Sensors and electronic devices

Abstract

This invention provides a sensor and electronic device capable of improving accuracy. According to an embodiment, the sensor includes: a substrate including a first surface, the first surface including a first substrate region and a second substrate region; a first structure disposed in the first substrate region; a second structure disposed in the second substrate region; and a control device. The first structure includes a first movable member capable of vibration. The vibration of the first movable member includes a first component along a first direction and a second component along a second direction, the first component being along the first surface, and the second direction intersecting the first direction and being along the first surface. The second structure includes a second movable member capable of vibration. The control device includes a control unit capable of performing a processing action. The processing action includes outputting a second rotation angle obtained by correcting a first rotation angle of the first movable member based on the first and second components based on the resonant frequency of the second movable member.

Description

[0001] This application is based on Japanese Patent Application 2021-067538 (filed April 13, 2021), and enjoys priority benefits under that application. The entire contents of that application are incorporated herein by reference. Technical Field

[0002] Embodiments of the present invention relate to sensors and electronic devices. Background Technology

[0003] Sensors such as gyroscopes exist. In sensors and electronic devices, there is a desire to improve detection accuracy. Summary of the Invention

[0004] Embodiments of the present invention provide sensors and electronic devices that can improve accuracy.

[0005] Methods for solving problems

[0006] According to an embodiment of the present invention, a sensor includes: a substrate including a first surface, the first surface including a first substrate region and a second substrate region; a first structure disposed in the first substrate region; a second structure disposed in the second substrate region; and a control device. The first structure includes a first movable member capable of vibration. The vibration of the first movable member includes a first component along a first direction and a second component along a second direction, the first direction being along the first surface, and the second direction intersecting the first direction and along the first surface. The second structure includes a second movable member capable of vibration. The control device includes a control unit capable of performing a processing action. The processing action includes outputting a second rotation angle obtained by correcting a first rotation angle of the first movable member, based on the first component and the second component, based on the resonant frequency of the second movable member.

[0007] Based on the sensor structure described above, sensors and electronic devices that can improve accuracy can be provided. Attached Figure Description

[0008] Figure 1 (a) and Figure 1 (b) is a schematic diagram illustrating the sensor of the first embodiment.

[0009] Figure 2 (a)~ Figure 2 (d) is a schematic diagram illustrating the characteristics of the sensor according to the first embodiment.

[0010] Figure 3 This is a schematic diagram illustrating the sensor of the first embodiment.

[0011] Figure 4 (a)~ Figure 4(c) is a schematic top view illustrating a portion of the sensor according to the first embodiment.

[0012] Figure 5 (a) and Figure 5 (b) is a schematic diagram illustrating the sensor of the first embodiment.

[0013] Figure 6 This is a schematic diagram illustrating the sensor of the first embodiment.

[0014] Figure 7 (a)~ Figure 7 (c) is a schematic diagram illustrating the sensor of the first embodiment.

[0015] Figure 8 (a) and Figure 8 (b) is a schematic diagram illustrating the sensor of the first embodiment.

[0016] Figure 9 (a) and Figure 9 (b) is a schematic diagram illustrating the sensor of the first embodiment.

[0017] Figure 10 (a) and Figure 10 (b) is a schematic top view illustrating the sensor of the first embodiment.

[0018] Figure 11 This is a schematic cross-sectional view illustrating the sensor of the first embodiment.

[0019] Figure 12 This is a schematic cross-sectional view illustrating the sensor of the first embodiment.

[0020] Figure 13 This is a schematic diagram illustrating the electronic device of the second embodiment.

[0021] Figure 14 (a)~ Figure 14 (h) is a schematic diagram illustrating the application of an electronic device.

[0022] Explanation of reference numerals in the attached figures

[0023] 10…First movable member, 10E…Electrode, 10F…First fixed part, 10S…First connecting part, 11C, 12C…First and second conductive parts, 11E, 12E…First and second electrodes, 11sE, 12sE…First and second detection electrodes, 20E…Relative electrode, 20M…First relative electrode member, 20R…Resistor member, 21C, 22C…First and second relative conductive parts, 21E, 22E…First and second relative electrodes, 21sE, 22sE…First and second detection relative electrodes, 50…Second movable member, 50A, 50B…First and second movable bases, 50F…Second fixed part, 50M…Second relative electrode member, 50P… 1. Movable connection part, 50X… Movable part, 50a, 50b… Beams, 51, 52… First and second movable beams, 51E~56E… Electrodes, 51a, 51b, 52a, 52b… Movable parts, 60… Substrate, 60A, 60B… First and second structural bodies, 60a… Substrate, 60b… Insulating film, 60f… First surface, 61, 62… First and second substrate regions, 65… First housing, 65a~65d… First to fourth components, 66… Second housing, 70… Control device, 70M… Storage unit, 70s… Detection unit, 71, 72… First and second detection units, 74… Control unit, 75… Calculation unit, 75a… Time constant adjustment unit, 75b… Resonance frequency Adjustment section, 75c… Rotation angle derivation section, 75d… Resonance frequency detection section, 75e… Angle correction calculation section, 76… Driver section, ΔF… Second difference, ΔT… First difference, θ… Rotation angle, θv1, θv2… First and second rotation angles, 110, 111, 112, 120, 125… Sensors, 170… Circuit control section, 180… Circuit, 185… Drive device, 210… Sensor device, 310… Electronic device, D1, D2… First and second directions, DR1, DR2… Control signal output section, Dac1, Dac2… AC voltage output section, Ddc1, Ddc2… Voltage output section, Dmr1, Dmr2… Linear, Dp1, D… p2…Voltage output section, Lc1, Lc2, Lp1, Lp2, Lr1, Lr2…wiring, R1, R2…first and second resistors, S1…signal, SO…signal, SR1, SR2…control signals, SU1, SU2…first and second adders, Tmp1, Tmp2…temperature, Vac1, Vac2…first and second AC voltages, Vdc1, Vdc4…first and second voltages, Vp1, Vp2…voltages of the first and second relative conductors, Vs1, Vs2…first and second detection voltages, cp1, cp2…the other end of the first and second terminals, ep1, ep2…first and second terminals, fa1, fb1…resonance frequency, g1, g2…gap. Detailed Implementation

[0024] Hereinafter, various embodiments of the present invention will be described with reference to the accompanying drawings. Figure 1 Explanation follows.

[0025] The accompanying drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the ratio of the size between parts, etc., may not be the same as in reality. Even when representing the same part, there may be cases where the dimensions and ratios of each part are represented differently according to the accompanying drawings.

[0026] In this application specification and figures, the same reference numerals are used for elements that are the same as those mentioned above in the figures that have already appeared, and detailed descriptions are omitted where appropriate.

[0027] (First Embodiment)

[0028] Figure 1 (a) and Figure 1 (b) is a schematic diagram illustrating the sensor of the first embodiment.

[0029] Figure 1 (a) is Figure 1 (b) Sectional view along line A1-A2. Figure 1 (b) is a top view. For example... Figure 1 (a) and Figure 1 As shown in (b), the sensor 110 of the embodiment includes a base 60, a first structure 60A, a second structure 60B, and a control device 70.

[0030] The sensor 110 may also include a first housing 65. For example, the first housing 65 includes first to fourth members 65a to 65d. A base 60, a first structure 60A, and a second structure 60B are disposed between the first member 65a and the second member 65b. A base 60, a first structure 60A, and a second structure 60B are disposed between the third member 65c and the fourth member 65d. The interior of the first housing 65 can be depressurized to below one atmosphere. The control device 70 can be disposed inside or outside the first housing 65. The second to fourth members 65b to 65d can be continuous with each other. The first member 65a is, for example, a cover. Figure 1 In (b), the first shell 65 is omitted.

[0031] The substrate 60 includes a first surface 60f. The first surface 60f includes a first substrate region 61 and a second substrate region 62. The first surface 60f is, for example, the upper surface.

[0032] In this example, the substrate 60 includes a substrate 60a and an insulating film 60b. The substrate 60a may be, for example, a semiconductor substrate. The substrate 60a may be, for example, a silicon substrate. The insulating film 60b may comprise, for example, silicon oxide. The insulating film 60b is disposed on the substrate 60a. For example, the upper surface of the insulating film 60b corresponds to the first surface 60f.

[0033] A first component 60A is disposed in a first base region 61. A second component 60B is disposed in a second base region 62. The first component 60A is, for example, a sensor element. The first component 60A is, for example, a "gyroscope element". The first component 60A is, for example, a RIG (Rate Integrating Gyroscope).

[0034] The first structure 60A includes a first movable member 10. The first movable member 10 is capable of vibration. The vibration of the first movable member 10 includes a first component and a second component. The first component is a component along a first direction D1. The second component is a component along a second direction D2. The first direction D1 is along a first surface 60f. The second direction D2 intersects the first direction D1 and is along the first surface 60f.

[0035] Define the first face 60f as the XY plane. Define one direction within the XY plane as the X-axis. Define the direction along the XY plane and perpendicular to the X-axis as the Y-axis. Define the direction perpendicular to both the X-axis and Y-axis as the Z-axis. For example, the first direction D1 is the X-axis. For example, the second direction D2 is the Y-axis.

[0036] The second structure 60B includes a second movable member 50. The second movable member 50 is capable of vibration. The second movable member 50 has a resonant frequency fb1 (refer to...). Figure 1 (b)).

[0037] The control device 70 includes a control unit 74. The control unit 74 is capable of performing the following processing operations. The processing operations include outputting a second rotation angle θv2 obtained by correcting the first rotation angle θv1 of the first movable member 10, which is obtained based on the first component and the second component, based on the resonant frequency fb1 of the second movable member 50.

[0038] For example, the control unit 74 detects the amplitude of a first component and the amplitude of a second component of the vibration of the first movable member 10. The ratio of these amplitudes corresponds to a first rotation angle θv1. The control unit 74 includes a portion that derives the rotation angle of the first movable member 10 (e.g., a rotation angle deriving portion 75c). Data related to the derived first rotation angle θv1 is output from the rotation angle deriving portion 75c.

[0039] The control unit 74 includes a portion (e.g., a resonance frequency detection unit 75d) that detects the resonance frequency fb1 of the second movable member 50. The control unit 74 includes, for example, an angle correction calculation unit 75e. The resonance frequency detection unit 75d supplies the resonance frequency fb1 to the angle correction calculation unit 75e. The angle correction calculation unit 75e corrects the first rotation angle θv1 based on the detected resonance frequency fb1. The angle correction calculation unit 75e can output a signal SO corresponding to the second rotation angle θv2 obtained through correction.

[0040] For example, the rotation angle (first rotation angle θv1) of the first movable member 10 is obtained based on the vibration characteristics of the first movable member 10. The vibration characteristics of the first movable member 10 sometimes change due to temperature. In this embodiment, the rotation angle (first rotation angle θv1) of the first movable member 10 is corrected based on the resonant frequency fb1 of the second movable member 50. Therefore, the rotation angle can be detected with higher accuracy. According to this embodiment, a sensor capable of improving accuracy can be provided.

[0041] The control unit 74 includes a computer. The control unit 74 includes electronic circuitry. The control unit 74 may include, for example, a processor. The rotation angle derivation unit 75c, the resonant frequency detection unit 75d, and the angle correction calculation unit 75e included in the control unit 74 may, for example, be part of the processor. The rotation angle derivation unit 75c, the resonant frequency detection unit 75d, and the angle correction calculation unit 75e may be functional block elements within the processor. The processing in each of the rotation angle derivation unit 75c, the resonant frequency detection unit 75d, and the angle correction calculation unit 75e may be implemented by one or more processors.

[0042] In this embodiment, the second base region 62 can be continuous with the first base region 61. By providing the first structure 60A and the second structure 60B on a single base 60, the temperatures of these structures are easily made substantially the same. Because these structures have similar temperature characteristics, higher precision temperature correction can be implemented, resulting in greater accuracy.

[0043] In one embodiment, for example, the base 60, the first structure 60A, and the second structure 60B are disposed within the first housing 65. Therefore, the temperature of the first structure 60A is easily made substantially the same as the temperature of the second structure 60B. High-precision temperature correction can be achieved. By reducing pressure inside the first housing 65, for example, the influence of external temperature changes can be suppressed. Even higher accuracy can be obtained.

[0044] like Figure 1 (a) and Figure 1As shown in (b), the first structure 60A includes a first fixing part 10F and a first connecting part 10S. The first fixing part 10F is fixed to the first base region 61. The first connecting part 10S is supported by the first fixing part 10F. The first connecting part 10S is connected to the first movable member 10. In this example, in the XY plane, the first movable member 10 is disposed around the first fixing part 10F. The first movable member 10 is annular. The first movable member 10 is supported by a plurality of first connecting parts 10S. A gap g1 is provided between the first movable member 10 and the base 60. The first connecting part 10S has, for example, a bent shape. The first connecting part 10S may also have, for example, a meandering shape. The first connecting part 10S is, for example, a spring structure. The first connecting part 10S is deformable.

[0045] The second structure 60B includes a second fixing part 50F. The second fixing part 50F is fixed to the second base region 62. The second fixing part 50F supports the second movable member 50. A gap g2 is provided between the second movable member 50 and the second base region 62.

[0046] In some embodiments, for example, the second movable member 50 preferably comprises the same material as the first connecting portion 10S. Thus, the temperature characteristics of the second movable member 50 and the first connecting portion 10S are substantially the same. For example, the second movable member 50 and the first connecting portion 10S comprise silicon. For example, the second movable member 50 and the first connecting portion 10S may also contain impurities other than silicon (e.g., at least one selected from the group consisting of boron, phosphorus, and arsenic). The material of the first connecting portion 10S may be substantially the same as the material of the first movable member 10.

[0047] In this embodiment, for example, the rate of change of the elastic modulus of the second movable member 50 with respect to temperature is preferably substantially the same as the rate of change of the elastic modulus of the first connecting portion 10S with respect to temperature. For example, the rate of change of the elastic modulus of the second movable member 50 with respect to temperature is at least 0.99 times and less than 1.01 times that of the rate of change of the elastic modulus of the first connecting portion 10S with respect to temperature. The elastic modulus may be, for example, Young's modulus (e.g., longitudinal elastic modulus).

[0048] The first movable member 10 and the first connecting portion 10S are, for example, conductive. The second movable member 50 may be conductive.

[0049] like Figure 1As shown in (b), in this example, a plurality of second fixed portions 50F are provided. A second movable member 50 is provided between the plurality of second fixed portions 50F. For example, the second structure 60B includes a second opposing electrode member 50M. In this example, a plurality of second opposing electrode members 50M are provided. The vibration of the second movable member 50 can be controlled by these plurality of second opposing electrode members 50M. The vibration of the second movable member 50 can be controlled by applying a voltage to the second opposing electrode member 50M.

[0050] In this example, the second opposing electrode member 50M includes electrode 51E and electrode 52E. At least a portion of the second movable member 50 is disposed between electrode 51E and electrode 52E. In this example, the direction from electrode 52E to electrode 51E is along the Y-axis. The second movable member 50 is along the X-axis. For example, the second movable member 50 vibrates by applying a voltage (e.g., a voltage including an AC component) between electrode 51E and the second movable member 50. This voltage can be supplied from the control device 70. For example, the electrical signal generated between electrode 52E and the second movable member 50 is detected by electrode 52E. The resonant frequency fb1 of the second movable member 50 can be detected by this electrical signal.

[0051] Thus, the second structure 60B may include a plurality of second opposing electrode members 50M. The plurality of second opposing electrode members 50M correspond, for example, to electrodes 51E and 52E. At least a portion of the second movable member 50 is located between the plurality of second opposing electrode members 50M. In this example, a plurality of second fixing portions 50F are provided. The direction from one of the plurality of second fixing portions 50F to another of the plurality of second fixing portions 50F intersects the direction from one of the plurality of second opposing electrode members 50M (e.g., electrode 51E) to another of the plurality of second opposing electrode members 50M (e.g., electrode 52E). The direction from electrode 51E to electrode 52E and the extending direction of the second movable member 50 are arbitrary.

[0052] Sometimes the base 60 rotates about a third direction (e.g., the Z-axis direction) intersecting the first surface 60f. With respect to such rotation of the base 60, the resonant frequency fb1 of the second movable member 50 does not change. Alternatively, the rate of change of the resonant frequency fb1 of the second movable member 50 relative to the rotation of the base 60 about the third direction is less than the rate of change of the resonant frequency fb1 of the second movable member 50 relative to the displacement of the base 60 along the third direction. By using the resonant frequency fb1 of the second movable member 50 having such characteristics to correct the first rotation angle θv1, higher accuracy detection can be achieved.

[0053] like Figure 1 (a) and Figure 1As shown in (b), for example, the first structure 60A includes a first opposing electrode member 20M. In this example, a plurality of first opposing electrode members 20M are provided. The vibration of the first movable member 10 can be controlled by these plurality of first opposing electrode members 20M. The vibration of the first movable member 10 can be controlled by a voltage (e.g., a voltage including an AC component) applied to the first opposing electrode member 20M. The voltage is applied, for example, between the first opposing electrode member 20M and the first movable member 10.

[0054] Figure 2 (a)~ Figure 2 (c) is a schematic diagram illustrating the characteristics of the sensor according to the first embodiment.

[0055] Figure 2 (a) The horizontal axis represents the temperature Tmp1 of the first structure 60A. Temperature Tmp1 corresponds to the temperature of the first movable member 10 and the first connecting part 10S. Figure 2 (a) The vertical axis is the first rotation angle θv1 obtained about the first movable member 10. For example... Figure 2 As shown in (a), if the temperature Tmp1 changes, the first rotation angle θv1 changes.

[0056] Figure 2 (b) The horizontal axis is the temperature Tmp1 of the first structure 60A. Figure 2 (b) The vertical axis is the resonant frequency fa1 of the first movable member 10. For example... Figure 2 As shown in (b), if the temperature Tmp1 changes, the resonant frequency fa1 changes. This can be attributed to the fact that the characteristics (e.g., elastic modulus) of the first connecting part 10S change with the temperature Tmp1.

[0057] Figure 2 (c) The horizontal axis is the resonant frequency fa1 of the first structure 60A. Figure 2 (c) The vertical axis is the first rotation angle θv1. For example... Figure 2 As shown in (c), if the resonant frequency fa1 changes, the first rotation angle θv1 changes. This can be attributed to the fact that the characteristics (e.g., elastic modulus) of the first connecting part 10S change due to the change in temperature Tmp1, thereby changing the vibration characteristics of the first movable member 10.

[0058] Figure 2 The horizontal axis of (d) is the temperature Tmp2 of the second structure 60B. Temperature Tmp2 corresponds to the temperature of the second movable member 50. Figure 2 (d) The vertical axis is the resonant frequency fb1 of the second movable member 50. For example... Figure 2 As shown in (d), if the temperature Tmp2 changes, the resonant frequency fb1 changes. This can be attributed to the fact that the properties (e.g., elastic modulus) of the second movable member 50 change with the temperature Tmp2.

[0059] In this implementation, the first rotation angle θv1 is corrected based on the resonant frequency fb1. This results in a more accurate rotation angle. Variations in the first rotation angle θv1 caused by temperature changes are corrected using the resonant frequency fb1 of the second movable member 50. For example, in cases where the temperature changes over time, a highly accurate rotation angle can still be stably obtained.

[0060] In this embodiment, the absolute value of the temperature difference between the second structure 60B and the first structure 60A is less than or equal to the temperature of the first structure 60A. By making the temperatures of the two structures substantially the same, higher precision correction can be achieved.

[0061] As will be described later, when obtaining the rotation angle (first rotation angle θv1) of the first movable member 10, the vibration can also be controlled based on the time constant or resonant frequency of the vibration of the first movable member 10. Thus, the first rotation angle θv1 can be obtained with higher accuracy.

[0062] The following is an example of the first construct 60A.

[0063] Figure 3 This is a schematic diagram illustrating the sensor of the first embodiment.

[0064] like Figure 3 As shown, for example, the first structure 60A includes a first opposing electrode member 20M and a resistor member 20R. The first opposing electrode member 20M is opposite to the first movable member 10. For example, the first opposing electrode member 20M may include a first opposing electrode 21E and a second opposing electrode 22E. The resistor member 20R is electrically connected to the first opposing electrode member 20M. In this example, the resistor member 20R includes a first resistor R1 and a second resistor R2.

[0065] The control unit 74 is capable of performing the following first operation. The first operation includes, for example, a first acquisition operation and a first change operation. In the first acquisition operation, the control unit 74 acquires the first component and the second component of the vibration of the first movable member 10. For example, it acquires the amplitude of the first component of the vibration and the amplitude of the second component of the vibration.

[0066] In the first change operation, the control unit 74 changes the resistance of the resistor member 20R and the value of at least one of the following: the first absolute value of the difference (first difference ΔT) between the first time constant T1 of the first component and the second time constant T2 of the second component; and the second absolute value of the difference (second difference ΔF) between the first resonant frequency fr1 of the first component and the second resonant frequency fr2 of the second component. The resistance of the resistor member 20R includes at least one of the resistance of the first resistor R1 and the resistance of the second resistor R2. The voltage includes at least one of the voltage applied to the terminals of the first resistor R1 and the voltage applied to the terminals of the second resistor R2.

[0067] By keeping the difference between the time constant and the resonant frequency in the first component along the first direction D1 and the second component along the second direction D2 small, the first rotation angle θv1 of the first movable member 10 can be detected with higher accuracy.

[0068] The following is an example of the first change action.

[0069] like Figure 3 As shown, the first movable member 10 includes a plurality of electrodes 10E. One of the plurality of electrodes 10E corresponds to the first electrode 11E. Another of the plurality of electrodes 10E corresponds to the second electrode 12E.

[0070] The first structure 60A includes a plurality of opposing electrodes 20E. The plurality of opposing electrodes 20E are contained in a first opposing electrode member 20M. One of the plurality of opposing electrodes 20E corresponds to a first opposing electrode 21E. Another of the plurality of opposing electrodes 20E corresponds to a second opposing electrode 22E.

[0071] like Figure 3 As shown, in the first structure 60A, the first movable member 10 is supported by the first connecting portion 10S. Since the first connecting portion 10S is deformable, the position of the first movable member 10 can change. The change in position of the first movable member 10 includes, for example, a change in position within the XY plane. This change in position corresponds to vibration of the first movable member 10. Vibration includes a change in position within the XY plane. The first structure 60A is, for example, a MEMS (microelectromechanical systems) element.

[0072] The first fixed part 10F is disposed at the center of the first movable member 10 in the XY plane. The direction from the first electrode 11E to the first fixed part 10F intersects the direction from the second electrode 12E to the first fixed part 10F. The direction from the first electrode 11E to the center of the first movable member 10 in the XY plane intersects the direction from the second electrode 12E to the center of the first movable member 10 in the XY plane.

[0073] The first relative electrode 21E is opposite to the first electrode 11E. The second relative electrode 22E is opposite to the second electrode 12E. One of the plurality of relative electrodes 20E is opposite to one of the plurality of electrodes 10E. The relative directions include components along the XY plane.

[0074] In this example, the group including one of multiple opposing electrodes 20E and one of multiple electrodes 10E is in the form of a comb electrode.

[0075] The first resistor R1 includes a first end ep1 and a first other end cp1. The first other end cp1 is electrically connected to the first opposite electrode 21E. For example, the first end ep1 is electrically connected to the control device 70. In this example, the first other end cp1 is electrically connected to the first opposite electrode 21E via wiring Lr1.

[0076] In this example, a first adder SU1 is provided. One end of a wiring Lc1 is connected to one of the multiple inputs of the first adder SU1. The other end of wiring Lc1 is connected to the control device 70. A first AC voltage Vac1 (AC signal), described later, is supplied to another of the multiple inputs of the first adder SU1. The first terminal ep1 is electrically connected to the control device 70 via the first adder SU1 and wiring Lc1.

[0077] The second resistor R2 includes a second end ep2 and a second other end cp2. The second other end cp2 is electrically connected to the second opposite electrode 22E. For example, the second end ep2 is electrically connected to the control device 70. In this example, the second other end cp2 is electrically connected to the second opposite electrode 22E via wiring Lr2.

[0078] In this example, a second adder SU2 is provided. One end of a wiring Lc2 is connected to one of the multiple inputs of the second adder SU2. The other end of wiring Lc2 is connected to the control device 70. A second AC voltage Vac2 (AC signal), described later, is supplied to another of the multiple inputs of the second adder SU2. The second terminal ep2 is electrically connected to the control device 70 via the second adder SU2 and wiring Lc2.

[0079] At least one of the first resistor R1 and the second resistor R2 is a variable resistor. In this example, both the first resistor R1 and the second resistor R2 are variable resistors. The resistance of the first resistor R1 varies according to a control signal SR1 supplied to the first resistor R1. The resistance of the second resistor R2 varies according to a control signal SR2 supplied to the second resistor R2.

[0080] Integrated circuits can also be used as the first resistor R1 and the second resistor R2, for example. The first resistor R1 and the second resistor R2 can also be formed on the substrate 60 for fixing the first fixing part 10F.

[0081] The control device 70 includes a control unit 74. The control unit 74 includes, for example, an arithmetic unit 75 and a driver unit 76. For example, the calculation result in the arithmetic unit 75 is supplied to the driver unit 76. The driver unit 76 outputs various voltages, including electrical signals, based on the calculation result.

[0082] In this example, the driver unit 76 includes a control signal output unit DR1, a control signal output unit DR2, a voltage output unit Ddc1, and a voltage output unit Ddc2. The control unit 74 (e.g., the control signal output unit DR1) supplies a control signal SR1 to the first resistor R1. The control unit 74 (e.g., the control signal output unit DR2) supplies a control signal SR2 to the second resistor R2. The control unit 74 (e.g., the voltage output unit Ddc1) controls a first voltage Vdc1 at the first terminal ep1 of the first resistor R1. The control unit 74 (e.g., the voltage output unit Ddc2) controls a second voltage Vdc2 at the second terminal ep2 of the second resistor R2. Both the first voltage Vdc1 and the second voltage Vdc2 include a DC component.

[0083] For example, a capacitor element is formed by the first electrode 11E and the first opposite electrode 21E. A first resistor R1 is connected in series with the capacitor element. For example, a first variable resistor damper is formed by the first electrode 11E, the first opposite electrode 21E, and the first resistor R1. For example, the capacitance of the capacitor element formed by the first electrode 11E and the first opposite electrode 21E can also vary due to a first voltage Vdc1. For example, a first variable resistor damper is formed by the first electrode 11E, the first opposite electrode 21E, the first resistor R1, and the first voltage Vdc1.

[0084] For example, a capacitor element is formed by the second electrode 12E and the second opposite electrode 22E. A second resistor R2 is connected in series with the capacitor element. For example, a second variable resistor damper is formed by the second electrode 12E, the second opposite electrode 22E, and the second resistor R2. For example, the capacitance of the capacitor element formed by the second electrode 12E and the second opposite electrode 22E can also vary due to the second voltage Vdc2. For example, a second variable resistor damper is formed by the second electrode 12E, the second opposite electrode 22E, the second resistor R2, and the second voltage Vdc2.

[0085] These variable dampers enable the vibration characteristics of the first movable member 10 to be varied.

[0086] As already explained, the direction from the first electrode 11E to the center of the first movable member 10 in the XY plane intersects with the direction from the second electrode 12E to the center of the first movable member 10 in the XY plane. For example, the direction of displacement of the first movable member 10 when the first voltage Vdc1 changes intersects with the direction of displacement of the first movable member 10 when the second voltage Vdc2 changes. For example, when the first voltage Vdc1 changes, the position of the first movable member 10 changes along one of the X-axis and Y-axis directions. For example, when the second voltage Vdc2 changes, the position of the first movable member 10 changes along the other of the X-axis and Y-axis directions.

[0087] By using the first and second variable resistors as described above, the time constants of the X-axis component and the Y-axis component of the vibration can be controlled. Controlling the time constants allows for the provision of sensors with improved accuracy. Examples of time constant control will be described later.

[0088] As already explained, in this example, a first AC voltage Vac1 is input to the first adder SU1, and a second AC voltage Vac2 is input to the second adder SU2. For example, an AC voltage output section Dac1 and an AC voltage output section Dac2 are provided in the driver section 76 of the control unit 74.

[0089] A first AC voltage Vac1 is output from the AC voltage output section Dac1. The first AC voltage Vac1 is applied to the first end ep1 of the first resistor R1 via the first adder SU1. The first AC voltage Vac1 is then applied to the first opposite electrode 21E via the first resistor R1. The AC component of the first AC voltage Vac1 is applied between the first opposite electrode 21E and the first electrode 11E. As a result, the first movable member 10 vibrates, for example, along one direction according to the first AC voltage Vac1. This vibration direction includes, for example, a component of the first direction D1.

[0090] A second AC voltage Vac2 is output from the AC voltage output section Dac2. The second AC voltage Vac2 is applied to the second end ep2 of the second resistor R2 via the second adder SU2. The second AC voltage Vac2 is then applied to the second opposite electrode 22E via the second resistor R2. The AC component of the second AC voltage Vac2 is applied between the second opposite electrode 22E and the second electrode 12E. As a result, the first movable member 10 vibrates, for example, in another direction according to the second AC voltage Vac2. This vibration direction may include, for example, a component of the second direction D2.

[0091] Thus, the control unit 74 applies a first AC voltage Vac1 between the first electrode 11E and the first opposing electrode 21E, and applies a second AC voltage Vac2 between the second electrode 12E and the second opposing electrode 22E, causing the first movable member 10 to vibrate. The direction of vibration of the first movable member 10 includes a component of the first direction D1 and a component of the second direction D2.

[0092] If the first movable member 10, which is vibrating, rotates due to an external force, the vibration state changes. By detecting the change in the vibration state, the rotation angle θ can be detected. For example, the control unit 74 can cause the first movable member 10 to vibrate along the axial direction. For example, the control unit 74 can cause the axial direction to rotate.

[0093] like Figure 3 As shown, in this example, the first movable member 10 includes a first detection electrode 11sE and a second detection electrode 12sE. For example, the direction from the first electrode 11E to the first detection electrode 11sE (in this example, the X-axis direction) intersects the direction from the second electrode 12E to the second detection electrode 12sE (in this example, the Y-axis direction).

[0094] On the other hand, the first structure 60A (sensor element) includes a first detection relative electrode 21sE and a second detection relative electrode 22sE. The first detection relative electrode 21sE is opposite to the first detection electrode 11sE. The second detection relative electrode 22sE is opposite to the second detection electrode 12sE. The first detection relative electrode 21sE and the first detection electrode 11sE are, for example, comb-shaped electrodes. The second detection relative electrode 22sE and the second detection electrode 12sE are, for example, comb-shaped electrodes.

[0095] The control device 70 includes a first detection unit 71 and a second detection unit 72. The first detection unit 71 is electrically connected to a first detection electrode 21sE. The second detection unit 72 is electrically connected to a second detection electrode 22sE. The first detection unit 71 and the second detection unit 72 are contained within the detection unit 70s. For example, the operation of the first detection unit 71 and the second detection unit 72 can be performed by a single detection unit using a differential circuit or the like. Hereinafter, for simplicity, an example with two detection units will be described.

[0096] The first detection unit 71, for example, applies a first detection voltage Vs1 to the first detection electrode 21sE. A signal corresponding to the amplitude of vibration along the first direction D1 is detected through capacitive coupling between the first detection electrode 21sE and the first detection electrode 11sE. The second detection unit 72, for example, applies a second detection voltage Vs2 to the second detection electrode 22sE. A signal corresponding to the amplitude of vibration along the second direction D2 is detected through capacitive coupling between the second detection electrode 22sE and the second detection electrode 12sE.

[0097] The first detection unit 71 detects the first amplitude. The first amplitude is the amplitude of the first component of the vibration of the first movable member 10 along the first direction D1. The second detection unit 72 detects the second amplitude. The second amplitude is the amplitude of the second component of the vibration of the first movable member 10 along the second direction D2.

[0098] The amplitude detected by the first detection unit 71 and the second detection unit 72 is supplied to the calculation unit 75 of the control unit 74. The calculation unit 75 includes, for example, a part for deriving the rotation angle θ (e.g., rotation angle deriving unit 75c). Data related to the rotation angle θ (first rotation angle θv1) derived by the rotation angle deriving unit 75c is output as a signal from the control device 70 (e.g., control unit 74).

[0099] The control unit 74 is able to output a signal corresponding to the first rotation angle θv1 of the first movable member 10 based on the first component of the vibration along the first direction D1 and the second component of the vibration along the second direction D2.

[0100] As already explained, if the vibrating first movable member 10 rotates due to an external force, the vibration state changes. This change in vibration state can be considered, for example, as caused by the action of a Coriolis force. For example, the first movable member 10 vibrates via a spring mechanism (e.g., the first connecting part 10S). The first movable member 10 vibrating in the first direction D1 is subjected to a Coriolis force based on the rotational angular velocity Ω. As a result, a component of vibration along the second direction D2 is generated in the first movable member 10. The second detection unit 72 detects the amplitude of the vibration along the second direction D2. On the other hand, the first movable member 10 vibrating in the second direction D2 is subjected to a Coriolis force based on the rotational angular velocity Ω. As a result, a component of vibration along the first direction D1 is generated in the first movable member 10. The first detection unit 71 detects the amplitude of the vibration along the first direction D1. For example, the amplitude of the first component in the first direction D1 is set as "Ax", and the amplitude of the second component in the second direction D2 is set as "Ay". The rotation angle θ (the first rotation angle θv1) corresponds, for example, to tan... -1 (-Ay / Ax).

[0101] The control unit 74 obtains the first component from the first detection unit 71 and the second component from the second detection unit 72. Through calculations in the control unit 74, a signal corresponding to the first rotation angle θv1 is obtained.

[0102] Here, for example, when the first component of the first direction D1 and the second component of the second direction D2 are substantially the same when the first movable member 10 is not rotating, high accuracy can be considered to be obtained in the calculated rotation angle θ. However, for example, there may be cases where the amplitude of vibration along the two directions is not necessarily uniform due to deviations in the manufacturing process. Moreover, there may be cases where the amplitude of vibration becomes non-uniform due to changes in temperature, etc. In such cases, the detection accuracy can be considered to be low.

[0103] In one embodiment, for example, the control unit 74 of the control device 70 performs a first action. The first action is, for example, a correction action. Through the first action, for example, the vibration of the first movable member 10 can easily become uniform in the XY plane. A sensor capable of improving accuracy can be provided. At least a part of the first action is performed, for example, by a part of the calculation unit 75 of the control unit 74 (time constant adjustment unit 75a), etc.

[0104] In the first acquisition operation, the control unit 74 acquires the first component (amplitude) of the vibration of the first movable member 10 along the first direction D1 and the second component (amplitude) of the vibration of the first movable member 10 along the second direction D2.

[0105] As already explained, the control unit 74 changes the value of at least one of the resistor and the voltage in such a way that at least one of the first absolute value of the difference (first difference ΔT) between the first time constant T1 of the first component and the second time constant T2 of the second component is reduced, and the second absolute value of the difference (second difference ΔF) between the first resonant frequency fr1 of the first component and the second resonant frequency fr2 of the second component is reduced. In one example, the control unit 74 changes at least one of the resistance value of the first resistor R1, the resistance value of the second resistor R2, the first voltage Vdc1 of the first terminal ep1, and the second voltage Vdc2 of the second terminal ep2 in such a way that the absolute value of the difference in time constants (first difference ΔT) is reduced.

[0106] By performing the first change action, the absolute value of the time constant difference (first difference ΔT) decreases. As a result, the inhomogeneity of the vibration of the first movable member 10 in the XY plane is suppressed. Therefore, a sensor with improved accuracy can be provided.

[0107] For example, after the first change action, the first difference ΔT can be compared with a determined threshold. The process ends when the first difference ΔT is less than the threshold. When the first difference ΔT is above the threshold, the first acquisition action and the first change action can be repeated. The control unit 74 can also repeatedly perform the first action. For example, the first action can be a closed-loop, always-automatic action.

[0108] For example, the first component of the vibration of the first movable member 10, related to the first direction D1, has a first resonant frequency and a first time constant T1 (first decay time constant). The first time constant T1 is the time until the intensity Ap1 of the vibration becomes 1 / e of the intensity Ap1 in the state before decay. "e" is the base of the natural logarithm.

[0109] For example, the second component of the vibration of the first movable member 10, which is related to the second direction D2, has a second resonant frequency and a second time constant T2 (second decay time constant). The second time constant T2 is the time until the intensity Ap2 of the vibration becomes 1 / e of the intensity Ap2 in the state before decay.

[0110] The first time constant T1 can be changed, for example, by the value of the first resistor R1 or the first voltage Vdc1. The second time constant T2 can be changed, for example, by the value of the second resistor R2 or the second voltage Vdc2.

[0111] In this embodiment, at least one of the following is changed: the resistance value of the first resistor R1, the resistance value of the second resistor R2, the first voltage Vdc1 at the first end ep1, and the second voltage Vdc2 at the second end ep2. This reduces the first difference ΔT. Consequently, the non-uniformity of vibrations in the first direction D1 and the second direction D2 can be suppressed. According to this embodiment, the accuracy of detection can be improved.

[0112] For example, to Figure 3 The illustrated time constant adjustment unit 75a supplies a first component detected by the first detection unit 71 and a second component detected by the second detection unit 72. In the time constant adjustment unit 75a, a value that reduces the first difference ΔT is calculated for at least one of the first resistor R1, the second resistor R2, the first voltage Vdc1, and the second voltage Vdc2. The calculated result is supplied to the driver unit 76. Based on the calculated value, the driver unit 76 outputs a control signal SR1 for the first resistor R1, a control signal SR2 for the second resistor R2, the first voltage Vdc1, and the second voltage Vdc2. At least one of the control signals SR1, SR2, Vdc1, and Vdc2 is changed based on a value calculated in a manner that reduces the first difference ΔT.

[0113] On the other hand, the first component has a first resonant frequency fr1, and the second component has a second resonant frequency fr2. The first resonant frequency fr1 and the second resonant frequency fr2 are not always the same. The difference ΔF between the first resonant frequency fr1 and the second resonant frequency fr2 is not always zero. These resonant frequencies are affected by manufacturing deviations of the first structure 60A (sensor element), etc. Moreover, these resonant frequencies also vary with temperature.

[0114] In implementation, an action that reduces the difference (second difference ΔF) between the first resonant frequency fr1 and the second resonant frequency fr2 can also be performed (e.g., a second action). At least a portion of the second action is, for example, a portion of the calculation unit 75 of the control unit 74 (resonant frequency adjustment unit 75b, see reference 75b). Figure 3 The following describes an example of actions to reduce the difference in resonant frequencies.

[0115] For example, such as Figure 3 As shown, in the first structure 60A, the first opposing electrode member 20M may also include a first opposing conductive portion 21C and a second opposing conductive portion 22C. The first opposing conductive portion 21C is opposite to the first movable member 10. The second opposing conductive portion 22C is opposite to the first movable member 10. The direction from the first movable member 10 to the second opposing conductive portion 22C intersects the direction from the first movable member 10 to the first opposing conductive portion 21C.

[0116] like Figure 3 As shown, the first movable member 10 may also include a first conductive portion 11C and a second conductive portion 12C. A first opposing conductive portion 21C is opposite to the first conductive portion 11C. A second opposing conductive portion 22C is opposite to the second conductive portion 12C. In this example, the group of the first opposing conductive portion 21C and the first conductive portion 11C corresponds to a pair of parallel plate electrodes. The group of the second opposing conductive portion 22C and the second conductive portion 12C corresponds to a pair of parallel plate electrodes.

[0117] For example, the driver unit 76 includes a voltage output unit Dp1 and a voltage output unit Dp2. The voltage output unit Dp1 is connected to the first opposing conductive part 21C, for example, via wiring Lp1. The voltage output unit Dp2 is connected to the second opposing conductive part 22C, for example, via wiring Lp2. A first opposing conductive part voltage Vp1 is applied to the first opposing conductive part 21C by the voltage output unit Dp1. A second opposing conductive part voltage Vp2 is applied to the second opposing conductive part 22C by the voltage output unit Dp2.

[0118] The resonant frequency of the vibration of the first movable member 10 can be controlled by the first relative conductive part voltage Vp1 and the second relative conductive part voltage Vp2. For example, a first variable electric spring is formed by the first conductive part 11C, the first relative conductive part 21C, and the first relative conductive part voltage Vp1. For example, a second variable electric spring is formed by the second conductive part 12C, the second relative conductive part 22C, and the second relative conductive part voltage Vp2. The directions of these variable electric springs intersect each other.

[0119] For example, the direction of displacement of the first movable member 10 when the voltage Vp1 of the first relative conductive part changes intersects with the direction of displacement of the first movable member 10 when the voltage Vp2 of the second relative conductive part changes. By using multiple variable electric springs corresponding to displacements in multiple directions, the resonant frequency in any direction can be controlled.

[0120] As already explained, the first component obtained has a first resonant frequency fr1, and the second component obtained has a second resonant frequency fr2. The control unit 74 obtains the first component of the vibration amplitude along the first direction D1 and the second component of the vibration amplitude along the second direction D2. The control unit 74 changes at least one of the first relative conductive voltage Vp1 of the first relative conductive part 21C and the second relative conductive voltage Vp2 of the second relative conductive part 22C in a manner that reduces the absolute value (second absolute value) of the difference (second difference ΔF) between the first resonant frequency fr1 of the first component and the second resonant frequency fr2 of the second component.

[0121] This reduces the in-plane difference (second difference ΔF) of the resonant frequency, further improving accuracy.

[0122] For example, the second difference ΔF can also be compared with a predetermined threshold. If the second difference ΔF is less than the threshold, the process ends. If the second difference ΔF is above the threshold, the process returns to the acquisition operation described above and the operation of decreasing the second difference ΔF described above. The control unit 74 can also repeatedly perform such operations. For example, the operation of decreasing the second difference ΔF can be a closed-loop, always-automatic operation.

[0123] In the implementation, the first action, including the first acquisition action and the first modification action, can be repeatedly performed. For example, the control action to reduce the first difference ΔT and the control action to reduce the second difference ΔF can be performed in any order. For example, at least a portion of the control action to reduce the first difference ΔT and at least a portion of the control action to reduce the second difference ΔF can also be performed simultaneously.

[0124] In the implementation, by performing the first action described above (controlling to reduce at least one of the first absolute value of the first difference ΔT and the second absolute value of the second difference ΔF) in addition to the processing action of deriving the second rotation angle θv2 obtained by correcting the first rotation angle θv1 based on the resonance frequency fb1 of the second movable member 50, higher accuracy detection can be achieved.

[0125] For example, the vibration of the second movable member 50 may include a component in a third direction (e.g., the Z-axis direction) that intersects with the first surface 60f.

[0126] For example, at least one of the first absolute value of the first difference ΔT and the second absolute value of the second difference ΔF varies with temperature. The resonant frequency fb1 of the second movable member 50 also varies with temperature. In this embodiment, the control unit 74 may also correct for at least one of the temperature-varying first and second absolute values ​​based on the resonant frequency fb1 of the vibration of the second movable member 50. The corrected rotation angle can also be derived from these corrected values.

[0127] Figure 4 (a)~ Figure 4 (c) is a schematic top view illustrating a portion of the sensor according to the first embodiment.

[0128] These diagrams illustrate the second construct, 60B. For example... Figure 4 As shown in (a), the second structure 60B includes a second movable member 50, a second fixed part 50F, and a second opposing electrode member 50M. The second fixed part 50F is fixed to the second base region 62. The second fixed part 50F supports the second movable member 50. The second opposing electrode member 50M is opposite to the second movable member 50. In this example, the number of second fixed parts 50F is 1.

[0129] like Figure 4 As shown in (b), the second structure 60B may also include a plurality of second fixed portions 50F. At least a portion of the second movable member 50 is located between the plurality of second fixed portions 50F. The direction from one of the plurality of second fixed portions 50F to the other of the plurality of second fixed portions 50F intersects the direction from the second opposing electrode member 50M to the second movable member 50.

[0130] like Figure 4 (b) and Figure 4 As shown in (c), the second movable member 50 may also include multiple beams (beam 50a and beam 50b).

[0131] Figure 5 (a) Figure 5 (b) Figure 6 and Figure 7 (a)~ Figure 7(c) is a schematic diagram illustrating the sensor of the first embodiment.

[0132] Figure 5 (a) is a top view. Figure 5 (b) is Figure 5 (a) Sectional view along line X1-X2. Figure 6 This is a top view illustrating a portion of the sensor. Figure 7 (a) is Figure 6 Sectional view along lines A1-A2. Figure 7 (b) is Figure 6 Sectional view along lines B1-B2. Figure 7 (c) is Figure 6 Sectional view along line C1-C2.

[0133] like Figure 5 (a) and Figure 5 (b) As shown, in the example of the second structure 60B of the sensor in the embodiment, the second movable member 50 includes a second fixed portion 50F, a first movable base 50A, a first movable connecting portion 50P, a second movable base 50B, a first movable beam 51, and a second movable beam 52. The second fixed portion 50F is fixed to the base 60. The first movable base 50A is supported by the second fixed portion 50F. In this example, in the X-axis direction, the first movable base 50A is located between the second fixed portion 50F and the second movable base 50B. In the X-axis direction, the first movable connecting portion 50P is located between the first movable base 50A and the second movable base 50B. The first movable connecting portion 50P connects the second movable base 50B to the first movable base 50A.

[0134] The length of the first movable connecting portion 50P along the Y-axis is shorter than the length of the first movable base portion 50A along the Y-axis. The length of the first movable connecting portion 50P along the Y-axis is shorter than the length of the second movable base portion 50B along the Y-axis.

[0135] A portion of the first movable beam 51 is connected to a portion of the first movable base 50A. Other portions of the first movable beam 51 are connected to a portion of the second movable base 50B. A portion of the second movable beam 52 is connected to other portions of the first movable base 50A. Other portions of the second movable beam 52 are connected to other portions of the second movable base 50B. The first movable connecting portion 50P is located between the first movable beam 51 and the second movable beam 52 in the Y-axis direction.

[0136] A gap g2 is provided between the structure, which includes the first movable base 50A, the first movable connecting part 50P, the second movable base 50B, the first movable beam 51 and the second movable beam 52 and the base 60.

[0137] In this example, the second movable member 50 includes a movable portion 50X. The movable portion 50X is connected to the second movable base 50B. The second movable base 50B and the movable portion 50X are capable of rotational displacement in the XY plane about the first movable connecting portion 50P. The length of the movable portion 50X along the Y-axis is longer than the length of the second movable base 50B along the Y-axis. The movable portion 50X is a movable mass.

[0138] For example, when acceleration is applied to the second movable member 50, the movable part 50X displacement occurs. This applies a stress of either compression or tension to the first movable beam 51. Similarly, a stress of either compression or tension is applied to the second movable beam 52. Consequently, at the resonant frequency of the first movable beam 51, one side increases and the other decreases. At the resonant frequency of the second movable beam 52, the other side increases and decreases. Acceleration can be detected based on the difference between these resonant frequencies. By providing two such movable beams, rotational acceleration about the Z-axis can be detected with high sensitivity. For example, in acceleration detection, the acceleration can also be based on data stored in the storage unit 70M (see reference). Figure 6 The data was used to make corrections.

[0139] The sum of the resonant frequencies of the first movable beam 51 and the second movable beam 52 is unaffected by rotation, but is temperature-dependent. Based on the sum of these resonant frequencies, the first rotation angle θv1 of the first movable member 10 can be corrected to derive the second rotation angle θv2. This structure also improves accuracy.

[0140] like Figure 6 As shown, in this example, the second movable member 50 includes movable part 51a, movable part 51b, movable part 52a, and movable part 52b (see reference). Figure 7 (a)~ Figure 7 (c)).

[0141] In the Y-axis direction, the first movable beam 51 is located between the movable part 51a and the first movable connecting part 50P. The movable part 51b is located between the movable part 51a and the first movable beam 51. The movable part 51b connects the movable part 51a and the first movable beam 51. The length of the movable part 51b along the X-axis direction is shorter than the length of the movable part 51a along the X-axis direction. The length of the movable part 51b along the X-axis direction is shorter than the length of the first movable beam 51 along the X-axis direction. The movable part 51a can be displaced according to the displacement of the first movable beam 51.

[0142] In the Y-axis direction, the second movable beam 52 is located between the movable part 52a and the first movable connecting part 50P. The movable part 52b is located between the movable part 52a and the second movable beam 52. The movable part 52b connects the movable part 52a and the second movable beam 52. The length of the movable part 52b along the X-axis is shorter than the length of the movable part 52a along the X-axis. The length of the movable part 52b along the X-axis is shorter than the length of the second movable beam 52 along the X-axis. The movable part 52a can be displaced according to the displacement of the second movable beam 52.

[0143] like Figure 6 As shown, in this example, electrodes 51E to 54E are provided as multiple second opposing electrode members 50M. These electrodes enable the first movable beam 51 and the second movable beam 52 to vibrate. These electrodes also enable the detection of the resonant frequencies of the first movable beam 51 and the second movable beam 52.

[0144] Figure 8 (a) Figure 8 (b) Figure 9 (a) and Figure 9 (b) is a schematic diagram illustrating the sensor of the first embodiment.

[0145] Figure 8 (a) is a top view. Figure 8 (b) is Figure 8 (a) Sectional view along line X1-X2. Figure 9 (a) is a top view illustrating a portion of the sensor. Figure 9 (b) is Figure 9 (a) Sectional view along line Y1-Y2.

[0146] like Figure 8As shown in (a), in the second structure 60B of the sensor in this embodiment, the second movable member 50 includes a second fixed portion 50F, a first movable base 50A, a first movable connecting portion 50P, a second movable base 50B, a first movable beam 51, a second movable beam 52, and a movable portion 50X. In this example, the movable portion 50X includes protrusions and depressions protruding in the XY plane. As a plurality of second opposing electrode members 50M, in addition to electrodes 51E to 54E, electrodes 55E and 56E are also provided. A portion of the protrusions and depressions of the movable portion 50X forms a comb-shaped electrode with electrode 55E. Another portion of the protrusions and depressions of the movable portion 50X forms a comb-shaped electrode with electrode 56E. A portion of the plurality of protrusions provided on the movable portion 50X is arranged along a straight line Dmr1 passing through the first movable connecting portion 50P. Another portion of the plurality of protrusions provided on the movable part 50X are arranged along another straight line Dmr2 passing through the first movable connecting part 50P. Straight lines Dmr1 and Dmr2 are along the XY plane. Straight lines Dmr1 and Dmr2 intersect each other. The potentials of electrodes 55E and 56E are controlled. Therefore, the movable part 50X can be displaced (or vibrated) in a manner that allows it to rotate around the first movable connecting part 50P. In this example, acceleration can also be detected.

[0147] In this example, the second rotation angle θv2 can also be derived by correcting the first rotation angle θv1 of the first movable member 10 based on the sum of the resonant frequencies of the first movable beam 51 and the second movable beam 52. This structure also improves accuracy. Figure 6 and Figure 9 In example (a), the control device 70 is able to separate the dependence of the resonant frequency of the second movable member 50 on acceleration and the dependence of the resonant frequency of the second movable member 50 on temperature.

[0148] In one embodiment, for example, a movable body (e.g., a first movable member 10) capable of vibrating in a first direction D1 and a second direction D2 intersecting the first direction is provided, along with a spring mechanism (e.g., a first connecting portion 10S) that causes the movable body to vibrate in these directions. A control unit 74 (one detection unit) is capable of detecting the amplitude of the vibration of the movable body in the second direction based on a Coriolis force based on a rotational angular velocity Ω acting on the movable body vibrating in the first direction D1. Another control unit 74 (another detection unit) is capable of detecting the amplitude of the vibration of the movable body in the first direction D1 based on a Coriolis force based on a rotational angular velocity Ω acting on the movable body vibrating in the second direction D2. The control unit 74 (a rotation angle acquisition unit or a rotation angle derivation unit 75c) acquires the rotation angle of the movable body based on the amplitude of the vibration in the first direction D1 and the amplitude of the vibration in the second direction D2.

[0149] A variable electric spring and a variable resistance damper are provided. The variable electric spring, for example, is formed by a vibrating body, parallel plate electrodes attached thereto, and a variable voltage applied to the parallel plate electrodes. The variable resistance damper is formed by a vibrating body, comb-tooth electrodes attached thereto, a variable resistor connected to the comb-tooth electrodes, and a variable voltage applied to the variable resistor. A vibrating element is provided within a chip identical to the vibrating body, and electrodes are attached to the vibrating element. A resonance frequency acquisition unit is provided to acquire the resonance frequency of the vibrating element.

[0150] The difference (second difference ΔF) between the resonant frequency of the first component of the first direction D1 and the resonant frequency of the second component of the second direction D2 is detected based on the amplitude of the vibration detected by the detection unit described above. The control unit 74 controls the variable electric spring through a closed loop in a manner that reduces the second difference ΔF. The control is performed continuously and automatically, for example. The control can be performed at all times.

[0151] The difference (first difference ΔT) between the decay time constant of the first component of the first direction D1 and the decay time constant of the second component of the second direction D2 is detected based on the amplitude of the vibration detected by the aforementioned detection unit. The control unit 74 controls the variable damper through a closed loop in a manner that reduces the first difference ΔT. The control is performed continuously and automatically, for example. The control can be performed at all times.

[0152] For example, the control unit 74 can output a corrected rotation angle based on the second difference ΔF, the first difference ΔT, the rotation angle obtained by the rotation angle acquisition unit, and the resonance frequency fb1 obtained from the vibrating member. The corrected rotation angle is the rotation angle corresponding to the angular velocity Ω of the rotation applied to the movable body. A more accurate rotation angle can be obtained.

[0153] Figure 10 (a) and Figure 10 (b) is a schematic top view illustrating the sensor of the first embodiment.

[0154] like Figure 10 As shown in (a), the sensor 111 of the embodiment includes a plurality of second structures 60B. In this example, at least a portion of the first structure 60A (e.g., the first movable member 10) is located among the plurality of second structures 60B.

[0155] like Figure 10 As shown in (b), in the sensor 112 of the embodiment, a plurality of second structures 60B are also provided. The direction from one of the plurality of second structures 60B to another of the plurality of second structures 60B intersects with the direction from one of the plurality of second structures 60B to yet another of the plurality of second structures 60B. For example, a first structure 60A is provided at a diagonal position of the four second structures 60B.

[0156] The control unit 74 is able to acquire signals (including the signal of the resonance frequency fb1) obtained from multiple second structures 60B and derive the averaged resonance frequency fb1.

[0157] For example, at the location of the first structure 60A, the stress distribution in the substrate 60, etc., becomes more uniform. For example, the temperature distribution becomes more uniform. For example, the distribution of wiring for electrical connections in the XY plane becomes more uniform. For example, electrical characteristics (e.g., the effects of noise or coupling, etc.) become more uniform. Higher precision correction is possible. Higher precision detection is possible.

[0158] Figure 11 This is a schematic cross-sectional view illustrating the sensor of the first embodiment.

[0159] like Figure 11 As shown, the sensor 120 of this embodiment includes a first structure 60A, a second structure 60B, a first housing 65, and a control device 70. The first structure 60A is disposed in a first base region 61 including a first surface 60f. The second structure 60B is disposed in a second base region 62. The first base region 61 is contained within a single base 60. The second base region 62 is contained within another base 60. The first structure 60A and the second structure 60B are disposed within the first housing 65. The structure of the sensor 120, except as described above, can be the same as that of the sensor 110, etc.

[0160] For example, in sensor 120, the first structure 60A includes a first movable member 10 capable of vibration. The vibration of the first movable member 10 includes a first component along a first direction D1 and a second component along a second direction D2, the first direction D1 being along a first surface 60f, and the second direction D2 intersecting the first direction D1 and being along the first surface 60f. The second structure 60B includes a second movable member 50 capable of vibration. The control device 70 includes a control unit 74 capable of performing processing actions. The processing actions include outputting a second rotation angle θv2 obtained by correcting a first rotation angle θv1 of the first movable member 10, obtained based on the first and second components, based on the resonant frequency fb1 of the second movable member 50. In sensor 120, a sensor capable of improving accuracy can also be provided.

[0161] In sensor 120, a first structure 60A and a second structure 60B are disposed within a first housing 65, and these structures have substantially the same temperature. This enables high-precision correction. Multiple second structures 60B can also be disposed in the structure of sensor 120 (see reference). Figure 10 (a) and Figure 10 (b)).

[0162] Figure 12This is a schematic cross-sectional view illustrating the sensor of the first embodiment.

[0163] like Figure 12 As shown, the sensor 125 in this embodiment includes a second housing 66. For example, a first housing 65 is disposed within the second housing 66. The control device 70 can be disposed inside or outside the second housing 66. The second housing 66 can function as an EMI shield, for example. The second housing 66 can, for example, contain metallic or magnetic materials. Figure 12 In the example, it can also be set in the second housing 66. Figure 11 The illustrated construct.

[0164] (Second Implementation)

[0165] The second embodiment relates to an electronic device.

[0166] Figure 13 This is a schematic diagram illustrating the electronic device of the second embodiment.

[0167] like Figure 13 As shown, the electronic device 310 of the embodiment includes the sensor and circuit control unit 170 of the embodiment. Figure 13 In the example, sensor 110 (or sensor device 210) is depicted as a sensor. The circuit control unit 170 is capable of controlling circuit 180 based on the signal S1 obtained from the sensor. Circuit 180 is, for example, the control circuit of drive device 185. According to the embodiment, circuit 180 and the like for controlling drive device 185 can be controlled with high precision based on high-precision detection results.

[0168] Figure 14 (a)~ Figure 14 (h) is a schematic diagram illustrating the application of an electronic device.

[0169] like Figure 14 As shown in (a), electronic device 310 can be at least part of the robot. Figure 14 As shown in (b), the electronic device 310 may also be at least part of a work robot installed in a manufacturing plant or the like. Figure 14 As shown in (c), electronic device 310 can also be at least part of an automated transport vehicle, such as one used in a factory. Figure 14 As shown in (d), electronic device 310 can also be at least part of a drone (unmanned aerial vehicle). Figure 14 As shown in (e), electronic device 310 may also be at least part of the aircraft. Figure 14 As shown in (f), electronic device 310 can also be at least part of the ship. Figure 14 As shown in (g), the electronic device 310 can also be at least part of the submarine. Figure 14As shown in (h), the electronic device 310 may also be at least a part of the vehicle. The electronic device 310 may, for example, include at least one of a robot and a mobile body.

[0170] Implementation methods may include the following configurations (e.g., technical solutions).

[0171] (Component 1)

[0172] A sensor having:

[0173] The substrate includes a first surface, which includes a first substrate region and a second substrate region;

[0174] The first structure is disposed in the first base region;

[0175] A second structure is disposed in the second base region; and

[0176] Control device,

[0177] The first structure includes a first movable member capable of vibration, the vibration of which includes a first component along a first direction and a second component along a second direction, the first direction being along the first surface, and the second direction intersecting the first direction and being along the first surface.

[0178] The second structure includes a second movable member capable of vibration.

[0179] The control device includes a control unit capable of performing processing actions.

[0180] The processing action includes outputting a second rotation angle obtained by correcting the first rotation angle of the first movable member, which is obtained based on the first component and the second component, based on the resonant frequency of the second movable member.

[0181] (Component 2)

[0182] According to the sensor described in configuration 1

[0183] The second matrix region is continuous with the first matrix region.

[0184] (Component 3)

[0185] According to the sensor described in configuration 1 or 2

[0186] It also has a first shell,

[0187] The first structure and the second structure are disposed within the first housing.

[0188] (Component 4)

[0189] A sensor having:

[0190] The first structure is disposed in the first base region including the first face;

[0191] The second construct is located in the second base region;

[0192] First shell; and

[0193] Control device,

[0194] The first structure and the second structure are disposed within the first shell.

[0195] The first structure includes a first movable member capable of vibration, the vibration of which includes a first component along a first direction and a second component along a second direction, the first direction being along the first surface, and the second direction intersecting the first direction and being along the first surface.

[0196] The second structure includes a second movable member capable of vibration.

[0197] The control device includes a control unit capable of performing processing actions.

[0198] The processing action includes outputting a second rotation angle obtained by correcting the first rotation angle of the first movable member, which is obtained based on the first component and the second component, based on the resonant frequency of the second movable member.

[0199] (Component 5)

[0200] According to the sensor constituted in any one of 1 to 4,

[0201] The resonant frequency of the second movable member does not change relative to the rotation of the base with respect to the third direction intersecting the first surface, or the rate of change of the resonant frequency of the second movable member relative to the rotation of the base with respect to the third direction is less than the rate of change of the resonant frequency of the second movable member relative to the displacement of the base along the third direction.

[0202] (Composition 6)

[0203] According to the sensor constituted in any one of 1 to 5,

[0204] The first rotation angle varies according to the temperature of the first movable member.

[0205] The resonant frequency of the second movable member varies according to the temperature of the second movable member.

[0206] (Component 7)

[0207] According to the sensor constituted in any one of 1 to 5,

[0208] The absolute value of the temperature difference between the second structure and the first structure is less than or equal to the temperature of the first structure.

[0209] (Composition 8)

[0210] According to any one of the following configurations, the sensor is configured as described in 1 to 7.

[0211] The first construct includes:

[0212] The first fixing part is fixed to the first base region; and

[0213] The first connecting part is supported by the first fixed part and connected to the first movable member.

[0214] The second structure includes a second fixing part fixed to the second base region.

[0215] The second fixed part supports the second movable member.

[0216] The second movable member is made of the same material as the material contained in the first connecting part.

[0217] (Composition 9)

[0218] According to any one of the following configurations, the sensor is configured as described in 1 to 7.

[0219] The second construct includes:

[0220] The second fixing part is fixed to the second base region; and

[0221] Second relative electrode component,

[0222] The second fixed part supports the second movable member.

[0223] The second opposing electrode component is opposite to the second movable component.

[0224] (Composition 10)

[0225] According to the sensor described in configuration 9

[0226] The second structure includes a plurality of the second fixing parts.

[0227] At least a portion of the second movable member is located between the plurality of second fixed parts.

[0228] The direction from one of the plurality of second fixing parts to the other of the plurality of second fixing parts intersects with the direction from the second opposing electrode member to the second movable member.

[0229] (Composition 11)

[0230] According to the sensor described in configuration 10

[0231] The second structure includes a plurality of the second opposing electrode components.

[0232] At least a portion of the second movable member is located between the plurality of second opposing electrode members.

[0233] The direction from one of the plurality of second fixing parts to the other of the plurality of second fixing parts intersects with the direction from one of the plurality of second opposing electrode members to the other of the plurality of second opposing electrode members.

[0234] (Composition 12)

[0235] According to the sensor constituted in any one of 8 to 11,

[0236] The second movable component includes multiple beams.

[0237] (Composition 13)

[0238] According to the sensor described in any one of 8 to 11,

[0239] The second movable member includes a first movable beam and a second movable beam.

[0240] The resonant frequency of the second movable member includes the sum of the resonant frequency of the first movable beam and the resonant frequency of the second movable beam.

[0241] (Composition 14)

[0242] According to the sensor described in configuration 13

[0243] The second movable member further includes a first movable base, a first movable connecting portion, and a second movable base.

[0244] The first movable base is supported by the second fixed part.

[0245] The first movable base is located between the second fixed part and the second movable base.

[0246] The first movable connecting portion is located between the first movable base and the second movable base.

[0247] The first movable connecting part connects the second movable base to the first movable base.

[0248] A portion of the first movable beam is connected to a portion of the first movable base.

[0249] The remaining portion of the first movable beam is connected to a portion of the second movable base.

[0250] A portion of the second movable beam is connected to the other portions of the first movable base.

[0251] The other parts of the second movable beam are connected to the other parts of the second movable base.

[0252] The first movable connection is located between the first movable beam and the second movable beam.

[0253] (Composition 15)

[0254] According to the sensor described in configuration 1

[0255] The first construct includes:

[0256] The first opposing electrode component is opposite to the first movable component; and

[0257] The resistive component is electrically connected to the first opposing electrode component.

[0258] The control unit is capable of performing the first action.

[0259] The first action includes:

[0260] The first acquisition action acquires the first component and the second component; and

[0261] The first modification action is to change the value of at least one of the resistance of the resistive member and the value of the voltage applied to the resistive member in such a way that at least one of the first absolute value of the first difference between the first time constant of the first component and the second time constant of the second component, and the second absolute value of the second difference between the first resonant frequency of the first component and the second resonant frequency of the second component, is reduced.

[0262] (Composition 16)

[0263] According to the sensor described in any one of the constituent 15,

[0264] At least one of the first absolute value and the second absolute value varies with temperature.

[0265] The resonant frequency of the second movable member changes according to the temperature.

[0266] The control unit corrects at least one of the first absolute value and the second absolute value, which vary according to the temperature.

[0267] (Composition 17)

[0268] According to the sensor described in configuration 15

[0269] The first opposing electrode component includes:

[0270] The first opposing electrode is opposite to the first movable member; and

[0271] The second opposing electrode is opposite to the first movable member.

[0272] The direction from the first movable member to the second opposing electrode intersects with the direction from the first movable member to the first opposing electrode.

[0273] The resistive component includes:

[0274] A first resistor includes a first end and a first other end, the first other end being electrically connected to the first opposing electrode; and

[0275] The second resistor includes a second end and a second other end, wherein the second other end is electrically connected to the second opposing electrode.

[0276] In the first change operation, the control unit changes the value of at least one of the resistance value of the first resistor, the resistance value of the second resistor, the first voltage at the first end, and the second voltage at the second end in a manner that reduces the first absolute value.

[0277] (Composition 18)

[0278] According to the sensor described in configuration 17

[0279] The direction of displacement of the movable member during the first voltage change intersects with the direction of displacement of the movable member during the second voltage change.

[0280] (Composition 19)

[0281] According to the sensor described in configuration 15

[0282] The first opposing electrode component includes:

[0283] The first relatively conductive part is opposite to the first movable member; and

[0284] The second relatively conductive part is opposite to the first movable member.

[0285] The direction from the first movable member to the second opposing conductive part intersects with the direction from the first movable member to the first opposing conductive part.

[0286] In the first change operation, the control unit changes at least one of the first relative conductor voltage of the first relative conductor and the second relative conductor voltage of the second relative conductor in a manner that reduces the second absolute value.

[0287] (Composition 20)

[0288] An electronic device comprising:

[0289] The sensor comprising any one of 1 to 19; and

[0290] The circuit control unit is capable of controlling the circuit based on the signals obtained from the sensor.

[0291] According to the implementation method, a sensor that can improve accuracy can be provided.

[0292] In this application specification, "perpendicular" and "parallel" are not only strictly perpendicular and strictly parallel, but also include deviations in the manufacturing process, as long as they are substantially perpendicular and substantially parallel.

[0293] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, any specific configuration of the various elements included in the sensor, such as the structure, movable member, electrodes, and control unit, is included within the scope of the present invention as long as those skilled in the art can appropriately select from the known range to similarly implement the present invention and obtain the same effects.

[0294] Furthermore, any element formed by combining any two or more elements of each specific example within the technically possible range is also included within the scope of the present invention, as long as it contains the spirit of the present invention.

[0295] In addition, all sensors implemented by those skilled in the art based on appropriate design modifications of the sensors described above as embodiments of the present invention are also within the scope of the present invention, as long as they contain the spirit of the present invention.

[0296] In addition, within the scope of the ideas of this invention, those skilled in the art will be able to conceive of various modifications and alterations, and it should be understood that these modifications and alterations also fall within the scope of this invention.

[0297] While some embodiments of the invention have been described, these embodiments are given by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in a wide variety of other ways, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included within the scope and spirit of the invention, and are included within the scope of the invention described in the embodiments and its equivalents.

Claims

1. A sensor, comprising: The substrate includes a first surface, which includes a first substrate region and a second substrate region; The first structure is disposed in the first base region; A second structure is disposed in the second base region; and Control device, The first structure includes a first movable member capable of vibration, the vibration of which includes a first component along a first direction and a second component along a second direction, the first direction being along the first surface, and the second direction intersecting the first direction and being along the first surface. The second structure includes a second movable member capable of vibration. The control device includes a control unit capable of performing processing actions. The processing action includes outputting a second rotation angle obtained by correcting the first rotation angle of the first movable member, which is obtained based on the first component and the second component, based on the resonant frequency of the second movable member.

2. The sensor according to claim 1, It also has a first shell, The first structure and the second structure are disposed within the first housing.

3. The sensor according to claim 1, The first construct includes: The first fixing part is fixed to the first base region; and The first connecting part is supported by the first fixed part and connected to the first movable member. The second structure includes a second fixing part fixed to the second base region. The second fixed part supports the second movable member. The second movable member is made of the same material as the material contained in the first connecting part.

4. The sensor according to claim 1, The second construct includes: The second fixing part is fixed to the second base region; and Second relative electrode component, The second fixed part supports the second movable member. The second opposing electrode component is opposite to the second movable component.

5. The sensor according to claim 3, The second movable member includes a first movable beam and a second movable beam. The resonant frequency of the second movable member includes the sum of the resonant frequency of the first movable beam and the resonant frequency of the second movable beam.

6. The sensor according to claim 1, The first construct includes: The first opposing electrode component is opposite to the first movable component; and The resistive component is electrically connected to the first opposing electrode component. The control unit is capable of performing the first action. The first action includes: The first acquisition action acquires the first component and the second component; and The first modification action is to change the value of at least one of the resistance of the resistive member and the value of the voltage applied to the resistive member in such a way that at least one of the first absolute value of the first difference between the first time constant of the first component and the second time constant of the second component and the second absolute value of the second difference between the first resonant frequency of the first component and the second resonant frequency of the second component is reduced.

7. The sensor according to claim 6, The first opposing electrode component includes: The first opposing electrode is opposite to the first movable member; and The second opposing electrode is opposite to the first movable member. The direction from the first movable member to the second opposing electrode intersects with the direction from the first movable member to the first opposing electrode. The resistive component includes: The first resistor includes a first end and a first other end, wherein the first other end is electrically connected to the first opposing electrode; and The second resistor includes a second end and a second other end, wherein the second other end is electrically connected to the second opposing electrode. In the first change operation, the control unit changes the value of at least one of the resistance value of the first resistor, the resistance value of the second resistor, the first voltage at the first end, and the second voltage at the second end in a manner that reduces the first absolute value.

8. The sensor according to claim 3, The first opposing electrode component includes: The first relatively conductive part is opposite to the first movable member; and The second relatively conductive part is opposite to the first movable member. The direction from the first movable member to the second opposing conductive part intersects with the direction from the first movable member to the first opposing conductive part. In the first change operation, the control unit changes at least one of the first relative conductor voltage of the first relative conductor and the second relative conductor voltage of the second relative conductor in a manner that reduces the second absolute value.

9. A sensor, comprising: The first structure is disposed in the first base region including the first face; The second construct is located in the second base region; First shell; and Control device, The first structure and the second structure are disposed within the first shell. The first structure includes a first movable member capable of vibration, the vibration of which includes a first component along a first direction and a second component along a second direction, the first direction being along the first surface, and the second direction intersecting the first direction and being along the first surface. The second structure includes a second movable member capable of vibration. The control device includes a control unit capable of performing processing actions. The processing action includes outputting a second rotation angle obtained by correcting the first rotation angle of the first movable member, which is obtained based on the first component and the second component, based on the resonant frequency of the second movable member.

10. An electronic device comprising: The sensor according to claim 1; and The circuit control unit is capable of controlling the circuit based on the signals obtained from the sensor.

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