Touch substrate and its preparation method, touch device

Abstract

A touch substrate and its fabrication method, and a touch device, the touch substrate comprising an electrostatic transport layer, a first insulating layer, a first conductive layer, a second insulating layer, and a second conductive layer stacked sequentially, wherein: the first conductive layer includes a first touch electrode, the second conductive layer includes a second touch electrode and a second virtual electrode that are mutually insulated from each other, the second virtual electrode being electrically connected to the electrostatic transport layer through a via penetrating the first insulating layer and the second insulating layer; and / or, the first conductive layer further includes a plurality of mutually insulated first virtual electrodes, the first virtual electrodes being mutually insulated from the first touch electrode.

Description

Technical Field

[0001] This disclosure relates to, but is not limited to, the field of touch technology, and particularly to a touch substrate and its preparation method, and a touch device. Background Technology

[0002] With the rapid development of display technology, touch technology has been applied to various electronic devices and fields, and is increasingly popular among users. Based on their working principles, touchscreens can be categorized as capacitive, resistive, infrared, surface acoustic wave, and electromagnetic. Among them, capacitive touchscreens, with their unique touch principle and advantages such as high sensitivity, long lifespan, and high light transmittance, are widely used in various electronic interactive devices.

[0003] Touchscreen product manufacturing involves numerous bonding processes, including bonding polarizers, bonding the screen to the backlight module, bonding the cover glass, full bonding of the display and touchscreen, and applying protective films. Before bonding, each of these processes involves removing the protective film, which easily generates a large amount of static electricity. This static charge is difficult to dissipate quickly. Furthermore, during user operation, friction can cause static charge accumulation, leading to display abnormalities in the liquid crystal display (LCD) due to external electric fields. Summary of the Invention

[0004] The following is an overview of the subject matter described in detail herein. This overview is not intended to limit the scope of the claims.

[0005] An exemplary embodiment of this disclosure provides a touch substrate, including an electrostatic transport layer, a first insulating layer, a first conductive layer, a second insulating layer, and a second conductive layer stacked sequentially, wherein: the first conductive layer includes a first touch electrode, the second conductive layer includes a second touch electrode and a second virtual electrode that are mutually insulated from each other, the second virtual electrode being electrically connected to the electrostatic transport layer through a via penetrating the first insulating layer and the second insulating layer; and / or, the first conductive layer further includes a plurality of mutually insulated first virtual electrodes, the first virtual electrodes being mutually insulated from the first touch electrode.

[0006] In some exemplary embodiments, the first touch electrode includes a plurality of first sub-electrodes arranged sequentially at intervals along a first direction; the second touch electrode includes a plurality of second sub-touch electrodes; the second virtual electrode includes a plurality of second sub-virtual electrodes; at least one second sub-touch electrode and at least one second sub-virtual electrode are arranged sequentially at intervals along a second direction and are electrically isolated from each other.

[0007] In some exemplary embodiments, the first sub-electrode, the second sub-virtual electrode, and the second sub-touch electrode are all mesh-like structures, and the width of the second sub-touch electrode in the second direction is greater than the width of the second sub-virtual electrode in the second direction.

[0008] In some exemplary embodiments, each of the second sub-virtual electrodes includes a second virtual main electrode and a plurality of mutually disconnected second virtual floating electrodes, the plurality of second virtual floating electrodes being disposed between the second virtual main electrode and the second touch electrode, and the second virtual main electrode, the second virtual floating electrodes and the second touch electrode being mutually insulated from each other.

[0009] In some exemplary embodiments, one or two rows of second virtual floating electrodes are arranged sequentially along a first direction between two adjacent second touch electrodes.

[0010] In some exemplary embodiments, the electrostatic transport layer is made of an indium tin oxide film with added conductive particles, the indium tin oxide film having a resistance of 107 to 1013 ohms, and the conductive particles are made of any one or more of the following: gold, silver, and aluminum.

[0011] In some exemplary embodiments, the touch substrate further includes a substrate, the substrate including an array substrate and an opposing substrate disposed in a cell, the substrate including a bonding region including a ground line, and the electrostatic transport layer being connected to the ground line of the bonding region.

[0012] An exemplary embodiment of this disclosure also provides a touch device, including a substrate and a touch substrate disposed on the substrate, the substrate including an array substrate and an opposing substrate disposed in pairs, and the touch substrate being any of the touch substrates described above.

[0013] This exemplary embodiment also provides a method for preparing a touch substrate, comprising:

[0014] An electrostatic transport layer is formed on the substrate.

[0015] A first insulating layer is formed on the side of the electrostatic transport layer away from the substrate.

[0016] A first conductive layer is formed on the side of the first insulating layer away from the electrostatic transport layer, and the first conductive layer includes a first touch electrode.

[0017] A second insulating layer is formed on the side of the first conductive layer away from the first insulating layer, and a plurality of vias are formed on the second insulating layer, the vias penetrating the second insulating layer and the first insulating layer;

[0018] A second conductive layer is formed on the side of the second insulating layer away from the first conductive layer. The second conductive layer includes a second touch electrode and a second virtual electrode that are insulated from each other. The second virtual electrode is electrically connected to the electrostatic transport layer through the via.

[0019] In some exemplary embodiments, the first touch electrode includes a plurality of first sub-electrodes arranged sequentially at intervals along a first direction; the second touch electrode includes a plurality of second sub-touch electrodes; the second virtual electrode includes a plurality of second sub-virtual electrodes; at least one second sub-touch electrode and at least one second sub-virtual electrode are arranged sequentially at intervals along a second direction and are electrically isolated from each other.

[0020] In some exemplary embodiments, the first sub-electrode, the second sub-virtual electrode, and the second sub-touch electrode are all mesh-like structures, and the width of the second sub-touch electrode in the second direction is greater than the width of the second sub-virtual electrode in the second direction.

[0021] In some exemplary embodiments, each of the second sub-virtual electrodes includes a second virtual main electrode and a plurality of mutually disconnected second virtual floating electrodes, the plurality of second virtual floating electrodes being disposed between the second virtual main electrode and the second touch electrode, and the second virtual main electrode, the second virtual floating electrodes and the second touch electrode being mutually insulated from each other.

[0022] In some exemplary embodiments, one or two rows of second virtual floating electrodes are arranged sequentially along a first direction between two adjacent second touch electrodes.

[0023] After reading and understanding the accompanying diagrams and detailed descriptions, other aspects can be understood. Attached Figure Description

[0024] The accompanying drawings are provided to further illustrate the technical solutions of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the technical solutions of this disclosure and do not constitute a limitation on the technical solutions of this disclosure. The shapes and sizes of the components in the drawings do not reflect actual proportions and are only intended to illustrate the content of this disclosure.

[0025] Figure 1 This is a schematic diagram of the structure of the touch substrate provided in the embodiments of this disclosure;

[0026] Figure 2 for Figure 1 A schematic cross-sectional view of the AA' region of the central touch substrate;

[0027] Figure 3 for Figure 1 A schematic diagram of the cross-sectional structure of the BB' region of the central touch substrate;

[0028] Figure 4 for Figure 1 Enlarged structural diagram of region C of the touch substrate;

[0029] Figure 5 This is a schematic diagram of the touch substrate structure after the first and second motherboards are assembled into a box.

[0030] Figure 6 A schematic diagram of the touch substrate structure after the first insulating layer has been formed;

[0031] Figure 7 A schematic diagram of the touch substrate structure after the formation of the first conductive layer;

[0032] Figure 8 This is a schematic diagram of the structure of the first conductive layer;

[0033] Figure 9 for Figure 8 A magnified structural diagram of region D in the middle;

[0034] Figure 10 A schematic diagram of a touch substrate structure after the formation of the second insulating layer;

[0035] Figure 11 A schematic diagram of a touch substrate structure after the formation of the second conductive layer;

[0036] Figure 12 for Figure 11 A schematic diagram of the planar structure of region E in the middle;

[0037] Figure 13 for Figure 12 A magnified structural diagram of region F in the middle;

[0038] Figure 14 This is a schematic flowchart illustrating the method for preparing a touch substrate according to an embodiment of the present disclosure. Detailed Implementation

[0039] The embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. Note that the implementation can be carried out in many different forms. Those skilled in the art will readily understand that the methods and content can be varied in many ways without departing from the spirit and scope of this disclosure. Therefore, this disclosure should not be construed as limited to the contents described in the following embodiments. Without conflict, the embodiments and features in the embodiments of this disclosure can be arbitrarily combined with each other.

[0040] Unless otherwise defined, the technical or scientific terms used in the embodiments of this disclosure shall have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms "first," "second," and similar terms used in the embodiments of this disclosure do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" indicate that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, but do not exclude other elements or objects.

[0041] In the embodiments of this disclosure, a transistor refers to a device that includes at least three terminals: a gate electrode, a drain electrode, and a source electrode. The transistor has a channel region between the drain electrode (drain electrode terminal, drain region, or drain electrode) and the source electrode (source electrode terminal, source region, or source electrode), and current can flow through the drain electrode, the channel region, and the source electrode. Note that in this specification, the channel region refers to the region through which current primarily flows.

[0042] In this specification, the first electrode can be the drain electrode and the second electrode can be the source electrode, or vice versa. In cases where transistors with opposite polarities are used or the current direction changes during circuit operation, the functions of the "source electrode" and "drain electrode" may sometimes be interchanged. Therefore, in this specification, the "source electrode" and "drain electrode" can be interchanged.

[0043] In this specification, "connection" includes the situation where constituent elements are connected together by a component having a certain electrical function. There are no particular limitations on the "component having a certain electrical function," as long as it enables the transmission and reception of electrical signals between the connected constituent elements. Examples of "components having a certain electrical function" include not only electrodes and wiring, but also switching elements such as transistors, resistors, inductors, capacitors, and other components with various functions.

[0044] This disclosure provides a touch substrate comprising an electrostatic transport layer, a first insulating layer, a first conductive layer, a second insulating layer, and a second conductive layer stacked sequentially, wherein: the first conductive layer includes a first touch electrode, the second conductive layer includes a second touch electrode and a second virtual electrode that are mutually insulated from each other, the second virtual electrode being electrically connected to the electrostatic transport layer through a via penetrating the first and second insulating layers; and / or, the first conductive layer further includes a plurality of mutually insulated first virtual electrodes, the first virtual electrodes being mutually insulated from the first touch electrode.

[0045] The touch substrate provided in this embodiment effectively reduces the storage of static charge in the virtual electrode by connecting the second virtual electrode to the electrostatic transport layer, which is beneficial for discharging static charge and thus solves the problems of abnormal display of liquid crystal display panel caused by static electricity and the generation of shadows by the shredded virtual electrode.

[0046] The technical solutions of this disclosure are described in detail below through specific embodiments.

[0047] Figure 1 This is a schematic diagram of the structure of a touch substrate according to an embodiment of the present disclosure. Figure 2 for Figure 1 A cross-sectional view of the AA' region of the central touch substrate. Figure 3 for Figure 1 A cross-sectional structural diagram of the BB' region of the central touch substrate, as shown below. Figure 1 , Figure 2 and Figure 3 As shown, the touch substrate of this embodiment includes a substrate and an electrostatic transport layer 30, a first insulating layer 40, a first conductive layer 50, a second insulating layer 60 and a second conductive layer sequentially stacked on the substrate.

[0048] The first conductive layer 50 includes a first touch electrode 51, and the second conductive layer includes a second touch electrode 70 and a second virtual electrode 71 that are insulated from each other. The second virtual electrode 71 is electrically connected to the electrostatic transport layer 30 through a via penetrating the first insulating layer 40 and the second insulating layer 60.

[0049] In some exemplary embodiments, such as Figure 8 As shown, the first conductive layer 50 may further include a plurality of mutually insulated first virtual electrodes 52, and the first virtual electrodes 52 are mutually insulated from the first touch electrode 51.

[0050] In some exemplary embodiments, such as Figure 9 As shown, the first virtual electrode 52 may include a first virtual main electrode 520 and a first virtual floating electrode 521. The first virtual floating electrode 521 is disposed between the first virtual main electrode 520 and the first touch electrode 51. The first virtual main electrode 520, the first virtual floating electrode 521 and the first touch electrode 51 are mutually insulated.

[0051] In some exemplary embodiments, such as Figure 1 As shown, the first touch electrode 51 may include multiple first sub-electrodes arranged sequentially at intervals along a first direction.

[0052] The second touch electrode 70 may include multiple second sub-touch electrodes, and the second virtual electrode 71 may include multiple second sub-virtual electrodes. At least one second sub-touch electrode and at least one second sub-virtual electrode are arranged in parallel and spaced apart along the second direction and are electrically isolated from each other.

[0053] In some exemplary embodiments, such as Figure 4 As shown, the first sub-electrode, the second sub-virtual electrode, and the second sub-touch electrode can all be mesh structures, and the width of the second sub-touch electrode in the second direction is greater than the width of the second sub-virtual electrode in the second direction.

[0054] In some exemplary embodiments, such as Figure 12 and Figure 13 As shown, each second sub-virtual electrode may include a second virtual main electrode 710 and multiple second virtual floating electrodes 711 that are disconnected from each other. The multiple second virtual floating electrodes 711 are disposed between the second virtual main electrode 710 and the second touch electrode 70. The second virtual main electrode 710, the second virtual floating electrode 711 and the second touch electrode 70 are mutually insulated from each other.

[0055] In some exemplary embodiments, such as Figure 13 As shown, one or two rows of second virtual floating electrodes 711 can be arranged sequentially along the first direction between two adjacent second touch electrodes 70.

[0056] In some exemplary embodiments, the electrostatic transport layer 30 can be made of a high-resistivity indium tin oxide thin film with added conductive particles. For example, the high resistance corresponds to a resistance value range of 10. 7 ~10 13 Ω (ohm), the materials used to make conductive particles can include gold, silver, aluminum, etc.

[0057] In some exemplary embodiments, the materials of the first insulating layer 40 and the second insulating layer 60 may be any one or a combination of two of silicon oxynitride (SiNxOy) or silicon dioxide (SiO2).

[0058] The technical solution of this disclosure is further illustrated below through the fabrication process of the touch substrate according to an embodiment of this disclosure. The "patterning process" mentioned in this embodiment includes processes such as film deposition, photoresist coating, mask exposure, development, etching, and photoresist stripping. The "photolithography process" mentioned in this disclosure includes processes such as film coating, mask exposure, and development, which are mature fabrication processes in related technologies. Deposition can employ known processes such as sputtering and chemical vapor deposition; coating can employ known coating processes; and etching can employ known methods; no specific limitations are made here.

[0059] (1) Form the first mother plate 10 and the second mother plate 20 respectively.

[0060] In some exemplary embodiments, a first motherboard 10 is formed by depositing a gate, a gate data line, a gate insulating layer, an active layer, a source / drain electrode layer, a pixel electrode layer, and a data line on a substrate; and a second motherboard 20 is formed by depositing a color pixel layer, a protective layer, a common electrode layer, and spacers on another substrate.

[0061] (2) An electrostatic transport layer 30 is formed on the second motherboard 20.

[0062] In some exemplary embodiments, an indium tin oxide (ITO) thin film can be deposited on the second substrate by methods such as coating, magnetron sputtering, thermal evaporation, or plasma-enhanced chemical vapor deposition (PECVD) to obtain the electrostatic transport layer 30.

[0063] In some exemplary embodiments, the electrostatic transport layer 30 is made of a high-resistivity ITO thin film with added conductive particles. For example, the high resistance corresponds to a resistance value range of 10. 7 ~10 13 Ω, the materials used to make the conductive particles include: gold, silver, aluminum, etc.

[0064] In some exemplary embodiments, the electrostatic transport layer may also be used as the first polarizer layer.

[0065] (3) Figure 5 As shown, the first motherboard 10 and the second motherboard 20 are assembled together, and liquid crystal is filled between the first motherboard 10 and the second motherboard 20.

[0066] In this embodiment, the electrostatic transport layer 30 is located on the side of the second motherboard 20 away from the first motherboard 10.

[0067] In some exemplary embodiments, step (3) may also be placed before step (2), that is, the first motherboard 10 and the second motherboard 20 are first assembled, and liquid crystal is filled between the first motherboard 10 and the second motherboard 20, and then an electrostatic transport layer 30 is formed on the side of the second motherboard 20 away from the first motherboard 10.

[0068] (4) A first insulating layer 40 is formed on the side of the electrostatic transport layer 30 away from the first mother plate 10, such as... Figure 6 As shown.

[0069] In this embodiment, the first insulating layer 40 can be formed by vapor deposition. The first insulating layer 40 can be made of a transparent material so that the touch substrate can be used in a touch-integrated display panel.

[0070] (5) A pattern of the first conductive layer 50 is formed on the side of the first insulating layer 40 away from the electrostatic transport layer 30. Forming the pattern of the first conductive layer 50 may include: depositing a first conductive film on the first insulating layer 40, coating with photoresist, exposing and developing the photoresist, and finally etching the first conductive film to form the pattern of the first conductive layer 50, such as... Figure 7 and Figure 8 As shown.

[0071] In some exemplary embodiments, the first conductive film may be a metallic material or a transparent conductive material, such as indium tin oxide (ITO), indium zinc oxide (IZO), carbon nanotubes, or graphene.

[0072] like Figure 7 As shown, the first conductive layer 50 may include a first touch electrode 51, which may include multiple first sub-electrodes arranged sequentially at intervals along a first direction.

[0073] In some exemplary embodiments, the first sub-electrode may be a mesh-like structure.

[0074] like Figure 8 As shown, in some exemplary embodiments, the first conductive layer 50 may further include a plurality of mutually insulated first virtual electrodes 52, which are mutually insulated from the first touch electrode 51.

[0075] like Figure 9 As shown, in some exemplary embodiments, the first virtual electrode 52 may include a first virtual main electrode 520 and a first virtual floating electrode 521. The first virtual floating electrode 521 is disposed between the first virtual main electrode 520 and the first touch electrode 51, and the first virtual main electrode 520, the first virtual floating electrode 521 and the first touch electrode 51 are mutually insulated.

[0076] (6) A pattern of a second insulating layer 60 is formed on the side of the first conductive layer 50 away from the first insulating layer 40.

[0077] In this embodiment, the pattern of the second insulating layer 60 can be formed by vapor deposition. For example... Figure 10 As shown, the second insulating layer 60, located above the first conductive layer 50 and the first insulating layer 40, is provided with at least one via 61. The via 61 penetrates the first insulating layer 40 and the second insulating layer 60, exposing the electrostatic transport layer 30. The second insulating layer 60 can be made of a transparent material so that the touch substrate can be used in a touch-integrated display panel.

[0078] In some exemplary embodiments, the materials of the first insulating layer 40 and the second insulating layer 60 may be any one or a combination of two of silicon oxynitride (SiNxOy) or silicon dioxide (SiO2).

[0079] (7) A pattern of a second conductive layer is formed above the second insulating layer 60. The formation of the pattern of the second conductive layer may include: depositing a second conductive film on the second insulating layer 60, coating photoresist, exposing and developing the photoresist, and finally etching the second conductive film to form the pattern of the second conductive layer.

[0080] In some exemplary embodiments, the second conductive film may be made of a metallic material or a transparent conductive material, such as indium tin oxide (ITO), indium zinc oxide (IZO), carbon nanotubes, or graphene.

[0081] In some exemplary embodiments, such as Figure 1 , Figure 11 and Figure 12 As shown, the second conductive layer may include: a second touch electrode 70 and a second virtual electrode 71 that are insulated from each other. The second touch electrode 70 may include multiple second sub-touch electrodes, and the second virtual electrode 71 may include multiple second sub-virtual electrodes. At least one second sub-touch electrode and at least one second sub-virtual electrode are arranged in parallel and spaced apart along the second direction and are electrically isolated from each other.

[0082] In some exemplary embodiments, the first direction intersects the second direction. For example, the first direction and the second direction may be perpendicular to each other.

[0083] In some exemplary embodiments, a second sub-virtual electrode is provided between every two adjacent second sub-touch electrodes, and a second sub-touch electrode is provided between every two adjacent second sub-virtual electrodes.

[0084] In some exemplary embodiments, the second sub-virtual electrode is connected to the electrostatic transport layer 30 through a via 61 on the second insulating layer 60 and the first insulating layer 40.

[0085] In some touch substrate technologies, multiple first cuts are designed into the grid structure of the virtual electrodes, cutting the virtual electrodes into multiple unconnected rhombuses. With this design, when the film is peeled off from the touch substrate surface, the static electricity generated is stored in the virtual electrodes and cannot be discharged, thus affecting the rotation of liquid crystal molecules in the display panel, ultimately resulting in abnormal display defects. Other touch substrate technologies design multiple second cuts into the grid structure of the virtual electrodes, breaking the complete rhombuses of the virtual electrodes into individual cross shapes to reduce the possibility of charge storage. However, this introduces two problems: first, it produces ghosting, meaning that the outline of the virtual electrode pattern is clearly visible from the outside in normal environments or under strong light when the backlight module is not lit; second, even after the rhombuses are broken, the virtual electrodes remain in a suspended state, and the static charge on the virtual electrodes still cannot be discharged. When the static charge accumulates to a certain level, it still cannot be discharged, so the problem of static display defects can only be improved, not solved.

[0086] This embodiment of the invention effectively reduces the storage of induced static charge in the virtual electrodes by setting multiple complete second sub-virtual electrodes and connecting them to the second sub-virtual electrodes through the electrostatic transport layer 30. This facilitates the discharge of static charge and solves the problems of abnormal display of the liquid crystal display panel caused by static electricity and the ghosting caused by fragmented virtual electrodes. In addition, the touch substrate of this embodiment has low mutual capacitance and low RC delay, making it compatible with various active pens. Since the static electricity on the virtual electrodes is discharged in time, the signal of the active pen will not be absorbed by the virtual electrodes, and the performance of the active pen will not be affected.

[0087] In some exemplary embodiments, both the second sub-virtual electrode and the second sub-touch electrode can be a mesh structure, with each mesh in the second sub-virtual electrode and the second sub-touch electrode remaining intact and not cut, and the width of the second sub-touch electrode in the second direction being greater than the width of the second sub-virtual electrode in the second direction.

[0088] like Figure 13 As shown, in some exemplary embodiments, each second sub-virtual electrode may include a second virtual main electrode 710 and a plurality of mutually disconnected second virtual floating electrodes 711. The plurality of second virtual floating electrodes 711 are disposed between the second virtual main electrode 710 and the second touch electrode 70, and the second virtual main electrode 710, the second virtual floating electrode 711 and the second touch electrode 70 are mutually insulated from each other.

[0089] In this embodiment, by setting multiple mutually disconnected second virtual floating electrodes 711 between the second virtual main electrode 710 and the second touch electrode 70, a connection can be avoided when electrostatic breakdown occurs between the second virtual electrode 71 and the second touch electrode 70.

[0090] like Figure 13 As shown, in some exemplary embodiments, one or two rows of second virtual floating electrodes 711 are arranged sequentially along a first direction between two adjacent second touch electrodes 70.

[0091] In actual manufacturing processes, if the number of rows of the second virtual floating electrodes 711 is too small (i.e., too few cuts; in this disclosure, a cut refers to the break between two adjacent, mutually insulated electrodes), the etching solution tends to accumulate in areas such as... Figure 12 The diamond-shaped square shown cannot be filled, causing over-etching; conversely, if the number of columns of the second virtual floating electrode 711 is too large (i.e., too many cuts), it will cause the problem of shadow removal. Therefore, in this embodiment of the present disclosure, by setting one or two columns of second virtual floating electrodes 711 arranged sequentially along the first direction between two adjacent second touch electrodes 70, the problems of over-etching and shadow removal can be avoided at the same time.

[0092] (8) Cut the first and second motherboards after the box-making process into liquid crystal display panels, and bind the flexible circuit board to the bonding area;

[0093] In this embodiment, a portion of the array substrate extends beyond the edge of the cell substrate, and a bonding area is provided in the region extending beyond the cell substrate, electrically connecting the flexible circuit board providing the drive signal to the signal line of the bonding area.

[0094] In some exemplary embodiments, the bonding area includes a grounding wire. After the flexible circuit board is bonded to the bonding area, the electrostatic discharge layer 30 is connected to the grounding wire of the bonding area. By connecting the electrostatic discharge layer 30 to the grounding wire of the bonding area, static electricity in the second virtual electrode 71 can be directly discharged to ground, solving the problem of electrostatic discharge.

[0095] In some exemplary embodiments, the electrostatic transport layer 30 can also be used as an electromagnetic shielding layer. In this case, the electrostatic transport layer 30 can shield the display signal and the touch signal from each other, thereby enhancing the noise immunity of the overall touch display substrate.

[0096] (9) Attach a polarizer (POL) 80 to the outside of the liquid crystal display panel and assemble the backlight module.

[0097] In this embodiment, the polarizer 80 is made of a high-resistivity POL film.

[0098] In this embodiment of the disclosure, "high resistance" refers to a larger resistance value. For example, the resistance value range corresponding to "high resistance" can be 10. 7 ~10 13 Ω (ohms), low resistance refers to a smaller resistance value. For example, the resistance value range corresponding to low resistance can be 10. 3 ~107 ohm.

[0099] In some technologies, touch substrates use low-resistivity POL films to fabricate polarizers 80. While low-resistivity POL films easily discharge static electricity, they are costly and have limited suppliers. In this embodiment, a high-resistivity ITO film and a high-resistivity POL film are used instead of a low-resistivity POL film. High-resistivity POL films are low-cost and have a low load on touch signals, improving touch sensitivity and reducing IC debugging difficulty. The touch substrate in this embodiment discharges static electricity by adding conductive particles to the high-resistivity ITO film, allowing the use of a high-resistivity POL film to fabricate the polarizer 80. This solves both the problem of high load associated with low-resistivity POL films and the issues of high cost and limited suppliers.

[0100] As can be seen from the above preparation process, the touch substrate provided in this embodiment of the present disclosure, by connecting the second virtual electrode 71 to the electrostatic transport layer 30, effectively reduces the storage of induced static charge in the virtual electrode, which is conducive to the discharge of static charge, thereby solving the problems of abnormal display of liquid crystal display panel caused by static electricity and the generation of shadows by the shredded virtual electrode.

[0101] The structure and fabrication process of the touch substrate disclosed herein are merely illustrative. In the exemplary embodiments, the corresponding structure and patterning processes can be modified and increased or decreased according to actual needs. For example, a display substrate may be omitted, and the touch substrate may be directly disposed on the substrate. This disclosure is not intended to limit the scope of the invention.

[0102] This disclosure also provides a touch device, including the touch substrate described above.

[0103] It should be noted that the type of touch device is not limited in the embodiments disclosed herein. It may be a liquid crystal display device, an organic light-emitting diode (OLED) display device, other types of display devices, or simply a touch device.

[0104] When the touch device is a liquid crystal display (LCD) device, the LCD device includes an array substrate and a cell substrate. The array substrate includes thin-film transistors (TFTs) and pixel electrodes. The color filter layer can be disposed on either the array substrate or the cell substrate. In this case, the touch substrate can be either the array substrate or the cell substrate. When the touch device is an OLED display device, the OLED display device includes an array substrate and an encapsulation substrate. The array substrate can include TFTs, an anode electrically connected to the drain of the TFTs, a cathode, and an organic material functional layer. In this case, the touch substrate can be either the array substrate or the encapsulation substrate.

[0105] The touch device provided in this embodiment effectively reduces the storage of static charge in the virtual electrode by connecting the second virtual electrode to the electrostatic transport layer, which is beneficial for the discharge of static charge.

[0106] This disclosure provides a method for preparing a touch substrate, such as... Figure 8 As shown, the method for preparing the touch substrate according to this embodiment includes the following steps:

[0107] Step S1: Form an electrostatic transport layer on the substrate;

[0108] Step S2: A first insulating layer is formed on the side of the electrostatic transport layer away from the substrate.

[0109] Step S3: A first conductive layer is formed on the side of the first insulating layer away from the electrostatic transport layer, the first conductive layer including a first touch electrode;

[0110] Step S4: A second insulating layer is formed on the side of the first conductive layer away from the first insulating layer, and a plurality of vias are formed on the second insulating layer, wherein the vias penetrate the second insulating layer and the first insulating layer;

[0111] Step S5: A second conductive layer is formed on the side of the second insulating layer away from the first conductive layer. The second conductive layer includes a second touch electrode and a second virtual electrode that are insulated from each other. The second virtual electrode is electrically connected to the electrostatic transport layer through the via.

[0112] In some exemplary embodiments, the first touch electrode includes a plurality of first sub-electrodes arranged sequentially at intervals along a first direction;

[0113] The second touch electrode includes multiple second sub-touch electrodes, and the second virtual electrode includes multiple second sub-virtual electrodes. At least one second sub-touch electrode and at least one second sub-virtual electrode are arranged in parallel and spaced apart along the second direction and are electrically isolated from each other.

[0114] In some exemplary embodiments, the first sub-electrode, the second sub-virtual electrode, and the second sub-touch electrode are all mesh-like structures, and the width of the second sub-touch electrode in the second direction is greater than the width of the second sub-virtual electrode in the second direction.

[0115] In some exemplary embodiments, each of the second sub-virtual electrodes includes a second virtual main electrode and a plurality of mutually disconnected second virtual floating electrodes, the plurality of second virtual floating electrodes being disposed between the second virtual main electrode and the second touch electrode, and the second virtual main electrode, the second virtual floating electrodes and the second touch electrode being mutually insulated from each other.

[0116] In some exemplary embodiments, one or two rows of second virtual floating electrodes are arranged sequentially along a first direction between two adjacent second touch electrodes.

[0117] The method for preparing a touch substrate provided in this disclosure effectively reduces the storage of static charge in the virtual electrode by connecting the second virtual electrode to the electrostatic transport layer, which is beneficial for discharging static charge and thus solves the problems of abnormal display of liquid crystal display panel caused by static electricity and the generation of shadows by the shredded virtual electrode.

[0118] The following points need to be explained:

[0119] The accompanying drawings of the embodiments disclosed herein only relate to the structures involved in the embodiments of this disclosure; other structures can be referred to in a general design.

[0120] Where there is no conflict, the embodiments of this disclosure, i.e., the features in the embodiments, can be combined with each other to obtain new embodiments.

[0121] While the embodiments disclosed herein are as described above, the content is merely for the purpose of facilitating understanding of this disclosure and is not intended to limit this disclosure. Any person skilled in the art to which this disclosure pertains may make any modifications and changes in the form and details of the implementation without departing from the spirit and scope disclosed herein; however, the scope of patent protection of this disclosure shall still be determined by the scope defined in the appended claims.

Claims

1. A touch substrate, comprising a substrate substrate and an electrostatic transmission layer, a first insulating layer, a first conductive layer, a second insulating layer and a second conductive layer sequentially stacked on the substrate substrate, wherein: the first conductive layer comprises a first touch electrode, the second conductive layer comprises a second touch electrode and a second dummy electrode insulated from each other, and the second dummy electrode is electrically connected to the electrostatic transmission layer through a via hole penetrating through the first insulating layer and the second insulating layer; and / or, the first conductive layer further comprises a plurality of first dummy electrodes insulated from each other, and the first dummy electrodes are insulated from the first touch electrode; the second touch electrode comprises a plurality of second sub-touch electrodes, and the second dummy electrode comprises a plurality of second sub-dummy electrodes, each of the second sub-dummy electrodes comprises a second dummy main electrode and a plurality of second dummy floating electrodes insulated from each other, the plurality of second dummy floating electrodes are arranged between the second dummy main electrode and the second touch electrode, and the second dummy main electrode, the second dummy floating electrodes and the second touch electrode are insulated from each other. the first touch electrode comprises a plurality of first sub-electrodes arranged in a first direction; at least one of the second sub-touch electrodes and at least one of the second sub-dummy electrodes are arranged in parallel in a second direction and are electrically isolated from each other. the first sub-electrodes, the second sub-dummy electrodes and the second sub-touch electrodes are in a grid structure, and a width of the second sub-touch electrodes in the second direction is greater than a width of the second sub-dummy electrodes in the second direction. two adjacent second touch electrodes are provided with one or two columns of second dummy floating electrodes arranged in the first direction. 2.The touch substrate of claim 1, wherein, 6.The touch substrate of claim 1, further comprising a substrate substrate comprising an array substrate and an opposing substrate arranged in a cell-to-cell manner, the substrate substrate comprising a binding area comprising a ground line, and the electrostatic transmission layer is connected to the ground line of the binding area. 7.A touch device, comprising a substrate substrate comprising an array substrate and an opposing substrate arranged in a cell-to-cell manner and a touch substrate arranged on the substrate substrate, the touch substrate being the touch substrate of any one of claims 1 to 6. 3.The touch substrate of claim 2, wherein, 8.A method for manufacturing a touch substrate, the method comprising: forming an electrostatic transmission layer on a substrate substrate; forming a first insulating layer on a side of the electrostatic transmission layer away from the substrate substrate; forming a first conductive layer on a side of the first insulating layer away from the electrostatic transmission layer, the first conductive layer comprising a first touch electrode; forming a second insulating layer on a side of the first conductive layer away from the first insulating layer, and forming a plurality of via holes on the second insulating layer, the via holes penetrating through the second insulating layer and the first insulating layer; and forming a second conductive layer on a side of the second insulating layer away from the first conductive layer, the second conductive layer comprising a second touch electrode and a second dummy electrode insulated from each other, and the second dummy electrode being electrically connected to the electrostatic transmission layer through the via holes. 4.The touch substrate of claim 2, wherein, ​ 5.The touch substrate of claim 1, wherein, The manufacturing material of the static electricity transmission layer is an indium tin oxide film with conductive particles, the resistance of the indium tin oxide film is 10 7 ohms, and the manufacturing material of the conductive particles includes any one or more of gold, silver and aluminum. 13 ohms, and the manufacturing material of the conductive particles includes any one or more of gold, silver and aluminum. ​ ​ ​ ​ ​ ​ ​ ​ The second touch electrode comprises a plurality of second sub touch electrodes, and the second virtual electrode comprises a plurality of second sub virtual electrodes.

9. The production method according to claim 8, wherein The first touch electrode comprises a plurality of first sub electrodes arranged in the first direction. At least one second sub touch electrode and at least one second sub virtual electrode are arranged in the second direction and are electrically isolated from each other.

10. The production method according to claim 9, wherein The first sub electrode, the second sub virtual electrode and the second sub touch electrode are all grid-shaped structures, and the width of the second sub touch electrode in the second direction is greater than the width of the second sub virtual electrode in the second direction.

11. The production method according to claim 9, wherein Two adjacent second touch electrodes are provided with one or two columns of second virtual floating electrodes arranged in the first direction.

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