Online pure water heater

Abstract

The present invention discloses an online pure water heater, which has a heating box body for continuous circulation of pure water; a water inlet pipe and a water outlet pipe, which are respectively arranged at the bottom and the top of the side wall of the heating box body; a baffle cavity layer for continuous circulation of pure water, with a total of n layers, which are stacked and formed in the heating box body, and a rod cavity, wherein a plurality of rod cavities are arranged in parallel in the baffle cavity layer; heating rods, and each rod cavity is detachably penetrated with a heating rod. By arranging a baffle cavity layer with continuous circulation in the heating box body, the present invention forms a pure water circulation channel with reciprocating folding, so as to obtain a continuous supply of hot pure water.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor equipment, and further relates to an online pure water heater. Background Art

[0002] During the production and processing of silicon wafers, it is usually necessary to cool the heated wafers, and the cooling of the wafers is also carried out in stages with pure water at different temperatures. For pure water at 80°C, in the prior art, pure water is usually directly heated after being injected into a water tank. When heating water in this way, it is necessary to repeatedly inject water, heat, and then drain the water, and it is impossible to continuously obtain effective pure water in real time. Moreover, due to the material of the heating rod of the heater, even when heating pure water without impurities, a layer of scale will form on the surface of the heating rod after long-term use, and the scale will enter the pure water, thus affecting the cleanliness of the pure water. Summary of the Invention

[0003] Aiming at the technical problem that high-temperature pure water cannot be continuously obtained in real time in the prior art, the purpose is to provide a new online pure water heater.

[0004] An online pure water heater of the present invention has:

[0005] A heating box body for continuous circulation of pure water;

[0006] An inlet pipe and an outlet pipe, which are respectively arranged at the bottom and top of the side wall of the heating box body;

[0007] A baffle chamber layer for continuous circulation of pure water, with a total of n layers, formed in a stacked manner in the heating box body. Among them, the head end of the first-layer baffle chamber is communicated with the inlet pipe, the tail end of the i-th layer baffle chamber layer is communicated with the head end of the (i + 1)-th layer baffle chamber layer, and the tail end of the n-th layer baffle chamber layer is communicated with the outlet pipe, where 1 ≤ i ≤ n - 1 and n is a positive integer greater than or equal to 2;

[0008] Rod chambers, where M i rod chambers are arranged in parallel in the i-th layer baffle chamber layer, M i is an integer greater than or equal to 0, and M n rod chambers are arranged in parallel in the n-th layer baffle chamber layer, where M n is an integer greater than or equal to 0;

[0009] Heating rods, and one heating rod is detachably inserted into each rod chamber.

[0010] By providing an online pure water heater, the present invention sets a baffle chamber layer for continuous circulation in the heating box body, thereby forming a pure water circulation channel for reciprocating folding, so that continuously flowing hot pure water can be obtained in real time.

[0011] Preferably,

[0012] The heating box body has opposite first inner side walls and second inner side walls, as well as opposite top walls and bottom walls;

[0013] The pure water on-line heater further includes n - 1 layers of baffles. One end of the odd-numbered layers of baffles is vertically fixed on the first inner side wall of the heating box body, and one end of the even-numbered layers of baffles is vertically fixed on the second inner side wall of the heating box body, thus forming n layers of baffle chambers. That is, a first layer of baffle chamber is formed between the first layer of baffle and the bottom wall of the heating box body, a (i + 1)-th layer of baffle chamber is formed between the i-th layer of baffle and the (i + 1)-th layer of baffle, and an n-th layer of baffle chamber is formed between the (n - 1)-th layer of baffle and the top wall of the heating box body.

[0014] Preferably, the heating rod is an IR infrared heating quartz tube; the rod cavity is also an inner cavity made of quartz tube. One end of the rod cavity is an installation port, and the heating rod is inserted from the installation port. A gap is left between the heating rod and the cavity wall of the rod cavity.

[0015] Among them, M i is an integer from 2 to 10, preferably from 4 to 8. Preferably, M1 is 4, M i is 8, where 2 ≤ i ≤ n - 1; M i rod cavities in each layer of baffle chamber are arranged in upper and lower layers, M n is 0, and n is 5.

[0016] The positive and progressive effects of the present invention are as follows:

[0017] 1) By arranging continuously flowing baffle chambers in the heating box body, the present invention forms a reciprocating and turning-back pure water flow channel, so as to obtain a continuous supply of hot pure water;

[0018] 2) By arranging an inner cavity made of quartz tube and an IR infrared heating quartz tube to heat pure water, the present invention can well avoid the generation of long-term water scale;

[0019] 3) The heating rod of the infrared heating quartz tube is detachably inserted into the rod cavity made of quartz tube, which is convenient for the replacement and maintenance of the heating rod, and avoids the situation that the pure water conducts electricity due to the direct heating of the pure water by the heating rod;

[0020] 4) Each heating rod of the present invention is controlled separately. According to the amount of water and the required temperature, the corresponding number of heating rods is started, and the target temperature can be arbitrarily controlled according to the amount of water;

[0021] 5) A gap is left between the heating rod and the rod cavity, which is safer to avoid the risk of the rod cavity made of quartz tube conducting electricity due to the presence of water. The heating rod exchanges heat with the pure water through the air in the gap, which can improve the temperature uniformity of the continuously flowing out pure water and prevent it from being alternately hot and cold. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 FIG. 1 is a top view structural schematic diagram of the pure water on-line heater of the present invention;

[0023] Figure 2 FIG. 2 is a side view structural schematic diagram of the pure water on-line heater of the present invention;

[0024] Figure 3 FIG. 3 is another side view structural schematic diagram of the pure water on-line heater of the present invention;

[0025] Figure 4 FIG. 4 is a sectional view structural schematic diagram of the pure water on-line heater of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0026] The following describes the embodiments of the present invention through specific examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0027] As Figures 1 to 4 shown, the pure water on-line heater of the present invention has a heating box body 10, which is a hollow box with a substantially rectangular parallelepiped structure, and pure water can continuously flow in the heating box body 10. The heating box body 10 has opposite first inner sidewalls and second inner sidewalls, as well as opposite top and bottom walls. At the bottom of the sidewall of the heating box body 10, there is a water inlet pipe 11, and cold pure water flows in from the water inlet pipe 11. At the top of the sidewall of the heating box body 10, there is a water outlet pipe 12, and the heated pure water flows out from the water outlet pipe 12. Since the density of cold water is high and the specific gravity is large, the water inlet pipe 11 is arranged at the bottom of the heating box body 10, and the pure water is continuously heated during the flow in the heating box body 10. The density of the heated water is low and the specific gravity is small, so that the upward flow of hot water can be accelerated. Therefore, the water outlet pipe 12 is arranged at the top of the heating box body 10.

[0028] There are a total of n layers of baffle cavity layers 13 in the heating box body 10, which are formed in a stacked manner in the heating box body, and pure water continuously flows upward layer by layer in each baffle cavity layer. Among them, the first layer of baffle cavity layer, that is, the bottommost baffle cavity layer, has its head end connected to the water inlet pipe 11, the tail end of the i-th layer of baffle cavity layer is connected to the head end of the (i + 1)-th layer of baffle cavity layer, and the tail end of the n-th layer of baffle cavity layer, that is, the topmost baffle cavity layer, is connected to the water outlet pipe, where 1 ≤ i ≤ n - 1 and n is a positive integer ≥ 2. In the figure of this example, n is 5.

[0029] Inside the heating box body 10, there is a rod cavity 14. A heating rod 15 is detachably installed in the rod cavity 14, and a heating rod 15 is detachably inserted through each rod cavity 14. Each heating rod 15 can be individually controlled, so that the number of enabled heating rods can be appropriately increased or decreased according to the water volume and the target temperature. And multiple rod cavities can be provided in each baffle cavity layer 13. For example, M i rod cavities are arranged in parallel in the i-th baffle cavity layer, and M i is an integer greater than or equal to 0. M n rod cavities are arranged in parallel in the n-th baffle cavity layer, where M n is an integer greater than or equal to 0, that is, there is at least 1 rod cavity in all baffle cavity layers 13. In the preferred example shown in the figure, where M i is an integer from 2 to 10, preferably from 4 to 8. Preferably, M1 is 4, that is, there are 4 rod cavities 14 in the bottommost layer, that is, the first baffle cavity layer, and 4 heating rods can be inserted. M i is 8, where 2 ≤ i ≤ n - 1. The M i rod cavities in each baffle cavity layer are arranged in upper and lower layers, that is, there are 8 rod cavities in the middle baffle cavity layer 13. The 8 rod cavities are arranged in upper and lower layers, with 4 rod cavities in each layer, and one heating rod is inserted into each rod cavity; M n is 0, that is, there is no rod cavity in the topmost layer. The heating rod 15 can be an IR infrared heating quartz tube, and scale formation can be avoided after long-term use of the infrared heating quartz tube; the rod cavity 14 is also an inner cavity made of quartz tube. One end of the rod cavity 14 is an installation port 141, and the heating rod 15 is inserted from the installation port 141. The rod cavity 14 can initially isolate the heating rod 15 from pure water and improve the heating safety; there is a layer of gap 142 between the heating rod 15 and the cavity wall of the rod cavity 14, and heat exchange is carried out between the pure water in the heating box body 10 through the air in the heating rod cavity. This can not only further avoid the occurrence of pure water conducting electricity, but also better evenly heat the pure water and improve the evenness of the temperature of continuous online water output.

[0030] The pure water online heater further includes n - 1 layers of baffles 16. Among them, one end of the odd-numbered layer of baffles is vertically fixed on the first inner side wall of the heating box body 10, and one end of the even-numbered layer of baffles is vertically fixed on the second inner side wall of the heating box body 10, thus forming n baffle cavity layers 13. That is, the first baffle cavity layer is formed between the first layer of baffle and the bottom wall of the heating box body 10, the (i + 1)-th baffle cavity layer is formed between the i-th baffle and the (i + 1)-th baffle, and the n-th baffle cavity layer is formed between the (n - 1)-th baffle and the top wall of the heating box body 10.

[0031] The pure water on-line heater of the present invention can continuously produce pure hot water, with the water temperature reaching 80 °C. According to the different water temperatures to be heated, the activation of the heating rod can be controlled separately. Moreover, IR infrared quartz tube heating is used to avoid the formation of water scale without affecting the purity of the pure water.

[0032] The specific embodiments described herein are merely illustrative of the spirit of the present invention. Those skilled in the art to which the present invention pertains can make various modifications or supplements to the described specific embodiments or use similar methods for substitution, but will not deviate from the spirit of the present invention or exceed the scope defined by the appended claims.

Claims

1. An online pure water heater, characterized in that It has: A heating box for continuous circulation of pure water; An inlet pipe and an outlet pipe, respectively arranged at the bottom and top of the side wall of the heating box; A baffle chamber layer for continuous circulation of pure water, with a total of n layers, formed in a stacked manner in the heating box. Among them, the head end of the first layer of baffle chamber is connected to the inlet pipe, the tail end of the i-th layer of baffle chamber layer is connected to the head end of the (i + 1)-th layer of baffle chamber layer, and the tail end of the n-th layer of baffle chamber layer is connected to the outlet pipe, where 1 ≤ i ≤ n - 1 and n is a positive integer ≥ 2; Rod cavities, where M rod cavities are arranged in parallel within the i-th baffle cavity layer i , M i is an integer greater than or equal to 2 and less than or equal to 10, and M rod cavities are arranged in parallel within the n-th baffle cavity layer n , where M n is an integer greater than or equal to 0; Heating rods, with one heating rod detachably inserted into each rod chamber; Among them, the heating rod is an infrared heating quartz tube, the rod chamber is also an inner cavity made of quartz tube, and there is a layer of gap between the heating rod and the cavity wall of the rod chamber.

2. The pure water on-line heater according to claim 1, characterized in that The heating box has opposite first inner side wall and second inner side wall, as well as opposite top wall and bottom wall; The pure water on-line heater further includes n - 1 layers of baffles. Among them, one end of the odd-numbered layer of baffles is vertically fixed on the first inner side wall of the heating box, and one end of the even-numbered layer of baffles is vertically fixed on the second inner side wall of the heating box, thus forming n layers of baffle chamber layers.

3. The online pure water heater according to claim 1, characterized in that One end of the rod chamber is an installation opening, and the heating rod is inserted from the installation opening.

4. The online pure water heater according to claim 1, wherein M i is an integer from 4 to 8.

5. The online pure water heater according to claim 1, wherein M1 is 4, M i is 8, where 2 ≤ i ≤ n - 1; the M i rod cavities in each baffle cavity layer are arranged in upper and lower layers, M n is 0, and n is 5.

6. The online pure water heater according to claim 1, characterized in that The heating rods are electrically controlled separately.

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