Coating device and coating method

Abstract

Provided are a coating device and a coating method capable of forming a uniform coating film. According to an embodiment, the coating device includes: a coating rod capable of facing a member to be coated; and a plurality of nozzles capable of supplying liquid toward the coating rod. The number of the plurality of nozzles is 3 or more. The arithmetic mean roughness Ra of at least a portion of the surface of the coating rod is greater than or equal to 0.5 μm and less than or equal to 10 μm.

Description

Technical Field

[0001] Embodiments of the present invention relate to a coating device and a coating method. Background Art

[0002] There is a coating device that uses a coating rod to apply a liquid. A coating device that can form a uniform coating film is desired.

[0003] Prior Art Literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2016-174992 Summary of the invention

[0006] Problems to be solved by the invention

[0007] Embodiments of the present invention provide a coating device and a coating method capable of forming a uniform coating film.

[0008] Solutions to Solve Problems

[0009] According to an embodiment of the present invention, a coating device includes: a coating rod capable of facing a coated member; and a plurality of nozzles capable of supplying liquid toward the coating rod. The number of the plurality of nozzles is 3 or more. The arithmetic mean roughness Ra of at least a portion of the surface of the coating rod is greater than or equal to 0.5 μm and less than or equal to 10 μm. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 (a) and Figure 1 (b) is a schematic diagram illustrating the coating device according to the first embodiment.

[0011] Figure 2 It is a schematic side view illustrating the coating device according to the first embodiment.

[0012] Figure 3 (a) and Figure 3 (b) is a graph illustrating the characteristics of the coating device.

[0013] Figure 4 It is a schematic diagram illustrating the coating device according to the first embodiment.

[0014] Figure 5 It is a schematic diagram illustrating the coating device according to the first embodiment. DETAILED DESCRIPTION

[0015] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0016] In addition, the drawings are schematic or conceptual drawings, and the relationship between the thickness and width of each part, the ratio of the size between the parts, etc. may not be the same as the actual situation. In addition, even when representing the same part, there is a situation where the mutual size and ratio are represented differently according to the drawings.

[0017] In the present specification and each drawing, the same reference numerals are given to the same elements as those described in the drawings that have already appeared, and detailed description thereof will be appropriately omitted.

[0018] (First Embodiment)

[0019] Figure 1 (a) and Figure 1 (b) is a schematic diagram illustrating the coating device according to the first embodiment. Figure 1 (a) is a top view. Figure 1 (b) is a side view. Figure 1 In (b), some elements are omitted for easier viewing.

[0020] Figure 2 It is a schematic side view illustrating the coating device according to the first embodiment.

[0021] like Figure 1 As shown in (a), the coating device 110 of the embodiment includes a coating rod 10 and a plurality of nozzles 21. The plurality of nozzles 21 may be included in the nozzle unit 20.

[0022] like Figure 2 As shown, the coating rod 10 can face the member 80 to be coated.

[0023] like Figure 1 (a) and Figure 2 As shown, a plurality of nozzles 21 can face the coating rod 10. Figure 2 As shown, a plurality of nozzles 21 are capable of supplying liquid 84 toward the applicator rod 10 .

[0024] like Figure 1 As shown in (a), a plurality of nozzles 21 are arranged along a first direction. The first direction is, for example, the Y-axis direction. A direction perpendicular to the Y-axis direction is defined as the X-axis direction. A direction perpendicular to the Y-axis direction and the X-axis direction is defined as the Z-axis direction. The coating rod 10 extends, for example, along the Y-axis direction.

[0025] like Figure 2As shown, a meniscus 84M of the liquid 84 can be formed between the member to be coated 80 and the coating rod 10. The meniscus 84M contacts the member to be coated 80, and a coating film 85 formed of the liquid 84 is formed on the member to be coated 80. By solidifying (for example, drying) the coating film 85, a target film (solid film) can be obtained. For example, by moving the member to be coated 80 along the moving direction 88, a large-area coating film 85 can be formed on the member to be coated 80.

[0026] In the embodiment, the number of the plurality of nozzles 21 is three or more. Thus, a large-area coating film 85 can be stably formed. Figure 1 In the example of (a), the number of the plurality of nozzles 21 is 6. In the embodiment, the number may be any integer greater than 3.

[0027] In the embodiment, the surface 10F of the coating rod 10 is provided with concavoconvex. The concavoconvex can be formed by a method such as sandblasting. By controlling the formation conditions of the concavoconvex, the arithmetic mean roughness Ra of the concavoconvex can be controlled. By controlling the formation conditions of the concavoconvex, the maximum height Rz of the concavoconvex can be controlled. When a method such as sandblasting is used, the formation conditions of the concavoconvex include, for example, at least one of the size of the particles used (e.g., average diameter), the type of particles, and the processing time.

[0028] In the embodiment, the arithmetic mean roughness Ra of the surface 10F of the coating rod 10 is, for example, 0.5 μm or more and 10 μm or less. As can be seen from this, the uneven thickness of the formed coating film 85 can be reduced. For example, by providing the surface 10F of the coating rod 10 with unevenness of appropriate roughness, the wettability of the surface 10F is improved. This is considered to be the reason why the coating film 85 of uniform thickness is easily obtained.

[0029] Figure 3 (a) and Figure 3 (b) is a graph illustrating the characteristics of the coating device.

[0030] Figure 3 The horizontal axis of (a) represents the arithmetic mean roughness Ra of the surface 10F of the coating rod 10 . Figure 3 The horizontal axis of (b) is the maximum height Rz of the irregularities on the surface 10F of the coating rod 10. The vertical axis of these figures is the thickness variation Dz of the solid film obtained by the coating film 85. The thickness variation Dz is the relative standard deviation (%).

[0031] like Figure 3As shown in (a), a small thickness unevenness Dz can be obtained when the arithmetic mean roughness Ra is in the range of about 3 μm to about 8 μm. In practice, a small thickness unevenness Dz can be obtained when the arithmetic mean roughness Ra is in the range of 0.5 μm to 10 μm. When the arithmetic mean roughness Ra is less than 0.5 μm, the thickness unevenness Dz is large. If the arithmetic mean roughness Ra is greater than 10 μm, the coating rod 10 is easily contaminated. If the arithmetic mean roughness Ra is greater than 10 μm, it is difficult to clean the coating rod 10. The arithmetic mean roughness Ra is preferably, for example, in the range of 2 μm to 6 μm.

[0032] It is believed that by providing the unevenness with an arithmetic mean roughness Ra of 0.5 μm or more and 10 μm or less, good wettability can be obtained on the surface 10F of the coating rod 10. It is believed that the thickness unevenness Dz can be reduced by this.

[0033] When the number of the plurality of nozzles 21 is two, the ends of the two nozzles 21 are located on a straight line. This straight line is, for example, along the direction in which the coating rod 10 extends. The relative positions of the two nozzles 21 and the coating rod 10 are easily uniform. Therefore, the appropriate range of the degree of concavity (for example, arithmetic mean roughness Ra) of the surface 10F of the coating rod 10 is relatively wide.

[0034] On the other hand, as already described, in the embodiment, the number of the plurality of nozzles 21 is 3 or more. Thus, a large-area coating film 85 can be obtained. When the number of the plurality of nozzles 21 is 3 or more, it is difficult to make the relative position between each of the plurality of nozzles 21 and the coating rod 10 uniform. In this case, the thickness unevenness Dz can be effectively reduced by an appropriate range of arithmetic mean roughness Ra. By an appropriate range of arithmetic mean roughness Ra, for example, a film of the liquid 84 can be stably formed on the surface of the coating rod 10 by a capillary effect. Thus, it is generally considered that a small thickness unevenness Dz can be obtained.

[0035] like Figure 3 As shown in (b), when the maximum height Rz is within the range of about 10 μm to about 30 μm, a small thickness unevenness Dz can be obtained. In fact, when the maximum height Rz is greater than 5 μm and less than 50 μm, a small thickness unevenness Dz is obtained. If the maximum height Rz is less than 5 μm, for example, the capillary effect is likely to become smaller. If the maximum height Rz is greater than 50 μm, for example, the coating rod 10 is easily contaminated. If the maximum height Rz is greater than 50 μm, for example, the coated member 80 is easily damaged.

[0036] The concavo-convex of the coating rod 10 can also be formed by sandblasting, for example. By sandblasting, uniform concavo-convex can be formed on the curved surface of the coating rod 10. For example, oxidation of the surface 10F of the coating rod 10 is promoted. For example, wettability is easily improved. For example, high hydrophilicity is easily obtained.

[0037] In the embodiment, the coating rod 10 contains metal, for example. The coating rod 10 contains at least one selected from the group consisting of stainless steel, titanium and aluminum. When the coating rod 10 contains stainless steel, high durability is easily obtained. When the coating rod 10 contains stainless steel, it is easy to reduce costs.

[0038] The surface 10F of the coating rod 10 may contain an oxide. For example, the surface 10F may contain aluminum oxide, etc. For example, good wettability is easily obtained.

[0039] The contact angle between the surface 10F of the coating rod 10 and water is, for example, less than 90 degrees. The highly hydrophilic surface 10F makes it easier to obtain a more uniform coating film 85. The contact angle may be 50 degrees or less. The contact angle may be 10 degrees or less.

[0040] In an embodiment, a plurality of nozzles 21 may also be connected to the coating rod 10 .

[0041] like Figure 2 As shown, at least a portion of the plurality of nozzles 21 is located higher than the coating rod 10. Due to the influence of gravity, a more stable meniscus 84M is easily obtained. For example, the plurality of nozzles 21 may also contact the coating rod 10 from the upper portion of the coating rod 10. For example, the liquid 84 is easily supplied stably and uniformly.

[0042] like Figure 1 As shown in (a), the surface 10F of the coating rod 10 includes a first area 10a, a second area 10b and a third area 10c. In the first direction (for example, the Y-axis direction) in which the plurality of nozzles 21 are arranged, the first area 10a is located between the second area 10b and the third area 10c. The first area 10a is an area facing the plurality of nozzles 21. The second area 10b and the third area 10c are areas that are not facing the plurality of nozzles 21. The second area 10b and the third area 10c may also include, for example, the end of the coating rod 10 in the Y-axis direction.

[0043] The arithmetic mean roughness Ra of the first region 10a is greater than 0.5 μm and less than 10 μm. The arithmetic mean roughness Ra of the second region 10b and the third region 10c is less than 0.5 μm or greater than 10 μm. By appropriately setting the arithmetic mean roughness Ra of the first region 10a for coating, a small thickness unevenness Dz can be obtained. For example, in the second region 10b and the third region 10c corresponding to the end, a surface characteristic different from the arithmetic mean roughness Ra of the first region 10a is applied. Thus, it is possible to suppress the liquid 84 from adhering to unnecessary parts. Improve the use efficiency of the liquid 84.

[0044] like Figure 2 As shown, in this example, a plurality of nozzles 21 are connected to a base 22. A supply pipe 25 is connected to the base 22. The liquid 84 is supplied to the base 22 via the supply pipe 25. The liquid 84 is ejected from the plurality of nozzles 21.

[0045] like Figure 2 As shown, in this example, the nozzle 21 is held by the first member 31 and the third member 33. The nozzle 21 is located between the first member 31 and the third member 33. The third member 33 is fixed to the first member 31 by the second member 32. In this example, an elastic member 35 is provided between the third member 33 and the second member 32. The elastic member 35 makes it easy to stabilize the positions of the plurality of nozzles 21. The nozzle portion 20, the first member 31, the second member 32, the third member 33 and the elastic member 35 may also be included in the head portion 30. In the embodiment, the structure related to the holding of the plurality of nozzles 21 may also be variously modified.

[0046] like Figure 1 As shown in (a), the coating device 110 may include a position control unit 40. The position control unit 40 can control the relative positions between the plurality of nozzles 21 and the coating rod 10.

[0047] like Figure 1 (a) and Figure 1 As shown in (b), for example, the position control unit 40 may also include a first holding unit 41 and a second holding unit 42. The first holding unit 41 holds the coating rod 10. The second holding unit 42 holds a plurality of nozzles 21. For example, the first member 31 is held by the second holding unit 42. Thus, the plurality of nozzles 21 held by the first member 31 are held by the second holding unit 42.

[0048] At least one of the first holding portion 41 and the second holding portion 42 may apply stress in at least one of a direction from the coating rod 10 to the nozzles 21 and a direction from the nozzles 21 to the coating rod 10 to at least one of the coating rod 10 and the nozzles 21 .

[0049] In an embodiment, the intervals between the plurality of nozzles 21 may also be variable. Figure 1 (a) corresponds to the distance along the Y-axis direction shown in the example.

[0050] like Figure 1 As shown in (a), the coating device 110 may include first sensors 51a and 51b. The first sensors 51a and 51b detect the distance between the coating rod 10 and the member 80 to be coated, for example.

[0051] like Figure 1 As shown in (a), the coating device 110 may also include a control unit 70. The control unit 70, for example, obtains the detection results of the first sensors 51a and 51b, and controls the position control unit 40 (for example, the first holding unit 41) based on the detection results. The control unit 70 can appropriately control the distance between the coating rod 10 and the coated member 80. The first sensors 51a and 51b, for example, include optical elements. The first sensors 51a and 51b may also include cameras, for example.

[0052] like Figure 1 As shown in (b), the coating device 110 may also include a coated member holding portion 66. The coated member holding portion 66 holds the coated member 80. The coated member holding portion 66 can move the coated member 80 relative to the coating rod 10. The coated member holding portion 66 is, for example, a conveying portion. The coated member holding portion 66 is, for example, a roller. In this example, the coated member holding portion 66 can convey the coated member 80 in a direction intersecting with the direction of gravity GD. The direction of gravity GD is, for example, along the Z-axis direction. The intersecting direction is, for example, the X-axis direction.

[0053] For example, the conveying direction (moving direction 88) is along the horizontal direction. In this case, the direction in which the plurality of nozzles 21 extend is, for example, close to the horizontal direction. Positioning is easy. For example, the drooping of the liquid 84 can be suppressed.

[0054] Figure 4 It is a schematic diagram illustrating the coating device according to the first embodiment.

[0055] like Figure 4 As shown, the coating device 110 includes a coating member holding portion 66. The coating member holding portion 66 holds the coating member 80. The coating member holding portion 66 moves the coating member 80 relative to the coating rod 10. In this example, the coating member holding portion 66 can transport the coating member 80 in a direction 88a including a component opposite to the direction of gravity GD. For example, gravity is applied to the meniscus 84M. Even in high-speed coating, it is easy to obtain a uniform coating film 85.

[0056] In the embodiment, the moving direction of the coating member 80 can be variously deformed. The angle between the moving direction and the direction (direction) of gravity may be, for example, ±30° or less.

[0057] like Figure 4 As shown, the coating device 110 may also include a supply unit 61. The supply unit 61 can supply the liquid 84 to the plurality of nozzles 21. The supply unit 61 includes, for example, a pump 61p. In this example, a tank 65 for storing the liquid 84 is provided. The supply unit 61 is connected to the tank 65. The supply unit 61 is connected to the plurality of nozzles 21 via a supply pipe 25. The liquid 84 is supplied from the supply unit 61 to the plurality of nozzles 21. The liquid 84 is supplied from the plurality of nozzles 21 toward the coating rod 10.

[0058] The supply unit 61 may include a plurality of pumps 61p. The number of the plurality of nozzles 21 is, for example, an integral multiple of the number of the plurality of pumps 61p.

[0059] In an embodiment, the number of the plurality of nozzles 21 may be 12 or more. The number of the plurality of nozzles 21 may be, for example, 12, 16, or 20. The supply pipe 25 connecting the pump 61p and the plurality of nozzles 21 may also have a branch structure. The number of the supply pipes 25 may be, for example, 2, 4, or 8. For example, when the number of the supply pipes 25 is 4, the liquid 84 can be stably and uniformly supplied using a small number of pumps 61p.

[0060] In the embodiment, the pump 61p may include, for example, a diaphragm pump. The diaphragm pump can be applied to the liquid 84 including various solvents.

[0061] Figure 5 It is a schematic diagram illustrating the coating device according to the first embodiment.

[0062] like Figure 5 As shown, in the coating device 111, the coating member holding portion 66 includes a first holding mechanism 66a and a second holding mechanism 66b. In this example, the coating member 80 includes a roll film. The first holding mechanism 66a holds a first portion 80a of the roll film (coated member 80). The second holding mechanism 66b holds a second portion 80b of the roll film (coated member 80). The first holding mechanism 66a and the second holding mechanism 66b are, for example, rollers. It is possible to continuously coat the roll film.

[0063] The cross section of at least a portion of the coating rod 10 on a plane (e.g., an XZ plane) intersecting the first direction (Y-axis direction) in which the plurality of nozzles 21 are arranged may be circular. The cross section may be circular, elliptical, trapezoidal, etc. When the cross section is circular, the manufacture of the coating head becomes simple. When the cross section is circular, it is easy to uniformly maintain the distance between the coated member 80 and the coating rod 10. It is also possible that a portion of the cross section is curved and the other portion of the cross section is linear.

[0064] In an embodiment, the plurality of nozzles 21 may be needle-shaped. In the needle-shaped, the length is longer than the diameter. The openings of the plurality of nozzles 21 may be substantially 90 degrees relative to the direction in which the plurality of nozzles 21 extend. In this case, even when the plurality of nozzles 21 rotate, the relative positional relationship between the openings (ends) of the plurality of nozzles 21 and the coating rod 10 is difficult to change. For example, it is easy to suppress damage to the coating rod 10 caused by at least one of the plurality of nozzles 21.

[0065] The length of the plurality of nozzles 21 may be, for example, not less than 2 cm and not more than 10 cm. The inner diameter of the plurality of nozzles 21 may be, for example, not less than 0.2 mm and not more than 2 mm.

[0066] In the embodiment, a recovery unit may be provided to recover the liquid 84. In the embodiment, a drying unit may be provided to solidify the coating film 85. The drying unit may include, for example, a heater, a blower, or an infrared irradiation unit.

[0067] In the embodiment, a cleaning unit capable of cleaning the coating rod 10 may be provided. The cleaning unit may include a mechanism for spraying or irradiating a solvent. The solvent may contain water, for example. The cleaning unit may include a mechanism for applying ultrasonic waves.

[0068] The coating device of the embodiment can also form a film included in a solar cell, for example. For example, the member to be coated 80 may be a roll-shaped film.

[0069] The following is an example of the experimental results. In the experiment, the coated member 80 is a roll of PET film. The width of the PET film (the length in the Y-axis direction) is 300 mm. A light-transmitting conductive film is formed on the roll of film by a roll-to-roll corresponding sputtering device. The conductive film is a laminated film of ITO / Ag alloy / ITO. The conductive film is patterned into a desired shape.

[0070] The length of one of the plurality of nozzles 21 is about 50 mm. The plurality of nozzles 21 are made of stainless steel. The inner diameter of each of the plurality of nozzles 21 is 0.8 mm. The plurality of nozzles 21 are fixed to the first member 31 by the second member 32 using the third member 33 and the elastic member 35. The supply pipe 25 is connected to the base 22 of the plurality of nozzles 21.

[0071] In the experiment, a PEDOT / PSS aqueous dispersion was used as the liquid 84. From this liquid 84, for example, a hole transport layer of a solar cell can be produced.

[0072] The cross-sectional shape of the coating rod 10 is substantially a trapezoid. The bottom of the cross-sectional shape of the coating rod 10 is an arc shape having a curvature of 80 mm. The length of the coating rod 10 in the Y-axis direction is 300 mm. The material of the coating rod 10 is SUS303.

[0073] In the experiment, the bottom surface of the coating rod 10 and the surface adjacent to the bottom surface were sandblasted. As a result, concavities and convexities were formed on the surface 10F of the coating rod 10. Depending on the treatment conditions, various characteristics can be obtained on the surface 10F of the coating rod 10. Alternatively, various concavities and convexities can be formed on the surface 10F by various surface treatments.

[0074] The coating rod 10 under various conditions was used to apply the liquid 84. Thus, a coating film 85 was obtained. The coating film 85 was dried to obtain the target film. The thickness variation Dz was evaluated based on the distribution of the absorbance of the film.

[0075] In the first sample, the arithmetic mean roughness Ra of the surface 10F of the coating rod 10 is 3.2 μm. The maximum height Rz of the concavities and convexities is 20 μm. The surface 10F is uniform when visually observed. The contact angle with water on the surface 10F is about 5 degrees. In the first sample, the thickness unevenness Dz is less than 10%.

[0076] In the second sample, the surface of the coating rod 10 was not subjected to sandblasting. In the second sample, the arithmetic mean roughness Ra was 0.4 μm. The maximum height Rz of the concavities and convexities was 10 μm. In the second sample, the thickness variation Dz was 20% or more.

[0077] In the third sample, the arithmetic mean roughness Ra was 12 μm. The maximum height Rz of the concavities and convexities was 70 μm. In the third sample, the thickness variation Dz was 15% or more. In the third sample, the coating rod 10 was easily contaminated and difficult to clean.

[0078] In the fourth sample, the arithmetic mean roughness Ra was 0.006 μm, the maximum height Rz of the concavities and convexities was 10 μm, and the thickness variation Dz was 30% or more in the fourth sample.

[0079] In the fifth sample, the arithmetic mean roughness Ra was 4.3 μm. The maximum height Rz of the concavities and convexities was 25 μm. In the fifth sample, the thickness variation Dz was 10% or less. In the first to fifth samples, the material of the coating rod 10 was stainless steel.

[0080] In the sixth sample, the material of the coating rod 10 is aluminum. In the fifth sample, the arithmetic mean roughness Ra is 8 μm. The maximum height Rz of the concavities and convexities is 30 μm. In the fifth sample, the thickness variation Dz is 12% or less.

[0081] (Second Embodiment)

[0082] The second embodiment relates to a coating method. In the coating method, a liquid 84 is applied to a member 80 to be coated using any coating device according to the first embodiment. A uniform coating film 85 can be formed.

[0083] For example, there are organic thin film solar cells or organic / inorganic hybrid solar cells using organic semiconductors. For example, by forming the layers contained in the solar cell by coating, a low-cost solar cell can be obtained. According to an embodiment, a uniform coating film can be obtained by, for example, roll-to-roll coating. In an embodiment, for example, a meniscus 84M is formed between the coating rod 10 and the coated member 80. A uniform coating film 85 can be obtained by the coating rod 10 with an appropriate surface state.

[0084] The implementation may also include the following structures (for example, technical solutions).

[0085] (Structure 1)

[0086] A coating device, characterized in that

[0087] The coating device has:

[0088] A coating rod capable of facing the component to be coated; and

[0089] a plurality of nozzles capable of supplying liquid toward the coating rod,

[0090] The number of the plurality of nozzles is 3 or more,

[0091] The arithmetic mean roughness Ra of at least a portion of the surface of the coating rod is 0.5 μm or more and 10 μm or less.

[0092] (Structure 2)

[0093] The coating device according to structure 1 is characterized in that

[0094] said at least a portion of said surface comprises asperities,

[0095] The maximum height Rz of the concavo-convex is 5 μm or more and 50 μm or less.

[0096] (Structure 3)

[0097] The coating device according to structure 1 or 2 is characterized in that:

[0098] The coating rod includes at least one selected from the group consisting of stainless steel, titanium, and aluminum.

[0099] (Structure 4)

[0100] The coating device according to any one of Structures 1 to 3 is characterized in that:

[0101] The surface comprises an oxide.

[0102] (Structure 5)

[0103] The coating device according to any one of Structures 1 to 4 is characterized in that:

[0104] The contact angle of the surface with respect to water is less than 90 degrees.

[0105] (Structure 6)

[0106] The coating device according to any one of Structures 1 to 5 is characterized in that:

[0107] A meniscus of the liquid can be formed between the member to be coated and the coating rod.

[0108] (Structure 7)

[0109] The coating device according to any one of Structures 1 to 6 is characterized in that:

[0110] The plurality of nozzles are connected to the coating rod.

[0111] (Structure 8)

[0112] The coating device according to any one of Structures 1 to 7 is characterized in that:

[0113] At least a portion of the plurality of nozzles is located higher than the coating rod.

[0114] (Structure 9)

[0115] The coating device according to any one of Structures 1 to 8 is characterized in that:

[0116] The coating device further includes a member-to-be-coated holding portion that holds the member-to-be-coated and is capable of moving the member-to-be-coated relative to the coating rod.

[0117] The member-to-be-coated holding unit can convey the member to be coated in a direction including a component opposite to the direction of gravity.

[0118] (Structure 10)

[0119] The coating device according to any one of Structures 1 to 8 is characterized in that:

[0120] The coating device further includes a member-to-be-coated holding portion that holds the member-to-be-coated and is capable of moving the member-to-be-coated relative to the coating rod.

[0121] The member-to-be-coated holding unit can convey the member to be coated in a first direction intersecting with the direction of gravity.

[0122] (Structure 11)

[0123] The coating device according to structure 9 or 10 is characterized in that:

[0124] The coated member includes a rolled film,

[0125] The coated component holding portion includes:

[0126] a first holding mechanism for holding a first portion of the rolled film; and

[0127] The second holding mechanism holds the second portion of the rolled film.

[0128] (Structure 12)

[0129] The coating device according to any one of structures 9 to 11 is characterized in that:

[0130] The coating device further includes a supply unit that supplies the liquid to the plurality of nozzles.

[0131] (Structure 13)

[0132] The coating device according to structure 12 is characterized in that

[0133] The supply unit includes a plurality of pumps.

[0134] The number of the plurality of nozzles is an integer multiple of the number of the plurality of pumps.

[0135] (Structure 14)

[0136] The coating device according to any one of Structures 1 to 13 is characterized in that:

[0137] The number is 12 or more.

[0138] (Structure 15)

[0139] The coating device according to any one of Structures 1 to 14 is characterized in that:

[0140] A cross section of at least a portion of the coating rod on a plane intersecting a first direction in which the plurality of nozzles are arranged is circular.

[0141] (Structure 16)

[0142] The coating device according to any one of Structures 1 to 15 is characterized in that:

[0143] The surface comprises a first area, a second area and a third area,

[0144] In the first direction in which the plurality of nozzles are arranged, the first area is located between the second area and the third area,

[0145] The arithmetic mean roughness Ra of the first region is greater than or equal to 0.5 μm and less than or equal to 10 μm,

[0146] The arithmetic mean roughness Ra of the second region and the third region is less than 0.5 μm or exceeds 10 μm.

[0147] (Structure 17)

[0148] The coating device according to any one of Structures 1 to 16 is characterized in that:

[0149] The coating device further includes a position control unit capable of controlling relative positions between the plurality of nozzles and the coating rod.

[0150] (Structure 18)

[0151] The coating device according to structure 17 is characterized in that

[0152] The position control unit comprises:

[0153] a first holding portion for holding the coating rod; and

[0154] a second holding portion, holding the plurality of nozzles,

[0155] At least one of the first holding portion and the second holding portion can apply stress to at least one of the coating rod and the plurality of nozzles, the stress having at least one of a direction from the coating rod toward the plurality of nozzles and a direction from the plurality of nozzles toward the coating rod.

[0156] (Structure 19)

[0157] The coating device according to any one of Structures 1 to 18 is characterized in that:

[0158] The intervals between the plurality of nozzles are variable.

[0159] (Structure 20)

[0160] 20. A coating method, characterized in that:

[0161] The liquid is applied to the member to be applied by the coating device according to any one of structures 1 to 19.

[0162] According to the embodiment, a coating device and a coating method capable of forming a uniform coating film are provided.

[0163] The embodiments of the present invention are described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, as long as a person skilled in the art can appropriately select from the known range to implement the present invention in the same manner and obtain the same effect, the specific structure of each element such as the coating rod and the nozzle included in the coating device is included in the scope of the present invention.

[0164] Furthermore, any combination of two or more elements of each specific example within the technically possible range is also included in the scope of the present invention as long as the gist of the present invention is included.

[0165] Furthermore, as embodiments of the present invention, all coating devices and coating methods that can be implemented by those skilled in the art by appropriately changing the design based on the above-mentioned coating device and coating method also belong to the scope of the present invention as long as they include the gist of the present invention.

[0166] Furthermore, within the scope of the concept of the present invention, those skilled in the art can conceive of various changes and modifications, and these changes and modifications also belong to the scope of the present invention.

[0167] Although several embodiments of the present invention have been described, these embodiments are described as examples and are not intended to limit the scope of the invention. These new embodiments can be implemented in various other ways, and various omissions, substitutions, and changes can be made without departing from the scope of the subject matter of the invention. These embodiments and their variations are included in the scope and subject matter of the invention, and are included in the invention described in the claims and the scope of their equivalents.

[0168] Description of Reference Numerals

[0169] 10 ... coating rod, 10F ... surface, 10a to 10c ... first to third regions, 20 ... nozzle portion, 21 ... nozzle, 22 ... base portion, 25 ... supply tube, 30 ... head portion, 31 to 33 ... first to third members, 35 ... elastic member, 40 ... position control portion, 41, 42 ... first and second holding portions, 51a, 51b ... first sensor, 52a, 52b ... second sensor, 61 ... supply portion, 61p ... pump, 65…tank, 66…coated member holding portion, 66a, 66b…first and second holding mechanisms, 70…control portion, 80…coated member, 80a, 80b…first and second portions, 84…liquid, 84M…meniscus, 85…coating film, 88…moving direction, 88a…direction, 110, 111…coating device, Dz…thickness unevenness, GD…gravity, Ra…arithmetic mean roughness, Rz…maximum height.

Claims

1. A coating device, characterized in that: The coating device has: A coating rod capable of facing the component to be coated; and a plurality of nozzles capable of supplying liquid toward the coating rod, The number of the plurality of nozzles is 3 or more, The arithmetic mean roughness Ra of at least a portion of the surface of the coating rod is 0.5 μm or more and 10 μm or less, The coating rod comprises at least one selected from stainless steel, titanium and aluminum, The surface comprises an oxide of at least one selected from stainless steel, titanium and aluminum, The contact angle of the surface with respect to water is 50 degrees or less.

2. The coating device according to claim 1, characterized in that: said at least a portion of said surface comprises asperities, The maximum height Rz of the concavo-convex is 5 μm or more and 50 μm or less.

3. The coating device according to claim 1, characterized in that A meniscus of the liquid can be formed between the member to be coated and the coating rod.

4. The coating device according to claim 1, characterized in that The plurality of nozzles are connected to the coating rod.

5. The coating device according to claim 1, characterized in that At least a portion of the plurality of nozzles is located higher than the coating rod.

6. The coating device according to claim 1, characterized in that The coating device further includes a member-to-be-coated holding portion capable of holding the member-to-be-coated and enabling the member-to-be-coated to move relative to the coating rod. The member-to-be-coated holding portion can convey the member to be coated in a direction including a component opposite to a direction of gravity.

7. The coating device according to claim 1, characterized in that The coating device further includes a member-to-be-coated holding portion capable of holding the member-to-be-coated and enabling the member-to-be-coated to move relative to the coating rod. The member-to-be-coated holding portion can convey the member to be coated in a first direction intersecting with the direction of gravity.

8. The coating device according to claim 6, characterized in that The coated member includes a rolled film, The coated component holding portion includes: a first holding mechanism for holding a first portion of the rolled film; and The second holding mechanism holds the second portion of the rolled film.

9. The coating device according to claim 6, characterized in that: The coating device further includes a supply unit that supplies the liquid to the plurality of nozzles.

10. The coating device according to claim 9, characterized in that The supply unit includes a plurality of pumps. The number of the plurality of nozzles is an integer multiple of the number of the plurality of pumps.

11. The coating device according to claim 1, characterized in that The number is 12 or more.

12. The coating device according to claim 1, characterized in that A cross section of at least a portion of the coating rod on a plane intersecting a first direction in which the plurality of nozzles are arranged is circular.

13. The coating device according to claim 1, characterized in that The surface comprises a first area, a second area and a third area, In the first direction in which the plurality of nozzles are arranged, the first area is located between the second area and the third area, The arithmetic mean roughness Ra of the first region is greater than or equal to 0.5 μm and less than or equal to 10 μm, The arithmetic mean roughness Ra of the second region and the third region is less than 0.5 μm or exceeds 10 μm.

14. The coating device according to claim 1, characterized in that The coating device further includes a position control unit capable of controlling relative positions between the plurality of nozzles and the coating rod.

15. The coating device according to claim 14, characterized in that The position control unit comprises: a first holding portion for holding the coating rod; and a second holding portion, holding the plurality of nozzles, At least one of the first holding portion and the second holding portion can apply stress to at least one of the coating rod and the plurality of nozzles, the stress having at least one of a direction from the coating rod toward the plurality of nozzles and a direction from the plurality of nozzles toward the coating rod.

16. The coating device according to claim 1, characterized in that The intervals between the plurality of nozzles are variable.

17. A coating method, characterized in that: The coating device according to claim 1 is used to apply liquid to a member to be coated.

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