and the second plate-shaped part C (in the illustrated example, the first plate-shaped part B) is removed from the separation and absorption part 2 and moved out of the pressurized chamber 1.

[0106] Next, representative examples (first to fourth embodiments) in which the structures of the pressurizing chamber 1 (chamber 10 ), the separation and absorption unit 2 , and the stacked body D are different will be described.

[0107] Figures 1 to 3 The separation device A1 of the first embodiment shown is a split type pressurized chamber 1, in which a stacked body D having a first retaining plate B3 and a second retaining plate C3 installed on the outside of a first plate-like part B and a second plate-like part C joined concave and convex is peeled off by deformation of the separation absorption part 2.

[0108] The divided type pressurized chamber 1 is a chamber 10 divided into a first chamber 11 and a second chamber 12, with an inlet 10c formed between the first chamber 11 and the second chamber 12. A seal 13 made of a square or annular gasket or an O-ring is interposed between the inlet 10c.

[0109] The first chamber 11 or the second chamber 12 is relatively brought close to each other by the driving mechanism 10d, so that the port 10c is airtightly closed by the seal 13, and the pressurized chamber 1 is openable and closable and has a sealed structure.

[0110] In the illustrated example, only the upper first chamber 11 is reciprocated relative to the lower second chamber 12 , but the configuration may be modified to include only the lower second chamber 12 or both the first chamber 11 and the second chamber 12 being reciprocated.

[0111] The deformable separation and absorption portion 2 is composed of an elastic ventilation body 21 attached to the first interior surface 10 a of the chamber 10 so as to be elastically deformable in the Z direction.

[0112] In the illustrated example, the elastic vent body 21 is formed of an annular component such as a gasket or an O-ring, which is formed into a square or annular shape having a first vent 2b at its center from an elastically deformable material such as a soft synthetic resin or rubber. At one end in the thickness direction (Z direction) of the elastic vent body 21, there is an installation portion 21a that is installed on the first interior surface 10a of the chamber 10. The elastic vent body 21 uses the other end in the thickness direction (Z direction) as a displacement portion 2a and abuts against the back side of either the first plate-shaped component B or the second plate-shaped component C that is moved in (in the illustrated example, the first retaining plate B3 installed on the first back side B2 of the first plate-shaped component B), thereby forming a first decompression space 4 on the inner side of the elastic vent body 21.

[0113] Therefore, due to the difference between the internal pressure increase of the pressurized chamber 1 caused by the inflow of the positive pressure fluid 5F and the internal pressure of the first decompression space 4, the elastic vent body 21 is elastically compressed and deformed in the Z direction, causing either the first plate member B or the second plate member C to move toward the first decompression space 4 together with its displacement portion 2a. As a result, either the first plate member B or the second plate member C (in the illustrated example, the first plate member B) is peeled off from the other (in the illustrated example, the second plate member C).

[0114] Although not shown in the figure, as another example of the elastic vent body 21 , a plate-shaped member having a plurality of first vent openings 2 b or a porous member having a plurality of first vent openings 2 b may be used instead of the annular member.

[0115] In such cases, a gap detection sensor disposed on the first interior surface 10a of the chamber 10 detects the position of either the first plate member B or the second plate member C (in the illustrated example, the first plate member B), thereby detecting abnormal or excessive deformation of the first plate member B. A deformation suppression member (not shown) such as a brake may be provided to mechanically prevent excessive deformation of the first plate member B.

[0116] In addition, Figure 1 (a)~ Figure 1 In the example shown in (c), between the first retaining plate B3 and the second retaining plate C3 forming the stacked body D, a plurality of first plate-like components B and a plurality of second plate-like components C are arranged in parallel at predetermined intervals in the XY directions, and have a square-shaped outer gap E1 and a plurality of through gaps E2 passing straight in both directions of the XY directions.

[0117] Thus, the positive pressure fluid 5F not only enters the outer gap E1 but also enters each of the plurality of through gaps E2, thereby generating a repulsive force that pushes the first plate member B and the second plate member C apart as a whole.

[0118] Figure 4 (a)~ Figure 4 The separation device A2 of the second embodiment shown in (c) is a partially openable and closed type. The structure of the pressurized chamber 1 is different from that of the first embodiment, but the other structures are the same as those of the first embodiment.

[0119] In the illustrated example, an entrance 10 c is opened in a portion of the box-shaped chamber 14 , and a door 14 a is opened and closed relative to the entrance 10 c by a driving mechanism 10 d .

[0120] As a result, a part of the pressurized chamber 1 is openable and closable and has a sealed structure.

[0121] Figure 5 (a)~ Figure 5 The separation device A3 of the third embodiment shown in (c) is different from the first embodiment in that it separates the laminate D by moving the separation absorption unit 2. The other structures are the same as those of the first embodiment.

[0122] The movable separation and absorption section 2 is composed of an ascending and descending ventilation body 22 supported so as to be movable back and forth in the Z direction relative to the first interior surface 10 a of the chamber 10 .

[0123] In the illustrated example, the lift vent body 22 is formed from an undeformable material such as a hard synthetic resin or metal into a square plate-shaped or circular plate-shaped member having a first vent 2b at its center. The side of the lift vent body 22 has a sliding portion 22a that is supported to move back and forth freely and airtightly in the Z direction along the third interior surface 10e of the chamber 10. The third interior surface 10e of the chamber 10 has a stopper 10f on one side and a stopper 10g on the other side that protrude toward the lift vent body 22. The lift vent body 22, moving in the Z direction, abuts against the stopper 10f on one side or the stopper 10g on the other side, thereby limiting the range of movement of the lift vent body 22. The lifting ventilation body 22 uses the front end portion in the thickness direction (Z direction) as the displacement portion 2a, and abuts against the back side of either the first plate-shaped part B or the second plate-shaped part C moved in (in the illustrated example, the first retaining plate B3 installed on the first back side B2 of the first plate-shaped part B), thereby forming a first decompression space portion 4 between the lifting ventilation body 22 and the first indoor surface 10a of the chamber 10.

[0124] Therefore, due to the difference between the internal pressure increase of the pressurized chamber 1 caused by the inflow of the positive pressure fluid 5F and the internal pressure of the first decompression space 4, the lifting and lowering ventilating body 22 moves in the Z direction, causing either the first plate member B or the second plate member C to move toward the first decompression space 4 together with its displacement portion 2a. As a result, either the first plate member B or the second plate member C (in the illustrated example, the first plate member B) is peeled off from the other (in the illustrated example, the second plate member C).

[0125] Although not shown in the figure, as another example of the lifting ventilator 22 , a plate-shaped member having a plurality of first vents 2 b or a porous plate-shaped member having a plurality of first vents 2 b may be used instead of the plate-shaped member having one first vent 2 b.

[0126] Alternatively, instead of supporting the sliding portion 22a of the lift vent body 22 so that it can move along the third interior surface 10e, the lift vent body 22 can be supported in a floating island configuration at the center of a flexible, elastically deformable, thin plate-shaped member such as stainless steel. This configuration allows the lift vent body 22 to be supported for reciprocating movement in the Z direction through the elastic deformation of the flexible member. In this floating island configuration, the outer periphery of the flexible member is attached to the third interior surface 10e of the chamber 10, thereby separating the first decompression space 4 from the pressurized chamber 1 on the back side of the flexible member and providing an airtight seal.

[0127] like Figure 6 (a)~ Figure 6The separation device A4 of the fourth embodiment shown in (c) is different from the first embodiment in that it separates the stacked body D having the inner gap E3 communicating with the through hole D1 of the first holding plate B3 or the second holding plate C3. The other structures are the same as those of the first embodiment.

[0128] The through hole D1 is bored on either or both of the first retaining plate B3 or the second retaining plate C3, separated from the first decompression space 4 or the second decompression space 7, and allows the positive pressure fluid 5F in the pressurized chamber 1 to enter the inner gap E3 through the through hole D1.

[0129] In the illustrated example, between the first retaining plate B3 and the second retaining plate C3 forming the stacked body D, a plurality of first plate-like components B and a plurality of second plate-like components C are arranged side by side at predetermined intervals in a circumferential direction centered on the inner gap E3, and have an outer gap E1 and a plurality of through gaps (not shown) passing in a straight line in a radial direction centered on the inner gap E3.

[0130] A through hole D1 is bored in the center of either the first holding plate B3 or the second holding plate C3 (in the illustrated example, the first holding plate B3 ) facing the first decompression space 4 .

[0131] A positive pressure introduction channel 5c for passing the positive pressure fluid 5F is formed on a first interior surface 10a of the chamber 10 facing the through hole D1 so as to communicate with the through hole D1. The positive pressure introduction channel 5c is configured to introduce the positive pressure fluid 5F into the through hole D1 from an outlet of the positive pressure introduction channel 5c.

[0132] Furthermore, similarly to the first embodiment, the stack D is peeled off by utilizing the deformation of the separation absorption section 2, but the outflow port of the positive pressure introduction channel 5c is opened on the first interior surface 10a of the chamber 10, and therefore the channel from the outflow port of the positive pressure introduction channel 5c to the through hole D1 needs to be separated from the first decompression space section 4 to be airtight.

[0133] Therefore, the separation and absorption section 2 shown in the figure is provided with an inner annular member 24 in addition to the outer annular member 23, which corresponds to the elastic vent body 21 of the first embodiment, so as to surround the passage from the outlet of the positive pressure introduction passage 5c to the through hole D1. A first decompression space 4 is formed between the outer annular member 23 and the inner annular member 24.

[0134] Although not shown in the figure, as another example of the elastic vent body 21 , a plate-shaped member having a plurality of first vents 2 b or a porous member having a plurality of first vents 2 b may be used instead of the outer annular member 23 or the inner annular member 24 .

[0135] As a result, the positive pressure fluid 5F not only invades the outer gap E1, but also invades the inner gap E3 through the positive pressure inlet channel 5c, the inner channel of the inner annular component 24, and the through hole D1, and flows from the through gap E2 into multiple through gaps E2 respectively, thereby generating a repulsive force that pushes the first plate-shaped component B and the second plate-shaped component C apart as a whole.

[0136] According to the separation device A and separation method of this embodiment of the present invention, the concave-convex joined first plate member B and second plate member C are housed in the pressurized chamber 1, so that the back side of either the first plate member B or the second plate member C (in the illustrated example, the first back side B2 side) contacts the displacement portion 2a of the separation-absorbing portion 2, allowing deformation or movement in the thickness direction (Z direction) relative to the first interior surface 10a of the chamber 10. The back side of the other of the first plate member B or the second plate member C (in the illustrated example, the second back side C2 side) contacts the fixed portion 3a of the holding portion 3, preventing movement in the thickness direction (Z direction) relative to the second interior surface 10b of the chamber 10.

[0137] In this contained state, positive-pressure fluid 5F is supplied to pressurized chamber 1, causing the internal pressure of pressurized chamber 1 to rise, becoming higher than the internal pressure of first decompression space 4. Consequently, either first plate member B or second plate member C (in the illustrated example, first plate member B) moves toward first decompression space 4 along with displacement portion 2a of separation-absorption section 2. Consequently, either first plate member B or second plate member C (in the illustrated example, first plate member B) is peeled off from the other (in the illustrated example, second plate member C).

[0138] Therefore, the peeling can be performed without deforming (collapsing) the shape of the concavo-convex joint portion (the first concavo-convex portion B1 and the second concavo-convex portion C1 ) between the first plate-shaped member B and the second plate-shaped member C.

[0139] As a result, compared with the conventional technique of removing the concave-convex pattern of the mold obliquely from the concave-convex pattern transferred to the molded object, even if the protrusion amount of the concave-convex joint portion (first concave-convex portion B1, second concave-convex portion C1) becomes longer, shape deformation accompanying peeling can be prevented.

[0140] Therefore, when used in imprint molding including nanoimprinting, a high-precision concave-convex pattern can be produced without destroying the concave-convex pattern of the concave-convex joint portion (first concave-convex portion B1 and second concave-convex portion C1 ).

[0141] Furthermore, in the case of a conveying device that transfers micro components such as a plurality of micro light-emitting diodes (LEDs) arranged in parallel by peeling them off from an adhesive chuck, the micro components can be transferred with high precision without damaging them.

[0142] In particular, it is preferable to provide the first negative pressure regulating portion 6 that reduces the internal pressure of the first decompression space 4 .

[0143] In this case, as the internal pressure of the compression chamber 1 increases, the internal pressure of the first decompression space 4 is reduced by the first negative pressure regulating unit 6 , thereby increasing the pressure difference between the internal pressures of the compression chamber 1 and the first decompression space 4 .

[0144] Therefore, the attractive force pulling the separation and absorption part 2 toward the first decompression space 4 increases.

[0145] Therefore, the concavo-convex joint portion (the first concavo-convex portion B1 and the second concavo-convex portion C1 ) of the first plate-shaped member B and the second plate-shaped member C, which are concavo-convexly joined to each other, can be peeled off smoothly.

[0146] As a result, the peeling ability can be improved.

[0147] In addition, by controlling the action of either or both of the positive pressure adjustment part 5 (the driving source for air supply or the positive pressure control valve 5b) or the first negative pressure adjustment part 6 (the first exhaust driving source or the first negative pressure control valve 6b), the concave-convex joint part (the first concave-convex part B1, the second concave-convex part C1) can be peeled off more smoothly by relatively step-by-step adjusting the internal pressure of the pressurized chamber 1 and the internal pressure of the first decompression space part 4.

[0148] Furthermore, due to the pressure difference between the internal pressure of the pressurized chamber 1 and the internal pressure of the first decompression space 4, the back side (in the illustrated example, the first back side B2 side) of either the first plate-shaped member B or the second plate-shaped member C can be vacuum-adsorbed onto the displacement portion 2a of the separation-absorbing section 2. Thus, due to the pressure difference between the internal pressure of the pressurized chamber 1 and the internal pressure of the first decompression space 4, either the first plate-shaped member B or the second plate-shaped member C, which moves toward the first decompression space 4 along with the displacement portion 2a of the separation-absorbing section 2, can be adsorbed and held.

[0149] Furthermore, it is preferable to provide an airtight second decompression space 7 formed between the second interior surface 10 b of the chamber 10 and the holder 3 , and a second negative pressure adjustment unit 8 for reducing the internal pressure of the second decompression space 7 .

[0150] In this case, the internal pressure of the first decompression space 4 is reduced at the same time as the internal pressure of the pressurized chamber 1 rises or before the internal pressure of the pressurized chamber 1 starts to rise, thereby generating a pressure difference between the internal pressures of the pressurized chamber 1 and the first decompression space 4 .

[0151] Therefore, the back side (in the illustrated example, the second back side C2 side) of the other of the first plate-shaped member B and the second plate-shaped member C is vacuum-adsorbed to the fixed portion 3a of the holding portion 3 due to the pressure difference. As a result, the other of the first plate-shaped member B and the second plate-shaped member C is adsorbed and held immovably.

[0152] Therefore, the other of the first plate-shaped member B and the second plate-shaped member C can be firmly fixed at the fixing portion 3 a of the holding portion 3 .

[0153] As a result, the concavo-convex joint portions (the first concavo-convex portion B1 and the second concavo-convex portion C1 ) of the first plate-shaped member B and the second plate-shaped member C that are concavo-convexly joined to each other can be reliably peeled off.

[0154] Furthermore, it is preferred that a first retaining plate B3 is mounted on the first back surface B2 of the first plate-shaped member B, and a second retaining plate C3 is mounted on the second back surface C2 of the second plate-shaped member C, with a gap E being provided between the first retaining plate B3 and the second retaining plate C3 to allow the positive pressure fluid 5F to flow in.

[0155] In this case, the pressure difference between the pressurized chamber 1 and the first decompression space portion 4 generates an attractive force that pulls the separation absorption portion 2 toward the first decompression space portion 4, and the positive pressure fluid 5F invades the gap E to generate a repulsive force that pushes the concave-convex joint portions (first concave-convex portion B1, second concave-convex portion C1) of the first plate-shaped part B and the second plate-shaped part C relative to each other.

[0156] Therefore, the attractive force and the repulsive force complement each other and the concave-convex joint portion (the first concave-convex portion B1 and the second concave-convex portion C1) can be peeled off more smoothly.

[0157] As a result, the peeling ability can be further improved.

[0158] In addition, in the above embodiments (first to fourth embodiments), the first plate-shaped part B and the second plate-shaped part C are described as a forming mold and a forming substrate for imprinting including nanoimprinting, but are not limited to this and can also be used as a conveying device for transferring tiny components.

[0159] In this case, either one of the multiple first plate-shaped parts B protruding from the first holding plate B3 or the multiple second plate-shaped parts C protruding from the second holding plate C3 is a micro-component arranged in parallel, and the other becomes an adhesive chuck that is concave-convexly joined to the multiple first plate-shaped parts B or the second plate-shaped parts C.

[0160] Even in this case, the same effects and advantages as those of the first to fourth embodiments described above can be obtained.

[0161] Explanation of symbols

[0162] A-separation device, 1-pressurization chamber, 2-separation and absorption part, 2a-displacement part, 3-holding part, 3a-fixing part, 4-first decompression space part, 5-positive pressure adjustment part, 5F-positive pressure fluid, 6-first negative pressure adjustment part, 7-second decompression space part, 8-second negative pressure adjustment part, 9-control part, 10a-first indoor surface, 10b-second indoor surface, B-first plate-shaped component, B1-concave-convex joint part (first concave-convex part), B2-back side and first back side of the first concave-convex part, B3-first holding plate, C-second plate-shaped component, C1-concave-convex joint part (second concave-convex part), C2-back side and second back side of the second concave-convex part, C3-second holding plate, E-gap.

Claims

1. A separation device for peeling off the concave-convex joint portion of a first plate-shaped member and a second plate-shaped member that are concave-convexly joined to each other, characterized in that: have: A pressurized chamber is formed inside the cavity, and the first plate-shaped member and the second plate-shaped member, which are joined in a concave-convex manner, are accommodated in the pressurized chamber so as to be able to move in and out freely; a separation absorbing portion provided between a back side of the concave-convex joint portion of any one of the first plate-shaped member and the second plate-shaped member accommodated in the pressurized chamber and a first interior surface of the chamber; a holding portion provided between a back side of the concave-convex joint portion of the other of the first plate-shaped member and the second plate-shaped member accommodated in the pressurized chamber and a second interior surface of the chamber; a first decompression space portion, between the first interior surface of the chamber and the separation and absorption portion, separated from the pressurization chamber and provided in an airtight manner; a positive pressure regulating unit for supplying positive pressure fluid to the pressurizing chamber to increase the internal pressure; and A control unit controls the operation of the positive pressure adjustment unit. The separation and absorption portion has a displacement portion that abuts against the back side of one of the first plate-shaped member and the second plate-shaped member relative to the first interior surface of the chamber so as to be deformable or movable in the thickness direction thereof. The holding portion includes a fixed portion that abuts against the back side of the other of the first plate-shaped member and the second plate-shaped member relative to the second interior surface of the chamber so as to be unable to move in the thickness direction. The control unit controls as follows: by increasing the internal pressure of the pressurized chamber based on the action of the positive pressure adjustment unit, a pressure difference is generated between the first decompression space unit and the first decompression space unit, so that either the first plate-shaped member or the second plate-shaped member moves toward the first decompression space unit together with the displacement portion of the separation and absorption unit.

2. The separation device according to claim 1, characterized in that have: The first negative pressure adjustment unit reduces the internal pressure of the first decompression space.

3. The separation device according to claim 1 or 2, characterized in that have: An airtight second decompression space is formed between the second chamber inner surface of the chamber and the holding portion; and a second negative pressure adjustment portion reduces the internal pressure of the second decompression space.

4. The separation device according to claim 1, characterized in that A first holding plate is attached to a first rear surface of the first plate-shaped member, and a second holding plate is attached to a second rear surface of the second plate-shaped member. A gap is defined between the first holding plate and the second holding plate to allow the positive-pressure fluid to enter.

5. The separation device according to claim 2, characterized in that A first holding plate is attached to a first rear surface of the first plate-shaped member, and a second holding plate is attached to a second rear surface of the second plate-shaped member. A gap is defined between the first holding plate and the second holding plate to allow the positive-pressure fluid to enter.

6. The separation device according to claim 3, characterized in that A first holding plate is attached to a first rear surface of the first plate-shaped member, and a second holding plate is attached to a second rear surface of the second plate-shaped member. A gap is defined between the first holding plate and the second holding plate to allow the positive-pressure fluid to enter.

7. A separation method for peeling off a concave-convex joint portion of a first plate-shaped member and a second plate-shaped member that are concave-convexly joined to each other, characterized in that: include: a loading step of loading the first plate-shaped member and the second plate-shaped member into a pressurized chamber formed inside the chamber; a holding step of positioning the first plate-shaped member and the second plate-shaped member in the pressurized chamber; a pressurizing step of supplying a positive pressure fluid to the pressurizing chamber holding the first plate-shaped member and the second plate-shaped member to increase the internal pressure; a peeling step of peeling the concave-convex joint portion between the first plate-shaped member and the second plate-shaped member in the pressurized chamber with increased internal pressure; and In a carrying-out step, the first plate member and the second plate member with the concave-convex joint portion peeled off are taken out of the pressurized chamber. In the holding step, the back side of one of the first plate member and the second plate member is brought into contact in the thickness direction with respect to a displacement portion of the separation absorption portion provided between the back side of the concave-convex joint of one of the first plate member and the second plate member and the first indoor surface of the chamber, and the back side of the other of the first plate member and the second plate member is brought into contact in the thickness direction with respect to a fixed portion of the holding portion provided between the back side of the concave-convex joint of the other of the first plate member and the second indoor surface of the chamber. During the stripping process, a pressure difference is generated between the pressurized chamber whose internal pressure is increased by the supply of the positive pressure fluid and the first decompression space portion, so that either the first plate-shaped member or the second plate-shaped member moves toward the first decompression space portion together with the displacement portion of the separation and absorption portion. The first decompression space portion is separated from the pressurized chamber and is arranged to be airtight between the first chamber inner surface of the chamber and the separation and absorption portion.

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