A vacuum system for ion implantation machine and process optimization method

Abstract

The present invention relates to the field of vacuum technology, and in particular to a vacuum system and process optimization method for an ion implanter, comprising: a vacuum processing container, a fixing mechanism, the fixing mechanism comprising a fixing rod arranged on one side of the vacuum processing container, a cavity is provided inside the fixing rod, a motor is fixedly connected to the top of the cavity, a threaded rod is fixedly connected to the output shaft of the motor, the bottom end of the threaded rod is rotatably connected to the cavity, a threaded sleeve is threadedly connected to the bottom of the threaded rod surface, a connecting protrusion is fixedly connected to the front side of the threaded sleeve, and a movable groove 1 for use with the connecting protrusion is provided on the front side of the fixing rod. In actual use of the present invention, a filtering mechanism is firstly added to the end of the vacuum connecting pipe, so that it first filters the transmission of the gas multiple times, further maintaining the cleanliness of the gas and the vacuum processing effect, and the disassembly and assembly are relatively convenient, so that the user can replace and clean it.

Description

Technical Field

[0001] The invention relates to the field of vacuum technology, and in particular to a vacuum system for an ion implanter and a process optimization method. Background Art

[0002] The vacuum system is a complete vacuum system consisting of a vacuum pump, a PLC program control system, a gas storage tank, a vacuum pipeline, a vacuum valve, an external filter assembly, etc. This system is widely used in the electronic semiconductor industry, optoelectronic backlight modules, mechanical processing and other industries.

[0003] After the vacuum system of the ion implanter is started, a large amount of gas needs to be released during the vacuum treatment. After these gases are transported through multi-stage pipelines, their cleanliness may be reduced during the transmission process, thereby reducing the vacuum treatment effect. Secondly, the vacuum treatment container needs to be connected to the vacuum pump through pipelines and valves, and the vacuum pump is also welded and fixed to the vacuum treatment container during the assembly process. A series of quality defects such as metal cracks, arc pits, slag inclusions, and undercuts may occur in the welding area, which may cause unreasonable welding positions and poor load-bearing effects. Finally, the connection stability and tightness between the vacuum pump and the vacuum treatment container, vacuum connecting pipes and other connectors may be reduced. In order to solve the above problems, a vacuum system for ion implanters and a process optimization method are urgently needed to be developed. Summary of the invention

[0004] The purpose of the present invention is to provide a vacuum system and process optimization method for an ion implanter, which has the advantages of easy disassembly and assembly and convenient filtering, and solves the problems raised by the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solution: a vacuum system for an ion implanter, comprising: a vacuum processing container.

[0006] The fixing mechanism comprises a fixing rod arranged on one side of the vacuum processing container, the fixing rod has a cavity provided inside, the top of the cavity inner cavity is fixedly connected with a motor, the output shaft of the motor is fixedly connected with a threaded rod, the bottom end of the threaded rod is rotatably connected with the cavity, the bottom threaded connection of the threaded rod surface is threaded with a threaded sleeve, the front side of the threaded sleeve is fixedly connected with a connecting protrusion, the front side of the fixing rod is provided with a movable groove 1 used in conjunction with the connecting protrusion, the front side of the connecting protrusion penetrates to the outside of the movable groove 1 and is fixedly connected with a connecting frame, one side of the vacuum processing container is fixedly connected with a fixing plate, the top of the fixing plate is provided with a transverse groove, the bottom of the transverse groove inner cavity is slidably connected with a locking block, the top of the locking block is provided with a movable groove 2 used in conjunction with the connecting frame, a vacuum pump box is provided on the opposite side of the two locking blocks, and locking grooves used in conjunction with the locking blocks are provided on both sides of the vacuum pump box.

[0007] The purification mechanism includes a vacuum connecting pipe connected to the vacuum pump box, a fixed plate 1 and a fixed plate 2 are rotatably connected above the inner cavity of the vacuum connecting pipe, the top of the fixed plate 1 and the fixed plate 2 are both provided with a storage groove, a through hole is provided at the bottom of the inner cavity of the storage groove, the bottom of the fixed plate 1 and the fixed plate 2 are respectively fixedly connected with an ear plate 1 and an ear plate 2, the surfaces of the ear plate 1 and the ear plate 2 are rotatably connected with a connecting strip, a buckle groove is provided on one side of the top of the fixed plate 1 and the fixed plate 2, and the inner cavity of the storage groove is sequentially provided with a filter screen 1 and a filter screen 2 from top to bottom.

[0008] Furthermore, as a preferred embodiment of the present invention, a plurality of threaded holes distributed in a rectangular shape are opened on the surface of the fixing rod, the inner cavity of the threaded hole is threadedly connected with a bolt, and the fixing rod is fixedly connected to the vacuum processing container through the bolt.

[0009] Furthermore, as a preferred embodiment of the present invention, a plurality of heat dissipation holes distributed at equal intervals are provided on the top of the fixing rod, and the inner cavities of the heat dissipation holes are filled with filters.

[0010] Furthermore, as a preferred embodiment of the present invention, a support plate is fixedly connected to the bottom of the fixed plate, and one side of the support plate is fixedly connected to the vacuum processing container.

[0011] Furthermore, as a preferred embodiment of the present invention, both the front side and the rear side of the bottom of the locking block are provided with inclined surfaces.

[0012] Furthermore, as a preferred embodiment of the present invention, limiting grooves are provided on both sides of the inner cavity of the second movable groove, and the opposite sides of the two limiting grooves are slidably connected to limiting blocks, and one side of the limiting blocks is fixedly connected to the connecting frame.

[0013] Furthermore, as a preferred embodiment of the present invention, one side of the bottom of the fixing plate 1 and one side of the top of the fixing plate 2 are both provided with grooves.

[0014] Furthermore, as a preferred embodiment of the present invention, the connecting frame is in an inverted "V" shape.

[0015] Furthermore, as a preferred embodiment of the present invention, the aperture of filter screen one is larger than the aperture of filter screen two.

[0016] A process optimization method for a vacuum system for an ion implanter, the method comprising the following steps:

[0017] Step 1: First, when the user needs to install the vacuum pump box, the motor is turned on, and the output shaft of the motor drives the threaded rod to rotate. The threaded rod drives the threaded sleeve to rotate through the connection and transmission of the threaded teeth. However, with the coordinated use of the connecting protrusion and the movable groove one, the threaded rod can only drive the threaded sleeve to move up and down in the vertical direction, and then the threaded sleeve drives the connecting frame to move in the same direction through the connection of the connecting protrusion. When the connecting frame moves downward, it drives the limit block to move downward in the inner cavity of the limit groove and the movable groove two. As the connecting frame continues to move downward, the angle between it and the vacuum pump box gradually becomes smaller, and the two locking blocks are continuously moved relative to each other, and then move to the inner cavity of the locking groove, so that the vacuum pump box is clamped and fixed by the two locking blocks, so as to achieve the purpose of fast installation and fixation of vacuum pump boxes of different models, further improving the scope of application;

[0018] Step 2: The user first snaps filter 1 and filter 2 into the inner cavity of the storage tank in sequence, then connects the vacuum connecting pipe to the vacuum pump box. After the vacuum pump box is turned on, the gas passing through the vacuum connecting pipe first passes through filter 1 to achieve the first filtration, and after the large particles of impurities in the gas are removed, the gas passes through filter 2. Compared with filter 1, filter 2 has a smaller and denser pore size, and then filters the smaller impurities in the gas again. After the gas has been filtered twice, it finally continues to flow in the inner cavity of the vacuum connecting pipe through the through hole. After a period of use, the user holds the buckle slot with his hand. The groove presses the fixed plate 1 and the fixed plate 2 inward, and the fixed plate 1 and the fixed plate 2 respectively drive the ear plate 1 and the ear plate 2 to rotate in the same direction, and through the connection of the connecting strip, the fixed plate 1 and the fixed plate 2 maintain a relatively identical state and move simultaneously, and then the fixed plate 1 and the fixed plate 2 respectively rotate with their connecting axes with the vacuum connecting pipe as the center of the circle, and when the fixed plate 1 and the fixed plate 2 rotate, due to the change of the placement state of the fixed plate 1 and the fixed plate 2, the filter net 1 and the filter net 2 are pushed outward, so that the filter net 1 and the filter net 2 are separated from the inner cavity of the fixed plate 1 and the fixed plate 2, and then the user can remove them, further completing the function of cleaning them.

[0019] Beneficial effects: The technical solution of the present application has the following technical effects: the present invention achieves rapid disassembly and assembly of the vacuum pump through the coordinated use of the vacuum processing container, the fixed rod, the cavity, the motor, the threaded rod, the threaded sleeve, the connecting protrusion, the movable groove 1, the connecting frame, the fixed plate, the transverse groove, the locking block, the movable groove 2, the vacuum pump box and the locking groove, thereby reducing the installation defects of traditional welding and further achieving the effect of high efficiency and stability; through the coordinated use of the vacuum connecting pipe, the fixed plate 1, the fixed plate 2, the storage groove, the through hole, the ear plate 1, the ear plate 2, the connecting strip, the buckle groove, the filter screen 1 and the filter screen 2, the gas passing through the inside of the vacuum connecting pipe is purified and filtered, thereby further maintaining the gas cleanliness. The ion implanter vacuum system and process optimization method have the advantages of easy vacuum disassembly and assembly and convenient filtering. In actual use, a filtering mechanism is firstly provided at the end of the vacuum connecting pipe, so that the gas transmission is firstly filtered multiple times to further maintain the cleanliness of the gas and the vacuum treatment effect. The system is convenient to disassemble and assemble, and is convenient for users to replace and clean the system. Secondly, the traditional welding connection method of the vacuum pump is changed, and a clamping connection method is adopted to fix the system without damaging the structure. The system is not only convenient to disassemble and assemble, but also will not reduce the stability of the vacuum pump due to unreasonable welding position or poor load-bearing effect.

[0020] It should be appreciated that all combinations of the foregoing concepts, as well as additional concepts described in greater detail below, may be considered to be part of the inventive subject matter of the present disclosure, provided such concepts are not mutually inconsistent. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0022] Figure 1 It is a schematic diagram of the structure of the present invention;

[0023] Figure 2 It is a three-dimensional structural schematic diagram of the installation mechanism of the present invention;

[0024] Figure 3 It is a three-dimensional schematic diagram of the local structure of the present invention;

[0025] Figure 4 It is a three-dimensional schematic diagram of the locking block of the present invention;

[0026] Figure 5 It is a three-dimensional structural schematic diagram of the purification mechanism of the present invention;

[0027] Figure 6 It is a three-dimensional schematic diagram of the purification mechanism of the present invention in a disassembled state;

[0028] Figure 7It is a bottom-up three-dimensional structural schematic diagram of the fixing plate 1 and the fixing plate 2 of the present invention;

[0029] Figure 8 It is a three-dimensional schematic diagram of the disassembled state of the fixing plate 1 and the fixing plate 2 of the present invention.

[0030] In the figure, the meaning of each figure mark is as follows: 1. vacuum treatment container; 2. fixing rod; 3. cavity; 4. motor; 5. threaded rod; 6. threaded sleeve; 7. connecting protrusion; 8. movable groove one; 9. connecting frame; 10. fixing plate; 11. horizontal groove; 12. locking block; 13. movable groove two; 14. vacuum pump box; 15. locking groove; 16. vacuum connecting pipe; 17. fixing plate one; 18. fixing plate two; 19. storage groove; 20. through hole; 21. ear plate one; 22. ear plate two; 23. connecting strip; 24. buckle groove; 25. filter screen one; 26. filter screen two; 27. threaded hole; 28. bolt; 29. ​​heat dissipation hole; 30. support plate; 31. limit groove; 32. limit block. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. In order to better understand the technical content of the present invention, specific embodiments are cited and explained in conjunction with the drawings as follows. Various aspects of the present invention are described in this disclosure with reference to the drawings, in which many illustrative embodiments are shown. It should be understood that the various concepts and embodiments introduced above, as well as those described in more detail below, can be implemented in any of many ways. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0032] As attached Figure 1 To Attachment Figure 8 As shown: This embodiment provides a vacuum system for an ion implanter, including: a vacuum processing container 1.

[0033] The fixing mechanism includes a fixing rod 2 arranged on one side of the vacuum processing container 1, a cavity 3 is opened inside the fixing rod 2, a motor 4 is fixedly connected to the top of the inner cavity of the cavity 3, a threaded rod 5 is fixedly connected to the output shaft of the motor 4, the bottom end of the threaded rod 5 is rotatably connected to the cavity 3, a threaded sleeve 6 is threadedly connected to the bottom of the surface of the threaded rod 5, a connecting protrusion 7 is fixedly connected to the front side of the threaded sleeve 6, a movable groove 8 used in conjunction with the connecting protrusion 7 is opened on the front side of the fixing rod 2, and the front side of the connecting protrusion 7 penetrates to A connecting frame 9 is fixedly connected to the outer side of the movable groove 1 8, and the shape of the connecting frame 9 is an inverted "V" shape. A fixed plate 10 is fixedly connected to one side of the vacuum processing container 1, and a transverse groove 11 is provided on the top of the fixed plate 10. A locking block 12 is slidably connected to the bottom of the inner cavity of the transverse groove 11. A movable groove 2 13 for use with the connecting frame 9 is provided on the top of the locking block 12. A vacuum pump box 14 is arranged on the opposite side of the two locking blocks 12, and locking grooves 15 for use with the locking blocks 12 are provided on both sides of the vacuum pump box 14.

[0034] The purification mechanism includes a vacuum connecting pipe 16 connected to the vacuum pump box 14, and a fixed plate 17 and a fixed plate 2 18 are rotatably connected above the inner cavity of the vacuum connecting pipe 16. A groove is provided on one side of the bottom of the fixed plate 17 and one side of the top of the fixed plate 2 18. A storage groove 19 is provided on the top of the fixed plate 17 and the fixed plate 2 18. A through hole 20 is provided at the bottom of the inner cavity of the storage groove 19. The bottoms of the fixed plates 17 and the fixed plates 2 18 are respectively fixedly connected with an ear plate 1 21 and an ear plate 2 22, and the surfaces of the ear plates 1 21 and the ear plates 22 are rotatably connected with a connecting strip 23. A buckle groove 24 is provided on one side of the top of the fixed plates 17 and the fixed plates 2 18. The inner cavity of the storage groove 19 is sequentially provided with a filter screen 1 25 and a filter screen 2 26 from top to bottom.

[0035] Specifically, a plurality of threaded holes 27 distributed in a rectangular shape are formed on the surface of the fixing rod 2 , and bolts 28 are threadedly connected to the inner cavities of the threaded holes 27 . The fixing rod 2 is fixedly connected to the vacuum processing container 1 via the bolts 28 .

[0036] In this embodiment, the threaded hole 27 and the bolt 28 are used in conjunction to achieve a detachable connection between the fixing rod 2 and the vacuum processing container 1, thereby facilitating a series of operations such as assembly and maintenance of the fixing rod 2 by the user, further improving the convenience of use.

[0037] Specifically, a plurality of heat dissipation holes 29 distributed at equal intervals are formed on the top of the fixing rod 2 , and the inner cavity of the heat dissipation hole 29 is filled with a filter.

[0038] In this embodiment, the heat dissipation holes 29 are provided to improve the circulation of air around the motor 4 , realize the interaction of cold and hot air, and further conduct the operating heat of the motor 4 .

[0039] Specifically, the bottom of the fixing plate 10 is fixedly connected to the supporting plate 30 , and one side of the supporting plate 30 is fixedly connected to the vacuum processing container 1 .

[0040] In this embodiment, the support plate 30 is provided to support the fixing plate 10, thereby increasing the longitudinal connection moment of the fixing plate 10 and further improving the stability of the component.

[0041] Specifically, the front side and the rear side of the bottom of the locking block 12 are both provided with inclined surfaces.

[0042] In this embodiment, the inclined surfaces on both sides of the locking block 12 are arranged to guide and support the locking block 12 in cooperation with the transverse groove 11, thereby improving the transmission stability.

[0043] Specifically, both sides of the inner cavity of the movable groove 13 are provided with limiting grooves 31 , and the opposite sides of the two limiting grooves 31 are slidably connected to the limiting blocks 32 , and one side of the limiting blocks 32 is fixedly connected to the connecting frame 9 .

[0044] In this embodiment, the limiting groove 31 and the limiting block 32 are provided to limit and guide the movable groove 13, which not only prevents the movable groove 13 from being separated from the locking block 12, but also keeps the transmission of the movable groove 13 smoother.

[0045] Specifically, the aperture of the filter screen 1 25 is larger than the aperture of the filter screen 2 26 .

[0046] In this embodiment, by setting the aperture size of the buckle groove 24 and the filter screen 25, the impurities in the gas are filtered from coarse to fine, layer by layer, and the decontamination ability is gradually improved.

[0047] A process optimization method for a vacuum system for an ion implanter, the method comprising the following steps:

[0048] Step 1: First, when the user needs to install the vacuum pump box 14, the motor 4 is turned on, and the output shaft of the motor 4 drives the threaded rod 5 to rotate. The threaded rod 5 drives the threaded sleeve 6 to rotate through the connection and transmission of the threaded teeth. However, with the coordinated use of the connecting protrusion 7 and the movable groove 1 8, the threaded rod 5 can only drive the threaded sleeve 6 to move up and down in the vertical direction, and then the threaded sleeve 6 drives the connecting frame 9 to move in the same direction through the connection of the connecting protrusion 7. When the connecting frame 9 moves downward, it drives the limit block 32 to move downward in the inner cavity of the limit groove 31 and the movable groove 2 13. As the connecting frame 9 continues to move downward, the angle between it and the vacuum pump box 14 gradually becomes smaller, and the two locking blocks 12 continue to move relative to each other, and then move to the inner cavity of the locking groove 15, so that the vacuum pump box 14 is clamped and fixed by the two locking blocks 12, so as to achieve the purpose of fast installation and fixation of vacuum pump boxes 14 of different models, further improving the scope of application;

[0049] Step 2: The user first snaps the filter screen 1 25 and the filter screen 2 26 into the inner cavity of the storage groove 19 in sequence, and then connects the vacuum connecting pipe 16 with the vacuum pump box 14. After the vacuum pump box 14 is turned on, the gas passing through the vacuum connecting pipe 16 first passes through the filter screen 1 25 to achieve the first filtration of it, and after the large particles of impurities in the gas are removed, the gas passes through the filter screen 26. Compared with the filter screen 1 25, the pore size of the filter screen 26 is smaller and denser, and then the smaller impurities in the gas are filtered again. After the gas is filtered twice, it finally continues to flow in the inner cavity of the vacuum connecting pipe 16 through the through hole 20. After a period of use, the user holds the buckle groove 24 by hand and fixes the fixing plate 1 through the buckle groove 24. 7 and the fixed plate 2 18 are pressed inward, and the fixed plate 1 17 and the fixed plate 2 18 respectively drive the ear plate 1 21 and the ear plate 2 22 to rotate in the same direction, and through the connection of the connecting strip 23, the fixed plate 17 and the fixed plate 2 18 maintain a relatively identical state and move simultaneously, and then the fixed plate 17 and the fixed plate 2 18 respectively rotate with the connecting axis with the vacuum connecting pipe 16 as the center of the circle, and when the fixed plate 17 and the fixed plate 2 18 rotate, due to the change of the placement state of the fixed plate 17 and the fixed plate 2 18, the filter net 1 25 and the filter net 2 26 are pushed outward, so that the filter net 1 25 and the filter net 2 26 are separated from the inner cavity of the fixed plate 17 and the fixed plate 2 18, and then the user can remove them, further completing the cleaning function.

[0050] It should be noted that, in this document, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

[0051] Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. A person with ordinary knowledge in the technical field to which the present invention belongs may make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the definition of the claims.

Claims

1. A vacuum system for an ion implanter, comprising: A vacuum processing container (1), characterized in that: The fixing mechanism comprises a fixing rod (2) arranged on one side of a vacuum processing container (1), a cavity (3) is provided inside the fixing rod (2), a motor (4) is fixedly connected to the top of the inner cavity of the cavity (3), a threaded rod (5) is fixedly connected to the output shaft of the motor (4), the bottom end of the threaded rod (5) is rotatably connected to the cavity (3), a threaded sleeve (6) is threadedly connected to the bottom of the surface of the threaded rod (5), a connecting protrusion (7) is fixedly connected to the front side of the threaded sleeve (6), a movable groove (8) used in conjunction with the connecting protrusion (7) is provided on the front side of the fixing rod (2), and the connecting protrusion (7) is fixedly connected to the bottom of the threaded rod (5). The front side of the connecting protrusion (7) penetrates to the outer side of the movable groove 1 (8) and is fixedly connected to a connecting frame (9); a fixing plate (10) is fixedly connected to one side of the vacuum processing container (1); a transverse groove (11) is provided on the top of the fixing plate (10); a locking block (12) is slidably connected to the bottom of the inner cavity of the transverse groove (11); a movable groove 2 (13) for use with the connecting frame (9) is provided on the top of the locking block (12); a vacuum pump box (14) is provided on the opposite side of the two locking blocks (12); locking grooves (15) for use with the locking blocks (12) are provided on both sides of the vacuum pump box (14); The purification mechanism comprises a vacuum connecting pipe (16) connected to a vacuum pump box (14); a fixing plate 1 (17) and a fixing plate 2 (18) are rotatably connected above the inner cavity of the vacuum connecting pipe (16); a storage groove (19) is provided on the top of each of the fixing plates 1 (17) and 18; a through hole (20) is provided at the bottom of the inner cavity of the storage groove (19); an ear plate 1 (21) and an ear plate 2 (22) are respectively fixedly connected to the bottom of each of the fixing plates 1 (17) and 18; a connecting strip (23) is rotatably connected to the surfaces of the ear plate 1 (21) and the ear plate 2 (22); a buckle groove (24) is provided on one side of the top of each of the fixing plates 1 (17) and 18; and a filter screen 1 (25) and a filter screen 2 (26) are sequentially provided in the inner cavity of the storage groove (19) from top to bottom.

2. A vacuum system for an ion implanter according to claim 1, characterized in that: The surface of the fixing rod (2) is provided with a plurality of threaded holes (27) distributed in a rectangular shape, the inner cavity of the threaded hole (27) is threadedly connected with a bolt (28), and the fixing rod (2) is fixedly connected to the vacuum processing container (1) via the bolt (28).

3. The vacuum system for an ion implanter according to claim 1, characterized in that: A plurality of heat dissipation holes (29) distributed at equal intervals are provided on the top of the fixing rod (2), and the inner cavity of the heat dissipation hole (29) is filled with a filter.

4. The vacuum system for an ion implanter according to claim 1, characterized in that: A support plate (30) is fixedly connected to the bottom of the fixed plate (10), and one side of the support plate (30) is fixedly connected to the vacuum processing container (1).

5. The vacuum system for an ion implanter according to claim 1, characterized in that: The front side and the rear side of the bottom of the locking block (12) are both provided with inclined surfaces.

6. The vacuum system for an ion implanter according to claim 1, characterized in that: Limiting grooves (31) are provided on both sides of the inner cavity of the movable groove 2 (13), and the two limiting grooves (31) are slidably connected to limiting blocks (32) on opposite sides, and one side of the limiting blocks (32) is fixedly connected to the connecting frame (9).

7. The vacuum system for an ion implanter according to claim 1, characterized in that: One side of the bottom of the fixing plate 1 (17) and one side of the top of the fixing plate 2 (18) are both provided with grooves.

8. The vacuum system for an ion implanter according to claim 1, characterized in that: The connecting frame (9) is in an inverted "V" shape.

9. The vacuum system for an ion implanter according to claim 1, characterized in that: The aperture of the filter screen 1 (25) is larger than the aperture of the filter screen 2 (26).

10. A process optimization method for a vacuum system for an ion implanter, characterized in that: The method comprises the following steps: Step 1: First, when the user needs to install the vacuum pump box (14), the motor (4) is turned on, and the output shaft of the motor (4) drives the threaded rod (5) to rotate. The threaded rod (5) drives the threaded sleeve (6) to rotate through the connection and transmission of the thread teeth. However, under the coordinated use of the connecting protrusion (7) and the movable groove (8), the threaded rod (5) can only drive the threaded sleeve (6) to move up and down in the vertical direction, and then the threaded sleeve (6) drives the connecting frame (9) to move in the same direction through the connection of the connecting protrusion (7). When the connecting frame (9) moves downward, When moving, it drives the limit block (32) to move downward in the inner cavity of the limit groove (31) and the movable groove (13). As the connecting frame (9) continues to move downward, the angle between it and the vacuum pump box (14) gradually decreases, and the two locking blocks (12) continue to move relative to each other, and then move to the inner cavity of the locking groove (15), so that the vacuum pump box (14) is clamped and fixed by the two locking blocks (12), achieving the purpose of rapid installation and fixing vacuum pump boxes (14) of different models, further improving the scope of application; Step 2: The user first snaps the filter screen 1 (25) and the filter screen 2 (26) into the inner cavity of the storage groove (19) in sequence, and then connects the vacuum connecting pipe (16) to the vacuum pump box (14). After the vacuum pump box (14) is turned on, the gas passing through the vacuum connecting pipe (16) first passes through the filter screen 1 (25) to achieve the first filtration of the gas, and after the large particles of impurities in the gas are removed, the gas passes through the filter screen 2 (26). Compared with the filter screen 1 (25), the pore size of the filter screen 2 (26) is smaller and denser, and the smaller impurities in the gas are filtered again. After the gas is filtered twice, it finally flows through the through hole (20) in the inner cavity of the vacuum connecting pipe (16). After a period of use, the user holds the buckle groove (24) by hand, and uses the buckle groove (24) to fix the fixing plate 1 (17) and the fixing plate The first fixing plate (17) and the second fixing plate (18) are pressed inward, and the first fixing plate (17) and the second fixing plate (18) respectively drive the first ear plate (21) and the second ear plate (22) to rotate in the same direction, and through the connection of the connecting strip (23), the first fixing plate (17) and the second fixing plate (18) are kept in a relatively identical state and move simultaneously, and then the first fixing plate (17) and the second fixing plate (18) respectively rotate with the connecting axis with the vacuum connecting pipe (16) as the center of the circle, and when the first fixing plate (17) and the second fixing plate (18) rotate, due to the change of the placement state of the first fixing plate (17) and the second fixing plate (18), the first filter net (25) and the second filter net (26) are pushed outward, so that the first filter net (25) and the second filter net (26) are separated from the inner cavity of the first fixing plate (17) and the second fixing plate (18), and then the user can remove them, further completing the cleaning function.

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