A high-precision constant temperature device

Abstract

The application discloses a high-precision constant-temperature device, which comprises a water chiller, and the water outlet end of the water chiller is divided into two paths, wherein the first path is connected with the water inlet of a PID control water heater, and the second path is connected with the water inlet of a gas-liquid temperature exchanger; the water outlet of the PID control water heater is connected with the water inlet of a water coil pipe; the water outlet of the water coil pipe is connected with the water return end of the water chiller; the air inlet of the water coil pipe is connected with the air outlet of a fan; the air blown out of the air outlet of the water coil pipe is filtered by a high-efficiency filter and then enters a temperature control area; the water outlet of the gas-liquid temperature exchanger is connected with the water return end of the water chiller; the air inlet of the gas-liquid temperature exchanger is connected with a gas to be heated; and the gas output from the air outlet is conveyed to the temperature control area after being heated by a PID control gas pipeline heating wire. The application directly heats the gas pipeline after heat exchange, and does not directly heat water, thereby solving the problem that water temperature disturbs each other greatly; and directly heating the gas pipeline can also make the gas temperature control reaction faster.

Description

Technical Field

[0001] This invention relates to the field of temperature control in the semiconductor industry, specifically a high-precision constant temperature device. Background Technology

[0002] Existing high-precision constant temperature equipment generally only controls the air temperature. The basic working principle is that a chiller provides a constant temperature water supply, and the temperature controller controls the output power of the heater to control the water temperature in the chilled water coil, thereby exchanging heat with the air drawn in by the fan to achieve the required temperature control.

[0003] However, the demand for high-precision temperature control equipment in industries such as semiconductors now extends beyond just controlling ambient temperature; it also requires temperature control of other gases entering the temperature-controlled zone. Currently, some traditional methods for controlling the temperature of these gases involve separate water heating followed by heat exchange. This method has several problems: 1. Using water for heating causes significant fluctuations in the circulating water temperature, leading to substantial mutual influence between the two gases if the external temperature changes; 2. These other gases typically have low flow rates and require high precision, making gas-liquid exchange susceptible to significant radiation from external temperatures and slow response of the exchange water temperature; 3. These other gases may not be continuously supplied; if heating at their end stops, the ambient temperature will fluctuate drastically. Therefore, it is impossible to achieve precise and effective control over both ambient and other gas temperatures. Summary of the Invention

[0004] The purpose of this invention is to provide a high-precision constant temperature device to overcome the shortcomings of the existing technology.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows: a high-precision constant temperature device, including a chiller, wherein the outlet of the chiller is divided into two paths, wherein the first path is connected to the inlet of a PID-controlled water heater, and the second path is connected to the inlet of a gas-liquid temperature exchanger. The outlet of the PID-controlled water heater is connected to the inlet of a water coil. The outlet of the water coil is connected to the return water end of the chiller through a return circulation pipe. The air inlet of the water coil is connected to the air outlet of a fan. A filter is installed at the air outlet of the water coil. The air blown out of the air outlet of the water coil is filtered by the filter and then enters the temperature control zone. The outlet of the gas-liquid temperature exchanger is connected to the return water end of the chiller through a return circulation pipe. The air inlet of the gas-liquid temperature exchanger is connected to the gas to be heated. The gas output from the air outlet of the gas-liquid temperature exchanger is delivered to the temperature control zone after passing through the heating wire of the PID-controlled gas pipeline.

[0006] Furthermore, the water outlet of the chiller is equipped with an adjustable switching valve. The water flow rate is controlled by controlling the opening of the switching valve. A three-way valve or a diverter is provided at the rear end of the switching valve to divide the outflowing circulating water into two paths.

[0007] Furthermore, the chiller includes an evaporator, a condenser, a water tank, and a water pump. The internal circulating water in the water tank is cooled to a constant temperature range by the operation of the evaporator and condenser. The water pump is used to pump water out of the water tank.

[0008] Furthermore, the temperature control zone is equipped with a temperature sensor, and the temperature value detected by the temperature sensor is fed back to the PID-controlled water heater and the PID-controlled gas pipeline heating wire.

[0009] Furthermore, the PID-controlled water heater includes a first temperature acquisition module, a first temperature control module, and a water heater. The data collected by the temperature sensor is fed back to the first temperature acquisition module for data processing. The first temperature acquisition module transmits the data to the first temperature control module. The first temperature control module adjusts and controls the heating power of the water heater based on the set PID data.

[0010] Furthermore, the PID-controlled gas pipeline heating wire includes a second temperature acquisition module, a second temperature control module, and a gas heating wire. The data collected by the temperature sensor is fed back to the second temperature acquisition module for data processing. The second temperature acquisition module transmits the data to the second temperature control module. The second temperature control module adjusts and controls the heating power of the gas heating wire based on the set PID data.

[0011] Furthermore, in the PID-controlled gas pipeline heating wire, the gas heating wire is wound around the gas pipeline, and a heat insulation device is provided around the gas heating wire.

[0012] Furthermore, the PID-controlled water heater and the PID-controlled gas pipeline heating wire are equipped with high-temperature alarms, which will sound an alarm when the feedback temperature is higher than the set value.

[0013] Furthermore, the filter is a high-efficiency plate filter.

[0014] The beneficial effects of this invention are as follows: This invention uses a system of circulating water at the same temperature to exchange heat with other gases (such as nitrogen) to a constant air temperature. The temperature of this gas is then controlled by a temperature controller that regulates the heating output efficiency. This method directly heats the gas pipeline after heat exchange, thus solving the problem of large temperature fluctuations between water and gas. Direct heating of the gas pipeline also allows for a faster gas temperature control response. Further details:

[0015] (1) Since other gases and ambient temperature use the same circulating water, the change of external temperature can be reflected in advance during the gas-liquid exchange stage, reducing the impact of other gases on the change of external temperature. Since the ambient temperature is greatly affected by the change of external temperature, this scheme can effectively solve the contradiction caused by the smaller temperature control tolerance of other gases than that of the ambient temperature, but the external temperature affects both temperatures at the same time.

[0016] (2) Heating of other gases does not affect the internal circulating water, that is, temperature control of other gases will not affect the control of ambient temperature;

[0017] (3) Because the flow rate of other gases is relatively small, heating with heating wire can effectively avoid the problems of overheating and slow temperature control response.

[0018] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0019] Figure 1 This is a block diagram of the overall structure of a high-precision constant temperature device;

[0020] Figure 2 This is a schematic diagram of the working principle of a PID-controlled water heater for a high-precision constant temperature device.

[0021] Figure 3 This is a schematic diagram of the working principle of the PID control gas pipeline heating wire in a high-precision constant temperature equipment.

[0022] The diagram is labeled as follows: 1-Chiller, 2-PID controlled water heater, 3-Gas-liquid temperature exchanger, 4-PID controlled gas pipeline heating wire, 5-Water coil, 6-Fan, 7-Filter, 8-Return circulation pipeline, 9-Gas heating wire, 10-Gas pipeline, 11-Insulation device. Detailed Implementation

[0023] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments.

[0024] like Figures 1 to 3One embodiment of the present invention provides a high-precision constant temperature device, including a chiller 1. The chiller 1 has an adjustable-opening switch valve at its outlet. The water flow rate is controlled by adjusting the opening of the switch valve. A three-way valve or diverter is located at the rear end of the switch valve to divide the outflowing circulating water into two paths. The first path is connected to the inlet of a PID-controlled water heater 2, and the second path is connected to the inlet of a gas-liquid temperature exchanger 3. The outlet of the PID-controlled water heater 2 is connected to the inlet of a water coil 5. The water outlet is connected to the return water end of the chiller 1 through the return circulation pipe 8. The air inlet of the water coil 5 is connected to the air outlet of the fan 6. The air outlet of the water coil 5 is equipped with a filter 7. The air blown out of the air outlet of the water coil 5 enters the temperature control zone after being filtered by the filter 7. The water outlet of the gas-liquid temperature exchanger 3 is connected to the return water end of the chiller 1 through the return circulation pipe 8. The air inlet of the gas-liquid temperature exchanger 3 is connected to the sputum gas. The gas output from the air outlet of the gas-liquid temperature exchanger 3 is delivered to the temperature control zone after passing through the PID controlled gas pipeline heating wire 4.

[0025] In this embodiment, the temperature control zone is equipped with a temperature sensor, and the temperature value detected by the temperature sensor is fed back to the PID-controlled water heater 2 and the PID-controlled gas pipeline heating wire 4. The PID-controlled water heater 2 and the PID-controlled gas pipeline heating wire 4 are equipped with high-temperature alarms, which sound an alarm when the fed-back temperature exceeds a set value.

[0026] In this embodiment, in the PID-controlled gas pipeline heating wire 4, the gas heating wire 9 is wound around the gas pipeline 10, and a heat insulation device 11 is provided around the gas heating wire 9.

[0027] In this embodiment, the filter 7 can be a high-efficiency plate filter.

[0028] The working principle of this high-precision constant temperature equipment is as follows: First, the plant water is supplied to the chiller at a constant flow rate. The internal evaporator and condenser of the chiller work to cool the internal circulating water in the water tank to a constant temperature range. The water pump pumps the water out of the water tank. The water flow rate is controlled by the control switch. Then, the circulating water is divided into two paths by the diverter block.

[0029] The first circulating water stream first passes through a PID-controlled water heater. The working principle of PID-controlled water heating is as follows (e.g.) Figure 2Temperature sensors are placed in the temperature control zone. The data collected by the temperature sensors is fed back to the temperature acquisition module for data processing. The temperature acquisition module transmits the data to the temperature control module. After setting the PID data adjustment, the heating power of the water heater is controlled, thereby controlling the temperature of the water outlet from the heater. The heated circulating water then exchanges heat with the air brought in by the fan through the water coil. The heat-exchanged circulating water returns to the chiller water tank. The heat-exchanged air enters the temperature control zone after passing through the high-efficiency filter to remove impurities, thereby controlling the ambient temperature of the temperature control zone.

[0030] The second circulating water first passes through a gas-liquid temperature exchanger. The gas-liquid temperature exchanger has an internal spiral pipe design. Gas passes through the spiral pipe and exchanges heat with the circulating water in the exchanger pipe to a certain temperature range. Then it passes through a PID-controlled gas heating wire. The principle of PID-controlled gas heating wire is as follows (e.g.) Figure 3 The temperature sensor in the temperature control zone collects data and feeds it back to the temperature acquisition module for data processing. The temperature acquisition module then transmits the data to the temperature control module. After adjusting the PID data, the heating power of the heating wire is controlled. The gas is then heated to the required temperature by the heating wire and introduced into the temperature control zone.

[0031] The following analysis uses specific case studies to illustrate this point:

[0032] Taking one of our current devices as an example, the equipment requires that when the external ambient temperature is between 15-30 degrees Celsius and the nitrogen temperature in the plant is between 15-30 degrees Celsius, the internal ambient temperature be controlled at 24±0.1 degrees Celsius and the nitrogen temperature at 24±0.05 degrees Celsius. First, the plant water flow rate is controlled at 0.3-0.9 m³ / h, and the chiller outlet water temperature is controlled at 23±1 degrees Celsius (this varies depending on the internal and external temperatures of the chiller and the output power of the water heater). After pumping water, the circulating water flow rate is adjusted to 0.2-0.8 m³ / h via a switch (determined based on the fan airflow and nitrogen flow rate). The first circulating water, after being heated, has its temperature controlled between 22-26 degrees Celsius (this temperature adjustment is adjusted according to external temperature fluctuations due to radiation). It then enters the water coil and exchanges heat with the air. The second circulating water undergoes heat exchange through a water-liquid temperature exchanger, reducing its temperature to 23 ± 2 degrees Celsius. Nitrogen gas is then heated to 23 ± 1 degrees Celsius. The nitrogen gas is then heated to 23-25 ​​degrees Celsius by a PID heating wire (again, this temperature adjustment is adjusted according to external temperature fluctuations). This process controls the internal nitrogen and ambient temperatures to meet the equipment's required operating temperature.

[0033] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the above embodiments do not limit the scope of protection of the present invention in any way, and all technical solutions obtained by equivalent substitution or other means fall within the scope of protection of the present invention.

[0034] All parts not covered in this invention are the same as or can be implemented using existing technologies.

Claims

1. A high-precision constant-temperature device comprising a water chiller, characterized in that, The water outlet end of the water chiller is divided into two paths, wherein the first path is connected to the water inlet of the PID control water heater, and the second path is connected to the water inlet of the gas-liquid temperature exchanger; the water outlet of the PID control water heater is connected to the water inlet of the water coil; the air outlet of the water coil is connected to the air inlet of the fan through a return circulation pipeline; the air outlet of the water coil is provided with a filter; the air blown out of the air outlet of the water coil enters the temperature control area after being filtered by the filter; the water outlet of the gas-liquid temperature exchanger is connected to the water return end of the water chiller through a return circulation pipeline; the air inlet of the gas-liquid temperature exchanger is connected to the gas to be heated; and the gas outlet of the gas-liquid temperature exchanger is connected to the temperature control area after being heated by the PID control gas pipeline heating wire. The water outlet end of the water chiller is provided with an adjustable opening switch valve, the opening degree of which is controlled to control the water outlet flow; a three-way valve or a flow dividing block is arranged at the rear end of the switch valve to divide the circulating water into two paths. The water chiller comprises an evaporator, a condenser, a water tank and a water pump; the internal circulating water in the water tank is cooled to a constant temperature range through the evaporator and the condenser; and the water pump is used to pump the water in the water tank. The temperature control area is provided with a temperature sensor, and the temperature value detected by the temperature sensor is fed back to the PID control water heater and the PID control gas pipeline heating wire; the PID control water heater comprises a first temperature acquisition module, a first temperature control module and a water heater; the data collected by the temperature sensor is fed back to the first temperature acquisition module for data processing; the first temperature acquisition module transmits the data to the first temperature control module; and the first temperature control module controls the heating power of the water heater through the set PID data; the PID control gas pipeline heating wire comprises a second temperature acquisition module, a second temperature control module and a gas heating wire; the data collected by the temperature sensor is fed back to the second temperature acquisition module for data processing; the second temperature acquisition module transmits the data to the second temperature control module; and the second temperature control module controls the heating power of the gas heating wire through the set PID data.

2. The high-precision constant-temperature device according to claim 1, characterized in that, In the PID control gas pipeline heating wire, the gas heating wire is wound on the gas pipeline, and a heat insulation device is arranged on the periphery of the gas heating wire.

3. The high-precision constant-temperature device according to claim 1, characterized in that, High temperature alarms are arranged on the PID control water heater and the PID control gas pipeline heating wire, and the high temperature alarms alarm when the feedback temperature is higher than the set value.

4. The high-precision constant-temperature device according to claim 1, characterized in that, The filter is a high-efficiency plate filter.

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